Atom Probe Tomography (LEAP 4000X Si/HR – Local Electrode Atom Probe)

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id="main-content" tabindex="-1"></a> <div class="grid-container margin-top-4"> <div class="nist-page__region nist-page__region--content-top"> <div class="nist-block"> <a class="usa-button usa-button--accent-cool" href="/web/20230208135954/https://www.nist.gov/laboratories/tools-instruments">TOOLS & INSTRUMENTS</a> </div> <div class="nist-block"> <h1 class="nist-page__title">Atom Probe Tomography (LEAP 4000X Si/HR – Local Electrode Atom Probe)</h1> </div> </div> </div> <div class="grid-container margin-top-4"> <div class="grid-row grid-gap-6"> <div class="nist-page__region nist-page__region--content tablet-lg:grid-col-8"> <div class="margin-bottom-5"> <div class="nist-block"> <div class="text-with-summary"> <div class="margin-left-4 margin-bottom-2 align-right"> <figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/mml/mmsd/microanalysis/atomprobe1_1.jpg?itok=APx1kfnb" data-media-id="177781"> <img src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/mml/mmsd/microanalysis/atomprobe1_1.jpg?itok=c6FlQ8Hi" width="350" height="285" alt="atomprobe1" loading="lazy" typeof="foaf:Image"/> <figcaption class="nist-image__caption"> <div data-caption-editable="true" class="nist-image__caption-content"> </div> </figcaption> </figure> </div> <p><strong><span><span><span><span><span><span>LEAP 4000X Si/HR</span></span></span></span></span></span></strong></p> <ul><li><span><span><span><span><span><span>Imaging time-of-flight mass spectrometer and field ion microscope.</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>Can deliver 3-D, isotopically- and chemically- resolved images</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>Sub-nanometer spatial resolution possible</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>High combined efficiency (100% ionization / 55% detection)</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>High Sensitivity (approx. 10 ppm at.)</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>Typical analysis volume approx. 100 nm x 100 nm x 300 nm. </span></span></span></span></span></span></li> <li><span><span><span><span><span><span>No matrix corrections or sensitivity factors required for quantification</span></span></span></span></span></span></li> </ul> </div> </div> <div class="nist-block"> <h2 class="nist-block__title">Specifications/Capabilities</h2> <div class="text-long"><p><strong><span><span><span><span>How it Works</span></span></span></span></strong></p> <figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/2020/06/30/imaging%20TOF%20graphic.png?itok=ws-LsO3M" data-media-id="583711"><img alt="Imaging Time-of-Flight graphic" height="287" loading="lazy" src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/2020/06/30/imaging%20TOF%20graphic.png?itok=FxVXSBI9" title="Imaging Time-of-Flight graphic" typeof="foaf:Image" width="480"><figcaption class="nist-image__caption"><div class="nist-image__caption-content" data-caption-editable="true"> Graphical representation of local electrode time-of-flight process. </div> </figcaption></figure><ul><li><span><span><span><span><span><span>Atom probe tomography requires samples that are small and needle-like in form. Typically, we prepare the samples in our dual beam FIB/SEM instrument via in-situ, site-specific lift out.</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>The sample is loaded into the LEAP analysis chamber, cooled to cryogenic temperatures, and positioned in front of a local electrode.</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>A high electric potential is applied between the sample and the local electrode to promote field evaporation and to accelerate any ions down the flight path and towards a 2-dimensional position sensitive detector. </span></span></span></span></span></span></li> <li><span><span><span><span><span><span>Data acquisition proceeds by subjecting the sample to repeated pulses, either voltage or thermal (UV laser), to trigger the controlled field evaporation of ions from the sample tip. </span></span></span></span></span></span></li> <li><span><span><span><span><span><span>The detector records the time-of-flight and the X and Y impact position on the detector for each ion. Using this information, the identity of each ion is known (mass-to-charge state ratio) and the point of origin on the sample surface can be determined. The Z depth for each ion is determined by order of arrival.</span></span></span></span></span></span></li> <li><span><span><span><span><span><span>A 3-D reconstruction of the sample is generated, atom-by-atom, by computer.</span></span></span></span></span></span></li> </ul><p><span><span><span><strong><span><span><span><span> T</span>ypical Outputs</span></span></span></strong></span></span></span></p> <ul><li><span><span><span><span><span><span>3-D, chemically- and isotopically- resolved images</span></span></span></span></span></span></li> </ul><figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/2020/06/30/AP%203D%20reconstruction%20graphic.png?itok=Ea4s22C8" data-media-id="583716"><img alt="Atom Probe 3D reconstruction graphic" height="126" loading="lazy" src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/2020/06/30/AP%203D%20reconstruction%20graphic.png?itok=VWY9o0-V" title="Atom Probe 3D reconstruction graphic" typeof="foaf:Image" width="480"><figcaption class="nist-image__caption"><div class="nist-image__caption-content" data-caption-editable="true"> 3-D reconstruction of Al-In-Ga-As sample showing < 6 nm thick buried layers enriched in Aluminum and depleted in Indium. </div> </figcaption></figure><ul></ul><ul><li><span><span><span><span><span><span>Time-of-flight and mass spectra</span></span></span></span></span></span></li> </ul><figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/2020/06/30/UOx%20mass%20spec%20graphic.png?itok=DsL1w9mn" data-media-id="583721"><img alt="Mass spectrum of uranium oxide reference material." height="274" loading="lazy" src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/2020/06/30/UOx%20mass%20spec%20graphic.png?itok=tITqEWnL" title="Mass spectrum of uranium oxide reference material." typeof="foaf:Image" width="480"><figcaption class="nist-image__caption"><div class="nist-image__caption-content" data-caption-editable="true"> Mass spectrum of uranium oxide reference material. </div> </figcaption></figure><p><span><span><span><strong><span><span><span>Site-Specific Atom Probe Sample Preparation via Dual Beam FIB-SEM</span></span></span></strong></span></span></span></p> <figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/2020/06/30/FIB%20steps%20graphic.png?itok=koRcAsz8" data-media-id="583726"><img alt="FIB sample preparation steps" height="244" loading="lazy" src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/2020/06/30/FIB%20steps%20graphic.png?itok=G6jQvkYW" title="FIB sample preparation steps" typeof="foaf:Image" width="480"><figcaption class="nist-image__caption"><div class="nist-image__caption-content" data-caption-editable="true"> A. Deposit a protective platinum cap on the surface of the specimen and on top of the region of interest. B. Use the ion beam to remove material on around the region of interest. C. Use the ion beam to remove material on around the region of interest. D. Use the ion beam to remove material on around the region of interest. E. Attach the in-situ micromanipulator to the free end of the sample. F. Lift the sample from the bulk specimen material. </div> </figcaption></figure><figure class="nist-image--lightbox nist-image" data-lightbox="https://www.nist.gov/sites/default/files/styles/2800_x_2800_limit/public/images/2020/06/30/FIB%20steps%20graphic%202.png?itok=FfIqSwLE" data-media-id="583731"><img alt="FIB sample preparation steps part 2" height="343" loading="lazy" src="/web/20230208135954im_/https://www.nist.gov/sites/default/files/styles/480_x_480_limit/public/images/2020/06/30/FIB%20steps%20graphic%202.png?itok=GUJSh5M1" title="FIB sample preparation steps part 2" typeof="foaf:Image" width="480"><figcaption class="nist-image__caption"><div class="nist-image__caption-content" data-caption-editable="true"> G. Attach a piece of the sample to an atom probe sample support post and cut the mounted piece free. H. Deposit additional Pt around the base of the sample to secure the mounting. I. Use the ion beam to mill the sample into a needle-like shape. J. Use the ion beam to mill the sample into a needle-like shape. K. The sample is ready for the atom probe. L. Repeat steps G through K for the remaining lift-out material to generate additional atom probe samples. </div> </figcaption></figure><p> </p> <p> </p></div> </div> </div> <div class="margin-bottom-5 no-block-margin"> <h2 class="nist-block__title">Usage Information</h2> <div class="nist-block"> <div class="nist-field nist-field--label-above text-long"> <h3 class="nist-field__label">Access Information</h3> <div class="nist-field__item"><p><span><span><span><span><span><span>Collaborative research projects are possible when the work is consistent with the Materials Measurement Science Division mission and interests. Please contact us to discuss possible collaborations.</span></span></span></span></span></span></p></div> </div> </div> </div> <div class="margin-bottom-5"> <div class="nist-block">  <div data-elastic-exclude="" class="nist-tags"> <a href="/web/20230208135954/https://www.nist.gov/topic-terms/analytical-chemistry" hreflang="en">Analytical chemistry</a>, <a href="/web/20230208135954/https://www.nist.gov/topic-terms/materials-characterization" hreflang="en">Materials characterization</a>, <a href="/web/20230208135954/https://www.nist.gov/topic-terms/composition-and-structure" hreflang="en">Composition and structure</a> and <a href="/web/20230208135954/https://www.nist.gov/topic-terms/nanometrology" hreflang="en">Nanometrology</a></div>  </div> </div> </div> <aside class="nist-page__region nist-page__region--sidebar-second tablet-lg:grid-col-4"> <div class="margin-bottom-5">  <div class="views-element-container nist-block nist-block--org" data-elastic-exclude=""> <h2 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class="nist-block__title">Contact</h2> <div class="nist-contact"> <ul class="nist-contact__items"> <li role="article" about="/people/frederick-meisenkothen" class="nist-contact__item"> <div class="nist-contact__name"><a href="/web/20230208135954/https://www.nist.gov/people/frederick-meisenkothen" title="View staff profile page">Frederick Meisenkothen</a></div> <div> <a href="https://web.archive.org/web/20230208135954/mailto:frederick.meisenkothen@nist.gov">frederick.meisenkothen@nist.gov</a> </div> <div> (301) 975-5181 </div> </li> </ul> </div> </div> </div> <div class="margin-bottom-5"> <div class="nist-block"> <h2 class="nist-block__title">Related Tools & Instruments</h2> <div class="nist-field nist-field--label-hidden nist-field--link-list entity-reference"> <div class="nist-field__items"> <div class="nist-field__item"><a href="/web/20230208135954/https://www.nist.gov/laboratories/tools-instruments/focused-ion-beam-helios-660" hreflang="en">Focused Ion Beam (Helios 660)</a></div> 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