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NovusEdge G2 System - Onto Innovation
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<h4>Products for Wafer and Panel Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element System</h3> <p> Transmission and reflection based FTIR measurement </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/logic-foundry">Logic/Foundry</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/logic-foundry" class="overview"> <h3>Challenges for Logic/Foundry Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Etch Profile</li> <li>Patterning</li> <li>Pre/Post CMP</li> <li>Thin Film Metrology</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Logic/_resizeSmall/Logic-cpu-chip-processor.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Logic/Foundry Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD and film analysis </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/memory">Memory</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/memory" class="overview"> <h3>Challenges for Memory Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>3D NAND Process Control</li> <li>DRAM High Bandwidth Memory TSV</li> <li>DRAM Front-end Process Control</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Memory/_resizeSmall/Memory-RAM-storage.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for Memory Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/rf-mems">RF/MEMS</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/rf-mems" class="overview"> <h3>Challenges for RF/MEMS</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Mass Load Metrology</li> <li>RF Filter Metrology</li> <li>SAW/BAW Filter Inspection</li> <li>Cavity Integrity</li> <li>Substrate Handling</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/RF/_resizeSmall/RF-5G.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for RF Module and MEMS Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris S System</h3> <p> Advanced film and OCD metrology system </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/industrial-scientific">Industrial/Scientific</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/industrial-scientific" class="overview"> <h3>Challenges for Industrial and Scientific</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Aerospace and Defense</li> <li>Aviation and Automotive</li> <li>Biomedical</li> <li>Optics and Telescope Manufacturing</li> <li>Semiconductors</li> <li>Vision Systems</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Industrial-Scientific/_resizeSmall/HiRISE-in-Space-Rendering.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Visit the 4D Technology website to learn more</h4> <div class="grid"> <a href="https://www.4dtechnology.com/"> <h3>4D Technology website</h3> <p> A business of Onto Innovation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/imaging">Image Sensors</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/imaging" class="overview"> <h3>Challenges for Image Sensors</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>CMOS Sensor</li> <li>VCSELs</li> <li>Residue</li> <li>Cover Glass</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Imaging/_resizeSmall/Image-sensor-light-sensor-of-digital-camera.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Image Sensor Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD Metrology </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced film & OCD metrology system </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/advanced-packaging">Advanced Packaging</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/advanced-packaging" class="overview"> <h3>Challenges for Advanced Packaging</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Die Shift</li> <li>Fine Pitch RDL</li> <li>Bump metrology and analytics</li> <li>Non-Visual Defects</li> <li>Die crack detection</li> <li>Warped Substrates</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Fan-Out/_resizeSmall/fanout-top-view.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Advanced Packaging</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Panel lithography system optimized for volume manufacturing of high-end AICS and advanced packaging panels </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly System</h3> <p> Sub-micron automatic defect inspection for panels </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan P System</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/led-power">LED/Power</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/led-power" class="overview"> <h3>Challenges for LED/Power</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Critical Dimensions</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/LED-Power/_resizeSmall/LED-panel.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for LED/Power</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/probe-test">Probe Test</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/probe-test" class="overview"> <h3>Challenges for Probe Test</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Probe Card Test</li> <li>Probe Mark Inspection</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Probe-Test/_resizeSmall/TP1-Technoprobe.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Probe Test</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/flat-panel-display">Flat Panel Display</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/flat-panel-display" class="overview"> <h3>Challenges for Flat Panel Display</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>TFT Backplane Imaging</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Flat-Oanel-Display/_resizeSmall/Flexible-display-glass.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Flat Panel Display Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> </div> </div> </div> </div> </div> </div> </li> <li class="has-secondary" data-slug="products"> <a href="https://ontoinnovation.com/products">Products</a> <div class="secondary product-secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/products">Products Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/enterprise-software">Enterprise Software</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/enterprise-software" class="overview"> <h3>Products for Enterprise Software</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/autoshell-software"> <h3>AutoShell Software</h3> <p> Integrate equipment and factory 4.0+ systems quickly and comprehensively </p> </a> <a href="https://ontoinnovation.com/products/controlworks-software"> <h3>ControlWORKS Software</h3> <p> The SEMI compliant foundation for optimized operations and material movement on your process equipment </p> </a> <a href="https://ontoinnovation.com/products/discover-defect-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-patterns-software"> <h3>Discover Patterns Software</h3> <p> Revealing signals hidden in everyday noise </p> </a> <a href="https://ontoinnovation.com/products/discover-review-software"> <h3>Discover Review Software</h3> <p> Your smart factory鈥檚 human classification interface </p> </a> <a href="https://ontoinnovation.com/products/discover-rms-software"> <h3>Discover RMS Software</h3> <p> The cornerstone to factory control through recipe management </p> </a> <a href="https://ontoinnovation.com/products/discover-run-to-run-software"> <h3>Discover Run-to-Run Software</h3> <p> Targeting the sweet spot for your smart factory </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/partners-in-progress"> <h3>Partners in Progress</h3> <p> Our customers and Onto Innovation solutions: 1+1=3. Good ideas, better implementation, visionary solutions </p> </a> <a href="https://ontoinnovation.com/products/trueadc-software"> <h3>TrueADC Software</h3> <p> The one and only automated defect classification system for smart factories </p> </a> <a href="https://ontoinnovation.com/products/yield-optimizer-machine-learning"> <h3>Yield Optimizer Software</h3> <p> Machine learning that looks beyond known relationships </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/defect-inspection">Defect Inspection</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/defect-inspection" class="overview"> <h3>Products for Defect Inspection</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated high speed sub-micron 2D inspection and combo 3D inspection/metrology for inline process control of pattern defects and next generation technologies for advanced packaging, specialty and OQA </p> </a> <a href="https://ontoinnovation.com/products/eb40-edge-backside-inspection"> <h3>EB40 Module</h3> <p> Edge and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/f30-system"> <h3>F30 System</h3> <p> Advanced macro inspection for front-end manufacturers </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly G3 System</h3> <p> Sub-micron automatic defect inspection for advanced IC substrates and panel level packaging </p> </a> <a href="https://ontoinnovation.com/products/inspection-tool-productivity-software"> <h3>Inspection Tool Productivity Software</h3> <p> Software solutions to increase the value of data available from your inspection tool </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/nsx-330-system"> <h3>NSX 330 System</h3> <p> 2D automated defect inspection and sample 3D inspection for advanced packaging </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/metrology">Metrology</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/metrology" class="overview"> <h3>Products for Metrology</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> Advanced OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced standalone OCD & thin film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Opto-acoustic film metrology for in-line metal film thickness measurements and material characterization. </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated thin film and OCD metrology solution </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris Series</h3> <p> Metrology system for thin film and common OCD measurement </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology for the compound semiconductor, power devices, RF, MEMS, LED and advanced packaging markets </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/photoluminescence">Photoluminescence</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/photoluminescence" class="overview"> <h3>Products for Photoluminescence</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition">Epi Thickness & Composition</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition" class="overview"> <h3>Products for Epi Thickness & Composition</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element Series</h3> <p> Transmission and reflection based FTIR Measurement for wafer suppliers and device makers </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/lithography">Lithography</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/lithography" class="overview"> <h3>Products for Lithography</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-s3500-system"> <h3>JetStep S3500 System</h3> <p> Advanced packaging lithography system for rectangular or square panel substrates up to Gen 3.5 size (720mm x 600mm) </p> </a> <a href="https://ontoinnovation.com/products/jetstep-w2300-system"> <h3>JetStep W2300 System</h3> <p> Advanced packaging lithography system for round substrates up to 330mm </p> </a> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Designed for advanced integrated circuit substrates (AICS) or advanced packaging manufacturing applications, incorporating a 250mm x 250mm large field exposure area achieving 3渭m L/S resolution over a large DOF and with a throughput of >110pph </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis">Probe Card Test & Analysis</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis" class="overview"> <h3>Products for Probe Card Test & Analysis</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> </div> </div> </div> <div class="item"> <a href="https://www.4dtechnology.com/">4D Technology</a> </div> <div class="item"> <a href="https://ontoinnovation.com/products/a-z-product-index">A-Z Product Index</a> </div> </div> </div> </li> <li class="" data-slug="library"> <a href="https://ontoinnovation.com/library">Library</a> </li> <li class="has-secondary" data-slug="support"> <a href="https://ontoinnovation.com/support">Support</a> <div class="secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/support">Support Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/find-support">Find Support</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/service-programs">Service Programs</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/training">Training</a> </div> <div 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</header> <div class="jump-hero"> <div class="hero"> <div class="container"> <div class="position "> <h1>NovusEdge庐 G2 System</h1> <p class="intro short-description">The NovusEdge G2 System includes modular configurations for fast, reliable inspection of the edge, notch and backside of the wafer.</p> </div> </div> </div> </div> <div class="torso"> <div class="container"> <h2>Product Overview</h2> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <p>The NovusEdge G2 System provides high sensitivity inspection for the edge and backside of bare unpatterned wafers for current and advanced nodes. Multiple modules can be configured on the same automation platform for increased throughput while maintaining a small footprint for an improved cost of ownership. The edge-gripping handling solution for both automation platform and the inspection modules provides desired cleanliness required for wafer manufacturing. Optional high-sensitivity notch inspection can be added to the configuration. Defects detected are automatically classified and binned at run time to reduce manual operator review.</p> <p>The system is designed as a multipurpose inspection and sorting system for end of line outgoing quality inspection of 300mm unpatterned wafers. The system allows for identifying, inspecting, and sorting the wafers according to freely definable recipes.</p> <p>The NovusEdge G2 offers higher sensitivity than the previous generation, allowing for sub-micron resolution across all edge and backside inspection. Throughput has been increased by more than 15%, giving customers a lower cost of ownership. Changes to the system simplify user interaction with a focus on ease-of-use, while a new electrical design consumes less power during operation. The enhancements made for the NovusEdge G2 system ensure the tool remains at the leading edge of bare wafer inspection.<br /></p> </div> <hr /> <div class="right"> <figure class="image"> <img src="/writable/images/Products/Defect-Inspection/_resizeLarge/NovusEdge_G2_System-new-branding.png" alt="NovusEdge G2 System"> <figcaption>NovusEdge G2 System</figcaption> </figure> </div> <hr /> </div> </div> <div class="container"> <h2>Applications</h2> </div> <div class="container sc-rich-text"> <ul><li>In-process inspection of unpatterned wafers at the wafer manufacturing site.</li><li>Incoming inspection of unpatterned wafers at outsource subassembly and test providers, integrated device manufacturers, and foundries.</li><li>Process tool qualification and monitoring in conjunction with test wafers.</li></ul> </div> <div class="container"> <h2>Specifications</h2> </div> <div class="container sc-rich-text"> <ul><li>Submicron edge sensitivity</li><li>Backside sensitivity down to nanometer levels</li><li>Full coverage notch inspection</li><li>Haze</li><li>Sorting capability</li><li>Flexible tool configuration</li><li>Automatic defect classification with customer definable defect classes</li></ul> </div> <div class="container adjacent-resources"> <div class="papers-articles"> <div class="container"> <div class="position"> <h4>Selected Papers and Articles</h4> <div class="grid"> <div class="library-item article"> <a href="https://ontoinnovation.com/library/inspecting-unpatterned-wafers"> <h3>Inspecting Unpatterned Wafers</h3> <h5><strong>Article</strong> for <strong>Semiconductor Engineering</strong></h5> </a> </div> </div> </div> </div> </div> </div> <div class="product-category"> <div class="container"> <h4>Related Products & Markets</h4> <div class="product-grid"> <a href="https://ontoinnovation.com/markets/unpatterned-bare-wafer"> <h3>Bare Wafer/Panel</h3> <p> Bare wafer manufacturers provide the quality silicon wafers needed for today's semiconductor manufacturing. 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