Dragonfly G3 System - Onto Innovation

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d="M427.23,244.84a2,2,0,0,0-1.38.54,1.75,1.75,0,0,0-.58,1.32,1.72,1.72,0,0,0,.58,1.32,2,2,0,0,0,2.76,0,1.72,1.72,0,0,0,.58-1.32,1.75,1.75,0,0,0-.58-1.32A1.93,1.93,0,0,0,427.23,244.84Z" transform="translate(-191.68 -244.84)" /> <rect x="234.15" y="6.72" width="2.75" height="17.92" /> <path d="M445.79,252.06a6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8h-2.66v17.92h2.75V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09a8.44,8.44,0,0,0-.76-3.79A5.12,5.12,0,0,0,445.79,252.06Z" transform="translate(-191.68 -244.84)" /> <path d="M465.51,252.06a6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8H454.2v17.92H457V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09a8.3,8.3,0,0,0-.76-3.79A5.12,5.12,0,0,0,465.51,252.06Z" transform="translate(-191.68 -244.84)" /> <path d="M485.09,252.48a7.86,7.86,0,0,0-11.35,3.24,11,11,0,0,0-1,4.89,10.86,10.86,0,0,0,1,4.85,7.86,7.86,0,0,0,14.2,0,10.86,10.86,0,0,0,1-4.85,11,11,0,0,0-1-4.89A7.77,7.77,0,0,0,485.09,252.48Zm.55,11.47a5.63,5.63,0,0,1-1.77,2.48,5.31,5.31,0,0,1-6.06,0A5.63,5.63,0,0,1,476,264a9.56,9.56,0,0,1-.57-3.34,9.66,9.66,0,0,1,.57-3.35,5.72,5.72,0,0,1,1.77-2.51,5.31,5.31,0,0,1,6.06,0,5.72,5.72,0,0,1,1.77,2.51,9.66,9.66,0,0,1,.57,3.35A9.56,9.56,0,0,1,485.64,264Z" transform="translate(-191.68 -244.84)" /> <polygon points="307.68 21 307.49 21 302.54 6.72 299.56 6.72 306.18 24.64 308.98 24.64 315.61 6.72 312.62 6.72 307.68 21" /> <path d="M521.45,252.36a6.38,6.38,0,0,0-2.19-.83,11,11,0,0,0-2-.21,10.5,10.5,0,0,0-2.74.37A7,7,0,0,0,512,253a6.33,6.33,0,0,0-1.87,2.55l2.61.94a5.05,5.05,0,0,1,1.58-1.85,5,5,0,0,1,3.09-.86,3.81,3.81,0,0,1,2.84,1,3.63,3.63,0,0,1,.94,2.68v.09a1,1,0,0,1-.47.94,4.06,4.06,0,0,1-1.5.37l-2.65.33c-.83.11-1.66.25-2.48.43a8.86,8.86,0,0,0-2.25.83,4.35,4.35,0,0,0-1.62,1.51,4.65,4.65,0,0,0-.61,2.5,5.09,5.09,0,0,0,3,4.86,7.21,7.21,0,0,0,3.09.65,6.75,6.75,0,0,0,2.65-.47,5.52,5.52,0,0,0,1.74-1.13,5,5,0,0,0,.93-1.25h.14v2.43h2.75V257.67a7.06,7.06,0,0,0-.7-3.41A4.83,4.83,0,0,0,521.45,252.36Zm-.3,10.63a4.16,4.16,0,0,1-.58,2.13,4.38,4.38,0,0,1-1.7,1.66,5.47,5.47,0,0,1-2.76.64,4.66,4.66,0,0,1-2.71-.73,2.42,2.42,0,0,1-1.07-2.16,2.38,2.38,0,0,1,.56-1.66,3.44,3.44,0,0,1,1.5-.92,10.1,10.1,0,0,1,2-.45l1.16-.15,1.48-.21a11.62,11.62,0,0,0,1.35-.29,1.59,1.59,0,0,0,.77-.38Z" transform="translate(-191.68 -244.84)" /> <path d="M536.53,267a5,5,0,0,1-.75.05,3.38,3.38,0,0,1-1.15-.19,1.71,1.71,0,0,1-.88-.77,3.5,3.5,0,0,1-.35-1.75V253.89h3.83v-2.33H533.4v-4.3h-2.75v4.3h-2.71v2.33h2.71v11.2a4.33,4.33,0,0,0,.73,2.59,4.47,4.47,0,0,0,1.84,1.53,5.55,5.55,0,0,0,2.28.5,6.23,6.23,0,0,0,1.27-.11,5.48,5.48,0,0,0,.79-.22l-.56-2.47Z" transform="translate(-191.68 -244.84)" /> <path d="M544.36,244.84a1.93,1.93,0,0,0-1.38.54,1.75,1.75,0,0,0-.58,1.32A1.72,1.72,0,0,0,543,248a2,2,0,0,0,2.76,0,1.72,1.72,0,0,0,.58-1.32,1.75,1.75,0,0,0-.58-1.32A1.93,1.93,0,0,0,544.36,244.84Z" transform="translate(-191.68 -244.84)" /> <rect x="351.28" y="6.72" width="2.75" height="17.92" /> <path d="M562.69,252.48a7.85,7.85,0,0,0-11.35,3.24,11,11,0,0,0-1,4.89,10.86,10.86,0,0,0,1,4.85,7.86,7.86,0,0,0,14.2,0,10.86,10.86,0,0,0,1-4.85,11,11,0,0,0-1-4.89A7.77,7.77,0,0,0,562.69,252.48Zm.54,11.47a5.61,5.61,0,0,1-1.76,2.48,4.71,4.71,0,0,1-3,.95,4.76,4.76,0,0,1-3-.95,5.61,5.61,0,0,1-1.76-2.48,9.56,9.56,0,0,1-.57-3.34,9.66,9.66,0,0,1,.57-3.35,5.7,5.7,0,0,1,1.76-2.51,4.76,4.76,0,0,1,3-.95,4.71,4.71,0,0,1,3,.95,5.7,5.7,0,0,1,1.76,2.51,9.66,9.66,0,0,1,.57,3.35A9.56,9.56,0,0,1,563.23,264Z" transform="translate(-191.68 -244.84)" /> <path d="M584.5,254.3a5.12,5.12,0,0,0-2.12-2.24,6.65,6.65,0,0,0-3.19-.74,5.93,5.93,0,0,0-3.31.84,5.11,5.11,0,0,0-1.92,2.2h-.23v-2.8h-2.66v17.92h2.75V258.7a5.45,5.45,0,0,1,.6-2.66,4.1,4.1,0,0,1,1.63-1.67,4.75,4.75,0,0,1,2.35-.57,3.9,3.9,0,0,1,3,1.18,4.68,4.68,0,0,1,1.09,3.3v11.2h2.76V258.09A8.44,8.44,0,0,0,584.5,254.3Z" transform="translate(-191.68 -244.84)" /> <path d="M590.2,264.36a5.53,5.53,0,1,1,5.53,5.54A5.53,5.53,0,0,1,590.2,264.36Zm9.74,0a4.21,4.21,0,1,0-4.21,4.21A4.21,4.21,0,0,0,599.94,264.36Zm-6.14-2.61h2.58a1.62,1.62,0,0,1,1.56,1.63,1.73,1.73,0,0,1-.83,1.5l1,2h-1.23l-.89-1.72h-1.11v1.72H593.8ZM596,264.3a.86.86,0,0,0,.76-.92.74.74,0,0,0-.73-.8h-1.06v1.72Z" transform="translate(-191.68 -244.84)" /> </g> <g class="onto"> <path d="M464.51,289.31a39.18,39.18,0,1,0,39.18,39.18A39.22,39.22,0,0,0,464.51,289.31Zm0,55.47a16.29,16.29,0,1,1,16.29-16.29A16.31,16.31,0,0,1,464.51,344.78ZM230.86,289.31h-.1A39.18,39.18,0,1,0,270,328.49v0A39.22,39.22,0,0,0,230.86,289.31Zm0,55.47a16.29,16.29,0,0,1-.1-32.58h.1a16.3,16.3,0,0,1,16.29,16.26v0A16.31,16.31,0,0,1,230.86,344.78Zm124.49-15.37v37.5H332.47V329.44a16.32,16.32,0,0,0-16.3-16.27H304v53.74H281.13V290.29h35a39.22,39.22,0,0,1,39.18,39.12ZM417,294.2v19H367.73V290.29l22.89-11.57V294.2Zm0,50.58v22.89H406.91a39.22,39.22,0,0,1-39.17-39.13h0V321h22.89v7.53a16.31,16.31,0,0,0,16.29,16.26Z" 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<h4>Products for Wafer and Panel Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element System</h3> <p> Transmission and reflection based FTIR measurement </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/logic-foundry">Logic/Foundry</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/logic-foundry" class="overview"> <h3>Challenges for Logic/Foundry Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Etch Profile</li> <li>Patterning</li> <li>Pre/Post CMP</li> <li>Thin Film Metrology</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Logic/_resizeSmall/Logic-cpu-chip-processor.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Logic/Foundry Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD and film analysis </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/memory">Memory</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/memory" class="overview"> <h3>Challenges for Memory Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>3D NAND Process Control</li> <li>DRAM High Bandwidth Memory TSV</li> <li>DRAM Front-end Process Control</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Memory/_resizeSmall/Memory-RAM-storage.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for Memory Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/rf-mems">RF/MEMS</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/rf-mems" class="overview"> <h3>Challenges for RF/MEMS</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Mass Load Metrology</li> <li>RF Filter Metrology</li> <li>SAW/BAW Filter Inspection</li> <li>Cavity Integrity</li> <li>Substrate Handling</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/RF/_resizeSmall/RF-5G.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for RF Module and MEMS Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris S System</h3> <p> Advanced film and OCD metrology system </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/industrial-scientific">Industrial/Scientific</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/industrial-scientific" class="overview"> <h3>Challenges for Industrial and Scientific</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Aerospace and Defense</li> <li>Aviation and Automotive</li> <li>Biomedical</li> <li>Optics and Telescope Manufacturing</li> <li>Semiconductors</li> <li>Vision Systems</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Industrial-Scientific/_resizeSmall/HiRISE-in-Space-Rendering.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Visit the 4D Technology website to learn more</h4> <div class="grid"> <a href="https://www.4dtechnology.com/"> <h3>4D Technology website</h3> <p> A business of Onto Innovation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/imaging">Image Sensors</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/imaging" class="overview"> <h3>Challenges for Image Sensors</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>CMOS Sensor</li> <li>VCSELs</li> <li>Residue</li> <li>Cover Glass</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Imaging/_resizeSmall/Image-sensor-light-sensor-of-digital-camera.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Image Sensor Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD Metrology </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced film & OCD metrology system </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/advanced-packaging">Advanced Packaging</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/advanced-packaging" class="overview"> <h3>Challenges for Advanced Packaging</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Die Shift</li> <li>Fine Pitch RDL</li> <li>Bump metrology and analytics</li> <li>Non-Visual Defects</li> <li>Die crack detection</li> <li>Warped Substrates</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Fan-Out/_resizeSmall/fanout-top-view.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Advanced Packaging</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Panel lithography system optimized for volume manufacturing of high-end AICS and advanced packaging panels </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly System</h3> <p> Sub-micron automatic defect inspection for panels </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan P System</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/led-power">LED/Power</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/led-power" class="overview"> <h3>Challenges for LED/Power</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Critical Dimensions</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/LED-Power/_resizeSmall/LED-panel.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for LED/Power</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/probe-test">Probe Test</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/probe-test" class="overview"> <h3>Challenges for Probe Test</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Probe Card Test</li> <li>Probe Mark Inspection</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Probe-Test/_resizeSmall/TP1-Technoprobe.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Probe Test</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/flat-panel-display">Flat Panel Display</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/flat-panel-display" class="overview"> <h3>Challenges for Flat Panel Display</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>TFT Backplane Imaging</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Flat-Oanel-Display/_resizeSmall/Flexible-display-glass.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Flat Panel Display Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> </div> </div> </div> </div> </div> </div> </li> <li class="has-secondary" data-slug="products"> <a href="https://ontoinnovation.com/products">Products</a> <div class="secondary product-secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/products">Products Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/enterprise-software">Enterprise Software</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/enterprise-software" class="overview"> <h3>Products for Enterprise Software</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/autoshell-software"> <h3>AutoShell Software</h3> <p> Integrate equipment and factory 4.0+ systems quickly and comprehensively </p> </a> <a href="https://ontoinnovation.com/products/controlworks-software"> <h3>ControlWORKS Software</h3> <p> The SEMI compliant foundation for optimized operations and material movement on your process equipment </p> </a> <a href="https://ontoinnovation.com/products/discover-defect-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-patterns-software"> <h3>Discover Patterns Software</h3> <p> Revealing signals hidden in everyday noise </p> </a> <a href="https://ontoinnovation.com/products/discover-review-software"> <h3>Discover Review Software</h3> <p> Your smart factory鈥檚 human classification interface </p> </a> <a href="https://ontoinnovation.com/products/discover-rms-software"> <h3>Discover RMS Software</h3> <p> The cornerstone to factory control through recipe management </p> </a> <a href="https://ontoinnovation.com/products/discover-run-to-run-software"> <h3>Discover Run-to-Run Software</h3> <p> Targeting the sweet spot for your smart factory </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/partners-in-progress"> <h3>Partners in Progress</h3> <p> Our customers and Onto Innovation solutions: 1+1=3. Good ideas, better implementation, visionary solutions </p> </a> <a href="https://ontoinnovation.com/products/trueadc-software"> <h3>TrueADC Software</h3> <p> The one and only automated defect classification system for smart factories </p> </a> <a href="https://ontoinnovation.com/products/yield-optimizer-machine-learning"> <h3>Yield Optimizer Software</h3> <p> Machine learning that looks beyond known relationships </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/defect-inspection">Defect Inspection</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/defect-inspection" class="overview"> <h3>Products for Defect Inspection</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated high speed sub-micron 2D inspection and combo 3D inspection/metrology for inline process control of pattern defects and next generation technologies for advanced packaging, specialty and OQA </p> </a> <a href="https://ontoinnovation.com/products/eb40-edge-backside-inspection"> <h3>EB40 Module</h3> <p> Edge and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/f30-system"> <h3>F30 System</h3> <p> Advanced macro inspection for front-end manufacturers </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly G3 System</h3> <p> Sub-micron automatic defect inspection for advanced IC substrates and panel level packaging </p> </a> <a href="https://ontoinnovation.com/products/inspection-tool-productivity-software"> <h3>Inspection Tool Productivity Software</h3> <p> Software solutions to increase the value of data available from your inspection tool </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/nsx-330-system"> <h3>NSX 330 System</h3> <p> 2D automated defect inspection and sample 3D inspection for advanced packaging </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/metrology">Metrology</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/metrology" class="overview"> <h3>Products for Metrology</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> Advanced OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced standalone OCD & thin film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Opto-acoustic film metrology for in-line metal film thickness measurements and material characterization. </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated thin film and OCD metrology solution </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris Series</h3> <p> Metrology system for thin film and common OCD measurement </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology for the compound semiconductor, power devices, RF, MEMS, LED and advanced packaging markets </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/photoluminescence">Photoluminescence</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/photoluminescence" class="overview"> <h3>Products for Photoluminescence</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition">Epi Thickness & Composition</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition" class="overview"> <h3>Products for Epi Thickness & Composition</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element Series</h3> <p> Transmission and reflection based FTIR Measurement for wafer suppliers and device makers </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/lithography">Lithography</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/lithography" class="overview"> <h3>Products for Lithography</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-s3500-system"> <h3>JetStep S3500 System</h3> <p> Advanced packaging lithography system for rectangular or square panel substrates up to Gen 3.5 size (720mm x 600mm) </p> </a> <a href="https://ontoinnovation.com/products/jetstep-w2300-system"> <h3>JetStep W2300 System</h3> <p> Advanced packaging lithography system for round substrates up to 330mm </p> </a> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Designed for advanced integrated circuit substrates (AICS) or advanced packaging manufacturing applications, incorporating a 250mm x 250mm large field exposure area achieving 3渭m L/S resolution over a large DOF and with a throughput of >110pph </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis">Probe Card Test & Analysis</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis" class="overview"> <h3>Products for Probe Card Test & Analysis</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> </div> </div> </div> <div class="item"> <a href="https://www.4dtechnology.com/">4D Technology</a> </div> <div class="item"> <a href="https://ontoinnovation.com/products/a-z-product-index">A-Z Product Index</a> </div> </div> </div> </li> <li class="" data-slug="library"> <a href="https://ontoinnovation.com/library">Library</a> </li> <li class="has-secondary" data-slug="support"> <a href="https://ontoinnovation.com/support">Support</a> <div class="secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/support">Support Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/find-support">Find Support</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/service-programs">Service Programs</a> </div> <div class="item"> <a href="https://ontoinnovation.com/support/training">Training</a> </div> <div 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</header> <div class="jump-hero"> <div class="hero"> <div class="container"> <div class="position "> <h1>Dragonfly庐 G3 System</h1> <p class="intro short-description">Combining 2D and 3D technologies to detect yield-robbing defects and measure features critical for today's front-end and packaging technologies, the Dragonfly G3 system will reset the industry's expectations for throughput, accuracy and reliability.</p> </div> </div> </div> </div> <div class="torso"> <div class="container"> <h2>Product Overview</h2> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <p>Unique 2D imaging technology provides fast, reliable inspection for sub-micron defects to meet today's R&D needs and tomorrow's production demands.聽Onto Innovation's patented <a href="https://ontoinnovation.com/library/100-3d-bump-metrology-for-advanced-packaging">Truebump庐聽Technology</a> combines multiple 3D metrology techniques to deliver accurate 100% bump height metrology and coplanarity. This new technology is the foundation of Onto Innovation鈥檚 products designed to offer fast throughput, increased brightfield and darkfield sensitivity and solves site challenges related to聽large package inspection.</p> <p>The Dragonfly G3 system offers聽<a href="https://ontoinnovation.com/library/clearfind-illuminate-the-possibilities">Clearfind庐聽Technology</a> for non-visual residue detection. For specialty markets, such as CMOS image sensors (CIS), the Dragonfly System uses a combination of oblique angle illumination with sophisticated image processing and a machine-learning algorithm to detect low contrast defects in the active pixel sensor area.</p> <p>The Dragonfly G3 system is tightly integrated with control and analytical software for real-time analysis and review, high speed IR defect inspection and review, while also providing offline review options. When massive amounts of bump data are generated during inspection, users now have the tools to visualize data, correlate process variations and improve yields through exploratory data analysis down to the bump level.</p> </div> <hr /> <div class="right"> <figure class="image"> <img src="/writable/images/Products/Defect-Inspection/_resizeLarge/Dragonfly-2W-NEWBRAND24.png" alt="Dragonfly System"> <figcaption>Dragonfly System</figcaption> </figure> </div> <hr /> </div> </div> <div class="container"> <h2>Applications</h2> </div> <div class="container sc-rich-text"> <ul><li>Micro bumps</li><li>After develop and etch</li><li>Large die, multi-chip packages</li><li>Reconstituted wafers</li><li>Redistribution layers (RDL)</li><li>OQA and post saw</li><li>CMOS image sensor (CIS)</li><li>Gel and waffle pack inspection</li><li>Multi-product, multi-grid</li><li>MEMS</li><li>Post Probe</li></ul> </div> <div class="container"> <h2>Specifications</h2> </div> <div class="container sc-columns"> <div class="columns"> <div class="left"> <ul><li>Inline real-time focusing</li><li>Flexible platform to allow for metrology sensor integration</li><li>High speed IR defect inspection and review</li><li>Large die and package support (>6400mm<sup>2</sup>)</li><li>Substrate support: 100mm - 330mm wafers</li><li>Substrate handling: wafer, frame, warped, thin, waffle pack, porous</li><li>High warped聽wafer and Taiko聽handling options</li></ul> </div> <hr /> <div class="right"> <ul><li>Waferless recipe creation using automated alignment and CAD import</li><li>Native tool matching and recipe sharing with common recipe server</li><li>Rule based binning and classification for immediate die disposition</li><li>Online and offline review capability</li><li>Integrated backside and edge inspection (option)</li><li>AI ADC and yield management software (option)</li></ul> </div> <hr /> </div> </div> <div class="container adjacent-resources"> <div class="papers-articles"> <div class="container"> <div class="position"> <h4>Downloads & Links</h4> <div class="grid"> <div class="library-item link"> <a href="https://investors.ontoinnovation.com/news/news-details/2024/Onto-Innovation-Debuts-Sub-surface-Defect-Inspection-for-Advanced-Packaging/default.aspx"> <h3>Onto Innovation Debuts Sub-surface Defect Inspection for Advanced Packaging</h3> <h5> <strong> Link </strong> </h5> </a> </div> <div class="library-item link"> <a href="https://investors.ontoinnovation.com/news/news-details/2023/Onto-Innovation-Announces-Over-100-Million-in-Orders-for-Systems-Supporting-Advanced-Packagingfor-AI/default.aspx"> <h3>Onto Innovation Announces Over $100 Million in Orders for Systems Supporting Advanced Packaging for AI</h3> <h5> <strong> Link </strong> </h5> </a> </div> <div class="library-item link"> <a href="https://investors.ontoinnovation.com/news/news-details/2022/Onto-Innovation-Announces-Growing-500-Million-Order-Backlog-Including-Solutions-for-Heterogeneous-Packaging/default.aspx"> <h3>Onto Innovation Announces Growing $500 Million Order Backlog, Including Solutions for Heterogeneous Packaging</h3> <h5> <strong> Link </strong> </h5> </a> </div> <div class="library-item link"> <a href="https://investors.ontoinnovation.com/news/news-details/2021/Product-News-Onto-Innovation-Announces-New-Inspection-Platform-for-Leading-Edge-Process-Control-and-Device-Reliability/default.aspx"> <h3>Onto Innovation Announces New Inspection Platform for Leading-Edge Process Control and Device Reliability</h3> <h5> <strong> Link </strong> </h5> </a> </div> </div> <h4>Selected Papers and Articles</h4> <div class="grid"> <div class="library-item blog-post"> <a href="https://ontoinnovation.com/library/surging-demand-for-cis"> <h3>In The Spotlight: What Is Responsible For The Surging Demand For CIS?</h3> <h5><strong>Blog Post</strong> for <strong>Semiconductor Engineering</strong></h5> </a> </div> <div class="library-item blog-post"> <a href="https://ontoinnovation.com/library/understanding-optical-inspection-for-cis"> <h3>Understanding Optical Inspection For CIS</h3> <h5><strong>Blog Post</strong> for <strong>Semiconductor Engineering</strong></h5> </a> </div> <div class="library-item article"> <a href="https://ontoinnovation.com/library/die-crack-detection-in-hvm-is-critical-for-high-reliability-applications"> <h3>Die Crack Detection in HVM is Critical for High Reliability Applications</h3> <h5><strong>Article</strong> for <strong>Semiconductor Digest</strong></h5> </a> </div> <div class="library-item article"> <a href="https://ontoinnovation.com/library/total-control-of-the-bump-process-to-ensure-reliability-of-stacked-devices"> <h3>Total Control of the Bump Process to Ensure Reliability of Stacked Devices</h3> <h5><strong>Article</strong> for <strong>Chip Scale Review</strong></h5> </a> </div> <div class="library-item blog-post"> <a href="https://ontoinnovation.com/library/100-3d-bump-metrology-for-advanced-packaging"> <h3>Truebump Technology: 100% 3D Bump Metrology for Advanced Packaging</h3> <h5><strong>Blog Post</strong> </h5> </a> </div> </div> </div> </div> </div> </div> <div class="product-category"> <div class="container"> <h4>Related Products & Markets</h4> <div class="product-grid"> <a href="https://ontoinnovation.com/products/discover-defect-software"> <h3>Discover Defect Software</h3> <p> Inline yield and defect management </p> <div class="button smaller"> <button>Learn More</button> </div> </a> <a href="https://ontoinnovation.com/products/discover-review-software"> <h3>Discover Review Software</h3> <p> Offline defect review and manual classification software </p> <div class="button smaller"> <button>Learn More</button> </div> </a> <a href="https://ontoinnovation.com/markets/advanced-packaging"> <h3>Advanced Packaging</h3> <p> Today's bumping processes create features in a wide variety of shapes, 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