CINXE.COM

AZO Thin Film | Scientific.Net

<!DOCTYPE html> <html lang="en" dir="ltr"> <head> <meta name="format-detection" content="telephone=no"> <meta name="viewport" content="width=device-width, initial-scale=1.0" /> <meta charset="utf-8"> <meta http-equiv="X-UA-Compatible" content="IE=edge"> <link rel="canonical" href="https://www.scientific.net/paper-keyword/azo-thin-film" /> <meta property="og:title" content="AZO Thin Film | Scientific.Net" /> <meta property="og:type" content="website" /> <meta property="og:url" content="https://www.scientific.net/paper-keyword/azo-thin-film" /> <meta property="og:image" content="/Content/app/scinet5/images/metadata_logo.png" /> <meta property="og:image:type" content="image/png" /> <meta property="og:image:width" content="261" /> <meta property="og:image:height" content="260" /> <meta property="og:image:alt" content="Scientific.Net Logo" /> <title>AZO Thin Film | Scientific.Net</title> <link href="/Content/app/scinet5/images/favicon.ico" rel="shortcut icon" /> <link href="/Content/public.min.css?v=BKBihgCkUm340JBGsNjEPtWz8I22CUsubMPC3V1WYzw" rel="stylesheet" /> <link rel="preconnect" href="https://www.google-analytics.com"> <link rel="preconnect" href="https://www.gstatic.com"> <link rel="preconnect" href="https://www.googletagmanager.com"> <link rel="icon" href="/Content/app/scinet5/images/favicon.ico"> <link rel="apple-touch-icon" href="/Content/app/scinet5/images/apple-touch-icon.png"> <link rel="preconnect" href="https://fonts.googleapis.com"> <link rel="preconnect" href="https://fonts.gstatic.com" crossorigin> <link href="https://fonts.googleapis.com/css?family=Open&#x2B;Sans&#x2B;Condensed:300,700%7COpen&#x2B;Sans:300i,400,400i,600,600i,700&amp;display=swap" rel="stylesheet"> <!-- HTML5 shim support of HTML5 elements and media queries --> <!--[if lte IE 9]> <script src="https://oss.maxcdn.com/html5shiv/3.7.3/html5shiv.min.js"></script> <![endif]--> <!-- Google Tag Manager --> <script> (function(w,d,s,l,i){w[l]=w[l]||[];w[l].push({'gtm.start': new Date().getTime(),event:'gtm.js'});var f=d.getElementsByTagName(s)[0], j=d.createElement(s),dl=l!='dataLayer'?'&l='+l:'';j.async=true;j.src= 'https://www.googletagmanager.com/gtm.js?id='+i+dl;f.parentNode.insertBefore(j,f); })(window,document,'script','dataLayer','GTM-T3VDKWV');</script> <!-- End Google Tag Manager --> </head> <body> <noscript> <!-- Google Tag Manager (noscript) --> <iframe src="https://www.googletagmanager.com/ns.html?id=GTM-T3VDKWV" height="0" width="0" style="display:none;visibility:hidden"></iframe> </noscript> <div class="sc-content-container"> <div class="sc-content"> <div class="header-menu-container"> <div class="identity-menu-container header-menu-container-not-logged-in"> <div class="container"> <div class="row"> <ul class="role-menu"> <li class="user-menu between normal-user-menu"> <div class="hdivider-100"></div> <div class="cart-info"> <a href="https://main.scientific.net/Payment/Cart"> <i class="inline-icon cart-icon-white"></i> <span id="cartInfoTotalItemsCount"></span> </a> </div> <div class="user-menu-login-or-register"> <a href="https://main.scientific.net/Account/Registration?ReturnUrl=https%3A%2F%2Fwww.scientific.net%2Fpaper-keyword%2Fazo-thin-film" rel="nofollow"> Registration </a> <a href="https://main.scientific.net/Account/Login?ReturnUrl=https%3A%2F%2Fwww.scientific.net%2Fpaper-keyword%2Fazo-thin-film" rel="nofollow"> Log In </a> </div> </li> </ul> </div> </div> </div> <div class="header-fluid"> <div class="container"> <div class="row"> <div class="block-header"> <div class="logo-block"> <a href="/" class="application-logo inline-icon logo-icon"></a> <div class="burger-menu-button visible-xs"> <div class="hamburger-box"> <div class="hamburger-inner"></div> </div> </div> </div> <div class="menu-and-search-block"> <div class="burger-menu"> <nav class="burger-menu-items"> <div class="public-menu"> <ul> <li><a href="/ForLibraries">For Libraries</a></li> <li><a href="/ForPublication/Paper">For Publication</a></li> <li><a href="/DocuCenter">Downloads</a></li> <li><a href="/news/all">News</a></li> <li><a href="/Home/AboutUs">About Us</a></li> <li><a href="/Home/Contacts">Contact Us</a></li> </ul> </div> </nav> </div> <div class="header-menu-top"> <div class="header-menu-list"> <a href="/ForLibraries">For Libraries</a> <a href="/ForPublication/Paper">For Publication</a> <a href="/DocuCenter">Downloads</a> <a href="/news/all">News</a> <a href="/Home/AboutUs">About Us</a> <a href="/Home/Contacts">Contact Us</a> </div> </div> <div class="search-block"> <input class="search-control" type="search" placeholder="Search" data-url="/Search"> <button class="button button-95 button-grey search-btn button-simple"> <span class="hidden-xs">Search</span> <i class="inline-icon search-icon-grey visible-xs"></i> </button> </div> </div> </div> </div> </div> </div> </div> <div class="container-fluid"> <div class="row"> <div class="banner-new"></div> </div> </div> <div class="content"> <div class="container"> <div class="row content-container"> <div class="left-content col-md-4 col-sm-5"> <div id="content-selector" class="panel-group"> <div id="content-switch" class="clearfix"> <div id="journal-link" class="tab-link active"> <span class="inline-icon content-selector-journal small-icon"></span> <span>Journals</span> </div> <div id="book-link" class="tab-link"> <span class="inline-icon book-icon small-icon"></span> Books </div> </div> <div class="panel"> <div class="panel-heading"> <div data-toggle="collapse" data-parent="#content-selector" data-target="#journal-list" class="collapse-button icon-container" aria-expanded="true"> <span class="inline-icon content-selector-journal small-icon"></span> <div> Journals </div> <span class="inline-icon arrow-right-black no-hover-icon on-focus-arrow-down-black"></span> </div> </div> <div class="panel-collapse row collapse in" id="journal-list" data-link="#journal-link"> <div class="block-border-dotted-list"> <div class="content-selector-title underline-begin"> <p>Engineering Research</p> </div> </div> <a href="/AEF/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Advanced Engineering Forum </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/AMM/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Applied Mechanics and Materials </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/EC/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Engineering Chemistry </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/EI/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Engineering Innovations </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/JBBBE/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Journal of Biomimetics, Biomaterials and Biomedical Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/JERA/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> International Journal of Engineering Research in Africa </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <div class="block-border-dotted-list"> <div class="content-selector-title underline-begin"> <p>Materials Science</p> </div> </div> <a href="/AMR/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Advanced Materials Research </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/DDF/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Defect and Diffusion Forum </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/DFMA/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Diffusion Foundations and Materials Applications </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/JMNM/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Journal of Metastable and Nanocrystalline Materials </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/JNanoR/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Journal of Nano Research </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/KEM/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Key Engineering Materials </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/MSF/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Materials Science Forum </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/NHC/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Nano Hybrids and Composites </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/SSP/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Solid State Phenomena </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <div class="block-border-dotted-list"> <div class="content-selector-title underline-begin"> <p>Engineering Series</p> </div> </div> <a href="/AST/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Advances in Science and Technology </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/CTA/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Construction Technologies and Architecture </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/EH/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Engineering Headway </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> </div> </div> <div class="panel"> <div class="panel-heading"> <div data-toggle="collapse" data-parent="#content-selector" data-target="#book-list" class="collapse-button icon-container" aria-expanded="false"> <span class="inline-icon book-icon small-icon"></span> <div> Books </div> <span class="inline-icon arrow-right-black no-hover-icon on-focus-arrow-down-black"></span> </div> </div> <div class="panel-collapse row collapse" id="book-list" data-link="#book-link"> <div id="topics-header" class="block-border-dotted-list clearfix"> <div class="content-selector-title underline-begin"> <p>Topics</p> </div> <div class="all-books-link"> <a href="/books/all">All Books</a> </div> </div> <a href="/books/topic/materials-science/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Materials Science </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/building-materials/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Building Materials </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/general-engineering/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> General Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/mechanical-engineering/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Mechanical Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/bioscience-and-medicine/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Bioscience and Medicine </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/manufacturing/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Manufacturing </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/electronics/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Electronics </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/construction/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Construction </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/civil-engineering/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Civil Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/mechanics/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Mechanics </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/nanoscience/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Nanoscience </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/computers/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Computers </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/information-technologies/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Information Technologies </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/transportation/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Transportation </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/industrial-engineering/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Industrial Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/books/topic/environmental-engineering/all" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Environmental Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> </div> </div> <div class="panel" id="special-book-collection-panel"> <div class="panel-heading"> <div data-toggle="collapse" data-parent="#content-selector" data-target="#special-book-collection-list" class="collapse-button icon-container" aria-expanded="true"> <span class="inline-icon special-book-collection-icon"></span> <div> Special Book Collections </div> <span class="inline-icon arrow-right-black no-hover-icon on-focus-arrow-down-black"></span> </div> </div> <div class="panel-collapse row collapse in" id="special-book-collection-list"> <div id="special-book-collection-header" class="block-border-dotted-list clearfix"> <div class="content-selector-title"> <p> <span class="inline-icon special-book-collection-icon"></span> Special Book Collections </p> </div> </div> <a href="/FoMSE/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Foundations of Materials Science and Engineering </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/SBC/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Scientific Books Collection </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/SBA/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Scientific Books of Abstracts </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/SC/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Specialized Collections </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> <a href="/RC/Details" class="normal-large-text"> <div class="element-list icon-container"> <div class="element-list-text"> Retrospective Collection </div> <div class="element-list-arrow"> <i class="inline-icon arrow-right-black no-focus-icon on-hover-arrow-left-red"></i> </div> </div> </a> </div> </div> </div> </div> <div class="right-content col-md-8 col-sm-7 col-xs-12"> <div class="bread-crumbs hidden-xs"> <a class="bread-crumbs-first" href="/">Home</a><i class="inline-icon arrow-breadcrumbs"></i><span class="bread-crumbs-second">AZO Thin Film</span></div> <div class="page-name-block underline-begin"> <h1 class="page-name-block-text">Papers by Keyword: AZO Thin Film</h1> </div> <div class="papers-author-content"> <div class="block-search-pagination"> </div> <div class="block-volume-title normal-text-gray"> <p> Paper Title<span>Page</span> </p> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.1169.49">Designing Low-Cost Arduino Powered Spin Coater for Thin Film Deposition</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Mora Narasimha Murthy, G. Ravinder, C.J. Sreelatha </div> </div> <div id="abstractTextBlock578770" class="volume-info volume-info-text volume-info-description"> Abstract: In the present work, we have designed a low-cost spin coater using the Arduino Uno board. The advantage of selecting Ardunio is, it has pulse width modulation (PWM) based pins. Depending on the width of the pulse, the output voltage changes which will intern changes the speed of the DC motor connected to the PWM pin. The thickness of deposited film using spin coater depends on RPM and duration of rotation. The rotation of the substrate during deposition has three stages a gradual increase in RPM, maintaining constant RPM over a while, and a gradual decrease in RPM. All these parameters can be controlled by an Arduino board. An Aluminum doped Zinc Oxide film was deposited on glass substrate using Arduino based spin coater. X-ray diffraction, UV – VIS spectroscopy, and FTIR methods were used as characterization techniques. Hexagonal crystal structure of deposited AZO layer was confirmed by XRD and optical band gap, transparency were calculated by UV-VIS spectroscopy. </div> <div> <a data-readmore="{ block: '#abstractTextBlock578770', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 49 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.651.60">Preparation of AZO Thin Films by Level Sedimentation and its Optical and Electrical Properties</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: De Wen Gao, Tian Lan Yin, Guang Ming Wu, Guang Jian Xing, Yao Ding, Yang Zhou </div> </div> <div id="abstractTextBlock262148" class="volume-info volume-info-text volume-info-description"> Abstract: AZO precursor solution was prepared with dihydrate zinc acetate as raw materials, ethylene glycol monomethyl ether and ethanol as solvent, ethanolamine as a stabilizer, hexahydrate aluminum chloride as the dopant. The AZO thin films were prepared on glass substrates by using homemade liquid level settlement device. The orthogonal design of the experimental conditions was made to optimize the conditions of this method for the preparation of AZO thin films. The films were analyzed by XRD, UV-Vis, AFM, four-probe, step profiler and other methods. The results show that the optimal conditions for preparation of AZO thin films were as follows: the sol concentration was 0.5mol/L, the Al<sup>3+</sup>/Zn<sup>2+</sup> concentration ratio was 4 at%, the drying temperature was 100 °C for 10 minutes, the pretreatment temperature was 450 °C, the coating layers were 20, the level settling velocity was 5 cm/min, the pretreatment time was 10 minutes, the annealing temperature was 550 °C for 2 h. The average transmittance in visible light and the sheet resistance of the AZO thin films were 88% and 536Ω/□, respectively. </div> <div> <a data-readmore="{ block: '#abstractTextBlock262148', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 60 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMM.117-119.1076">Thickness Dependence of Structural and Optical Characteristics of AZO Thin Films for Organic Photovoltaic Cells</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: S.L. Wei, L.H. Zeng, Z.Y. Zhong, J.H. Gu </div> </div> <div id="abstractTextBlock143424" class="volume-info volume-info-text volume-info-description"> Abstract: Aluminum-doped zinc oxide (AZO) thin films with highly (002)-preferred orientation were grown on glass substrates by rf magnetron sputtering. The effect of thickness on structural and optical characteristics of the deposited films were investigated by X-ray diffractometer and spectrophotometer. The results show that the polycrystalline AZO films consist of the hexagonal crystal structures with c-axis as the preferred growth orientation normal to the substrate, and that the thickness significantly affects the crystal structure and optical properties of the thin films. With the increase of thickness, the crystallite size of the films increases, the lattice spacing, dislocation density, micro strain and optical energy gap decrease, and the average transmitance in the wavelength range of the visible spectrum also slightly decreases. </div> <div> <a data-readmore="{ block: '#abstractTextBlock143424', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 1076 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.306-307.1402">The Electrical and Optical Properties of Al-Doped ZnO Thin Films Prepared by Atomic Layer Deposition</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Jia Song, Hai Chuan Mu, Lai Xing Jiang, Gui Lin Yin, Zhen Yu, Dan Nong He </div> </div> <div id="abstractTextBlock125180" class="volume-info volume-info-text volume-info-description"> Abstract: Al-doped ZnO (AZO) thin films (~100nm) with low electrical resistivity and high transparency have been prepared by atomic layer deposition on glass and Si(111) substrates at 200 °C with different doping sequence. The films were systematically analyzed using X-ray diffraction, scanning electron microscope (SEM), UV-vis spectroscopy and Hall measurement. XRD patterns showed that all the films were well crystallized with hexagonal wurtzite structure with preferred orientation along (100) plane. The resisitivity of films deposited with doping sequence of DEZ/TMA/H<sub>2</sub>O was lower than that with other doping sequences. Results from SEM showed a worm-like shape and similar grain sizes of AZO films. Optical transparency of AZO films was measured to be &gt;90% for wavelengths of 400-1000 nm. </div> <div> <a data-readmore="{ block: '#abstractTextBlock125180', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 1402 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/MSF.685.147">Thermal Stability of Aluminum Doped Zinc Oxide Thin Films</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Jin Hua Huang, Rui Qin Tan, Jia Li, Yu Long Zhang, Ye Yang, Wei Jie Song </div> </div> <div id="abstractTextBlock121648" class="volume-info volume-info-text volume-info-description"> Abstract: Transparent conductive oxides are key electrode materials for thin film solar cells. Aluminum doped zinc oxide has become one of the most promising transparent conductive oxide (TCO) materials because of its excellent optical and electrical properties. In this work, aluminum doped zinc oxide thin films were prepared using RF magnetron sputtering of a 4 at% ceramic target. The thermal stability of aluminum doped zinc oxide thin films was studied using various physical and structural characterization methods. It was observed that the electrical conductivity of aluminum doped zinc oxide thin films deteriorated rapidly and unevenly when it was heated up to 350 °C. When the aluminum doped zinc oxide thin films were exposed to UV ozone for a short time before heating up, its thermal stability and large area homogeneity were significantly improved. The present work provided a novel method for improving the durability of aluminum doped zinc oxides as transparent conductive electrodes in thin film solar cells. </div> <div> <a data-readmore="{ block: '#abstractTextBlock121648', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 147 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.239-242.1626">Influence of Substrate Temperature on the Properties of Al-Doped Zinc Oxide Films Prepared by DC Reactive Magnetron Sputtering</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Chang Hu Yang, Zhong Quan Ma </div> </div> <div id="abstractTextBlock108685" class="volume-info volume-info-text volume-info-description"> Abstract: Transparent and conductive c-axis oriented aluminum-doped zinc oxide (AZO) films have been prepared on glass substrate by dc reactive magnetron sputtering process. The structural, optical and electrical properties of the films were characterized by scanning electron microscope (SEM), X-ray diffraction (XRD), UV-Visible spectrophotometer and Hall effect measurement system. As the substrate temperature increased, the results showed that grain size of the AZO films gradually increased, the films had a strong c-axis oriented and the crystallization of films became better. The absorption edge first shows a red shift, and then switches to the blue shift with increasing substrate temperature. Optical band gap of AZO films first decreases and then increases with increasing substrate temperature. Resistivity of AZO films decreases with increasing substrate temperature but the rate of decline of resistivity becomes slow after substrate temperature reaches 250 °C. The carriers concentration of AZO films increases with substrate temperature increase. </div> <div> <a data-readmore="{ block: '#abstractTextBlock108685', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 1626 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.194-196.2334">Stability of AZO Thin Films under the Environment of Hydrogen Plasma</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Qing Nan Zhao, Wen Hui Yuan, Hong Yu Liang, Wei Yuan Wang, Pu Lei Yang, Yu Hong Dong </div> </div> <div id="abstractTextBlock100775" class="volume-info volume-info-text volume-info-description"> Abstract: The textured thin films of Aluminum-doped zinc oxide (AZO), prepared on glass substrates by magnetron sputtering, were treated under the environment of hydrogen plasma in plasma enhanced chemical vapor deposition (PECVD) chamber for different time. The structure and properties of the thin films before and after the treatment were characterized by X-ray diffraction (XRD), Atomic Force Microscopy (AFM), field-emission scanning electron microscope (FESEM), Hall effect measurements and UV-Vis –NIR spectrometer. The results obtained showed that, after the treatment, the crystal structure of the films was not obviously changed, the roughness of the films was reduced, the carrier concentration and Hall mobility of the films increased to a certain saturated level with the treatment time, and the conductivity of the films increased. The transmittance and optical band gap of the AZO films was not affected by plasma treatment. </div> <div> <a data-readmore="{ block: '#abstractTextBlock100775', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 2334 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.194-196.2440">Room Temperature Deposition and Properties of AZO Thin Films by DC Magnetron Sputtering under Different Plasma Power</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Jing Rong Chi, Ping Fan, Guang Xing Liang, Dong Ping Zhang, Xing Min Cai, Zhuang Hao Zheng, Tian Bao Chen </div> </div> <div id="abstractTextBlock99090" class="volume-info volume-info-text volume-info-description"> Abstract: To evaluate the influence of plasma power on the structural, electrical and optical properties of Al-doped ZnO (AZO) films, a set of polycrystalline AZO samples under different plasma power were deposited on glass substrates at room temperature. X-ray diffraction technique (XRD), four-point probe measurements and spectrophotometer were used to characterize these films. XRD shows that all AZO films have a hexagonal wurtzite structure with prominent (002) orientation. With the plasma power increasing, the grain size first increases and then decreases. The largest grain size of 23.6 nm in the films is obtained at the plasma power of 123 W. The average optical transmittance of AZO films is over 80% in the visible region. The lowest resistivity of 1.0×10<sup>-3</sup>Ω•cm is obtained under the plasma power of 220 W. </div> <div> <a data-readmore="{ block: '#abstractTextBlock99090', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 2440 </div> </div> <div class="item-block"> <div class="item-link"> <a href="/AMR.152-153.868">Studying on Preparation of AZO Thin Films with Sol-Gel Method</a> </div> <div class="item-link volume-authors"> <div class="semibold-middle-text"> Authors: Xiu Ling Lv, Yu Bo Dou, Juan Wang, Ying Xu </div> </div> <div id="abstractTextBlock84009" class="volume-info volume-info-text volume-info-description"> Abstract: Al doped ZnO thin films(AZO films) was prepared by sol-gel method. The influence of Parameters of different processes on the crystallization properties, micro-morphology and optical properties of this kind of films were studied, using by X-ray diffractometer, filed emission stereoscan, spectral photometer, hall admeasuring apparatus. The results indicated that the crystallization properties, micro-morphology and optical properties of Al doped ZnO films were best on the condition that the sol density was 0.5mol/L, hat treatment temperature is 600 and there is a 8-layer coating. </div> <div> <a data-readmore="{ block: '#abstractTextBlock84009', lines: 2, expandText: '...more', collapseText: '...less' }"></a> </div> <div class="page-number semibold-large-text"> 868 </div> </div> <div class="block-bottom-pagination"> <div class="pager-info"> Showing 1 to 9 of 9 Paper Titles </div> </div> </div> </div> </div> </div> </div> <div class="social-icon-popup"> <a href="https://www.facebook.com/Scientific.Net.Ltd/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon facebook-popup-icon social-icon"></i></a> <a href="https://twitter.com/Scientific_Net/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon twitter-popup-icon social-icon"></i></a> <a href="https://www.linkedin.com/company/scientificnet/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon linkedin-popup-icon social-icon"></i></a> </div> </div> <div class="sc-footer"> <div class="footer-fluid"> <div class="container"> <div class="row"> <div class="footer-menu col-md-12 col-sm-12 col-xs-12"> <ul class="list-inline menu-font"> <li><a href="/ForLibraries">For Libraries</a></li> <li><a href="/ForPublication/Paper">For Publication</a></li> <li><a href="/insights" target="_blank">Insights</a></li> <li><a href="/DocuCenter">Downloads</a></li> <li><a href="/Home/AboutUs">About Us</a></li> <li><a href="/PolicyAndEthics/PublishingPolicies">Policy &amp; Ethics</a></li> <li><a href="/Home/Contacts">Contact Us</a></li> <li><a href="/Home/Imprint">Imprint</a></li> <li><a href="/Home/PrivacyPolicy">Privacy Policy</a></li> <li><a href="/Home/Sitemap">Sitemap</a></li> <li><a href="/Conferences">All Conferences</a></li> <li><a href="/special-issues">All Special Issues</a></li> <li><a href="/news/all">All News</a></li> <li><a href="/read-and-publish-agreements">Read &amp; Publish Agreements</a></li> </ul> </div> </div> </div> </div> <div class="line-footer"></div> <div class="footer-fluid"> <div class="container"> <div class="row"> <div class="col-xs-12"> <a href="https://www.facebook.com/Scientific.Net.Ltd/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon facebook-footer-icon social-icon"></i></a> <a href="https://twitter.com/Scientific_Net/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon twitter-footer-icon social-icon"></i></a> <a href="https://www.linkedin.com/company/scientificnet/" target="_blank" rel="noopener" title="Scientific.Net"><i class="inline-icon linkedin-footer-icon social-icon"></i></a> </div> </div> </div> </div> <div class="line-footer"></div> <div class="footer-fluid"> <div class="container"> <div class="row"> <div class="col-xs-12 footer-copyright"> <p> &#169; 2024 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied. <br />Scientific.Net is a registered trademark of Trans Tech Publications Ltd. </p> </div> </div> </div> </div> </div> <a class="scrollTop inline-icon scroll-top-icon" href="#" style="display: none"></a> </div> <script src="/Scripts/public.min.js?v=BtSq2PJEHRTW2PekpQGgIQKs7-OSPiKhsoI9rMs6kTU"></script> <script asp-render-component-scripts> Scinet.public = (function () { function loadCartInfo(onLoad) { var formatCartItemCount = function (count) { var format = (count > 1 || count === 0) ? "{0} items" : "{0} item"; $("#cartInfoTotalItemsCount").html(Scinet.stringFormat(format, count)); }, cookieCartItemCount = Cookies.get("Scinet5.CartItemsCount"); if (onLoad && cookieCartItemCount != null) { formatCartItemCount(parseInt(cookieCartItemCount, 10)); } else { $.ajax({ url: "/Cart/GetItemsCount", cache: false }) .done( function (count) { Cookies.set("Scinet5.CartItemsCount", count, { domain: ".scientific.net", secure: true }); formatCartItemCount(count); }); } } return { loadCartInfo: loadCartInfo }; })(); $(function () { Scinet.public.loadCartInfo(true); $("[data-add-book-to-cart]").on("click", function (e) { e.preventDefault(); var data = $(this).data("add-book-to-cart"); console.log(data); var url = "/Cart/AddBook"; $.post(url, data) .done( function () { Scinet.public.loadCartInfo(); $("#addToCart").modal(); }) .fail( function (xhr) { Scinet.error(xhr.responseText); }); }) }); </script> <script> var $buoop = { required: { e: 11, f: -6, o: -6, s: -3, c: -6 }, insecure: false, unsupported: false, api: 2019.11, reminder: 0, onshow: function () { window.browserUpdateOutdated = true; } }; function $buo_f() { var e = document.createElement("script"); e.src = "//browser-update.org/update.min.js"; document.body.appendChild(e); }; try { document.addEventListener("DOMContentLoaded", $buo_f, false) } catch (e) { window.attachEvent("onload", $buo_f) } </script> <!-- IE polyfills--> <!--[if lt IE 10]> <script src="/Scripts/lib/flexibility/flexibility.js"></script> <script> flexibility(document.documentElement); </script> <![endif]--> <script> window.clientErrorLogActionUrl = "/Errors/LogClientError"; </script> </body> </html>

Pages: 1 2 3 4 5 6 7 8 9 10