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srcSet="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=100 100w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=320 320w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=500 500w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=576 576w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=750 750w, 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https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?mw=1920 1920w" src="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/cleanroom/47006-cleanroom-assembly.jpg?h=1284&iar=0&w=1920"/></div></div><div class="hero-banner-content-container has-quick-links "><div class="fluid-grid"><div class="hero-banner-content translate-y-0 opacity-100 "><div class="component breadcrumbs--hero-banner"><nav><ol><li class="mobile-back-item "><svg width="6" height="9" viewBox="0 0 6 9" xmlns="http://www.w3.org/2000/svg"><path d="M4.52.571.887 4.208H.884l-.606.606 4.243 4.242.606-.606-3.635-3.636 3.635-3.637L4.52.571Z" fill="currentColor" fill-rule="nonzero"></path></svg><a title="Home" href="/en">Home</a><svg width="6" height="9" viewBox="0 0 6 9" xmlns="http://www.w3.org/2000/svg"><path d="M1.52 9.056 5.157 5.42h.001l.606-.606L1.521.57l-.606.606L4.55 4.814.915 8.45l.606.606Z" fill="currentColor" fill-rule="nonzero"></path></svg></li><li class=" current-page-item"><a title="Technology" href="/en/technology">Technology</a></li></ol></nav></div><h1 class="hero-banner-title page-title" role="heading">Our technology</h1><p role="heading" class="hero-banner-subtitle page-subtitle scrollbar-hide max-h-[198px]">Lithography – using light to print tiny patterns on silicon – is a fundamental step in mass producing microchips</p><div class="hero-banner-comp"><div class="hero-banner-comp-line"><svg class="h-full w-full object-cover object-center " role="img" xlink:title="long arrow"><use href="/images/icons/long-arrow.svg#long-arrow"></use></svg></div><label class="hero-banner-comp-text"><span class="">01 / 36</span></label></div></div></div></div></div><div class="quick-link-list quick-link-list--large bg-dark"><div class="guttered-box"><div class="guttered"><h3 class="quick-link-list-title">Quick links</h3><div class="quick-links-container"><div class="quick-link-container"><a title="" target="" class="quick-link " href="/en/technology/all-about-microchips"><p class="quick-link-text">All about chips</p></a></div><div class="quick-link-container"><a title="" target="" class="quick-link " href="/en/technology/lithography-principles"><p class="quick-link-text">Lithography principles</p></a></div><div class="quick-link-container"><a title="" target="" class="quick-link " href="/en/technology/how-we-innovate"><p class="quick-link-text">How we innovate</p></a></div><div class="quick-link-container"><a title="" target="" class="quick-link " href="/en/technology/software"><p class="quick-link-text">Software</p></a></div></div></div></div></div></div><div class="component col-span-12 bg-color-gray-100 bg-light custom-container rte-container fluid-grid"><div class="component col-span-12 md:col-start-3 md:col-span-8 xl:col-start-4 xl:col-span-6 font-weight--light custom-rich-text "><div><h4 class="rte-align-center">An innovation leader in the semiconductor industry, ASML’s lithography solutions have been making giant leaps on this tiny scale since 1984. In our technology, hardware meets software to provide a holistic approach to mass producing patterns on silicon.</h4></div></div></div><div class="component itb itb--default col-span-12 undefined"><div class="itb-text-col component-wrapper"><div class="component col-span-12 mb-6 font-weight--medium custom-rich-text "><div><h4>All about chips</h4></div></div><div class="component col-span-12 mb-6 custom-rich-text "><div><p>Microchips go by many names: integrated circuits, semiconductor chips, computer chips or, most simply, chips. Whatever you call them, these tiny pieces of silicon are the foundation of the digital world. They make our smartphones, cars, medical equipment and so many other now-common devices possible – and the tinier they get, the more advanced technology we realize in the everyday world. They may be small, but their impact is tremendous.</p></div></div><div class="component primary-btn col-span-12"><a title="" target="" class="btn button--box-lightblue " rel="noopener noreferer" href="/en/technology/all-about-microchips"><span class="text-span">Learn about chips</span></a></div></div><div class="itb-media-col component-wrapper"><div class="itb-img"><img alt="A wafer closeup seen through a DUV lens." width="1920" height="1080" loading="lazy" title="A wafer closeup seen through a DUV lens." style="object-position:50% 50%" sizes="(max-width: 99px) 100px, (max-width: 319px) 320px, (max-width: 499px) 500px, (max-width: 575px) 575px, 1200px" srcSet="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?mw=100 100w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?mw=320 320w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?mw=500 500w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?mw=576 576w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?mw=1200 1200w" src="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/lithography-elements/wafer-closeup-duv-lens.jpg?h=1080&iar=0&w=1920"/></div></div></div><div class="component itb itb--default col-span-12 undefined"><div class="itb-text-col component-wrapper"><div class="component col-span-12 mb-6 font-weight--medium custom-rich-text "><div><h4>Principles of lithography</h4></div></div><div class="component col-span-12 mb-6 custom-rich-text "><div><p>A lithography system is essentially a projection system. Light is projected through a blueprint of the pattern that will be printed (known as a ‘mask’ or ‘reticle’). The blueprint is four times larger than the intended pattern on the chip. With the pattern encoded in the light, the system’s optics shrink and focus the pattern onto a photosensitive silicon wafer. After the pattern is printed, the system moves the wafer slightly and makes another copy on the wafer.</p><p><br /></p><p>This process is repeated until the wafer is covered in patterns, completing one layer of the wafer’s chips. To make an entire microchip, this process will be repeated 100 times or more, laying patterns on top of patterns. The size of the features to be printed varies depending on the layer, which means that different types of lithography systems are used for different layers – from our latest-generation EUV systems for the smallest features to older DUV systems for the largest.</p></div></div><div class="component primary-btn col-span-12"><a title="" target="" class="btn button--box-lightblue " rel="noopener noreferer" href="/en/technology/lithography-principles"><span class="text-span">Learn about lithography</span></a></div></div><div class="itb-media-col component-wrapper"><div class="itb-img"><img alt="A wafer is exposed inside an ASML EUV lithography machine" width="1920" height="1080" loading="lazy" title="A wafer is exposed inside an ASML EUV lithography machine" style="object-position:66.80% 49.11%" sizes="(max-width: 99px) 100px, (max-width: 319px) 320px, (max-width: 499px) 500px, (max-width: 575px) 575px, 1200px" srcSet="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?mw=100 100w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?mw=320 320w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?mw=500 500w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?mw=576 576w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?mw=1200 1200w" src="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/43681-inside-nxe3400-waferstage-during-exposure.jpg?h=1080&iar=0&w=1920"/></div></div></div><div class="component itb itb--default col-span-12 undefined"><div class="itb-text-col component-wrapper"><div class="component col-span-12 mb-6 font-weight--medium custom-rich-text "><div><h4>Software</h4></div></div><div class="component col-span-12 mb-6 custom-rich-text "><div><p>If our hardware innovations are Batman, then software is its Robin. Even though you might know of ASML as a hardware company, we actually have one of the world’s largest and most pioneering software communities. It would be impossible for our lithography systems to manufacture chips at such increasingly small dimensions without the software we develop. As a result, our lithography systems are now a hybrid of high-tech hardware and advanced software. Our development teams work across a range of coding practices, providing innovative solutions to the intricate problems that affect the chipmaking systems at the heart of the electronics industry.</p></div></div><div class="component primary-btn col-span-12"><a title="" target="" class="btn button--box-lightblue " rel="noopener noreferer" href="/en/technology/software"><span class="text-span">Learn about software</span></a></div></div><div class="itb-media-col component-wrapper"><div class="itb-img"><img alt="Lines of colored code on a black background." width="1920" height="1080" loading="lazy" title="Lines of colored code on a black background." style="object-position:50% 50%" sizes="(max-width: 99px) 100px, (max-width: 319px) 320px, (max-width: 499px) 500px, (max-width: 575px) 575px, 1200px" srcSet="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?mw=100 100w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?mw=320 320w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?mw=500 500w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?mw=576 576w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?mw=1200 1200w" src="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/technology/software/lines-of-code.jpg?h=1080&iar=0&w=1920"/></div></div></div><div class="component related-content related-content--contents col-span-12 bg-color-primary bg-dark"><div class="related-content-contents"><div class="related-content-container"><div 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title="A close-up picture of a layer of water between our lithography system’s optics and a silicon wafer." srcSet="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/news/stories/2023/duv-immersion/immersion_553.jpg?mw=100 100w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/news/stories/2023/duv-immersion/immersion_553.jpg?mw=320 320w, https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/news/stories/2023/duv-immersion/immersion_553.jpg?mw=500 500w" src="https://edge.sitecorecloud.io/asmlnetherlaaea-asmlcom-prd-5369/media/project/asmlcom/asmlcom/asml/images/news/stories/2023/duv-immersion/immersion_553.jpg?h=1080&iar=0&w=1920"/><div class="related-content-card-body"><p class="related-content-card-subtitle">August 02, 2023</p><span class="related-content-card-title">How immersion lithography saved Moore’s 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Light is projected through a blueprint of the pattern that will be printed (known as a ‘mask’ or ‘reticle’). The blueprint is four times larger than the intended pattern on the chip. With the pattern encoded in the light, the system’s optics shrink and focus the pattern onto a photosensitive silicon wafer. After the pattern is printed, the system moves the wafer slightly and makes another copy on the wafer.\u003c/p\u003e\u003cp\u003e\u003cbr /\u003e\u003c/p\u003e\u003cp\u003eThis process is repeated until the wafer is covered in patterns, completing one layer of the wafer’s chips. To make an entire microchip, this process will be repeated 100 times or more, laying patterns on top of patterns. 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