Method and Experiment of Fabricating and Cutting the Burr for Y Shape Nanochannel

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Fabricating and Cutting the Burr for Y Shape Nanochannel </title> <meta name="description" content="Method and Experiment of Fabricating and Cutting the Burr for Y Shape Nanochannel "> <meta name="keywords" content="atomic force microscopy (AFM), nanochannel, specific down force energy (SDFE), Y shape, burr, silicon"> <meta name="viewport" content="width=device-width, initial-scale=1, minimum-scale=1, maximum-scale=1, user-scalable=no"> <meta charset="utf-8"> <link href="https://cdn.waset.org/favicon.ico" type="image/x-icon" rel="shortcut icon"> <link href="https://cdn.waset.org/static/plugins/bootstrap-4.2.1/css/bootstrap.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/plugins/fontawesome/css/all.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/css/site.css?v=150220211555" rel="stylesheet"> </head> <body> <header> <div class="container"> <nav class="navbar navbar-expand-lg navbar-light"> <a class="navbar-brand" href="https://waset.org"> <img 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publication-listing mt-3 mb-3"> <h5 class="card-header" style="font-size:.9rem">Method and Experiment of Fabricating and Cutting the Burr for Y Shape Nanochannel </h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Zone-Ching%20Lin">Zone-Ching Lin</a>, <a href="https://publications.waset.org/abstracts/search?q=Hao-Yuan%20Jheng"> Hao-Yuan Jheng</a>, <a href="https://publications.waset.org/abstracts/search?q=Shih-Hung%20Ma"> Shih-Hung Ma</a> </p> <p class="card-text"><strong>Abstract:</strong></p> The present paper proposes using atomic force microscopy (AFM) and the concept of specific down force energy (SDFE) to establish a method for fabricating and cutting the burr for Y shape nanochannel on silicon (Si) substrate. For fabricating Y shape nanochannel, it first makes the experimental cutting path planning for fabricating Y shape nanochannel until the fifth cutting layer. Using the constant down force by AFM and SDFE theory and following the experimental cutting path planning, the cutting depth and width of each pass of Y shape nanochannel can be predicted by simulation. The paper plans the path for cutting the burr at the edge of Y shape nanochannel. Then, it carries out cutting the burr along the Y nanochannel edge by using a smaller down force. The height of standing burr at the edge is required to be below the set value of 0.54 nm. The results of simulation and experiment of fabricating and cutting the burr for Y shape nanochannel is further compared. <iframe src="https://publications.waset.org/abstracts/50887.pdf" style="width:100%; height:400px;" frameborder="0"></iframe> <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=atomic%20force%20microscopy%20%28AFM%29" title="atomic force microscopy (AFM)">atomic force microscopy (AFM)</a>, <a href="https://publications.waset.org/abstracts/search?q=nanochannel" title=" nanochannel"> nanochannel</a>, <a href="https://publications.waset.org/abstracts/search?q=specific%20down%20force%20energy%20%28SDFE%29" title=" specific down force energy (SDFE)"> specific down force energy (SDFE)</a>, <a href="https://publications.waset.org/abstracts/search?q=Y%20shape" title=" Y shape"> Y shape</a>, <a href="https://publications.waset.org/abstracts/search?q=burr" title=" burr"> burr</a>, <a href="https://publications.waset.org/abstracts/search?q=silicon" title=" silicon"> silicon</a> </p> <a href="https://publications.waset.org/abstracts/50887/method-and-experiment-of-fabricating-and-cutting-the-burr-for-y-shape-nanochannel" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/50887.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">407</span> </span> </div> </div> </div> </main> <footer> <div id="infolinks" class="pt-3 pb-2"> <div class="container"> <div style="background-color:#f5f5f5;" class="p-3"> <div class="row"> <div class="col-md-2"> <ul class="list-unstyled"> About <li><a href="https://waset.org/page/support">About Us</a></li> <li><a href="https://waset.org/page/support#legal-information">Legal</a></li> <li><a target="_blank" rel="nofollow" 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Method and Experiment of Fabricating and Cutting the Burr for Y Shape Nanochannel