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breakdance-link" href="https://raith.com/products/velion/" target="_self" data-type="url"> <div class="bde-text-14191-900 bde-text nav-submenu__item-text"> Velion </div><div class="bde-text-14191-901 bde-text nav-submenu__item-text"> Multi ion species FIB‑SEM </div> </a><a class="bde-container-link-14191-942 bde-container-link nav-submenu__wrapper-textlink breakdance-link" href="https://raith.com/products/ionmaster/" target="_self" data-type="url"> <div class="bde-text-14191-943 bde-text nav-submenu__item-text"> IONMASTER </div><div class="bde-text-14191-944 bde-text nav-submenu__item-text"> SIMS nanoanalytics and ion imaging </div> </a><a class="bde-container-link-14191-902 bde-container-link nav-submenu__wrapper-textlink breakdance-link" href="https://raith.com/products/elphy/" target="_self" data-type="url"> <div class="bde-text-14191-903 bde-text nav-submenu__item-text"> ELPHY </div><div class="bde-text-14191-904 bde-text nav-submenu__item-text"> Upgrade kit for SEM, FIB-SEM, or HIM </div> </a> </div> </div> </div><div class="bde-advanced-tabs-content-14191-908 bde-advanced-tabs-content"> <div tabindex="0" role="tabpanel" class="bde-tabs__panel js-panel" id="" hidden="" aria-labelledby=""> <div class="bde-div-14191-909 bde-div nav-submenu__border"> <div class="bde-text-14191-910 bde-text nav-submenu__item-text"> Discover Laser Lithography with multi-beam technology for enhanced throughput and scalable resolution, or choose single-beam systems with unmatched lateral and gray-level resolutions </div><div class="bde-button-14191-911 bde-button nav-submenu__button-text-icon"> <a class="breakdance-link button-atom button-atom--custom bde-button__button" href="https://raith.com/products/laser-lithography/" target="_self" data-type="url" > <span class="button-atom__text">Product Overview</span> </a> </div> </div><div class="bde-div-14191-912 bde-div nav-items-grid-tabs"> <a class="bde-container-link-14191-913 bde-container-link nav-submenu__wrapper-textlink breakdance-link" href="https://raith.com//products/picomaster/" target="_self" data-type="url"> <div class="bde-text-14191-914 bde-text nav-submenu__item-text"> PICOMASTER </div><div class="bde-text-14191-915 bde-text nav-submenu__item-text"> Direct laser writers with ultimate resolution </div> </a><a class="bde-container-link-14191-916 bde-container-link nav-submenu__wrapper-textlink breakdance-link" href="https://raith.com/products/picomaster-xf/" target="_self" data-type="url"> <div class="bde-text-14191-917 bde-text nav-submenu__item-text"> Picomaster XF </div><div class="bde-text-14191-918 bde-text nav-submenu__item-text"> Highest-throughput grayscale lithography<br> </div> </a><a class="bde-container-link-14191-919 bde-container-link nav-submenu__wrapper-textlink breakdance-link" href="https://www.sitech.co.uk/" target="_blank" data-type="url"> <div class="bde-text-14191-920 bde-text nav-submenu__item-text"> PICOMASTER-H </div><div class="bde-text-14191-921 bde-text nav-submenu__item-text"> Dedicated for security holograms<br> </div> </a> </div> </div> </div><div class="bde-advanced-tabs-content-14191-925 bde-advanced-tabs-content"> <div tabindex="0" role="tabpanel" class="bde-tabs__panel js-panel" id="" hidden="" aria-labelledby=""> <div class="bde-div-14191-926 bde-div nav-submenu__border"> <div class="bde-text-14191-927 bde-text nav-submenu__item-text"> Explore precise imaging and analysis tools for enhanced understanding and progress, offering a wide range of capabilities - from large-area 3D imaging to comprehensive process control and extensive material analysis. </div><div class="bde-button-14191-928 bde-button nav-submenu__button-text-icon"> <a class="breakdance-link button-atom button-atom--custom bde-button__button" href="https://raith.com/products/imaging-and-analysis/" target="_self" data-type="url" > <span class="button-atom__text">Product Overview</span> </a> </div> </div><div class="bde-div-14191-929 bde-div nav-items-grid-tabs"> <a 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.bde-section-6313-120>.section-background-overlay{background:linear-gradient(0deg,rgba(14,14,26,0.24) 0%,rgba(14,14,26,0) 54.35897435897436%,rgba(14,14,26,0.37) 100%)}.breakdance .bde-section-6313-120>.section-background-overlay{mix-blend-mode:multiply}</style><section class="bde-section-6313-120 bde-section s-headerproduct header-full-height"> <div class="section-background-overlay"></div> <div class="section-container"><div class="bde-div-6313-121 bde-div s-headerproduct__content"> <h1 class="bde-heading-6313-122 bde-heading s-headerproduct__usp tiny-padding-left" data-entrance="fade"> EBPG </h1><div class="bde-text-6313-123 bde-text" data-entrance="slideLeft"> Highest throughput, automation, and precision </div> </div></div> </section><div class="bde-globalblock-6313-125 bde-globalblock"> <div class='breakdance'><section class="bde-section-10839-100-10839-1 bde-section s-breadcrumb bde-section-10839-100"> <div class="section-container"><nav class="bde-div-10839-101-10839-1 bde-div breadcrumb breadcrumb__ondark bde-div-10839-101"> <a class="bde-text-link-10839-107-10839-1 bde-text-link bde-text-link-10839-107 breakdance-link" href="https://raith.com/" target="_self" data-type="url"> RAITH </a><div class="bde-icon-10839-103-10839-1 bde-icon bc-sep bde-icon-10839-103"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-10839-102-10839-1 bde-text bde-text-10839-102"> Products </div><div class="bde-icon-10839-108-10839-1 bde-icon bc-sep bde-icon-10839-108"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-10839-104-10839-1 bde-text bde-text-10839-104"> <a href="https://raith.com/product-category/electron/" rel="tag">Electron</a> </div><div class="bde-icon-10839-105-10839-1 bde-icon bc-sep bde-icon-10839-105"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-10839-106-10839-1 bde-text bde-text-10839-106"> EBPG </div> </nav></div> </section></div> </div><main class="bde-themeless-template-content-area-6313-107 bde-themeless-template-content-area"> <div class='breakdance'><section id="introduction" class="bde-section-9039-251 bde-section s-keyfeaturepitch"> <div class="section-container"><div class="bde-columns-9039-252 bde-columns"><div class="bde-column-9039-253 bde-column"> <h2 class="bde-heading-9039-405 bde-heading"> Introduction </h2> </div><div class="bde-column-9039-255 bde-column"> <div class="bde-text-9039-256 bde-text"> The EBPG stands as RAITH’s benchmark system. Achieving reliable and repeatable results with utmost precision to ensure high device yields on various substrates has been a major design criterion for the EBPG. In this context, the EBPG is most suitable for production environments, industrial R&D, and centers of excellence with ultimate requirements for dedicated and uncompromised EBL in all performance dimensions. </div> </div></div><div class="bde-columns-9039-257 bde-columns s-keyfeaturepitch__column"><div class="bde-column-9039-258 bde-column"> <div class="bde-div-9039-259 bde-div" data-parallax="true"> </div> </div><div class="bde-column-9039-260 bde-column"> <div class="bde-columns-9039-261 bde-columns"><div class="bde-column-9039-262 bde-column"> <h3 class="bde-heading-9039-263 bde-heading"> Key features </h3><div class="bde-rich-text-9039-264 bde-rich-text breakdance-rich-text-styles"> <ul> <li>Robust 100 kV column technology</li> <li>High-resolution lithography below 5 nm</li> <li>Automated wafer and multi-sample exposures</li> <li>Automated exposure parameter switching and calibration, allowing seamless and stable switching between high throughput (highest beam current 350 nA) and high resolution mode</li> <li>World’s best overlay accuracy</li> <li>Extremely fast stage with very low settling times</li> <li>Automated 2- or 10-holder airlock</li> <li>Fast and error-free sample alignment</li> <li>Advanced fracturing modes (shapes) for lowest line-edge roughness and highest pattern fidelity</li> <li>Highly efficient data processing</li> <li>Easy-to-learn graphical user interface and terminal interface for scripting</li> <li>Secure multi-user environment with different access levels</li> </ul> </div> </div><div class="bde-column-9039-265 bde-column"> <div class="bde-video-9039-266 bde-video"> <div class="ee-video-container"> <lite-youtube videoid="SLhDfWB5XtA" style="background-image: url(https://raith.com/wp-content/uploads/2024/07/raith-ebpg-key-features-1.jpg); " class="ee-video" title="" params="&playsinline=0&rel=0&enablejsapi=1" > </lite-youtube> </div> </div> </div></div> </div></div><div class="bde-div-9039-267 bde-div"> <div class="bde-fancy-divider-9039-268 bde-fancy-divider" data-entrance="slideLeft"> <div class="bde-fancy-divider__wrapper"> <div class="bde-fancy-divider__separator "> </div> </div> </div> </div></div> </section><section id="benefits" class="bde-section-9039-117 bde-section s-benfits3col"> <div class="section-container"><div class="bde-text-9039-118 bde-text TxColorGray"> Benefits </div><h2 class="bde-heading-9039-119 bde-heading"> The holistic EBPG design meets the diverse performance requirements for advanced nanolithography </h2><div class="bde-columns-9039-120 bde-columns"><div class="bde-column-9039-121 bde-column"> <div class="bde-grid-9039-122 bde-grid"> <div class="bde-div-9039-123 bde-div tile-minimal"> <div class="bde-div-9039-124 bde-div tile-minimal__inner"> <h3 class="bde-heading-9039-125 bde-heading"> Maximum throughput </h3><div class="bde-text-9039-126 bde-text"> With full system automation, highest beam currents, fast stage and beam deflection, the EBPG Plus enables users to achieve more in less time, optimizing productivity in nanofabrication processes. </div> </div> </div><div class="bde-div-9039-127 bde-div tile-minimal"> <div class="bde-div-9039-128 bde-div tile-minimal__inner"> <h3 class="bde-heading-9039-129 bde-heading"> Unrivaled precision </h3><div class="bde-text-9039-130 bde-text"> Offering high-resolution lithography below 5 nm and advanced fracturing modes for superior line-edge roughness, the system ensures precise patterning crucial for cutting-edge applications in industrial R&D and academic research. </div> </div> </div><div class="bde-div-9039-131 bde-div tile-minimal"> <div class="bde-div-9039-132 bde-div tile-minimal__inner"> <h3 class="bde-heading-9039-133 bde-heading"> Seamless integration and scalability </h3><div class="bde-text-9039-134 bde-text"> The system’s modular design allows for easy integration into existing workflows and offers field upgradability, ensuring that it can adapt to evolving research needs and technological advancements, providing long-term value for both industrial and academic environments. </div> </div> </div> </div> </div></div><div class="bde-post-loop-9039-390 bde-post-loop"> <div class="ee-posts ee-posts-grid"> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6338-113-6367-6338-1 bde-div tile-technology add-box-link bde-div-6338-113"> <div class="bde-image-6338-114-6367-6338-1 bde-image tile-technology__image bde-image-6338-114"> <figure class="breakdance-image breakdance-image--13740"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201920%201080'%3E%3C/svg%3E" width="1920" height="1080" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header.jpg 1920w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-1536x864.jpg 1536w" data-lazy-sizes="(max-width: 1920px) 100vw, 1920px" alt="Raith technology Ultra Positioning." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header.jpg?ver=1721298212"><noscript><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header.jpg?ver=1721298212" width="1920" height="1080" srcset="https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header.jpg 1920w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-technology-ultra-positioning-header-1536x864.jpg 1536w" sizes="(max-width: 1920px) 100vw, 1920px" alt="Raith technology Ultra Positioning."></noscript></div> </div></figure> </div><div class="bde-div-6338-115-6367-6338-1 bde-div tile-technology__content bde-div-6338-115"> <div class="bde-div-6338-131-6367-6338-1 bde-div bde-div-6338-131"> <div class="bde-div-6338-116-6367-6338-1 bde-div card-solution__headline-wrapper bde-div-6338-116"> <h3 class="bde-heading-6338-130-6367-6338-1 bde-heading bde-heading-6338-130"> Ultra </h3><div class="bde-icon-6338-118-6367-6338-1 bde-icon tile-technonogy__icon bde-icon-6338-118"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h3 class="bde-heading-6338-117-6367-6338-1 bde-heading bde-heading-6338-117"> Positioning </h3> </div><div class="bde-div-6338-119-6367-6338-1 bde-div card-bottom-link card-bottom-link--white card-bottom-link--short bde-div-6338-119"> <div class="bde-button-6338-120-6367-6338-1 bde-button card-solution__button bde-button-6338-120"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/technologies/ultrapositioning/" target="_self" data-type="url" > <span class="button-atom__text">More details</span> </a> </div> </div> </div> </div></div> </article> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6338-113-9148-6338-1 bde-div tile-technology add-box-link bde-div-6338-113"> <div class="bde-image-6338-114-9148-6338-1 bde-image tile-technology__image bde-image-6338-114"> <figure class="breakdance-image breakdance-image--16368"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%202200%201501'%3E%3C/svg%3E" width="2200" height="1501" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes.jpg 2200w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-300x205.jpg 300w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-1024x699.jpg 1024w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-768x524.jpg 768w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-1536x1048.jpg 1536w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-2048x1397.jpg 2048w" data-lazy-sizes="(max-width: 2200px) 100vw, 2200px" alt="Illustration of different shapes" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes.jpg" width="2200" height="1501" srcset="https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes.jpg 2200w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-300x205.jpg 300w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-1024x699.jpg 1024w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-768x524.jpg 768w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-1536x1048.jpg 1536w, https://raith.com/wp-content/uploads/2024/11/rai-technology-header_perfectshapes-2048x1397.jpg 2048w" sizes="(max-width: 2200px) 100vw, 2200px" alt="Illustration of different shapes"></noscript></div> </div></figure> </div><div class="bde-div-6338-115-9148-6338-1 bde-div tile-technology__content bde-div-6338-115"> <div class="bde-div-6338-131-9148-6338-1 bde-div bde-div-6338-131"> <div class="bde-div-6338-116-9148-6338-1 bde-div card-solution__headline-wrapper bde-div-6338-116"> <h3 class="bde-heading-6338-130-9148-6338-1 bde-heading bde-heading-6338-130"> Perfect </h3><div class="bde-icon-6338-118-9148-6338-1 bde-icon tile-technonogy__icon bde-icon-6338-118"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h3 class="bde-heading-6338-117-9148-6338-1 bde-heading bde-heading-6338-117"> Shapes </h3> </div><div class="bde-div-6338-119-9148-6338-1 bde-div card-bottom-link card-bottom-link--white card-bottom-link--short bde-div-6338-119"> <div class="bde-button-6338-120-9148-6338-1 bde-button card-solution__button bde-button-6338-120"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/technologies/perfectshapes/" target="_self" data-type="url" > <span class="button-atom__text">More details</span> </a> </div> </div> </div> </div></div> </article> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6338-121-9139-6338-1 bde-div tile-technology bde-div-6338-121"> <div class="bde-image-6338-122-9139-6338-1 bde-image tile-technology__image bde-image-6338-122"> <figure class="breakdance-image breakdance-image--10979"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201920%201080'%3E%3C/svg%3E" width="1920" height="1080" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter.jpg 1920w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-1536x864.jpg 1536w" data-lazy-sizes="(max-width: 1920px) 100vw, 1920px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter.jpg" width="1920" height="1080" srcset="https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter.jpg 1920w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/06/rai_tech_platzhalter-1536x864.jpg 1536w" sizes="(max-width: 1920px) 100vw, 1920px"></noscript></div> </div></figure> </div><div class="bde-div-6338-123-9139-6338-1 bde-div tile-technology__content bde-div-6338-123"> <div class="bde-div-6338-132-9139-6338-1 bde-div bde-div-6338-132"> <div class="bde-div-6338-133-9139-6338-1 bde-div card-solution__headline-wrapper bde-div-6338-133"> <h3 class="bde-heading-6338-134-9139-6338-1 bde-heading bde-heading-6338-134"> Fast </h3><div class="bde-icon-6338-135-9139-6338-1 bde-icon tile-technonogy__icon bde-icon-6338-135"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h3 class="bde-heading-6338-136-9139-6338-1 bde-heading bde-heading-6338-136"> HR </h3> </div> </div> </div></div> </article> </div> </div></div> </section><section id="software" class="bde-section-9039-185 bde-section s-softwaresection"> <div class="section-container"><h2 class="bde-heading-9039-186 bde-heading TxColorGray"> Software – Digital RAITH Beams </h2><h2 class="bde-heading-9039-187 bde-heading content-width75-desktop"> All you need as an interface for professional electron beam lithography </h2><div class="bde-div-9039-188 bde-div image-acaption-wrapper"> <div class="bde-image-9039-189 bde-image"> <figure class="breakdance-image breakdance-image--9473"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%202200%201467'%3E%3C/svg%3E" width="2200" height="1467" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams.jpg 2200w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-1024x683.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-768x512.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-1536x1024.jpg 1536w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-2048x1366.jpg 2048w" data-lazy-sizes="(max-width: 2200px) 100vw, 2200px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams.jpg" width="2200" height="1467" srcset="https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams.jpg 2200w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-1024x683.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-768x512.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-1536x1024.jpg 1536w, https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-software-digital-raith-beams-2048x1366.jpg 2048w" sizes="(max-width: 2200px) 100vw, 2200px"></noscript></div> </div></figure> </div><div class="bde-div-9039-190 bde-div image-acaption-wrapper__caption"> <div class="bde-text-9039-191 bde-text"> Secure multi-user environment </div> </div> </div></div> </section><section class="bde-section-9039-159 bde-section s-introductionplusenumeration"> <div class="section-container"><div class="bde-columns-9039-160 bde-columns"><div class="bde-column-9039-161 bde-column"> <div class="bde-text-9039-162 bde-text txColorDarkGray smallTextIndentation"> Digital RAITH Beams controls the system and continuously monitors its status for the EBPG. Built on Linux, it offers both command-line interfaces and graphical user interfaces (GUIs) for all essential system interactions, including job preparation and execution, system calibration, monitoring, and testing. </div> </div><div class="bde-column-9039-163 bde-column"> <div class="bde-grid-9039-164 bde-grid"> <div class="bde-div-9039-169 bde-div tile-minimal"> <div class="bde-div-9039-170 bde-div tile-minimal__inner"> <h2 class="bde-heading-9039-171 bde-heading"> Overall graphical interface Cebpg </h2><div class="bde-text-9039-172 bde-text"> Cebpg displays the full scope of EBPG control and monitoring capabilities in a clear, single GUI. It offers a comprehensive cockpit and allows the user to easily navigate through the EBL workflow. </div> </div> </div><div class="bde-div-9039-173 bde-div tile-minimal"> <div class="bde-div-9039-174 bde-div tile-minimal__inner"> <h2 class="bde-heading-9039-175 bde-heading"> Exposure job preparation Cjob </h2><div class="bde-text-9039-176 bde-text"> Cjob represents the workflow from pattern design import to exposure parameter assignment, sample and sample holder selection, and the final exposure launch. All functions are graphically displayed. </div> </div> </div><div class="bde-div-9039-177 bde-div tile-minimal"> <div class="bde-div-9039-178 bde-div tile-minimal__inner"> <h2 class="bde-heading-9039-179 bde-heading"> Cview pattern inspection </h2><div class="bde-text-9039-180 bde-text"> To avoid errors in job preparation, the pattern can be displayed as it will be exposed on the sample prior to job execution – whether it is simply to check that the beam excels at shot placement within a single design element or the chip distribution on the entire wafer. </div> </div> </div><div class="bde-div-9039-282 bde-div tile-minimal"> <div class="bde-div-9039-283 bde-div tile-minimal__inner"> <h2 class="bde-heading-9039-284 bde-heading"> True multi-user management system </h2><div class="bde-text-9039-285 bde-text"> Every user has to log in and authenticate themselves. The user management system ensures each user accesses only their own environment, preventing interference with others, as system data and parameters are tied exclusively to their account. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-9039-403 bde-section s-bigtypoanimated"> <div class="section-container"><div class="bde-text-9039-404 bde-text" data-parallax="true"> 100 person-years of software programming </div></div> </section><section id="technical_data" class="bde-section-9039-290 bde-section s-technicaldata"> <div class="section-container"><h2 class="bde-heading-9039-291 bde-heading TxColorGray"> Technical Data </h2><div class="bde-grid-9039-292 bde-grid"> <div class="bde-div-9039-293 bde-div tile-minimal"> <div class="bde-div-9039-294 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-9039-295 bde-text tile-minimal__text-bmargin-l"> Direct write performance with <br>overlay accuracy </div><div class="bde-div-9039-296 bde-div"> <div class="bde-text-9039-297 bde-text"> ≤ 5 nm </div> </div> </div> </div><div class="bde-div-9039-298 bde-div tile-minimal"> <div class="bde-div-9039-299 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-9039-300 bde-text tile-minimal__text-bmargin-l"> Stable large-area writing <br>with stitching accuracy </div><div class="bde-div-9039-301 bde-div"> <div class="bde-text-9039-302 bde-text"> ≤ 8 nm </div> </div> </div> </div><div class="bde-div-9039-303 bde-div tile-minimal"> <div class="bde-div-9039-304 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-9039-305 bde-text tile-minimal__text-bmargin-l"> Beam current up to </div><div class="bde-div-9039-306 bde-div"> <div class="bde-text-9039-307 bde-text"> 350 nA </div> </div> </div> </div> </div><div class="bde-div-9039-308 bde-div table-wrapper technical-table"> <div class="bde-div-9039-309 bde-div table__headings-left"> <div class="bde-div-9039-310 bde-div table_cell"> <div class="bde-text-9039-311 bde-text table__theading table__theading-empty"> </div> </div><div class="bde-div-9039-312 bde-div table_cell"> <div class="bde-text-9039-313 bde-text nowrap"> Footprint, electronics, <br>electron optics, pattern <br>generator, main <br>performance specifications </div> </div><div class="bde-div-9039-314 bde-div table_cell"> <div class="bde-text-9039-315 bde-text nowrap"> Stage size<br><br> </div> </div><div class="bde-div-9039-316 bde-div table_cell"> <div class="bde-text-9039-317 bde-text nowrap"> Max. # of 3-inch wafers <br>(with 10-holder airlock) </div> </div><div class="bde-div-9039-318 bde-div table_cell"> <div class="bde-text-9039-319 bde-text nowrap"> Laser interferometer resolution </div> </div><div class="bde-div-9039-320 bde-div table_cell"> <div class="bde-text-9039-321 bde-text nowrap"> Thermo-calibration system </div> </div><div class="bde-div-9039-380 bde-div table_cell"> <div class="bde-text-9039-381 bde-text nowrap"> Positional drift </div> </div> </div><div class="bde-div-9039-322 bde-div table__data-columns"> <div class="bde-advancedslider-9039-323 bde-advancedslider table-aslider"> <div class="breakdance-swiper-wrapper" data-swiper-id="323"> <div class="swiper"> <div class="swiper-wrapper"> <div class="bde-advancedslide-9039-324 bde-advancedslide table__advanced-slide swiper-slide"> <div class="advanced-slider__slide"> <div class="bde-div-9039-325 bde-div table__row"> <div class="bde-div-9039-326 bde-div table_cell"> <div class="bde-text-9039-327 bde-text table__theading"> EBPG5150 Plus </div> </div><div class="bde-div-9039-328 bde-div table_cell"> <div class="bde-text-9039-329 bde-text"> same<br><br><br><br> </div> </div><div class="bde-div-9039-330 bde-div table_cell"> <div class="bde-text-9039-331 bde-text"> 6-inch laser stage <br>(155 mm travel range) </div> </div><div class="bde-div-9039-332 bde-div table_cell"> <div class="bde-text-9039-333 bde-text"> 20<br><br> </div> </div><div class="bde-div-9039-334 bde-div table_cell"> <div class="bde-text-9039-335 bde-text"> λ/1024 (0.6 nm) </div> </div><div class="bde-div-9039-336 bde-div table_cell"> <div class="bde-text-9039-337 bde-text"> standard<br> </div> </div><div class="bde-div-9039-382 bde-div table_cell"> <div class="bde-text-9039-383 bde-text"> < 25 nm / h </div> </div> </div> </div> </div><div class="bde-advancedslide-9039-338 bde-advancedslide table__advanced-slide swiper-slide"> <div class="advanced-slider__slide"> <div class="bde-div-9039-339 bde-div table__row"> <div class="bde-div-9039-340 bde-div table_cell"> <div class="bde-text-9039-341 bde-text table__theading"> EBPG5200 Plus </div> </div><div class="bde-div-9039-342 bde-div table_cell"> <div class="bde-text-9039-343 bde-text"> same<br><br><br><br> </div> </div><div class="bde-div-9039-344 bde-div table_cell"> <div class="bde-text-9039-345 bde-text"> 8-inch laser stage <br>(210 mm travel range) </div> </div><div class="bde-div-9039-346 bde-div table_cell"> <div class="bde-text-9039-347 bde-text"> 40<br><br> </div> </div><div class="bde-div-9039-348 bde-div table_cell"> <div class="bde-text-9039-349 bde-text"> λ/4096 (0.15 nm) </div> </div><div class="bde-div-9039-350 bde-div table_cell"> <div class="bde-text-9039-351 bde-text"> advanced </div> </div><div class="bde-div-9039-386 bde-div table_cell"> <div class="bde-text-9039-387 bde-text"> < 20 nm / h (open loop) </div> </div> </div> </div> </div> </div> </div> <div class="swiper-button-prev"> </div> <div class="swiper-button-next"> </div> <div class="swiper-pagination"></div> </div> </div> </div> </div></div> </section><section class="bde-section-9039-396 bde-section s-downloads1col"> <div class="section-container"><div class="bde-div-9039-397 bde-div download-box download-box--grey-bg download-box-spacing-l"> <div class="bde-columns-9039-398 bde-columns"><div class="bde-column-9039-399 bde-column"> <div class="bde-text-9039-400 bde-text download-box__title"> Are you interested in more details and insights? </div> </div><div class="bde-column-9039-401 bde-column"> <div class="bde-post-loop-9039-402 bde-post-loop"> <div class="ee-posts ee-posts-grid"> <div class="ee-post"> <div class='breakdance'><div class="bde-div-10392-115-11654-10392-1 bde-div download-box__element bde-div-10392-115"> <div class="bde-div-10392-122-11654-10392-1 bde-div bde-div-10392-122"> <div class="bde-text-10392-116-11654-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116"> EBPG Plus Series System Product Brochure (.pdf) </div><div class="bde-code-block-10392-117-11654-10392-1 bde-code-block bde-code-block-10392-117"> <div class='w3eden'> <div class="link-template-default card mb-2"> <div class="card-body"> <div class="media"> <div class="mr-3 img-48"><img decoding="async" class="wpdm_icon" alt="Icon" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%200%200'%3E%3C/svg%3E" data-lazy-src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /><noscript><img decoding="async" class="wpdm_icon" alt="Icon" src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /></noscript></div> <div class="media-body"> <h3 class="package-title"><a href='https://raith.com/download/ebpg-plus-series-system-product-brochure/'>EBPG Plus Series System Product Brochure (.pdf)</a></h3> <div class="text-muted text-small"><i class="fas fa-copy"></i> 1 file(s) <i class="fas fa-hdd ml-3"></i> 4.60 MB</div> </div> <div class="ml-3"> <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='11654'>Download</a> </div> </div> </div> </div> </div> </div><div class="bde-icon-10392-123-11654-10392-1 bde-icon download-box__element__icon bde-icon-10392-123"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="24" height="24" viewBox="0 0 24 24"><rect x="1.44" y="21.59" width="21.12" height="2" stroke-width="0"/><polygon points="22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88" stroke-width="0"/></svg> </div> </div> </div> </div></div> </div> <div class="ee-post"> <div class='breakdance'><div class="bde-div-10392-115-16410-10392-1 bde-div download-box__element bde-div-10392-115"> <div class="bde-div-10392-122-16410-10392-1 bde-div bde-div-10392-122"> <div class="bde-text-10392-116-16410-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116"> Application note: Device trimming of photonic integrated circuits through efficient combination of EBL and FIB (.pdf) </div><div class="bde-code-block-10392-117-16410-10392-1 bde-code-block bde-code-block-10392-117"> <div class='w3eden'> <div class="link-template-default card mb-2"> <div class="card-body"> <div class="media"> <div class="mr-3 img-48"><img decoding="async" class="wpdm_icon" alt="Icon" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%200%200'%3E%3C/svg%3E" data-lazy-src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /><noscript><img decoding="async" class="wpdm_icon" alt="Icon" src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /></noscript></div> <div class="media-body"> <h3 class="package-title"><a href='https://raith.com/download/application-note-device-trimming-ebl-fib/'>Application note: Device trimming of photonic integrated circuits through efficient combination of EBL and FIB (.pdf)</a></h3> <div class="text-muted text-small"><i class="fas fa-copy"></i> 1 file(s) <i class="fas fa-hdd ml-3"></i> 215.20 KB</div> </div> <div class="ml-3"> <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='16410'>Download</a> </div> </div> </div> </div> </div> </div><div class="bde-icon-10392-123-16410-10392-1 bde-icon download-box__element__icon bde-icon-10392-123"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="24" height="24" viewBox="0 0 24 24"><rect x="1.44" y="21.59" width="21.12" height="2" stroke-width="0"/><polygon points="22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-10392-121-16410-10392-1 bde-text bde-text-10392-121"> An advanced fabrication techniques combing EBL and FIB can perfect integrated photonic circuits for cutting-edge applications. This application note explores precise post-fabrication tuning using RAITH's electron beam lithography and focused ion beam patterning. Learn how to correct fabrication imperfections with sub-picometer accuracy for optimized photonic devices, revolutionizing data interconnects, sensors, AI accelerators, and quantum technologies. </div> </div></div> </div> <div class="ee-post"> <div class='breakdance'><div class="bde-div-10392-115-11641-10392-1 bde-div download-box__element bde-div-10392-115"> <div class="bde-div-10392-122-11641-10392-1 bde-div bde-div-10392-122"> <div class="bde-text-10392-116-11641-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116"> Application Note: Metalens Fabrication (.pdf) </div><div class="bde-code-block-10392-117-11641-10392-1 bde-code-block bde-code-block-10392-117"> <div class='w3eden'> <div class="link-template-default card mb-2"> <div class="card-body"> <div class="media"> <div class="mr-3 img-48"><img decoding="async" class="wpdm_icon" alt="Icon" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%200%200'%3E%3C/svg%3E" data-lazy-src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /><noscript><img decoding="async" class="wpdm_icon" alt="Icon" src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /></noscript></div> <div class="media-body"> <h3 class="package-title"><a href='https://raith.com/download/metalens-fabrication/'>Application Note: Metalens Fabrication (.pdf)</a></h3> <div class="text-muted text-small"><i class="fas fa-copy"></i> 1 file(s) <i class="fas fa-hdd ml-3"></i> 824.70 KB</div> </div> <div class="ml-3"> <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='11641'>Download</a> </div> </div> </div> </div> </div> </div><div class="bde-icon-10392-123-11641-10392-1 bde-icon download-box__element__icon bde-icon-10392-123"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="24" height="24" viewBox="0 0 24 24"><rect x="1.44" y="21.59" width="21.12" height="2" stroke-width="0"/><polygon points="22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-10392-121-11641-10392-1 bde-text bde-text-10392-121"> Algorithmic pattern preparation for metalens fabrication achieves high throughput, bypassing design layout conversion, ensuring precision. </div> </div></div> </div> <div class="ee-post"> <div class='breakdance'><div class="bde-div-10392-115-11644-10392-1 bde-div download-box__element bde-div-10392-115"> <div class="bde-div-10392-122-11644-10392-1 bde-div bde-div-10392-122"> <div class="bde-text-10392-116-11644-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116"> Application Note: Photonic circuits for on-chip quantum optics (.pdf) </div><div class="bde-code-block-10392-117-11644-10392-1 bde-code-block bde-code-block-10392-117"> <div class='w3eden'> <div class="link-template-default card mb-2"> <div class="card-body"> <div class="media"> <div class="mr-3 img-48"><img decoding="async" class="wpdm_icon" alt="Icon" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%200%200'%3E%3C/svg%3E" data-lazy-src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /><noscript><img decoding="async" class="wpdm_icon" alt="Icon" src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /></noscript></div> <div class="media-body"> <h3 class="package-title"><a href='https://raith.com/download/photonic-circuits-for-on-chip-quantum-optics/'>Application Note: Photonic circuits for on-chip quantum optics (.pdf)</a></h3> <div class="text-muted text-small"><i class="fas fa-copy"></i> 1 file(s) <i class="fas fa-hdd ml-3"></i> 3.92 MB</div> </div> <div class="ml-3"> <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='11644'>Download</a> </div> </div> </div> </div> </div> </div><div class="bde-icon-10392-123-11644-10392-1 bde-icon download-box__element__icon bde-icon-10392-123"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="24" height="24" viewBox="0 0 24 24"><rect x="1.44" y="21.59" width="21.12" height="2" stroke-width="0"/><polygon points="22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-10392-121-11644-10392-1 bde-text bde-text-10392-121"> EBPG is utilized to develop an on-chip approach with integrated optics for quantum computing, facilitating secure communication and the simulation of complex systems. </div> </div></div> </div> <div class="ee-post"> <div class='breakdance'><div class="bde-div-10392-115-11651-10392-1 bde-div download-box__element bde-div-10392-115"> <div class="bde-div-10392-122-11651-10392-1 bde-div bde-div-10392-122"> <div class="bde-text-10392-116-11651-10392-1 bde-text download-box__element__title download-box__headline bde-text-10392-116"> Application Note: Efficient volume production of periodic nanostructures (.pdf) </div><div class="bde-code-block-10392-117-11651-10392-1 bde-code-block bde-code-block-10392-117"> <div class='w3eden'> <div class="link-template-default card mb-2"> <div class="card-body"> <div class="media"> <div class="mr-3 img-48"><img decoding="async" class="wpdm_icon" alt="Icon" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%200%200'%3E%3C/svg%3E" data-lazy-src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /><noscript><img decoding="async" class="wpdm_icon" alt="Icon" src="https://raith.com/wp-content/plugins/download-manager/assets/file-type-icons/pdf.svg" /></noscript></div> <div class="media-body"> <h3 class="package-title"><a href='https://raith.com/download/efficient-volume-production-of-periodic-nanostructures/'>Application Note: Efficient volume production of periodic nanostructures (.pdf)</a></h3> <div class="text-muted text-small"><i class="fas fa-copy"></i> 1 file(s) <i class="fas fa-hdd ml-3"></i> 268.40 KB</div> </div> <div class="ml-3"> <a href='#unlock' class='wpdm-download-link wpdm-download-locked btn btn-primary btn-sm' data-package='11651'>Download</a> </div> </div> </div> </div> </div> </div><div class="bde-icon-10392-123-11651-10392-1 bde-icon download-box__element__icon bde-icon-10392-123"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="24" height="24" viewBox="0 0 24 24"><rect x="1.44" y="21.59" width="21.12" height="2" stroke-width="0"/><polygon points="22.56 7.88 21.13 6.47 13 14.75 13 .41 11 .41 11 14.74 2.87 6.47 1.44 7.88 9.98 16.55 9.98 16.55 12 18.62 13.89 16.69 13.89 16.69 22.56 7.88" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-10392-121-11651-10392-1 bde-text bde-text-10392-121"> Many applications in photonics, optoelectronics, displays, biosensors, etc. involve covering large areas with periodic nanostructures. To complement serial EBL writings, this application note describes the combination of an electron beam lithography system and photolithography system to efficiently fabricate periodic nanostructures over large areas with high precision and high throughput. </div> </div></div> </div> </div> </div> </div></div> </div></div> </section><section id="application_pattern" class="bde-section-9039-212 bde-section s-applicationlist"> <div class="section-container"><div class="bde-text-9039-213 bde-text TxColorGray tiny-padding-left"> Application pattern </div><h2 class="bde-heading-9039-214 bde-heading"> Low-noise and high throughput patterns </h2><div class="bde-grid-9039-215 bde-grid content-indent-sidebar-left"> <div class="bde-div-9039-216 bde-div tile-usecase"> <div class="bde-image-9039-217 bde-image"> <figure class="breakdance-image breakdance-image--9482"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201274%20851'%3E%3C/svg%3E" width="1274" height="851" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate.jpg 1274w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-1024x684.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-768x513.jpg 768w" data-lazy-sizes="(max-width: 1274px) 100vw, 1274px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate.jpg" width="1274" height="851" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate.jpg 1274w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-1024x684.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-photonic-cnot-quantum-gate-768x513.jpg 768w" sizes="(max-width: 1274px) 100vw, 1274px"></noscript></div> </div></figure> </div><div class="bde-div-9039-218 bde-div tile-usecase__content"> <div class="bde-text-9039-219 bde-text"> Photonic CNOT quantum gate; Menno Poot, Yale University, USA </div> </div> </div><div class="bde-div-9039-220 bde-div tile-usecase"> <div class="bde-image-9039-221 bde-image"> <figure class="breakdance-image breakdance-image--9481"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20617%20466'%3E%3C/svg%3E" width="617" height="466" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate.jpg 617w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate-300x227.jpg 300w" data-lazy-sizes="(max-width: 617px) 100vw, 617px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate.jpg" width="617" height="466" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate.jpg 617w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-overlay-zone-plate-300x227.jpg 300w" sizes="(max-width: 617px) 100vw, 617px"></noscript></div> </div></figure> </div><div class="bde-div-9039-222 bde-div tile-usecase__content"> <div class="bde-text-9039-223 bde-text"> Overlay accuracy of much better than 5 nm demonstrated on a zone plate; CRXO/LBL, Berkley, USA </div> </div> </div><div class="bde-div-9039-224 bde-div tile-usecase"> <div class="bde-image-9039-225 bde-image"> <figure class="breakdance-image breakdance-image--9479"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201280%20896'%3E%3C/svg%3E" width="1280" height="896" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator.jpg 1280w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-300x210.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-1024x717.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-768x538.jpg 768w" data-lazy-sizes="(max-width: 1280px) 100vw, 1280px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator.jpg" width="1280" height="896" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator.jpg 1280w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-300x210.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-1024x717.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-microdisk-resonator-768x538.jpg 768w" sizes="(max-width: 1280px) 100vw, 1280px"></noscript></div> </div></figure> </div><div class="bde-div-9039-226 bde-div tile-usecase__content"> <div class="bde-text-9039-227 bde-text"> Microdisk resonator embedded into a sunflower-type circular photonic crystal; Xufeng Zhang, Yale University, USA </div> </div> </div><div class="bde-div-9039-228 bde-div tile-usecase"> <div class="bde-image-9039-229 bde-image"> <figure class="breakdance-image breakdance-image--9478"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20649%20394'%3E%3C/svg%3E" width="649" height="394" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern.jpg 649w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern-300x182.jpg 300w" data-lazy-sizes="(max-width: 649px) 100vw, 649px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern.jpg" width="649" height="394" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern.jpg 649w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-high-resolution-pattern-300x182.jpg 300w" sizes="(max-width: 649px) 100vw, 649px"></noscript></div> </div></figure> </div><div class="bde-div-9039-230 bde-div tile-usecase__content"> <div class="bde-text-9039-231 bde-text"> Test pattern with ultra-high resolution lines (5 nm) with 30 nm pitch. Pattern homogeneity is maintained over an entire wafer. </div> </div> </div><div class="bde-div-9039-232 bde-div tile-usecase"> <div class="bde-image-9039-233 bde-image"> <figure class="breakdance-image breakdance-image--9477"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201282%20773'%3E%3C/svg%3E" width="1282" height="773" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device.jpg 1282w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-300x181.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-1024x617.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-768x463.jpg 768w" data-lazy-sizes="(max-width: 1282px) 100vw, 1282px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device.jpg" width="1282" height="773" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device.jpg 1282w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-300x181.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-1024x617.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-gaas-t-gate-device-768x463.jpg 768w" sizes="(max-width: 1282px) 100vw, 1282px"></noscript></div> </div></figure> </div><div class="bde-div-9039-234 bde-div tile-usecase__content"> <div class="bde-text-9039-235 bde-text"> GaAs T gate device </div> </div> </div><div class="bde-div-9039-236 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9039-237 bde-image"> <figure class="breakdance-image breakdance-image--9480"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201024%20660'%3E%3C/svg%3E" width="1024" height="660" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods-300x193.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods-768x495.jpg 768w" data-lazy-sizes="(max-width: 1024px) 100vw, 1024px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods.jpg" width="1024" height="660" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods-300x193.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-nanorods-768x495.jpg 768w" sizes="(max-width: 1024px) 100vw, 1024px"></noscript></div> </div></figure> </div><div class="bde-div-9039-238 bde-div tile-usecase__content"> <div class="bde-text-9039-239 bde-text"> Array of diamond / silicon dioxide nanorods; Sergey Gorelick, Monash University, Australia </div> </div> </div><div class="bde-div-9039-366 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9039-367 bde-image"> <figure class="breakdance-image breakdance-image--9483"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20720%20480'%3E%3C/svg%3E" width="720" height="480" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic.jpg 720w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic-300x200.jpg 300w" data-lazy-sizes="(max-width: 720px) 100vw, 720px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic.jpg" width="720" height="480" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic.jpg 720w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-single-photon-nodes-in-ic-300x200.jpg 300w" sizes="(max-width: 720px) 100vw, 720px"></noscript></div> </div></figure> </div><div class="bde-div-9039-368 bde-div tile-usecase__content"> <div class="bde-text-9039-369 bde-text"> A pair of single-photon nodes in an integrated circuit; M. Petruzzella, Eindhoven University of Technology, Netherlands </div> </div> </div><div class="bde-div-9039-370 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9039-371 bde-image"> <figure class="breakdance-image breakdance-image--9484"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201600%201025'%3E%3C/svg%3E" width="1600" height="1025" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-300x192.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-1024x656.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-768x492.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-1536x984.jpg 1536w" data-lazy-sizes="(max-width: 1600px) 100vw, 1600px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands.jpg" width="1600" height="1025" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-300x192.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-1024x656.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-768x492.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-application-superconducting-islands-1536x984.jpg 1536w" sizes="(max-width: 1600px) 100vw, 1600px"></noscript></div> </div></figure> </div><div class="bde-div-9039-372 bde-div tile-usecase__content"> <div class="bde-text-9039-373 bde-text"> Shadow-grown superconducting islands on InSb nanowires; Sasa Gazibegovic, Delft University of Technology, Netherlands </div> </div> </div><div class="bde-div-9039-392 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9039-393 bde-image"> <figure class="breakdance-image breakdance-image--12343"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20232%20154'%3E%3C/svg%3E" width="232" height="154" data-lazy-sizes="(max-width: 232px) 100vw, 232px" data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-ebpg-application-compound-semiconductor-device.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-ebpg-application-compound-semiconductor-device.jpg" width="232" height="154" sizes="(max-width: 232px) 100vw, 232px"></noscript></div> </div></figure> </div><div class="bde-div-9039-394 bde-div tile-usecase__content"> <div class="bde-text-9039-395 bde-text"> Compound semiconductor application </div> </div> </div> </div></div> </section><section class="bde-section-9039-240 bde-section s-solutions"> <div class="section-container"><div class="bde-text-9039-241 bde-text TxColorGray"> Our solutions </div><h2 class="bde-heading-9039-242 bde-heading" data-entrance="slideLeft"> RAITH offers integrated solutions that increase performance and create market opportunities. In any production environment. </h2><div class="bde-post-loop-9039-243 bde-post-loop"> <div class="ee-posts ee-posts-grid"> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6172-100-8877-6172-1 bde-div card-solution add-box-link bde-div-6172-100"> <div class="bde-div-6172-101-8877-6172-1 bde-div bde-div-6172-101"> <div class="bde-image-6172-102-8877-6172-1 bde-image bde-image-6172-102"> <figure class="breakdance-image breakdance-image--11522"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20185%20125'%3E%3C/svg%3E" width="185" height="125" data-lazy-sizes="(max-width: 185px) 100vw, 185px" alt="RAITH Patterning: patterning solutions for seamless designs." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-solution_patterning-tile.svg"><noscript><img decoding="async" 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class="bde-text-6172-107-8877-6172-1 bde-text bde-text-6172-107"> <p>By eliminating stitching errors, our solution guarantees optimal performance and reliability, driving breakthroughs.</p> </div> </div> </div><div class="bde-div-6172-110-8877-6172-1 bde-div card-bottom-link card-bottom-link--short bde-div-6172-110"> <div class="bde-button-6172-112-8877-6172-1 bde-button card-solution__button bde-button-6172-112"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/solutions/patterning/" target="_self" data-type="url" > <span class="button-atom__text">Patterning Solution</span> </a> </div> </div> </div></div> </article> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6172-100-8871-6172-1 bde-div card-solution add-box-link bde-div-6172-100"> <div class="bde-div-6172-101-8871-6172-1 bde-div bde-div-6172-101"> <div class="bde-image-6172-102-8871-6172-1 bde-image bde-image-6172-102"> <figure class="breakdance-image breakdance-image--11521"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20185%20125'%3E%3C/svg%3E" width="185" height="125" data-lazy-sizes="(max-width: 185px) 100vw, 185px" alt="RAITH Mix and Match: mixing different lithography methods with ease." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-solution_mix-and-match-tile.svg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-solution_mix-and-match-tile.svg" width="185" height="125" sizes="(max-width: 185px) 100vw, 185px" alt="RAITH Mix and Match: mixing different lithography methods with ease."></noscript></div> </div></figure> </div><div class="bde-div-6172-103-8871-6172-1 bde-div bde-div-6172-103"> <div class="bde-div-6172-104-8871-6172-1 bde-div card-solution__headline-wrapper bde-div-6172-104"> <h3 class="bde-heading-6172-105-8871-6172-1 bde-heading bde-heading-6172-105"> Mix and Match </h3><div class="bde-icon-6172-106-8871-6172-1 bde-icon card-solution__plus-icon bde-icon-6172-106"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="28" height="28" viewBox="0 0 28 28"><polygon points="28 13.12 14.88 13.12 14.88 0 13.12 0 13.12 13.12 0 13.12 0 14.88 13.12 14.88 13.12 28 14.88 28 14.88 14.88 28 14.88 28 13.12" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-6172-107-8871-6172-1 bde-text bde-text-6172-107"> <p>Seamless blending of laser direct writing, ion beam, and electron beam technologies, unlocking new nanostructuring horizons.</p> </div> </div> </div><div class="bde-div-6172-110-8871-6172-1 bde-div card-bottom-link card-bottom-link--short bde-div-6172-110"> <div class="bde-button-6172-112-8871-6172-1 bde-button card-solution__button bde-button-6172-112"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/solutions/mix-and-match/" target="_self" data-type="url" > <span class="button-atom__text">Mix and Match Solution</span> </a> </div> </div> </div></div> </article> <article class="ee-post"> <div class='breakdance'><div class="bde-div-6172-100-8883-6172-1 bde-div card-solution add-box-link bde-div-6172-100"> <div class="bde-div-6172-101-8883-6172-1 bde-div bde-div-6172-101"> <div class="bde-image-6172-102-8883-6172-1 bde-image bde-image-6172-102"> <figure class="breakdance-image breakdance-image--11518"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20185%20125'%3E%3C/svg%3E" width="185" height="125" data-lazy-sizes="(max-width: 185px) 100vw, 185px" alt="RAITH Digital Raith Software is your interface to nanofabrication." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-solution_digital-raith-tile.svg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-solution_digital-raith-tile.svg" width="185" height="125" sizes="(max-width: 185px) 100vw, 185px" alt="RAITH Digital Raith Software is your interface to nanofabrication."></noscript></div> </div></figure> </div><div class="bde-div-6172-103-8883-6172-1 bde-div bde-div-6172-103"> <div class="bde-div-6172-104-8883-6172-1 bde-div card-solution__headline-wrapper bde-div-6172-104"> <h3 class="bde-heading-6172-105-8883-6172-1 bde-heading bde-heading-6172-105"> Digital RAITH </h3><div class="bde-icon-6172-106-8883-6172-1 bde-icon card-solution__plus-icon bde-icon-6172-106"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="28" height="28" viewBox="0 0 28 28"><polygon points="28 13.12 14.88 13.12 14.88 0 13.12 0 13.12 13.12 0 13.12 0 14.88 13.12 14.88 13.12 28 14.88 28 14.88 14.88 28 14.88 28 13.12" stroke-width="0"/></svg> </div> </div> </div><div class="bde-text-6172-107-8883-6172-1 bde-text bde-text-6172-107"> <p>Mature software engineering for seamless integration, efficient task support, and user-friendly operation.</p> </div> </div> </div><div class="bde-div-6172-110-8883-6172-1 bde-div card-bottom-link card-bottom-link--short bde-div-6172-110"> <div class="bde-button-6172-112-8883-6172-1 bde-button card-solution__button bde-button-6172-112"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/solutions/digital-raith/" target="_self" data-type="url" > <span class="button-atom__text">Digital RAITH Solution</span> </a> </div> </div> </div></div> </article> </div> </div></div> </section><section class="bde-section-9039-244 bde-section s-references"> <div class="section-container"><div class="bde-columns-9039-245 bde-columns"><div class="bde-column-9039-246 bde-column"> <div class="bde-text-9039-247 bde-text teaser-left-col TxColorGray"> References </div> </div><div class="bde-column-9039-248 bde-column"> <div class="bde-text-9039-249 bde-text"> Our customers are excited with their experiences using our products. They emphasize the precision, versatility, and reliability of our EBPG system series, highlighting how it has improved their approach to nanotechnology and advanced electronics manufacturing. </div> </div></div><div class="bde-post-loop-9039-250 bde-post-loop"> <div class="breakdance-swiper-wrapper" data-swiper-id="250"><div class="swiper"><div class="ee-posts swiper-wrapper ee-posts-slider"> <article class="ee-post swiper-slide"> <div class='breakdance'><article class="bde-div-7196-100-8919-7196-1 bde-div reference-item bde-div-7196-100"> <div class="bde-video-7196-101-8919-7196-1 bde-video bde-video-7196-101"> <div class="ee-video-container"> <lite-youtube videoid="pIncbUgMoE4" style="background-image: url(https://i.ytimg.com/vi/pIncbUgMoE4/maxresdefault.jpg); " class="ee-video" title="" params="&playsinline=0&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-7196-102-8919-7196-1 bde-div adv-slider__content bde-div-7196-102"> <h3 class="bde-heading-7196-103-8919-7196-1 bde-heading bde-heading-7196-103"> EBPG at University of California, Berkeley, Irfan Siddiqi </h3><div class="bde-text-7196-104-8919-7196-1 bde-text excerpt bde-text-7196-104"> <p>We interviewed Irfan Siddiqi, Professor at UC Berkeley, and asked him for his honest opinion about using a RAITH EBPG5150. Next to describing his user experience, he gives insight […]</p> </div><div class="bde-div-7196-105-8919-7196-1 bde-div card-bottom-link card-bottom-link-xshort bde-div-7196-105"> <div class="bde-button-7196-106-8919-7196-1 bde-button card-solution__button bde-button-7196-106"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/references/siddiqi-uc-berkeley/" target="_self" data-type="url" > <span class="button-atom__text">Explore the details</span> </a> </div> </div> </div> </article></div> </article> <article class="ee-post swiper-slide"> <div class='breakdance'><article class="bde-div-7196-100-8915-7196-1 bde-div reference-item bde-div-7196-100"> <div class="bde-video-7196-101-8915-7196-1 bde-video bde-video-7196-101"> <div class="ee-video-container"> <lite-youtube videoid="p9JgHH0sFt8" style="background-image: url(https://i.ytimg.com/vi/p9JgHH0sFt8/maxresdefault.jpg); " class="ee-video" title="" params="&playsinline=0&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-7196-102-8915-7196-1 bde-div adv-slider__content bde-div-7196-102"> <h3 class="bde-heading-7196-103-8915-7196-1 bde-heading bde-heading-7196-103"> EBPG at University of California, San Diego, Maribel Montero </h3><div class="bde-text-7196-104-8915-7196-1 bde-text excerpt bde-text-7196-104"> <p>The main user and specialist of the EBPG installed at UCSD is Maribel Montero. She provides insights into her daily work with the system and explains why she is a satisfied RAITH […]</p> </div><div class="bde-div-7196-105-8915-7196-1 bde-div card-bottom-link card-bottom-link-xshort bde-div-7196-105"> <div class="bde-button-7196-106-8915-7196-1 bde-button card-solution__button bde-button-7196-106"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/references/montero-uc-san-diego/" target="_self" data-type="url" > <span class="button-atom__text">Explore the details</span> </a> </div> </div> </div> </article></div> </article> <article class="ee-post swiper-slide"> <div class='breakdance'><article class="bde-div-7196-100-7429-7196-1 bde-div reference-item bde-div-7196-100"> <div class="bde-image-7196-107-7429-7196-1 bde-image bde-image-7196-107"> <figure class="breakdance-image breakdance-image--9578"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201600%20900'%3E%3C/svg%3E" width="1600" height="900" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-1536x864.jpg 1536w" data-lazy-sizes="(max-width: 1600px) 100vw, 1600px" alt="Christiaan Bekker working with EBPG at the University of Queensland." data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq.jpg?ver=1719822532"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq.jpg?ver=1719822532" width="1600" height="900" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-300x169.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-1024x576.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-768x432.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg-bekker-uq-1536x864.jpg 1536w" sizes="(max-width: 1600px) 100vw, 1600px" alt="Christiaan Bekker working with EBPG at the University of Queensland."></noscript></div> </div></figure> </div><div class="bde-div-7196-102-7429-7196-1 bde-div adv-slider__content bde-div-7196-102"> <h3 class="bde-heading-7196-103-7429-7196-1 bde-heading bde-heading-7196-103"> EBPG at the University of Queensland, Christiaan Bekker </h3><div class="bde-text-7196-104-7429-7196-1 bde-text excerpt bde-text-7196-104"> <p>“At the University of Queensland, we recently bought two Raith EBL systems: the eLINE Plus, which was commissioned in 2017, and the EBPG, which arrived in 2018. This has revolutionised […]</p> </div><div class="bde-div-7196-105-7429-7196-1 bde-div card-bottom-link card-bottom-link-xshort bde-div-7196-105"> <div class="bde-button-7196-106-7429-7196-1 bde-button card-solution__button bde-button-7196-106"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/references/bekker-uq/" target="_self" data-type="url" > <span class="button-atom__text">Explore the details</span> </a> </div> </div> </div> </article></div> </article> <article class="ee-post swiper-slide"> <div class='breakdance'><article class="bde-div-7196-100-7413-7196-1 bde-div reference-item bde-div-7196-100"> <div class="bde-image-7196-107-7413-7196-1 bde-image bde-image-7196-107"> <figure class="breakdance-image breakdance-image--9579"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201600%201200'%3E%3C/svg%3E" width="1600" height="1200" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-300x225.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-1024x768.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-768x576.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-1536x1152.jpg 1536w" data-lazy-sizes="(max-width: 1600px) 100vw, 1600px" alt="Dr. Lothar Hahn working with EBPG5200 by RAITH at the Karlsruhe Institute of Technology." data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit.jpg" width="1600" height="1200" srcset="https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-300x225.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-1024x768.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-768x576.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-ebpg5200-hahn-kit-1536x1152.jpg 1536w" sizes="(max-width: 1600px) 100vw, 1600px" alt="Dr. Lothar Hahn working with EBPG5200 by RAITH at the Karlsruhe Institute of Technology."></noscript></div> </div></figure> </div><div class="bde-div-7196-102-7413-7196-1 bde-div adv-slider__content bde-div-7196-102"> <h3 class="bde-heading-7196-103-7413-7196-1 bde-heading bde-heading-7196-103"> EBPG5200 at the KIT Karlsruher Institute of Technology, Dr. Lothar Hahn </h3><div class="bde-text-7196-104-7413-7196-1 bde-text excerpt bde-text-7196-104"> <p>“We decided on an EBPG5200, which combines three functions that are essential in research: a high level of precision, high flexibility, and reliability of use. This combination is critical in […]</p> </div><div class="bde-div-7196-105-7413-7196-1 bde-div card-bottom-link card-bottom-link-xshort bde-div-7196-105"> <div class="bde-button-7196-106-7413-7196-1 bde-button card-solution__button bde-button-7196-106"> <a class="breakdance-link button-atom button-atom--text bde-button__button" href="https://raith.com/references/hahn-kit/" target="_self" data-type="url" > <span class="button-atom__text">Explore the details</span> </a> </div> </div> </div> </article></div> </article> </div></div> <div class="swiper-pagination"></div> </div> </div></div> </section></div> </main><div class="bde-globalblock-6313-124 bde-globalblock"> <div class='breakdance'><section class="bde-section-8571-100-8571-1 bde-section s-hauptcta bde-section-8571-100"> <div class="section-container"><div class="bde-div-8571-101-8571-1 bde-div s-hauptcta__wrapper bde-div-8571-101"> <div class="bde-div-8571-102-8571-1 bde-div s-hauptcta__content s-hauptcta-_contet--narrow 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