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Vacuum soldering system compact and reliable</a></li><li class="item-574"><a href="/en/products/vacuum-soldering-systems/vadu-100-i.html" >VADU 100-I. Vacuum soldering system with induction</a></li><li class="item-576"><a href="/en/products/vacuum-soldering-systems/vadu-modular.html" >VADU Modular. Vacuum soldering system based on modules</a></li><li class="item-222"><a href="/en/products/vacuum-soldering-systems/vadu-200xl-w.html" >VADU 200XL-W. Vacuum soldering system. 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The flexible sintering system for conductive bonds</a></li><li class="item-854"><a href="/en/products/sintering-systems/sintering-system-sin-20.html" >SIN 20. The small scale, vacuum assisted sintering system</a></li></ul></li><li class="item-224 deeper parent"><a class="cat-bold" href="/en/products/vacuum-drying-systems.html" >Drying systems / Isolators</a><ul class="none"><li class="item-225"><a href="/en/products/vacuum-drying-systems/vacuum-drying-system-vsd.html" >VSD. Vacuum drying oven. Clean and contamination-free</a></li><li class="item-226"><a href="/en/products/vacuum-drying-systems/drying-system-vsd-e.html" >VSD-e. Vacuum drying oven. Compact, flexible for laboratories</a></li><li class="item-227"><a href="/en/products/vacuum-drying-systems/vt.html" >VT. Vacuum drying oven for standard processes</a></li><li class="item-229"><a href="/en/products/vacuum-drying-systems/circulating-air-ovens-ut.html" >UT. Circulating air oven. From drying till sterilizing</a></li><li class="item-231"><a href="/en/products/vacuum-drying-systems/vut.html" >VUT. Vacuum circulating air oven. Reliable drying</a></li><li class="item-233"><a href="/en/products/vacuum-drying-systems/vsdi.html" >VSDI. Vacuum drying oven with isolator. Safe drying</a></li><li class="item-234"><a href="/en/products/vacuum-drying-systems/vsdin.html" >VSDIN. Vacuum drying oven with isolator and pressure nutsch</a></li><li class="item-272"><a href="/en/products/vacuum-drying-systems/services.html" >Services</a></li></ul></li><li class="item-237 active deeper parent"><a class="cat-bold" href="/en/products/low-pressure-plasma-systems-en.html" >Low-pressure plasma systems</a><ul class="none"><li class="item-238"><a href="/en/products/low-pressure-plasma-systems-en/v6-g.html" >V6-G. Low-pressure plasma system. Efficient tabletop unit</a></li><li class="item-343"><a href="/en/products/low-pressure-plasma-systems-en/v10-g.html" >V10-G. Low-pressure plasma system. Removal of photoresists</a></li><li class="item-239"><a href="/en/products/low-pressure-plasma-systems-en/v15-g.html" >V15-G. Low-pressure plasma system. Volume 15 l | to 600 W</a></li><li class="item-240"><a href="/en/products/low-pressure-plasma-systems-en/v55-g.html" >V55-G. Low-pressure plasma system. Volume 55 l | to 1,200 W</a></li><li class="item-241"><a href="/en/products/low-pressure-plasma-systems-en/v80-g.html" >V80-G. Low-pressure plasma system. Volume 80 l | to 1,200 W</a></li><li class="item-705"><a href="/en/products/low-pressure-plasma-systems-en/v80-g-side.html" >V80-G-Side. Low-pressure plasma system. Lateral feed-in</a></li><li class="item-242"><a href="/en/products/low-pressure-plasma-systems-en/inline-systems.html" >Inline plasma systems. Automated surface treatment</a></li><li class="item-243"><a href="/en/products/low-pressure-plasma-systems-en/special-systems.html" >Special systems. Customized low-pressure plasma solutions</a></li><li class="item-244"><a href="/en/products/low-pressure-plasma-systems-en/reel-to-reel-systems.html" >Reel-to-reel systems. Plasma surface treatment of flexible tapes</a></li><li class="item-282 active deeper parent"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment.html" >Surface treatment with low-pressure plasma</a><ul class="none"><li class="item-283"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-activation.html" >Activation with low-pressure plasma. Bonding improvement</a></li><li class="item-284"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-cleaning.html" >Cleaning with low-pressure plasma. Ultrapure surfaces</a></li><li class="item-285 current active"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-etching.html" >Etching with low-pressure plasma. High-precision and flexible</a></li><li class="item-286"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-coating.html" >Coating with low-pressure plasma. Functional polymerization</a></li></ul></li><li class="item-518"><a href="/en/products/low-pressure-plasma-systems-en/application-notes.html" >Low-pressure plasma. Examples of surface treatments</a></li><li class="item-851"><a href="/en/products/low-pressure-plasma-systems-en/the-efficient-method-for-best-results.html" >The efficient method for best results</a></li></ul></li></ul></li><li class="item-536"><a href="/en/application.html" >Application</a></li><li class="item-245"><a href="/en/service-engl.html" >Service</a></li><li class="item-335 deeper parent"><a href="/en/representatives.html" >Representatives</a><ul class="none"><li class="item-569"><a href="/en/representatives/representatives-soldering-technology.html" >Soldering technology</a></li><li class="item-570"><a href="/en/representatives/representatives-drying-technology.html" >Drying technology</a></li><li class="item-571"><a href="/en/representatives/representatives-plasma-technology.html" >Plasma technology</a></li></ul></li><li class="item-246 deeper parent"><a href="/en/news.html" >News</a><ul class="none"><li class="item-247"><a href="/en/news/exhibitions.html" >Exhibitions</a></li><li class="item-248"><a href="/en/news/current-issues.html" >Latest news</a></li><li class="item-249"><a href="/en/news/press.html" >Press</a></li></ul></li><li class="item-250"><a href="/en/career.html" >Career</a></li></ul> </div> <div id="steuerung"><ul class="nav menu" id="navi"> <li class="item-103"><a href="/en/" >Home</a></li><li class="item-213 deeper parent"><a href="/en/company.html" >Company</a><ul class="none"><li class="item-214"><a href="/en/company/profile.html" >Profile</a></li><li class="item-215"><a href="/en/company/company-history.html" >Company history</a></li><li class="item-216"><a href="/en/company/references.html" >References</a></li><li class="item-217"><a href="/en/company/quality-management.html" >Quality management</a></li><li class="item-305"><a href="/en/company/environmental-management.html" >Environmental management</a></li><li class="item-349"><a href="/images/PDFs/PINK_General-Conditions-of-Sale.pdf" target="_blank" >General terms of sale</a></li><li class="item-436"><a href="/images/PDFs/PINK_General-Conditions-of-Purchase.pdf" target="_blank" >General terms of purchase</a></li></ul></li><li class="item-218 active deeper parent"><a href="/en/products.html" >Products</a><ul class="none"><li class="item-219 deeper parent"><a class="cat-bold" href="/en/products/vacuum-soldering-systems.html" >Vacuum soldering systems</a><ul class="none"><li class="item-220"><a href="/en/products/vacuum-soldering-systems/vadu-100.html" >VADU 100. Vacuum soldering system compact and reliable</a></li><li class="item-574"><a href="/en/products/vacuum-soldering-systems/vadu-100-i.html" >VADU 100-I. Vacuum soldering system with induction</a></li><li class="item-576"><a href="/en/products/vacuum-soldering-systems/vadu-modular.html" >VADU Modular. Vacuum soldering system based on modules</a></li><li class="item-222"><a href="/en/products/vacuum-soldering-systems/vadu-200xl-w.html" >VADU 200XL-W. Vacuum soldering system. Wafers up to 12”</a></li><li class="item-260"><a href="/en/products/vacuum-soldering-systems/carriers.html" >Customized carriers for vacuum soldering systems </a></li><li class="item-261"><a href="/en/products/vacuum-soldering-systems/automation.html" >Fully automated vacuum soldering in series production</a></li><li class="item-848"><a href="/en/products/vacuum-soldering-systems/advantages-of-the-vadus.html" >Advantages of the VADUs</a></li></ul></li><li class="item-331 deeper parent"><a class="cat-bold" href="/en/products/sintering-systems.html" >Sintering systems</a><ul class="none"><li class="item-523"><a href="/en/products/sintering-systems/automation-sintering-technology.html" >Fully automated sintering systems in series production</a></li><li class="item-332"><a href="/en/products/sintering-systems/sin-200-modular.html" >SIN 200+ modular. The flexible sintering system for conductive bonds</a></li><li class="item-854"><a href="/en/products/sintering-systems/sintering-system-sin-20.html" >SIN 20. The small scale, vacuum assisted sintering system</a></li></ul></li><li class="item-224 deeper parent"><a class="cat-bold" href="/en/products/vacuum-drying-systems.html" >Drying systems / Isolators</a><ul class="none"><li class="item-225"><a href="/en/products/vacuum-drying-systems/vacuum-drying-system-vsd.html" >VSD. Vacuum drying oven. Clean and contamination-free</a></li><li class="item-226"><a href="/en/products/vacuum-drying-systems/drying-system-vsd-e.html" >VSD-e. Vacuum drying oven. Compact, flexible for laboratories</a></li><li class="item-227"><a href="/en/products/vacuum-drying-systems/vt.html" >VT. Vacuum drying oven for standard processes</a></li><li class="item-229"><a href="/en/products/vacuum-drying-systems/circulating-air-ovens-ut.html" >UT. Circulating air oven. From drying till sterilizing</a></li><li class="item-231"><a href="/en/products/vacuum-drying-systems/vut.html" >VUT. Vacuum circulating air oven. Reliable drying</a></li><li class="item-233"><a href="/en/products/vacuum-drying-systems/vsdi.html" >VSDI. Vacuum drying oven with isolator. Safe drying</a></li><li class="item-234"><a href="/en/products/vacuum-drying-systems/vsdin.html" >VSDIN. Vacuum drying oven with isolator and pressure nutsch</a></li><li class="item-272"><a href="/en/products/vacuum-drying-systems/services.html" >Services</a></li></ul></li><li class="item-237 active deeper parent"><a class="cat-bold" href="/en/products/low-pressure-plasma-systems-en.html" >Low-pressure plasma systems</a><ul class="none"><li class="item-238"><a href="/en/products/low-pressure-plasma-systems-en/v6-g.html" >V6-G. Low-pressure plasma system. Efficient tabletop unit</a></li><li class="item-343"><a href="/en/products/low-pressure-plasma-systems-en/v10-g.html" >V10-G. Low-pressure plasma system. Removal of photoresists</a></li><li class="item-239"><a href="/en/products/low-pressure-plasma-systems-en/v15-g.html" >V15-G. Low-pressure plasma system. Volume 15 l | to 600 W</a></li><li class="item-240"><a href="/en/products/low-pressure-plasma-systems-en/v55-g.html" >V55-G. Low-pressure plasma system. Volume 55 l | to 1,200 W</a></li><li class="item-241"><a href="/en/products/low-pressure-plasma-systems-en/v80-g.html" >V80-G. Low-pressure plasma system. Volume 80 l | to 1,200 W</a></li><li class="item-705"><a href="/en/products/low-pressure-plasma-systems-en/v80-g-side.html" >V80-G-Side. Low-pressure plasma system. Lateral feed-in</a></li><li class="item-242"><a href="/en/products/low-pressure-plasma-systems-en/inline-systems.html" >Inline plasma systems. Automated surface treatment</a></li><li class="item-243"><a href="/en/products/low-pressure-plasma-systems-en/special-systems.html" >Special systems. Customized low-pressure plasma solutions</a></li><li class="item-244"><a href="/en/products/low-pressure-plasma-systems-en/reel-to-reel-systems.html" >Reel-to-reel systems. Plasma surface treatment of flexible tapes</a></li><li class="item-282 active deeper parent"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment.html" >Surface treatment with low-pressure plasma</a><ul class="none"><li class="item-283"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-activation.html" >Activation with low-pressure plasma. Bonding improvement</a></li><li class="item-284"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-cleaning.html" >Cleaning with low-pressure plasma. Ultrapure surfaces</a></li><li class="item-285 current active"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-etching.html" >Etching with low-pressure plasma. High-precision and flexible</a></li><li class="item-286"><a href="/en/products/low-pressure-plasma-systems-en/surface-treatment/plasma-coating.html" >Coating with low-pressure plasma. Functional polymerization</a></li></ul></li><li class="item-518"><a href="/en/products/low-pressure-plasma-systems-en/application-notes.html" >Low-pressure plasma. Examples of surface treatments</a></li><li class="item-851"><a href="/en/products/low-pressure-plasma-systems-en/the-efficient-method-for-best-results.html" >The efficient method for best results</a></li></ul></li></ul></li><li class="item-536"><a href="/en/application.html" >Application</a></li><li class="item-245"><a href="/en/service-engl.html" >Service</a></li><li class="item-335 deeper parent"><a href="/en/representatives.html" >Representatives</a><ul class="none"><li class="item-569"><a href="/en/representatives/representatives-soldering-technology.html" >Soldering technology</a></li><li class="item-570"><a href="/en/representatives/representatives-drying-technology.html" >Drying technology</a></li><li class="item-571"><a href="/en/representatives/representatives-plasma-technology.html" >Plasma technology</a></li></ul></li><li class="item-246 deeper parent"><a href="/en/news.html" >News</a><ul class="none"><li class="item-247"><a href="/en/news/exhibitions.html" >Exhibitions</a></li><li class="item-248"><a href="/en/news/current-issues.html" >Latest news</a></li><li class="item-249"><a href="/en/news/press.html" >Press</a></li></ul></li><li class="item-250"><a href="/en/career.html" >Career</a></li></ul> </div> </nav> </section> </header> <div id="inhalt"> <div id="content"><div class="item-page" itemscope itemtype="http://schema.org/Article"> <meta itemprop="inLanguage" content="en-GB" /> <div itemprop="articleBody"> <div class="banner"> <div class="content80"> <div class="bannerimg"><img title="Etching with low-pressure plasma" src="/images/img/Banner/Banner-aetzen.png" alt="Etching with low-pressure plasma" /></div> <div class="custom" > <div class="bannerinformation"> <div class="banner-links"> <p class="title">Download</p> <table> <tbody> <tr> <td><img title="download" src="/images/img/20-download.png" alt="download" /></td> <td><a href="/images/PDFs/plasmatechnology.pdf" target="_blank" rel="noopener"><span class="bold">Brochure Plasma Technology</span> - PDF 700 KB</a></td> </tr> </tbody> </table> </div> <div class="banner-links topline"> <p class="title">Overview</p> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en.html">Low-pressure plasma systems</a> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en/surface-treatment.html">Surface treatment </a> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en/application-notes.html">Application notes: examples</a> </div> </div></div> </div> </div> <article> <section> <h1 class="largefont">Etching with low-pressure plasma</h1> <h2 class="moremarginbottom center">High-precision surface etching</h2> <h3>Flexible application-optimized process</h3> <p>Virtually all sorts of organic material can be plasma etched. The etching effect is based on the same chemical reactions as the cleaning effect. Only the parameters such as time and intensity must be adjusted to the requirements.</p> <p>In addition to oxygen, other gases can be used which increase the etching rate significantly. In most cases, fluorinated gases as CF<sub>4</sub> are employed. The fluorinated radicals created in these processes are much more reactive than oxygen plasma. Their reaction products, however, must be retained by suitable filters.</p> <div class="articlebullet"><img title="Icon Advantages" src="/images/img/35-tick.png" alt="Icon Advantages" /> <h3>Advantages of plasma etching</h3> <ul> <li>High crack penetration, therefore also suitable for micro holes</li> <li>Virtually all dielectrics etchable</li> <li>No toxic chemicals necessary</li> <li>Simultaneous treatment of all holes</li> <li>Low operating costs</li> </ul> </div> <div class="articletext"><img title="Icon Advantages" src="/images/img/35-tick.png" alt="Icon Advantages" /> <h3>Ecological and economical benefits</h3> <p>Compared with conventional wet-chemical methods, plasma treatment uses very little chemicals and the mainly used process gases (e.g. oxygen, nitrogen or CF<sub>4</sub>) are harmless, easily available and inexpensive.</p> <p>Therefore there are no significant expenses for occupational safety or waste disposal. Energy consumption is relatively low and there is no need of a drying process of the components because it is a dry-chemical process.</p> </div> <h3 class="topline">Desmearing / Back-etching</h3> <p>One application in plasma technology is desmearing or back-etching of mechanically drilled circuit boards. This process can be applied simultaneously to both sides of the board and all holes. Due to the outstanding crack penetration of the plasma process, holes of < 0.3 mm can be back-etched, even materials such as Teflon.</p> <div class="articlepictures"> <h3>Modern circuit boards</h3> <img title="Modern circuit boardsn" src="/images/Plasmatechnik/Leiterplatte_Plasmaaetzen.jpg" alt="Modern circuit boards" /> <p class="center">Modern circuit boards and many other electronic components base on high-grade films</p> <p class="center">Processing can take place both by plasma etching and plasma activation</p> </div> <div class="articlebullet"><img title="Icon areas" src="/images/img/35-sector.png" alt="Icon areas" /> <h3>Areas of application</h3> <ul> <li>Semiconductor industry</li> <li>Circuit board industry</li> <li>Microelectronics</li> <li>MEMs</li> </ul> </div> <h3>Example</h3> <h3>Photoresist stripping</h3> <p>During the manufacture of microelectronic devices, removal of photoresist layers very often is an inevitable process step. By isotropic strip processes with plasma, such removal of organic layers is possible without any plasma damage. As an experienced provider of low-pressure plasma systems for surface treatment, PINK also offers customized plasma systems for resist removal.</p> <a href="/images/PDFs/Fotolackstrippen_engl.pdf" target="_blank">Read more: Photoresist stripping, PDF 87 KB</a> <a class="morepaddingtop" href="/en/products/low-pressure-plasma-systems-en/application-notes.html">More examples</a> <section class="bannerinformationmob"> <h2>More</h2> <div class="custom" > <div class="bannerinformation"> <div class="banner-links"> <p class="title">Download</p> <table> <tbody> <tr> <td><img title="download" src="/images/img/20-download.png" alt="download" /></td> <td><a href="/images/PDFs/plasmatechnology.pdf" target="_blank" rel="noopener"><span class="bold">Brochure Plasma Technology</span> - PDF 700 KB</a></td> </tr> </tbody> </table> </div> <div class="banner-links topline"> <p class="title">Overview</p> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en.html">Low-pressure plasma systems</a> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en/surface-treatment.html">Surface treatment </a> <a class="moremargin" href="/en/products/low-pressure-plasma-systems-en/application-notes.html">Application notes: examples</a> </div> </div></div> </section> </section> </article> <div class="custom" > <div class="banner lightgrey"> <div class="contact"><img title="Icon contact" src="/images/img/35-contact.png" alt="Icon contact" /> <h3 class="black center">Contact</h3> <p class="center">More information?</p> <a class="center" href="/en/contact.html">Contact us</a></div> </div></div> </div> </div> </div> </div> <footer> <div id="breadcrumb"> <div class="content80"> <ul itemscope itemtype="http://schema.org/BreadcrumbList" id="bread" class="breadcrumb"> <li class="active"> <span class="divider icon-location"></span> </li> <li itemprop="itemListElement" class="Array" itemscope itemtype="http://schema.org/ListItem"> <a itemprop="item" href="/en/" class="pathway"> <span itemprop="name"> Home </span> </a> <meta itemprop="position" content="1"> </li> <li itemprop="itemListElement" class="Array1" itemscope itemtype="http://schema.org/ListItem"> <a itemprop="item" href="/en/products.html" class="pathway"> <span itemprop="name"> Products </span> </a> <meta itemprop="position" content="2"> </li> <li itemprop="itemListElement" class="Array2" itemscope itemtype="http://schema.org/ListItem"> <a itemprop="item" href="/en/products/low-pressure-plasma-systems-en.html" class="pathway"> <span itemprop="name"> Low-pressure plasma systems </span> </a> <meta itemprop="position" content="3"> </li> <li itemprop="itemListElement" class="Array3" itemscope itemtype="http://schema.org/ListItem"> <a itemprop="item" href="/en/products/low-pressure-plasma-systems-en/surface-treatment.html" class="pathway"> <span itemprop="name"> Surface treatment with low-pressure plasma </span> </a> <meta itemprop="position" content="4"> </li> <li itemprop="itemListElement" itemscope itemtype="http://schema.org/ListItem" id="letzter" class="active"> <span itemprop="name"> Etching with low-pressure plasma. 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