Echo System - Onto Innovation

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d="M427.23,244.84a2,2,0,0,0-1.38.54,1.75,1.75,0,0,0-.58,1.32,1.72,1.72,0,0,0,.58,1.32,2,2,0,0,0,2.76,0,1.72,1.72,0,0,0,.58-1.32,1.75,1.75,0,0,0-.58-1.32A1.93,1.93,0,0,0,427.23,244.84Z" transform="translate(-191.68 -244.84)" /> <rect x="234.15" y="6.72" width="2.75" height="17.92" /> <path d="M445.79,252.06a6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8h-2.66v17.92h2.75V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09a8.44,8.44,0,0,0-.76-3.79A5.12,5.12,0,0,0,445.79,252.06Z" transform="translate(-191.68 -244.84)" /> <path d="M465.51,252.06a6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8H454.2v17.92H457V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09a8.3,8.3,0,0,0-.76-3.79A5.12,5.12,0,0,0,465.51,252.06Z" transform="translate(-191.68 -244.84)" /> <path d="M485.09,252.48a7.86,7.86,0,0,0-11.35,3.24,11,11,0,0,0-1,4.89,10.86,10.86,0,0,0,1,4.85,7.86,7.86,0,0,0,14.2,0,10.86,10.86,0,0,0,1-4.85,11,11,0,0,0-1-4.89A7.77,7.77,0,0,0,485.09,252.48Zm.55,11.47a5.63,5.63,0,0,1-1.77,2.48,5.31,5.31,0,0,1-6.06,0A5.63,5.63,0,0,1,476,264a9.56,9.56,0,0,1-.57-3.34,9.66,9.66,0,0,1,.57-3.35,5.72,5.72,0,0,1,1.77-2.51,5.31,5.31,0,0,1,6.06,0,5.72,5.72,0,0,1,1.77,2.51,9.66,9.66,0,0,1,.57,3.35A9.56,9.56,0,0,1,485.64,264Z" transform="translate(-191.68 -244.84)" /> <polygon points="307.68 21 307.49 21 302.54 6.72 299.56 6.72 306.18 24.64 308.98 24.64 315.61 6.72 312.62 6.72 307.68 21" /> <path d="M521.45,252.36a6.38,6.38,0,0,0-2.19-.83,11,11,0,0,0-2-.21,10.5,10.5,0,0,0-2.74.37A7,7,0,0,0,512,253a6.33,6.33,0,0,0-1.87,2.55l2.61.94a5.05,5.05,0,0,1,1.58-1.85,5,5,0,0,1,3.09-.86,3.81,3.81,0,0,1,2.84,1,3.63,3.63,0,0,1,.94,2.68v.09a1,1,0,0,1-.47.94,4.06,4.06,0,0,1-1.5.37l-2.65.33c-.83.11-1.66.25-2.48.43a8.86,8.86,0,0,0-2.25.83,4.35,4.35,0,0,0-1.62,1.51,4.65,4.65,0,0,0-.61,2.5,5.09,5.09,0,0,0,3,4.86,7.21,7.21,0,0,0,3.09.65,6.75,6.75,0,0,0,2.65-.47,5.52,5.52,0,0,0,1.74-1.13,5,5,0,0,0,.93-1.25h.14v2.43h2.75V257.67a7.06,7.06,0,0,0-.7-3.41A4.83,4.83,0,0,0,521.45,252.36Zm-.3,10.63a4.16,4.16,0,0,1-.58,2.13,4.38,4.38,0,0,1-1.7,1.66,5.47,5.47,0,0,1-2.76.64,4.66,4.66,0,0,1-2.71-.73,2.42,2.42,0,0,1-1.07-2.16,2.38,2.38,0,0,1,.56-1.66,3.44,3.44,0,0,1,1.5-.92,10.1,10.1,0,0,1,2-.45l1.16-.15,1.48-.21a11.62,11.62,0,0,0,1.35-.29,1.59,1.59,0,0,0,.77-.38Z" transform="translate(-191.68 -244.84)" /> <path d="M536.53,267a5,5,0,0,1-.75.05,3.38,3.38,0,0,1-1.15-.19,1.71,1.71,0,0,1-.88-.77,3.5,3.5,0,0,1-.35-1.75V253.89h3.83v-2.33H533.4v-4.3h-2.75v4.3h-2.71v2.33h2.71v11.2a4.33,4.33,0,0,0,.73,2.59,4.47,4.47,0,0,0,1.84,1.53,5.55,5.55,0,0,0,2.28.5,6.23,6.23,0,0,0,1.27-.11,5.48,5.48,0,0,0,.79-.22l-.56-2.47Z" transform="translate(-191.68 -244.84)" /> <path d="M544.36,244.84a1.93,1.93,0,0,0-1.38.54,1.75,1.75,0,0,0-.58,1.32A1.72,1.72,0,0,0,543,248a2,2,0,0,0,2.76,0,1.72,1.72,0,0,0,.58-1.32,1.75,1.75,0,0,0-.58-1.32A1.93,1.93,0,0,0,544.36,244.84Z" transform="translate(-191.68 -244.84)" /> <rect x="351.28" y="6.72" width="2.75" height="17.92" /> <path d="M562.69,252.48a7.85,7.85,0,0,0-11.35,3.24,11,11,0,0,0-1,4.89,10.86,10.86,0,0,0,1,4.85,7.86,7.86,0,0,0,14.2,0,10.86,10.86,0,0,0,1-4.85,11,11,0,0,0-1-4.89A7.77,7.77,0,0,0,562.69,252.48Zm.54,11.47a5.61,5.61,0,0,1-1.76,2.48,4.71,4.71,0,0,1-3,.95,4.76,4.76,0,0,1-3-.95,5.61,5.61,0,0,1-1.76-2.48,9.56,9.56,0,0,1-.57-3.34,9.66,9.66,0,0,1,.57-3.35,5.7,5.7,0,0,1,1.76-2.51,4.76,4.76,0,0,1,3-.95,4.71,4.71,0,0,1,3,.95,5.7,5.7,0,0,1,1.76,2.51,9.66,9.66,0,0,1,.57,3.35A9.56,9.56,0,0,1,563.23,264Z" transform="translate(-191.68 -244.84)" /> <path d="M584.5,254.3a5.12,5.12,0,0,0-2.12-2.24,6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8h-2.66v17.92h2.75V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09A8.44,8.44,0,0,0,584.5,254.3Z" transform="translate(-191.68 -244.84)" /> <path d="M590.2,264.36a5.53,5.53,0,1,1,5.53,5.54A5.53,5.53,0,0,1,590.2,264.36Zm9.74,0a4.21,4.21,0,1,0-4.21,4.21A4.21,4.21,0,0,0,599.94,264.36Zm-6.14-2.61h2.58a1.62,1.62,0,0,1,1.56,1.63,1.73,1.73,0,0,1-.83,1.5l1,2h-1.23l-.89-1.72h-1.11v1.72H593.8ZM596,264.3a.86.86,0,0,0,.76-.92.74.74,0,0,0-.73-.8h-1.06v1.72Z" transform="translate(-191.68 -244.84)" /> </g> <g class="onto"> <path d="M464.51,289.31a39.18,39.18,0,1,0,39.18,39.18A39.22,39.22,0,0,0,464.51,289.31Zm0,55.47a16.29,16.29,0,1,1,16.29-16.29A16.31,16.31,0,0,1,464.51,344.78ZM230.86,289.31h-.1A39.18,39.18,0,1,0,270,328.49v0A39.22,39.22,0,0,0,230.86,289.31Zm0,55.47a16.29,16.29,0,0,1-.1-32.58h.1a16.3,16.3,0,0,1,16.29,16.26v0A16.31,16.31,0,0,1,230.86,344.78Zm124.49-15.37v37.5H332.47V329.44a16.32,16.32,0,0,0-16.3-16.27H304v53.74H281.13V290.29h35a39.22,39.22,0,0,1,39.18,39.12ZM417,294.2v19H367.73V290.29l22.89-11.57V294.2Zm0,50.58v22.89H406.91a39.22,39.22,0,0,1-39.17-39.13h0V321h22.89v7.53a16.31,16.31,0,0,0,16.29,16.26Z" 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<h4>Products for Wafer and Panel Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element System</h3> <p> Transmission and reflection based FTIR measurement </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/logic-foundry">Logic/Foundry</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/logic-foundry" class="overview"> <h3>Challenges for Logic/Foundry Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Etch Profile</li> <li>Patterning</li> <li>Pre/Post CMP</li> <li>Thin Film Metrology</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Logic/_resizeSmall/Logic-cpu-chip-processor.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Logic/Foundry Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD and film analysis </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/memory">Memory</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/memory" class="overview"> <h3>Challenges for Memory Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>3D NAND Process Control</li> <li>DRAM High Bandwidth Memory TSV</li> <li>DRAM Front-end Process Control</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Memory/_resizeSmall/Memory-RAM-storage.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for Memory Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/rf-mems">RF/MEMS</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/rf-mems" class="overview"> <h3>Challenges for RF/MEMS</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Mass Load Metrology</li> <li>RF Filter Metrology</li> <li>SAW/BAW Filter Inspection</li> <li>Cavity Integrity</li> <li>Substrate Handling</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/RF/_resizeSmall/RF-5G.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for RF Module and MEMS Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris S System</h3> <p> Advanced film and OCD metrology system </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/industrial-scientific">Industrial/Scientific</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/industrial-scientific" class="overview"> <h3>Challenges for Industrial and Scientific</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Aerospace and Defense</li> <li>Aviation and Automotive</li> <li>Biomedical</li> <li>Optics and Telescope Manufacturing</li> <li>Semiconductors</li> <li>Vision Systems</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Industrial-Scientific/_resizeSmall/HiRISE-in-Space-Rendering.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Visit the 4D Technology website to learn more</h4> <div class="grid"> <a href="https://www.4dtechnology.com/"> <h3>4D Technology website</h3> <p> A business of Onto Innovation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/imaging">Image Sensors</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/imaging" class="overview"> <h3>Challenges for Image Sensors</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>CMOS Sensor</li> <li>VCSELs</li> <li>Residue</li> <li>Cover Glass</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Imaging/_resizeSmall/Image-sensor-light-sensor-of-digital-camera.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Image Sensor Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD Metrology </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced film & OCD metrology system </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/advanced-packaging">Advanced Packaging</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/advanced-packaging" class="overview"> <h3>Challenges for Advanced Packaging</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Die Shift</li> <li>Fine Pitch RDL</li> <li>Bump metrology and analytics</li> <li>Non-Visual Defects</li> <li>Die crack detection</li> <li>Warped Substrates</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Fan-Out/_resizeSmall/fanout-top-view.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Advanced Packaging</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Panel lithography system optimized for volume manufacturing of high-end AICS and advanced packaging panels </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly System</h3> <p> Sub-micron automatic defect inspection for panels </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan P System</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/led-power">LED/Power</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/led-power" class="overview"> <h3>Challenges for LED/Power</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Critical Dimensions</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/LED-Power/_resizeSmall/LED-panel.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for LED/Power</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/probe-test">Probe Test</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/probe-test" class="overview"> <h3>Challenges for Probe Test</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Probe Card Test</li> <li>Probe Mark Inspection</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Probe-Test/_resizeSmall/TP1-Technoprobe.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Probe Test</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/flat-panel-display">Flat Panel Display</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/flat-panel-display" class="overview"> <h3>Challenges for Flat Panel Display</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>TFT Backplane Imaging</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Flat-Oanel-Display/_resizeSmall/Flexible-display-glass.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Flat Panel Display Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool’s stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> </div> </div> </div> </div> </div> </div> </li> <li class="has-secondary" 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</a> <a href="https://ontoinnovation.com/products/discover-defect-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool’s stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-patterns-software"> <h3>Discover Patterns Software</h3> <p> Revealing signals hidden in everyday noise </p> </a> <a href="https://ontoinnovation.com/products/discover-review-software"> <h3>Discover Review Software</h3> <p> Your smart factory’s human classification interface </p> </a> <a href="https://ontoinnovation.com/products/discover-rms-software"> <h3>Discover RMS Software</h3> <p> The cornerstone to factory control through recipe management </p> </a> <a href="https://ontoinnovation.com/products/discover-run-to-run-software"> <h3>Discover Run-to-Run Software</h3> <p> Targeting the sweet spot for your smart factory </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/partners-in-progress"> <h3>Partners in Progress</h3> <p> Our customers and Onto Innovation solutions: 1+1=3. Good ideas, better implementation, visionary solutions </p> </a> <a href="https://ontoinnovation.com/products/trueadc-software"> <h3>TrueADC Software</h3> <p> The one and only automated defect classification system for smart factories </p> </a> <a href="https://ontoinnovation.com/products/yield-optimizer-machine-learning"> <h3>Yield Optimizer Software</h3> <p> Machine learning that looks beyond known relationships </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/defect-inspection">Defect Inspection</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/defect-inspection" class="overview"> <h3>Products for Defect Inspection</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated high speed sub-micron 2D inspection and combo 3D inspection/metrology for inline process control of pattern defects and next generation technologies for advanced packaging, specialty and OQA </p> </a> <a href="https://ontoinnovation.com/products/eb40-edge-backside-inspection"> <h3>EB40 Module</h3> <p> Edge and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/f30-system"> <h3>F30 System</h3> <p> Advanced macro inspection for front-end manufacturers </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly G3 System</h3> <p> Sub-micron automatic defect inspection for advanced IC substrates and panel level packaging </p> </a> <a href="https://ontoinnovation.com/products/inspection-tool-productivity-software"> <h3>Inspection Tool Productivity Software</h3> <p> Software solutions to increase the value of data available from your inspection tool </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/nsx-330-system"> <h3>NSX 330 System</h3> <p> 2D automated defect inspection and sample 3D inspection for advanced packaging </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/metrology">Metrology</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/metrology" class="overview"> <h3>Products for Metrology</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> Advanced OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced standalone OCD & thin film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Opto-acoustic film metrology for in-line metal film thickness measurements and material characterization. </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated thin film and OCD metrology solution </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris Series</h3> <p> Metrology system for thin film and common OCD measurement </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology for the compound semiconductor, power devices, RF, MEMS, LED and advanced packaging markets </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/photoluminescence">Photoluminescence</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/photoluminescence" class="overview"> <h3>Products for Photoluminescence</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition">Epi Thickness & Composition</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition" class="overview"> <h3>Products for Epi Thickness & Composition</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element Series</h3> <p> Transmission and reflection based FTIR Measurement for wafer suppliers and device makers </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/lithography">Lithography</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/lithography" class="overview"> <h3>Products for Lithography</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-s3500-system"> <h3>JetStep S3500 System</h3> <p> Advanced packaging lithography system for rectangular or square panel substrates up to Gen 3.5 size (720mm x 600mm) </p> </a> <a href="https://ontoinnovation.com/products/jetstep-w2300-system"> <h3>JetStep W2300 System</h3> <p> Advanced packaging lithography system for round substrates up to 330mm </p> </a> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Designed for advanced integrated circuit substrates (AICS) or advanced packaging manufacturing applications, incorporating a 250mm x 250mm large field exposure area achieving 3μm L/S resolution over a large DOF and with a throughput of >110pph </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis">Probe Card Test & Analysis</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis" class="overview"> <h3>Products for Probe Card Test & Analysis</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> </div> </div> </div> <div class="item"> <a href="https://www.4dtechnology.com/">4D Technology</a> </div> <div class="item"> <a href="https://ontoinnovation.com/products/a-z-product-index">A-Z Product Index</a> </div> </div> </div> </li> <li class="" data-slug="library"> <a href="https://ontoinnovation.com/library">Library</a> </li> <li class="has-secondary" data-slug="support"> <a href="https://ontoinnovation.com/support">Support</a> <div class="secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/support">Support Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/find-support">Find Support</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/service-programs">Service Programs</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/training">Training</a> </div> <div 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</header> <div class="jump-hero"> <div class="hero"> <div class="container"> <div class="position "> <h1>Echo™ System</h1> <p class="intro short-description">Picosecond ultrasonic technology, or PULSE™ technology, is the industry standard for metal film metrology. The Echo™ System is the latest addition to Onto Innovation's family of acoustic metrology products and is designed to extend the leadership across multiple leading-edge device segments. </p> </div> </div> </div> </div> <div class="torso"> <div class="container"> <h2>Product Overview</h2> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <p>The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices. The innovative optics design extends the dynamic range for film thickness measurement from 50Å to 35µm on a single platform and offers extendibility to measure high aspect ratio advanced 3D NAND structures. Expert Applications System (EASy™) software provides flexibility for development of user-defined algorithms for modeling complex multi-layer stacks. The Echo system also expands the materials characterization capability of the PULSE technology systems. In addition to Young’s Modulus of low-k dielectric films in BEOL and amorphous carbon hard masks in 3D NAND, the Echo system includes updated electronics and algorithms for implant monitor and thermal conductivity characterization. The small spot size combined with rapid measurements enables full wafer mapping capabilities to 0.5mm edge exclusion, improving information turns and quality of information during process development and optimization. </p> </div> <hr /> <div class="right"> <figure class="image"> <img src="/writable/images/Products/Metrology/_resizeLarge/Echo_NEWBRAND24.png" alt="Echo System"> <figcaption>Echo System</figcaption> </figure> </div> <hr /> </div> </div> <div class="container"> <h3>Awards</h3> </div> <div class="container sc-rich-text"> <ul><li><em>2023 Best of West Award for Echo opto-acoustic metrology system presented by SEMI and Semiconductor Digest</em></li></ul> </div> <div class="container"> <div class="mold"> <p class="button"> <a href="https://www.semi.org/en/news-media-press-releases/semi-press-releases/echo-opto-acoustic-metrology-system-from-onto-innovation-wins-2023-best-of-west-award/">2023 Best of West</a> </p> </div> </div> <div class="container"> <h2>Applications</h2> </div> <div class="container sc-columns"> <div class="columns"> </div> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <ul><li>Gate metals (W, WSi, Ru)<br /> </li><li>Plug & Contact (W, WN, NiPt, Co) </li><li>Barrier (Ti, TiN, Ta, TaN) </li><li>Cu damascene metallization (seed, EP, CMP) </li><li>Top metal (Al, TiN/Al) </li><li>RF electrode/IDT (Mo, AlN, Pt) </li><li>UBM, RDL (Au, Ni, TiW)</li></ul> </div> <hr /> <div class="right"> <ul><li>Magnetic head stacks (NiFe, CoFe, NiCr, Cr, Ru, Au)<br /> </li><li>3D NAND Hard mask (amorphous carbon) </li><li>MEMS (thick poly, Ge) </li><li>Modulus measurements of low-k, ultra low-k films </li><li>Implant </li><li>Thermal conductivity </li></ul> </div> <hr /> </div> </div> <div class="container"> <h2>Specifications</h2> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <ul><li>In-line opto-acoustic measurements using femtosecond ultrafast laser<br /> </li><li>Small spot size (8x10µm) enables measurements in a 15µm site size </li><li>Typical thickness of metal films from 50Å to 35µm </li><li>High throughput up to 60wph </li><li>Intrinsic cross-fab fleet matching </li></ul> </div> <hr /> <div class="right"> <ul><li>Automation options capable of handling 150, 200, and 300mm wafers<br /> </li><li>EASy advanced modeling algorithms </li><li>Central Recipe Manager for maintaining fleet security and control </li><li>Discover<sup>®</sup> software interpolation, reporting and SPC process control </li></ul> </div> <hr /> </div> </div> <div class="container adjacent-resources"> <div class="papers-articles"> <div class="container"> <div class="position"> <h4>Downloads & Links</h4> <div class="grid"> <div class="library-item link"> <a href="https://www.semi.org/en/news-media-press-releases/semi-press-releases/echo-opto-acoustic-metrology-system-from-onto-innovation-wins-2023-best-of-west-award"> <h3>Echo Opto-Acoustic Metrology System from Onto Innovation Wins 2023 Best of West Award</h3> <h5> <strong> Link </strong> </h5> </a> </div> <div class="library-item link"> <a href="https://investors.ontoinnovation.com/news/news-details/2022/Onto-Innovation-Announces-the-Latest-Addition-to-its-Family-of-Acoustic-Metrology-Products/default.aspx"> <h3>Onto Innovation Announces the Latest Addition to its Family of Acoustic Metrology Products</h3> <h5> <strong> Link </strong> </h5> </a> </div> </div> </div> </div> </div> </div> <div class="product-category"> <div class="container"> <h4>Related Products & Markets</h4> <div class="product-grid"> <a href="https://ontoinnovation.com/markets/memory"> <h3>Memory</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> <div class="button smaller"> <button>Learn More</button> </div> </a> <a href="https://ontoinnovation.com/markets/logic-foundry"> <h3>Logic/Foundry</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> <div class="button smaller"> <button>Learn More</button> </div> </a> </div> </div> </div> <div class="contact-lets-talk"> <div class="columns"> <div class="challenge"> <div class="container"> <div class="position"> <h3>You Have <br />a Challenge? <strong>We Love <br />a Challenge.</strong></h3> <h2>Let's Talk</h2> </div> </div> <div class="graphic"></div> </div> <div class="form" id="contact-us"> <div class="container">  <form method="post" accept-charset="utf-8" enctype="multipart/form-data" id="letsTalkForm-form" class="letsTalkForm-form"> <input type="hidden" name="action" value="sproutForms/entries/saveEntry"> <input type="hidden" name="handle" value="letsTalkForm"> <input type="hidden" name="redirect" value="/thanks-1"> <div class="fields"> <div class="tab"> <div id="fields-contactName-field" class="field plaintext contactName-field required"> <div class="heading"> <label 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