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Search results for: P. Campistron

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Campistron</title> <meta name="description" content="Search results for: P. Campistron"> <meta name="keywords" content="P. Campistron"> <meta name="viewport" content="width=device-width, initial-scale=1, minimum-scale=1, maximum-scale=1, user-scalable=no"> <meta charset="utf-8"> <link href="https://cdn.waset.org/favicon.ico" type="image/x-icon" rel="shortcut icon"> <link href="https://cdn.waset.org/static/plugins/bootstrap-4.2.1/css/bootstrap.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/plugins/fontawesome/css/all.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/css/site.css?v=150220211555" rel="stylesheet"> </head> <body> <header> <div class="container"> <nav class="navbar navbar-expand-lg navbar-light"> <a class="navbar-brand" href="https://waset.org"> <img src="https://cdn.waset.org/static/images/wasetc.png" alt="Open Science Research Excellence" title="Open Science Research Excellence" /> </a> <button class="d-block d-lg-none navbar-toggler ml-auto" type="button" data-toggle="collapse" data-target="#navbarMenu" aria-controls="navbarMenu" aria-expanded="false" aria-label="Toggle navigation"> <span class="navbar-toggler-icon"></span> </button> <div class="w-100"> <div class="d-none d-lg-flex flex-row-reverse"> <form method="get" action="https://waset.org/search" class="form-inline my-2 my-lg-0"> <input class="form-control mr-sm-2" type="search" placeholder="Search Conferences" value="P. 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Campistron"> <input type="submit" class="btn_search" value="Search"> </div> </div> </form> </div> </div> <div class="row mt-3"> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Commenced</strong> in January 2007</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Frequency:</strong> Monthly</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Edition:</strong> International</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Paper Count:</strong> 2</div> </div> </div> </div> <h1 class="mt-3 mb-3 text-center" style="font-size:1.6rem;">Search results for: P. Campistron</h1> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">2</span> Monitoring Saltwater Corrosion on Steel Samples Using Coda Wave Interferometry in MHZ Frequencies</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Maxime%20Farin">Maxime Farin</a>, <a href="https://publications.waset.org/abstracts/search?q=Emmanuel%20Moulin"> Emmanuel Moulin</a>, <a href="https://publications.waset.org/abstracts/search?q=Lynda%20Chehami"> Lynda Chehami</a>, <a href="https://publications.waset.org/abstracts/search?q=Farouk%20Benmeddour"> Farouk Benmeddour</a>, <a href="https://publications.waset.org/abstracts/search?q=Pierre%20Campistron"> Pierre Campistron</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Assessing corrosion is crucial in the petrochemical and marine industry. Usual ultrasonic methods based on guided waves to detect corrosion can inspect large areas but lack precision. We propose a complementary and sensitive ultrasonic method (~ 10 MHz) based on coda wave interferometry to detect and quantify corrosion at the surface of a steel sample. The method relies on a single piezoelectric transducer, exciting the sample and measuring the scattered coda signals at different instants in time. A laboratory experiment is conducted with a steel sample immersed in salted water for 60~h with parallel coda and temperature measurements to correct coda dependence to temperature variations. Micrometric changes to the sample surface caused by corrosion are detected in the late coda signals, allowing precise corrosion detection. Moreover, a good correlation is found between a parameter quantifying the temperature-corrected stretching of the coda over time with respect to a reference without corrosion and the corrosion surface over the sample recorded with a camera. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=coda%20wave%20interferometry" title="coda wave interferometry">coda wave interferometry</a>, <a href="https://publications.waset.org/abstracts/search?q=nondestructive%20evaluation" title=" nondestructive evaluation"> nondestructive evaluation</a>, <a href="https://publications.waset.org/abstracts/search?q=corrosion" title=" corrosion"> corrosion</a>, <a href="https://publications.waset.org/abstracts/search?q=ultrasonics" title=" ultrasonics"> ultrasonics</a> </p> <a href="https://publications.waset.org/abstracts/140822/monitoring-saltwater-corrosion-on-steel-samples-using-coda-wave-interferometry-in-mhz-frequencies" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/140822.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">234</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">1</span> Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=C.%20Virgilio">C. Virgilio</a>, <a href="https://publications.waset.org/abstracts/search?q=J.%20Carlier"> J. Carlier</a>, <a href="https://publications.waset.org/abstracts/search?q=P.%20Campistron"> P. Campistron</a>, <a href="https://publications.waset.org/abstracts/search?q=M.%20Toubal"> M. Toubal</a>, <a href="https://publications.waset.org/abstracts/search?q=P.%20Garnier"> P. Garnier</a>, <a href="https://publications.waset.org/abstracts/search?q=L.%20Broussous"> L. Broussous</a>, <a href="https://publications.waset.org/abstracts/search?q=V.%20Thomy"> V. Thomy</a>, <a href="https://publications.waset.org/abstracts/search?q=B.%20Nongaillard"> B. Nongaillard</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=wetting" title="wetting">wetting</a>, <a href="https://publications.waset.org/abstracts/search?q=acoustic%20reflectometry" title=" acoustic reflectometry"> acoustic reflectometry</a>, <a href="https://publications.waset.org/abstracts/search?q=gigahertz" title=" gigahertz"> gigahertz</a>, <a href="https://publications.waset.org/abstracts/search?q=semiconductor" title=" semiconductor"> semiconductor</a> </p> <a href="https://publications.waset.org/abstracts/39734/wetting-characterization-of-high-aspect-ratio-nanostructures-by-gigahertz-acoustic-reflectometry" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/39734.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">327</span> </span> </div> </div> </div> </main> <footer> <div id="infolinks" class="pt-3 pb-2"> <div class="container"> <div style="background-color:#f5f5f5;" class="p-3"> <div class="row"> <div class="col-md-2"> <ul class="list-unstyled"> About <li><a href="https://waset.org/page/support">About Us</a></li> <li><a href="https://waset.org/page/support#legal-information">Legal</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/WASET-16th-foundational-anniversary.pdf">WASET celebrates its 16th foundational anniversary</a></li> </ul> </div> <div class="col-md-2"> <ul class="list-unstyled"> Account <li><a href="https://waset.org/profile">My Account</a></li> </ul> </div> <div class="col-md-2"> <ul class="list-unstyled"> Explore <li><a href="https://waset.org/disciplines">Disciplines</a></li> <li><a href="https://waset.org/conferences">Conferences</a></li> <li><a href="https://waset.org/conference-programs">Conference Program</a></li> <li><a href="https://waset.org/committees">Committees</a></li> <li><a href="https://publications.waset.org">Publications</a></li> </ul> </div> <div class="col-md-2"> <ul class="list-unstyled"> Research <li><a href="https://publications.waset.org/abstracts">Abstracts</a></li> <li><a href="https://publications.waset.org">Periodicals</a></li> <li><a href="https://publications.waset.org/archive">Archive</a></li> </ul> </div> <div class="col-md-2"> <ul class="list-unstyled"> Open Science <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/Open-Science-Philosophy.pdf">Open Science Philosophy</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/Open-Science-Award.pdf">Open Science Award</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/Open-Society-Open-Science-and-Open-Innovation.pdf">Open Innovation</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/Postdoctoral-Fellowship-Award.pdf">Postdoctoral Fellowship Award</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/Scholarly-Research-Review.pdf">Scholarly Research Review</a></li> </ul> </div> <div class="col-md-2"> <ul class="list-unstyled"> Support <li><a href="https://waset.org/page/support">Support</a></li> <li><a href="https://waset.org/profile/messages/create">Contact Us</a></li> <li><a href="https://waset.org/profile/messages/create">Report Abuse</a></li> </ul> </div> </div> </div> </div> </div> <div class="container text-center"> <hr style="margin-top:0;margin-bottom:.3rem;"> <a href="https://creativecommons.org/licenses/by/4.0/" target="_blank" class="text-muted small">Creative Commons Attribution 4.0 International License</a> <div id="copy" class="mt-2">&copy; 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