CINXE.COM

<!DOCTYPE html> <html class="client-nojs vector-feature-language-in-header-enabled vector-feature-language-in-main-page-header-disabled vector-feature-sticky-header-disabled vector-feature-page-tools-pinned-disabled vector-feature-toc-pinned-clientpref-1 vector-feature-main-menu-pinned-disabled vector-feature-limited-width-clientpref-1 vector-feature-limited-width-content-enabled vector-feature-custom-font-size-clientpref-1 vector-feature-appearance-pinned-clientpref-1 vector-feature-night-mode-enabled skin-theme-clientpref-day vector-toc-available" lang="en" dir="ltr"> <head> <meta charset="UTF-8"> <title>Electron beam-induced deposition - Wikipedia</title> <script>(function(){var className="client-js vector-feature-language-in-header-enabled vector-feature-language-in-main-page-header-disabled vector-feature-sticky-header-disabled vector-feature-page-tools-pinned-disabled vector-feature-toc-pinned-clientpref-1 vector-feature-main-menu-pinned-disabled vector-feature-limited-width-clientpref-1 vector-feature-limited-width-content-enabled vector-feature-custom-font-size-clientpref-1 vector-feature-appearance-pinned-clientpref-1 vector-feature-night-mode-enabled skin-theme-clientpref-day vector-toc-available";var cookie=document.cookie.match(/(?:^|; )enwikimwclientpreferences=([^;]+)/);if(cookie){cookie[1].split('%2C').forEach(function(pref){className=className.replace(new RegExp('(^| )'+pref.replace(/-clientpref-\w+$|[^\w-]+/g,'')+'-clientpref-\\w+( |$)'),'$1'+pref+'$2');});}document.documentElement.className=className;}());RLCONF={"wgBreakFrames":false,"wgSeparatorTransformTable":["",""],"wgDigitTransformTable":["",""],"wgDefaultDateFormat":"dmy", "wgMonthNames":["","January","February","March","April","May","June","July","August","September","October","November","December"],"wgRequestId":"a2b6e00b-e060-4799-aa8b-3548202ae9b4","wgCanonicalNamespace":"","wgCanonicalSpecialPageName":false,"wgNamespaceNumber":0,"wgPageName":"Electron_beam-induced_deposition","wgTitle":"Electron beam-induced deposition","wgCurRevisionId":1189266430,"wgRevisionId":1189266430,"wgArticleId":9673324,"wgIsArticle":true,"wgIsRedirect":false,"wgAction":"view","wgUserName":null,"wgUserGroups":["*"],"wgCategories":["Commons category link is on Wikidata","Electron beam","Electron microscopy","Nanotechnology"],"wgPageViewLanguage":"en","wgPageContentLanguage":"en","wgPageContentModel":"wikitext","wgRelevantPageName":"Electron_beam-induced_deposition","wgRelevantArticleId":9673324,"wgIsProbablyEditable":true,"wgRelevantPageIsProbablyEditable":true,"wgRestrictionEdit":[],"wgRestrictionMove":[],"wgNoticeProject":"wikipedia","wgCiteReferencePreviewsActive":false, "wgFlaggedRevsParams":{"tags":{"status":{"levels":1}}},"wgMediaViewerOnClick":true,"wgMediaViewerEnabledByDefault":true,"wgPopupsFlags":0,"wgVisualEditor":{"pageLanguageCode":"en","pageLanguageDir":"ltr","pageVariantFallbacks":"en"},"wgMFDisplayWikibaseDescriptions":{"search":true,"watchlist":true,"tagline":false,"nearby":true},"wgWMESchemaEditAttemptStepOversample":false,"wgWMEPageLength":10000,"wgRelatedArticlesCompat":[],"wgCentralAuthMobileDomain":false,"wgEditSubmitButtonLabelPublish":true,"wgULSPosition":"interlanguage","wgULSisCompactLinksEnabled":false,"wgVector2022LanguageInHeader":true,"wgULSisLanguageSelectorEmpty":false,"wgWikibaseItemId":"Q5358152","wgCheckUserClientHintsHeadersJsApi":["brands","architecture","bitness","fullVersionList","mobile","model","platform","platformVersion"],"GEHomepageSuggestedEditsEnableTopics":true,"wgGETopicsMatchModeEnabled":false,"wgGEStructuredTaskRejectionReasonTextInputEnabled":false,"wgGELevelingUpEnabledForUser":false};RLSTATE={ "ext.globalCssJs.user.styles":"ready","site.styles":"ready","user.styles":"ready","ext.globalCssJs.user":"ready","user":"ready","user.options":"loading","ext.cite.styles":"ready","mediawiki.page.gallery.styles":"ready","skins.vector.search.codex.styles":"ready","skins.vector.styles":"ready","skins.vector.icons":"ready","jquery.makeCollapsible.styles":"ready","ext.wikimediamessages.styles":"ready","ext.visualEditor.desktopArticleTarget.noscript":"ready","ext.uls.interlanguage":"ready","wikibase.client.init":"ready","ext.wikimediaBadges":"ready"};RLPAGEMODULES=["ext.cite.ux-enhancements","mediawiki.page.gallery","mediawiki.page.media","site","mediawiki.page.ready","jquery.makeCollapsible","mediawiki.toc","skins.vector.js","ext.centralNotice.geoIP","ext.centralNotice.startUp","ext.gadget.ReferenceTooltips","ext.gadget.switcher","ext.urlShortener.toolbar","ext.centralauth.centralautologin","mmv.bootstrap","ext.popups","ext.visualEditor.desktopArticleTarget.init", "ext.visualEditor.targetLoader","ext.echo.centralauth","ext.eventLogging","ext.wikimediaEvents","ext.navigationTiming","ext.uls.interface","ext.cx.eventlogging.campaigns","ext.cx.uls.quick.actions","wikibase.client.vector-2022","ext.checkUser.clientHints","ext.growthExperiments.SuggestedEditSession","wikibase.sidebar.tracking"];</script> <script>(RLQ=window.RLQ||[]).push(function(){mw.loader.impl(function(){return["user.options@12s5i",function($,jQuery,require,module){mw.user.tokens.set({"patrolToken":"+\\","watchToken":"+\\","csrfToken":"+\\"}); }];});});</script> <link rel="stylesheet" href="/w/load.php?lang=en&modules=ext.cite.styles%7Cext.uls.interlanguage%7Cext.visualEditor.desktopArticleTarget.noscript%7Cext.wikimediaBadges%7Cext.wikimediamessages.styles%7Cjquery.makeCollapsible.styles%7Cmediawiki.page.gallery.styles%7Cskins.vector.icons%2Cstyles%7Cskins.vector.search.codex.styles%7Cwikibase.client.init&only=styles&skin=vector-2022"> <script async="" src="/w/load.php?lang=en&modules=startup&only=scripts&raw=1&skin=vector-2022"></script> <meta name="ResourceLoaderDynamicStyles" content=""> <link rel="stylesheet" href="/w/load.php?lang=en&modules=site.styles&only=styles&skin=vector-2022"> <meta name="generator" content="MediaWiki 1.44.0-wmf.4"> <meta name="referrer" content="origin"> <meta name="referrer" content="origin-when-cross-origin"> <meta name="robots" content="max-image-preview:standard"> <meta name="format-detection" content="telephone=no"> <meta name="viewport" content="width=1120"> <meta property="og:title" content="Electron beam-induced deposition - Wikipedia"> <meta property="og:type" content="website"> <link rel="preconnect" href="//upload.wikimedia.org"> <link rel="alternate" media="only screen and (max-width: 640px)" href="//en.m.wikipedia.org/wiki/Electron_beam-induced_deposition"> <link rel="alternate" type="application/x-wiki" title="Edit this page" href="/w/index.php?title=Electron_beam-induced_deposition&action=edit"> <link rel="apple-touch-icon" href="/static/apple-touch/wikipedia.png"> <link rel="icon" href="/static/favicon/wikipedia.ico"> <link rel="search" type="application/opensearchdescription+xml" href="/w/rest.php/v1/search" title="Wikipedia (en)"> <link rel="EditURI" type="application/rsd+xml" href="//en.wikipedia.org/w/api.php?action=rsd"> <link rel="canonical" href="https://en.wikipedia.org/wiki/Electron_beam-induced_deposition"> <link rel="license" href="https://creativecommons.org/licenses/by-sa/4.0/deed.en"> <link rel="alternate" type="application/atom+xml" title="Wikipedia Atom feed" href="/w/index.php?title=Special:RecentChanges&feed=atom"> <link rel="dns-prefetch" href="//meta.wikimedia.org" /> <link rel="dns-prefetch" href="//login.wikimedia.org"> </head> <body class="skin--responsive skin-vector skin-vector-search-vue mediawiki ltr sitedir-ltr mw-hide-empty-elt ns-0 ns-subject mw-editable page-Electron_beam-induced_deposition rootpage-Electron_beam-induced_deposition skin-vector-2022 action-view"><a class="mw-jump-link" href="#bodyContent">Jump to content</a> <div class="vector-header-container"> <header class="vector-header mw-header"> <div class="vector-header-start"> <nav class="vector-main-menu-landmark" aria-label="Site"> <div id="vector-main-menu-dropdown" class="vector-dropdown vector-main-menu-dropdown vector-button-flush-left vector-button-flush-right" > <input type="checkbox" id="vector-main-menu-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-main-menu-dropdown" class="vector-dropdown-checkbox " aria-label="Main menu" > <label id="vector-main-menu-dropdown-label" for="vector-main-menu-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-menu mw-ui-icon-wikimedia-menu"></span> <span class="vector-dropdown-label-text">Main menu</span> </label> <div class="vector-dropdown-content"> <div id="vector-main-menu-unpinned-container" class="vector-unpinned-container"> <div id="vector-main-menu" class="vector-main-menu vector-pinnable-element"> <div class="vector-pinnable-header vector-main-menu-pinnable-header vector-pinnable-header-unpinned" data-feature-name="main-menu-pinned" data-pinnable-element-id="vector-main-menu" data-pinned-container-id="vector-main-menu-pinned-container" data-unpinned-container-id="vector-main-menu-unpinned-container" > <div class="vector-pinnable-header-label">Main menu</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-main-menu.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-main-menu.unpin">hide</button> </div> <div id="p-navigation" class="vector-menu mw-portlet mw-portlet-navigation" > <div class="vector-menu-heading"> Navigation </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="n-mainpage-description" class="mw-list-item"><a href="/wiki/Main_Page" title="Visit the main page [z]" accesskey="z"><span>Main page</span></a></li><li id="n-contents" class="mw-list-item"><a href="/wiki/Wikipedia:Contents" title="Guides to browsing Wikipedia"><span>Contents</span></a></li><li id="n-currentevents" class="mw-list-item"><a href="/wiki/Portal:Current_events" title="Articles related to current events"><span>Current events</span></a></li><li id="n-randompage" class="mw-list-item"><a href="/wiki/Special:Random" title="Visit a randomly selected article [x]" accesskey="x"><span>Random article</span></a></li><li id="n-aboutsite" class="mw-list-item"><a href="/wiki/Wikipedia:About" title="Learn about Wikipedia and how it works"><span>About Wikipedia</span></a></li><li id="n-contactpage" class="mw-list-item"><a href="//en.wikipedia.org/wiki/Wikipedia:Contact_us" title="How to contact Wikipedia"><span>Contact us</span></a></li> </ul> </div> </div> <div id="p-interaction" class="vector-menu mw-portlet mw-portlet-interaction" > <div class="vector-menu-heading"> Contribute </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="n-help" class="mw-list-item"><a href="/wiki/Help:Contents" title="Guidance on how to use and edit Wikipedia"><span>Help</span></a></li><li id="n-introduction" class="mw-list-item"><a href="/wiki/Help:Introduction" title="Learn how to edit Wikipedia"><span>Learn to edit</span></a></li><li id="n-portal" class="mw-list-item"><a href="/wiki/Wikipedia:Community_portal" title="The hub for editors"><span>Community portal</span></a></li><li id="n-recentchanges" class="mw-list-item"><a href="/wiki/Special:RecentChanges" title="A list of recent changes to Wikipedia [r]" accesskey="r"><span>Recent changes</span></a></li><li id="n-upload" class="mw-list-item"><a href="/wiki/Wikipedia:File_upload_wizard" title="Add images or other media for use on Wikipedia"><span>Upload file</span></a></li> </ul> </div> </div> </div> </div> </div> </div> </nav> <a href="/wiki/Main_Page" class="mw-logo"> <img class="mw-logo-icon" src="/static/images/icons/wikipedia.png" alt="" aria-hidden="true" height="50" width="50"> <span class="mw-logo-container skin-invert"> <img class="mw-logo-wordmark" alt="Wikipedia" src="/static/images/mobile/copyright/wikipedia-wordmark-en.svg" style="width: 7.5em; height: 1.125em;"> <img class="mw-logo-tagline" alt="The Free Encyclopedia" src="/static/images/mobile/copyright/wikipedia-tagline-en.svg" width="117" height="13" style="width: 7.3125em; height: 0.8125em;"> </span> </a> </div> <div class="vector-header-end"> <div id="p-search" role="search" class="vector-search-box-vue vector-search-box-collapses vector-search-box-show-thumbnail vector-search-box-auto-expand-width vector-search-box"> <a href="/wiki/Special:Search" class="cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only search-toggle" title="Search Wikipedia [f]" accesskey="f"><span class="vector-icon mw-ui-icon-search mw-ui-icon-wikimedia-search"></span> <span>Search</span> </a> <div class="vector-typeahead-search-container"> <div class="cdx-typeahead-search cdx-typeahead-search--show-thumbnail cdx-typeahead-search--auto-expand-width"> <form action="/w/index.php" id="searchform" class="cdx-search-input cdx-search-input--has-end-button"> <div id="simpleSearch" class="cdx-search-input__input-wrapper" data-search-loc="header-moved"> <div class="cdx-text-input cdx-text-input--has-start-icon"> <input class="cdx-text-input__input" type="search" name="search" placeholder="Search Wikipedia" aria-label="Search Wikipedia" autocapitalize="sentences" title="Search Wikipedia [f]" accesskey="f" id="searchInput" > <span class="cdx-text-input__icon cdx-text-input__start-icon"></span> </div> <input type="hidden" name="title" value="Special:Search"> </div> <button class="cdx-button cdx-search-input__end-button">Search</button> </form> </div> </div> </div> <nav class="vector-user-links vector-user-links-wide" aria-label="Personal tools"> <div class="vector-user-links-main"> <div id="p-vector-user-menu-preferences" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <div id="p-vector-user-menu-userpage" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <nav class="vector-appearance-landmark" aria-label="Appearance"> <div id="vector-appearance-dropdown" class="vector-dropdown " title="Change the appearance of the page's font size, width, and color" > <input type="checkbox" id="vector-appearance-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-appearance-dropdown" class="vector-dropdown-checkbox " aria-label="Appearance" > <label id="vector-appearance-dropdown-label" for="vector-appearance-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-appearance mw-ui-icon-wikimedia-appearance"></span> <span class="vector-dropdown-label-text">Appearance</span> </label> <div class="vector-dropdown-content"> <div id="vector-appearance-unpinned-container" class="vector-unpinned-container"> </div> </div> </div> </nav> <div id="p-vector-user-menu-notifications" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <div id="p-vector-user-menu-overflow" class="vector-menu mw-portlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-sitesupport-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="https://donate.wikimedia.org/wiki/Special:FundraiserRedirector?utm_source=donate&utm_medium=sidebar&utm_campaign=C13_en.wikipedia.org&uselang=en" class=""><span>Donate</span></a> </li> <li id="pt-createaccount-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="/w/index.php?title=Special:CreateAccount&returnto=Electron+beam-induced+deposition" title="You are encouraged to create an account and log in; however, it is not mandatory" class=""><span>Create account</span></a> </li> <li id="pt-login-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="/w/index.php?title=Special:UserLogin&returnto=Electron+beam-induced+deposition" title="You're encouraged to log in; however, it's not mandatory. [o]" accesskey="o" class=""><span>Log in</span></a> </li> </ul> </div> </div> </div> <div id="vector-user-links-dropdown" class="vector-dropdown vector-user-menu vector-button-flush-right vector-user-menu-logged-out" title="Log in and more options" > <input type="checkbox" id="vector-user-links-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-user-links-dropdown" class="vector-dropdown-checkbox " aria-label="Personal tools" > <label id="vector-user-links-dropdown-label" for="vector-user-links-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-ellipsis mw-ui-icon-wikimedia-ellipsis"></span> <span class="vector-dropdown-label-text">Personal tools</span> </label> <div class="vector-dropdown-content"> <div id="p-personal" class="vector-menu mw-portlet mw-portlet-personal user-links-collapsible-item" title="User menu" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-sitesupport" class="user-links-collapsible-item mw-list-item"><a href="https://donate.wikimedia.org/wiki/Special:FundraiserRedirector?utm_source=donate&utm_medium=sidebar&utm_campaign=C13_en.wikipedia.org&uselang=en"><span>Donate</span></a></li><li id="pt-createaccount" class="user-links-collapsible-item mw-list-item"><a href="/w/index.php?title=Special:CreateAccount&returnto=Electron+beam-induced+deposition" title="You are encouraged to create an account and log in; however, it is not mandatory"><span class="vector-icon mw-ui-icon-userAdd mw-ui-icon-wikimedia-userAdd"></span> <span>Create account</span></a></li><li id="pt-login" class="user-links-collapsible-item mw-list-item"><a href="/w/index.php?title=Special:UserLogin&returnto=Electron+beam-induced+deposition" title="You're encouraged to log in; however, it's not mandatory. [o]" accesskey="o"><span class="vector-icon mw-ui-icon-logIn mw-ui-icon-wikimedia-logIn"></span> <span>Log in</span></a></li> </ul> </div> </div> <div id="p-user-menu-anon-editor" class="vector-menu mw-portlet mw-portlet-user-menu-anon-editor" > <div class="vector-menu-heading"> Pages for logged out editors <a href="/wiki/Help:Introduction" aria-label="Learn more about editing"><span>learn more</span></a> </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-anoncontribs" class="mw-list-item"><a href="/wiki/Special:MyContributions" title="A list of edits made from this IP address [y]" accesskey="y"><span>Contributions</span></a></li><li id="pt-anontalk" class="mw-list-item"><a href="/wiki/Special:MyTalk" title="Discussion about edits from this IP address [n]" accesskey="n"><span>Talk</span></a></li> </ul> </div> </div> </div> </div> </nav> </div> </header> </div> <div class="mw-page-container"> <div class="mw-page-container-inner"> <div class="vector-sitenotice-container"> <div id="siteNotice"></div> </div> <div class="vector-column-start"> <div class="vector-main-menu-container"> <div id="mw-navigation"> <nav id="mw-panel" class="vector-main-menu-landmark" aria-label="Site"> <div id="vector-main-menu-pinned-container" class="vector-pinned-container"> </div> </nav> </div> </div> <div class="vector-sticky-pinned-container"> <nav id="mw-panel-toc" aria-label="Contents" data-event-name="ui.sidebar-toc" class="mw-table-of-contents-container vector-toc-landmark"> <div id="vector-toc-pinned-container" class="vector-pinned-container"> <div id="vector-toc" class="vector-toc vector-pinnable-element"> <div class="vector-pinnable-header vector-toc-pinnable-header vector-pinnable-header-pinned" data-feature-name="toc-pinned" data-pinnable-element-id="vector-toc" > <h2 class="vector-pinnable-header-label">Contents</h2> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-toc.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-toc.unpin">hide</button> </div> <ul class="vector-toc-contents" id="mw-panel-toc-list"> <li id="toc-mw-content-text" class="vector-toc-list-item vector-toc-level-1"> <a href="#" class="vector-toc-link"> <div class="vector-toc-text">(Top)</div> </a> </li> <li id="toc-Process" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Process"> <div class="vector-toc-text"> <span class="vector-toc-numb">1</span> <span>Process</span> </div> </a> <ul id="toc-Process-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Deposition_mechanism" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Deposition_mechanism"> <div class="vector-toc-text"> <span class="vector-toc-numb">2</span> <span>Deposition mechanism</span> </div> </a> <ul id="toc-Deposition_mechanism-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Spatial_resolution" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Spatial_resolution"> <div class="vector-toc-text"> <span class="vector-toc-numb">3</span> <span>Spatial resolution</span> </div> </a> <ul id="toc-Spatial_resolution-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Materials_and_precursors" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Materials_and_precursors"> <div class="vector-toc-text"> <span class="vector-toc-numb">4</span> <span>Materials and precursors</span> </div> </a> <ul id="toc-Materials_and_precursors-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Advantages" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Advantages"> <div class="vector-toc-text"> <span class="vector-toc-numb">5</span> <span>Advantages</span> </div> </a> <ul id="toc-Advantages-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Disadvantages" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Disadvantages"> <div class="vector-toc-text"> <span class="vector-toc-numb">6</span> <span>Disadvantages</span> </div> </a> <ul id="toc-Disadvantages-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Ion-beam-induced_deposition" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Ion-beam-induced_deposition"> <div class="vector-toc-text"> <span class="vector-toc-numb">7</span> <span>Ion-beam-induced deposition</span> </div> </a> <ul id="toc-Ion-beam-induced_deposition-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Shapes" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Shapes"> <div class="vector-toc-text"> <span class="vector-toc-numb">8</span> <span>Shapes</span> </div> </a> <ul id="toc-Shapes-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-See_also" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#See_also"> <div class="vector-toc-text"> <span class="vector-toc-numb">9</span> <span>See also</span> </div> </a> <ul id="toc-See_also-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-References" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#References"> <div class="vector-toc-text"> <span class="vector-toc-numb">10</span> <span>References</span> </div> </a> <ul id="toc-References-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-External_links" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#External_links"> <div class="vector-toc-text"> <span class="vector-toc-numb">11</span> <span>External links</span> </div> </a> <ul id="toc-External_links-sublist" class="vector-toc-list"> </ul> </li> </ul> </div> </div> </nav> </div> </div> <div class="mw-content-container"> <main id="content" class="mw-body"> <header class="mw-body-header vector-page-titlebar"> <nav aria-label="Contents" class="vector-toc-landmark"> <div id="vector-page-titlebar-toc" class="vector-dropdown vector-page-titlebar-toc vector-button-flush-left" > <input type="checkbox" id="vector-page-titlebar-toc-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-page-titlebar-toc" class="vector-dropdown-checkbox " aria-label="Toggle the table of contents" > <label id="vector-page-titlebar-toc-label" for="vector-page-titlebar-toc-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-listBullet mw-ui-icon-wikimedia-listBullet"></span> <span class="vector-dropdown-label-text">Toggle the table of contents</span> </label> <div class="vector-dropdown-content"> <div id="vector-page-titlebar-toc-unpinned-container" class="vector-unpinned-container"> </div> </div> </div> </nav> <h1 id="firstHeading" class="firstHeading mw-first-heading"><span class="mw-page-title-main">Electron beam-induced deposition</span></h1> <div id="p-lang-btn" class="vector-dropdown mw-portlet mw-portlet-lang" > <input type="checkbox" id="p-lang-btn-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-p-lang-btn" class="vector-dropdown-checkbox mw-interlanguage-selector" aria-label="Go to an article in another language. Available in 6 languages" > <label id="p-lang-btn-label" for="p-lang-btn-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--action-progressive mw-portlet-lang-heading-6" aria-hidden="true" ><span class="vector-icon mw-ui-icon-language-progressive mw-ui-icon-wikimedia-language-progressive"></span> <span class="vector-dropdown-label-text">6 languages</span> </label> <div class="vector-dropdown-content"> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li class="interlanguage-link interwiki-ca mw-list-item"><a href="https://ca.wikipedia.org/wiki/Deposici%C3%B3_indu%C3%AFda_per_feix_d%27electrons" title="Deposició induïda per feix d'electrons – Catalan" lang="ca" hreflang="ca" data-title="Deposició induïda per feix d'electrons" data-language-autonym="Català" data-language-local-name="Catalan" class="interlanguage-link-target"><span>Català</span></a></li><li class="interlanguage-link interwiki-cs mw-list-item"><a href="https://cs.wikipedia.org/wiki/Depozice_indukovan%C3%A1_elektronov%C3%BDm_paprskem" title="Depozice indukovaná elektronovým paprskem – Czech" lang="cs" hreflang="cs" data-title="Depozice indukovaná elektronovým paprskem" data-language-autonym="Čeština" data-language-local-name="Czech" class="interlanguage-link-target"><span>Čeština</span></a></li><li class="interlanguage-link interwiki-fa mw-list-item"><a href="https://fa.wikipedia.org/wiki/%D8%B1%D8%B3%D9%88%D8%A8_%D9%86%D8%A7%D8%B4%DB%8C_%D8%A7%D8%B2_%D9%BE%D8%B1%D8%AA%D9%88_%D8%A7%D9%84%DA%A9%D8%AA%D8%B1%D9%88%D9%86%DB%8C" title="رسوب ناشی از پرتو الکترونی – Persian" lang="fa" hreflang="fa" data-title="رسوب ناشی از پرتو الکترونی" data-language-autonym="فارسی" data-language-local-name="Persian" class="interlanguage-link-target"><span>فارسی</span></a></li><li class="interlanguage-link interwiki-fr mw-list-item"><a href="https://fr.wikipedia.org/wiki/Electron_beam-induced_deposition" title="Electron beam-induced deposition – French" lang="fr" hreflang="fr" data-title="Electron beam-induced deposition" data-language-autonym="Français" data-language-local-name="French" class="interlanguage-link-target"><span>Français</span></a></li><li class="interlanguage-link interwiki-pt mw-list-item"><a href="https://pt.wikipedia.org/wiki/Deposi%C3%A7%C3%A3o_induzida_por_feixe_de_el%C3%A9trons" title="Deposição induzida por feixe de elétrons – Portuguese" lang="pt" hreflang="pt" data-title="Deposição induzida por feixe de elétrons" data-language-autonym="Português" data-language-local-name="Portuguese" class="interlanguage-link-target"><span>Português</span></a></li><li class="interlanguage-link interwiki-zh mw-list-item"><a href="https://zh.wikipedia.org/wiki/%E7%94%B5%E5%AD%90%E6%9D%9F%E8%AF%B1%E5%AF%BC%E6%B2%89%E7%A7%AF" title="电子束诱导沉积 – Chinese" lang="zh" hreflang="zh" data-title="电子束诱导沉积" data-language-autonym="中文" data-language-local-name="Chinese" class="interlanguage-link-target"><span>中文</span></a></li> </ul> <div class="after-portlet after-portlet-lang"><span class="wb-langlinks-edit wb-langlinks-link"><a href="https://www.wikidata.org/wiki/Special:EntityPage/Q5358152#sitelinks-wikipedia" title="Edit interlanguage links" class="wbc-editpage">Edit links</a></span></div> </div> </div> </div> </header> <div class="vector-page-toolbar"> <div class="vector-page-toolbar-container"> <div id="left-navigation"> <nav aria-label="Namespaces"> <div id="p-associated-pages" class="vector-menu vector-menu-tabs mw-portlet mw-portlet-associated-pages" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-nstab-main" class="selected vector-tab-noicon mw-list-item"><a href="/wiki/Electron_beam-induced_deposition" title="View the content page [c]" accesskey="c"><span>Article</span></a></li><li id="ca-talk" class="vector-tab-noicon mw-list-item"><a href="/wiki/Talk:Electron_beam-induced_deposition" rel="discussion" title="Discuss improvements to the content page [t]" accesskey="t"><span>Talk</span></a></li> </ul> </div> </div> <div id="vector-variants-dropdown" class="vector-dropdown emptyPortlet" > <input type="checkbox" id="vector-variants-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-variants-dropdown" class="vector-dropdown-checkbox " aria-label="Change language variant" > <label id="vector-variants-dropdown-label" for="vector-variants-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet" aria-hidden="true" ><span class="vector-dropdown-label-text">English</span> </label> <div class="vector-dropdown-content"> <div id="p-variants" class="vector-menu mw-portlet mw-portlet-variants emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> </div> </div> </nav> </div> <div id="right-navigation" class="vector-collapsible"> <nav aria-label="Views"> <div id="p-views" class="vector-menu vector-menu-tabs mw-portlet mw-portlet-views" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-view" class="selected vector-tab-noicon mw-list-item"><a href="/wiki/Electron_beam-induced_deposition"><span>Read</span></a></li><li id="ca-edit" class="vector-tab-noicon mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit" title="Edit this page [e]" accesskey="e"><span>Edit</span></a></li><li id="ca-history" class="vector-tab-noicon mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&action=history" title="Past revisions of this page [h]" accesskey="h"><span>View history</span></a></li> </ul> </div> </div> </nav> <nav class="vector-page-tools-landmark" aria-label="Page tools"> <div id="vector-page-tools-dropdown" class="vector-dropdown vector-page-tools-dropdown" > <input type="checkbox" id="vector-page-tools-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-page-tools-dropdown" class="vector-dropdown-checkbox " aria-label="Tools" > <label id="vector-page-tools-dropdown-label" for="vector-page-tools-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet" aria-hidden="true" ><span class="vector-dropdown-label-text">Tools</span> </label> <div class="vector-dropdown-content"> <div id="vector-page-tools-unpinned-container" class="vector-unpinned-container"> <div id="vector-page-tools" class="vector-page-tools vector-pinnable-element"> <div class="vector-pinnable-header vector-page-tools-pinnable-header vector-pinnable-header-unpinned" data-feature-name="page-tools-pinned" data-pinnable-element-id="vector-page-tools" data-pinned-container-id="vector-page-tools-pinned-container" data-unpinned-container-id="vector-page-tools-unpinned-container" > <div class="vector-pinnable-header-label">Tools</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-page-tools.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-page-tools.unpin">hide</button> </div> <div id="p-cactions" class="vector-menu mw-portlet mw-portlet-cactions emptyPortlet vector-has-collapsible-items" title="More options" > <div class="vector-menu-heading"> Actions </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-more-view" class="selected vector-more-collapsible-item mw-list-item"><a href="/wiki/Electron_beam-induced_deposition"><span>Read</span></a></li><li id="ca-more-edit" class="vector-more-collapsible-item mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit" title="Edit this page [e]" accesskey="e"><span>Edit</span></a></li><li id="ca-more-history" class="vector-more-collapsible-item mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&action=history"><span>View history</span></a></li> </ul> </div> </div> <div id="p-tb" class="vector-menu mw-portlet mw-portlet-tb" > <div class="vector-menu-heading"> General </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="t-whatlinkshere" class="mw-list-item"><a href="/wiki/Special:WhatLinksHere/Electron_beam-induced_deposition" title="List of all English Wikipedia pages containing links to this page [j]" accesskey="j"><span>What links here</span></a></li><li id="t-recentchangeslinked" class="mw-list-item"><a href="/wiki/Special:RecentChangesLinked/Electron_beam-induced_deposition" rel="nofollow" title="Recent changes in pages linked from this page [k]" accesskey="k"><span>Related changes</span></a></li><li id="t-upload" class="mw-list-item"><a href="/wiki/Wikipedia:File_Upload_Wizard" title="Upload files [u]" accesskey="u"><span>Upload file</span></a></li><li id="t-specialpages" class="mw-list-item"><a href="/wiki/Special:SpecialPages" title="A list of all special pages [q]" accesskey="q"><span>Special pages</span></a></li><li id="t-permalink" class="mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&oldid=1189266430" title="Permanent link to this revision of this page"><span>Permanent link</span></a></li><li id="t-info" class="mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&action=info" title="More information about this page"><span>Page information</span></a></li><li id="t-cite" class="mw-list-item"><a href="/w/index.php?title=Special:CiteThisPage&page=Electron_beam-induced_deposition&id=1189266430&wpFormIdentifier=titleform" title="Information on how to cite this page"><span>Cite this page</span></a></li><li id="t-urlshortener" class="mw-list-item"><a href="/w/index.php?title=Special:UrlShortener&url=https%3A%2F%2Fen.wikipedia.org%2Fwiki%2FElectron_beam-induced_deposition"><span>Get shortened URL</span></a></li><li id="t-urlshortener-qrcode" class="mw-list-item"><a href="/w/index.php?title=Special:QrCode&url=https%3A%2F%2Fen.wikipedia.org%2Fwiki%2FElectron_beam-induced_deposition"><span>Download QR code</span></a></li> </ul> </div> </div> <div id="p-coll-print_export" class="vector-menu mw-portlet mw-portlet-coll-print_export" > <div class="vector-menu-heading"> Print/export </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="coll-download-as-rl" class="mw-list-item"><a href="/w/index.php?title=Special:DownloadAsPdf&page=Electron_beam-induced_deposition&action=show-download-screen" title="Download this page as a PDF file"><span>Download as PDF</span></a></li><li id="t-print" class="mw-list-item"><a href="/w/index.php?title=Electron_beam-induced_deposition&printable=yes" title="Printable version of this page [p]" accesskey="p"><span>Printable version</span></a></li> </ul> </div> </div> <div id="p-wikibase-otherprojects" class="vector-menu mw-portlet mw-portlet-wikibase-otherprojects" > <div class="vector-menu-heading"> In other projects </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li class="wb-otherproject-link wb-otherproject-commons mw-list-item"><a href="https://commons.wikimedia.org/wiki/Category:Electron_beam-induced_deposition" hreflang="en"><span>Wikimedia Commons</span></a></li><li id="t-wikibase" class="wb-otherproject-link wb-otherproject-wikibase-dataitem mw-list-item"><a href="https://www.wikidata.org/wiki/Special:EntityPage/Q5358152" title="Structured data on this page hosted by Wikidata [g]" accesskey="g"><span>Wikidata item</span></a></li> </ul> </div> </div> </div> </div> </div> </div> </nav> </div> </div> </div> <div class="vector-column-end"> <div class="vector-sticky-pinned-container"> <nav class="vector-page-tools-landmark" aria-label="Page tools"> <div id="vector-page-tools-pinned-container" class="vector-pinned-container"> </div> </nav> <nav class="vector-appearance-landmark" aria-label="Appearance"> <div id="vector-appearance-pinned-container" class="vector-pinned-container"> <div id="vector-appearance" class="vector-appearance vector-pinnable-element"> <div class="vector-pinnable-header vector-appearance-pinnable-header vector-pinnable-header-pinned" data-feature-name="appearance-pinned" data-pinnable-element-id="vector-appearance" data-pinned-container-id="vector-appearance-pinned-container" data-unpinned-container-id="vector-appearance-unpinned-container" > <div class="vector-pinnable-header-label">Appearance</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-appearance.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-appearance.unpin">hide</button> </div> </div> </div> </nav> </div> </div> <div id="bodyContent" class="vector-body" aria-labelledby="firstHeading" data-mw-ve-target-container> <div class="vector-body-before-content"> <div class="mw-indicators"> </div> <div id="siteSub" class="noprint">From Wikipedia, the free encyclopedia</div> </div> <div id="contentSub"><div id="mw-content-subtitle"></div></div> <div id="mw-content-text" class="mw-body-content"><div class="mw-content-ltr mw-parser-output" lang="en" dir="ltr"><p><b>Electron-beam-induced deposition (EBID)</b> is a process of decomposing gaseous molecules by an electron beam leading to deposition of non-volatile fragments onto a nearby substrate. The electron beam is usually provided by a <a href="/wiki/Scanning_electron_microscope" title="Scanning electron microscope">scanning electron microscope</a>, which results in high spatial accuracy (potentially below one nanometer) and the possibility to produce free-standing, three-dimensional structures.<sup id="cite_ref-1" class="reference"><a href="#cite_note-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </p> <meta property="mw:PageProp/toc" /> <div class="mw-heading mw-heading2"><h2 id="Process">Process</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=1" title="Edit section: Process"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <figure class="mw-default-size" typeof="mw:File/Thumb"><a href="/wiki/File:Electron_beam-induced_deposition_(schematic).png" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/e/e1/Electron_beam-induced_deposition_%28schematic%29.png/290px-Electron_beam-induced_deposition_%28schematic%29.png" decoding="async" width="290" height="200" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/e/e1/Electron_beam-induced_deposition_%28schematic%29.png/435px-Electron_beam-induced_deposition_%28schematic%29.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/e/e1/Electron_beam-induced_deposition_%28schematic%29.png/580px-Electron_beam-induced_deposition_%28schematic%29.png 2x" data-file-width="689" data-file-height="475" /></a><figcaption>Scheme of the EBID process</figcaption></figure> <figure class="mw-default-size" typeof="mw:File/Thumb"><a href="/wiki/File:EEBDsetup.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/f/fe/EEBDsetup.jpg/290px-EEBDsetup.jpg" decoding="async" width="290" height="151" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/f/fe/EEBDsetup.jpg/435px-EEBDsetup.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/f/fe/EEBDsetup.jpg/580px-EEBDsetup.jpg 2x" data-file-width="830" data-file-height="431" /></a><figcaption>EBID setup</figcaption></figure> <p>The focused electron beam of a <a href="/wiki/Scanning_electron_microscope" title="Scanning electron microscope">scanning electron microscope</a> (SEM) or <a href="/wiki/Scanning_transmission_electron_microscope" class="mw-redirect" title="Scanning transmission electron microscope">scanning transmission electron microscope</a> (STEM) is commonly used. Another method is <a href="/w/index.php?title=Ion-beam-induced_deposition&action=edit&redlink=1" class="new" title="Ion-beam-induced deposition (page does not exist)">ion-beam-induced deposition</a> (IBID), where a <a href="/wiki/Focused_ion_beam" title="Focused ion beam">focused ion beam</a> is applied instead. Precursor materials are typically liquid or solid and gasified prior to deposition, usually through vaporization or <a href="/wiki/Sublimation_(chemistry)" class="mw-redirect" title="Sublimation (chemistry)">sublimation</a>, and introduced, at accurately controlled rate, into the high-vacuum chamber of the electron microscope. Alternatively, solid precursors can be sublimated by the electron beam itself.<sup id="cite_ref-2" class="reference"><a href="#cite_note-2"><span class="cite-bracket">[</span>2<span class="cite-bracket">]</span></a></sup> </p><p>When deposition occurs at a high temperature or involves corrosive gases, a specially designed deposition chamber is used;<sup id="cite_ref-dia1_3-0" class="reference"><a href="#cite_note-dia1-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> it is isolated from the microscope, and the beam is introduced into it through a micrometre-sized orifice. The small orifice size maintains differential pressure in the microscope (vacuum) and deposition chamber (no vacuum). Such deposition mode has been used for EBID of diamond.<sup id="cite_ref-dia1_3-1" class="reference"><a href="#cite_note-dia1-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-dia2_4-0" class="reference"><a href="#cite_note-dia2-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup> </p><p>In the presence of the precursor gas, the electron beam is scanned over the substrate, resulting in deposition of material. The scanning is usually computer-controlled. The deposition rate depends on a variety of processing parameters, such as the partial precursor pressure, substrate temperature, electron beam parameters, applied current density, etc. It usually is in the order of 10 nm/s.<sup id="cite_ref-r1_5-0" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Deposition_mechanism">Deposition mechanism</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=2" title="Edit section: Deposition mechanism"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Primary electron energies in SEMs or STEMs are usually between 10 and 300 keV, where reactions induced by electron impact, i.e. precursor dissociation, have a relatively low cross section. The majority of decomposition occurs via low energy electron impact: either by low energy secondary electrons, which cross the substrate-vacuum interface and contribute to the total current density, or inelastically scattered (backscattered) electrons.<sup id="cite_ref-r1_5-1" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-fr1_6-0" class="reference"><a href="#cite_note-fr1-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-7" class="reference"><a href="#cite_note-7"><span class="cite-bracket">[</span>7<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Spatial_resolution">Spatial resolution</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=3" title="Edit section: Spatial resolution"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Primary S(T)EM electrons can be focused into spots as small as ~0.045 nm.<sup id="cite_ref-8" class="reference"><a href="#cite_note-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> While the smallest structures deposited so far by EBID are point deposits of ~0.7 nm diameter,<sup id="cite_ref-small_9-0" class="reference"><a href="#cite_note-small-9"><span class="cite-bracket">[</span>9<span class="cite-bracket">]</span></a></sup> deposits usually have a larger lateral size than the beam spot size. The reason are the so-called proximity effects, meaning that secondary, backscattered and forward scattered (if the beam dwells on already deposited material) electrons contribute to the deposition. As these electrons can leave the substrate up to several microns away from the point of impact of the electron beam (depending on its energy), material deposition is not necessarily confined to the irradiated spot. To overcome this problem, compensation algorithms can be applied, which is typical for electron beam lithography. </p> <div class="mw-heading mw-heading2"><h2 id="Materials_and_precursors">Materials and precursors</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=4" title="Edit section: Materials and precursors"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>As of 2008 the range of materials deposited by EBID included Al, Au, amorphous carbon, diamond, Co, Cr, Cu, Fe, GaAs, GaN, Ge, Mo, Nb, Ni, Os, Pd, Pt, Rh, Ru, Re, Si, Si<sub>3</sub>N<sub>4</sub>, SiO<sub>x</sub>, TiO<sub>x</sub>, W,<sup id="cite_ref-r1_5-2" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> and was being expanded. The limiting factor is the availability of appropriate precursors, gaseous or having a low sublimation temperature. </p><p>The most popular precursors for deposition of elemental solids are <a href="/wiki/Metal_carbonyl" title="Metal carbonyl">metal carbonyls</a> of Me(CO)<sub>x</sub> structure or <a href="/wiki/Metallocenes" class="mw-redirect" title="Metallocenes">metallocenes</a>. They are easily available, however, due to incorporation of carbon atoms from the CO ligands, deposits often exhibit a low metal content.<sup id="cite_ref-r1_5-3" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-super_10-0" class="reference"><a href="#cite_note-super-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup> Metal-halogen complexes (<a href="/wiki/Tungsten(VI)_fluoride" class="mw-redirect" title="Tungsten(VI) fluoride">WF<sub>6</sub></a>, etc.) result in cleaner deposition, but are more difficult to handle as they are toxic and corrosive.<sup id="cite_ref-r1_5-4" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> Compound materials are deposited from specially crafted, exotic gases, e.g. D<sub>2</sub>GaN<sub>3</sub> for GaN.<sup id="cite_ref-r1_5-5" class="reference"><a href="#cite_note-r1-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Advantages">Advantages</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=5" title="Edit section: Advantages"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <ul><li>Very flexible regarding deposit shape and composition; the electron beam is lithographically controlled and a multitude of potential precursors is available</li> <li>Lateral size of the produced structures and accuracy of deposition are unprecedented</li> <li>The deposited material can be characterized using the electron microscopy techniques (<a href="/wiki/Transmission_electron_microscopy" title="Transmission electron microscopy">TEM</a>, <a href="/wiki/EELS" class="mw-redirect" title="EELS">EELS</a>, <a href="/wiki/Energy-dispersive_X-ray_spectroscopy" title="Energy-dispersive X-ray spectroscopy">EDS</a>, <a href="/wiki/Electron_diffraction" title="Electron diffraction">electron diffraction</a>) during or right after deposition. In situ electrical and optical characterization is also possible.</li></ul> <div class="mw-heading mw-heading2"><h2 id="Disadvantages">Disadvantages</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=6" title="Edit section: Disadvantages"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <ul><li>Serial material deposition and low deposition rates in general limit throughput and thus mass production</li> <li>Controlling the elemental or chemical deposit composition is still a major challenge, as the precursor decomposition pathways are mostly unknown</li> <li>Proximity effects can lead to unintended structure broadening</li></ul> <div class="mw-heading mw-heading2"><h2 id="Ion-beam-induced_deposition">Ion-beam-induced deposition</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=7" title="Edit section: Ion-beam-induced deposition"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Ion-beam-induced deposition (IBID) is very similar to EBID with the major difference that <a href="/wiki/Focused_ion_beam" title="Focused ion beam">focused ion beam</a>, usually 30 keV Ga<sup>+</sup>, is used instead of the electron beam. In both techniques, it is not the primary beam, but secondary electrons which cause the deposition. IBID has the following disadvantages as compared to EBID: </p> <ul><li>Angular spread of secondary electrons is larger in IBID thus resulting in lower spatial resolution.</li> <li>Ga<sup>+</sup> ions introduce additional contamination and radiation damage to the deposited structure, which is important for electronic applications.<sup id="cite_ref-super_10-1" class="reference"><a href="#cite_note-super-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup></li> <li>Deposition occurs in a <a href="/wiki/Focused_ion_beam" title="Focused ion beam">focused ion beam</a> (FIB) setup, which strongly limits characterization of the deposit during or right after the deposition. Only SEM-like imaging using secondary electrons is possible, and even that imaging is restricted to short observations due to sample damaging by the Ga<sup>+</sup> beam. The use of a dual beam instrument, that combines a FIB and an SEM in one, circumvents this limitation.</li></ul> <p>The advantages of IBID are: </p> <ul><li>Much higher deposition rate</li> <li>Higher purity</li></ul> <div class="mw-heading mw-heading2"><h2 id="Shapes">Shapes</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=8" title="Edit section: Shapes"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Nanostructures of virtually any 3-dimensional shape can be deposited using computer-controlled scanning of electron beam. Only the starting point has to be attached to the substrate, the rest of the structure can be free standing. The achieved shapes and devices are remarkable: </p> <ul><li>World smallest magnet<sup id="cite_ref-fr1_6-1" class="reference"><a href="#cite_note-fr1-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup></li> <li>Fractal nanotrees<sup id="cite_ref-fr1_6-2" class="reference"><a href="#cite_note-fr1-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup></li> <li>Nanoloops (potential nano<a href="/wiki/SQUID" title="SQUID">SQUID</a> device)<sup id="cite_ref-fr1_6-3" class="reference"><a href="#cite_note-fr1-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup></li> <li>Superconducting nanowires<sup id="cite_ref-super_10-2" class="reference"><a href="#cite_note-super-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup></li></ul> <ul class="gallery mw-gallery-packed"> <li class="gallerybox" style="width: 330.66666666667px"> <div class="thumb" style="width: 328.66666666667px;"><span typeof="mw:File"><a href="/wiki/File:IBID_human_growth.jpg" class="mw-file-description" title="Snapshots of growing a doll-like nanostructure by IBID"><img alt="Snapshots of growing a doll-like nanostructure by IBID" src="//upload.wikimedia.org/wikipedia/commons/thumb/4/4e/IBID_human_growth.jpg/493px-IBID_human_growth.jpg" decoding="async" width="329" height="120" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/4/4e/IBID_human_growth.jpg/740px-IBID_human_growth.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/4/4e/IBID_human_growth.jpg/986px-IBID_human_growth.jpg 2x" data-file-width="1500" data-file-height="548" /></a></span></div> <div class="gallerytext">Snapshots of growing a doll-like nanostructure by IBID</div> </li> <li class="gallerybox" style="width: 126px"> <div class="thumb" style="width: 124px;"><span typeof="mw:File"><a href="/wiki/File:IBID_bacteriophage.jpg" class="mw-file-description" title="A model of bacteriophage grown by IBID"><img alt="A model of bacteriophage grown by IBID" src="//upload.wikimedia.org/wikipedia/commons/thumb/d/d3/IBID_bacteriophage.jpg/186px-IBID_bacteriophage.jpg" decoding="async" width="124" height="120" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/d/d3/IBID_bacteriophage.jpg/279px-IBID_bacteriophage.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/d/d3/IBID_bacteriophage.jpg/372px-IBID_bacteriophage.jpg 2x" data-file-width="466" data-file-height="451" /></a></span></div> <div class="gallerytext">A model of <a href="/wiki/Bacteriophage" title="Bacteriophage">bacteriophage</a> grown by IBID</div> </li> <li class="gallerybox" style="width: 104px"> <div class="thumb" style="width: 102px;"><span typeof="mw:File"><a href="/wiki/File:IBID_tower.jpg" class="mw-file-description" title="A model of Leaning Tower of Pisa grown by IBID"><img alt="A model of Leaning Tower of Pisa grown by IBID" src="//upload.wikimedia.org/wikipedia/commons/thumb/6/6c/IBID_tower.jpg/153px-IBID_tower.jpg" decoding="async" width="102" height="120" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/6/6c/IBID_tower.jpg/230px-IBID_tower.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/6/6c/IBID_tower.jpg/307px-IBID_tower.jpg 2x" data-file-width="376" data-file-height="441" /></a></span></div> <div class="gallerytext">A model of <a href="/wiki/Leaning_Tower_of_Pisa" title="Leaning Tower of Pisa">Leaning Tower of Pisa</a> grown by IBID</div> </li> <li class="gallerybox" style="width: 108px"> <div class="thumb" style="width: 106px;"><span typeof="mw:File"><a href="/wiki/File:EBIDloop.JPG" class="mw-file-description" title="Letter Φ grown by EBID"><img alt="Letter Φ grown by EBID" src="//upload.wikimedia.org/wikipedia/commons/thumb/1/1d/EBIDloop.JPG/159px-EBIDloop.JPG" decoding="async" width="106" height="120" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/1/1d/EBIDloop.JPG/238px-EBIDloop.JPG 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/1/1d/EBIDloop.JPG/318px-EBIDloop.JPG 2x" data-file-width="690" data-file-height="782" /></a></span></div> <div class="gallerytext">Letter Φ grown by EBID</div> </li> </ul> <div class="mw-heading mw-heading2"><h2 id="See_also">See also</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=9" title="Edit section: See also"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1184024115">.mw-parser-output .div-col{margin-top:0.3em;column-width:30em}.mw-parser-output .div-col-small{font-size:90%}.mw-parser-output .div-col-rules{column-rule:1px solid #aaa}.mw-parser-output .div-col dl,.mw-parser-output .div-col ol,.mw-parser-output .div-col ul{margin-top:0}.mw-parser-output .div-col li,.mw-parser-output .div-col dd{page-break-inside:avoid;break-inside:avoid-column}</style><div class="div-col" style="column-width: 25em;"> <ul><li><a href="/wiki/Electron_microscopy" class="mw-redirect" title="Electron microscopy">Electron microscopy</a></li> <li><a href="/wiki/Focused_ion_beam" title="Focused ion beam">Focused ion beam</a></li> <li><a href="/wiki/Metal_carbonyl" title="Metal carbonyl">Metal carbonyl</a></li> <li><a href="/wiki/Metallocene" title="Metallocene">Metallocene</a></li> <li><a href="/wiki/Organometallic_chemistry" title="Organometallic chemistry">Organometallic chemistry</a></li> <li><a href="/wiki/Scanning_electron_microscope" title="Scanning electron microscope">Scanning electron microscope</a></li> <li><a href="/wiki/Scanning_transmission_electron_microscopy" title="Scanning transmission electron microscopy">Scanning transmission electron microscopy</a></li> <li><a href="/wiki/Transmission_electron_microscopy" title="Transmission electron microscopy">Transmission electron microscopy</a></li> <li>Researcher : <a href="/wiki/Lisa_McElwee-White" title="Lisa McElwee-White">Lisa McElwee-White</a></li></ul> </div> <div class="mw-heading mw-heading2"><h2 id="References">References</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=10" title="Edit section: References"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1239543626">.mw-parser-output .reflist{margin-bottom:0.5em;list-style-type:decimal}@media screen{.mw-parser-output .reflist{font-size:90%}}.mw-parser-output .reflist .references{font-size:100%;margin-bottom:0;list-style-type:inherit}.mw-parser-output .reflist-columns-2{column-width:30em}.mw-parser-output .reflist-columns-3{column-width:25em}.mw-parser-output .reflist-columns{margin-top:0.3em}.mw-parser-output .reflist-columns ol{margin-top:0}.mw-parser-output .reflist-columns li{page-break-inside:avoid;break-inside:avoid-column}.mw-parser-output .reflist-upper-alpha{list-style-type:upper-alpha}.mw-parser-output .reflist-upper-roman{list-style-type:upper-roman}.mw-parser-output .reflist-lower-alpha{list-style-type:lower-alpha}.mw-parser-output .reflist-lower-greek{list-style-type:lower-greek}.mw-parser-output .reflist-lower-roman{list-style-type:lower-roman}</style><div class="reflist"> <div class="mw-references-wrap"><ol class="references"> <li id="cite_note-1"><span class="mw-cite-backlink"><b><a href="#cite_ref-1">^</a></b></span> <span class="reference-text"><style data-mw-deduplicate="TemplateStyles:r1238218222">.mw-parser-output cite.citation{font-style:inherit;word-wrap:break-word}.mw-parser-output .citation q{quotes:"\"""\"""'""'"}.mw-parser-output .citation:target{background-color:rgba(0,127,255,0.133)}.mw-parser-output .id-lock-free.id-lock-free a{background:url("//upload.wikimedia.org/wikipedia/commons/6/65/Lock-green.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-limited.id-lock-limited a,.mw-parser-output .id-lock-registration.id-lock-registration a{background:url("//upload.wikimedia.org/wikipedia/commons/d/d6/Lock-gray-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-subscription.id-lock-subscription a{background:url("//upload.wikimedia.org/wikipedia/commons/a/aa/Lock-red-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .cs1-ws-icon a{background:url("//upload.wikimedia.org/wikipedia/commons/4/4c/Wikisource-logo.svg")right 0.1em center/12px no-repeat}body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-free a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-limited a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-registration a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-subscription a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .cs1-ws-icon a{background-size:contain;padding:0 1em 0 0}.mw-parser-output .cs1-code{color:inherit;background:inherit;border:none;padding:inherit}.mw-parser-output .cs1-hidden-error{display:none;color:var(--color-error,#d33)}.mw-parser-output .cs1-visible-error{color:var(--color-error,#d33)}.mw-parser-output .cs1-maint{display:none;color:#085;margin-left:0.3em}.mw-parser-output .cs1-kern-left{padding-left:0.2em}.mw-parser-output .cs1-kern-right{padding-right:0.2em}.mw-parser-output .citation .mw-selflink{font-weight:inherit}@media screen{.mw-parser-output .cs1-format{font-size:95%}html.skin-theme-clientpref-night .mw-parser-output .cs1-maint{color:#18911f}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .cs1-maint{color:#18911f}}</style><cite id="CITEREFCardenLuSpencerFairbrother2018" class="citation journal cs1">Carden, Will G.; Lu, Hang; Spencer, Julie A.; Fairbrother, D. Howard; McElwee-White, Lisa (2018-06-01). <a rel="nofollow" class="external text" href="https://doi.org/10.1557/mrc.2018.77">"Mechanism-based design of precursors for focused electron beam-induced deposition"</a>. <i>MRS Communications</i>. <b>8</b> (2): 343–357. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1557%2Fmrc.2018.77">10.1557/mrc.2018.77</a>. <a href="/wiki/ISSN_(identifier)" class="mw-redirect" title="ISSN (identifier)">ISSN</a> <a rel="nofollow" class="external text" href="https://search.worldcat.org/issn/2159-6867">2159-6867</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=MRS+Communications&rft.atitle=Mechanism-based+design+of+precursors+for+focused+electron+beam-induced+deposition&rft.volume=8&rft.issue=2&rft.pages=343-357&rft.date=2018-06-01&rft_id=info%3Adoi%2F10.1557%2Fmrc.2018.77&rft.issn=2159-6867&rft.aulast=Carden&rft.aufirst=Will+G.&rft.au=Lu%2C+Hang&rft.au=Spencer%2C+Julie+A.&rft.au=Fairbrother%2C+D.+Howard&rft.au=McElwee-White%2C+Lisa&rft_id=https%3A%2F%2Fdoi.org%2F10.1557%2Fmrc.2018.77&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-2"><span class="mw-cite-backlink"><b><a href="#cite_ref-2">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFMuraCognigniFerroniMorandi2023" class="citation journal cs1">Mura, Francesco; Cognigni, Flavio; Ferroni, Matteo; Morandi, Vittorio; Rossi, Marco (2023-08-24). <a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488958">"Advances in Focused Ion Beam Tomography for Three-Dimensional Characterization in Materials Science"</a>. <i>Materials</i>. <b>16</b> (17): 5808. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2023Mate...16.5808M">2023Mate...16.5808M</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<span class="id-lock-free" title="Freely accessible"><a rel="nofollow" class="external text" href="https://doi.org/10.3390%2Fma16175808">10.3390/ma16175808</a></span>. <a href="/wiki/ISSN_(identifier)" class="mw-redirect" title="ISSN (identifier)">ISSN</a> <a rel="nofollow" class="external text" href="https://search.worldcat.org/issn/1996-1944">1996-1944</a>. <a href="/wiki/PMC_(identifier)" class="mw-redirect" title="PMC (identifier)">PMC</a> <span class="id-lock-free" title="Freely accessible"><a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10488958">10488958</a></span>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a> <a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/37687502">37687502</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Materials&rft.atitle=Advances+in+Focused+Ion+Beam+Tomography+for+Three-Dimensional+Characterization+in+Materials+Science&rft.volume=16&rft.issue=17&rft.pages=5808&rft.date=2023-08-24&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC10488958%23id-name%3DPMC&rft_id=info%3Abibcode%2F2023Mate...16.5808M&rft_id=info%3Apmid%2F37687502&rft_id=info%3Adoi%2F10.3390%2Fma16175808&rft.issn=1996-1944&rft.aulast=Mura&rft.aufirst=Francesco&rft.au=Cognigni%2C+Flavio&rft.au=Ferroni%2C+Matteo&rft.au=Morandi%2C+Vittorio&rft.au=Rossi%2C+Marco&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC10488958&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-dia1-3"><span class="mw-cite-backlink">^ <a href="#cite_ref-dia1_3-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-dia1_3-1"><sup><i><b>b</b></i></sup></a></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFKiyohara,_ShujiTakamatsuMori2002" class="citation journal cs1">Kiyohara, Shuji; Takamatsu, Hideaki; Mori, Katsumi (2002). "Microfabrication of diamond films by localized electron beam chemical vapour deposition". <i>Semiconductor Science and Technology</i>. <b>17</b> (10): 1096. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2002SeScT..17.1096K">2002SeScT..17.1096K</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1088%2F0268-1242%2F17%2F10%2F311">10.1088/0268-1242/17/10/311</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Semiconductor+Science+and+Technology&rft.atitle=Microfabrication+of+diamond+films+by+localized+electron+beam+chemical+vapour+deposition&rft.volume=17&rft.issue=10&rft.pages=1096&rft.date=2002&rft_id=info%3Adoi%2F10.1088%2F0268-1242%2F17%2F10%2F311&rft_id=info%3Abibcode%2F2002SeScT..17.1096K&rft.au=Kiyohara%2C+Shuji&rft.au=Takamatsu%2C+Hideaki&rft.au=Mori%2C+Katsumi&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-dia2-4"><span class="mw-cite-backlink"><b><a href="#cite_ref-dia2_4-0">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFNayakBanerjee1995" class="citation journal cs1">Nayak, A.; Banerjee, H. D. (1995). "Electron beam activated plasma chemical vapour deposition of polycrystalline diamond films". <i>Physica Status Solidi A</i>. <b>151</b> (1): 107–112. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/1995PSSAR.151..107N">1995PSSAR.151..107N</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1002%2Fpssa.2211510112">10.1002/pssa.2211510112</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Physica+Status+Solidi+A&rft.atitle=Electron+beam+activated+plasma+chemical+vapour+deposition+of+polycrystalline+diamond+films&rft.volume=151&rft.issue=1&rft.pages=107-112&rft.date=1995&rft_id=info%3Adoi%2F10.1002%2Fpssa.2211510112&rft_id=info%3Abibcode%2F1995PSSAR.151..107N&rft.aulast=Nayak&rft.aufirst=A.&rft.au=Banerjee%2C+H.+D.&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-r1-5"><span class="mw-cite-backlink">^ <a href="#cite_ref-r1_5-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-r1_5-1"><sup><i><b>b</b></i></sup></a> <a href="#cite_ref-r1_5-2"><sup><i><b>c</b></i></sup></a> <a href="#cite_ref-r1_5-3"><sup><i><b>d</b></i></sup></a> <a href="#cite_ref-r1_5-4"><sup><i><b>e</b></i></sup></a> <a href="#cite_ref-r1_5-5"><sup><i><b>f</b></i></sup></a></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFRandolph,_S.FowlkesRack2006" class="citation journal cs1">Randolph, S.; Fowlkes, J.; Rack, P. (2006). "Focused, Nanoscale Electron-Beam-Induced Deposition and Etching". <i>Critical Reviews of Solid State and Materials Sciences</i>. <b>31</b> (3): 55. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2006CRSSM..31...55R">2006CRSSM..31...55R</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1080%2F10408430600930438">10.1080/10408430600930438</a>. <a href="/wiki/S2CID_(identifier)" class="mw-redirect" title="S2CID (identifier)">S2CID</a> <a rel="nofollow" class="external text" href="https://api.semanticscholar.org/CorpusID:93769658">93769658</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Critical+Reviews+of+Solid+State+and+Materials+Sciences&rft.atitle=Focused%2C+Nanoscale+Electron-Beam-Induced+Deposition+and+Etching&rft.volume=31&rft.issue=3&rft.pages=55&rft.date=2006&rft_id=https%3A%2F%2Fapi.semanticscholar.org%2FCorpusID%3A93769658%23id-name%3DS2CID&rft_id=info%3Adoi%2F10.1080%2F10408430600930438&rft_id=info%3Abibcode%2F2006CRSSM..31...55R&rft.au=Randolph%2C+S.&rft.au=Fowlkes%2C+J.&rft.au=Rack%2C+P.&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-fr1-6"><span class="mw-cite-backlink">^ <a href="#cite_ref-fr1_6-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-fr1_6-1"><sup><i><b>b</b></i></sup></a> <a href="#cite_ref-fr1_6-2"><sup><i><b>c</b></i></sup></a> <a href="#cite_ref-fr1_6-3"><sup><i><b>d</b></i></sup></a></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFK._Furuya2008" class="citation journal cs1">K. Furuya (2008). <a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099805">"Nanofabrication by advanced electron microscopy using intense and focused beam"</a>. <i>Sci. Technol. Adv. Mater</i>. <b>9</b> (1): 014110. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2008STAdM...9a4110F">2008STAdM...9a4110F</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1088%2F1468-6996%2F9%2F1%2F014110">10.1088/1468-6996/9/1/014110</a>. <a href="/wiki/PMC_(identifier)" class="mw-redirect" title="PMC (identifier)">PMC</a> <span class="id-lock-free" title="Freely accessible"><a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099805">5099805</a></span>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a> <a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/27877936">27877936</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Sci.+Technol.+Adv.+Mater.&rft.atitle=Nanofabrication+by+advanced+electron+microscopy+using+intense+and+focused+beam&rft.volume=9&rft.issue=1&rft.pages=014110&rft.date=2008&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC5099805%23id-name%3DPMC&rft_id=info%3Apmid%2F27877936&rft_id=info%3Adoi%2F10.1088%2F1468-6996%2F9%2F1%2F014110&rft_id=info%3Abibcode%2F2008STAdM...9a4110F&rft.au=K.+Furuya&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC5099805&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-7"><span class="mw-cite-backlink"><b><a href="#cite_ref-7">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFM._Song_and_K._Furuya2008" class="citation journal cs1">M. Song and K. Furuya (2008). <a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099707">"Fabrication and characterization of nanostructures on insulator substrates by electron-beam-induced deposition"</a>. <i>Sci. Technol. Adv. Mater</i>. <b>9</b> (2): 023002. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2008STAdM...9b3002S">2008STAdM...9b3002S</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1088%2F1468-6996%2F9%2F2%2F023002">10.1088/1468-6996/9/2/023002</a>. <a href="/wiki/PMC_(identifier)" class="mw-redirect" title="PMC (identifier)">PMC</a> <span class="id-lock-free" title="Freely accessible"><a rel="nofollow" class="external text" href="https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5099707">5099707</a></span>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a> <a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/27877950">27877950</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Sci.+Technol.+Adv.+Mater.&rft.atitle=Fabrication+and+characterization+of+nanostructures+on+insulator+substrates+by+electron-beam-induced+deposition&rft.volume=9&rft.issue=2&rft.pages=023002&rft.date=2008&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC5099707%23id-name%3DPMC&rft_id=info%3Apmid%2F27877950&rft_id=info%3Adoi%2F10.1088%2F1468-6996%2F9%2F2%2F023002&rft_id=info%3Abibcode%2F2008STAdM...9b3002S&rft.au=M.+Song+and+K.+Furuya&rft_id=https%3A%2F%2Fwww.ncbi.nlm.nih.gov%2Fpmc%2Farticles%2FPMC5099707&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-8"><span class="mw-cite-backlink"><b><a href="#cite_ref-8">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFErni,_RolfRossellKisielowskiDahmen2009" class="citation journal cs1">Erni, Rolf; Rossell, MD; Kisielowski, C; Dahmen, U (2009). <a rel="nofollow" class="external text" href="https://zenodo.org/record/1233809">"Atomic-Resolution Imaging with a Sub-50-pm Electron Probe"</a>. <i>Physical Review Letters</i>. <b>102</b> (9): 096101. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2009PhRvL.102i6101E">2009PhRvL.102i6101E</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1103%2FPhysRevLett.102.096101">10.1103/PhysRevLett.102.096101</a>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a> <a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/19392535">19392535</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Physical+Review+Letters&rft.atitle=Atomic-Resolution+Imaging+with+a+Sub-50-pm+Electron+Probe&rft.volume=102&rft.issue=9&rft.pages=096101&rft.date=2009&rft_id=info%3Apmid%2F19392535&rft_id=info%3Adoi%2F10.1103%2FPhysRevLett.102.096101&rft_id=info%3Abibcode%2F2009PhRvL.102i6101E&rft.au=Erni%2C+Rolf&rft.au=Rossell%2C+MD&rft.au=Kisielowski%2C+C&rft.au=Dahmen%2C+U&rft_id=https%3A%2F%2Fzenodo.org%2Frecord%2F1233809&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-small-9"><span class="mw-cite-backlink"><b><a href="#cite_ref-small_9-0">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFVan_Dorp,_Willem_F.2005" class="citation journal cs1">Van Dorp, Willem F. (2005). "Approaching the Resolution Limit of Nanometer-Scale Electron Beam-Induced Deposition". <i>Nano Letters</i>. <b>5</b> (7): 1303–7. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2005NanoL...5.1303V">2005NanoL...5.1303V</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1021%2Fnl050522i">10.1021/nl050522i</a>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a> <a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/16178228">16178228</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Nano+Letters&rft.atitle=Approaching+the+Resolution+Limit+of+Nanometer-Scale+Electron+Beam-Induced+Deposition&rft.volume=5&rft.issue=7&rft.pages=1303-7&rft.date=2005&rft_id=info%3Apmid%2F16178228&rft_id=info%3Adoi%2F10.1021%2Fnl050522i&rft_id=info%3Abibcode%2F2005NanoL...5.1303V&rft.au=Van+Dorp%2C+Willem+F.&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> <li id="cite_note-super-10"><span class="mw-cite-backlink">^ <a href="#cite_ref-super_10-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-super_10-1"><sup><i><b>b</b></i></sup></a> <a href="#cite_ref-super_10-2"><sup><i><b>c</b></i></sup></a></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFLuxmoore,_IRossCullisFry2007" class="citation journal cs1">Luxmoore, I; Ross, I; Cullis, A; Fry, P; Orr, J; Buckle, P; Jefferson, J (2007). "Low temperature electrical characterisation of tungsten nano-wires fabricated by electron and ion beam induced chemical vapour deposition". <i>Thin Solid Films</i>. <b>515</b> (17): 6791. <a href="/wiki/Bibcode_(identifier)" class="mw-redirect" title="Bibcode (identifier)">Bibcode</a>:<a rel="nofollow" class="external text" href="https://ui.adsabs.harvard.edu/abs/2007TSF...515.6791L">2007TSF...515.6791L</a>. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1016%2Fj.tsf.2007.02.029">10.1016/j.tsf.2007.02.029</a>.</cite><span title="ctx_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.jtitle=Thin+Solid+Films&rft.atitle=Low+temperature+electrical+characterisation+of+tungsten+nano-wires+fabricated+by+electron+and+ion+beam+induced+chemical+vapour+deposition&rft.volume=515&rft.issue=17&rft.pages=6791&rft.date=2007&rft_id=info%3Adoi%2F10.1016%2Fj.tsf.2007.02.029&rft_id=info%3Abibcode%2F2007TSF...515.6791L&rft.au=Luxmoore%2C+I&rft.au=Ross%2C+I&rft.au=Cullis%2C+A&rft.au=Fry%2C+P&rft.au=Orr%2C+J&rft.au=Buckle%2C+P&rft.au=Jefferson%2C+J&rfr_id=info%3Asid%2Fen.wikipedia.org%3AElectron+beam-induced+deposition" class="Z3988"></span></span> </li> </ol></div></div> <div class="mw-heading mw-heading2"><h2 id="External_links">External links</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Electron_beam-induced_deposition&action=edit&section=11" title="Edit section: External links"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1235681985">.mw-parser-output .side-box{margin:4px 0;box-sizing:border-box;border:1px solid #aaa;font-size:88%;line-height:1.25em;background-color:var(--background-color-interactive-subtle,#f8f9fa);display:flow-root}.mw-parser-output .side-box-abovebelow,.mw-parser-output .side-box-text{padding:0.25em 0.9em}.mw-parser-output .side-box-image{padding:2px 0 2px 0.9em;text-align:center}.mw-parser-output .side-box-imageright{padding:2px 0.9em 2px 0;text-align:center}@media(min-width:500px){.mw-parser-output .side-box-flex{display:flex;align-items:center}.mw-parser-output .side-box-text{flex:1;min-width:0}}@media(min-width:720px){.mw-parser-output .side-box{width:238px}.mw-parser-output .side-box-right{clear:right;float:right;margin-left:1em}.mw-parser-output .side-box-left{margin-right:1em}}</style><style data-mw-deduplicate="TemplateStyles:r1237033735">@media print{body.ns-0 .mw-parser-output .sistersitebox{display:none!important}}@media screen{html.skin-theme-clientpref-night .mw-parser-output .sistersitebox img[src*="Wiktionary-logo-en-v2.svg"]{background-color:white}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .sistersitebox img[src*="Wiktionary-logo-en-v2.svg"]{background-color:white}}</style><div class="side-box side-box-right plainlinks sistersitebox"><style data-mw-deduplicate="TemplateStyles:r1126788409">.mw-parser-output .plainlist ol,.mw-parser-output .plainlist ul{line-height:inherit;list-style:none;margin:0;padding:0}.mw-parser-output .plainlist ol li,.mw-parser-output .plainlist ul li{margin-bottom:0}</style> <div class="side-box-flex"> <div class="side-box-image"><span class="noviewer" typeof="mw:File"><span><img alt="" src="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/30px-Commons-logo.svg.png" decoding="async" width="30" height="40" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/45px-Commons-logo.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/59px-Commons-logo.svg.png 2x" data-file-width="1024" data-file-height="1376" /></span></span></div> <div class="side-box-text plainlist">Wikimedia Commons has media related to <span style="font-weight: bold; font-style: italic;"><a href="https://commons.wikimedia.org/wiki/Category:Electron_beam-induced_deposition" class="extiw" title="commons:Category:Electron beam-induced deposition">Electron beam-induced deposition</a></span>.</div></div> </div> <link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1235681985"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1237033735"><div class="side-box side-box-right plainlinks sistersitebox"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1126788409"> <div class="side-box-flex"> <div class="side-box-image"><span class="noviewer" typeof="mw:File"><span><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/d/df/Wikibooks-logo-en-noslogan.svg/40px-Wikibooks-logo-en-noslogan.svg.png" decoding="async" width="40" height="40" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/d/df/Wikibooks-logo-en-noslogan.svg/60px-Wikibooks-logo-en-noslogan.svg.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/d/df/Wikibooks-logo-en-noslogan.svg/80px-Wikibooks-logo-en-noslogan.svg.png 2x" data-file-width="400" data-file-height="400" /></span></span></div> <div class="side-box-text plainlist">The Wikibook <i><a href="https://en.wikibooks.org/wiki/Nanotechnology" class="extiw" title="wikibooks:Nanotechnology">Nanotechnology</a></i> has a page on the topic of: <i><b><a href="https://en.wikibooks.org/wiki/Nanotechnology/EBID" class="extiw" title="wikibooks:Nanotechnology/EBID">Electron Beam Induced Deposition</a></b></i></div></div> </div> <ul><li>"Nanofabrication: Fundamentals and Applications" Ed.: Ampere A. Tseng, World Scientific Publishing Company (March 4, 2008), <link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><a href="/wiki/ISBN_(identifier)" class="mw-redirect" title="ISBN (identifier)">ISBN</a> <a href="/wiki/Special:BookSources/981-270-076-5" title="Special:BookSources/981-270-076-5">981-270-076-5</a>, <link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><a href="/wiki/ISBN_(identifier)" class="mw-redirect" title="ISBN (identifier)">ISBN</a> <a href="/wiki/Special:BookSources/978-981-270-076-6" title="Special:BookSources/978-981-270-076-6">978-981-270-076-6</a></li> <li><a rel="nofollow" class="external text" href="https://web.archive.org/web/20110719034333/http://kristian.molhave.dk/thesis/phd/MolhavePhDThesisVer6.pdf">K. Molhave: "Tools for in-situ manipulations and characterization of nanostructures", PhD thesis, Technical University of Denmark, 2004</a></li></ul> <div class="navbox-styles"><style data-mw-deduplicate="TemplateStyles:r1129693374">.mw-parser-output .hlist dl,.mw-parser-output .hlist ol,.mw-parser-output .hlist ul{margin:0;padding:0}.mw-parser-output .hlist dd,.mw-parser-output .hlist dt,.mw-parser-output .hlist li{margin:0;display:inline}.mw-parser-output .hlist.inline,.mw-parser-output .hlist.inline dl,.mw-parser-output .hlist.inline ol,.mw-parser-output .hlist.inline ul,.mw-parser-output .hlist dl dl,.mw-parser-output .hlist dl ol,.mw-parser-output .hlist dl ul,.mw-parser-output .hlist ol dl,.mw-parser-output .hlist ol ol,.mw-parser-output .hlist ol ul,.mw-parser-output .hlist ul dl,.mw-parser-output .hlist ul ol,.mw-parser-output .hlist ul ul{display:inline}.mw-parser-output .hlist .mw-empty-li{display:none}.mw-parser-output .hlist dt::after{content:": "}.mw-parser-output .hlist dd::after,.mw-parser-output .hlist li::after{content:" · ";font-weight:bold}.mw-parser-output .hlist dd:last-child::after,.mw-parser-output .hlist dt:last-child::after,.mw-parser-output .hlist li:last-child::after{content:none}.mw-parser-output .hlist dd dd:first-child::before,.mw-parser-output .hlist dd dt:first-child::before,.mw-parser-output .hlist dd li:first-child::before,.mw-parser-output .hlist dt dd:first-child::before,.mw-parser-output .hlist dt dt:first-child::before,.mw-parser-output .hlist dt li:first-child::before,.mw-parser-output .hlist li dd:first-child::before,.mw-parser-output .hlist li dt:first-child::before,.mw-parser-output .hlist li li:first-child::before{content:" (";font-weight:normal}.mw-parser-output .hlist dd dd:last-child::after,.mw-parser-output .hlist dd dt:last-child::after,.mw-parser-output .hlist dd li:last-child::after,.mw-parser-output .hlist dt dd:last-child::after,.mw-parser-output .hlist dt dt:last-child::after,.mw-parser-output .hlist dt li:last-child::after,.mw-parser-output .hlist li dd:last-child::after,.mw-parser-output .hlist li dt:last-child::after,.mw-parser-output .hlist li li:last-child::after{content:")";font-weight:normal}.mw-parser-output .hlist ol{counter-reset:listitem}.mw-parser-output .hlist ol>li{counter-increment:listitem}.mw-parser-output .hlist ol>li::before{content:" "counter(listitem)"\a0 "}.mw-parser-output .hlist dd ol>li:first-child::before,.mw-parser-output .hlist dt ol>li:first-child::before,.mw-parser-output .hlist li ol>li:first-child::before{content:" ("counter(listitem)"\a0 "}</style><style data-mw-deduplicate="TemplateStyles:r1236075235">.mw-parser-output .navbox{box-sizing:border-box;border:1px solid #a2a9b1;width:100%;clear:both;font-size:88%;text-align:center;padding:1px;margin:1em auto 0}.mw-parser-output .navbox .navbox{margin-top:0}.mw-parser-output .navbox+.navbox,.mw-parser-output .navbox+.navbox-styles+.navbox{margin-top:-1px}.mw-parser-output .navbox-inner,.mw-parser-output .navbox-subgroup{width:100%}.mw-parser-output .navbox-group,.mw-parser-output .navbox-title,.mw-parser-output .navbox-abovebelow{padding:0.25em 1em;line-height:1.5em;text-align:center}.mw-parser-output .navbox-group{white-space:nowrap;text-align:right}.mw-parser-output .navbox,.mw-parser-output .navbox-subgroup{background-color:#fdfdfd}.mw-parser-output .navbox-list{line-height:1.5em;border-color:#fdfdfd}.mw-parser-output .navbox-list-with-group{text-align:left;border-left-width:2px;border-left-style:solid}.mw-parser-output tr+tr>.navbox-abovebelow,.mw-parser-output tr+tr>.navbox-group,.mw-parser-output tr+tr>.navbox-image,.mw-parser-output tr+tr>.navbox-list{border-top:2px solid #fdfdfd}.mw-parser-output .navbox-title{background-color:#ccf}.mw-parser-output .navbox-abovebelow,.mw-parser-output .navbox-group,.mw-parser-output .navbox-subgroup .navbox-title{background-color:#ddf}.mw-parser-output .navbox-subgroup .navbox-group,.mw-parser-output .navbox-subgroup .navbox-abovebelow{background-color:#e6e6ff}.mw-parser-output .navbox-even{background-color:#f7f7f7}.mw-parser-output .navbox-odd{background-color:transparent}.mw-parser-output .navbox .hlist td dl,.mw-parser-output .navbox .hlist td ol,.mw-parser-output .navbox .hlist td ul,.mw-parser-output .navbox td.hlist dl,.mw-parser-output .navbox td.hlist ol,.mw-parser-output .navbox td.hlist ul{padding:0.125em 0}.mw-parser-output .navbox .navbar{display:block;font-size:100%}.mw-parser-output .navbox-title .navbar{float:left;text-align:left;margin-right:0.5em}body.skin--responsive .mw-parser-output .navbox-image img{max-width:none!important}@media print{body.ns-0 .mw-parser-output .navbox{display:none!important}}</style></div><div role="navigation" class="navbox" aria-labelledby="Electron_microscopy" style="padding:3px"><table class="nowraplinks hlist mw-collapsible autocollapse navbox-inner" style="border-spacing:0;background:transparent;color:inherit"><tbody><tr><th scope="col" class="navbox-title" colspan="2"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1129693374"><style data-mw-deduplicate="TemplateStyles:r1239400231">.mw-parser-output .navbar{display:inline;font-size:88%;font-weight:normal}.mw-parser-output .navbar-collapse{float:left;text-align:left}.mw-parser-output .navbar-boxtext{word-spacing:0}.mw-parser-output .navbar ul{display:inline-block;white-space:nowrap;line-height:inherit}.mw-parser-output .navbar-brackets::before{margin-right:-0.125em;content:"[ "}.mw-parser-output .navbar-brackets::after{margin-left:-0.125em;content:" ]"}.mw-parser-output .navbar li{word-spacing:-0.125em}.mw-parser-output .navbar a>span,.mw-parser-output .navbar a>abbr{text-decoration:inherit}.mw-parser-output .navbar-mini abbr{font-variant:small-caps;border-bottom:none;text-decoration:none;cursor:inherit}.mw-parser-output .navbar-ct-full{font-size:114%;margin:0 7em}.mw-parser-output .navbar-ct-mini{font-size:114%;margin:0 4em}html.skin-theme-clientpref-night .mw-parser-output .navbar li a abbr{color:var(--color-base)!important}@media(prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .navbar li a abbr{color:var(--color-base)!important}}@media print{.mw-parser-output .navbar{display:none!important}}</style><div class="navbar plainlinks hlist navbar-mini"><ul><li class="nv-view"><a href="/wiki/Template:Electron_microscopy" title="Template:Electron microscopy"><abbr title="View this template">v</abbr></a></li><li class="nv-talk"><a href="/wiki/Template_talk:Electron_microscopy" title="Template talk:Electron microscopy"><abbr title="Discuss this template">t</abbr></a></li><li class="nv-edit"><a href="/wiki/Special:EditPage/Template:Electron_microscopy" title="Special:EditPage/Template:Electron microscopy"><abbr title="Edit this template">e</abbr></a></li></ul></div><div id="Electron_microscopy" style="font-size:114%;margin:0 4em"><a href="/wiki/Electron_microscopy" class="mw-redirect" title="Electron microscopy">Electron microscopy</a></div></th></tr><tr><th scope="row" class="navbox-group" style="width:1%">Basics</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Electron_microscopy" class="mw-redirect" title="Electron microscopy">Electron microscopy</a></li> <li><a href="/wiki/History_of_electron_microscopy" class="mw-redirect" title="History of electron microscopy">History</a></li> <li><a href="/wiki/Micrograph" title="Micrograph">Micrograph</a></li> <li><a href="/wiki/Microscope" title="Microscope">Microscope</a></li> <li><a href="/wiki/Timeline_of_microscope_technology" title="Timeline of microscope technology">Timeline of microscope technology</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%"><a href="/wiki/Electron" title="Electron">Electron</a> interaction<br />with matter</th><td class="navbox-list-with-group navbox-list navbox-even" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Auger_effect" title="Auger effect">Auger effect</a></li> <li><a href="/wiki/Bremsstrahlung" title="Bremsstrahlung">Bremsstrahlung</a></li> <li><a href="/wiki/Electron_diffraction" title="Electron diffraction">Electron diffraction</a></li> <li><a href="/wiki/Electron_scattering" title="Electron scattering">Electron scattering</a></li> <li><a href="/wiki/Kikuchi_lines_(physics)" title="Kikuchi lines (physics)">Kikuchi lines</a></li> <li><a href="/wiki/Secondary_electrons" title="Secondary electrons">Secondary electrons</a></li> <li><a href="/wiki/X-ray_fluorescence" title="X-ray fluorescence">X-ray fluorescence</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Instrumentation</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Detectors_for_transmission_electron_microscopy" title="Detectors for transmission electron microscopy">Detectors for transmission electron microscopy</a></li> <li><a href="/wiki/Electron_gun" title="Electron gun">Electron gun</a></li> <li><a href="/wiki/Everhart%E2%80%93Thornley_detector" title="Everhart–Thornley detector">Everhart–Thornley detector</a></li> <li><a href="/wiki/Field_electron_emission" title="Field electron emission">Field electron emission</a></li> <li><a href="/wiki/Field_emission_gun" title="Field emission gun">Field emission gun</a></li> <li><a href="/wiki/Magnetic_lens" title="Magnetic lens">Magnetic lens</a></li> <li><a href="/wiki/Stigmator" title="Stigmator">Stigmator</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Microscopes</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"></div><table class="nowraplinks navbox-subgroup" style="border-spacing:0"><tbody><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;"><a href="/wiki/Electron_microprobe" title="Electron microprobe">EM</a></th><td class="navbox-list-with-group navbox-list navbox-even" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Correlative_light-electron_microscopy" title="Correlative light-electron microscopy">Correlative light EM</a></li> <li><a href="/wiki/Cryogenic_electron_microscopy" title="Cryogenic electron microscopy">Cryo-EM</a></li> <li><a href="/wiki/Electron_microprobe" title="Electron microprobe">EMP</a></li> <li><a href="/wiki/Liquid-Phase_Electron_Microscopy" title="Liquid-Phase Electron Microscopy">Liquid-Phase EM</a></li> <li><a href="/wiki/Low-energy_electron_microscopy" title="Low-energy electron microscopy">Low-energy EM</a></li> <li><a href="/wiki/Photoemission_electron_microscopy" title="Photoemission electron microscopy">Photoemission EM</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;"><a href="/wiki/Scanning_electron_microscope" title="Scanning electron microscope">SEM</a></th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Environmental_scanning_electron_microscope" title="Environmental scanning electron microscope">Environmental SEM</a></li> <li><a href="/wiki/Scanning_electron_cryomicroscopy" title="Scanning electron cryomicroscopy">CryoSEM</a></li> <li><a href="/wiki/Scanning_confocal_electron_microscopy" title="Scanning confocal electron microscopy">Confocal SEM</a></li> <li><a href="/wiki/SEM-XRF" title="SEM-XRF">SEM-XRF</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;"><a href="/wiki/Transmission_electron_microscopy" title="Transmission electron microscopy">TEM</a></th><td class="navbox-list-with-group navbox-list navbox-even" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Transmission_electron_cryomicroscopy" title="Transmission electron cryomicroscopy">Cryo-TEM</a> <ul><li><a href="/wiki/Electron_cryotomography" class="mw-redirect" title="Electron cryotomography">Cryo-ET</a></li></ul></li> <li><a href="/wiki/Energy_filtered_transmission_electron_microscopy" title="Energy filtered transmission electron microscopy">EFTEM</a></li> <li><a href="/wiki/High-resolution_transmission_electron_microscopy" title="High-resolution transmission electron microscopy">HRTEM</a></li> <li><a href="/wiki/Scanning_transmission_electron_microscopy" title="Scanning transmission electron microscopy">STEM</a> <ul><li><a href="/wiki/4D_scanning_transmission_electron_microscopy" title="4D scanning transmission electron microscopy">4D STEM</a></li></ul></li> <li><a href="/wiki/Aberration-Corrected_Transmission_Electron_Microscopy" title="Aberration-Corrected Transmission Electron Microscopy">Aberration-Corrected TEM</a></li></ul> </div></td></tr></tbody></table><div></div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Techniques</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/4D_scanning_transmission_electron_microscopy" title="4D scanning transmission electron microscopy">4D STEM</a></li> <li><a href="/wiki/Annular_dark-field_imaging" title="Annular dark-field imaging">Annular dark-field imaging</a></li> <li><a href="/wiki/Cathodoluminescence" title="Cathodoluminescence">Cathodoluminescence</a></li> <li><a href="/wiki/Charge_contrast_imaging" title="Charge contrast imaging">Charge contrast imaging</a></li> <li><a href="/wiki/Convergent_beam_electron_diffraction" title="Convergent beam electron diffraction">CBED</a></li> <li><a href="/wiki/Cryogenic_electron_microscopy" title="Cryogenic electron microscopy">cryoEM</a></li> <li><a href="/wiki/Dark-field_microscopy" title="Dark-field microscopy">Dark-field microscopy</a></li> <li><a href="/wiki/Energy-dispersive_X-ray_spectroscopy" title="Energy-dispersive X-ray spectroscopy">EDS</a></li> <li><a href="/wiki/Electron_backscatter_diffraction" title="Electron backscatter diffraction">EBSD</a> <ul><li><a href="/wiki/Transmission_Kikuchi_diffraction" title="Transmission Kikuchi diffraction">TKD</a></li></ul></li> <li><a href="/wiki/Electron_channelling_contrast_imaging" title="Electron channelling contrast imaging">ECCI</a></li> <li><a href="/wiki/Electron_energy_loss_spectroscopy" title="Electron energy loss spectroscopy">EELS</a></li> <li><a href="/wiki/Electron_beam-induced_current" title="Electron beam-induced current">EBIC</a></li> <li><a href="/wiki/Electron_holography" title="Electron holography">Electron holography</a></li> <li><a href="/wiki/Electron_tomography" title="Electron tomography">Electron tomography</a></li> <li><a href="/wiki/Focused_ion_beam" title="Focused ion beam">FIB</a></li> <li><a href="/wiki/Fluctuation_electron_microscopy" title="Fluctuation electron microscopy">FEM</a></li> <li><a href="/wiki/Immune_electron_microscopy" title="Immune electron microscopy">Immune electron microscopy</a></li> <li><a href="/wiki/Geometric_phase_analysis" title="Geometric phase analysis">Geometric phase analysis</a></li> <li><a href="/wiki/Photon-Induced_Near-field_Electron_Microscopy" title="Photon-Induced Near-field Electron Microscopy">PINEM</a></li> <li><a href="/wiki/Precession_electron_diffraction" title="Precession electron diffraction">Precession electron diffraction</a></li> <li><a href="/wiki/Serial_block-face_scanning_electron_microscopy" title="Serial block-face scanning electron microscopy">Serial block-face scanning electron microscopy</a></li> <li><a href="/wiki/Wavelength-dispersive_X-ray_spectroscopy" title="Wavelength-dispersive X-ray spectroscopy">WDXS</a></li> <li><a href="/wiki/Weak-beam_dark-field_microscopy" title="Weak-beam dark-field microscopy">WBDF</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Others</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"></div><table class="nowraplinks navbox-subgroup" style="border-spacing:0"><tbody><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;">Developers</th><td class="navbox-list-with-group navbox-list navbox-even" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Albert_Crewe" title="Albert Crewe">Albert Crewe</a></li> <li><a href="/wiki/Bodo_von_Borries" title="Bodo von Borries">Bodo von Borries</a></li> <li><a href="/wiki/Dennis_Gabor" title="Dennis Gabor">Dennis Gabor</a></li> <li><a href="/wiki/Ernst_G._Bauer" title="Ernst G. Bauer">Ernst G. Bauer</a></li> <li><a href="/wiki/Ernst_Ruska" title="Ernst Ruska">Ernst Ruska</a></li> <li><a href="/wiki/Gerasimos_Danilatos" title="Gerasimos Danilatos">Gerasimos Danilatos</a></li> <li><a href="/wiki/Harald_Rose" title="Harald Rose">Harald Rose</a></li> <li><a href="/wiki/James_Hillier" title="James Hillier">James Hillier</a></li> <li><a href="/wiki/Manfred_von_Ardenne" title="Manfred von Ardenne">Manfred von Ardenne</a></li> <li><a href="/wiki/Max_Knoll" title="Max Knoll">Max Knoll</a></li> <li><a href="/wiki/Maximilian_Haider" title="Maximilian Haider">Maximilian Haider</a></li> <li><a href="/wiki/Nestor_J._Zaluzec" title="Nestor J. Zaluzec">Nestor J. Zaluzec</a></li> <li><a href="/wiki/Ondrej_Krivanek" title="Ondrej Krivanek">Ondrej Krivanek</a></li> <li><a href="/wiki/Thomas_Eugene_Everhart" title="Thomas Eugene Everhart">Thomas Eugene Everhart</a></li> <li><a href="/wiki/Vernon_Ellis_Cosslett" title="Vernon Ellis Cosslett">Vernon Ellis Cosslett</a></li> <li><a href="/wiki/Vladimir_K._Zworykin" title="Vladimir K. Zworykin">Vladimir K. Zworykin</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;">Manufacturers</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Carl_Zeiss_AG" title="Carl Zeiss AG">Carl Zeiss AG</a></li> <li><a href="/wiki/FEI_Company" title="FEI Company">FEI Company</a></li> <li><a href="/wiki/Hitachi" title="Hitachi">Hitachi High-Technologies</a></li> <li><a href="/wiki/JEOL" title="JEOL">JEOL</a></li> <li><a href="/wiki/Leica_Microsystems" title="Leica Microsystems">Leica</a></li> <li><a href="/wiki/Nion_Company" class="mw-redirect" title="Nion Company">Nion Company</a></li> <li><a href="/wiki/TESCAN" title="TESCAN">TESCAN</a></li> <li><a href="/wiki/Thermo_Fisher_Scientific" title="Thermo Fisher Scientific">Thermo Fisher Scientific</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%;font-weight:normal;">Software</th><td class="navbox-list-with-group navbox-list navbox-even" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a rel="nofollow" class="external text" href="https://www.gegi.usherbrooke.ca/casino/index.html">CASINO</a></li> <li><a href="/wiki/CrysTBox" title="CrysTBox">CrysTBox</a></li> <li><a href="/wiki/EM_Data_Bank" title="EM Data Bank">EM Data Bank</a></li> <li><a rel="nofollow" class="external text" href="https://github.com/EMsoft-org/EMsoft">EMsoft</a></li> <li><a rel="nofollow" class="external text" href="https://www.gatan.com/products/tem-analysis/gatan-microscopy-suite-software">Digital Micrograph</a></li> <li><a href="/wiki/Direct_methods_(electron_microscopy)" title="Direct methods (electron microscopy)">Direct methods</a></li> <li><a rel="nofollow" class="external text" href="https://www.iucr.org/resources/commissions/electron-crystallography/software">IUCr</a></li> <li><a href="/wiki/MTEX" title="MTEX">MTEX</a></li> <li><a href="/wiki/Multislice" title="Multislice">Multislice</a></li></ul> </div></td></tr></tbody></table><div></div></td></tr><tr><td class="navbox-abovebelow hlist" colspan="2"><div> <ul><li><span class="noviewer" typeof="mw:File"><span title="Category"><img alt="" src="//upload.wikimedia.org/wikipedia/en/thumb/9/96/Symbol_category_class.svg/16px-Symbol_category_class.svg.png" decoding="async" width="16" height="16" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/9/96/Symbol_category_class.svg/23px-Symbol_category_class.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/9/96/Symbol_category_class.svg/31px-Symbol_category_class.svg.png 2x" data-file-width="180" data-file-height="185" /></span></span> <b><a href="/wiki/Category:Electron_microscopy" title="Category:Electron microscopy">Category</a></b></li> <li><span class="noviewer" typeof="mw:File"><span title="Commons page"><img alt="" src="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/12px-Commons-logo.svg.png" decoding="async" width="12" height="16" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/18px-Commons-logo.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/24px-Commons-logo.svg.png 2x" data-file-width="1024" data-file-height="1376" /></span></span> <b><a href="https://commons.wikimedia.org/wiki/Category:Electron_microscopy" class="extiw" title="commons:Category:Electron microscopy">Commons</a></b></li></ul> </div></td></tr></tbody></table></div>    </div><noscript><img src="https://login.wikimedia.org/wiki/Special:CentralAutoLogin/start?type=1x1" alt="" width="1" height="1" style="border: none; position: absolute;"></noscript> <div class="printfooter" data-nosnippet="">Retrieved from "<a dir="ltr" href="https://en.wikipedia.org/w/index.php?title=Electron_beam-induced_deposition&oldid=1189266430">https://en.wikipedia.org/w/index.php?title=Electron_beam-induced_deposition&oldid=1189266430</a>"</div></div> <div id="catlinks" class="catlinks" data-mw="interface"><div id="mw-normal-catlinks" class="mw-normal-catlinks"><a href="/wiki/Help:Category" title="Help:Category">Categories</a>: <ul><li><a href="/wiki/Category:Electron_beam" title="Category:Electron beam">Electron beam</a></li><li><a href="/wiki/Category:Electron_microscopy" title="Category:Electron microscopy">Electron microscopy</a></li><li><a href="/wiki/Category:Nanotechnology" title="Category:Nanotechnology">Nanotechnology</a></li></ul></div><div id="mw-hidden-catlinks" class="mw-hidden-catlinks mw-hidden-cats-hidden">Hidden category: <ul><li><a href="/wiki/Category:Commons_category_link_is_on_Wikidata" title="Category:Commons category link is on Wikidata">Commons category link is on Wikidata</a></li></ul></div></div> </div> </main> </div> <div class="mw-footer-container"> <footer id="footer" class="mw-footer" > <ul id="footer-info"> <li id="footer-info-lastmod"> This page was last edited on 10 December 2023, at 20:16<span class="anonymous-show"> (UTC)</span>.</li> <li id="footer-info-copyright">Text is available under the <a href="/wiki/Wikipedia:Text_of_the_Creative_Commons_Attribution-ShareAlike_4.0_International_License" title="Wikipedia:Text of the Creative Commons Attribution-ShareAlike 4.0 International License">Creative Commons Attribution-ShareAlike 4.0 License</a>; additional terms may apply. By using this site, you agree to the <a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Terms_of_Use" class="extiw" title="foundation:Special:MyLanguage/Policy:Terms of Use">Terms of Use</a> and <a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Privacy_policy" class="extiw" title="foundation:Special:MyLanguage/Policy:Privacy policy">Privacy Policy</a>. Wikipedia® is a registered trademark of the <a rel="nofollow" class="external text" href="https://wikimediafoundation.org/">Wikimedia Foundation, Inc.</a>, a non-profit organization.</li> </ul> <ul id="footer-places"> <li id="footer-places-privacy"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Privacy_policy">Privacy policy</a></li> <li id="footer-places-about"><a href="/wiki/Wikipedia:About">About Wikipedia</a></li> <li id="footer-places-disclaimers"><a href="/wiki/Wikipedia:General_disclaimer">Disclaimers</a></li> <li id="footer-places-contact"><a href="//en.wikipedia.org/wiki/Wikipedia:Contact_us">Contact Wikipedia</a></li> <li id="footer-places-wm-codeofconduct"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Universal_Code_of_Conduct">Code of Conduct</a></li> <li id="footer-places-developers"><a href="https://developer.wikimedia.org">Developers</a></li> <li id="footer-places-statslink"><a href="https://stats.wikimedia.org/#/en.wikipedia.org">Statistics</a></li> <li id="footer-places-cookiestatement"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Cookie_statement">Cookie statement</a></li> <li id="footer-places-mobileview"><a href="//en.m.wikipedia.org/w/index.php?title=Electron_beam-induced_deposition&mobileaction=toggle_view_mobile" class="noprint stopMobileRedirectToggle">Mobile view</a></li> </ul> <ul id="footer-icons" class="noprint"> <li id="footer-copyrightico"><a href="https://wikimediafoundation.org/" class="cdx-button cdx-button--fake-button cdx-button--size-large cdx-button--fake-button--enabled"><img src="/static/images/footer/wikimedia-button.svg" width="84" height="29" alt="Wikimedia Foundation" loading="lazy"></a></li> <li id="footer-poweredbyico"><a href="https://www.mediawiki.org/" class="cdx-button cdx-button--fake-button cdx-button--size-large cdx-button--fake-button--enabled"><img src="/w/resources/assets/poweredby_mediawiki.svg" alt="Powered by MediaWiki" width="88" height="31" loading="lazy"></a></li> </ul> </footer> </div> </div> </div> <div class="vector-settings" id="p-dock-bottom"> <ul></ul> </div><script>(RLQ=window.RLQ||[]).push(function(){mw.config.set({"wgHostname":"mw-web.codfw.main-f69cdc8f6-5cxzh","wgBackendResponseTime":166,"wgPageParseReport":{"limitreport":{"cputime":"0.342","walltime":"0.450","ppvisitednodes":{"value":1669,"limit":1000000},"postexpandincludesize":{"value":64241,"limit":2097152},"templateargumentsize":{"value":1370,"limit":2097152},"expansiondepth":{"value":14,"limit":100},"expensivefunctioncount":{"value":1,"limit":500},"unstrip-depth":{"value":1,"limit":20},"unstrip-size":{"value":63701,"limit":5000000},"entityaccesscount":{"value":0,"limit":400},"timingprofile":["100.00% 359.134 1 -total"," 38.70% 138.996 1 Template:Reflist"," 33.63% 120.768 10 Template:Cite_journal"," 33.35% 119.760 3 Template:Navbox"," 32.67% 117.323 1 Template:Electron_microscopy"," 14.05% 50.473 2 Template:Sister_project"," 13.80% 49.557 1 Template:Commons_category"," 13.45% 48.319 2 Template:Side_box"," 6.98% 25.059 1 Template:Div_col"," 5.64% 20.267 2 Template:ISBN"]},"scribunto":{"limitreport-timeusage":{"value":"0.219","limit":"10.000"},"limitreport-memusage":{"value":4261539,"limit":52428800}},"cachereport":{"origin":"mw-web.eqiad.main-7c479b968-ch94z","timestamp":"20241116202955","ttl":2592000,"transientcontent":false}}});});</script> <script type="application/ld+json">{"@context":"https:\/\/schema.org","@type":"Article","name":"Electron beam-induced deposition","url":"https:\/\/en.wikipedia.org\/wiki\/Electron_beam-induced_deposition","sameAs":"http:\/\/www.wikidata.org\/entity\/Q5358152","mainEntity":"http:\/\/www.wikidata.org\/entity\/Q5358152","author":{"@type":"Organization","name":"Contributors to Wikimedia projects"},"publisher":{"@type":"Organization","name":"Wikimedia Foundation, Inc.","logo":{"@type":"ImageObject","url":"https:\/\/www.wikimedia.org\/static\/images\/wmf-hor-googpub.png"}},"datePublished":"2007-02-23T18:37:46Z","dateModified":"2023-12-10T20:16:59Z","headline":"process of decomposing gaseous molecules by an electron beam"}</script> </body> </html>