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He assumed these positions after working over 25 years at Lawrence Berkeley National Laboratory, Berkeley, California. \n His research interests are in the field of plasmas and materials, especially in arc and magnetron plasmas, plasma diagnostics, HiPIMS, thin films, diamond-like carbon, transparent conducting oxides, electrochromic materials, nanoparticles and nanocomposites. \nSince 2014, Andre also serves as the Editor-in-Chief of Journal of Applied Physics. 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class="js-profile-view-count"></span></p></div></span></div><div class="user-bio-container"><div class="profile-bio fake-truncate js-profile-about" style="margin: 0px;">Andre Anders is Director of the Leibniz Institute of Surface Engineering (IOM) in Leipzig, Germany, and Professor of Applied Physics at the University of Leipzig.  He assumed these positions after working over 25 years at Lawrence Berkeley National Laboratory, Berkeley, California. <br /> His research interests are in the field of plasmas and materials, especially in arc and magnetron plasmas, plasma diagnostics, HiPIMS, thin films, diamond-like carbon, transparent conducting oxides, electrochromic materials, nanoparticles and nanocomposites.  <br />Since 2014, Andre also serves as the Editor-in-Chief of Journal of Applied Physics.<br /><span class="u-fw700">Phone: </span>+49(0)341 235-2308<br /><b>Address: </b>Permoserstr. 15<br />D-04318 Leipzig<br />Germany<br /><div class="js-profile-less-about u-linkUnstyled 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fa-spinner"></i></li></ul></div></div></div><div class="right-panel-container"><div class="user-content-wrapper"><div class="uploads-container" id="social-redesign-work-container"><div class="upload-header"><h2 class="ds2-5-heading-sans-serif-xs">Uploads</h2></div><div class="documents-container backbone-social-profile-documents" style="width: 100%;"><div class="u-taCenter"></div><div class="profile--tab_content_container js-tab-pane tab-pane active" id="all"><div class="profile--tab_heading_container js-section-heading" data-section="Papers" id="Papers"><h3 class="profile--tab_heading_container">Papers by Andre Anders</h3></div><div class="js-work-strip profile--work_container" data-work-id="122858913"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/122858913/Bulk_and_thin_film_model_samples_for_the_analysis_of_the_strain_sensitivity_of_niobium_tin"><img alt="Research paper thumbnail of Bulk and thin film model samples for the analysis of the strain sensitivity of niobium-tin" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/122858913/Bulk_and_thin_film_model_samples_for_the_analysis_of_the_strain_sensitivity_of_niobium_tin">Bulk and thin film model samples for the analysis of the strain sensitivity of niobium-tin</a></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858913"><a 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{"id":122858913,"title":"Bulk and thin film model samples for the analysis of the strain sensitivity of niobium-tin","translated_title":"","metadata":{"publication_date":{"day":null,"month":null,"year":2010,"errors":{}}},"translated_abstract":null,"internal_url":"https://www.academia.edu/122858913/Bulk_and_thin_film_model_samples_for_the_analysis_of_the_strain_sensitivity_of_niobium_tin","translated_internal_url":"","created_at":"2024-08-13T21:42:00.511-07:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Bulk_and_thin_film_model_samples_for_the_analysis_of_the_strain_sensitivity_of_niobium_tin","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":null,"owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":6309,"name":"Metallurgy","url":"https://www.academia.edu/Documents/in/Metallurgy"},{"id":80693,"name":"Tin","url":"https://www.academia.edu/Documents/in/Tin"},{"id":226668,"name":"Niobium","url":"https://www.academia.edu/Documents/in/Niobium"},{"id":464116,"name":"Repetitive Strain Injury","url":"https://www.academia.edu/Documents/in/Repetitive_Strain_Injury"}],"urls":[{"id":43997626,"url":"https://publikationen.bibliothek.kit.edu/240080165"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="122858912"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/122858912/Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions"><img alt="Research paper thumbnail of Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions" class="work-thumbnail" src="https://attachments.academia-assets.com/117432871/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/122858912/Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions">Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions</a></div><div class="wp-workCard_item"><span>Journal of vacuum science & technology</span><span>, Aug 23, 2019</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bomba...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam parameters (ion energy: 0.5-1 keV; ion species: Ne, Ar, Xe) and geometrical parameters (ion incidence angle, polar emission angle, scattering angle) are measured by means of energy-selective mass spectrometry. The presence of anisotropic effects due to direct sputtering and scattering is discussed and correlated with process parameters. The experimental results are compared to calculations based on a simple elastic binary collision model and to simulations using the Monte-Carlo code SDTrimSP. The influence of the contribution of implanted primary ions on energy distributions of sputtered and scattered particles is studied in simulations. It is found that a 10% variation of the target composition leads to detectable but small differences in the energy distributions of scattered ions. Comparison with previously reported data for other ion/target configurations confirms the presence of similar trends and anisotropic effects: the number of high-energy sputtered ions increases with increasing energy of incident ions and decreasing scattering angle. The effect of the ion/target mass ratio is additionally investigated. Small differences are observed with the change of the primary ion species: the closer the mass ratio to unity, the higher the average energy of sputtered ions. The presence of peaks, assigned to different mechanisms of direct scattering, strongly depends on the ion/target mass ratio.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="5761d68a1434fc37cebc532a9067a740" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":117432871,"asset_id":122858912,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/117432871/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858912"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="122858912"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 122858912; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=122858912]").text(description); $(".js-view-count[data-work-id=122858912]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 122858912; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='122858912']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "5761d68a1434fc37cebc532a9067a740" } } $('.js-work-strip[data-work-id=122858912]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":122858912,"title":"Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions","translated_title":"","metadata":{"publisher":"American Institute of Physics","grobid_abstract":"The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam parameters (ion energy: 0.5-1 keV; ion species: Ne, Ar, Xe) and geometrical parameters (ion incidence angle, polar emission angle, scattering angle) are measured by means of energy-selective mass spectrometry. The presence of anisotropic effects due to direct sputtering and scattering is discussed and correlated with process parameters. The experimental results are compared to calculations based on a simple elastic binary collision model and to simulations using the Monte-Carlo code SDTrimSP. The influence of the contribution of implanted primary ions on energy distributions of sputtered and scattered particles is studied in simulations. It is found that a 10% variation of the target composition leads to detectable but small differences in the energy distributions of scattered ions. Comparison with previously reported data for other ion/target configurations confirms the presence of similar trends and anisotropic effects: the number of high-energy sputtered ions increases with increasing energy of incident ions and decreasing scattering angle. The effect of the ion/target mass ratio is additionally investigated. Small differences are observed with the change of the primary ion species: the closer the mass ratio to unity, the higher the average energy of sputtered ions. 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The energy distributions in dependence on ion beam parameters (ion energy: 0.5-1 keV; ion species: Ne, Ar, Xe) and geometrical parameters (ion incidence angle, polar emission angle, scattering angle) are measured by means of energy-selective mass spectrometry. The presence of anisotropic effects due to direct sputtering and scattering is discussed and correlated with process parameters. The experimental results are compared to calculations based on a simple elastic binary collision model and to simulations using the Monte-Carlo code SDTrimSP. The influence of the contribution of implanted primary ions on energy distributions of sputtered and scattered particles is studied in simulations. It is found that a 10% variation of the target composition leads to detectable but small differences in the energy distributions of scattered ions. Comparison with previously reported data for other ion/target configurations confirms the presence of similar trends and anisotropic effects: the number of high-energy sputtered ions increases with increasing energy of incident ions and decreasing scattering angle. The effect of the ion/target mass ratio is additionally investigated. Small differences are observed with the change of the primary ion species: the closer the mass ratio to unity, the higher the average energy of sputtered ions. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="122858911"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/122858911/Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution"><img alt="Research paper thumbnail of Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution" class="work-thumbnail" src="https://attachments.academia-assets.com/117432903/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/122858911/Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution">Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution</a></div><div class="wp-workCard_item"><span>Journal of Physics D</span><span>, Nov 23, 2018</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">For cathodic arcs, the cathode material is one of the most important determinants of plasma prope...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">For cathodic arcs, the cathode material is one of the most important determinants of plasma properties. Consequently, the cathode material -plasma relationship is of special interest in related fundamental research as well as in applications like the synthesis of thin films and coatings. In the latter, the use of multi-element cathodes in inert as well as reactive gas atmospheres is common practice. To further improve the physical understanding of cathodic arcs in such settings, we analyze ions in pulsed cathodic arc plasmas from Nb, Al and two composite Nb-Al cathodes in high time-resolution using a mass-energy-analyzer. The experiments were conducted in Ar atmosphere at total pressures of 0.04, 0.20 and 0.40 Pa, and are compared to former results in high vacuum at 10 -4 Pa. In addition to examining the influence of Ar on ion properties and their cathode material dependence, the results are used to discuss physical concepts in cathodic arcs, like the gas-dynamic expansion of the cathode spot plasma, or the influence of charge exchange collisions of ions with neutrals. While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. Ar ions in different time and energy regimes up to 150 eV were observed and compared to Nb and Al ions, showing overlapping velocity distributions for Nb, Al and Ar + ions, but also Ar 2+ ions faster than other ion species. 1</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="e39a6d52a26377c185365961613f0cca" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":117432903,"asset_id":122858911,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/117432903/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858911"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="122858911"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 122858911; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=122858911]").text(description); $(".js-view-count[data-work-id=122858911]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 122858911; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='122858911']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "e39a6d52a26377c185365961613f0cca" } } $('.js-work-strip[data-work-id=122858911]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":122858911,"title":"Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution","translated_title":"","metadata":{"publisher":"Institute of Physics","grobid_abstract":"For cathodic arcs, the cathode material is one of the most important determinants of plasma properties. Consequently, the cathode material -plasma relationship is of special interest in related fundamental research as well as in applications like the synthesis of thin films and coatings. In the latter, the use of multi-element cathodes in inert as well as reactive gas atmospheres is common practice. To further improve the physical understanding of cathodic arcs in such settings, we analyze ions in pulsed cathodic arc plasmas from Nb, Al and two composite Nb-Al cathodes in high time-resolution using a mass-energy-analyzer. The experiments were conducted in Ar atmosphere at total pressures of 0.04, 0.20 and 0.40 Pa, and are compared to former results in high vacuum at 10 -4 Pa. In addition to examining the influence of Ar on ion properties and their cathode material dependence, the results are used to discuss physical concepts in cathodic arcs, like the gas-dynamic expansion of the cathode spot plasma, or the influence of charge exchange collisions of ions with neutrals. While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. Ar ions in different time and energy regimes up to 150 eV were observed and compared to Nb and Al ions, showing overlapping velocity distributions for Nb, Al and Ar + ions, but also Ar 2+ ions faster than other ion species. 1","publication_date":{"day":23,"month":11,"year":2018,"errors":{}},"publication_name":"Journal of Physics D","grobid_abstract_attachment_id":117432903},"translated_abstract":null,"internal_url":"https://www.academia.edu/122858911/Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution","translated_internal_url":"","created_at":"2024-08-13T21:41:59.892-07:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":117432903,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/117432903/thumbnails/1.jpg","file_name":"pdf.pdf","download_url":"https://www.academia.edu/attachments/117432903/download_file","bulk_download_file_name":"Influence_of_Ar_gas_pressure_on_ion_ener.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/117432903/pdf-libre.pdf?1723611340=\u0026response-content-disposition=attachment%3B+filename%3DInfluence_of_Ar_gas_pressure_on_ion_ener.pdf\u0026Expires=1741733688\u0026Signature=WrDaUyXw4z-5jH87QTsHGcU3exjZIbnmgAXiACeS0yn7gsQ8a0iqyQ8CtqRI~uBw906QO-z-NmSpB2ShyRJdhfAqhFv3A8UpFqEEaWg5WX896Uy-KoS-l2el8rTtKrIZ-s9t7G7rxECcoq0pyo~PHWAKsf1g64A2LPy4iIL7dkXqwzGnStSNdfTIdAifYJPx2n-r1lN86NwtbFM9ZodgJ7D3JPSoKCFSQLPCB~X7CZWI0QyHYfWSxV5DRT5cxT7KHIqTcB20FNmu-ofL9ETEowKqqqtngKeG-~TqgW5xDk1SNpUDiGqh8qrRewjtE2HueXOu-WIeAmSWlf2bKB5HxQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution","translated_slug":"","page_count":34,"language":"en","content_type":"Work","summary":"For cathodic arcs, the cathode material is one of the most important determinants of plasma properties. Consequently, the cathode material -plasma relationship is of special interest in related fundamental research as well as in applications like the synthesis of thin films and coatings. In the latter, the use of multi-element cathodes in inert as well as reactive gas atmospheres is common practice. To further improve the physical understanding of cathodic arcs in such settings, we analyze ions in pulsed cathodic arc plasmas from Nb, Al and two composite Nb-Al cathodes in high time-resolution using a mass-energy-analyzer. The experiments were conducted in Ar atmosphere at total pressures of 0.04, 0.20 and 0.40 Pa, and are compared to former results in high vacuum at 10 -4 Pa. In addition to examining the influence of Ar on ion properties and their cathode material dependence, the results are used to discuss physical concepts in cathodic arcs, like the gas-dynamic expansion of the cathode spot plasma, or the influence of charge exchange collisions of ions with neutrals. While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. Ar ions in different time and energy regimes up to 150 eV were observed and compared to Nb and Al ions, showing overlapping velocity distributions for Nb, Al and Ar + ions, but also Ar 2+ ions faster than other ion species. 1","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":117432903,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/117432903/thumbnails/1.jpg","file_name":"pdf.pdf","download_url":"https://www.academia.edu/attachments/117432903/download_file","bulk_download_file_name":"Influence_of_Ar_gas_pressure_on_ion_ener.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/117432903/pdf-libre.pdf?1723611340=\u0026response-content-disposition=attachment%3B+filename%3DInfluence_of_Ar_gas_pressure_on_ion_ener.pdf\u0026Expires=1741733688\u0026Signature=WrDaUyXw4z-5jH87QTsHGcU3exjZIbnmgAXiACeS0yn7gsQ8a0iqyQ8CtqRI~uBw906QO-z-NmSpB2ShyRJdhfAqhFv3A8UpFqEEaWg5WX896Uy-KoS-l2el8rTtKrIZ-s9t7G7rxECcoq0pyo~PHWAKsf1g64A2LPy4iIL7dkXqwzGnStSNdfTIdAifYJPx2n-r1lN86NwtbFM9ZodgJ7D3JPSoKCFSQLPCB~X7CZWI0QyHYfWSxV5DRT5cxT7KHIqTcB20FNmu-ofL9ETEowKqqqtngKeG-~TqgW5xDk1SNpUDiGqh8qrRewjtE2HueXOu-WIeAmSWlf2bKB5HxQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":48,"name":"Engineering","url":"https://www.academia.edu/Documents/in/Engineering"},{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":11740,"name":"Atomic Physics","url":"https://www.academia.edu/Documents/in/Atomic_Physics"},{"id":71287,"name":"Cathodic Protection","url":"https://www.academia.edu/Documents/in/Cathodic_Protection"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":118582,"name":"Physical sciences","url":"https://www.academia.edu/Documents/in/Physical_sciences"},{"id":348756,"name":"Ion","url":"https://www.academia.edu/Documents/in/Ion"},{"id":1131650,"name":"Cathode","url":"https://www.academia.edu/Documents/in/Cathode"}],"urls":[{"id":43997624,"url":"https://doi.org/10.1088/1361-6463/aaeecc"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="122858905"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/122858905/Copper_Sputter_Thyself"><img alt="Research paper thumbnail of Copper, Sputter Thyself" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/122858905/Copper_Sputter_Thyself">Copper, Sputter Thyself</a></div><div class="wp-workCard_item"><span>Focus</span><span>, 2009</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858905"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="122858905"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 122858905; 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="116836983"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen"><img alt="Research paper thumbnail of Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen">Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen</a></div><div class="wp-workCard_item"><span>Applied Physics Letters</span><span>, 1999</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">We describe the temporal development of the plasma composition of pulsed aluminum plasma streams ...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of &gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="116836983"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="116836983"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 116836983; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=116836983]").text(description); $(".js-view-count[data-work-id=116836983]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 116836983; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='116836983']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=116836983]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":116836983,"title":"Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen","translated_title":"","metadata":{"abstract":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","publisher":"AIP Publishing","publication_date":{"day":null,"month":null,"year":1999,"errors":{}},"publication_name":"Applied Physics Letters"},"translated_abstract":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","internal_url":"https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen","translated_internal_url":"","created_at":"2024-03-29T08:03:27.516-07:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":48,"name":"Engineering","url":"https://www.academia.edu/Documents/in/Engineering"},{"id":523,"name":"Chemistry","url":"https://www.academia.edu/Documents/in/Chemistry"},{"id":5769,"name":"Mass Spectrometry","url":"https://www.academia.edu/Documents/in/Mass_Spectrometry"},{"id":101573,"name":"Thin Film","url":"https://www.academia.edu/Documents/in/Thin_Film"},{"id":109198,"name":"Lightning","url":"https://www.academia.edu/Documents/in/Lightning"},{"id":112619,"name":"Time of Flight","url":"https://www.academia.edu/Documents/in/Time_of_Flight"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":118582,"name":"Physical sciences","url":"https://www.academia.edu/Documents/in/Physical_sciences"},{"id":158186,"name":"Time Resolved","url":"https://www.academia.edu/Documents/in/Time_Resolved"},{"id":348756,"name":"Ion","url":"https://www.academia.edu/Documents/in/Ion"},{"id":369525,"name":"Aluminium","url":"https://www.academia.edu/Documents/in/Aluminium"},{"id":380825,"name":"Oxygen","url":"https://www.academia.edu/Documents/in/Oxygen"},{"id":430542,"name":"Arcs","url":"https://www.academia.edu/Documents/in/Arcs"},{"id":473797,"name":"Microstructures","url":"https://www.academia.edu/Documents/in/Microstructures"},{"id":1523712,"name":"Atmospheric Electricity","url":"https://www.academia.edu/Documents/in/Atmospheric_Electricity"},{"id":2638670,"name":"plasma cleaning","url":"https://www.academia.edu/Documents/in/plasma_cleaning"}],"urls":[{"id":40700242,"url":"http://aip.scitation.org/doi/pdf/10.1063/1.124457"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="115840964"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/115840964/Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment"><img alt="Research paper thumbnail of Results on intense beam focusing and neutralization from the neutralized beam experiment" class="work-thumbnail" src="https://attachments.academia-assets.com/112136580/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/115840964/Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment">Results on intense beam focusing and neutralization from the neutralized beam experiment</a></div><div class="wp-workCard_item"><span>Lawrence Berkeley National Laboratory</span><span>, Oct 31, 2003</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Experimental techniques to provide active neutralization for space-charge-dominated beams as well...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Experimental techniques to provide active neutralization for space-charge-dominated beams as well as to prevent uncontrolled ion beam neutralization by stray electrons have been demonstrated. Neutralization is provided by a localized plasma injected from a cathode arc source. Unwanted secondary electrons produced at the wall by halo particle impact are suppressed using a radial mesh liner that is positively biased inside a beam drift tube. Measurements of current transmission, beam spot size as a function of axial position, beam energy, and plasma source conditions are presented along with detailed comparisons with theory.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="730812687998b6c02d6d32c848bbc21c" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":112136580,"asset_id":115840964,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/112136580/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="115840964"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="115840964"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 115840964; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=115840964]").text(description); $(".js-view-count[data-work-id=115840964]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 115840964; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='115840964']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "730812687998b6c02d6d32c848bbc21c" } } $('.js-work-strip[data-work-id=115840964]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":115840964,"title":"Results on intense beam focusing and neutralization from the neutralized beam experiment","translated_title":"","metadata":{"publisher":"United States Department of Energy","grobid_abstract":"Experimental techniques to provide active neutralization for space-charge-dominated beams as well as to prevent uncontrolled ion beam neutralization by stray electrons have been demonstrated. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751760"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751760/Characterization_of_a_reactive_arc_plasma"><img alt="Research paper thumbnail of Characterization of a reactive arc plasma" class="work-thumbnail" src="https://attachments.academia-assets.com/109194934/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751760/Characterization_of_a_reactive_arc_plasma">Characterization of a reactive arc plasma</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">The plasma composition, average charge state values, as well as the kinetic energy of the aluminu...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">The plasma composition, average charge state values, as well as the kinetic energy of the aluminum ions have been measured by TOF spectrometry as a function of the oxygen partial pressure. The plasma was produced in cathodic arc spots. It was found that the oxygen partial pressure reduces the average charge state as well as the kinetic ion energy. These data are important for the evolution of both composition and structure during thin film growth from highly ionized plasma.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="cab4852b4c07b6709cfd9a6330559c7c" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194934,"asset_id":111751760,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194934/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751760"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751760"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751760; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751760]").text(description); $(".js-view-count[data-work-id=111751760]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751760; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751760']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "cab4852b4c07b6709cfd9a6330559c7c" } } $('.js-work-strip[data-work-id=111751760]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751760,"title":"Characterization of a reactive arc plasma","translated_title":"","metadata":{"ai_title_tag":"Arc Plasma Ionization Affected by Oxygen Pressure","grobid_abstract":"The plasma composition, average charge state values, as well as the kinetic energy of the aluminum ions have been measured by TOF spectrometry as a function of the oxygen partial pressure. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751757"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature"><img alt="Research paper thumbnail of Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature">Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature</a></div><div class="wp-workCard_item"><span>Journal of vacuum science & technology</span><span>, May 1, 2022</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on ...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751757"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751757"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751757; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751757]").text(description); $(".js-view-count[data-work-id=111751757]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751757; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751757']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=111751757]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751757,"title":"Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature","translated_title":"","metadata":{"abstract":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","publisher":"American Institute of Physics","publication_date":{"day":1,"month":5,"year":2022,"errors":{}},"publication_name":"Journal of vacuum science \u0026 technology"},"translated_abstract":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","internal_url":"https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature","translated_internal_url":"","created_at":"2023-12-18T09:28:32.364-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":48,"name":"Engineering","url":"https://www.academia.edu/Documents/in/Engineering"},{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":101573,"name":"Thin Film","url":"https://www.academia.edu/Documents/in/Thin_Film"},{"id":118582,"name":"Physical sciences","url":"https://www.academia.edu/Documents/in/Physical_sciences"},{"id":185387,"name":"Sputtering","url":"https://www.academia.edu/Documents/in/Sputtering"},{"id":192323,"name":"Crystallinity","url":"https://www.academia.edu/Documents/in/Crystallinity"},{"id":688966,"name":"Gallium","url":"https://www.academia.edu/Documents/in/Gallium"},{"id":693812,"name":"Ion Beam","url":"https://www.academia.edu/Documents/in/Ion_Beam"},{"id":925604,"name":"Sputter Deposition","url":"https://www.academia.edu/Documents/in/Sputter_Deposition"},{"id":1801184,"name":"Vacuum Science and Technology","url":"https://www.academia.edu/Documents/in/Vacuum_Science_and_Technology"}],"urls":[{"id":37334643,"url":"https://doi.org/10.1116/6.0001825"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751756"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report"><img alt="Research paper thumbnail of Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report">Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion S...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751756"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751756"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751756; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751756]").text(description); $(".js-view-count[data-work-id=111751756]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751756; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751756']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=111751756]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751756,"title":"Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report","translated_title":"","metadata":{"abstract":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","publication_date":{"day":22,"month":12,"year":2008,"errors":{}}},"translated_abstract":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","internal_url":"https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report","translated_internal_url":"","created_at":"2023-12-18T09:28:32.176-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":9355,"name":"Equations of State","url":"https://www.academia.edu/Documents/in/Equations_of_State"},{"id":13268,"name":"Evaporation","url":"https://www.academia.edu/Documents/in/Evaporation"},{"id":48459,"name":"High Voltage","url":"https://www.academia.edu/Documents/in/High_Voltage"},{"id":80555,"name":"Heavy Ions Physics","url":"https://www.academia.edu/Documents/in/Heavy_Ions_Physics"},{"id":134591,"name":"Evaporative Cooling","url":"https://www.academia.edu/Documents/in/Evaporative_Cooling"},{"id":179332,"name":"Hydrodynamics","url":"https://www.academia.edu/Documents/in/Hydrodynamics"},{"id":212475,"name":"Electric Fields","url":"https://www.academia.edu/Documents/in/Electric_Fields"},{"id":238655,"name":"Implementation","url":"https://www.academia.edu/Documents/in/Implementation"},{"id":270366,"name":"Heat Conduction","url":"https://www.academia.edu/Documents/in/Heat_Conduction"},{"id":317745,"name":"High Speed","url":"https://www.academia.edu/Documents/in/High_Speed"},{"id":325234,"name":"Compression","url":"https://www.academia.edu/Documents/in/Compression"},{"id":418058,"name":"Dynamic Response","url":"https://www.academia.edu/Documents/in/Dynamic_Response"},{"id":542983,"name":"Heating","url":"https://www.academia.edu/Documents/in/Heating"},{"id":1031112,"name":"Emissivity","url":"https://www.academia.edu/Documents/in/Emissivity"},{"id":1120502,"name":"Experimental Data","url":"https://www.academia.edu/Documents/in/Experimental_Data"},{"id":1130559,"name":"Electric Field","url":"https://www.academia.edu/Documents/in/Electric_Field"},{"id":1320599,"name":"Equation of State","url":"https://www.academia.edu/Documents/in/Equation_of_State"},{"id":1557246,"name":"Functional Form","url":"https://www.academia.edu/Documents/in/Functional_Form"},{"id":2193830,"name":"Brightness temperature","url":"https://www.academia.edu/Documents/in/Brightness_temperature"},{"id":2282000,"name":"Current Transformer","url":"https://www.academia.edu/Documents/in/Current_Transformer"}],"urls":[{"id":37334642,"url":"https://www.osti.gov/biblio/945605"}]}, dispatcherData: dispatcherData }); 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751753"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas"><img alt="Research paper thumbnail of Pulsed biasing techniques with fully ionized metal plasmas" class="work-thumbnail" src="https://attachments.academia-assets.com/109194924/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas">Pulsed biasing techniques with fully ionized metal plasmas</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film depo...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. Depending on the substrate bias voltage, MePIIID can also operate in a pure ion implantation or pure ion deposition mode. This paper is a brief review of the MePIIID technique and results obtained. The fully ionized metal or carbon plasma is conventionally produced by filtered vacuum arcs. Magnetic filters are used to remove unwanted macroparticles. Pulsing the substrate bias is advantageous for several reasons, and primarily a means of suppressing substrate arcing. Heat management and stress control are other important factors. Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="58dc5ea20eced619917a85a09ca3d66d" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194924,"asset_id":111751753,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194924/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751753"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751753"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751753; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751753]").text(description); $(".js-view-count[data-work-id=111751753]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751753; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751753']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "58dc5ea20eced619917a85a09ca3d66d" } } $('.js-work-strip[data-work-id=111751753]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751753,"title":"Pulsed biasing techniques with fully ionized metal plasmas","translated_title":"","metadata":{"grobid_abstract":"(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. Depending on the substrate bias voltage, MePIIID can also operate in a pure ion implantation or pure ion deposition mode. This paper is a brief review of the MePIIID technique and results obtained. The fully ionized metal or carbon plasma is conventionally produced by filtered vacuum arcs. Magnetic filters are used to remove unwanted macroparticles. Pulsing the substrate bias is advantageous for several reasons, and primarily a means of suppressing substrate arcing. Heat management and stress control are other important factors. Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.","publication_date":{"day":23,"month":2,"year":2001,"errors":{}},"grobid_abstract_attachment_id":109194924},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas","translated_internal_url":"","created_at":"2023-12-18T09:28:31.714-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194924,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194924/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194924/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194924/qt8np1k5m9-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=dlHnZ3hh9BwuSVOPHFCtweC0vkPf0WIYTFLOrrFvsvNx7j23wQiFr~wkRDmKaiZn6p7tr1MJdGE81jstw6wSfMLHlekA1b~x33cxR21fxjU4JqsqBYd3aCf-w4oXlEZIwEPkv~BoYc~RgyfQKfj5QUlSpklcpSl7ZbjKmHoFOzCa31DCzKALMB11~9vVVsAGegf0-jVm9VKytLvnVSfBD2YAOQ5IPVIKDHfMibVTwopH63gDAk6PVOsJ9Vw4JKGlBTQkJU9~9GVqgWUDQbZbHZUlvChrcZhmgZvwbhDW16YYfnoS3T6k7kZ9lmR9acFkReJzl7rcFZFWOw~1lHBuFg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas","translated_slug":"","page_count":3,"language":"en","content_type":"Work","summary":"(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. Depending on the substrate bias voltage, MePIIID can also operate in a pure ion implantation or pure ion deposition mode. This paper is a brief review of the MePIIID technique and results obtained. The fully ionized metal or carbon plasma is conventionally produced by filtered vacuum arcs. Magnetic filters are used to remove unwanted macroparticles. Pulsing the substrate bias is advantageous for several reasons, and primarily a means of suppressing substrate arcing. Heat management and stress control are other important factors. Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":109194924,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194924/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194924/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194924/qt8np1k5m9-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=dlHnZ3hh9BwuSVOPHFCtweC0vkPf0WIYTFLOrrFvsvNx7j23wQiFr~wkRDmKaiZn6p7tr1MJdGE81jstw6wSfMLHlekA1b~x33cxR21fxjU4JqsqBYd3aCf-w4oXlEZIwEPkv~BoYc~RgyfQKfj5QUlSpklcpSl7ZbjKmHoFOzCa31DCzKALMB11~9vVVsAGegf0-jVm9VKytLvnVSfBD2YAOQ5IPVIKDHfMibVTwopH63gDAk6PVOsJ9Vw4JKGlBTQkJU9~9GVqgWUDQbZbHZUlvChrcZhmgZvwbhDW16YYfnoS3T6k7kZ9lmR9acFkReJzl7rcFZFWOw~1lHBuFg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"},{"id":109194925,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194925/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194925/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194925/qt8np1k5m9-libre.pdf?1702923765=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=EHf~FX-lueW1hucI9eVnLEc3eecWHy-NlghMUSC5k2oNmp1-mhfUNKEQdiQcNg3dhnxhrDaeqwPkIf~gjl3I1RVZOX6dO~ACpo3oEl4YcwNB1kQ9LVMPkbh9RU7krpk2t9iMOferzgy6g6Qj6JoiHcQifqMMTdRamjaAHq2qklDLdxcte~qonkMKINjtjXipExzzaxFOs6HMnt7d2nN4vkVYxJfaPc9nj8UVeqhF0twuGGl1rVrS8u6Ip1M4-iNTSlBwVnNFHsxvQkmPBv4SoN5V683u~oM2DZxED7gjFRD4i0SUY~AYGGQ3IoKj2OhZiE9xsCtwAfVkuWvVp9TUQQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":329196,"name":"Ionization","url":"https://www.academia.edu/Documents/in/Ionization"}],"urls":[{"id":37334639,"url":"https://escholarship.org/content/qt8np1k5m9/qt8np1k5m9.pdf?t=p2asmy"}]}, dispatcherData: dispatcherData }); 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751750"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751750/Cathodic_arc_plasma_deposition_Principles_and_trends"><img alt="Research paper thumbnail of Cathodic arc plasma deposition: Principles and trends" class="work-thumbnail" src="https://attachments.academia-assets.com/109194911/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751750/Cathodic_arc_plasma_deposition_Principles_and_trends">Cathodic arc plasma deposition: Principles and trends</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. Io...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. Ions are unusually energetic and are often multiply charged. Because of these features, superior metal and compound films can be made that are well adherent, dense, and smooth, provided that the infamous macroparticle problem is solved. Progress has been made in the design of macroparticle filters, and first versions are commercially available. Most cathodic arc deposition today is for hard compound films such as TiN and TiAlN on cutting tools, building hardware, and jewelry. These films are made without filtering. New applications are emerging, including ultrathin diamond-like carbon coatings, semiconductor metallization, and optical films, where filtered arc deposition is gaining importance.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="b6daea46c310ed09c74d1c1d6b997f18" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194911,"asset_id":111751750,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194911/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751750"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751750"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751750; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751750]").text(description); $(".js-view-count[data-work-id=111751750]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751750; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751750']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "b6daea46c310ed09c74d1c1d6b997f18" } } $('.js-work-strip[data-work-id=111751750]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751750,"title":"Cathodic arc plasma deposition: Principles and trends","translated_title":"","metadata":{"ai_title_tag":"Advancements in Cathodic Arc Plasma Deposition","grobid_abstract":"Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. 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Fi...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Film formation by energetic condensation has been shown to lead to well-adherent, dense films. Films are often under high compressive stress, but stress control is possible by pulsed high-voltage biasing, for example. Control of film growth via tuning the kinetic energy of condensing species is most efficient when the condensing species are ions, and when the degree of ionization of the plasma is high. Cathodic arc plasmas are fully ionized; they even contain multiply charged ions. The streaming plasma is supersonic, with kinetic ion energies in the range 20-150 eV, and additional energy can be provided via substrate bias. Ion formation at cathode spots and the dependence of plasma properties on the cathode material will be discussed. Along with ions, macroparticles are produced at cathode spots. This highly undesirable feature can be mitigated by plasma filters and other approaches, however, there is strong motivation to find alternative ways of producing fully ionized plasmas of condensing species. High power pulsed magnetron sputtering (HPPMS) may be one possible way of achieving this goal, at least for some target materials. In HPPMS, the power density at the magnetron target is pulsed to power levels exceeding the average power by about two orders of magnitude. Thermalization of sputtered atoms appears to be needed to accomplish ionization, and self-sputtering during each power pulse may be an important feature of HPPMS.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="59d062488e160b5438a63cf41231ed69" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194912,"asset_id":111751748,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194912/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751748"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751748"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751748; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751748]").text(description); $(".js-view-count[data-work-id=111751748]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751748; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751748']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "59d062488e160b5438a63cf41231ed69" } } $('.js-work-strip[data-work-id=111751748]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751748,"title":"Cathodic arcs and high power pulsed magnetron sputtering: A comparison of plasma formation and thin film deposition","translated_title":"","metadata":{"ai_title_tag":"Comparative Study of Cathodic Arcs and HPPMS in Thin Film Deposition","grobid_abstract":"Film formation by energetic condensation has been shown to lead to well-adherent, dense films. 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High power pulsed magnetron sputtering (HPPMS) may be one possible way of achieving this goal, at least for some target materials. In HPPMS, the power density at the magnetron target is pulsed to power levels exceeding the average power by about two orders of magnitude. 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Using in-situ conductivity measurements, the study identifies the critical thickness for coalescence and the conditions under which it occurs, revealing that the presence of certain transition metals accelerates the process. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751746"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship"><img alt="Research paper thumbnail of Atomic scale heating in energetic plasma deposition - eScholarship" class="work-thumbnail" src="https://attachments.academia-assets.com/109194907/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship">Atomic scale heating in energetic plasma deposition - eScholarship</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and den...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="7814e9f1fb3a97cfe3528e81dfd672a3" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194907,"asset_id":111751746,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194907/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751746"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751746"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751746; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751746]").text(description); $(".js-view-count[data-work-id=111751746]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751746; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751746']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "7814e9f1fb3a97cfe3528e81dfd672a3" } } $('.js-work-strip[data-work-id=111751746]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751746,"title":"Atomic scale heating in energetic plasma deposition - eScholarship","translated_title":"","metadata":{"grobid_abstract":"Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.","publication_date":{"day":28,"month":9,"year":2001,"errors":{}},"grobid_abstract_attachment_id":109194908},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship","translated_internal_url":"","created_at":"2023-12-18T09:28:29.447-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194907,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194907/thumbnails/1.jpg","file_name":"qt3s24f5tx.pdf","download_url":"https://www.academia.edu/attachments/109194907/download_file","bulk_download_file_name":"Atomic_scale_heating_in_energetic_plasma.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194907/qt3s24f5tx-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DAtomic_scale_heating_in_energetic_plasma.pdf\u0026Expires=1741733689\u0026Signature=BM1aaRj~3Aa1TLGfmJFwJM4A45nNGZ7K-bus1F1tU8boIsOe4l9md3Ghx-LVG1YqO9DlxzHNWQQTRltO-e-kOVzzipuphJ0u~498kCSKf-A7RXAdhVVpjdDTEMwjaneoTk4KyFPGyYyZBj6xnODCjBIteg0bC16khgKkddoqeSygF4V01rUzOWs3BjdloS83j7ZvwcSyyr77~QbbV4alYuhNqhFfo8kTjvI~G4o3NyPm2bz9K5-N-YYfxphXwxU5PuZz4WhLb1zixUUeHhW8raa3Mo4Uy7xpp-RoWvJDSJ0tT10aUusFAw8B5oumjoVB0jaUg7RsIgYQM9QyUw1PkA__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship","translated_slug":"","page_count":11,"language":"en","content_type":"Work","summary":"Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":109194907,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194907/thumbnails/1.jpg","file_name":"qt3s24f5tx.pdf","download_url":"https://www.academia.edu/attachments/109194907/download_file","bulk_download_file_name":"Atomic_scale_heating_in_energetic_plasma.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194907/qt3s24f5tx-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DAtomic_scale_heating_in_energetic_plasma.pdf\u0026Expires=1741733689\u0026Signature=BM1aaRj~3Aa1TLGfmJFwJM4A45nNGZ7K-bus1F1tU8boIsOe4l9md3Ghx-LVG1YqO9DlxzHNWQQTRltO-e-kOVzzipuphJ0u~498kCSKf-A7RXAdhVVpjdDTEMwjaneoTk4KyFPGyYyZBj6xnODCjBIteg0bC16khgKkddoqeSygF4V01rUzOWs3BjdloS83j7ZvwcSyyr77~QbbV4alYuhNqhFfo8kTjvI~G4o3NyPm2bz9K5-N-YYfxphXwxU5PuZz4WhLb1zixUUeHhW8raa3Mo4Uy7xpp-RoWvJDSJ0tT10aUusFAw8B5oumjoVB0jaUg7RsIgYQM9QyUw1PkA__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"},{"id":109194908,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194908/thumbnails/1.jpg","file_name":"qt3s24f5tx.pdf","download_url":"https://www.academia.edu/attachments/109194908/download_file","bulk_download_file_name":"Atomic_scale_heating_in_energetic_plasma.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194908/qt3s24f5tx-libre.pdf?1702923767=\u0026response-content-disposition=attachment%3B+filename%3DAtomic_scale_heating_in_energetic_plasma.pdf\u0026Expires=1741733689\u0026Signature=YHQOOqFU4sTIEeNst5oUEqvKwf1ZHX3ewKx40zI0czABXrVI42BXESCpK6yiInY4PVcavAIi3gykH6Fjqip0cpIkEsVU34vQbaMqvXAJjhhM8aTj~HUEJ5C3RSzWWFaBX77Tm-UNRIsuEyq8qOxJlQtJTIwG9oIC4la3GBzh15H6kaMOO4MFBPLM~M3nkUcgN7H9~KBJjVCSzXHhsw~ywSH-EWwBmS-0wWBqwT-8u7cPWFqh38rR9JxxqH79YRB7i6bmaeADOpuhW464c-DtEPCHE0oOOS3pH3wLT8hmAPIzBoKfJzkFGudO9MeARDjZjjLssUnf0C0TIUUdT3-NJQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":523,"name":"Chemistry","url":"https://www.academia.edu/Documents/in/Chemistry"},{"id":11740,"name":"Atomic Physics","url":"https://www.academia.edu/Documents/in/Atomic_Physics"},{"id":71287,"name":"Cathodic Protection","url":"https://www.academia.edu/Documents/in/Cathodic_Protection"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":348756,"name":"Ion","url":"https://www.academia.edu/Documents/in/Ion"},{"id":413295,"name":"Kinetic Energy","url":"https://www.academia.edu/Documents/in/Kinetic_Energy"},{"id":2274108,"name":"Lawrence Berkeley Laboratory","url":"https://www.academia.edu/Documents/in/Lawrence_Berkeley_Laboratory"}],"urls":[{"id":37334631,"url":"https://escholarship.org/content/qt3s24f5tx/qt3s24f5tx.pdf"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751744"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751744/The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship"><img alt="Research paper thumbnail of The fractal nature of vacuum arc cathode spots - eScholarship" class="work-thumbnail" src="https://attachments.academia-assets.com/109194904/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751744/The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship">The fractal nature of vacuum arc cathode spots - eScholarship</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenome...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenomena show many features of fractals, for example self-similar patterns in the emitted light and arc erosion traces. Although there have been hints on the fractal nature of cathode spots in the literature, the fractal approach to spot interpretation is underutilized. In this work, a brief review of spot properties is given, touching the differences between spot type 1 (on cathodes surfaces with dielectric layers) and spot type 2 (on metallic, clean surfaces) as well as the known spot fragment or cell structure. The basic properties of self-similarity, power laws, random colored noise, and fractals are introduced. Several points of evidence for the fractal nature of spots are provided. Specifically power laws are identified as signature of fractal properties, such as spectral power of noisy arc parameters (ion current, arc voltage, etc) obtained by fast Fourier transform. It is shown that fractal properties can be observed down to the cutoff by measurement resolution or occurrence of elementary steps in physical processes. Random walk models of cathode spot motion are well established: they go asymptotically to Brownian motion for infinitesimal step width. The power spectrum of the arc voltage noise falls as 1/f 2 , where f is frequency, supporting a fractal spot model associated with Brownian motion.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="546f0482114da2f40fba6ee198d629ce" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194904,"asset_id":111751744,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194904/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751744"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751744"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751744; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751744]").text(description); $(".js-view-count[data-work-id=111751744]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751744; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751744']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "546f0482114da2f40fba6ee198d629ce" } } $('.js-work-strip[data-work-id=111751744]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751744,"title":"The fractal nature of vacuum arc cathode spots - eScholarship","translated_title":"","metadata":{"ai_title_tag":"Fractal Properties of Vacuum Arc Cathode Spots","grobid_abstract":"The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenomena show many features of fractals, for example self-similar patterns in the emitted light and arc erosion traces. Although there have been hints on the fractal nature of cathode spots in the literature, the fractal approach to spot interpretation is underutilized. In this work, a brief review of spot properties is given, touching the differences between spot type 1 (on cathodes surfaces with dielectric layers) and spot type 2 (on metallic, clean surfaces) as well as the known spot fragment or cell structure. The basic properties of self-similarity, power laws, random colored noise, and fractals are introduced. Several points of evidence for the fractal nature of spots are provided. Specifically power laws are identified as signature of fractal properties, such as spectral power of noisy arc parameters (ion current, arc voltage, etc) obtained by fast Fourier transform. It is shown that fractal properties can be observed down to the cutoff by measurement resolution or occurrence of elementary steps in physical processes. Random walk models of cathode spot motion are well established: they go asymptotically to Brownian motion for infinitesimal step width. The power spectrum of the arc voltage noise falls as 1/f 2 , where f is frequency, supporting a fractal spot model associated with Brownian motion.","publication_date":{"day":27,"month":5,"year":2005,"errors":{}},"grobid_abstract_attachment_id":109194903},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751744/The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship","translated_internal_url":"","created_at":"2023-12-18T09:28:29.247-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194904,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194904/thumbnails/1.jpg","file_name":"qt4ps8t0qc.pdf","download_url":"https://www.academia.edu/attachments/109194904/download_file","bulk_download_file_name":"The_fractal_nature_of_vacuum_arc_cathode.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194904/qt4ps8t0qc-libre.pdf?1702923777=\u0026response-content-disposition=attachment%3B+filename%3DThe_fractal_nature_of_vacuum_arc_cathode.pdf\u0026Expires=1741733689\u0026Signature=KmXkPkWumwyzCAIpT~Dy1vQkMJS5N65rectoopJiXj9jUjVHgRBsH757EOKqa~m58pKhYIXfc2dBGShdPCtfj0SqV4VlwS3bwf7SGyA800lavt9MIop4njo6FGW~MjLhFwkbKHg82xz2F5k~mlSNQleczNmYn15R4cZSpBdgUhQhVqXBnAoWfDjJDcWXh420YzP81iqBFwm56oshMK-PUOPDyX8E5yKLIvk9h71~Dph5KUzex1lVbAaNO66Xw2n5PvMrk6S27~StuddhZaMTQ6ckgUnyBzrWomgkM1NLHd0dpKW77HwNMtXcgYi2c-RzKUt1WJUDl-MTiEyGKNdyZg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship","translated_slug":"","page_count":31,"language":"en","content_type":"Work","summary":"The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenomena show many features of fractals, for example self-similar patterns in the emitted light and arc erosion traces. Although there have been hints on the fractal nature of cathode spots in the literature, the fractal approach to spot interpretation is underutilized. In this work, a brief review of spot properties is given, touching the differences between spot type 1 (on cathodes surfaces with dielectric layers) and spot type 2 (on metallic, clean surfaces) as well as the known spot fragment or cell structure. The basic properties of self-similarity, power laws, random colored noise, and fractals are introduced. Several points of evidence for the fractal nature of spots are provided. Specifically power laws are identified as signature of fractal properties, such as spectral power of noisy arc parameters (ion current, arc voltage, etc) obtained by fast Fourier transform. It is shown that fractal properties can be observed down to the cutoff by measurement resolution or occurrence of elementary steps in physical processes. Random walk models of cathode spot motion are well established: they go asymptotically to Brownian motion for infinitesimal step width. The power spectrum of the arc voltage noise falls as 1/f 2 , where f is frequency, supporting a fractal spot model associated with Brownian motion.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":109194904,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194904/thumbnails/1.jpg","file_name":"qt4ps8t0qc.pdf","download_url":"https://www.academia.edu/attachments/109194904/download_file","bulk_download_file_name":"The_fractal_nature_of_vacuum_arc_cathode.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194904/qt4ps8t0qc-libre.pdf?1702923777=\u0026response-content-disposition=attachment%3B+filename%3DThe_fractal_nature_of_vacuum_arc_cathode.pdf\u0026Expires=1741733689\u0026Signature=KmXkPkWumwyzCAIpT~Dy1vQkMJS5N65rectoopJiXj9jUjVHgRBsH757EOKqa~m58pKhYIXfc2dBGShdPCtfj0SqV4VlwS3bwf7SGyA800lavt9MIop4njo6FGW~MjLhFwkbKHg82xz2F5k~mlSNQleczNmYn15R4cZSpBdgUhQhVqXBnAoWfDjJDcWXh420YzP81iqBFwm56oshMK-PUOPDyX8E5yKLIvk9h71~Dph5KUzex1lVbAaNO66Xw2n5PvMrk6S27~StuddhZaMTQ6ckgUnyBzrWomgkM1NLHd0dpKW77HwNMtXcgYi2c-RzKUt1WJUDl-MTiEyGKNdyZg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"},{"id":109194903,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194903/thumbnails/1.jpg","file_name":"qt4ps8t0qc.pdf","download_url":"https://www.academia.edu/attachments/109194903/download_file","bulk_download_file_name":"The_fractal_nature_of_vacuum_arc_cathode.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194903/qt4ps8t0qc-libre.pdf?1702923779=\u0026response-content-disposition=attachment%3B+filename%3DThe_fractal_nature_of_vacuum_arc_cathode.pdf\u0026Expires=1741733689\u0026Signature=NxUxdEtfkHm7OhYMC874s5e4PNJmuj1nEeArOoKvGi9YPlJ2C2e~4MTjg2WvEtokNV7be7KyYchvbBUpq68EP4DJbO-oZMlQuTodrhgOeZ~EcUsmurF2yWemh20NxKUkNdOucMgwUgr45KdBnhPowcnxBCKqS62TWRzJtlKXLkGW5IWOwoHBgg~UV70IvsSPycf0rqBz7RAZpkvNA~zcH8OeMGlB12T3YFj0dJ5F4iRNWWC~7L4RSglkejVZxqyI6pjZ~1b8s8LMcU0PXgvijXbloFoFVkzSnU1VI356WvsytBEsa8nWNcxg8KgKrbW8pKkZq90JKYdEy-FuNY~9LQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":37754,"name":"Cyclotron","url":"https://www.academia.edu/Documents/in/Cyclotron"}],"urls":[{"id":37334630,"url":"https://escholarship.org/content/qt4ps8t0qc/qt4ps8t0qc.pdf"}]}, dispatcherData: dispatcherData }); 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="122858912"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/122858912/Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions"><img alt="Research paper thumbnail of Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions" class="work-thumbnail" src="https://attachments.academia-assets.com/117432871/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/122858912/Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions">Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions</a></div><div class="wp-workCard_item"><span>Journal of vacuum science & technology</span><span>, Aug 23, 2019</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bomba...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. The energy distributions in dependence on ion beam parameters (ion energy: 0.5-1 keV; ion species: Ne, Ar, Xe) and geometrical parameters (ion incidence angle, polar emission angle, scattering angle) are measured by means of energy-selective mass spectrometry. The presence of anisotropic effects due to direct sputtering and scattering is discussed and correlated with process parameters. The experimental results are compared to calculations based on a simple elastic binary collision model and to simulations using the Monte-Carlo code SDTrimSP. The influence of the contribution of implanted primary ions on energy distributions of sputtered and scattered particles is studied in simulations. It is found that a 10% variation of the target composition leads to detectable but small differences in the energy distributions of scattered ions. Comparison with previously reported data for other ion/target configurations confirms the presence of similar trends and anisotropic effects: the number of high-energy sputtered ions increases with increasing energy of incident ions and decreasing scattering angle. The effect of the ion/target mass ratio is additionally investigated. Small differences are observed with the change of the primary ion species: the closer the mass ratio to unity, the higher the average energy of sputtered ions. The presence of peaks, assigned to different mechanisms of direct scattering, strongly depends on the ion/target mass ratio.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="5761d68a1434fc37cebc532a9067a740" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":117432871,"asset_id":122858912,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/117432871/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858912"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="122858912"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 122858912; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=122858912]").text(description); $(".js-view-count[data-work-id=122858912]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 122858912; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='122858912']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "5761d68a1434fc37cebc532a9067a740" } } $('.js-work-strip[data-work-id=122858912]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":122858912,"title":"Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions","translated_title":"","metadata":{"publisher":"American Institute of Physics","grobid_abstract":"The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. 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Comparison with previously reported data for other ion/target configurations confirms the presence of similar trends and anisotropic effects: the number of high-energy sputtered ions increases with increasing energy of incident ions and decreasing scattering angle. The effect of the ion/target mass ratio is additionally investigated. Small differences are observed with the change of the primary ion species: the closer the mass ratio to unity, the higher the average energy of sputtered ions. The presence of peaks, assigned to different mechanisms of direct scattering, strongly depends on the ion/target mass ratio.","publication_date":{"day":23,"month":8,"year":2019,"errors":{}},"publication_name":"Journal of vacuum science \u0026 technology","grobid_abstract_attachment_id":117432872},"translated_abstract":null,"internal_url":"https://www.academia.edu/122858912/Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions","translated_internal_url":"","created_at":"2024-08-13T21:42:00.284-07:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":117432871,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/117432871/thumbnails/1.jpg","file_name":"1906.05550.pdf","download_url":"https://www.academia.edu/attachments/117432871/download_file","bulk_download_file_name":"Ion_beam_sputtering_of_silicon_Energy_di.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/117432871/1906.05550-libre.pdf?1723611336=\u0026response-content-disposition=attachment%3B+filename%3DIon_beam_sputtering_of_silicon_Energy_di.pdf\u0026Expires=1741733688\u0026Signature=PHuTdGwxlppoSBVhDB7N8gq7otNt6mVA29Y8B8-lwi6i08cjetv~Pw9XUPgDEm5MSecONAOkh-RXcWkifDSPCQIO3r1SHFx13opu8zGiRlFXD-QEk3bnaPpX0KVgDJYywSRvLnxZWR0hDTtdB-1ZbhzoQc7~BLrMEMo~h4W5naBwnBPlZNg8QLlVOF2~eHAN7ewFxBWwVOP2diH5hnUiPyIHboEhzCeoKjmKKpSqGzLoKvFkhw3lSfzFpvxO8b-SFbMDUnnkc82igq~tKbbMtfyTDYIh9SN7Sex0MDC-fky9c9KjvUv7eeFkhymNhpDpdyonyQXkII9YYIn2NLSUNw__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Ion_beam_sputtering_of_silicon_Energy_distributions_of_sputtered_and_scattered_ions","translated_slug":"","page_count":16,"language":"en","content_type":"Work","summary":"The properties of sputtered and scattered ions are studied for ion beam sputtering of Si by bombardment with noble gas ions. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="122858911"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/122858911/Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution"><img alt="Research paper thumbnail of Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution" class="work-thumbnail" src="https://attachments.academia-assets.com/117432903/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/122858911/Influence_of_Ar_gas_pressure_on_ion_energy_and_charge_state_distributions_in_pulsed_cathodic_arc_plasmas_from_Nb_Al_cathodes_studied_with_high_time_resolution">Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution</a></div><div class="wp-workCard_item"><span>Journal of Physics D</span><span>, Nov 23, 2018</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">For cathodic arcs, the cathode material is one of the most important determinants of plasma prope...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">For cathodic arcs, the cathode material is one of the most important determinants of plasma properties. Consequently, the cathode material -plasma relationship is of special interest in related fundamental research as well as in applications like the synthesis of thin films and coatings. In the latter, the use of multi-element cathodes in inert as well as reactive gas atmospheres is common practice. To further improve the physical understanding of cathodic arcs in such settings, we analyze ions in pulsed cathodic arc plasmas from Nb, Al and two composite Nb-Al cathodes in high time-resolution using a mass-energy-analyzer. The experiments were conducted in Ar atmosphere at total pressures of 0.04, 0.20 and 0.40 Pa, and are compared to former results in high vacuum at 10 -4 Pa. In addition to examining the influence of Ar on ion properties and their cathode material dependence, the results are used to discuss physical concepts in cathodic arcs, like the gas-dynamic expansion of the cathode spot plasma, or the influence of charge exchange collisions of ions with neutrals. While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. Ar ions in different time and energy regimes up to 150 eV were observed and compared to Nb and Al ions, showing overlapping velocity distributions for Nb, Al and Ar + ions, but also Ar 2+ ions faster than other ion species. 1</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="e39a6d52a26377c185365961613f0cca" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":117432903,"asset_id":122858911,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/117432903/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="122858911"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="122858911"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 122858911; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=122858911]").text(description); $(".js-view-count[data-work-id=122858911]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 122858911; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='122858911']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "e39a6d52a26377c185365961613f0cca" } } $('.js-work-strip[data-work-id=122858911]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":122858911,"title":"Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution","translated_title":"","metadata":{"publisher":"Institute of Physics","grobid_abstract":"For cathodic arcs, the cathode material is one of the most important determinants of plasma properties. 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While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. 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While such inelastic collisions e.g. with Ar atoms cause a reduction of charge states to mainly Al + and Nb 2+ at the highest pressure, Ar atoms also seem to take part in near-cathode processes. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="116836983"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen"><img alt="Research paper thumbnail of Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen">Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen</a></div><div class="wp-workCard_item"><span>Applied Physics Letters</span><span>, 1999</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">We describe the temporal development of the plasma composition of pulsed aluminum plasma streams ...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of &gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="116836983"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="116836983"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 116836983; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=116836983]").text(description); $(".js-view-count[data-work-id=116836983]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 116836983; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='116836983']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=116836983]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":116836983,"title":"Temporal development of the plasma composition of a pulsed aluminum plasma stream in the presence of oxygen","translated_title":"","metadata":{"abstract":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","publisher":"AIP Publishing","publication_date":{"day":null,"month":null,"year":1999,"errors":{}},"publication_name":"Applied Physics Letters"},"translated_abstract":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","internal_url":"https://www.academia.edu/116836983/Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen","translated_internal_url":"","created_at":"2024-03-29T08:03:27.516-07:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Temporal_development_of_the_plasma_composition_of_a_pulsed_aluminum_plasma_stream_in_the_presence_of_oxygen","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"We describe the temporal development of the plasma composition of pulsed aluminum plasma streams at various oxygen pressures. The plasma was formed with a vacuum arc plasma source and the time resolved plasma composition was measured with time-of-flight charge-to-mass spectrometry. The temporal development of the plasma composition as well as the Al average ion charge state was found to be a strong function of the oxygen pressure. Oxygen and hydrogen concentrations of up to 0.36 and 0.32, respectively, were found in the first 50 mus of the pulse at oxygen pressures of \u0026gt;=5×10-5 Torr. The average charge state of aluminum ions was found to vary from +1.2 to +2.5 depending on the oxygen pressure and the time elapsed after ignition of the arc. These results are of fundamental importance for the understanding of the evolution of the composition (through the plasma composition) and microstructure (through the Al ion flux energy) of alumina thin films produced by pulsed, reactive aluminum plasmas.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":48,"name":"Engineering","url":"https://www.academia.edu/Documents/in/Engineering"},{"id":523,"name":"Chemistry","url":"https://www.academia.edu/Documents/in/Chemistry"},{"id":5769,"name":"Mass Spectrometry","url":"https://www.academia.edu/Documents/in/Mass_Spectrometry"},{"id":101573,"name":"Thin Film","url":"https://www.academia.edu/Documents/in/Thin_Film"},{"id":109198,"name":"Lightning","url":"https://www.academia.edu/Documents/in/Lightning"},{"id":112619,"name":"Time of Flight","url":"https://www.academia.edu/Documents/in/Time_of_Flight"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":118582,"name":"Physical sciences","url":"https://www.academia.edu/Documents/in/Physical_sciences"},{"id":158186,"name":"Time Resolved","url":"https://www.academia.edu/Documents/in/Time_Resolved"},{"id":348756,"name":"Ion","url":"https://www.academia.edu/Documents/in/Ion"},{"id":369525,"name":"Aluminium","url":"https://www.academia.edu/Documents/in/Aluminium"},{"id":380825,"name":"Oxygen","url":"https://www.academia.edu/Documents/in/Oxygen"},{"id":430542,"name":"Arcs","url":"https://www.academia.edu/Documents/in/Arcs"},{"id":473797,"name":"Microstructures","url":"https://www.academia.edu/Documents/in/Microstructures"},{"id":1523712,"name":"Atmospheric Electricity","url":"https://www.academia.edu/Documents/in/Atmospheric_Electricity"},{"id":2638670,"name":"plasma cleaning","url":"https://www.academia.edu/Documents/in/plasma_cleaning"}],"urls":[{"id":40700242,"url":"http://aip.scitation.org/doi/pdf/10.1063/1.124457"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="115840964"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/115840964/Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment"><img alt="Research paper thumbnail of Results on intense beam focusing and neutralization from the neutralized beam experiment" class="work-thumbnail" src="https://attachments.academia-assets.com/112136580/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/115840964/Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment">Results on intense beam focusing and neutralization from the neutralized beam experiment</a></div><div class="wp-workCard_item"><span>Lawrence Berkeley National Laboratory</span><span>, Oct 31, 2003</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Experimental techniques to provide active neutralization for space-charge-dominated beams as well...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Experimental techniques to provide active neutralization for space-charge-dominated beams as well as to prevent uncontrolled ion beam neutralization by stray electrons have been demonstrated. Neutralization is provided by a localized plasma injected from a cathode arc source. Unwanted secondary electrons produced at the wall by halo particle impact are suppressed using a radial mesh liner that is positively biased inside a beam drift tube. Measurements of current transmission, beam spot size as a function of axial position, beam energy, and plasma source conditions are presented along with detailed comparisons with theory.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="730812687998b6c02d6d32c848bbc21c" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":112136580,"asset_id":115840964,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/112136580/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="115840964"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="115840964"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 115840964; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=115840964]").text(description); $(".js-view-count[data-work-id=115840964]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 115840964; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='115840964']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "730812687998b6c02d6d32c848bbc21c" } } $('.js-work-strip[data-work-id=115840964]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":115840964,"title":"Results on intense beam focusing and neutralization from the neutralized beam experiment","translated_title":"","metadata":{"publisher":"United States Department of Energy","grobid_abstract":"Experimental techniques to provide active neutralization for space-charge-dominated beams as well as to prevent uncontrolled ion beam neutralization by stray electrons have been demonstrated. Neutralization is provided by a localized plasma injected from a cathode arc source. Unwanted secondary electrons produced at the wall by halo particle impact are suppressed using a radial mesh liner that is positively biased inside a beam drift tube. Measurements of current transmission, beam spot size as a function of axial position, beam energy, and plasma source conditions are presented along with detailed comparisons with theory.","publication_date":{"day":31,"month":10,"year":2003,"errors":{}},"publication_name":"Lawrence Berkeley National Laboratory","grobid_abstract_attachment_id":112136580},"translated_abstract":null,"internal_url":"https://www.academia.edu/115840964/Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment","translated_internal_url":"","created_at":"2024-03-05T15:10:53.085-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":112136580,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/112136580/thumbnails/1.jpg","file_name":"PR.1.2004.pdf","download_url":"https://www.academia.edu/attachments/112136580/download_file","bulk_download_file_name":"Results_on_intense_beam_focusing_and_neu.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/112136580/PR.1.2004-libre.pdf?1709680811=\u0026response-content-disposition=attachment%3B+filename%3DResults_on_intense_beam_focusing_and_neu.pdf\u0026Expires=1741733688\u0026Signature=Oyn2IHf9qzQCTPgzKhQMOXhDaCCz8ZzPSJ1GYLuIwTfnazfFRiw2wALlzAdvmeQu84FY7pk31ioHNb3jOI7qLrwXNH4kzMUScNHj0mZvqNxnlRGhNd~zCWMxYYFYQ8Re2N-X9rkwE9ZpcgNeF64fwA6zWe37CjUxpwvaXhUEgJFeP8Tx-nAzGhywLKLHaStjZRWaCnDe0d0daIF6ZOcRPZyMt~m9EoYqF5AUOkZlPlgPKv7kJvPRHGOERy9vCZ2pwyqRE1tpyDmirmz50l1uXxylCDkoiVvqVqQbp4gV3120eQ8yYJHR3yBXczJ~~7t8doQieqrWLeFr-6jVZZRYtw__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Results_on_intense_beam_focusing_and_neutralization_from_the_neutralized_beam_experiment","translated_slug":"","page_count":9,"language":"en","content_type":"Work","summary":"Experimental techniques to provide active neutralization for space-charge-dominated beams as well as to prevent uncontrolled ion beam neutralization by stray electrons have been demonstrated. Neutralization is provided by a localized plasma injected from a cathode arc source. Unwanted secondary electrons produced at the wall by halo particle impact are suppressed using a radial mesh liner that is positively biased inside a beam drift tube. Measurements of current transmission, beam spot size as a function of axial position, beam energy, and plasma source conditions are presented along with detailed comparisons with theory.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":112136580,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/112136580/thumbnails/1.jpg","file_name":"PR.1.2004.pdf","download_url":"https://www.academia.edu/attachments/112136580/download_file","bulk_download_file_name":"Results_on_intense_beam_focusing_and_neu.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/112136580/PR.1.2004-libre.pdf?1709680811=\u0026response-content-disposition=attachment%3B+filename%3DResults_on_intense_beam_focusing_and_neu.pdf\u0026Expires=1741733688\u0026Signature=Oyn2IHf9qzQCTPgzKhQMOXhDaCCz8ZzPSJ1GYLuIwTfnazfFRiw2wALlzAdvmeQu84FY7pk31ioHNb3jOI7qLrwXNH4kzMUScNHj0mZvqNxnlRGhNd~zCWMxYYFYQ8Re2N-X9rkwE9ZpcgNeF64fwA6zWe37CjUxpwvaXhUEgJFeP8Tx-nAzGhywLKLHaStjZRWaCnDe0d0daIF6ZOcRPZyMt~m9EoYqF5AUOkZlPlgPKv7kJvPRHGOERy9vCZ2pwyqRE1tpyDmirmz50l1uXxylCDkoiVvqVqQbp4gV3120eQ8yYJHR3yBXczJ~~7t8doQieqrWLeFr-6jVZZRYtw__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"},{"id":112136581,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/112136581/thumbnails/1.jpg","file_name":"PR.1.2004.pdf","download_url":"https://www.academia.edu/attachments/112136581/download_file","bulk_download_file_name":"Results_on_intense_beam_focusing_and_neu.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/112136581/PR.1.2004-libre.pdf?1709680812=\u0026response-content-disposition=attachment%3B+filename%3DResults_on_intense_beam_focusing_and_neu.pdf\u0026Expires=1741733688\u0026Signature=PHLm4uUNaSTsIOSE~spyiC3yonNm6MzehfII1floN3tHiscJXFWkaqvFo9HY6rnF-WJb2B0h1jPVINJrQfOoJgF4Y89ehbwSSNcA9s0aJiW6okoK6XQAe38Sl3Bjt85H6JUmvuv0Q2zDUahVynOn3HYhBhP3ybHbgmztrovk~bGzywk3iAuoG3n0Ue75PogfDUfLkGeka~m1VkD2grHo0jSm7NtO~yEbeCTbx92XwUsWFSd4ChYaVVnAxpz1lClhxg7Qf8Gmqe1eUIWQ5EibXFYWBwQqRChXonjKNjREFhhufk3GbZKgk7FG5nWKbEkd8jR4ZPbM1w62f6Dp8o4U9A__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":498,"name":"Physics","url":"https://www.academia.edu/Documents/in/Physics"},{"id":523,"name":"Chemistry","url":"https://www.academia.edu/Documents/in/Chemistry"},{"id":6962,"name":"Energy Conservation","url":"https://www.academia.edu/Documents/in/Energy_Conservation"},{"id":34388,"name":"Power Plant","url":"https://www.academia.edu/Documents/in/Power_Plant"},{"id":72817,"name":"Focused Ion Beam","url":"https://www.academia.edu/Documents/in/Focused_Ion_Beam"},{"id":80799,"name":"Classical Physics","url":"https://www.academia.edu/Documents/in/Classical_Physics"},{"id":160656,"name":"Potassium","url":"https://www.academia.edu/Documents/in/Potassium"},{"id":290469,"name":"Phase Space","url":"https://www.academia.edu/Documents/in/Phase_Space"},{"id":693812,"name":"Ion Beam","url":"https://www.academia.edu/Documents/in/Ion_Beam"},{"id":735265,"name":"Secondary Electron","url":"https://www.academia.edu/Documents/in/Secondary_Electron"},{"id":762611,"name":"Space Charge","url":"https://www.academia.edu/Documents/in/Space_Charge"},{"id":776554,"name":"Inertial Confinement Fusion","url":"https://www.academia.edu/Documents/in/Inertial_Confinement_Fusion"},{"id":2274108,"name":"Lawrence Berkeley Laboratory","url":"https://www.academia.edu/Documents/in/Lawrence_Berkeley_Laboratory"},{"id":2539021,"name":"Heavy Ions","url":"https://www.academia.edu/Documents/in/Heavy_Ions"},{"id":2948559,"name":"Higher order","url":"https://www.academia.edu/Documents/in/Higher_order"}],"urls":[{"id":40065739,"url":"http://nonneutral.pppl.gov/pdfpapers/PR.1.2004.pdf"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751761"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751761/Guest_editorial_special_issue_on_vacuum_discharge_plasmas"><img alt="Research paper thumbnail of Guest editorial special issue on vacuum discharge plasmas" class="work-thumbnail" src="https://attachments.academia-assets.com/109194929/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751761/Guest_editorial_special_issue_on_vacuum_discharge_plasmas">Guest editorial special issue on vacuum discharge plasmas</a></div><div class="wp-workCard_item"><span>IEEE Transactions on Plasma Science</span><span>, Oct 1, 2001</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="6913563d12bdaf80c2e7732c385f7db4" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194929,"asset_id":111751761,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194929/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751761"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751761"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751761; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751761]").text(description); $(".js-view-count[data-work-id=111751761]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751761; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751761']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); 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The plasma was produced in cathodic arc spots. It was found that the oxygen partial pressure reduces the average charge state as well as the kinetic ion energy. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751757"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature"><img alt="Research paper thumbnail of Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature">Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature</a></div><div class="wp-workCard_item"><span>Journal of vacuum science & technology</span><span>, May 1, 2022</span></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on ...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751757"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751757"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751757; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751757]").text(description); $(".js-view-count[data-work-id=111751757]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751757; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751757']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=111751757]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751757,"title":"Properties of gallium oxide thin films grown by ion beam sputter deposition at room temperature","translated_title":"","metadata":{"abstract":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","publisher":"American Institute of Physics","publication_date":{"day":1,"month":5,"year":2022,"errors":{}},"publication_name":"Journal of vacuum science \u0026 technology"},"translated_abstract":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","internal_url":"https://www.academia.edu/111751757/Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature","translated_internal_url":"","created_at":"2023-12-18T09:28:32.364-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Properties_of_gallium_oxide_thin_films_grown_by_ion_beam_sputter_deposition_at_room_temperature","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"Gallium oxide thin films were grown by ion beam sputter deposition (IBSD) at room temperature on Si substrates with systematically varied process parameters: primary ion energy, primary ion species (O2+ and Ar+), sputtering geometry (ion incidence angle α and polar emission angle β), and O2 background pressure. No substrate heating was applied because the goal of these experiments was to investigate the impact of the energetic film-forming species on thin film properties. The films were characterized with regard to film thickness, growth rate, crystallinity, surface roughness, mass density, elemental composition and its depth profiles, and optical properties. All films were found to be amorphous with a surface roughness of less than 1 nm. The stoichiometry of the films improved with an increase in the energy of film-forming species. The mass density and the optical properties, including the index of refraction, are correlated and show a dependency on the kinetic energy of the film-forming species. The ranges of IBSD parameters, which are most promising for further improvement of the film quality, are discussed.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":48,"name":"Engineering","url":"https://www.academia.edu/Documents/in/Engineering"},{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":101573,"name":"Thin Film","url":"https://www.academia.edu/Documents/in/Thin_Film"},{"id":118582,"name":"Physical sciences","url":"https://www.academia.edu/Documents/in/Physical_sciences"},{"id":185387,"name":"Sputtering","url":"https://www.academia.edu/Documents/in/Sputtering"},{"id":192323,"name":"Crystallinity","url":"https://www.academia.edu/Documents/in/Crystallinity"},{"id":688966,"name":"Gallium","url":"https://www.academia.edu/Documents/in/Gallium"},{"id":693812,"name":"Ion Beam","url":"https://www.academia.edu/Documents/in/Ion_Beam"},{"id":925604,"name":"Sputter Deposition","url":"https://www.academia.edu/Documents/in/Sputter_Deposition"},{"id":1801184,"name":"Vacuum Science and Technology","url":"https://www.academia.edu/Documents/in/Vacuum_Science_and_Technology"}],"urls":[{"id":37334643,"url":"https://doi.org/10.1116/6.0001825"}]}, dispatcherData: dispatcherData }); $(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751756"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" rel="nofollow" href="https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report"><img alt="Research paper thumbnail of Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report" class="work-thumbnail" src="https://a.academia-assets.com/images/blank-paper.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" rel="nofollow" href="https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report">Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion S...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751756"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751756"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751756; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751756]").text(description); $(".js-view-count[data-work-id=111751756]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751756; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751756']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (false){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "-1" } } $('.js-work-strip[data-work-id=111751756]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751756,"title":"Heavy Ion Fusion Science Virtual National Laboratory 1st Quarter FY09 Milestone Report","translated_title":"","metadata":{"abstract":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","publication_date":{"day":22,"month":12,"year":2008,"errors":{}}},"translated_abstract":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","internal_url":"https://www.academia.edu/111751756/Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report","translated_internal_url":"","created_at":"2023-12-18T09:28:32.176-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[],"slug":"Heavy_Ion_Fusion_Science_Virtual_National_Laboratory_1st_Quarter_FY09_Milestone_Report","translated_slug":"","page_count":null,"language":"en","content_type":"Work","summary":"This milestone has been met. In the previous quarter (3rd quarter FY2008), the Heavy Ion Fusion Science Virtual National Laboratory (HIFS-VNL) completed the new experimental target chamber facility for future Warm Dense Matter (WDM) experiments [1]. The target chamber is operational and target experiments are now underway, using beams focused by a final focus solenoid and compressed by an improved bunching waveform. Initial experiments have demonstrated the capability of the Neutralized Drift Compression Experiment (NDCX) beam to heat bulk matter in target foils. The experiments have focused on tuning and characterizing the NDCX beam in the target chamber, implementing the target assembly, and implementing target diagnostics in the target chamber environment. We have completed a characterization and initial optimization of the compressed and uncompressed NDCX beam entering the target chamber. The neutralizing plasma has been significantly improved to increase the beam neutralization in the target chamber. Preliminary results from recent beam tests of a gold cone for concentrating beam energy on target are encouraging and indicate the potential to double beam intensity on target. Other advantages of the cone include the large amount of neutralizing secondary electrons expected from the grazing incidence at the cone walls, and the shielding of the target from the edges of the beam pulse. The first target temperature measurements with the fast optical pyrometer were made on Sep. 12, 2008. The fast optical pyrometer is a unique and significant new diagnostic. These new results demonstrate for the first time beam heating of the target to a temperature well over 2000 K. The initial experimental results are suggestive of potentially interesting physics. The rapid initial rise and subsequent decay of the target temperature during the beam pulse indicate changes in the balance of beam heating and target evaporative cooling, a behavior which may be affected by phenomena such as droplet formation and rapid changes in the optical properties of the hot target material. NDCX, possibly uniquely, is capable of studying these changes because of its wide range of diagnostic capabilities. These capabilities include target diagnostics already in place such as the fast pyrometer and streak camera, as well as the ability to measure both ion beam transmission and optical transmission through the foil. Measurements with these diagnostic techniques can help determine the rate at which the target is breaking up into droplets and the rate at which its bulk optical properties are changing.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[],"research_interests":[{"id":9355,"name":"Equations of State","url":"https://www.academia.edu/Documents/in/Equations_of_State"},{"id":13268,"name":"Evaporation","url":"https://www.academia.edu/Documents/in/Evaporation"},{"id":48459,"name":"High Voltage","url":"https://www.academia.edu/Documents/in/High_Voltage"},{"id":80555,"name":"Heavy Ions Physics","url":"https://www.academia.edu/Documents/in/Heavy_Ions_Physics"},{"id":134591,"name":"Evaporative Cooling","url":"https://www.academia.edu/Documents/in/Evaporative_Cooling"},{"id":179332,"name":"Hydrodynamics","url":"https://www.academia.edu/Documents/in/Hydrodynamics"},{"id":212475,"name":"Electric Fields","url":"https://www.academia.edu/Documents/in/Electric_Fields"},{"id":238655,"name":"Implementation","url":"https://www.academia.edu/Documents/in/Implementation"},{"id":270366,"name":"Heat Conduction","url":"https://www.academia.edu/Documents/in/Heat_Conduction"},{"id":317745,"name":"High Speed","url":"https://www.academia.edu/Documents/in/High_Speed"},{"id":325234,"name":"Compression","url":"https://www.academia.edu/Documents/in/Compression"},{"id":418058,"name":"Dynamic Response","url":"https://www.academia.edu/Documents/in/Dynamic_Response"},{"id":542983,"name":"Heating","url":"https://www.academia.edu/Documents/in/Heating"},{"id":1031112,"name":"Emissivity","url":"https://www.academia.edu/Documents/in/Emissivity"},{"id":1120502,"name":"Experimental Data","url":"https://www.academia.edu/Documents/in/Experimental_Data"},{"id":1130559,"name":"Electric Field","url":"https://www.academia.edu/Documents/in/Electric_Field"},{"id":1320599,"name":"Equation of State","url":"https://www.academia.edu/Documents/in/Equation_of_State"},{"id":1557246,"name":"Functional Form","url":"https://www.academia.edu/Documents/in/Functional_Form"},{"id":2193830,"name":"Brightness temperature","url":"https://www.academia.edu/Documents/in/Brightness_temperature"},{"id":2282000,"name":"Current Transformer","url":"https://www.academia.edu/Documents/in/Current_Transformer"}],"urls":[{"id":37334642,"url":"https://www.osti.gov/biblio/945605"}]}, dispatcherData: dispatcherData }); 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751753"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas"><img alt="Research paper thumbnail of Pulsed biasing techniques with fully ionized metal plasmas" class="work-thumbnail" src="https://attachments.academia-assets.com/109194924/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas">Pulsed biasing techniques with fully ionized metal plasmas</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film depo...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. Depending on the substrate bias voltage, MePIIID can also operate in a pure ion implantation or pure ion deposition mode. This paper is a brief review of the MePIIID technique and results obtained. The fully ionized metal or carbon plasma is conventionally produced by filtered vacuum arcs. Magnetic filters are used to remove unwanted macroparticles. Pulsing the substrate bias is advantageous for several reasons, and primarily a means of suppressing substrate arcing. Heat management and stress control are other important factors. Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="58dc5ea20eced619917a85a09ca3d66d" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194924,"asset_id":111751753,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194924/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751753"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751753"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751753; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751753]").text(description); $(".js-view-count[data-work-id=111751753]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751753; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751753']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "58dc5ea20eced619917a85a09ca3d66d" } } $('.js-work-strip[data-work-id=111751753]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751753,"title":"Pulsed biasing techniques with fully ionized metal plasmas","translated_title":"","metadata":{"grobid_abstract":"(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. 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Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.","publication_date":{"day":23,"month":2,"year":2001,"errors":{}},"grobid_abstract_attachment_id":109194924},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751753/Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas","translated_internal_url":"","created_at":"2023-12-18T09:28:31.714-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194924,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194924/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194924/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194924/qt8np1k5m9-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=dlHnZ3hh9BwuSVOPHFCtweC0vkPf0WIYTFLOrrFvsvNx7j23wQiFr~wkRDmKaiZn6p7tr1MJdGE81jstw6wSfMLHlekA1b~x33cxR21fxjU4JqsqBYd3aCf-w4oXlEZIwEPkv~BoYc~RgyfQKfj5QUlSpklcpSl7ZbjKmHoFOzCa31DCzKALMB11~9vVVsAGegf0-jVm9VKytLvnVSfBD2YAOQ5IPVIKDHfMibVTwopH63gDAk6PVOsJ9Vw4JKGlBTQkJU9~9GVqgWUDQbZbHZUlvChrcZhmgZvwbhDW16YYfnoS3T6k7kZ9lmR9acFkReJzl7rcFZFWOw~1lHBuFg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Pulsed_biasing_techniques_with_fully_ionized_metal_plasmas","translated_slug":"","page_count":3,"language":"en","content_type":"Work","summary":"(MePIIID) has been developed over the last decade as a hybrid ion implantation and thin-film deposition technique. 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Highly adherent films of a-C (diamond-like carbon), metals, oxides, nitrides, and carbides have been formed, and film quality can superior to films obtained by evaporation or sputtering.","owner":{"id":33147769,"first_name":"Andre","middle_initials":"","last_name":"Anders","page_name":"AndreAnders","domain_name":"uni-leipzig1","created_at":"2015-07-17T15:40:22.246-07:00","display_name":"Andre Anders","url":"https://uni-leipzig1.academia.edu/AndreAnders"},"attachments":[{"id":109194924,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194924/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194924/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194924/qt8np1k5m9-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=dlHnZ3hh9BwuSVOPHFCtweC0vkPf0WIYTFLOrrFvsvNx7j23wQiFr~wkRDmKaiZn6p7tr1MJdGE81jstw6wSfMLHlekA1b~x33cxR21fxjU4JqsqBYd3aCf-w4oXlEZIwEPkv~BoYc~RgyfQKfj5QUlSpklcpSl7ZbjKmHoFOzCa31DCzKALMB11~9vVVsAGegf0-jVm9VKytLvnVSfBD2YAOQ5IPVIKDHfMibVTwopH63gDAk6PVOsJ9Vw4JKGlBTQkJU9~9GVqgWUDQbZbHZUlvChrcZhmgZvwbhDW16YYfnoS3T6k7kZ9lmR9acFkReJzl7rcFZFWOw~1lHBuFg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"},{"id":109194925,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194925/thumbnails/1.jpg","file_name":"qt8np1k5m9.pdf","download_url":"https://www.academia.edu/attachments/109194925/download_file","bulk_download_file_name":"Pulsed_biasing_techniques_with_fully_ion.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194925/qt8np1k5m9-libre.pdf?1702923765=\u0026response-content-disposition=attachment%3B+filename%3DPulsed_biasing_techniques_with_fully_ion.pdf\u0026Expires=1741733689\u0026Signature=EHf~FX-lueW1hucI9eVnLEc3eecWHy-NlghMUSC5k2oNmp1-mhfUNKEQdiQcNg3dhnxhrDaeqwPkIf~gjl3I1RVZOX6dO~ACpo3oEl4YcwNB1kQ9LVMPkbh9RU7krpk2t9iMOferzgy6g6Qj6JoiHcQifqMMTdRamjaAHq2qklDLdxcte~qonkMKINjtjXipExzzaxFOs6HMnt7d2nN4vkVYxJfaPc9nj8UVeqhF0twuGGl1rVrS8u6Ip1M4-iNTSlBwVnNFHsxvQkmPBv4SoN5V683u~oM2DZxED7gjFRD4i0SUY~AYGGQ3IoKj2OhZiE9xsCtwAfVkuWvVp9TUQQ__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"research_interests":[{"id":511,"name":"Materials Science","url":"https://www.academia.edu/Documents/in/Materials_Science"},{"id":117555,"name":"Plasma","url":"https://www.academia.edu/Documents/in/Plasma"},{"id":329196,"name":"Ionization","url":"https://www.academia.edu/Documents/in/Ionization"}],"urls":[{"id":37334639,"url":"https://escholarship.org/content/qt8np1k5m9/qt8np1k5m9.pdf?t=p2asmy"}]}, dispatcherData: dispatcherData }); 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751750"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751750/Cathodic_arc_plasma_deposition_Principles_and_trends"><img alt="Research paper thumbnail of Cathodic arc plasma deposition: Principles and trends" class="work-thumbnail" src="https://attachments.academia-assets.com/109194911/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751750/Cathodic_arc_plasma_deposition_Principles_and_trends">Cathodic arc plasma deposition: Principles and trends</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. Io...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. Ions are unusually energetic and are often multiply charged. Because of these features, superior metal and compound films can be made that are well adherent, dense, and smooth, provided that the infamous macroparticle problem is solved. Progress has been made in the design of macroparticle filters, and first versions are commercially available. Most cathodic arc deposition today is for hard compound films such as TiN and TiAlN on cutting tools, building hardware, and jewelry. These films are made without filtering. New applications are emerging, including ultrathin diamond-like carbon coatings, semiconductor metallization, and optical films, where filtered arc deposition is gaining importance.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="b6daea46c310ed09c74d1c1d6b997f18" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194911,"asset_id":111751750,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194911/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751750"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751750"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751750; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751750]").text(description); $(".js-view-count[data-work-id=111751750]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751750; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751750']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "b6daea46c310ed09c74d1c1d6b997f18" } } $('.js-work-strip[data-work-id=111751750]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751750,"title":"Cathodic arc plasma deposition: Principles and trends","translated_title":"","metadata":{"ai_title_tag":"Advancements in Cathodic Arc Plasma Deposition","grobid_abstract":"Cathodic arc plasmas have outstanding properties because they are fully ionized metal plasmas. 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Fi...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Film formation by energetic condensation has been shown to lead to well-adherent, dense films. Films are often under high compressive stress, but stress control is possible by pulsed high-voltage biasing, for example. Control of film growth via tuning the kinetic energy of condensing species is most efficient when the condensing species are ions, and when the degree of ionization of the plasma is high. Cathodic arc plasmas are fully ionized; they even contain multiply charged ions. The streaming plasma is supersonic, with kinetic ion energies in the range 20-150 eV, and additional energy can be provided via substrate bias. Ion formation at cathode spots and the dependence of plasma properties on the cathode material will be discussed. Along with ions, macroparticles are produced at cathode spots. This highly undesirable feature can be mitigated by plasma filters and other approaches, however, there is strong motivation to find alternative ways of producing fully ionized plasmas of condensing species. High power pulsed magnetron sputtering (HPPMS) may be one possible way of achieving this goal, at least for some target materials. In HPPMS, the power density at the magnetron target is pulsed to power levels exceeding the average power by about two orders of magnitude. Thermalization of sputtered atoms appears to be needed to accomplish ionization, and self-sputtering during each power pulse may be an important feature of HPPMS.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="59d062488e160b5438a63cf41231ed69" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194912,"asset_id":111751748,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194912/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751748"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751748"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751748; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751748]").text(description); $(".js-view-count[data-work-id=111751748]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751748; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751748']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "59d062488e160b5438a63cf41231ed69" } } $('.js-work-strip[data-work-id=111751748]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751748,"title":"Cathodic arcs and high power pulsed magnetron sputtering: A comparison of plasma formation and thin film deposition","translated_title":"","metadata":{"ai_title_tag":"Comparative Study of Cathodic Arcs and HPPMS in Thin Film Deposition","grobid_abstract":"Film formation by energetic condensation has been shown to lead to well-adherent, dense films. 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High power pulsed magnetron sputtering (HPPMS) may be one possible way of achieving this goal, at least for some target materials. In HPPMS, the power density at the magnetron target is pulsed to power levels exceeding the average power by about two orders of magnitude. 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Using in-situ conductivity measurements, the study identifies the critical thickness for coalescence and the conditions under which it occurs, revealing that the presence of certain transition metals accelerates the process. 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$(this).data('initialized', true); } }); $a.trackClickSource(".js-work-strip-work-link", "profile_work_strip") }); </script> <div class="js-work-strip profile--work_container" data-work-id="111751746"><div class="profile--work_thumbnail hidden-xs"><a class="js-work-strip-work-link" data-click-track="profile-work-strip-thumbnail" href="https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship"><img alt="Research paper thumbnail of Atomic scale heating in energetic plasma deposition - eScholarship" class="work-thumbnail" src="https://attachments.academia-assets.com/109194907/thumbnails/1.jpg" /></a></div><div class="wp-workCard wp-workCard_itemContainer"><div class="wp-workCard_item wp-workCard--title"><a class="js-work-strip-work-link text-gray-darker" data-click-track="profile-work-strip-title" href="https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship">Atomic scale heating in energetic plasma deposition - eScholarship</a></div><div class="wp-workCard_item"><span class="js-work-more-abstract-truncated">Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and den...</span><a class="js-work-more-abstract" data-broccoli-component="work_strip.more_abstract" data-click-track="profile-work-strip-more-abstract" href="javascript:;"><span> more </span><span><i class="fa fa-caret-down"></i></span></a><span class="js-work-more-abstract-untruncated hidden">Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="7814e9f1fb3a97cfe3528e81dfd672a3" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194907,"asset_id":111751746,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194907/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751746"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751746"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751746; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751746]").text(description); $(".js-view-count[data-work-id=111751746]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751746; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751746']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "7814e9f1fb3a97cfe3528e81dfd672a3" } } $('.js-work-strip[data-work-id=111751746]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751746,"title":"Atomic scale heating in energetic plasma deposition - eScholarship","translated_title":"","metadata":{"grobid_abstract":"Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.","publication_date":{"day":28,"month":9,"year":2001,"errors":{}},"grobid_abstract_attachment_id":109194908},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751746/Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship","translated_internal_url":"","created_at":"2023-12-18T09:28:29.447-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194907,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194907/thumbnails/1.jpg","file_name":"qt3s24f5tx.pdf","download_url":"https://www.academia.edu/attachments/109194907/download_file","bulk_download_file_name":"Atomic_scale_heating_in_energetic_plasma.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194907/qt3s24f5tx-libre.pdf?1702923768=\u0026response-content-disposition=attachment%3B+filename%3DAtomic_scale_heating_in_energetic_plasma.pdf\u0026Expires=1741733689\u0026Signature=BM1aaRj~3Aa1TLGfmJFwJM4A45nNGZ7K-bus1F1tU8boIsOe4l9md3Ghx-LVG1YqO9DlxzHNWQQTRltO-e-kOVzzipuphJ0u~498kCSKf-A7RXAdhVVpjdDTEMwjaneoTk4KyFPGyYyZBj6xnODCjBIteg0bC16khgKkddoqeSygF4V01rUzOWs3BjdloS83j7ZvwcSyyr77~QbbV4alYuhNqhFfo8kTjvI~G4o3NyPm2bz9K5-N-YYfxphXwxU5PuZz4WhLb1zixUUeHhW8raa3Mo4Uy7xpp-RoWvJDSJ0tT10aUusFAw8B5oumjoVB0jaUg7RsIgYQM9QyUw1PkA__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"Atomic_scale_heating_in_energetic_plasma_deposition_eScholarship","translated_slug":"","page_count":11,"language":"en","content_type":"Work","summary":"Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. 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Although there have been hints on the fractal nature of cathode spots in the literature, the fractal approach to spot interpretation is underutilized. In this work, a brief review of spot properties is given, touching the differences between spot type 1 (on cathodes surfaces with dielectric layers) and spot type 2 (on metallic, clean surfaces) as well as the known spot fragment or cell structure. The basic properties of self-similarity, power laws, random colored noise, and fractals are introduced. Several points of evidence for the fractal nature of spots are provided. Specifically power laws are identified as signature of fractal properties, such as spectral power of noisy arc parameters (ion current, arc voltage, etc) obtained by fast Fourier transform. It is shown that fractal properties can be observed down to the cutoff by measurement resolution or occurrence of elementary steps in physical processes. Random walk models of cathode spot motion are well established: they go asymptotically to Brownian motion for infinitesimal step width. The power spectrum of the arc voltage noise falls as 1/f 2 , where f is frequency, supporting a fractal spot model associated with Brownian motion.</span></div><div class="wp-workCard_item wp-workCard--actions"><span class="work-strip-bookmark-button-container"></span><a id="546f0482114da2f40fba6ee198d629ce" class="wp-workCard--action" rel="nofollow" data-click-track="profile-work-strip-download" data-download="{"attachment_id":109194904,"asset_id":111751744,"asset_type":"Work","button_location":"profile"}" href="https://www.academia.edu/attachments/109194904/download_file?s=profile"><span><i class="fa fa-arrow-down"></i></span><span>Download</span></a><span class="wp-workCard--action visible-if-viewed-by-owner inline-block" style="display: none;"><span class="js-profile-work-strip-edit-button-wrapper profile-work-strip-edit-button-wrapper" data-work-id="111751744"><a class="js-profile-work-strip-edit-button" tabindex="0"><span><i class="fa fa-pencil"></i></span><span>Edit</span></a></span></span></div><div class="wp-workCard_item wp-workCard--stats"><span><span><span class="js-view-count view-count u-mr2x" data-work-id="111751744"><i class="fa fa-spinner fa-spin"></i></span><script>$(function () { var workId = 111751744; window.Academia.workViewCountsFetcher.queue(workId, function (count) { var description = window.$h.commaizeInt(count) + " " + window.$h.pluralize(count, 'View'); $(".js-view-count[data-work-id=111751744]").text(description); $(".js-view-count[data-work-id=111751744]").attr('title', description).tooltip(); }); });</script></span></span><span><span class="percentile-widget hidden"><span class="u-mr2x work-percentile"></span></span><script>$(function () { var workId = 111751744; window.Academia.workPercentilesFetcher.queue(workId, function (percentileText) { var container = $(".js-work-strip[data-work-id='111751744']"); container.find('.work-percentile').text(percentileText.charAt(0).toUpperCase() + percentileText.slice(1)); container.find('.percentile-widget').show(); container.find('.percentile-widget').removeClass('hidden'); }); });</script></span></div><div id="work-strip-premium-row-container"></div></div></div><script> require.config({ waitSeconds: 90 })(["https://a.academia-assets.com/assets/wow_profile-a9bf3a2bc8c89fa2a77156577594264ee8a0f214d74241bc0fcd3f69f8d107ac.js","https://a.academia-assets.com/assets/work_edit-ad038b8c047c1a8d4fa01b402d530ff93c45fee2137a149a4a5398bc8ad67560.js"], function() { // from javascript_helper.rb var dispatcherData = {} if (true){ window.WowProfile.dispatcher = window.WowProfile.dispatcher || _.clone(Backbone.Events); dispatcherData = { dispatcher: window.WowProfile.dispatcher, downloadLinkId: "546f0482114da2f40fba6ee198d629ce" } } $('.js-work-strip[data-work-id=111751744]').each(function() { if (!$(this).data('initialized')) { new WowProfile.WorkStripView({ el: this, workJSON: {"id":111751744,"title":"The fractal nature of vacuum arc cathode spots - eScholarship","translated_title":"","metadata":{"ai_title_tag":"Fractal Properties of Vacuum Arc Cathode Spots","grobid_abstract":"The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenomena show many features of fractals, for example self-similar patterns in the emitted light and arc erosion traces. Although there have been hints on the fractal nature of cathode spots in the literature, the fractal approach to spot interpretation is underutilized. In this work, a brief review of spot properties is given, touching the differences between spot type 1 (on cathodes surfaces with dielectric layers) and spot type 2 (on metallic, clean surfaces) as well as the known spot fragment or cell structure. The basic properties of self-similarity, power laws, random colored noise, and fractals are introduced. Several points of evidence for the fractal nature of spots are provided. Specifically power laws are identified as signature of fractal properties, such as spectral power of noisy arc parameters (ion current, arc voltage, etc) obtained by fast Fourier transform. It is shown that fractal properties can be observed down to the cutoff by measurement resolution or occurrence of elementary steps in physical processes. Random walk models of cathode spot motion are well established: they go asymptotically to Brownian motion for infinitesimal step width. The power spectrum of the arc voltage noise falls as 1/f 2 , where f is frequency, supporting a fractal spot model associated with Brownian motion.","publication_date":{"day":27,"month":5,"year":2005,"errors":{}},"grobid_abstract_attachment_id":109194903},"translated_abstract":null,"internal_url":"https://www.academia.edu/111751744/The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship","translated_internal_url":"","created_at":"2023-12-18T09:28:29.247-08:00","preview_url":null,"current_user_can_edit":null,"current_user_is_owner":null,"owner_id":33147769,"coauthors_can_edit":true,"document_type":"paper","co_author_tags":[],"downloadable_attachments":[{"id":109194904,"title":"","file_type":"pdf","scribd_thumbnail_url":"https://attachments.academia-assets.com/109194904/thumbnails/1.jpg","file_name":"qt4ps8t0qc.pdf","download_url":"https://www.academia.edu/attachments/109194904/download_file","bulk_download_file_name":"The_fractal_nature_of_vacuum_arc_cathode.pdf","bulk_download_url":"https://d1wqtxts1xzle7.cloudfront.net/109194904/qt4ps8t0qc-libre.pdf?1702923777=\u0026response-content-disposition=attachment%3B+filename%3DThe_fractal_nature_of_vacuum_arc_cathode.pdf\u0026Expires=1741733689\u0026Signature=KmXkPkWumwyzCAIpT~Dy1vQkMJS5N65rectoopJiXj9jUjVHgRBsH757EOKqa~m58pKhYIXfc2dBGShdPCtfj0SqV4VlwS3bwf7SGyA800lavt9MIop4njo6FGW~MjLhFwkbKHg82xz2F5k~mlSNQleczNmYn15R4cZSpBdgUhQhVqXBnAoWfDjJDcWXh420YzP81iqBFwm56oshMK-PUOPDyX8E5yKLIvk9h71~Dph5KUzex1lVbAaNO66Xw2n5PvMrk6S27~StuddhZaMTQ6ckgUnyBzrWomgkM1NLHd0dpKW77HwNMtXcgYi2c-RzKUt1WJUDl-MTiEyGKNdyZg__\u0026Key-Pair-Id=APKAJLOHF5GGSLRBV4ZA"}],"slug":"The_fractal_nature_of_vacuum_arc_cathode_spots_eScholarship","translated_slug":"","page_count":31,"language":"en","content_type":"Work","summary":"The fractal nature of vacuum arc cathode spots *# André Anders, Fellow, IEEE Cathode spot phenomena show many features of fractals, for example self-similar patterns in the emitted light and arc erosion traces. 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