TY - JFULL AU - H. M. Usman Sani and Shafaat A. Bazaz and Nisar Ahmed PY - 2010/5/ TI - Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper T2 - International Journal of Industrial and Manufacturing Engineering SP - 373 EP - 378 VL - 4 SN - 1307-6892 UR - https://publications.waset.org/pdf/1252 PU - World Academy of Science, Engineering and Technology NX - Open Science Index 40, 2010 N2 - In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425渭m. With some minor changes in design, this range can be enhanced to 15渭m at 85V. ER -