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margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">金刚石具有适用于各种量子和电子技术的卓越材料特性。然而，单晶金刚石的异质外延生长仍然有限，阻碍了金刚石基技术的集成和发展。为此，芝加哥大学的研究人员将单晶金刚石膜直接键合到各种材料上，包括硅、熔融石英、蓝宝石、热氧化物和铌酸锂。这种键合工艺结合了定制的膜合成、转移和干表面功能化，可最大程度地减少污染，同时提供接近统一产量和可扩展性的途径。</p> <p id="3467G9O7" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">研究人员生成的键合晶体膜厚度低至10纳米，界面区域为亚纳米，厚度变化范围为 200 x 200 μm2。测量了150纳米厚的键合膜中氮空位中心的自旋相干时间T2，高达623 ± 21 μs，适用于高级量子应用。展示了将高品质因数纳米光子腔与金刚石异质结构集成的多种方法，突出了该平台在量子光子应用中的多功能性。此外，还展示了这种超薄金刚石膜与全内反射荧光 (TIRF) 显微镜兼容，这使得相干金刚石量子传感器能够与活细胞连接，同时抑制不需要的背景发光。本文展示的流程提供了一套完整的工具包，用于合成用于量子和电子技术的异质金刚石基混合系统。</p> <p id="3467G9O8" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">相关研究成果以“Direct-bo<em></em>nded diamond membranes for heterogeneous quantum and electro<em></em>nic technologies”为题发表于《Nature Communications》。</p> <p id="3467G9O9" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;"><strong style="box-sizing: inherit;">/ 图文导读 /</strong></p> <p class="f_center" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: center; line-height: 20px; font-size: 16px; color: rgb(102, 102, 102); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; text-indent: 0px;"><img src="https://nimg.ws.126.net/?url=http%3A%2F%2Fdingyue.ws.126.net%2F2024%2F1023%2F80099a1ej00slsxr4005ld200ji00c8g00id00bi.jpg&thumbnail=660<em></em>x2147483647&quality=80&type=jpg" style="box-sizing: inherit; border: 0px; max-width: 100%; margin-bottom: 10px;" alt="" /></p> <p id="3467G9OB" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">图1. 等离子活化金刚石膜键合示意图。</p> <p class="f_center" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: center; line-height: 20px; font-size: 16px; color: rgb(102, 102, 102); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; text-indent: 0px;"><img src="https://nimg.ws.126.net/?url=http%3A%2F%2Fdingyue.ws.126.net%2F2024%2F1023%2F80cbfcc8j00slsxr500gad200jd00kpg00id00jm.jpg&thumbnail=660<em></em>x2147483647&quality=80&type=jpg" style="box-sizing: inherit; border: 0px; max-width: 100%; margin-bottom: 10px;" alt="" /></p> <p id="3467G9OD" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">图2. 粘合膜的特性。</p> <p class="f_center" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: center; line-height: 20px; font-size: 16px; color: rgb(102, 102, 102); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; text-indent: 0px;"><img src="https://nimg.ws.126.net/?url=http%3A%2F%2Fdingyue.ws.126.net%2F2024%2F1023%2Fb91ca63fj00slsxr5008md200jl00byg00id00b7.jpg&thumbnail=660<em></em>x2147483647&quality=80&type=jpg" style="box-sizing: inherit; border: 0px; max-width: 100%; margin-bottom: 10px;" alt="" /></p> <p id="3467G9OF" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">图3. 与直接键合膜的纳米光子集成。</p> <p class="f_center" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: center; line-height: 20px; font-size: 16px; color: rgb(102, 102, 102); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; text-indent: 0px;"><img src="https://nimg.ws.126.net/?url=http%3A%2F%2Fdingyue.ws.126.net%2F2024%2F1023%2Ff9b423d7j00slsxr60085d200jj00dug00id00d0.jpg&thumbnail=660<em></em>x2147483647&quality=80&type=jpg" style="box-sizing: inherit; border: 0px; max-width: 100%; margin-bottom: 10px;" alt="" /></p> <p id="3467G9OH" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">图4. 流道中的NV −中心和表面附着的目标分子和细胞的成像。</p> <p id="3467G9OI" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;"><strong style="box-sizing: inherit;">/ 结论 /</strong></p> <p id="3467G9OJ" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">研究人员展示了创建基于金刚石的异质材料和技术的完整工艺流程。键合膜结合了同位素工程、原位掺杂和精确的厚度控制，同时保持了量子技术所必需的表面形貌、平整度和晶体质量。我们生成的键合连续晶体膜厚度仅为10纳米，远低于之前的演示，可与最先进的微电子技术中的材料几何形状相媲美。HRTEM揭示了有序的亚纳米键合界面，PL 测量表明所有托管色心都具有高信噪比，氮空位中心保持了类似块体的自旋相干性。该工艺与纳米结构基板兼容，占地面积小，不需要键合后蚀刻，从而确保了预先存在的目标基板结构的完整性。键合膜可承受多个后续纳米制造步骤，方法与包括晶圆键合在内的标准半导体制造工艺兼容。</p> <p id="3467G9OK" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">至关重要的是，通过避免使用中间粘合材料，研究人员生成了适用于量子光子学和量子生物传感的最佳材料异质结构。通过TiO2沉积或直接金刚石图案化和蚀刻来集成高品质因数纳米光子学，证明了量子光子学的技术适用性。这些基于金刚石的异质结构具有最小的光损耗，是片上纳米光子集成和自旋光子耦合装置的理想候选者。此外，证明了金刚石膜键合通过将流动通道与金刚石膜集成，为量子生物传感和成像开辟了新的实验可能性。荧光分子和 NV−中心的同时分辨率将能够准确识别所需传感目标的近端 NV−传感器。超薄金刚石膜还允许TIRF照明，大大提高了局部传感目标的信号对比度，同时最大限度地减少了不必要的激光激发。</p> <p id="3467G9OL" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">该制造工艺为量子技术开辟了广泛的基于金刚石的异质平台。金刚石与 LiNbO3等电光和压电材料的集成将为片上电可重构非线性量子光子学铺平道路，并允许研究量子自旋声子相互作用。金刚石键合解锁了与其他固态量子比特、磁共振混合系统或超导平台的更多耦合可能性。此外，将这种金刚石膜与已建立的高度相干近表面 NV − 中心的技术相结合，将产生超灵敏的金刚石探针，该探针专为研究分子结合分析、二维二硫属化物 (TMD) 和薄膜磁性材料而优化。最后，由于高热导率、大带隙和高临界电场，键合金刚石膜在高功率电子器件中有着广泛的应用。</p> <p id="3467G9OM" style="box-sizing: inherit; margin: 34px 0px; padding: 0px; text-align: justify; color: rgb(64, 64, 64); font-family: Arial, "Hiragino Sans GB", STHeiti, "Helvetica Neue", Helvetica, "Microsoft Yahei", "WenQuanYi Micro Hei", sans-serif; font-size: 18px; text-indent: 0px;">原文信息：Guo, X., Xie, M., Addhya, A. et al. Direct-bo<em></em>nded diamond membranes for heterogeneous quantum and electro<em></em>nic technologies. Nat Commun 15, 8788 (2024). https://doi.org/10.1038/s41467-024-53150-3</p></div> </div> <div class="award"><div onclick="Go('http://www.casmita.com/member/award.php?mid=21&itemid=16972');">打赏</div></div><div id="comment" style="display:;"> <div class="block-head"><a href="http://www.casmita.com/comment/index.php?mid=21&itemid=16972"><b id="comment_count" class="px16 f_red">0</b> 条评论</a></div> <div id="comment_main"><div></div></div> </div> <script type="text/javascript" src="http://www.casmita.com/file/script/comment.js"></script> <div class="related"> <a href="http://www.casmita.com/news/search.php?kw="></a><a href="http://www.casmita.com/news/index.php?catid=5"></a> <div class="bui-box single-mode"> <div class="single-mode-rbox"> <div class="single-mode-rbox-inner"> <div class="title-box"><a href="http://www.casmita.com/news/202502/12/18001.html" target="_blank" class="link">前瞻|重庆大学蒋华平将出席“2025功率半导体制造及供应链高峰论坛”并做报告</a></div> <div class="bui-box tags-bar"></div> <div class="bui-box 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