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s-headertitlecard"> <div class="section-background-overlay"></div> <div class="section-container"><div class="bde-div-6571-120 bde-div header-titlecard"> <div class="bde-div-6571-121 bde-div header-titlecard__content"> <div class="bde-div-6571-132 bde-div"> <div class="bde-div-6571-122 bde-div"> <h1 class="bde-heading-6571-123 bde-heading"> Smart </h1><div class="bde-icon-6571-124 bde-icon tile-technonogy__icon"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h2 class="bde-heading-6571-131 bde-heading"> Motion </h2> </div><div class="bde-text-6571-125 bde-text excerpt"> <p>SmartMotion technology was developed to provide a solution to avoid stitching errors through stitch-free exposure on the fly.</p> </div> </div> </div></div> </section><div class="bde-globalblock-6571-130 bde-globalblock"> <div class='breakdance'><section class="bde-section-6743-100-6743-1 bde-section s-breadcrumb bde-section-6743-100"> <div class="section-container"><nav class="bde-div-6743-174-6743-1 bde-div breadcrumb bde-div-6743-174"> <a class="bde-text-link-6743-175-6743-1 bde-text-link bde-text-link-6743-175 breakdance-link" href="https://raith.com/" target="_self" data-type="url"> RAITH </a><div class="bde-icon-6743-205-6743-1 bde-icon bc-sep bde-icon-6743-205"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-177-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-177"> Technologies </div><div class="bde-icon-6743-206-6743-1 bde-icon bc-sep bde-icon-6743-206"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-179-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-179"> SmartMotion </div> </nav></div> </section></div> </div><main class="bde-themeless-template-content-area-6571-107 bde-themeless-template-content-area"> <div class='breakdance'><section id="introduction" class="bde-section-9052-100 bde-section s-introduction"> <div class="section-container"><div class="bde-columns-9052-101 bde-columns columns-25-75"><div class="bde-column-9052-102 bde-column column-25"> <div class="bde-text-9052-103 bde-text TxColorGray"> Introduction </div> </div><div class="bde-column-9052-104 bde-column columns-75"> <div class="bde-text-9052-105 bde-text"> Some lithography applications, especially the writing of optical devices such as waveguides or gratings, are extremely sensitive to minimal unsteadiness or roughness within the pattern. Even the tiniest hint of a noticeable stitch field border can cause significant degradation in device performance. Despite the use of a highly precise laser stage and sophisticated write field corrections, very small stitching and transition errors at write field boundaries cannot be completely eliminated. </div> </div></div></div> </section><section class="bde-section-9052-112 bde-section s-accordioncolumnlocations"> <div class="section-container"><div class="bde-text-9052-113 bde-text"> Writing continuously with (sub) nanometer precision requires very accurate and smooth mechanical motion </div><div class="bde-columns-9052-114 bde-columns columns-25-75"><div class="bde-column-9052-115 bde-column column-25"> <h2 class="bde-heading-9052-228 bde-heading TxColorGray"> Key features </h2> </div><div class="bde-column-9052-117 bde-column column-75"> <div class="bde-accordion-9052-118 bde-accordion adv-accordion-large-title"><div class="bde-accordion__content-wrapper-9052-119 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-119" aria-controls="accordion-panel-119" aria-expanded="false"> <span class="bde-accordion__title" >Continuous movement for stitch free patterning</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-119" aria-labelledby="accordion-button-119" hidden> <div class="bde-text-9052-120 bde-text content-width-95"> In contrast to conventional writing strategies, the stage is continuously moving while the sample is exposed. As a consequence, “step and repeat” and classical stitching is replaced by a smooth transition along the patterning path. </div> </div> </div><div class="bde-accordion__content-wrapper-9052-121 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-121" aria-controls="accordion-panel-121" aria-expanded="false"> <span class="bde-accordion__title" >Smooth and precise motion</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-121" aria-labelledby="accordion-button-121" hidden> <div class="bde-text-9052-122 bde-text content-width-95"> RAITH’s UltraPositioning technology with special emphasis on smooth and accurate motion for on the fly applications provides steady and disturbance-free movement with minimal velocity fluctuations and following errors. Even very low velocities of a few micrometers per seconds or less are possible without disturbing Slip-Stick effects. </div> </div> </div><div class="bde-accordion__content-wrapper-9052-207 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-207" aria-controls="accordion-panel-207" aria-expanded="false"> <span class="bde-accordion__title" >Real-time motion controller</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-207" aria-labelledby="accordion-button-207" hidden> <div class="bde-text-9052-208 bde-text"> A specially-developed motion controller with exceptionally high update rates for path and deviation calculations drives the stage in controlled path mode. Simultaneously, a direct high-speed interface to the dedicated pattern generator ensures synchronized patterning and instant corrections of remaining mechanical errors via beam deflection. </div> </div> </div><div class="bde-accordion__content-wrapper-9052-205 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-205" aria-controls="accordion-panel-205" aria-expanded="false"> <span class="bde-accordion__title" >Two dedicated modes for writing with a continuously moving stage</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-205" aria-labelledby="accordion-button-205" hidden> <div class="bde-text-9052-206 bde-text content-width-95"> FBMS exposure allows continuous writing of elongated, straight or curved paths such as optical waveguides without stitching, while the unique MBMS – Modulated Beam Moving Stage exposure mode aims at patterning of stitch-free periodic structures, such as photonic crystals or gratings. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-9052-123 bde-section s-benfits3col"> <div class="section-container"><div class="bde-text-9052-124 bde-text TxColorGray"> Benefits for applications </div><h2 class="bde-heading-9052-125 bde-heading"> Applicable with two different writing modes (FBMS / MBMS) in our electron beam lithography and FIB systems </h2><div class="bde-columns-9052-126 bde-columns"><div class="bde-column-9052-127 bde-column"> <div class="bde-grid-9052-128 bde-grid"> <div class="bde-div-9052-129 bde-div tile-minimal"> <div class="bde-div-9052-130 bde-div tile-minimal__inner"> <h3 class="bde-heading-9052-131 bde-heading"> Writing of large photonic devices as optical waveguides </h3><div class="bde-text-9052-132 bde-text"> Stitch-free FBMS exposure paths can be several millimeters to centimeters long, while maintaining lateral dimensions from below 20 nm to some micrometers with minimum line edge roughness and high <br>uniformity. </div> </div> </div><div class="bde-div-9052-133 bde-div tile-minimal"> <div class="bde-div-9052-134 bde-div tile-minimal__inner"> <h3 class="bde-heading-9052-135 bde-heading"> Ideal for periodic patterns fabrication </h3><div class="bde-text-9052-136 bde-text"> MBMS supports patterning strip-shaped periodic structures such as gratings and lattices with ultrafine pitch adjustment. Optical devices like elongated Bragg gratings or photonic crystal waveguides benefit from the absence of classical stitching boundaries in this writing mode. </div> </div> </div><div class="bde-div-9052-137 bde-div tile-minimal"> <div class="bde-div-9052-138 bde-div tile-minimal__inner"> <h3 class="bde-heading-9052-139 bde-heading"> Fully integrated into Nanosuite software </h3><div class="bde-text-9052-140 bde-text"> Both exposure modes are supported by the Nanosuite Software and fully compatible with the built-in GDSII / CAD file editor. </div> </div> </div><div class="bde-div-9052-141 bde-div tile-minimal"> <div class="bde-div-9052-142 bde-div tile-minimal__inner"> <h3 class="bde-heading-9052-143 bde-heading"> Efficiency </h3><div class="bde-text-9052-144 bde-text"> Throughput of large area patterning can be increased, as acceleration and settling times are avoided due to the continuous process and movement of the stage. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-9052-145 bde-section s-technologyexplanation"> <div class="section-container"><div class="bde-text-9052-146 bde-text TxColorGray"> How it works </div><h2 class="bde-heading-9052-147 bde-heading"> Precision in motion: Achieving (sub) nanometer writing accuracy </h2><div class="bde-columns-9052-148 bde-columns"><div class="bde-column-9052-149 bde-column"> <div class="bde-rich-text-9052-151 bde-rich-text breakdance-rich-text-styles"> <p>Successful writing with continuously moving stage down to (sub) nanometer precision requires very accurate and smooth mechanical motion, extremely fast path calculations, as well as instant corrections of any following error. Therefore, a laser stage based on RAITH’s UltraPositioning technology is combined with a very fast motion controller specifically developed for this purpose. The motion controller calculates a two-dimensional, continuous trajectory with stable velocity and drives the stage in closed-loop control based on interferometer feedback.</p> <p>Highly accurate linear bearings and a special drive chain ensure very smooth and continuous movement of the laser stage and the sample. Disturbances and deviations that cannot be mechanically corrected in time due to the inertia of the stage are instantly compensated by beam deflection, called beam tracking. This is realized by a direct interface between the motion controller and pattern generator, which is also used for patterning synchronization.</p> </div> </div><div class="bde-column-9052-152 bde-column"> </div></div><h2 class="bde-heading-9052-209 bde-heading"> Advanced beam tracking for enhanced patterning control </h2><div class="bde-columns-9052-210 bde-columns"><div class="bde-column-9052-211 bde-column"> <div class="bde-rich-text-9052-212 bde-rich-text breakdance-rich-text-styles"> <p>Beam Tracking continuously superposes further beam deflections depending on the dedicated exposure mode.</p> </div><h3 class="bde-heading-9052-217 bde-heading"> FBMS: Fixed Beam and Moving Stage </h3><div class="bde-rich-text-9052-215 bde-rich-text breakdance-rich-text-styles"> <p>In FBMS mode, the width of the path is defined by dynamic beam expansion. The beam remains virtually stationary while the stage underneath follows arbitrary shaped paths of the desired patterns.</p> </div><h3 class="bde-heading-9052-218 bde-heading"> MBMS: Modulated Beam and Moving Stage </h3><div class="bde-rich-text-9052-216 bde-rich-text breakdance-rich-text-styles"> <p>For MBMS exposures, the stage is driving straight paths and a feedforward correction is applied to the pattering. The (repetitive periodic) beam movement is defined such that the combination of patterning and synchronized continuous movement of the laser interferometer stage results in the designed periodic structures. The MBMS implementation allows excellent pitch control by means of stage velocity control in combination with beam deflection.</p> </div> </div><div class="bde-column-9052-213 bde-column"> <div class="bde-image-9052-219 bde-image"> <figure class="breakdance-image breakdance-image--10865"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201600%20882'%3E%3C/svg%3E" width="1600" height="882" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms.png 1600w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-300x165.png 300w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-1024x564.png 1024w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-768x423.png 768w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-1536x847.png 1536w" data-lazy-sizes="(max-width: 1600px) 100vw, 1600px" data-lazy-src="https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms.png"><noscript><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms.png" width="1600" height="882" srcset="https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms.png 1600w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-300x165.png 300w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-1024x564.png 1024w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-768x423.png 768w, https://raith.com/wp-content/uploads/2024/05/raith-path-control-mbms-1536x847.png 1536w" sizes="(max-width: 1600px) 100vw, 1600px"></noscript></div> </div></figure> </div><div class="bde-text-9052-220 bde-text"> MBMS: Modulated Beam and Moving Stage </div> </div></div></div> </section><section class="bde-section-9052-171 bde-section s-videos2col"> <div class="section-container"><div class="bde-grid-9052-173 bde-grid"> <div class="bde-div-9052-174 bde-div"> <div class="bde-video-9052-175 bde-video"> <div class="ee-video-container"> <lite-youtube videoid="59S6A14zebc" style="background-image: url(https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-smart-motion-technology.jpg); " class="ee-video" title="" params="&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-9052-176 bde-div adv-slider__content"> <h3 class="bde-heading-9052-177 bde-heading"> traxx / FBMS Technology </h3><div class="bde-text-9052-178 bde-text"> 0:31 min Video </div> </div> </div><div class="bde-div-9052-179 bde-div"> <div class="bde-video-9052-180 bde-video"> <div class="ee-video-container"> <lite-youtube videoid="lNKrqReN5bg" style="background-image: url(https://raith.com/wp-content/uploads/2024/06/raith-fixed-beam-moving-stage.jpg); " class="ee-video" title="" params="&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-9052-181 bde-div adv-slider__content"> <h3 class="bde-heading-9052-182 bde-heading"> Fixed-Beam-Moving-Stage (FBMS) – unique continuous writing mode for EBL and FIB </h3><div class="bde-text-9052-183 bde-text"> 2:17 min Video </div> </div> </div><div class="bde-div-9052-184 bde-div"> <div class="bde-video-9052-185 bde-video"> <div class="ee-video-container"> <lite-youtube videoid="exiZkkQoT6A" style="background-image: url(https://raith.com/wp-content/uploads/2024/06/raith-electron-beam-lithography-fbms.png); " class="ee-video" title="" params="&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-9052-186 bde-div adv-slider__content"> <h3 class="bde-heading-9052-187 bde-heading"> MBMS for RAITH periodixx – periodic patterning without stitching errors for EBL and IBL </h3><div class="bde-text-9052-188 bde-text"> 0:43 min Video </div> </div> </div><div class="bde-div-9052-221 bde-div"> <div class="bde-video-9052-222 bde-video"> <div class="ee-video-container"> <lite-youtube videoid="rW5w6nMhwfQ" style="background-image: url(https://raith.com/wp-content/uploads/2024/06/raith-modulated-beam-moving-stage.jpg); " class="ee-video" title="" params="&rel=0&enablejsapi=1" > </lite-youtube> </div> </div><div class="bde-div-9052-223 bde-div adv-slider__content"> <h3 class="bde-heading-9052-224 bde-heading"> Modulated-Beam-Moving-Stage (MBMS) – periodic patterning without stitching errors </h3><div class="bde-text-9052-225 bde-text"> 1:47 min Video </div> </div> </div> </div></div> </section><section class="bde-section-9052-226 bde-section"> <div class="section-container"><h2 class="bde-heading-9052-227 bde-heading"> Experience SmartMotion </h2></div> </section></div> </main><div class="bde-globalblock-6571-117 bde-globalblock"> <div class='breakdance'><section 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class="bde-div-6596-102-9027-6596-1 bde-div s-raithsystems__item-content bde-div-6596-102"> <div class="bde-text-6596-103-9027-6596-1 bde-text bde-text-6596-103"> VELION </div><div class="bde-text-6596-104-9027-6596-1 bde-text content-width-95 bde-text-6596-104"> Multi ion species FIB‑SEM </div> </div> </a></div> </article> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-9036-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/ionmaster/" target="_self" data-type="url"> <div class="bde-image-6596-101-9036-6596-1 bde-image bde-image-6596-101"> <figure class="breakdance-image breakdance-image--12203"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20768%20670'%3E%3C/svg%3E" width="768" height="670" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled.jpg 2800w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-300x262.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1024x893.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1536x1340.jpg 1536w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-2048x1787.jpg 2048w" data-lazy-sizes="(max-width: 2800px) 100vw, 2800px" alt="Raith's SIMS Nanoanalytics and Ion Imaging product Ionmaster is perfect for the highest resolution SIMS analysis." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg?ver=1728048914"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg?ver=1728048914" width="768" height="670" 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