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.mbox-text{border:none;padding:0.25em 0.5em;width:100%}.mw-parser-output .ambox .mbox-image{border:none;padding:2px 0 2px 0.5em;text-align:center}.mw-parser-output .ambox .mbox-imageright{border:none;padding:2px 0.5em 2px 0;text-align:center}.mw-parser-output .ambox .mbox-empty-cell{border:none;padding:0;width:1px}.mw-parser-output .ambox .mbox-image-div{width:52px}@media(min-width:720px){.mw-parser-output .ambox{margin:0 10%}}@media print{body.ns-0 .mw-parser-output .ambox{display:none!important}}</style><table class="box-Update plainlinks metadata ambox ambox-content ambox-Update" role="presentation"><tbody><tr><td class="mbox-image"><div class="mbox-image-div"><span typeof="mw:File"><span><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/5/53/Ambox_current_red_Americas.svg/42px-Ambox_current_red_Americas.svg.png" decoding="async" width="42" height="34" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/5/53/Ambox_current_red_Americas.svg/63px-Ambox_current_red_Americas.svg.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/5/53/Ambox_current_red_Americas.svg/84px-Ambox_current_red_Americas.svg.png 2x" data-file-width="360" data-file-height="290" /></span></span></div></td><td class="mbox-text"><div class="mbox-text-span">Parts of this article (those related to the current state of the art) need to be <b>updated</b>.<span class="hide-when-compact"> Please help update this article to reflect recent events or newly available information.</span> <span class="date-container"><i>(<span class="date">September 2020</span>)</i></span></div></td></tr></tbody></table> <figure class="mw-default-size" typeof="mw:File/Thumb"><a href="/wiki/File:Aerial_photograph_of_Globalfoundries_Dresden.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/9/95/Aerial_photograph_of_Globalfoundries_Dresden.jpg/220px-Aerial_photograph_of_Globalfoundries_Dresden.jpg" decoding="async" width="220" height="159" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/9/95/Aerial_photograph_of_Globalfoundries_Dresden.jpg/330px-Aerial_photograph_of_Globalfoundries_Dresden.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/9/95/Aerial_photograph_of_Globalfoundries_Dresden.jpg/440px-Aerial_photograph_of_Globalfoundries_Dresden.jpg 2x" data-file-width="2000" data-file-height="1445" /></a><figcaption><a href="/wiki/GlobalFoundries" title="GlobalFoundries">GlobalFoundries</a> Fab 1 in Dresden, Germany. The large rectangles house large cleanrooms.</figcaption></figure> <style data-mw-deduplicate="TemplateStyles:r1257001546">.mw-parser-output .infobox-subbox{padding:0;border:none;margin:-3px;width:auto;min-width:100%;font-size:100%;clear:none;float:none;background-color:transparent}.mw-parser-output .infobox-3cols-child{margin:auto}.mw-parser-output .infobox .navbar{font-size:100%}@media screen{html.skin-theme-clientpref-night .mw-parser-output .infobox-full-data:not(.notheme)>div:not(.notheme)[style]{background:#1f1f23!important;color:#f8f9fa}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .infobox-full-data:not(.notheme) div:not(.notheme){background:#1f1f23!important;color:#f8f9fa}}@media(min-width:640px){body.skin--responsive .mw-parser-output .infobox-table{display:table!important}body.skin--responsive .mw-parser-output .infobox-table>caption{display:table-caption!important}body.skin--responsive .mw-parser-output .infobox-table>tbody{display:table-row-group}body.skin--responsive .mw-parser-output .infobox-table tr{display:table-row!important}body.skin--responsive .mw-parser-output .infobox-table th,body.skin--responsive .mw-parser-output .infobox-table td{padding-left:inherit;padding-right:inherit}}</style><table class="infobox" style="width: 250px; clear: right; float:right;margin:0 0 1.5em 1.5em"><tbody><tr><th colspan="2" class="infobox-above" style="font-size:115%">External image</th></tr><tr><td colspan="2" class="infobox-full-data" style="text-align: left"><span typeof="mw:File"><span><img alt="image icon" src="//upload.wikimedia.org/wikipedia/en/thumb/6/61/Searchtool.svg/16px-Searchtool.svg.png" decoding="async" width="16" height="16" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/6/61/Searchtool.svg/24px-Searchtool.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/6/61/Searchtool.svg/32px-Searchtool.svg.png 2x" data-file-width="512" data-file-height="512" /></span></span> <a rel="nofollow" class="external text" href="https://www.tsmc.com/img/photoGallery/fabs_in/Fab12inc046.jpg">Photo of the interior of a clean room of a 300mm fab</a> run by <a href="/wiki/TSMC" title="TSMC">TSMC</a></td></tr></tbody></table> <p>In the <a href="/wiki/Microelectronics" title="Microelectronics">microelectronics</a> industry, a <b>semiconductor fabrication plant</b> (commonly called a <b>fab</b>; sometimes <b>foundry</b>) is a factory for <a href="/wiki/Semiconductor_device_fabrication" title="Semiconductor device fabrication">semiconductor device fabrication</a>.<sup id="cite_ref-1" class="reference"><a href="#cite_note-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </p><p>Fabs require many expensive devices to function. Estimates put the cost of building a new fab at over one billion <a href="/wiki/United_States_dollars" class="mw-redirect" title="United States dollars">U.S. dollars</a> with values as high as $3–4 billion not being uncommon. <a href="/wiki/TSMC" title="TSMC">TSMC</a> invested $9.3 billion in its <i>Fab15</i> 300 mm <a href="/wiki/Wafer_(electronics)" title="Wafer (electronics)">wafer</a> manufacturing facility in Taiwan.<sup id="cite_ref-2" class="reference"><a href="#cite_note-2"><span class="cite-bracket">[</span>2<span class="cite-bracket">]</span></a></sup> The same company estimations suggest that their future fab might cost $20 billion.<sup id="cite_ref-3" class="reference"><a href="#cite_note-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> A <a href="/wiki/Foundry_model" title="Foundry model">foundry model</a> emerged in the 1990s: Foundries that produced their own designs were known as <a href="/wiki/Integrated_device_manufacturer" title="Integrated device manufacturer">integrated device manufacturers</a> (IDMs). Companies that farmed out manufacturing of their designs to foundries were termed <a href="/wiki/Fabless_semiconductor_company" class="mw-redirect" title="Fabless semiconductor company">fabless semiconductor companies</a>. Those foundries, which did not create their own designs, were called <a href="/wiki/Pure-play_semiconductor_foundry" class="mw-redirect" title="Pure-play semiconductor foundry">pure-play semiconductor foundries</a>.<sup id="cite_ref-4" class="reference"><a href="#cite_note-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup> </p><p>The central part of a fab is the <a href="/wiki/Clean_room" class="mw-redirect" title="Clean room">clean room</a>, an area where the environment is controlled to eliminate all dust, since even a single speck can ruin a microcircuit, which has nanoscale features much smaller than dust particles. The clean room must also be damped against vibration to enable nanometer-scale alignment of machines and must be kept within narrow bands of temperature and humidity. Vibration control may be achieved by using deep piles in the cleanroom's foundation that anchor the cleanroom to the bedrock, careful selection of the construction site, and/or using vibration dampers. Controlling temperature and humidity is critical for minimizing <a href="/wiki/Static_electricity" title="Static electricity">static electricity</a>. Corona discharge sources can also be used to reduce static electricity. Often, a fab will be constructed in the following manner (from top to bottom): the roof, which may contain air handling equipment that draws, purifies and cools outside air, an air plenum for distributing the air to several floor-mounted <a href="/wiki/Fan_filter_unit" title="Fan filter unit">fan filter units</a>, which are also part of the cleanroom's ceiling, the cleanroom itself, which may or may not have more than one story, <sup id="cite_ref-5" class="reference"><a href="#cite_note-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> a return air plenum, the clean subfab that may contain support equipment for the machines in the cleanroom such as chemical delivery, purification, recycling and destruction systems, and the ground floor, that may contain electrical equipment. Fabs also often have some office space. </p><p>The clean room is where all fabrication takes place and contains the machinery for integrated circuit production such as <a href="/wiki/Stepper" title="Stepper">steppers</a> and/or scanners for <a href="/wiki/Photolithography" title="Photolithography">photolithography</a>, in addition to <a href="/wiki/Etching_(microfabrication)" title="Etching (microfabrication)">etching</a>, cleaning, <a href="/wiki/Doping_(semiconductors)" class="mw-redirect" title="Doping (semiconductors)">doping</a> and <a href="/wiki/Wafer_dicing" class="mw-redirect" title="Wafer dicing">dicing</a> machines. All these devices are extremely precise and thus extremely expensive. Prices for most common pieces of equipment for the processing of 300 mm wafers range from $700,000 to upwards of $4,000,000 each with a few pieces of equipment reaching as high as $340,000,000 each (e.g. <a href="/wiki/Extreme_ultraviolet_lithography" title="Extreme ultraviolet lithography">EUV</a> scanners). A typical fab will have several hundred equipment items. </p> <meta property="mw:PageProp/toc" /> <div class="mw-heading mw-heading2"><h2 id="History">History</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Semiconductor_fabrication_plant&action=edit&section=1" title="Edit section: History"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Typically an advance in chip-making technology requires a completely new fab to be built. In the past, the equipment to outfit a fab was not very expensive and there were a huge number of smaller fabs producing chips in small quantities. However, the cost of the most up-to-date equipment has since grown to the point where a new fab can cost several billion dollars. </p><p>Another side effect of the cost has been the challenge to make use of older fabs. For many companies these older fabs are useful for producing designs for unique markets, such as <a href="/wiki/Embedded_processor" class="mw-redirect" title="Embedded processor">embedded processors</a>, <a href="/wiki/Flash_memory" title="Flash memory">flash memory</a>, and <a href="/wiki/Microcontroller" title="Microcontroller">microcontrollers</a>. However, for companies with more limited product lines, it is often best to either rent out the fab, or close it entirely. This is due to the tendency of the cost of upgrading an existing fab to produce devices requiring newer technology to exceed the cost of a completely new fab. </p><p>There has been a trend to produce ever larger <a href="/wiki/Wafer_(electronics)" title="Wafer (electronics)">wafers</a>, so each process step is being performed on more and more chips at once. The goal is to spread production costs (chemicals, fab time) over a larger number of saleable chips. It is impossible (or at least impracticable) to retrofit machinery to handle larger wafers. This is not to say that foundries using smaller wafers are necessarily obsolete; older foundries can be cheaper to operate, have higher yields for simple chips and still be productive. </p><p>The industry was aiming to move from the state-of-the-art wafer size 300 mm (12 in) to 450 mm by 2018.<sup id="cite_ref-6" class="reference"><a href="#cite_note-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup> In March 2014, <a href="/wiki/Intel" title="Intel">Intel</a> expected 450 mm deployment by 2020.<sup id="cite_ref-intel450mm_7-0" class="reference"><a href="#cite_note-intel450mm-7"><span class="cite-bracket">[</span>7<span class="cite-bracket">]</span></a></sup> But in 2016, corresponding joint research efforts were stopped.<sup id="cite_ref-8" class="reference"><a href="#cite_note-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> </p><p>Additionally, there is a large push to completely automate the production of semiconductor chips from beginning to end. This is often referred to as the "<a href="/wiki/Lights_out_(manufacturing)" title="Lights out (manufacturing)">lights-out fab</a>" concept. </p><p>The International Sematech Manufacturing Initiative (ISMI), an extension of the US consortium <a href="/wiki/SEMATECH" title="SEMATECH">SEMATECH</a>, is sponsoring the "300 mm Prime" initiative. An important goal of this initiative is to enable fabs to produce greater quantities of smaller chips as a response to shorter lifecycles seen in consumer electronics. The logic is that such a fab can produce smaller lots more easily and can efficiently switch its production to supply chips for a variety of new electronic devices. Another important goal is to reduce the waiting time between processing steps.<sup id="cite_ref-9" class="reference"><a href="#cite_note-9"><span class="cite-bracket">[</span>9<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-10" class="reference"><a href="#cite_note-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="See_also">See also</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Semiconductor_fabrication_plant&action=edit&section=2" title="Edit section: See also"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <ul><li><a href="/wiki/Foundry_model" title="Foundry model">Foundry model</a> for the business aspects of foundries and fabless companies</li> <li><a href="/wiki/List_of_semiconductor_fabrication_plants" title="List of semiconductor fabrication plants">List of semiconductor fabrication plants</a></li> <li><a href="/wiki/Rock%27s_law" class="mw-redirect" title="Rock's law">Rock's law</a></li> <li><a href="/wiki/Semiconductor_consolidation" title="Semiconductor consolidation">Semiconductor consolidation</a></li> <li><a href="/wiki/Semiconductor_device_fabrication" title="Semiconductor device fabrication">Semiconductor device fabrication</a> for the process of manufacturing devices</li></ul> <div class="mw-heading mw-heading2"><h2 id="Notes">Notes</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Semiconductor_fabrication_plant&action=edit&section=3" title="Edit section: Notes"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1239543626">.mw-parser-output .reflist{margin-bottom:0.5em;list-style-type:decimal}@media screen{.mw-parser-output .reflist{font-size:90%}}.mw-parser-output .reflist .references{font-size:100%;margin-bottom:0;list-style-type:inherit}.mw-parser-output .reflist-columns-2{column-width:30em}.mw-parser-output .reflist-columns-3{column-width:25em}.mw-parser-output .reflist-columns{margin-top:0.3em}.mw-parser-output .reflist-columns ol{margin-top:0}.mw-parser-output .reflist-columns li{page-break-inside:avoid;break-inside:avoid-column}.mw-parser-output .reflist-upper-alpha{list-style-type:upper-alpha}.mw-parser-output .reflist-upper-roman{list-style-type:upper-roman}.mw-parser-output .reflist-lower-alpha{list-style-type:lower-alpha}.mw-parser-output .reflist-lower-greek{list-style-type:lower-greek}.mw-parser-output .reflist-lower-roman{list-style-type:lower-roman}</style><div class="reflist"> <div class="mw-references-wrap"><ol class="references"> <li id="cite_note-1"><span class="mw-cite-backlink"><b><a href="#cite_ref-1">^</a></b></span> <span class="reference-text"><style data-mw-deduplicate="TemplateStyles:r1238218222">.mw-parser-output cite.citation{font-style:inherit;word-wrap:break-word}.mw-parser-output .citation q{quotes:"\"""\"""'""'"}.mw-parser-output .citation:target{background-color:rgba(0,127,255,0.133)}.mw-parser-output .id-lock-free.id-lock-free a{background:url("//upload.wikimedia.org/wikipedia/commons/6/65/Lock-green.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-limited.id-lock-limited a,.mw-parser-output .id-lock-registration.id-lock-registration a{background:url("//upload.wikimedia.org/wikipedia/commons/d/d6/Lock-gray-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-subscription.id-lock-subscription a{background:url("//upload.wikimedia.org/wikipedia/commons/a/aa/Lock-red-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .cs1-ws-icon a{background:url("//upload.wikimedia.org/wikipedia/commons/4/4c/Wikisource-logo.svg")right 0.1em center/12px no-repeat}body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-free a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-limited a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-registration a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-subscription a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .cs1-ws-icon a{background-size:contain;padding:0 1em 0 0}.mw-parser-output .cs1-code{color:inherit;background:inherit;border:none;padding:inherit}.mw-parser-output .cs1-hidden-error{display:none;color:var(--color-error,#d33)}.mw-parser-output .cs1-visible-error{color:var(--color-error,#d33)}.mw-parser-output .cs1-maint{display:none;color:#085;margin-left:0.3em}.mw-parser-output .cs1-kern-left{padding-left:0.2em}.mw-parser-output .cs1-kern-right{padding-right:0.2em}.mw-parser-output .citation .mw-selflink{font-weight:inherit}@media screen{.mw-parser-output .cs1-format{font-size:95%}html.skin-theme-clientpref-night .mw-parser-output .cs1-maint{color:#18911f}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .cs1-maint{color:#18911f}}</style><cite id="CITEREFBrownLinden2011" class="citation book cs1">Brown, Clair; Linden, Greg (2011). <a rel="nofollow" class="external text" href="https://books.google.com/books?id=9RnxtWd3ZEkC&pg=PA47"><i>Chips and change : how crisis reshapes the semiconductor industry</i></a> (1st ed.). Cambridge, Mass.: MIT Press. <a href="/wiki/ISBN_(identifier)" class="mw-redirect" title="ISBN (identifier)">ISBN</a> <a href="/wiki/Special:BookSources/9780262516822" title="Special:BookSources/9780262516822"><bdi>9780262516822</bdi></a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=book&rft.btitle=Chips+and+change+%3A+how+crisis+reshapes+the+semiconductor+industry&rft.place=Cambridge%2C+Mass.&rft.edition=1st&rft.pub=MIT+Press&rft.date=2011&rft.isbn=9780262516822&rft.aulast=Brown&rft.aufirst=Clair&rft.au=Linden%2C+Greg&rft_id=https%3A%2F%2Fbooks.google.com%2Fbooks%3Fid%3D9RnxtWd3ZEkC%26pg%3DPA47&rfr_id=info%3Asid%2Fen.wikipedia.org%3ASemiconductor+fabrication+plant" class="Z3988"></span></span> </li> <li id="cite_note-2"><span class="mw-cite-backlink"><b><a href="#cite_ref-2">^</a></b></span> <span class="reference-text"><a rel="nofollow" class="external text" href="http://www.tsmc.com/tsmcdotcom/PRListingNewsAction.do?action=detail&language=E&newsid=5041TSMC">Begins Construction on Gigafab In Central Taiwan</a> <a rel="nofollow" class="external text" href="https://web.archive.org/web/20120129181137/http://www.tsmc.com/tsmcdotcom/PRListingNewsAction.do?action=detail&language=E&newsid=5041TSMC">Archived</a> 2012-01-29 at the <a href="/wiki/Wayback_Machine" title="Wayback Machine">Wayback Machine</a>, issued by TSMC, 16 July 2010</span> </li> <li id="cite_note-3"><span class="mw-cite-backlink"><b><a href="#cite_ref-3">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20171012043608/https://www.theinquirer.net/inquirer/news/3018890/tsmc-says-3nm-plant-could-cost-it-more-than-usd20bn">"TSMC says 3nm plant could cost it more than $20bn - TheINQUIRER"</a>. <i>theinquirer.net</i>. 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Retrieved <span class="nowrap">26 April</span> 2018</span>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=unknown&rft.jtitle=theinquirer.net&rft.atitle=TSMC+says+3nm+plant+could+cost+it+more+than+%2420bn+-+TheINQUIRER&rft_id=https%3A%2F%2Fwww.theinquirer.net%2Finquirer%2Fnews%2F3018890%2Ftsmc-says-3nm-plant-could-cost-it-more-than-usd20bn&rfr_id=info%3Asid%2Fen.wikipedia.org%3ASemiconductor+fabrication+plant" class="Z3988"></span><span class="cs1-maint citation-comment"><code class="cs1-code">{{<a href="/wiki/Template:Cite_web" title="Template:Cite web">cite web</a>}}</code>: CS1 maint: unfit URL (<a href="/wiki/Category:CS1_maint:_unfit_URL" title="Category:CS1 maint: unfit URL">link</a>)</span></span> </li> <li id="cite_note-4"><span class="mw-cite-backlink"><b><a href="#cite_ref-4">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFMutschler2008" class="citation journal cs1">Mutschler, Ann Steffora (2008). "Pure-play foundries comprise 84% of market, IC Insights says". <i>Electronics News</i>. 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Retrieved <span class="nowrap">2014-05-31</span></span>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=unknown&rft.btitle=Intel+says+450+mm+will+deploy+later+in+decade&rft.date=2014-03-18&rft_id=http%3A%2F%2Fblog.timesunion.com%2Fbusiness%2Fintel-says-450mm-will-deploy-later-in-decade%2F59430%2F&rfr_id=info%3Asid%2Fen.wikipedia.org%3ASemiconductor+fabrication+plant" class="Z3988"></span></span> </li> <li id="cite_note-8"><span class="mw-cite-backlink"><b><a href="#cite_ref-8">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFMcGrath" class="citation web cs1">McGrath, Dylan. <a rel="nofollow" class="external text" href="https://www.eetimes.com/with-450mm-on-ice-300mm-shoulders-heavier-load">"With 450mm on Ice, 300mm Shoulders Heavier Load"</a><span class="reference-accessdate">. Retrieved <span class="nowrap">3 January</span> 2021</span>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.genre=unknown&rft.btitle=With+450mm+on+Ice%2C+300mm+Shoulders+Heavier+Load&rft.aulast=McGrath&rft.aufirst=Dylan&rft_id=https%3A%2F%2Fwww.eetimes.com%2Fwith-450mm-on-ice-300mm-shoulders-heavier-load&rfr_id=info%3Asid%2Fen.wikipedia.org%3ASemiconductor+fabrication+plant" class="Z3988"></span></span> </li> <li id="cite_note-9"><span class="mw-cite-backlink"><b><a href="#cite_ref-9">^</a></b></span> <span class="reference-text">Chip Makers Watch Their Waste</span> </li> <li id="cite_note-10"><span class="mw-cite-backlink"><b><a href="#cite_ref-10">^</a></b></span> <span class="reference-text">ISMI Press Release</span> </li> </ol></div></div> <div class="mw-heading mw-heading2"><h2 id="References">References</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Semiconductor_fabrication_plant&action=edit&section=4" title="Edit section: References"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <ul><li><i>Handbook of Semiconductor Manufacturing Technology, Second Edition</i> by Robert Doering and Yoshio Nishi (Hardcover – Jul 9, 2007)</li> <li><i>Semiconductor Manufacturing Technology</i> by Michael Quirk and Julian Serda (paperback – Nov 19, 2000)</li> <li><i>Fundamentals of Semiconductor Manufacturing and Process Control</i> by Gary S. May and Costas J. Spanos (hardcover – May 22, 2006)</li> <li><i>The Essential Guide to Semiconductors</i> (Essential Guide Series) by Jim Turley (paperback – Dec 29, 2002)</li> <li><i>Semiconductor Manufacturing Handbook</i> (McGraw–Hill Handbooks) by Hwaiyu Geng (hardcover – April 27, 2005)</li></ul> <p><b>Semiconductor fabrication software</b><a rel="nofollow" class="external free" href="https://www.einnosys.com/fab-automation/">https://www.einnosys.com/fab-automation/</a> </p> <div class="mw-heading mw-heading2"><h2 id="Further_reading">Further reading</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Semiconductor_fabrication_plant&action=edit&section=5" title="Edit section: Further reading"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <ul><li>"Chip Makers Watch Their Waste", <i><a href="/wiki/The_Wall_Street_Journal" title="The Wall Street Journal">The Wall Street Journal</a></i>, July 19, 2007, p.B3</li></ul>    </div><noscript><img src="https://login.wikimedia.org/wiki/Special:CentralAutoLogin/start?type=1x1" alt="" width="1" height="1" style="border: none; position: absolute;"></noscript> <div class="printfooter" data-nosnippet="">Retrieved from "<a dir="ltr" href="https://en.wikipedia.org/w/index.php?title=Semiconductor_fabrication_plant&oldid=1241153313">https://en.wikipedia.org/w/index.php?title=Semiconductor_fabrication_plant&oldid=1241153313</a>"</div></div> <div id="catlinks" class="catlinks" data-mw="interface"><div id="mw-normal-catlinks" class="mw-normal-catlinks"><a href="/wiki/Help:Category" title="Help:Category">Categories</a>: <ul><li><a href="/wiki/Category:Semiconductor_device_fabrication" title="Category:Semiconductor device fabrication">Semiconductor device fabrication</a></li><li><a href="/wiki/Category:Manufacturing_plants" title="Category:Manufacturing plants">Manufacturing plants</a></li></ul></div><div id="mw-hidden-catlinks" class="mw-hidden-catlinks mw-hidden-cats-hidden">Hidden categories: <ul><li><a href="/wiki/Category:Webarchive_template_wayback_links" title="Category:Webarchive template wayback links">Webarchive template wayback links</a></li><li><a href="/wiki/Category:CS1_maint:_unfit_URL" title="Category:CS1 maint: unfit URL">CS1 maint: unfit URL</a></li><li><a href="/wiki/Category:Articles_with_short_description" title="Category:Articles with short description">Articles with short description</a></li><li><a href="/wiki/Category:Short_description_is_different_from_Wikidata" title="Category:Short description is different from Wikidata">Short description is different from Wikidata</a></li><li><a href="/wiki/Category:Wikipedia_articles_in_need_of_updating_from_September_2020" title="Category:Wikipedia articles in need of updating from September 2020">Wikipedia articles in need of updating from September 2020</a></li><li><a href="/wiki/Category:All_Wikipedia_articles_in_need_of_updating" title="Category:All Wikipedia articles in need of updating">All Wikipedia articles in need of updating</a></li></ul></div></div> </div> </main> </div> <div class="mw-footer-container"> <footer id="footer" class="mw-footer" > <ul id="footer-info"> <li id="footer-info-lastmod"> This page was last edited on 19 August 2024, at 16:36<span class="anonymous-show"> (UTC)</span>.</li> <li id="footer-info-copyright">Text is available under the <a href="/wiki/Wikipedia:Text_of_the_Creative_Commons_Attribution-ShareAlike_4.0_International_License" title="Wikipedia:Text of the Creative Commons Attribution-ShareAlike 4.0 International License">Creative Commons Attribution-ShareAlike 4.0 License</a>; additional terms may apply. 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