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id="challenge-error-text">Enable JavaScript and cookies to continue</span></div></noscript></div></div><script>(function(){window._cf_chl_opt={cvId: '3',cZone: "publications.waset.org",cType: 'non-interactive',cRay: '9134f335fcc54c23',cH: '2qow46dc9wr99Vn3ZQzrHElvk2RjPnsjDkQqYQrgl70-1739786632-1.2.1.1-JCICSoVjtqpUzhhCltbS3wh8jYBOqDzOKHrcQAk3KaCqzKJhEsdTKEcSeN9ByzvE',cUPMDTk: "\/abstracts\/175813\/investigation-of-amorphous-silicon-a-si-thin-films-deposited-on-silicon-substrate-by-raman-spectroscopy?__cf_chl_tk=TAI1kXVZFypODnj2cSP8kE9ch9jAGpQMfpT3fsnxerg-1739786632-1.0.1.1-PJzIyn2VpKT8ZwvkqCr.Q3i3LtpkeMnis5cod62AAng",cFPWv: 'b',cITimeS: '1739786632',cTTimeMs: '1000',cMTimeMs: '120000',cTplC: 0,cTplV: 5,cTplB: 'cf',cK: "",fa: "\/abstracts\/175813\/investigation-of-amorphous-silicon-a-si-thin-films-deposited-on-silicon-substrate-by-raman-spectroscopy?__cf_chl_f_tk=TAI1kXVZFypODnj2cSP8kE9ch9jAGpQMfpT3fsnxerg-1739786632-1.0.1.1-PJzIyn2VpKT8ZwvkqCr.Q3i3LtpkeMnis5cod62AAng",md: "XiU_kvb4whcWNT9us.j5CQscr3sMEOLUR5bZhDMqdjg-1739786632-1.2.1.1-5l8cUxi_rjE9qmlhOan_fjRXyFN0CgC2MeY2lZVlcJFSMDjUr_DZEejNgL7yfLluRwXO3kc_9gmxS45zteiWbCi_T9mgkrNUsHTOZjE3WL3RsrdUU4YTRSKWwJ9TidaK_XC8SSW5.3jfdlF7ukEHmn3hROE7nxgmEQHc0REAuCkFRTg2opQWAkMSo2FNLpTEqbYChC8pWhlX1KftfiSlPjrpXM7TUaiUfh5MWG80.Ux8BtijFQoNMJhla6Jp_JE1qKWQZmaOOhuD47KerukwpTpNoR1yS722z6sEJHEgXgp7Kyl1jB3PjzRKnYuxbwYKHB8y6FO3gLRNtCrtHC5PaJs__4eyLWQfTiPwy.37iAoafoI7ezpNg.2CbN2OCULR_mksEc_WjufGpawYmE83jtGUt4dT.CNu7YmvdAYBJo1D5N.bO7QG0kaHfziz1pwmANJzAKtGRNNHkXyZGeO8VdVFl7SacjuuG_ByBzp0psN4HHh_j5xfUrlVL4NXbJQnHFubMAURV0AsWhx.oymns1nfHUD2qx6yDSdo_5klF6NHc4nVeDQx8QMO6Px199aadY9sGfemG3UlIwk_fMKHlFCwpWyOxdsUJ6s4uIyK60UAZzKTyfT82FcPwyBNyzhQI2tNDMqrrgnpK.kfRMFmDg.Q38CbnHvjOuWNR5K_Ts35hwuHmZFmZdth0i6LHwGvRqGcvEPiZQIL7citycFUkpv4gsCfaL.u9PZnRT00VkeRI8EUc8NOo61o.u1Bl4fyuPJ9AW1mPwTmqTS8tGLGyYp9lvy.FQu_hb4rCsnrSnFncx0c9.k1DfiPfJN4X6BjubCCJ4zbbFtaAMbnweHB.a5oOuV7EGu57TaOu8xidX9dXPdJHrgtTikN_QMpaPOTwpTKVB7ZIPi_ESrbINmbdXaJm2JO8QDUsc5nO_6wFRfg2ZHymCmDJ3gL_ehScM7TdfgoYUxeLuY0RLoV7LhCGpCT0sG7ZGMCo5F8GtoitCx_BfALiv0JW8B9nClkOknjP7jOiyqJDfB866Tndn1MQliIVe85f7hwc1v8yg0Xu8wb9JawKFl70KTn70V_pHcUbZOVdDAAT_TAIeM9cR4XmlNrf_qlTaFSUd4vj722gQ9EsSJ1aSH3lBgfBeGkgWz0dhvOMePLxeMRWzECb0SIjQjkg1eEgLwKgoVD_gYdbUdcrDpLCuul0rI687gVj88Do0JhraOr_idy2A33uGOpog_5H3tsEr_rePazQfB9EfqCFvC6JquxP_a3_REIgFzIW29xDV.EdyGbGX1J3.LQ0E7Dl9LNMqbvsCbKFjOJUGbsU7Mn0UeKTnzdzeeRySuetkEFRoC_KiDE41YtY2xvMwAoU_pur6M7dTV7wtBTrX6vupyFL6yWCxRY3zRhkaS5aL1B04MPNKPXgUT7xOkJOPFFeEAFaQtPd5t9C2x1g0I8AGA5k36bBVCWaMwpUWkCm5Hjdu4aKGKAf5HyGO3j1CvX2FHH7BvCRCpnvh.3lzZ0efyxS4Pu5l_JhSt8csCc8vZAWPgAo7MbFq1FPtLkqFIUXyMPXutqltM6t_JFE.vMK6hl8Hj49RfkRvPcDMeW6zW0Mj6VuB3zfggsbiUqYNVtCtv0KvWMcwCMnaSXGclkzt8XI18r25tkq5cWoFiLrylsA4PNKoi7375OQ.DI_YAc31qVhlV4N1vcaXdcWjwdyWXETQ7CT.2FfsbqLfntXB567eimsGssA6AOjQNNzbFMVQ9ltQpZ2EF1XG43iine56vl7N_vO7BjO_4PJbMLPjD1XZDkdfjpbGkJNbZApzaCS41kRWQQqpj5WsbANblgzYC8ymxm1jdV7gvfYJRyJLfNRUtvgxP_c8tbNKJ6nKpdPwK.17MVKmx_wW2JxgGw6iu6uL54Zk6_NiW5VvKYtsTBJo.fcvpESRI0hjvR.nm.uWP3CCZYA1M9ByfG078AH6V1vnAO2v3LaxFA1yPq6.4iCnjTB4WHUY4BBzq.k49veGQQ0c1xeaCIZCHVeEm2lQnEYOUu.BziVmCRz09RsktJbzCqrwgSwFyk1GO1FfZQ_oK_Ix5VOcIUtoc3A2XdLKmWpzrPeUNMN9YBBVYydNuCHFHJdbjuY5gQlFlGE3HciCfbrpFEeUEVjSUAZy2LBwMJoA_vOtXqWfwREa1j8paTTs.rufnod8Ho0RaoAg",mdrd: "Pvq7q7s_A4v9NP0z77JZXmLeP3NrVtH94BMweZ_UsLI-1739786632-1.2.1.1-izW.aUyAsY8WIf90hDcdeA_M83kKkGx.ancSGo7hxm_w.5Yi4PU10ZPW9pYqAPX4NcIEuux5DC1moigDLnzmgITj7Jrxpiv5CZJ4SWqZxqxYkgh_UzqZTtYAHybfVvZufDcjKhKOLw9VbfG7Qbxs.WxwufAW1ZRCmnkYxvtdExSLs1dO4EBX0VbnDV_QVBs9iTfTkxle176FhZtlY_lQiAeiGc5FgOao8woUarVIOVYkuMu8Pim2kFpC9jaq8QASWd_ODjPkS_9Io3kxt5QmwYBb4g8OGZupdq1vl4djxl6tajcz_Mhv0k6_NO8A5Bpwm6EQnNsZFWS9akWilD6LXLiDziokcj4jL6bFDn1lufme5v5qQT02MjzTJ2ZBvAsEy31Ck0Z.XQ12gkBv1sB8T.YbNM_2RWFuiHIWM7r314GVnnGghLzDp_LEyR7fep5qSpAhnHToVgcfa6AWUcT6Z7ONMX7r0.25bVEfI0j0.rsuHTbb0YknbqD7I7wyqAXO_DVo.KBqcqjBUZnPMWY6w8eE7rm0qQtYdf.BN2OqGnHZvJ.fb3yu_okR97R7kEKKQZ4xjtsWKIBdqf7EiNglKKOmVw6.ADNbcGkSpzO8uTMFYjiIxWrtFRtQ7IXrteQnNGj5B_V2Lpf6U6eu._sHXoWR1AMJooH9x2pjiEv.aJNtRB6tko_3wbFSSa4f783.jVDQ0qKm8P9_7btR_B4cThevs4jc328fv4khZtXuCpy_IshoopM0QmQA_0FcvGB9v.RT77r_PO7EVxgXvdWBZMBySlPscEKYaY1GcfNc_GpXrScChuI2r8QpmGJ2jduCVOn39zpDJKU_jF9e0oALqVxGag0XqZ9mN.AKQynjlNiu0wFTtxS4IXXOHSdq2EFWlF1R8rUHUZiJD7U6qX4f_nPH6Tid2vPg61rh0Y_ZnitZ3w0612ufBGoBOF5cXTG2_bML4CE_zBrL549Hq_Ol9wdLxOgchlR4NL351KIiXHjYYzj2IrbQMkXWOn18w1MXbTb9p8EDBkQzkoWg6pE3HlXnEeyVTZIKCfXmLig5HYTdKgmQjidFz58TDiHN.idK8ku9.lFtHu0MUwNrY9UBW4GrZNgWuM01T4ZX8r4Jd0.XqDor8L3hg.mGzUUq901gmcjyW5Z40y.PO_0P.5a3wXT_FgCBUmB9MYCGA7KEu30szkdZtWeLCRvKc7YDmxva3dRvDAAZWobjxFdGUXJJLRDrJevAt9csgWvpaaPJH6BEqmTpw3fMuDH8A9n5_7uTljmIRW7BI0lYOJLyD4JM6q2lWrZVsuZc3vhZ0Zw_BovuWK6JzhGfv.QUuuxyTt2.nhf51HKtWx9yVqOHmHaXC0Mi50iaPqiSUMhSTt_F8U3cJFMcZnpggVt8TH3iAOSorPwn0LZWDMTlK8PcJmXw7nZ30Qqambl2KIGK67V.64Tz6FiVnemW25LjUPhZuCtCGK.6.eKCyLpum6D3rl8FBRBKZ0l.1_WMKYp2QuPt6WmMruCrShA3Y7yeUjrDHvytnoYl6vWPAb1bc1QQIzN_laqieJGwbAefBlDScX_LQZgtiFiXkqStyOB6fPnRWG6rp2BqNB.nxpH7OJ1eIOe1k9j0XFy8nYW7d.xAM0KYfRyfziQGAW6zJfcjiyvhB6KZku7hWFDfmCY8I7IS2sZmpjTUbVCip66uYgB7UcIfsD2ZLZts0h64khtc_iacoixnIUKXPufijFGsvxc2wwVh8dQy3dmKAIEVwKI9j8Cod.n6ZiDygnavlSZMldhkvWQBn2n6uguysxLer5p6y8o2_BZbf0egKYyzZmxaX2hYfB__cX93aFXKFnHUkm9qpYDayldw2Gn4RPqxuCxoKTOx8zgRk68njtQfi44Jvj2OJfYSpwCvRuP93S_bnSAwVllFeZf8VApJZGLrIEmiBGU0OS.JGP9UW6gBajYuW4lAHys7KM22nlcXA_enS99ReahhUli72rd6TIkAxB9sAzfuEw"};var cpo = document.createElement('script');cpo.src = '/cdn-cgi/challenge-platform/h/b/orchestrate/chl_page/v1?ray=9134f335fcc54c23';window._cf_chl_opt.cOgUHash = location.hash === '' && location.href.indexOf('#') !== -1 ? '#' : location.hash;window._cf_chl_opt.cOgUQuery = location.search === '' && location.href.slice(0, location.href.length - window._cf_chl_opt.cOgUHash.length).indexOf('?') !== -1 ? '?' : location.search;if (window.history && window.history.replaceState) {var ogU = location.pathname + window._cf_chl_opt.cOgUQuery + window._cf_chl_opt.cOgUHash;history.replaceState(null, null, "\/abstracts\/175813\/investigation-of-amorphous-silicon-a-si-thin-films-deposited-on-silicon-substrate-by-raman-spectroscopy?__cf_chl_rt_tk=TAI1kXVZFypODnj2cSP8kE9ch9jAGpQMfpT3fsnxerg-1739786632-1.0.1.1-PJzIyn2VpKT8ZwvkqCr.Q3i3LtpkeMnis5cod62AAng" + window._cf_chl_opt.cOgUHash);cpo.onload = function() {history.replaceState(null, null, ogU);}}document.getElementsByTagName('head')[0].appendChild(cpo);}());</script></body></html>