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Camfil offers an extensive range of solutions &ndash; particle pre-filters, HEPA and ULPA filters and AMC control solutions &ndash; to lower any cleanroom particulate and molecular concentrations to ISO Class&nbsp;1 levels for particles and sub-ppb for AMC. </p> <h2>AMC filters and control more critical than ever in cleanroom filtration</h2> <p> Airborne molecular contamination (AMC) presents a special challenge to semiconductor manufacturing in small dimensions. The undesired chemical reactions of acids, bases, organics, refractories and dopants can affect wafer surfaces and process equipment optics to create defects during chip production and reduced equipment and tool efficiency. </p> <p>AMC is steadily becoming more important in critical cleanroom manufacturing processes. As specifications become more demanding and device sizes shrink, process control faces tremendous pressure. Wafers can spend an entire month inside a factory, undergoing hundreds of processes before being shipped in a final product. Any tiny contamination impact in this process chain can have serious consequences for the fab&rsquo;s overall yield. </p> <p>Another challenge lies in the generalization of larger wafer dimensions, which drives up the cost of individual wafers and increases the need for nanoparticle and AMC protection at the tool level. Additionally, the rising costs for defect-free masks used in EUV and multi-patterning DUV lithography are putting pressure on contamination control systems for facilities as well as mini-environments like inspection equipment and mask stockers. </p> <h2>Protect your process equipment and wafers against nanoparticles and airborne molecular contaminants</h2> <p>Camfil solutions provide field- and lab-proven protection in semiconductor manufacturing environments, including lithography, etch, diffusion, metallization, thin films, ion implantation, inspection tools, and reticle or wafer storage areas.</p> <ul> <li>Process tool air filters</li> <li>Cleanroom air filters</li> <li>Scanner prefiltration systems</li> </ul> <h2>Energy-efficient and low-outgassing solutions for facility systems</h2> <p>Camfil&rsquo;s particle pre-filter range ensures the lowest energy usage in make-up air handling units while protecting HEPA filters from clogging and without releasing Boron. Camfil HEPA and ULPA filters are designed to release the lowest possible amounts of organic contaminants (so-called low outgassing), following years of developments of adhesives and media chemical properties. Exhaust systems for wafer cutting as well as gas scrubbers for general exhaust back-up systems protect the environment from process contamination.</p> <ul> <li>Boron-free synthetic pre-filters</li> <li>Very low energy pre-filters</li> <li>Low outgassing HEPA and ULPA filters</li> <li>Dust collectors and gas scrubbers for cleaner exhaust air</li> </ul> <p>&nbsp;</p> </div> <button type="button" class="u-limitHeightBtn d-none mt-1 btn btn-sm btn-outline-primary" data-height="120" data-less="Show less" data-more="Show more"> Show more </button> </div> <div class="col-12 col-sm-4"> </div> <div class="col-12 ApplicationListing mb-0"> <ul class="row d-flex flex-wrap list-unstyled"> <li class="col-12 col-sm-6 col-lg-4 mb-4"> <a href="/en-sg/support-and-services/support/product-finder#application=46005%7C44987%7CMRKT22" class="ApplicationListing-link"> <div class="ApplicationListing-imageWrapper mb-3"> <div class="ApplicationListing-imageOverlay"> <span class="btn btn-outline-light ApplicationListing-imageOverlayBtn"> Show products </span> </div> <img src="https://www.camfil.com/dam/images/19042/90545/Exhaust-air-unit.png?width=400&height=300&bgcolor=white&placeholder=pixelated" data-src="https://www.camfil.com/dam/images/19042/90545/Exhaust-air-unit.png?width=400&height=300&bgcolor=white" class="d-block img-fluid u-lazyAnimated" alt="Exhaust Air Unit" /> </div> <h2 class="ApplicationListing-title u-heading">Exhaust air</h2> <p>Protect the environment and people from dangerous or high concentrations of particles and molecules released by industrial processes, comply with local safety regulations and reduce operating costs of your exhaust air filtration system.</p> </a> </li> <li class="col-12 col-sm-6 col-lg-4 mb-4"> <a href="/en-sg/support-and-services/support/product-finder#application=45023%7C44987%7CMRKT22" class="ApplicationListing-link"> <div class="ApplicationListing-imageWrapper mb-3"> <div class="ApplicationListing-imageOverlay"> <span class="btn btn-outline-light ApplicationListing-imageOverlayBtn"> Show products </span> </div> <img src="https://www.camfil.com/dam/images/31136/90544/Cleanroom-new.png?width=400&height=300&bgcolor=white&placeholder=pixelated" data-src="https://www.camfil.com/dam/images/31136/90544/Cleanroom-new.png?width=400&height=300&bgcolor=white" class="d-block img-fluid u-lazyAnimated" alt="Cleanroom New" /> </div> <h2 class="ApplicationListing-title u-heading">Cleanroom ceiling</h2> <p>Cleanroom ceilings are designed to provide high protection levels against molecules (gas phase), nanoparticles and particles for cleanroom equipment, processes and manufactured products. Ceilings use laminar or turbulent air flows depending on the cleanroom design.</p> </a> </li> <li class="col-12 col-sm-6 col-lg-4 mb-4"> <a href="/en-sg/support-and-services/support/product-finder#application=45532%7C44987%7CMRKT22" class="ApplicationListing-link"> <div class="ApplicationListing-imageWrapper mb-3"> <div class="ApplicationListing-imageOverlay"> <span class="btn btn-outline-light ApplicationListing-imageOverlayBtn"> Show products </span> </div> <img src="https://www.camfil.com/dam/images/31074/90468/Air-handling-unit.png?width=400&height=300&bgcolor=white&placeholder=pixelated" data-src="https://www.camfil.com/dam/images/31074/90468/Air-handling-unit.png?width=400&height=300&bgcolor=white" class="d-block img-fluid u-lazyAnimated" alt="MARKER IMAGE Make Up Air Unit" /> </div> <h2 class="ApplicationListing-title u-heading">Recirculation air unit</h2> <p>Recirculation air units are used to provide clean and tempered air to facilities, as complement or in place of ceiling systems and fan filter units. Recirculated air needs filtration for protecting people, processes and products.</p> </a> </li> <li class="col-12 col-sm-6 col-lg-4 mb-4"> <a href="/en-sg/support-and-services/support/product-finder#application=46084%7C44987%7CMRKT22" class="ApplicationListing-link"> <div class="ApplicationListing-imageWrapper mb-3"> <div class="ApplicationListing-imageOverlay"> <span class="btn btn-outline-light ApplicationListing-imageOverlayBtn"> Show products </span> </div> <img src="https://www.camfil.com/dam/images/31083/90482/A_Process_equipment2.png?width=400&height=300&bgcolor=white&placeholder=pixelated" data-src="https://www.camfil.com/dam/images/31083/90482/A_Process_equipment2.png?width=400&height=300&bgcolor=white" class="d-block img-fluid u-lazyAnimated" alt="Process Equipment" /> </div> <h2 class="ApplicationListing-title u-heading">Process equipment</h2> <p>Microelectronic processes in cleanrooms or mini-environments require protection from particles and molecular gaseous contaminants. Processes include lithography, coater developers, etch, diffusion, metallization, thin films, ion implantation, inspection tools and reticle stockers.</p> </a> </li> <li class="col-12 col-sm-6 col-lg-4 mb-4"> <a href="/en-sg/support-and-services/support/product-finder#application=45994%7C44987%7CMRKT22" class="ApplicationListing-link"> <div class="ApplicationListing-imageWrapper mb-3"> <div class="ApplicationListing-imageOverlay"> <span class="btn btn-outline-light ApplicationListing-imageOverlayBtn"> Show products </span> </div> <img src="https://www.camfil.com/dam/images/31074/90468/Air-handling-unit.png?width=400&height=300&bgcolor=white&placeholder=pixelated" data-src="https://www.camfil.com/dam/images/31074/90468/Air-handling-unit.png?width=400&height=300&bgcolor=white" class="d-block img-fluid u-lazyAnimated" alt="MARKER IMAGE Make Up Air Unit" /> </div> <h2 class="ApplicationListing-title u-heading">Make up air unit</h2> <p>Air handling units that provide conditioned outdoor air to industries are a critical parts of facility systems, to create room overpressure and compensate for exhaust air. Make up air needs proper filtration for protecting coils and ducts, people, processes and products.</p> </a> </li> </ul> </div> <!-- Camfil.Feature.Insights/InsightsListComponent start --> <div class="InsightsListComponent col-12 mb-7"> <div class="row"> <div class="col-12"> <h2 class="mb-4 ">Latest articles</h2> </div> <div class="col-md-6 mb-5"> <div class="InsightsListComponent-card"> <a href="/en-sg/insights/commercial-and-public-buildings/camcarb-xg" class="d-block"> <img src="/-/media/images/qbank/__images/products/both-cylinders-8000pxpng.png?h=405&iar=0&w=720&rev=c6a6f415be2c4c609dc4c5eae8506e70&mode=crop&placeholder=pixelated&hash=26C770BD144DFF8D7D01AECA0DDAF8A7" class="img-fluid u-lazyAnimated" alt="" width="720" height="405" data-src="/-/media/images/qbank/__images/products/both-cylinders-8000pxpng.png?mode=crop&rev=c6a6f415be2c4c609dc4c5eae8506e70&iar=0&h=405&w=720&hash=29A3DF62505F336233B79B4305542530" /> </a> <div class="pt-3"> <h2 class="h3"><a href="/en-sg/insights/commercial-and-public-buildings/camcarb-xg">CamCarb XG</a></h2> <span class="InsightsListComponent-dateText u-textSize14 mb-2">Created Monday, 4 September 2023</span> <p class="mb-2">CamCarb XG Engineered for energy and maintenance cost savings in molecular contamination control applications</p> <span class="u-textSize14"> <a href="/en-sg/insights/commercial-and-public-buildings" class="InsightsListComponent-tagBtn mr-2 mb-1">Commercial and public buildings</a> <a href="/en-sg/insights/electronics-and-optics" class="InsightsListComponent-tagBtn mr-2 mb-1">Electronics and optics</a> <a href="/en-sg/insights/food-and-beverage" class="InsightsListComponent-tagBtn mr-2 mb-1">Food and beverage</a> </span> </div> </div> </div> <div class="col-md-6 mb-5"> <div class="InsightsListComponent-card"> <a href="/en-sg/insights/air-quality/future-of-air-filtration-with-anders-sundvik" class="d-block"> <img src="/-/media/images/qbank/__web/insight/future-of-air-filtration-w-a-sundvik-insights-article/adobestock-344131708.jpg?h=405&iar=0&w=720&rev=108779fb842149bc87efe984f64ff59b&mode=crop&placeholder=pixelated&hash=45E6033935678E37626430D08A29CB43" class="img-fluid u-lazyAnimated" alt="" width="720" height="405" data-src="/-/media/images/qbank/__web/insight/future-of-air-filtration-w-a-sundvik-insights-article/adobestock-344131708.jpg?mode=crop&rev=108779fb842149bc87efe984f64ff59b&iar=0&h=405&w=720&hash=BBDD7170B4D33544DFD22AB51697092B" /> </a> <div class="pt-3"> <h2 class="h3"><a href="/en-sg/insights/air-quality/future-of-air-filtration-with-anders-sundvik">Where is the future of air filtration headed?</a></h2> <span class="InsightsListComponent-dateText u-textSize14 mb-2">Created Tuesday, 17 October 2023</span> <p class="mb-2">What are some of the challenges moving forward to achieve healthy and energy-efficient indoor air environments? And what are some of the new air filtration solutions that could potentially become a reality in the years to come? </p> <span class="u-textSize14"> <a href="/en-sg/insights/sustainability" class="InsightsListComponent-tagBtn mr-2 mb-1">Sustainability</a> <a href="/en-sg/insights/commercial-and-public-buildings" class="InsightsListComponent-tagBtn mr-2 mb-1">Commercial and public buildings</a> <a href="/en-sg/insights/air-quality" class="InsightsListComponent-tagBtn mr-2 mb-1">Air quality</a> <a href="/en-sg/insights/innovation-technology-and-research" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Innovation technology and research</a> <button id="plusMinusBtn" class="InsightsListComponent-tagBtn mr-2 mb-1">+</button> </span> </div> </div> </div> <div class="col-md-6 mb-5"> <!-- Camfil.Feature.Insights._smallcard start --> <div class="InsightsListComponent-card"> <div class=""> <div class="pr-3"> <a href="/en-sg/insights/life-science-and-healthcare/history-and-facts-about-hepa-filters" class="d-block"> <img src="/-/media/images/qbank/adobestock-578481401.jpg?h=405&iar=0&w=720&rev=3c9a21469082449cb1c7ca827fad4e14&mode=crop&placeholder=pixelated&hash=30968A6FBB880DE002E1F0AF3CE4ACEF" class="img-fluid u-lazyAnimated" alt="" width="720" height="405" data-src="/-/media/images/qbank/adobestock-578481401.jpg?mode=crop&rev=3c9a21469082449cb1c7ca827fad4e14&iar=0&h=405&w=720&hash=CA90EE9A438A52452A2A51FE844283CD" /> </a> </div> <div class="pt-3"> <h2 class="h3"><a href="/en-sg/insights/life-science-and-healthcare/history-and-facts-about-hepa-filters">No computers or medicine without HEPA filters</a></h2> <span class="InsightsListComponent-dateText u-textSize14 mb-2">Created Monday, 18 September 2023</span> <p class="InsightsListComponent-desc mb-2">Without HEPA filters, we would not be able to manufacture computers, medicine and many other products that are essential in today’s world. But what is the history of these High Efficiency Particulate Air filters and how and where are they used? </p> <p class="InsightsListComponent-tags m-0 u-textSize14"> <a href="/en-sg/insights/life-science-and-healthcare" class="InsightsListComponent-tagBtn mr-2 mb-1">Life science and healthcare</a> </p> </div> </div> </div> <!-- Camfil.Feature.Insights._smallcard start --> </div> <div class="col-md-6 mb-5"> <!-- Camfil.Feature.Insights._smallcard start --> <div class="InsightsListComponent-card"> <div class=""> <div class="pr-3"> <a href="/en-sg/insights/air-quality/camfil-city---a-virtual-world-for-clean-air-solutions" class="d-block"> <img src="/-/media/images/qbank/__web/camfil-city/images/camfil-city-promobox.png?h=405&iar=0&w=720&rev=01b17ce526f0408b8b413c434b0a78b8&mode=crop&placeholder=pixelated&hash=5A7D5254AFF2880BCECFB7B244E5BA28" class="img-fluid u-lazyAnimated" alt="" width="720" height="405" data-src="/-/media/images/qbank/__web/camfil-city/images/camfil-city-promobox.png?mode=crop&rev=01b17ce526f0408b8b413c434b0a78b8&iar=0&h=405&w=720&hash=E5C2C2E8C7797198277930316BB502D6" /> </a> </div> <div class="pt-3"> <h2 class="h3"><a href="/en-sg/insights/air-quality/camfil-city---a-virtual-world-for-clean-air-solutions">Camfil city - a virtual world for clean air solutions. protecting people, processes and our environment</a></h2> <span class="InsightsListComponent-dateText u-textSize14 mb-2">Created Tuesday, 5 July 2022</span> <p class="InsightsListComponent-desc mb-2">Not all people who purchase our products are experts in air filtration and they shouldn’t have to be either. The purpose of Camfil City is to give everyone a chance to learn the basics of what our clean air solutions can do for them. </p> <p class="InsightsListComponent-tags m-0 u-textSize14"> <a href="/en-sg/insights/virus-contamination-control" class="InsightsListComponent-tagBtn mr-2 mb-1">Virus Contamination Control</a> <a href="/en-sg/insights/take-a-breath" class="InsightsListComponent-tagBtn mr-2 mb-1">Take a Breath</a> <a href="/en-sg/insights/manufacturing-and-machinery" class="InsightsListComponent-tagBtn mr-2 mb-1">Manufacturing and machinery</a> <a href="/en-sg/insights/case-studies" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Case studies</a> <a href="/en-sg/insights/sustainability" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Sustainability</a> <a href="/en-sg/insights/air-cleaners-and-air-purifiers" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Air cleaners and air purifiers</a> <a href="/en-sg/insights/commercial-and-public-buildings" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Commercial and public buildings</a> <a href="/en-sg/insights/education-and-experience" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Education and experience</a> <a href="/en-sg/insights/electronics-and-optics" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Electronics and optics</a> <a href="/en-sg/insights/air-quality" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Air quality</a> <a href="/en-sg/insights/food-and-beverage" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Food and beverage</a> <a href="/en-sg/insights/standard-and-regulations" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Standard and regulations</a> <a href="/en-sg/insights/energy-and-power-systems" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Energy and Power Systems</a> <a href="/en-sg/insights/innovation-technology-and-research" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Innovation technology and research</a> <a href="/en-sg/insights/life-science-and-healthcare" id="startTagHidden" class="InsightsListComponent-tagBtn mr-2 mb-1 d-none">Life science and healthcare</a> <button id="plusMinusBtn" class="InsightsListComponent-tagBtn mr-2 mb-1">+</button> </p> </div> </div> </div> <!-- Camfil.Feature.Insights._smallcard start --> </div> <div class="col-md-6 mb-5"> <!-- Camfil.Feature.Insights._smallcard start --> <div class="InsightsListComponent-card"> <div class=""> <div class="pr-3"> <a href="/en-sg/insights/electronics-and-optics/what-are-the-effects-of-corrosion" class="d-block"> <img src="/-/media/images/qbank/__web/industries/electronics_optics/semiconductor/i_semiconductor_.jpg?h=405&iar=0&w=720&rev=-1&mode=crop&placeholder=pixelated&hash=A007573A91664C7566F5821BD0F175FE" class="img-fluid u-lazyAnimated" alt="" width="720" height="405" data-src="/-/media/images/qbank/__web/industries/electronics_optics/semiconductor/i_semiconductor_.jpg?mode=crop&rev=-1&iar=0&h=405&w=720&hash=44CF3F1D6D07924F4728772A80CF2F97" /> </a> </div> <div class="pt-3"> <h2 class="h3"><a href="/en-sg/insights/electronics-and-optics/what-are-the-effects-of-corrosion">What are the effects of corrosion? </a></h2> <span class="InsightsListComponent-dateText u-textSize14 mb-2">Created Tuesday, 18 December 2018</span> <p class="InsightsListComponent-desc mb-2">Some of the effects of corrosion include a significant deterioration of natural and historic monuments. Air pollution causes corrosion, and it’s becoming worse worldwide. Learn how to protect your equipment. </p> <p class="InsightsListComponent-tags m-0 u-textSize14"> <a href="/en-sg/insights/electronics-and-optics" class="InsightsListComponent-tagBtn mr-2 mb-1">Electronics and optics</a> </p> </div> </div> </div> <!-- Camfil.Feature.Insights._smallcard start --> </div> </div> <div class="row"> <div class="col text-center"> </div> </div> </div> <!-- Camfil.Feature.Insights/InsightsListComponent start --> </div> </div> </div> </div> </div> </div> </div> <footer class="Footer"> <a class="Footer-backToTop" href="#top" data-smooth-scroll> <div class="Footer-backToTopIcon"></div> Back to top </a> <div class="Footer-upper"> <div class="container-fluid u-limitPageWidth"> <div class="row"> <div class="col-sm-6"> <div class="row"> <div class="col col-md-3 Footer-contentWrapper"> <strong class="u-heading">About Camfil</strong><ul><li><a href="/en-sg/about-us/people/join-our-team">Job Opportunities</a></li><li><a href="/en-sg/about-us/people">People</a></li><li><a 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