SYNUS Tech

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body').animate({scrollTop : offset.top - 150}, 400); } </script> <main> <article class="sub-content"> <h2 class="content-title">Semiconductor</h2> <p class="content-title__text">Implements maximum efficiency production system of semiconductor production process</p> <div class="sub-content__wrap"> <div class="semi biz"> <div class="biz-map"> <img src="images/sub/semi_all_bg.jpg" class="pc_img" alt="display"> <img src="images/sub/semi_all_bg2.jpg" class="m_img" alt="display"> <div class="biz-map__list left"> <a href="#n" class="biz-map__button c1"><span class="badge">01</span><span class="photo"></span><span class="text">OHT</span></a> <a href="#n" class="biz-map__button c2"><span class="badge">02</span><span class="photo"></span><span class="text">N2 Stocker</span></a> <a href="#n" onclick="clickPostion('product_7')" class="biz-map__button c3"><span class="badge">03</span><span class="photo"></span><span class="text">Bank Stocker</span></a> <a href="#n" onclick="clickPostion('product_5')" class="biz-map__button c7"><span class="badge">04</span><span class="photo"></span><span class="text">AGV</span></a> <a href="#n" onclick="clickPostion('product_4_2')" class="biz-map__button c4_2"><span class="badge">05</span><span class="text">MCS</span></a> </div> <div class="biz-map__list right"> <a href="#n" onclick="clickPostion('product_3')" class="biz-map__button c5"><span class="badge">06</span><span class="text over_none">HT</span><span class="text over_yes">High Speed Tower</span><span class="photo"></span></a> <a href="#n" onclick="clickPostion('product_4')" class="biz-map__button c6"><span class="badge">07</span><span class="text">Conveyor</span><span class="photo"></span></a> <a href="" class="biz-map__button c4"><span class="text">Lifter</span><span class="photo"></span></a> <a href="" class="biz-map__button c8"><span class="text">Diverter</span><span class="photo"></span></a> </div> </div> </div> </div> <div class="product"> <div class="sub-content__wrap clearfix"> <div id="product_0" class="product__item"> <div class="product__number"><span>01</span></div> <div class="product__photo"><img src="./images/sub/semi_p_1_1.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">SEMI OHT (Overhead Hoist Transport) </h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">安装在Rail底部的半导体工程间物流运送系统</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Dual Rail Track </li> <li>Compact & Slim Design</li> <li>Side Track Buffer Interface</li> <li>Contactless Power Supply System</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB, SMIF POD, Magazine, Tray, Cassette, etc.</span></li> <li><span class="unit">Payload</span><span class="unit2">Max. 20kg</span></li> <li><span class="unit">Velocity</span><span class="unit2">Max. 320m/min</span></li> <li><span class="unit">Curve Radius</span><span class="unit2">R500mm</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class 100<br> <span class="margin"></span>Class 10 (Get Control with Velocity)</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div>  <div id="product_2" class="product__item"> <div class="product__number"><span>02</span></div> <div class="product__photo"><img src="./images/sub/semi_p_2.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">SEMI STOCKER</h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">是工程间物流搬送设备,具有FOUP的保管及运送功能</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Superior Cycle Time </li> <li>Flexible Port Configuration </li> <li>Optimize Safety Interlock </li> <li>N2 Purge System (Option)</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB, SMIF POD, Magazine, Tray, Cassette, etc.</span></li> <li><span class="unit">Movement Axes</span><span class="unit2">X-axis, Z-axis, Turning, Forking</span></li> <li><span class="unit">Forking Time</span><span class="unit2">Forking Time: 2 sec</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class 100</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_7" class="product__item"> <div class="product__number"><span>03</span></div> <div class="product__photo"><img src="./images/sub/semi_p_7.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">Bank STOCKER</h3> <h4 class="product__subtitle"><span>Use</span></h4> <ul class="product__list"> <li>Bank(Wafer sorting / Split, Merge) </li> <li>Storing & transport in bank process during PKG&Test </li> </ul> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Twin S-Master </li> <li>Storing over 1,000 cell</li> <li>Sorter Docking </li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB</span></li> <li><span class="unit">Payload</span><span class="unit2">Max. 15kg</span></li> <li><span class="unit">Movement Axes</span><span class="unit2">X-axis, Z-axis, Turning, Forking</span></li> <li><span class="unit">Tact Time</span><span class="unit2">Forking Time : 2sec</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class100</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_5" class="product__item"> <div class="product__number"><span>04</span></div> <div class="product__photo"><img src="./images/sub/semi_p_5.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">SEMI AGV <span>(Automated Guided Vehicle)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">在半导体工程中, 把FOUP及Cassette 等运送物品自动运送到 Stocker 或EQ的设备</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Excellent & Flexible Delivery System</li> <li>Direct Interface with Process Equip or Buffers</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Use to Handle Type</span><span class="unit2">FOUP, FOSB, Cassette, Megazine, Tray, etc.</span></li> <li><span class="unit">Load/Unloading Time</span><span class="unit2">25~30sec</span></li> <li><span class="unit">Traveling Velocity</span><span class="unit2">Max. 56m/min</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class 10@0.1㎛(Anti-Particle Design) <br><span class="margin"></span>Pkg- Class 1000@0.5㎛(Anti-Particle Design)</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_4_2" class="product__item"> <div class="product__number"><span>05</span></div> <div class="product__photo"><img src="./images/sub/semi_p_4_2.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">MCS <span>(Material Control System)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">通过探索物流设备间最佳路径,控制从MES收到的转运命令,对个别物流设备的转运进行实时监控,实现Full Automation</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>对工程内AMHS 装备及 Material实时监控</li> <li>支持SEMI的标准(SECS, GEM, Stocker-SEM, IB-SEM)</li> <li>根据工程的状况有效Dynamic Routing</li> <li>适用最佳运送路径探索(Shortest Path)算法</li> <li>为分散负荷的 Load Balancing</li> <li>OS内独立的 J2EE Platform</li> <li>Run-Time Patch</li> <li>Active-Active的结构, 可对应 Auto Failover</li> <li>支持多样的DBMS 及 Middleware</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">对应设备</span><span class="unit2">OHT, Stocker, OHB, Lift, AGV</span></li> <li><span class="unit">Protocol</span><span class="unit2">IB-SEM / Stocker-SEM</span></li> <li><span class="unit">Auto</span><span class="unit2">FailoverActive-Active</span></li> <li><span class="unit">Business Logic</span><span class="unit2">BPEL</span></li> <li><span class="unit">扩展性</span><span class="unit2">多样的 Host / AMHS结合方便</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_3" class="product__item"> <div class="product__number"><span>06</span></div> <div class="product__photo"><img src="./images/sub/semi_p_3.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">SEMI HT <span> (High Speed Tower)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">安装在半导体工程中有层间或段差区域, 把搬送品上下运送的设备</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Short Cycle Time </li> <li>Fast Moving Speed</li> <li>Fast Cargo System Between Multi Floor</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB, SMIF POD, Magazine, Tray, Cassette, etc.</span></li> <li><span class="unit">Height</span><span class="unit2">25 ~ 65m</span></li> <li><span class="unit">Up/Down Velocity</span><span class="unit2">Max. 250m/min</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_4" class="product__item"> <div class="product__number"><span>07</span></div> <div class="product__photo"><img src="./images/sub/semi_p_4.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">Conveyor</h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">水平运送的设备, 且当Buffer可以装载物品的物流系统 System</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Flexible with Module Unit</li> <li>Dual Belt for Minimum Tray Contact</li> <li>Miniaturization / weight lightening</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB, SMIF POD, Magazine, Tray, Cassette, etc.</span></li> <li><span class="unit">Velocity</span><span class="unit2">Turn Speed : 40 ˚/sec</span></li>  </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_6" class="product__item no_number"> <div class="product__photo"><img src="./images/sub/semi_p_6.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">LHT <span>(Local Hoist Transfer)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">半导体工程中EQ跟EQ间直线区域上运送的设备</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Simple </li> <li>Speedy Tact Time</li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB, SMIF POD, Magazine, Tray, Cassette, etc.</span></li> <li><span class="unit">Travel Velocity</span><span class="unit2">120m/min</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class 100</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_8" class="product__item no_number"> <div class="product__photo"><img src="./images/sub/semi_p_8.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">SIS <span>(Sorter In STOCKER)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <ul class="product__list"> <li>FOUP / FOSB Wafer Split, Merge function is included</li> </ul> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Minimized Lay-Out composition is available <br> (Sorter 2 unit composition) </li> <li>NTB(Near Tool Buffer) System apply </li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB</span></li> <li><span class="unit">Movement Axes</span><span class="unit2">X-axis, Z-axis, Turning, Forking</span></li> <li><span class="unit">Tact Time</span><span class="unit2">Forking Time: 2 sec</span></li> <li><span class="unit">Cleanliness</span><span class="unit2">Class 100</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> <div id="product_9" class="product__item no_number"> <div class="product__photo"><img src="./images/sub/semi_p_9.png" alt=""></div> <div class="product__explan"> <h3 class="product__title">FIO <span>(FOUP In Out System)</span></h3> <h4 class="product__subtitle"><span>Use</span></h4> <p class="product__text">System for in / out the product (FOUP, FOSB) from OHT</p> <h4 class="product__subtitle"><span>Features</span></h4> <ul class="product__list"> <li>Minimized Lay-Out composition is available </li> <li>Easy to move </li> </ul> <h4 class="product__subtitle"><span>Specification</span></h4> <ul class="product__list"> <li><span class="unit">Type</span><span class="unit2">FOUP, FOSB</span></li> <li><span class="unit">Movement Axis</span><span class="unit2">X_axis, Z-Axis</span></li> <li><span class="unit">Speed</span><span class="unit2">0.25m/sec</span></li> <li><span class="unit">Cleanliness</span><span class="unit2"> Class 100</span></li> </ul> </div> <div class="product__more"><button type="button">More</button></div> </div> </div> </div>  </article> </main> </div> <div class="footer"> <div class="wrap"> <div class="foot_left"> <span class="info"><em>Address : 5F~6F, Gwacheon Urban Hub, 60, Gwacheon-daero 7na-gil, Gwacheon-si, Gyeonggi-do, Republic of Korea</em></span> <span class="info"><em>Tel : +82-2-6248-7577</em></span> <span 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