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ATP – CEMES
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.elementor-post__excerpt {background: #f5b044!important;} .elementor-post__card:hover .elementor-post__title a {color: #da6034!important;} /*FIN*/ /*CSS bloc accueil agenda EN*/ .elementor-post__card:hover {border-color: #f5b044!important; } .post-18792:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18792:hover .elementor-post__title a {color: #da6034!important;} .post-18787:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18787:hover .elementor-post__title a {color: #da6034!important;} .post-18842:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18842:hover .elementor-post__title a {color: #da6034!important;} .post-18782:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18782:hover .elementor-post__title a {color: #da6034!important;} .post-18358:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18358:hover .elementor-post__title a {color: #da6034!important;} .post-18214:hover .elementor-post__excerpt {background: #f5b044!important;} .post-18214:hover .elementor-post__title a {color: #da6034!important;} /*FIN*/ input, input[type="text"], input[type="email"], input[type="number"], textarea, select { margin-top: 20px; color: var(--text-color-dark);} .name_directory_name_box{border:solid 2px #DA6034;padding:10px; margin: 2px 1px;} .name_directory_column{padding:0px;} .name_directory_total{margin-bottom:30px;} /**/ .wb_ps_text:after {display: none!important;} /**/ .elementor-widget-nav-menu .elementor-nav-menu--dropdown .elementor-sub-item { font-family: "roboto"!important;} /*Rustine Fermeture des toggle*/ .elementor-tab-title.elementor-active a, .elementor-tab-title.elementor-active .elementor-toggle-icon{ pointer-events: none !important; } /*FIN - Rustine de qualité*/ #cookie-notice .cn-button:not(.cn-button-custom) {margin: 10px 0 0 10px;} .single_content_lower{display:none;} .blog_single_details_outer .single_content_upper{border-bottom:none;} 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rotate(270deg)!important; } .menu-item-8924:hover .menu-item-11919 a.highlighted .sub-arrow{ transform: rotate(90deg)!important; } /* La recherche plateformes */ .menu-item-11902 .sub-arrow{ transform: rotate(90deg)!important; } .menu-item-11902:hover .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-11902 .highlighted .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-11902:hover a.highlighted .sub-arrow{ transform: rotate(90deg)!important; } .menu-item-8924:hover .menu-item-11902 .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-8924:hover .menu-item-11902 a.highlighted .sub-arrow{ transform: rotate(90deg)!important; } /* Les moyens plateformes */ .menu-item-11903 .sub-arrow{ transform: rotate(90deg)!important; } .menu-item-11903:hover .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-11903 .highlighted .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-11903:hover a.highlighted .sub-arrow{ transform: rotate(90deg)!important; } .menu-item-7880:hover .menu-item-11903 .sub-arrow{ transform: rotate(270deg)!important; } .menu-item-7880:hover .menu-item-11903 a.highlighted .sub-arrow{ transform: rotate(90deg)!important; } .menu-item-11903 a{ z-index: 10; } /* Agenda accueil */ #blog_to_agenda .news_box{ transition: transform 0.5s; } #blog_to_agenda .news_box:hover{ transform: translateY(-10px); } #blog_to_agenda .grid_box._card{ width: auto; } #blog_to_agenda .news_box{ width: 349px; } #blog_to_agenda .link__go, #blog_to_agenda .auhtour_box, #blog_to_agenda .date{ display: none!important; } #blog_to_agenda .content_box{ padding: 0px!important; } #blog_to_agenda .source{ display: flex; padding: 0px!important; margin-bottom: 0px!important; border-bottom: none; flex-direction: row-reverse; justify-content: flex-end; } #blog_to_agenda .short_desc{ font-size: 25px; padding: 20px!important; display: block; overflow: hidden; margin-bottom: 0px!important; text-align: left; background: #DA6034; justify-content: center; color: white; text-transform: uppercase; display: flex; align-items: center; width: 35%; min-width: 120px; font-family: "Helvetica", Sans-serif; min-height: 143px; } #blog_to_agenda .news_box{ border-radius: 0px; } #blog_to_agenda .title{ display: flex; align-items: center; padding: 20px; width: 100%; border: 2px solid #da6034; margin: 0px!important; } #blog_to_agenda .title a{ text-transform: uppercase; font-size: 0.44em!important; line-height: 1.5em!important; font-family: "Helvetica", Sans-serif; display: block; font-weight: 400!important; margin-bottom: 0px!important; } #blog_to_agenda .title a:hover{ color: #282F3B; } /* Deuxième date */ #blog_to_agenda .grid_box._card:nth-child(2) .title{ border-color: #F5B044; } #blog_to_agenda .grid_box._card:nth-child(2) .short_desc{ background-color: #F5B044; } /* Troisième date */ #blog_to_agenda .grid_box._card:nth-child(3) .title{ border-color: #77021D; } #blog_to_agenda .grid_box._card:nth-child(3) .short_desc{ background-color: #77021D; } /* Quatrième date */ #blog_to_agenda .grid_box._card:nth-child(4) .title{ border-color: #F5B044; } #blog_to_agenda .grid_box._card:nth-child(4) .short_desc{ background-color: #F5B044; } /* Cinquième date */ #blog_to_agenda .grid_box._card:nth-child(5) .title{ border-color: #77021D; } #blog_to_agenda .grid_box._card:nth-child(5) .short_desc{ background-color: #77021D; } /* Faits marquants home */ #faits_marquants .wb_ps_single_item:hover { transform: scale(1)!important; } #faits_marquants .wb_ps_title{ text-align: left; } #faits_marquants .wb_ps_text{ margin-bottom: 25px; } #faits_marquants .wb_ps_text p{ max-height: 6em; min-height: 6em; color: #ffffff!important; overflow: hidden; line-height: 1.5em; margin-bottom: 0px; text-align: left; } #faits_marquants .wb_ps_text:after{ content: "..."; text-align: left; display: block; } #faits_marquants .wb_ps_title h2{ font-size: 20px; border-bottom: 2px solid #ffffff!important; padding-bottom: 20px!important; overflow: hidden; } #faits_marquants .wb_ps_title h2 a{ border-bottom: none!important; } #faits_marquants .wb_ps_thumbnail img{ object-fit: cover; width: auto; height: 100%; } #faits_marquants .wb_ps_thumbnail a{ height: 100%; } #faits_marquants .wb_ps_content{ padding: 40px; background: #77021D; min-height: 418px; } #faits_marquants .wb_ps_readmore_link{ padding: 0.5em 0.5em 0.5em 0.5em; font-size: 15px; text-align: center; width: auto; font-size: 16px; padding: 12px 24px; line-height: 1; font-family: "Helvetica", Sans-serif; } #faits_marquants .wb_ps_readmore{ text-align: left; } #faits_marquants .wb_ps_single_item{ display: flex; } #faits_marquants .wb_ps_thumbnail{ min-width: 50%; background: #F2F2F2; } #faits_marquants .wbel-arrow.slick-arrow i.fa{ font-size: 2em!important; } #faits_marquants .wbel-arrow{ z-index: 1; } /* Responsive */ @media screen and (max-width: 767px) { #faits_marquants .wb_ps_single_item{ display: block; } #faits_marquants .wb_ps_thumbnail{ min-width: 100%; } #faits_marquants .wb_ps_text p{ max-height: 5em; min-height: 5em; } #faits_marquants .wb_ps_title h2{ font-size: 18px; } #faits_marquants .wb_ps_content{ padding: 20px; min-height: auto; } } /* Subscribe button Seminaires */ .tribe-events-c-subscribe-dropdown__container{ display: none!important; } /* Testimonial etudiant */ #temoignage_etudiant .elementor-element.elementor-element-dbce840 .elementor-testimonial__content{ max-height: 15em; overflow: auto; } /* LE CEMES EN IMAGES */ .page-id-10032 .elementor-slideshow__title, .page-id-14346 .elementor-slideshow__title{ display: none; } .page-id-10032 .gallery .attachment-woocommerce_thumbnail:hover, .page-id-14346 .gallery .attachment-woocommerce_thumbnail:hover{ transform: none; } .page-id-10032 .content h3 a, .page-id-14346 .content h3 a{ font-size: 16px!important; font-family: 'Helvetica', Sans-Serif; opacity: 0; color: white!important; height: 100%; font-weight: 100!important; } .page-id-10032 .content, .page-id-14346 .content{ height: 100%!important; } .page-id-10032 .content h3, .page-id-14346 .content h3{ height: 100%; } .page-id-10032 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12, .page-id-14346 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12{ padding-left: 0px; padding-right: 5px; } @media screen and (max-width: 1024px) { .page-id-10032 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12, .page-id-14346 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12{ padding-bottom: 5px; } .page-id-10032 div[data-widget_type="creote-mega-menu-image-grid-v1.default"], .page-id-14346 div[data-widget_type="creote-mega-menu-image-grid-v1.default"]{ margin-bottom: 0px!important; } } @media screen and (min-width: 767px) and (max-width: 1024px) { .page-id-10032 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12, .page-id-14346 .image_grid_content .row div.col-lg-3.col-md-4.col-sm-6.col-xs-12{ width: 25%!important; } } .page-id-10032 .mg_image_box:hover, .page-id-14346 .mg_image_box:hover{ -webkit-transform: translateY(0px); transform: translateY(0px); } .page-id-10032 .image_grid_content .row, .page-id-14346 .image_grid_content .row{ --bs-gutter-x: 0rem!important; } .page-id-10032 .image_box, .page-id-14346 .image_box{ background-color: #DA6034; } .page-id-10032 .mg_image_box:hover .image_box img, .page-id-14346 .mg_image_box:hover .image_box img{ opacity: 0 } .page-id-10032 .mg_image_box:hover .content h3 a, .page-id-14346 .mg_image_box:hover .content h3 a{ opacity: 1 } .page-id-10032 .image_grid_content .mg_image_box, .page-id-14346 .image_grid_content .mg_image_box{ margin-bottom: 0px; } .page-id-10032 div[data-widget_type="creote-mega-menu-image-grid-v1.default"], .page-id-14346 div[data-widget_type="creote-mega-menu-image-grid-v1.default"]{ margin-bottom: 5px; } /* FIN LE CEMES EN IMAGES */ /* DÉBUT : Membres (pages groupes et plateforme) */ #membres .wbel_post_slider_wrapper .wb_ps_thumbnail img{ border-radius: 100%; width: 100px; box-shadow: none; } #membres .wbel_post_slider_wrapper .wb_ps_thumbnail{ padding-top: 3em; } #membres .wbel_post_slider_wrapper .wb_ps_text p{ overflow: hidden; text-align: center; max-height: 5em; min-height: 5em; } #membres .wbel_post_slider_wrapper .wb_ps_title h2{ border-bottom: 1px solid #DA6034!important; } #membres .wbel_post_slider_wrapper .wb_ps_title h2 a{ color: #DA6034; font-size: 16px; padding-bottom: 15px; display: inline-block; } #membres .wbel_post_slider_wrapper .wb_ps_readmore a{ color: #DA6034; font-size: 14px; background: none; border: none; } #membres .wbel_post_slider_wrapper .wb_ps_readmore a:hover{ color: #ffffff; background: #DA6034; } #membres .wbel-arrow{ background: none; border: none; font-size: 2em; z-index: 1; } #membres .wbel_post_slider_wrapper .wb_ps_single_item{ box-shadow: none!important; } #membres .wbel_post_slider_wrapper .wb_ps_content{ padding: 20px; height: 275px; } /* FIN : Membres */ /* DEBUT : Toggle */ .elementor-toggle .elementor-tab-title{ border-bottom: 1px solid #DA6034!important; padding: 30px!important; } .elementor-toggle .elementor-toggle-item:first-child{ border-top: 1px solid #DA6034!important; } /* FIN : Toggle */ /* Adaptation slider index */ div[data-elementor-id="6699"]{ height: 210px; } /* Stage marge texte */ .sans_marge_p .elementor-widget-container p{ margin: 0.5em 0 0.5em 0; } /* saut position FR/EN menu header */ .page-id-6098 .elementor-element-9567087 p{ margin: 0; } /* Modification des toggles */ .elementor-toggle .elementor-tab-title{ display: flex; flex-direction: row-reverse; justify-content: flex-end; align-items: center; } .elementor-toggle .elementor-tab-title span{ font-size: 25px; padding-left: 5px; font-weight: 100!important; } .elementor-toggle .elementor-tab-title a{ font-family: "Helvetica"; font-weight: 600!important; } /* Si tu trouves pas le CSS regarde dans le CSS perso de l'élément avec elementor */ /* Panier woocommerce */ .mini_cart_togglers.fixed_cart{ display: none; } /* Article blog affichage */ .news_box.style_seven .image_box .date{ display: none; } .news_box.style_seven{ border-radius: 0px; } .news_box.style_seven .content_box ul{ display: none; } .news_box.style_seven .content_box h2.title a{ padding-bottom: 1em; border-bottom: 2px solid #DA6034!important; color: #DA6034; overflow: hidden; } .news_box.style_seven .content_box p{ max-height: 7em; min-height: 7em; color: #4a4e56!important; } .news_box.style_seven .icon-right-arrow-long:before{ display: none; } .news_box.style_seven .content_box a.read_more{ border: 1px solid #DA6034; width: 50%; padding: 0.5em 0.5em 0.5em 0.5em; text-align: center; } .news_box.style_seven .content_box a.read_more:hover{ border: 1px solid #DA6034; background-color: #DA6034; color: white; } .news_box.style_seven .content_box{ background-color: #ffffff; } /* Article séminaire mise en forme */ .news_box.style_five .comments{ display: none; } .news_box.style_five h2 a{ color: #DA6034; } .news_box.style_five .icon-right-arrow-long:before{ display: none; } .news_box.style_five a.link__go{ border: 2px solid #DA6034; width: 15%; text-align: center; padding: 0.5em 0 0.5em 0; } .news_box.style_five a.link__go:hover{ border: 2px solid white; } /* Logo header */ .elementor-6699 .elementor-element.elementor-element-0e8f6d9 .header_logo_box_solo img, .elementor-14689 .elementor-element.elementor-element-60d4ea5 .header_logo_box_solo img{ width: 80px; } .elementor-element-d9a2353 img{ width: 80px; } .tribe-event-date-start{ font-size: 16px; } /* Apparition second header */ .header-2 { opacity: 0; visibility: hidden; -moz-transition: opacity 1s ease-out!important; -webkit-transition: opacity 1s ease-out!important; transition: opacity 1s ease-out!important; } .elementor-sticky--effects.header-2 { opacity: 1!important; z-index: 100!important; visibility: visible; } /* Sidebar menu */ #elementor-popup-modal-6988 .dialog-widget-content, #elementor-popup-modal-14514 .dialog-widget-content{ width: 250px; right: 0px; } /* submenu pousse les autres éléments et fonctionnement au clic */ .elementor-nav-menu--main .elementor-nav-menu ul{ position: static!important; } /* Image header marge pour menu superpose */ .superposition-menu{ margin-top: -230px!important; } /* Police site */ strong, p, span, button, input, a, .news_box.style_seven .content_box a.read_more, .news_box.default_style.list_view .content_box a.link__go, .news_box.default_style.list_view .content_box a.link__go, .wp-block-search__inside-wrapper .wp-block-search__button, #cat, .team_box.style_one .team_box_outer:hover .about_member .authour_details span, .theme-btn, .tribe-common .tribe-common-c-btn-border-small, .tribe-common .tribe-common-c-btn-border-small, .tribe-common .tribe-common-c-btn, .tribe-common .tribe-common-c-btn, .tribe-common .tribe-common-c-btn-border-small, .news_box.default_style.list_view .content_box .source a.link__go, time{ font-family: "Helvetica", Sans-serif; } h1, h2, h3, h4, h5, h6, .news_box.style_seven .content_box h2 a, .news_box.default_style.list_view .content_box a.link__go, .tribe-common .tribe-common-anchor-thin, .tribe-common .tribe-common-c-btn-border-small, h2 a{ font-family: "roboto"; } /* Menu burger */ .elementor-icon i:before { border: solid 1px white!important; padding: 3px 5px 3px 5px!important; } /* Agenda accueil modification */ #agenda_home .tribe-common--breakpoint-medium.tribe-common .tribe-common-b3--min-medium, #agenda_home .tribe-common--breakpoint-medium.tribe-common .tribe-common-h6, #agenda_home .tribe-common--breakpoint-medium.tribe-common .tribe-common-b2--min-medium{ display: none; } #agenda_home .tribe-events-widget-events-list__events{ display: flex; justify-content: center; } #agenda_home .tribe-common-g-row.tribe-events-widget-events-list__event-row{ border: 1px solid #DA6034; display: flex; flex-direction: column; max-height: 6em; min-height: 6em; margin-left: 3em; margin-right: 3em; } #agenda_home .tribe-events-widget-events-list__event-date-tag.tribe-common-g-col{ background-color: #DA6034; width: 100%; } #agenda_home .tribe-events-widget-events-list__event-date-tag.tribe-common-g-col span{ color: white; } #agenda_home .tribe-events-widget-events-list__event-title.tribe-common-h7 a{ padding: 0.5em; font-size: 0.8em; } #agenda_home .tribe-common .tribe-common-anchor-thin:hover, #agenda_home .tribe-common .tribe-common-anchor-thin{ border: 0px!important; } .tribe-events-page-template div[data-elementor-id="6699"], body.single-post div[data-elementor-id="6699"]{ background-image: url(/wp-content/uploads/2022/11/Header-home-cemes.png); background-position: center; background-size: cover; background-repeat: no-repeat; } /* Agenda seminaire */ .tribe-event-date-end{ font-size: 16px;} .tribe-events-widget-events-list__event-datetime-wrapper{ padding-top: 10px!important; } #seminaire_home .elementor-widget-container .tribe-compatibility-container .tribe-common .tribe-events-widget-events-list .tribe-events-widget-events-list__events .tribe-events-widget-events-list__event-row{ border-left: 3px solid #DA6034!important; padding-left: 1em; margin-bottom: 1em; } #seminaire_home2 .tribe-events-widget-events-list__event-date-tag.tribe-common-g-col{ display: none; } #seminaire_home2 .tribe-events-widget-events-list__header{ display: none; } #seminaire_home2 .tribe-events-widget-events-list__event-header{ display: flex; flex-direction: column-reverse; } #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(1) .tribe-events-widget-events-list__event-title.tribe-common-h7 a, #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(3) .tribe-events-widget-events-list__event-title.tribe-common-h7 a, #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(5) .tribe-events-widget-events-list__event-title.tribe-common-h7 a{ color: #77021D; } #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(2) .tribe-events-widget-events-list__event-title.tribe-common-h7 a, #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(4) .tribe-events-widget-events-list__event-title.tribe-common-h7 a{ color: #DA6034; } #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(1), #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(3), #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(5){ padding-top: 2em; padding-bottom: 2em; border-top: 2px solid #77021D!important; } #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(2), #seminaire_home2 .tribe-common-g-row.tribe-events-widget-events-list__event-row:nth-child(4){ padding-top: 2em; padding-bottom: 2em; border-top: 2px solid #DA6034!important; } #seminaire_home2 .tribe-events-widget-events-list__view-more.tribe-common-b1.tribe-common-b2--min-medium{ text-align: center; } #seminaire_home2 .tribe-events-widget-events-list__view-more.tribe-common-b1.tribe-common-b2--min-medium a{ color: #77021D; } #seminaire_home2 .tribe-events-widget-events-list__view-more.tribe-common-b1.tribe-common-b2--min-medium:hover a{ color: #DA6034; } /* Bouton séminaire */ #seminaire_home .tribe-events-widget .tribe-events-widget-events-list__view-more-link{ color: white; background-color: #DA6034; padding: 0.8em; } #seminaire_home .tribe-events-widget .tribe-events-widget-events-list__view-more-link:hover{ color: #DA6034; background-color: white; padding: 0.8em; border: 1px solid #DA6034; } #seminaire_home .tribe-common--breakpoint-medium.tribe-common .tribe-common-h6{ display: none; } #seminaire_home .tribe-common a{ font-family: "Helvetica"; } .news_box.style_seven .image_box::before{ display: none; } /* Page article */ .related_post.blog_slider{ display: none; } .widget-area.all_side_bar{ display: none; } .share_socail{ display: none; } .sec_comments.padding-t-8.padding-b-3{ display: none; } .post-template-default #primary{ margin-left: auto; margin-right: auto; } .post-template-default #primary .blog_single_details_outer::before{ display: none; } /* Fin apge article */ /*Page Le CEMES en image :*/ /*Animation zoom au survol sur chaque photo*/ .gallery .attachment-woocommerce_thumbnail { transition: transform .5s; } .gallery .attachment-woocommerce_thumbnail:hover { transform: scale(1.05); } /*FIN animation zoom au survol sur chaque photo*/ /*Animation Cartes Membres*/ .wb_ps_single_item{ transition: transform .2s; } .wb_ps_single_item:hover{ transform: scale(1.05); } /*Fin Animation Cartes Membres*/ /* Header responsive menu burger en trop */ @media (max-width: 1200px){ .header .navbar_togglers.hamburger_menu { display: none!important; } } /* FIN Header responsive menu burger en trop */ </style> </head> <body class="page-template page-template-elementor_header_footer page page-id-8086 theme-creote cookies-not-set woocommerce-no-js tribe-no-js right-sidebar scrollbarcolor woocommerce_plugin_on group-blog page-atp header_custom_style_for_all no_footer_sticky_body elementor-default elementor-template-full-width elementor-kit-6 elementor-page elementor-page-8086"> <div data-elementor-type="header" data-elementor-id="6699" class="elementor elementor-6699 elementor-location-header" data-elementor-post-type="elementor_library"> <header class="elementor-section elementor-top-section elementor-element elementor-element-08264c9 elementor-section-full_width header-1 elementor-section-content-middle elementor-section-height-default elementor-section-height-default elementor-invisible" data-id="08264c9" data-element_type="section" data-settings="{"background_background":"classic","sticky":"top","animation":"fadeInDown","sticky_on":["desktop","tablet","mobile"],"sticky_offset":0,"sticky_effects_offset":0,"sticky_anchor_link_offset":0}"> <div class="elementor-container elementor-column-gap-default"> <div class="elementor-column elementor-col-25 elementor-top-column elementor-element elementor-element-c806964" data-id="c806964" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-0e8f6d9 cpel-lv--yes elementor-widget elementor-widget-creote-logo-v1" data-id="0e8f6d9" data-element_type="widget" data-widget_type="creote-logo-v1.default"> <div class="elementor-widget-container"> <div class="header_logo_box_solo"> <a href="https://www.cemes.fr" class="logo navbar-brand"> <img src="https://www.cemes.fr/wp-content/uploads/2022/09/Logo-Cemes-1.png" alt="CEMES" class="logo_default"> </a> </div> </div> </div> </div> </div> <div class="elementor-column elementor-col-25 elementor-top-column elementor-element elementor-element-5169012 elementor-hidden-mobile" data-id="5169012" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-fc123b2 elementor-search-form--skin-minimal elementor-widget__width-auto cpel-lv--yes elementor-widget elementor-widget-search-form" data-id="fc123b2" data-element_type="widget" data-settings="{"skin":"minimal"}" data-widget_type="search-form.default"> <div class="elementor-widget-container"> <search role="search"> <form class="elementor-search-form" action="https://www.cemes.fr/" method="get"> <div class="elementor-search-form__container"> <label class="elementor-screen-only" for="elementor-search-form-fc123b2">Rechercher </label> <div class="elementor-search-form__icon"> <div class="e-font-icon-svg-container"><svg aria-hidden="true" class="e-font-icon-svg e-fas-search" viewBox="0 0 512 512" xmlns="http://www.w3.org/2000/svg"><path d="M505 442.7L405.3 343c-4.5-4.5-10.6-7-17-7H372c27.6-35.3 44-79.7 44-128C416 93.1 322.9 0 208 0S0 93.1 0 208s93.1 208 208 208c48.3 0 92.7-16.4 128-44v16.3c0 6.4 2.5 12.5 7 17l99.7 99.7c9.4 9.4 24.6 9.4 33.9 0l28.3-28.3c9.4-9.4 9.4-24.6.1-34zM208 336c-70.7 0-128-57.2-128-128 0-70.7 57.2-128 128-128 70.7 0 128 57.2 128 128 0 70.7-57.2 128-128 128z"></path></svg></div> <span class="elementor-screen-only">Rechercher </span> </div> <input id="elementor-search-form-fc123b2" placeholder="Rechercher..." class="elementor-search-form__input" type="search" name="s" value=""> </div> </form> </search> </div> </div> </div> </div> <div class="elementor-column elementor-col-25 elementor-top-column elementor-element elementor-element-987e57f elementor-hidden-mobile" data-id="987e57f" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-72a7cbb elementor-widget 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elementor-section-height-default" data-id="22050b8" data-element_type="section" data-settings="{"background_background":"classic"}"> <div class="elementor-background-overlay"></div> <div class="elementor-container elementor-column-gap-no"> <div class="elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-15e1882" data-id="15e1882" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-c5cb1f0 animated-slow elementor-invisible elementor-widget elementor-widget-heading" data-id="c5cb1f0" data-element_type="widget" data-settings="{"_animation":"fadeInUp"}" data-widget_type="heading.default"> <div class="elementor-widget-container"> <h1 class="elementor-heading-title elementor-size-default">Plateforme Atom-Tech & Procédés</h1> </div> </div> </div> </div> </div> </section> <section class="elementor-section elementor-top-section elementor-element elementor-element-fd979ec animated-slow elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible" data-id="fd979ec" data-element_type="section" id="presentation" data-settings="{"animation":"fadeIn","animation_delay":200}"> <div class="elementor-container elementor-column-gap-default"> <div class="elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-7a4b21a" data-id="7a4b21a" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-bdb0a49 elementor-widget elementor-widget-text-editor" data-id="bdb0a49" data-element_type="widget" data-widget_type="text-editor.default"> <div class="elementor-widget-container"> <p>La plateforme Atom-Tech et Procédés (ATP) regroupe un ensemble cohérent d’équipements et de compétences permettant l’élaboration, la caractérisation et le design des matériaux à l’échelle micro et nanométrique.</p><p>Répartis sur plus de 700 m² dont plus de 400 m² en salle blanche, nos outils expérimentaux ouvrent la voie à la réalisation atome par atome de circuits électroniques atomiques, à la synthèse chimique de molécule-circuit ou molécule-machine, ainsi qu’à leur interconnexion électronique ou mécanique, avec une précision picométrique, par des techniques de nano-fabrication multi-échelle.</p><p>En outre, la plateforme ATP rassemble également les procédés de nanofabrication permettant la croissance de couches minces métalliques ou isolantes et la modification fonctionnelle des substrats par implantation ionique.</p><p>Pour l’étude et la caractérisation de nos réalisations, nous disposons d’outils d’imagerie et de spectroscopie en champ proche, ainsi que d’outils de mesures du transport électrique à l’échelle macro ou nanoscopique. Ces outils sont disponibles en conditions ambiantes ou sous ultravide à basse température.</p> </div> </div> <div class="elementor-element elementor-element-3fa893c animated-slow elementor-invisible elementor-widget elementor-widget-heading" data-id="3fa893c" data-element_type="widget" id="moyens" data-settings="{"_animation":"zoomIn"}" data-widget_type="heading.default"> <div class="elementor-widget-container"> <h2 class="elementor-heading-title elementor-size-default">LES MOYENS</h2> </div> </div> <div class="elementor-element elementor-element-54093f1 elementor-widget elementor-widget-text-editor" data-id="54093f1" data-element_type="widget" data-widget_type="text-editor.default"> <div class="elementor-widget-container"> <p>La plateforme ATP regroupe plus de 20 grands équipements, gérés par 9 agents répartis dans 6 services complémentaires et interdépendants :</p> </div> </div> <div class="elementor-element elementor-element-976020f animated-slow elementor-invisible elementor-widget elementor-widget-toggle" data-id="976020f" data-element_type="widget" data-settings="{"_animation":"fadeInUp"}" data-widget_type="toggle.default"> <div class="elementor-widget-container"> <div class="elementor-toggle"> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1581" class="elementor-tab-title" data-tab="1" role="button" aria-controls="elementor-tab-content-1581" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Synthèse Chimique</a> </div> <div id="elementor-tab-content-1581" class="elementor-tab-content elementor-clearfix" data-tab="1" role="region" aria-labelledby="elementor-tab-title-1581"><p>12 laboratoires</p></div> </div> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1582" class="elementor-tab-title" data-tab="2" role="button" aria-controls="elementor-tab-content-1582" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Procédé de Nano-fabrication </a> </div> <div id="elementor-tab-content-1582" class="elementor-tab-content elementor-clearfix" data-tab="2" role="region" aria-labelledby="elementor-tab-title-1582"><p>1 salle blanche sur 2 niveaux, gravure sèche (par faisceau d’ions – IBE- ou par plasma – RIE-), gravure chimique, bâtis de dépôts diélectriques et métalliques sous ultravide</p> <h4><span style="color: #da6034;">Service Procédés de Nano-fabrication</span></h4> <p>Pourquoi <a href="http://nanomonde.minatec.inpg.fr/spip.php?article14" target="_blank" rel="noopener">les Salles Blanches sont-elles essentielles pour les nanotechnologies et les nanosciences ?</a></p> <p>Les Salles Blanches constituent l’environnement de travail obligatoire dans l’ensemble des filières industrielles et des laboratoires de recherche qui nécessitent un contrôle strict en termes de propreté et de contrôle de l’environnement de travail. C’est notamment le cas dans le domaine de la microélectronique, des nanotechnologies et des nanosciences. Aujourd’hui, la dimension latérale des composants couramment réalisés est sub-micrométrique (100 nm), et peut atteindre l’échelle nanométrique / moléculaire pour les meilleures plateformes et laboratoires. Afin d’atteindre ces précisions de manière régulière, garantir la qualité et la reproductibilité des procédés, il est indispensable de s’affranchir de toute source de contamination incontrôlée (poussière) et de travailler à température et hygrométrie constantes.</p> <p>La fabrication et l’exploitation d’une salle blanche représentent des investissements très lourds. Le coût d’installation de la seule Salle Blanche vide peut être supérieur à 10000€/m2, auquel il faut rajouter l’ensemble des équipements. C’est pourquoi, ces investissements sont souvent mutualisés, par exemple, par un consortium d’entreprises qui souhaitent développer une technologie commune. Au niveau de la formation et de la recherche, la France est particulièrement bien dotée avec plusieurs réseaux de plateformes spécifiques et complémentaires, aptes à répondre aux différents besoins exprimés pour la réalisation de projets de recherche et développement appliquées ou très fondamentales. Renatech est le réseau académique Français des équipements de pointe dans le domaine de la micro et nanotechnologie piloté par le CNRS, ouvert à l’ensemble de la communauté académique et aux industriels. Des centrales technologiques de deuxième cercle ou de proximité avec des filières technologiques très spécifiques complètent le réseau Renatech et permettent de développer/créer de nouvelles filières technologiques.</p> <p><strong>Au sein de ce réseau cohérent, le CEMES-CNRS dispose d’une infrastructure unique au sein du bâtiment Picolab avec des équipements adaptés aux procédés de nano-fabrication classique et une filière totalement originale sous ultra-vide incluant des procédés de fabrication atome par atome.</strong></p> <p><strong>Service Procédés de Nano-fabrication</strong></p> <p><strong> </strong>La salle blanche du CEMES est ouverte à la disposition de la communauté scientifique : pour les chercheurs académiques au sein ou en dehors du CEMES mais aussi pour les entreprises privées. Le service vise à fournir une expertise, des outils et des instruments dédiés à la micro- et nanofabrication pour la recherche fondamentale et appliquée, l’éducation et la formation.<br>Le service gère l’ensemble de la salle blanche de 450m<sup>2</sup>, qui est segmentée en plusieurs salles dédiées, classées ISO Classe 4 à 7. La salle ISO 4 est dédiée aux procédés de lithographie actuels et à l’élaboration des technologies atomiques avancées.</p> <p style="padding-left: 40px;"><strong><em>Techniques expérimentales :</em></strong></p> <ul> <li>Nanofabrication : Le salle blanche propose les principaux outils pour concevoir et élaborer des nanodispositifs pour l’électronique, les méta-matériaux la spintronique, l’optique. Cela comprend les équipements de photolithographie (laser, aligneur de masque), de lithographie par faisceau d’électrons, la gravure humide, la gravure par faisceau d’ions et ions réactifs, le faisceau d’ions focalisé, le dépôt physique en phase vapeur (évaporation par faisceau d’électrons, pulvérisation), dépôt induit par faisceau ionique focalisé, et les techniques de caractérisation telles que la microscopie optique, la profilométrie mécanique, la microscopie électronique à balayage, la microscopie à force atomique, les caractérisations électriques…</li> <li>Atom Tech : ces technologies sont réalisées sous ultra-vide (UHV), et visent la réalisation de nano-dispositifs avec une précision atomique pour l’étude à l’échelle de la molécule ou de l’atome unique. Les nano-outils à base d’UHV, tels que le nano-pochoir à travers des diaphragmes suspendus ou des pointes AFM percées, et la nano-impression, sont fabriqués au sein du service par le panel d’outils de Nanofabrication. La préparation des surfaces nécessaires au développement des nanodispositifs est réalisée par des machines de dépôt de métal et d’isolant UHV. Les interconnexions des chambres UHV permettent d’obtenir la précision picométrique nécessaire à l’étude des circuits atomiques, et des molécules-machines mécaniques.</li> </ul> <p style="padding-left: 40px;"><strong><em>Compétences Humaines :</em></strong></p> <ul> <li>Développement de procédés de nano-fabrication à façon de nanodispositifs à couches minces, matériaux nanostructurés, nano-objets (optique, magnétisme, radiofréquence, propriétés de transport, études de microscopie électronique à transmission in situ sous excitation électrique ou magnétique, …).</li> <li>Développement de procédés originaux dans une ligne de nano-fabrication compatible full vide poussé pour les nanosciences (ultra-petite nanostructure épitaxiée, électronique moléculaire, circuits atomiques, molécule-machine mécanique, …).</li> </ul></div> </div> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1583" class="elementor-tab-title" data-tab="3" role="button" aria-controls="elementor-tab-content-1583" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Nano-lithographies</a> </div> <div id="elementor-tab-content-1583" class="elementor-tab-content elementor-clearfix" data-tab="3" role="region" aria-labelledby="elementor-tab-title-1583"><p>lithographies optiques et par faisceau d’électrons</p></div> </div> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1584" class="elementor-tab-title" data-tab="4" role="button" aria-controls="elementor-tab-content-1584" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Croissance </a> </div> <div id="elementor-tab-content-1584" class="elementor-tab-content elementor-clearfix" data-tab="4" role="region" aria-labelledby="elementor-tab-title-1584"><p>2 bâtis de pulvérisation cathodique « sputtering », fours de recuit</p></div> </div> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1585" class="elementor-tab-title" data-tab="5" role="button" aria-controls="elementor-tab-content-1585" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Champ Proche & Ultravide</a> </div> <div id="elementor-tab-content-1585" class="elementor-tab-content elementor-clearfix" data-tab="5" role="region" aria-labelledby="elementor-tab-title-1585"><p>2 microscopes à effet tunnel (STM) sous ultravide refroidis à l’hélium liquide, dont le « 4-STM » utilisé pour la « Nanocar Race », 1 usine sous ultravide (ensemble d’enceintes UHV reliées pour préparer et observer des molécules uniques sans mise à l’air)</p><h4><span style="color: #da6034;">Service CP-UHV : Microscopies ultimes sous ultravide</span></h4><p>(<a href="mailto:jimmy.faria@cemes.fr">Jimmy FARIA</a>)</p><p>La branche « Microscopies ultimes » du service CP-UHV du CEMES est doté de 3 équipements expérimentaux fonctionnant sous ultravide (UHV), installés dans les salles blanches bas bruit du bâtiment PicoLab :</p><p style="padding-left: 40px;">1. Le LT-STM/Qplus (Low Temperature STM) : le STM basse température<br /><img fetchpriority="high" decoding="async" class="alignleft wp-image-8122 size-medium" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-4-300x217.png" alt="" width="300" height="217" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-4-300x217.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-4.png 477w" sizes="(max-width: 300px) 100vw, 300px" /><br />Microscope à effet tunnel (STM) basse température qui permet de travailler à une température de 5K en mode STM et/ou en mode non-contact AFM (NC-AFM). Equipé pour préparer des surfaces cristallines sous UHV et déposer des couches minces isolantes, il permet le dépôt de métaux ou de molécules à basse température.</p><p> </p><p style="padding-left: 40px;">2. La DUF (« DiNaMo UHV Factory ») : l’usine sous UHV<br /><img decoding="async" class="size-medium wp-image-8121 alignleft" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-3-300x225.png" alt="" width="300" height="225" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-3-300x225.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-3.png 493w" sizes="(max-width: 300px) 100vw, 300px" /><br />Conçu et développé au CEMES, cet équipement propose un dispositif complet de mesures des propriétés électroniques d’une molécule unique en configuration planaire sur une surface isolante. Il est composé de 5 chambres UHV reliées entre elles par un tube de transfert sous UHV : i) bâti d’épitaxie par jets moléculaires (MBE), ii) chambre de préparation pour les pointes et le dépôt de molécules, iii) source d’ions à énergie faible et contrôlée, iv) microscope NC-AFM/KPFM haute sensibilité et v) microscope STM+NC-AFM/KPFM équipé de la technique nanostencil.</p><p style="padding-left: 40px;">3. Le LT-UHV 4-STM/Qplus + SEM : le « 4 pointes »<br /><img decoding="async" class="alignnone wp-image-8120 size-full" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-2.png" alt="" width="981" height="306" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-2.png 981w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-2-600x187.png 600w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-2-768x240.png 768w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Champ-Proche-Ultravide-2-300x94.png 300w" sizes="(max-width: 981px) 100vw, 981px" />Microscope basse température (4K) comportant 4 têtes STM indépendantes surmontées d’une colonne FEG-SEM. Une des têtes STM est, de plus, équipée du module Qplus permettant des mesures en NC-AFM à 5 K. L’ensemble est connecté à une chambre de préparation sous UHV (possibilité de sublimations multiples de molécules) et à une autre chambre équipée d’une imprimante UHV par transfert.<br />Une dizaine de chercheurs permanents et non permanents du CEMES développent leurs recherches sur ces équipements.<br />Ce microscope fut l’arène au sein de laquelle s’est déroulée, en avril 2017, <a href="https://nanocar-race.cnrs.fr/">la 1ère édition de la NanoCar Race</a>, course de molécules sur une piste de 100 nm. <a href="https://memo-project.eu/flatCMS/index.php/Nanocar-Race-II">La 2<sup>ème</sup> édition de cette compétition scientifique</a> s’est déroulée en mars 2022.</p><p>3 microscopes à force atomique (AFM) dont un instrument hybride AFM / PSTM / STM-LE et un profilomètre</p><h4><span style="color: #da6034;">Service CP-UHV : Microscopies à sonde locale</span></h4><p>(<a href="mailto:seine@cemes.fr">Grégory SEINE</a>)</p><p>La branche « <strong>Microscopies à Sonde Locale »</strong> du service CPUVH regroupe un ensemble de <strong>techniques d’imagerie de surface en champ proche, à l’air</strong>. Elle se décline en une activité de service et une activité de recherche.</p><p><strong><u>1. L’activité de service</u></strong> repose sur la base de deux microscopes commerciaux Bruker, dont l’un est intégré en salle blanche et est doté d’une table de nano-positionnement. Le service propose l’accès à des mesures de :</p><ul><li>Topographie (<strong>AFM</strong> mode contact ou Tapping, <strong>STM</strong>) à l’air ou milieu liquide</li><li>Imagerie de Forces de friction latérale (<strong>LFM</strong>)</li><li>Imagerie de Forces magnétiques (<strong>MFM</strong>)</li><li>Imagerie de Forces électriques (<strong>EFM</strong>)</li><li>Imagerie de Potentiel de surface (<strong>KFM</strong>)</li><li>Imagerie de forces piézoélectriques (<strong>PFM</strong>)</li><li>Courbes de force</li></ul><p>Les microscopies de champ proche, ou à sonde locale, permettent des observations à <strong>3 dimensions</strong>, sur des échelles de <strong>1 nm à 100 µm</strong>, sur <strong>tous types d’échantillons</strong> : surfaces (métalliques, semi-conductrices ou isolantes), nano-objets (nanoparticules, nano-structures), molécules, échantillons biologiques…</p><p>Le service s’est également équipé d’un <strong>profilomètre à contact</strong> Bruker Dektak 150. Situé en salle blanche au plus près des procédés de nanofabrication, cet appareil est idéal pour mesurer rapidement le profil d’une surface afin d’en déterminer la rugosité ou la géométrie à l’échelle micro ou nanométrique.</p><p><u>Modes de réalisation des mesures</u> :</p><ul><li>Prestations par le responsable, en présence ou non du demandeur</li><li>Formation du demandeur en vue d’être autonome sur le microscope (à envisager pour de grandes campagnes de mesures)</li></ul><p><u>Contraintes physiques sur les échantillons pour le microscope hors salle blanche</u> :</p><ul><li>La configuration géométrique du matériel impose de calibrer le format des échantillons : la zone utile à observer doit se situer au centre de l’échantillon, dans une zone d’environ 5×5 mm², les dimensions totales de l’échantillon ne devant pas dépasser 1 cm (l) x 1 cm (L) x 0.8 cm (ép.)</li><li>L’échantillon peut par contre être de très petite taille ou de forme quelconque</li></ul><p><u>Modalités d’accès</u> :</p><ul><li>Prendre contact avec le responsable de l’activité (coordonnées ci-dessous)</li><li>Pour les demandeurs déjà formés, réservations sur GRR via le site intranet du CEMES</li></ul><p><u>Conditions d’accès</u> :</p><ul><li>Le service est ouvert en priorité aux membres du laboratoire</li><li>Le service est également ouvert aux extérieurs, institutionnels ou entreprises</li></ul><p><u>Tarification</u> : aux coûts complets, unité d’œuvre (UO) : la demi-journée</p><ul><li>Clients académiques : 30.35€ à 99.53€ l’UO, selon l’origine du financement</li><li>Autres clients : 727.77€ l’UO</li></ul><p><u>Renseignements auprès du responsable</u> : <a href="mailto:seine@cemes.fr">Grégory Seine</a>, 05 62 25 79 64</p><p><strong><u>2. L’activité de recherche</u></strong> s’appuie également sur un microscope commercial Bruker, mais transformé pour fonctionner en mode champ proche optique de type « PSTM » (Photon Scanning Tunneling Microscope) et en mode émission de photon stimulée par STM « LE-STM ». Bien qu’orienté « recherche », ce microscope reste utilisable avec tous les modes AFM habituels. Il permet d’associer la topographie 3D des AFM ou STM avec une cartographie de l’émission photonique en champ proche obtenue par excitation optique de l’échantillon (type photoluminescence) ou électronique (type cathodoluminescence).</p><p>Le microscope possède une ligne laser (gamme du violet au proche infrarouge 457 nm – 1000 nm) permettant d’exciter les échantillons en réflexion totale à travers un prisme. La collection des photons se fait via une fibre optique amincie (en mode PSTM) ou non (en mode LE-STM). La lumière collectée peut être acheminée vers un photomultiplicateur (comptage de nombre de photons) ou un spectromètre (analyse spectrale).</p><p><u>Responsable</u> : <a href="mailto:pechou@cemes.fr">Renaud Péchou</a>, 05 62 25 78 95</p></div> </div> <div class="elementor-toggle-item"> <div id="elementor-tab-title-1586" class="elementor-tab-title" data-tab="6" role="button" aria-controls="elementor-tab-content-1586" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Implantation Ionique</a> </div> <div id="elementor-tab-content-1586" class="elementor-tab-content elementor-clearfix" data-tab="6" role="region" aria-labelledby="elementor-tab-title-1586"><p>1 implanteur ionique avec module basse énergie</p><h4><span style="color: #da6034;">Implantation ionique</span></h4><p>(<a href="mailto:seine@cemes.fr">Grégory SEINE</a> (Resp.), <a href="mailto:frederic.neumayer@cemes.fr">Frédéric NEUMAYER</a>)</p><p>L’implantation ionique consiste à introduire des ions dans un matériau pour modifier ses propriétés. Par exemple, en micro-électronique, l’implanteur d’ions est utilisé pour doper les matériaux semi-conducteurs.</p><p>Au CEMES, l’implantation ionique est une des voies physiques de synthèse de nanoparticules.</p><p>L’implanteur d’ions du CEMES est un modèle VARIAN 200-2A (200 keV), avec une spécificité : un module <strong><em>« Ultra Low Energy »</em></strong> (ULE) permettant d’implanter à des énergies à partir de 0.6 keV. Il a été rénové début 2016.</p><p><img loading="lazy" decoding="async" class="alignnone wp-image-8126 size-full" src="https://www.cemes.fr/wp-content/uploads/2022/11/a.png" alt="" width="860" height="575" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/a.png 860w, https://www.cemes.fr/wp-content/uploads/2022/11/a-600x401.png 600w, https://www.cemes.fr/wp-content/uploads/2022/11/a-768x513.png 768w, https://www.cemes.fr/wp-content/uploads/2022/11/a-300x201.png 300w" sizes="(max-width: 860px) 100vw, 860px" /></p><p>Grâce au module ULE, cet équipement permet de fabriquer des <strong>nano-cristaux</strong> (après recuit dans l’un des fours du <a href="https://www.cemes.fr/Croissance-Physique-UHV">Service Croissance</a> <em>lien à revoir !!!</em>) en maîtrisant :</p><ul><li>leurs tailles</li><li>la densité (fines couches)</li><li>leur position dans le substrat (quelques nanomètres de profondeur).</li></ul><p>Les espèces d’ions pouvant être implantées sont les suivantes : <strong><em>Si, Ag, Au, N, Ar, H et He</em></strong>. En lien avec les activités du laboratoire, les implantations réalisées au CEMES concernent des applications en plasmonique et photovoltaïque, en micro-électronique (transistors) ou la mise en œuvre du procédé Smart Cut™.</p></div> </div> </div> </div> </div> <div class="elementor-element elementor-element-e3edb97 elementor-widget elementor-widget-text-editor" data-id="e3edb97" data-element_type="widget" data-widget_type="text-editor.default"> <div class="elementor-widget-container"> <p><img loading="lazy" decoding="async" class="aligncenter wp-image-8089 size-full" src="https://www.cemes.fr/wp-content/uploads/2022/11/ATP.png" alt="" width="945" height="700" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/ATP.png 945w, https://www.cemes.fr/wp-content/uploads/2022/11/ATP-600x444.png 600w, https://www.cemes.fr/wp-content/uploads/2022/11/ATP-768x569.png 768w, https://www.cemes.fr/wp-content/uploads/2022/11/ATP-300x222.png 300w" sizes="(max-width: 945px) 100vw, 945px" /></p><p>La plateforme ATP met ainsi à la disposition des chercheurs un cadre pour les accompagner de A à Z dans la conduite d’un processus de nano-fabrication, de l’élaboration jusqu’à la caractérisation : aide au choix des techniques, formation à l’utilisation des instruments, aide à l’analyse des résultats et plus généralement gestion des différentes phases du processus.</p><p>Pour <a href="https://www.cemes.fr/VIDEO/VIDEO/index.htm" target="_blank" rel="noopener">une visite virtuelle de la salle blanche et ses équipements, c’est ici !</a></p> </div> </div> </div> </div> </div> </section> <section class="elementor-section elementor-top-section elementor-element elementor-element-c6177be elementor-section-boxed elementor-section-height-default elementor-section-height-default" data-id="c6177be" data-element_type="section" id="membres" data-settings="{"background_background":"classic"}"> <div class="elementor-container elementor-column-gap-default"> <div class="elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e11c0a2" data-id="e11c0a2" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-9fafe99 animated-slow elementor-invisible elementor-widget elementor-widget-heading" data-id="9fafe99" data-element_type="widget" data-settings="{"_animation":"zoomIn"}" data-widget_type="heading.default"> <div class="elementor-widget-container"> <h2 class="elementor-heading-title elementor-size-default">LES MEMBRES</h2> </div> </div> <div class="elementor-element elementor-element-d1d443f elementor-widget elementor-widget-spacer" data-id="d1d443f" data-element_type="widget" data-widget_type="spacer.default"> <div class="elementor-widget-container"> <div class="elementor-spacer"> <div class="elementor-spacer-inner"></div> </div> </div> </div> <div class="elementor-element elementor-element-c715938 elementor-grid-5 elementor-posts--align-center elementor-grid-tablet-2 elementor-grid-mobile-1 elementor-posts--thumbnail-top elementor-card-shadow-yes elementor-posts__hover-gradient elementor-widget elementor-widget-posts" data-id="c715938" data-element_type="widget" data-settings="{"cards_columns":"5","cards_row_gap":{"unit":"px","size":10,"sizes":[]},"cards_columns_tablet":"2","cards_columns_mobile":"1","cards_row_gap_tablet":{"unit":"px","size":"","sizes":[]},"cards_row_gap_mobile":{"unit":"px","size":"","sizes":[]}}" data-widget_type="posts.cards"> <div class="elementor-widget-container"> <div class="elementor-posts-container elementor-posts elementor-posts--skin-cards elementor-grid"> <article class="elementor-post elementor-grid-item post-16767 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/09/06/laure-noe-ai-10/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/09/06/laure-noe-ai-10/" > Laure NOE (AI) </a> </h3> <div class="elementor-post__excerpt"> <p>ITA CNRS (AI)<br /> Resp. Nano-lithographies</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/09/06/laure-noe-ai-10/" aria-label="En savoir plus sur Laure NOE (AI)" tabindex="-1" > Publications </a> </div> </div> </div> </article> <article class="elementor-post elementor-grid-item post-9704 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-neo category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/01/23/gregory-seine-ierf/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/01/23/gregory-seine-ierf/" > Grégory SEINE (IR1RF) </a> </h3> <div class="elementor-post__excerpt"> <p>Animateur ATP, Resp. Impl. Ionique, Champ Proche, Ultravide</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/01/23/gregory-seine-ierf/" aria-label="En savoir plus sur Grégory SEINE (IR1RF)" tabindex="-1" > Publications </a> </div> </div> </div> </article> <article class="elementor-post elementor-grid-item post-9702 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/01/23/sebastien-pinaud-ai/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/01/23/sebastien-pinaud-ai/" > Sébastien PINAUD (AI) </a> </h3> <div class="elementor-post__excerpt"> <p>Resp. Service Procédé de Nano-Fabrication</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/01/23/sebastien-pinaud-ai/" aria-label="En savoir plus sur Sébastien PINAUD (AI)" tabindex="-1" > Publications </a> </div> </div> </div> </article> <article class="elementor-post elementor-grid-item post-9696 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes category-membres-platforme-structures-et-proprietes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/01/23/frederic-neumayer-ierf/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/01/23/frederic-neumayer-ierf/" > Frédéric Neumayer (IERF) </a> </h3> <div class="elementor-post__excerpt"> <p>Service Implantation Ionique<br /> BIATSS UPS (IGE)</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/01/23/frederic-neumayer-ierf/" aria-label="En savoir plus sur Frédéric Neumayer (IERF)" tabindex="-1" > Publications </a> </div> </div> </div> </article> <article class="elementor-post elementor-grid-item post-9691 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/01/23/jimmy-faria-ie/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/01/23/jimmy-faria-ie/" > Jimmy FARIA (IE) </a> </h3> <div class="elementor-post__excerpt"> <p>Resp. Service Champ Proche & Ultravide</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/01/23/jimmy-faria-ie/" aria-label="En savoir plus sur Jimmy FARIA (IE)" tabindex="-1" > Publications </a> </div> </div> </div> </article> <article class="elementor-post elementor-grid-item post-9688 post type-post status-publish format-standard has-post-thumbnail hentry category-membres-groupes-et-plateformes category-membres-plateforme-atom-tech-procedes"> <div class="elementor-post__card"> <a class="elementor-post__thumbnail__link" href="https://www.cemes.fr/2023/01/23/sophie-barre-ai/" tabindex="-1" ><div class="elementor-post__thumbnail"><img loading="lazy" decoding="async" width="1940" height="1940" src="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png" class="attachment-full size-full wp-image-12185" alt="" srcset="https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2.png 1940w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-600x600.png 600w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1024x1024.png 1024w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-150x150.png 150w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-768x768.png 768w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-1536x1536.png 1536w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-300x300.png 300w, https://www.cemes.fr/wp-content/uploads/2023/01/Fichier-2-100x100.png 100w" sizes="(max-width: 1940px) 100vw, 1940px" /></div></a> <div class="elementor-post__text"> <h3 class="elementor-post__title"> <a href="https://www.cemes.fr/2023/01/23/sophie-barre-ai/" > Sophie BARRE (IE) </a> </h3> <div class="elementor-post__excerpt"> <p>Resp. Service Croissance</p> </div> <div class="elementor-post__read-more-wrapper"> <a class="elementor-post__read-more" href="https://www.cemes.fr/2023/01/23/sophie-barre-ai/" aria-label="En savoir plus sur Sophie BARRE (IE)" tabindex="-1" > Publications </a> </div> </div> </div> </article> </div> </div> </div> </div> </div> </div> </section> <section class="elementor-section elementor-top-section elementor-element elementor-element-a4b953e elementor-section-boxed elementor-section-height-default elementor-section-height-default" data-id="a4b953e" data-element_type="section" id="projets"> <div class="elementor-container elementor-column-gap-default"> <div class="elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-4765287" data-id="4765287" data-element_type="column"> <div class="elementor-widget-wrap elementor-element-populated"> <div class="elementor-element elementor-element-5f690da animated-slow elementor-invisible elementor-widget elementor-widget-heading" data-id="5f690da" data-element_type="widget" data-settings="{"_animation":"zoomIn"}" data-widget_type="heading.default"> <div class="elementor-widget-container"> <h2 class="elementor-heading-title elementor-size-default">LES PROJETS</h2> </div> </div> <div class="elementor-element elementor-element-5f3dc6b elementor-invisible elementor-widget elementor-widget-toggle" data-id="5f3dc6b" data-element_type="widget" data-settings="{"_animation":"fadeInUp"}" data-widget_type="toggle.default"> <div class="elementor-widget-container"> <div class="elementor-toggle"> <div class="elementor-toggle-item"> <div id="elementor-tab-title-9981" class="elementor-tab-title" data-tab="1" role="button" aria-controls="elementor-tab-content-9981" aria-expanded="false"> <span class="elementor-toggle-icon elementor-toggle-icon-left" aria-hidden="true"> <span class="elementor-toggle-icon-closed"><svg class="e-font-icon-svg e-fas-chevron-down" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M207.029 381.476L12.686 187.132c-9.373-9.373-9.373-24.569 0-33.941l22.667-22.667c9.357-9.357 24.522-9.375 33.901-.04L224 284.505l154.745-154.021c9.379-9.335 24.544-9.317 33.901.04l22.667 22.667c9.373 9.373 9.373 24.569 0 33.941L240.971 381.476c-9.373 9.372-24.569 9.372-33.942 0z"></path></svg></span> <span class="elementor-toggle-icon-opened"><svg class="elementor-toggle-icon-opened e-font-icon-svg e-fas-chevron-up" viewBox="0 0 448 512" xmlns="http://www.w3.org/2000/svg"><path d="M240.971 130.524l194.343 194.343c9.373 9.373 9.373 24.569 0 33.941l-22.667 22.667c-9.357 9.357-24.522 9.375-33.901.04L224 227.495 69.255 381.516c-9.379 9.335-24.544 9.317-33.901-.04l-22.667-22.667c-9.373-9.373-9.373-24.569 0-33.941L207.03 130.525c9.372-9.373 24.568-9.373 33.941-.001z"></path></svg></span> </span> <a class="elementor-toggle-title" tabindex="0">Projet « Puces Atome Tech » </a> </div> <div id="elementor-tab-content-9981" class="elementor-tab-content elementor-clearfix" data-tab="1" role="region" aria-labelledby="elementor-tab-title-9981"><h5><span style="color: #da6034;">Feuille de route :</span></h5> <p style="padding-left: 40px;"><span style="text-decoration: underline;">Puces sur support inorganique</span></p> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li>Puces Atome Tech (1ere Génération): Poste à poste et valise UHV (2012 – 2025)</li> <li>Puces Atome Tech (2ieme Génération): Micro-salle blanche tout intégré (2020-2030)</li> </ul> </li> </ul> </li> </ul> </li> </ul> </li> </ul> <p style="padding-left: 40px;"><span style="text-decoration: underline;">Puces sur support organique « Développement durable »</span></p> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li style="list-style-type: none;"> <ul> <li>Puces Atome Tech (3ieme Génération): molécule-circuit par génie génétique (2025-2035)</li> <li>Puces Atome Tech (4ieme Génération): Support et molécule-circuit par génie génétique (2030 – 2040)</li> <li>Puces Atome Tech (5ieme Génération): Clef de biocompatibilité, Support et molécule-circuit par génie génétique (>2040)</li> </ul> </li> </ul> </li> </ul> </li> </ul> </li> </ul> <h5><span style="color: #da6034;">Description détaillée d’un process fonctionnel : Puces Atome Tech de 1ère génération</span></h5> <p>Ce process « poste à poste » avec valise UHV pour le transfert entre postes, concerne le développement de Puces Atome Tech de 1ère génération (2012 – 2025) – Comme débuté dans le groupe « Atom Tech » de C. Joachim à IMRE, A*Star (Singapore)et avec le Projet Européen AtMol.</p> <p style="text-align: center;"><img loading="lazy" decoding="async" class="aligncenter wp-image-8094 size-full" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1.png" alt="" width="1064" height="600" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1.png 1064w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1-600x338.png 600w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1-1024x577.png 1024w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1-768x433.png 768w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-1-300x169.png 300w" sizes="(max-width: 1064px) 100vw, 1064px" /><br>« Advances in Atom and single Molecule-Machines » Vol. 7, Fig. 2, p. 113 (2015)</p> <p><span style="text-decoration: underline;">Poste 1</span> : Préparation face avant du support par Molecular Beam Epitaxy (MBE) et imagerie STM<br>(Appl. Surf. Sci., 288, 83 (2014), AIP Adv. 5, 067108 (2015), Phys. Rev. B, 97, 081302(R) (2018))</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8095" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-2-300x228.png" alt="" width="300" height="228" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-2-300x228.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-2.png 345w" sizes="(max-width: 300px) 100vw, 300px" /> MBE sur DUF <br><img loading="lazy" decoding="async" class="size-medium wp-image-8096 alignnone" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-3-300x230.png" alt="" width="300" height="230" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-3-300x230.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-3.png 347w" sizes="(max-width: 300px) 100vw, 300px" />LT-UHV STM/Qplus</p> <p><span style="text-decoration: underline;">Poste 2</span> : Fabrication du capot de protection de la face avant par Reactive Ion Etching (RIE)</p> <p><img loading="lazy" decoding="async" class="size-medium wp-image-8102 alignnone" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-9-225x300.png" alt="" width="225" height="300" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-9-225x300.png 225w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-9.png 231w" sizes="(max-width: 225px) 100vw, 225px" />RIE</p> <p><span style="text-decoration: underline;">Poste 3 </span>: Encapsulation en UHV<br>(N° WO 2009/022982 19 February 2009, Int. Patent classification: H01L 21/768<br>(2006.01) B82B 3/00 (2006.01), US patent: US2011/0018138A1)</p> <p><span style="text-decoration: underline;">Poste 4</span> : Gravure face arrière par RIE pour libérer le passage avant-arrière par la technique des « Via »<br>J. Vac. Sci. Tech. B, 28, 978 (2010)</p> <p><span style="text-decoration: underline;">Postes 5 à 7</span> : Contacts face arrière par Focused Ion Beam (FIB) et décomposition d’organo-metalliques<br>J. Vac. Sci. Tech. B, 28, 978 (2010)</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8097" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-4-300x202.png" alt="" width="300" height="202" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-4-300x202.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-4.png 333w" sizes="(max-width: 300px) 100vw, 300px" />FIB</p> <p><span style="text-decoration: underline;">Poste 8</span> : Vérification de la surface par imagerie LT-UHV-STM et localisation de l’émergence des « Via »</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8098" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-5-300x237.png" alt="" width="300" height="237" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-5-300x237.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-5.png 308w" sizes="(max-width: 300px) 100vw, 300px" />LT-UHV STM/Qplus</p> <p><span style="text-decoration: underline;">Poste 9</span> : Nano-plots métalliques de contact par dépôts sous UHV<br>J. Vac. Sci. Tech. B., 28, 484 (2010)</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8099" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-6-300x226.png" alt="" width="300" height="226" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-6-300x226.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-6.png 464w" sizes="(max-width: 300px) 100vw, 300px" />DUS</p> <p><span style="text-decoration: underline;">Poste 10 </span>: Construction et test (face avant) du circuit atomique ou moléculaire par LT-UHV-4-STM<br>Appl. Surf. Sci., 288, 83 (2014)</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8101" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-8-300x241.png" alt="" width="300" height="241" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-8-300x241.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-8.png 460w" sizes="(max-width: 300px) 100vw, 300px" />LT-UHV 4-STM</p> <p><span style="text-decoration: underline;">Poste 11 </span>: Encapsulation UHV dans la chambre d’impression du LT-UHV 4-STM</p> <p><span style="text-decoration: underline;">Poste 12</span> : Test électrique final hors UHV<br>J. Vac. Sci. Tech. B, 28, 978 (2010)</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8100" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-7-300x150.png" alt="" width="300" height="150" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-7-300x150.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-7-600x299.png 600w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-7.png 614w" sizes="(max-width: 300px) 100vw, 300px" /></p> <h5><span style="color: #da6034;">Et dans un futur proche ?</span></h5> <p>L’enjeu technologique est de basculer tout le process au sein de notre micro-salle blanche intégrée DUF (Dynamo UHV Factory) pour aboutir à la 2ème génération de Puces Atome Tech, tout le process se déroulant alors sous UHV.</p> <p><img loading="lazy" decoding="async" class="alignnone size-medium wp-image-8103" src="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-10-300x182.png" alt="" width="300" height="182" srcset="https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-10-300x182.png 300w, https://www.cemes.fr/wp-content/uploads/2022/11/CEMES-ATP-Projet-Puces-Atome-Tech-10.png 570w" sizes="(max-width: 300px) 100vw, 300px" /></p> <h5><span style="color: #da6034;">Et après ?</span></h5> <p>Passage progressif de chaque poste et étape de nano-fabrication à des process et à des matériaux renouvelables (Techno-cyclables avec leur clef de biocompatibilité).</p> <p><span style="color: #da6034;">« Donnez-moi les gênes d’un calculateur et je vous programmerai une bactérie pour le bio-fabriquer et une autre bactérie pour le bio-décomposer molécule par molécule »</span></p> <p><em>Inspiré par:</em></p> <p>K. Ulmer<br>Proceeding of the Molecular electronic Device Workshop<br>March 1981, Washington DC 23-24<br>Library of Congress ref. 12484,<br>Naval Research Lab ref. MR 4462</p> <p>Les Bio-Transistors, La microélectronique du XXI siècle<br>J. De Rosnay,<br>La Recherche, 12, 870 (1981)</p> <p>« Computers and the Environment »<br>R. Kuehr & E. Williams (Eds)<br>Kluwer Academic Publishers (2003)</p> <p>« Nanosciences : la révolution invisible » p. 13<br>C. Joachim & L. Plévert<br>Editions du Seuil (2008)</p> <p>« Radical Abundance »<br>K.E. 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