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(PDF) Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays
<!DOCTYPE html> <html > <head> <meta charset="utf-8"> <meta rel="search" type="application/opensearchdescription+xml" href="/open_search.xml" title="Academia.edu"> <meta content="width=device-width, initial-scale=1" name="viewport"> <meta name="google-site-verification" content="bKJMBZA7E43xhDOopFZkssMMkBRjvYERV-NaN4R6mrs"> <meta name="csrf-param" content="authenticity_token" /> <meta name="csrf-token" content="fxWObh8A3D6GkPOMrdait_nQqaLmX9nT-ZH817cNr0dApeReEALIPHz6y2KElQH2KKRneRkK0rOGATAJNpQVcw" /> <meta name="citation_title" content="Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays" /> <meta name="citation_publication_date" content="1987/01/01" /> <meta name="citation_journal_title" content="MRS Proceedings" /> <meta name="citation_author" content="Daniel Makowiecki" /> <meta name="twitter:card" content="summary" /> <meta name="twitter:url" content="https://www.academia.edu/47214707/Fabrication_and_Evaluation_of_Transmissive_Multilayer_Optics_for_8keVX_Rays" /> <meta name="twitter:title" content="Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays" /> <meta name="twitter:description" content="ABSTRACTWe have made and tested several sliced multilayer structures which can function as transmissive x-ray optical elements (diffraction gratings, zone plates, and phase gratings) at 8 keV. Our automated multilayer sputtering system is optimized" /> <meta name="twitter:image" content="https://0.academia-photos.com/1053498/2684188/33943271/s200_daniel.makowiecki.jpg" /> <meta property="fb:app_id" content="2369844204" /> <meta property="og:type" content="article" /> <meta property="og:url" content="https://www.academia.edu/47214707/Fabrication_and_Evaluation_of_Transmissive_Multilayer_Optics_for_8keVX_Rays" /> <meta property="og:title" content="Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays" /> <meta property="og:image" content="http://a.academia-assets.com/images/open-graph-icons/fb-paper.gif" /> <meta property="og:description" content="ABSTRACTWe have made and tested several sliced multilayer structures which can function as transmissive x-ray optical elements (diffraction gratings, zone plates, and phase gratings) at 8 keV. Our automated multilayer sputtering system is optimized" /> <meta property="article:author" content="https://torun-pl.academia.edu/DanielMakowiecki" /> <meta name="description" content="ABSTRACTWe have made and tested several sliced multilayer structures which can function as transmissive x-ray optical elements (diffraction gratings, zone plates, and phase gratings) at 8 keV. Our automated multilayer sputtering system is optimized" /> <title>(PDF) Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays</title> <link rel="canonical" href="https://www.academia.edu/47214707/Fabrication_and_Evaluation_of_Transmissive_Multilayer_Optics_for_8keVX_Rays" /> <script async src="https://www.googletagmanager.com/gtag/js?id=G-5VKX33P2DS"></script> <script> window.dataLayer = window.dataLayer || []; function gtag(){dataLayer.push(arguments);} gtag('js', new Date()); gtag('config', 'G-5VKX33P2DS', { cookie_domain: 'academia.edu', send_page_view: false, }); gtag('event', 'page_view', { 'controller': "single_work", 'action': "show", 'controller_action': 'single_work#show', 'logged_in': 'false', 'edge': 'unknown', // Send nil if there is no A/B test bucket, in case some records get logged // with missing data - that way we can distinguish between the two cases. // ab_test_bucket should be of the form <ab_test_name>:<bucket> 'ab_test_bucket': null, }) </script> <script> var $controller_name = 'single_work'; var $action_name = "show"; var $rails_env = 'production'; var $app_rev = '410bb8046636b6cbb92bad6299890fd94aedf70d'; var $domain = 'academia.edu'; var $app_host = "academia.edu"; var $asset_host = "academia-assets.com"; var $start_time = new Date().getTime(); var $recaptcha_key = "6LdxlRMTAAAAADnu_zyLhLg0YF9uACwz78shpjJB"; var $recaptcha_invisible_key = "6Lf3KHUUAAAAACggoMpmGJdQDtiyrjVlvGJ6BbAj"; var $disableClientRecordHit = false; </script> <script> window.require = { config: function() { return function() {} } } </script> <script> window.Aedu = window.Aedu || {}; window.Aedu.hit_data = null; window.Aedu.serverRenderTime = new Date(1740503320000); window.Aedu.timeDifference = new Date().getTime() - 1740503320000; </script> <script type="application/ld+json">{"@context":"https://schema.org","@type":"ScholarlyArticle","abstract":"ABSTRACTWe have made and tested several sliced multilayer structures which can function as transmissive x-ray optical elements (diffraction gratings, zone plates, and phase gratings) at 8 keV. Our automated multilayer sputtering system is optimized to sputter layers of arbitrary thickness for very large total deposits at high deposition rates. Diffraction patterns produced by the multilayer devices closely match theoretical predictions. Such transmissive optics have the potential for wide application in high resolution microscope and spectrometer systems.","author":[{"@context":"https://schema.org","@type":"Person","name":"Daniel Makowiecki","url":"https://torun-pl.academia.edu/DanielMakowiecki"}],"contributor":[],"dateCreated":"2021-04-21","datePublished":"1987-01-01","headline":"Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays","image":"https://attachments.academia-assets.com/66426247/thumbnails/1.jpg","inLanguage":"en","keywords":["Numerical Simulation","Electromagnetic Radiation","Composite Material","X-Ray Optics","High Resolution","Diffractive optics","Ionizing Radiation","Diffraction Grating"],"publication":"MRS Proceedings","publisher":{"@context":"https://schema.org","@type":"Organization","name":"Cambridge University Press 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window.loswp.work = {"work":{"id":47214707,"created_at":"2021-04-21T06:39:52.522-07:00","from_world_paper_id":168529441,"updated_at":"2025-02-03T09:40:05.531-08:00","_data":{"abstract":"ABSTRACTWe have made and tested several sliced multilayer structures which can function as transmissive x-ray optical elements (diffraction gratings, zone plates, and phase gratings) at 8 keV. Our automated multilayer sputtering system is optimized to sputter layers of arbitrary thickness for very large total deposits at high deposition rates. Diffraction patterns produced by the multilayer devices closely match theoretical predictions. Such transmissive optics have the potential for wide application in high resolution microscope and spectrometer systems.","publisher":"Cambridge University Press (CUP)","ai_title_tag":"Transmissive Multilayer Optics for 8keV X-rays","publication_date":"1987,,","publication_name":"MRS Proceedings"},"document_type":"paper","pre_hit_view_count_baseline":null,"quality":"high","language":"en","title":"Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays","broadcastable":false,"draft":null,"has_indexable_attachment":true,"indexable":true}}["work"]; window.loswp.workCoauthors = [1053498]; window.loswp.locale = "en"; window.loswp.countryCode = "SG"; window.loswp.cwvAbTestBucket = ""; window.loswp.designVariant = "ds_vanilla"; window.loswp.fullPageMobileSutdModalVariant = "control"; window.loswp.useOptimizedScribd4genScript = false; window.loginModal = {}; window.loginModal.appleClientId = 'edu.academia.applesignon'; window.userInChina = "false";</script><script defer="" src="https://accounts.google.com/gsi/client"></script><div class="ds-loswp-container"><div class="ds-work-card--grid-container"><div class="ds-work-card--container js-loswp-work-card"><div class="ds-work-card--cover"><div class="ds-work-cover--wrapper"><div class="ds-work-cover--container"><button class="ds-work-cover--clickable js-swp-download-button" data-signup-modal="{"location":"swp-splash-paper-cover","attachmentId":66426247,"attachmentType":"pdf"}"><img alt="First page of “Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays”" class="ds-work-cover--cover-thumbnail" src="https://0.academia-photos.com/attachment_thumbnails/66426247/mini_magick20210425-16924-5ew5cf.png?1619365912" /><img alt="PDF Icon" class="ds-work-cover--file-icon" src="//a.academia-assets.com/images/single_work_splash/adobe_icon.svg" /><div class="ds-work-cover--hover-container"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">download</span><p>Download Free PDF</p></div><div class="ds-work-cover--ribbon-container">Download Free PDF</div><div class="ds-work-cover--ribbon-triangle"></div></button></div></div></div><div class="ds-work-card--work-information"><h1 class="ds-work-card--work-title">Fabrication and Evaluation of Transmissive Multilayer Optics for 8keVX Rays</h1><div class="ds-work-card--work-authors ds-work-card--detail"><a class="ds-work-card--author js-wsj-grid-card-author ds2-5-body-md ds2-5-body-link" data-author-id="1053498" href="https://torun-pl.academia.edu/DanielMakowiecki"><img alt="Profile image of Daniel Makowiecki" class="ds-work-card--author-avatar" src="https://0.academia-photos.com/1053498/2684188/33943271/s65_daniel.makowiecki.jpg" />Daniel Makowiecki</a></div><div class="ds-work-card--detail"><p class="ds-work-card--detail ds2-5-body-sm">1987, MRS Proceedings</p><div class="ds-work-card--work-metadata"><div class="ds-work-card--work-metadata__stat"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">visibility</span><p class="ds2-5-body-sm" id="work-metadata-view-count">…</p></div><div class="ds-work-card--work-metadata__stat"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">description</span><p class="ds2-5-body-sm">10 pages</p></div><div class="ds-work-card--work-metadata__stat"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">link</span><p class="ds2-5-body-sm">1 file</p></div></div><script>(async () => { const workId = 47214707; 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Our automated multilayer sputtering system is optimized to sputter layers of arbitrary thickness for very large total deposits at high deposition rates. Diffraction patterns produced by the multilayer devices closely match theoretical predictions. Such transmissive optics have the potential for wide application in high resolution microscope and spectrometer systems.</p><div class="ds-work-card--button-container"><button class="ds2-5-button js-swp-download-button" data-signup-modal="{"location":"continue-reading-button--work-card","attachmentId":66426247,"attachmentType":"pdf","workUrl":"https://www.academia.edu/47214707/Fabrication_and_Evaluation_of_Transmissive_Multilayer_Optics_for_8keVX_Rays"}">See full PDF</button><button class="ds2-5-button ds2-5-button--secondary js-swp-download-button" data-signup-modal="{"location":"download-pdf-button--work-card","attachmentId":66426247,"attachmentType":"pdf","workUrl":"https://www.academia.edu/47214707/Fabrication_and_Evaluation_of_Transmissive_Multilayer_Optics_for_8keVX_Rays"}"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">download</span>Download PDF</button></div><div class="ds-signup-banner-trigger-container"><div class="ds-signup-banner-trigger ds-signup-banner-trigger-control"></div></div><div class="ds-signup-banner ds-signup-banner-control"><div id="ds-signup-banner-close-button"><button class="ds2-5-button ds2-5-button--secondary ds2-5-button--inverse"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">close</span></button></div><div class="ds-signup-banner-ctas"><img src="//a.academia-assets.com/images/academia-logo-capital-white.svg" /><h4 class="ds2-5-heading-serif-sm">Sign up for access to the world's latest research</h4><button class="ds2-5-button ds2-5-button--inverse ds2-5-button--full-width js-swp-download-button" data-signup-modal="{"location":"signup-banner"}">Sign up for free<span class="material-symbols-outlined" style="font-size: 20px" translate="no">arrow_forward</span></button></div><div class="ds-signup-banner-divider"></div><div class="ds-signup-banner-reasons"><div class="ds-signup-banner-reasons-item"><span class="material-symbols-outlined" style="font-size: 24px" translate="no">check</span><span>Get notified about relevant papers</span></div><div class="ds-signup-banner-reasons-item"><span class="material-symbols-outlined" style="font-size: 24px" translate="no">check</span><span>Save papers to use in your research</span></div><div class="ds-signup-banner-reasons-item"><span class="material-symbols-outlined" style="font-size: 24px" translate="no">check</span><span>Join the discussion with peers</span></div><div class="ds-signup-banner-reasons-item"><span class="material-symbols-outlined" style="font-size: 24px" translate="no">check</span><span>Track your impact</span></div></div></div><script>(() => { // Set up signup banner show/hide behavior: // 1. 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We will present data to show both azimuthal and linear uniformity of these coatings.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Multilayer optics for hard x-ray astronomy","attachmentId":94695885,"attachmentType":"pdf","work_url":"https://www.academia.edu/91396574/Multilayer_optics_for_hard_x_ray_astronomy","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/91396574/Multilayer_optics_for_hard_x_ray_astronomy"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="2" data-entity-id="26084149" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/26084149/_title_Multilayers_for_next_generation_x_ray_sources_title_"><title>Multilayers for next-generation x-ray sources</title></a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="38763428" href="https://independent.academia.edu/CharlesTarrio">Charles Tarrio</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Damage to VUV, EUV, and X-ray Optics, 2007</p><p class="ds-related-work--abstract ds2-5-body-sm">Multilayers are artificially layered structures that can be used to create optics and optical elements for a broad range of x-ray wavelengths, or can be optimized for other applications. 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This information is crucial to design optics for future x-ray free electron lasers and to benchmark computer codes that simulate damage processes.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"\u003ctitle\u003eMultilayers for next-generation x-ray sources\u003c/title\u003e","attachmentId":46436417,"attachmentType":"pdf","work_url":"https://www.academia.edu/26084149/_title_Multilayers_for_next_generation_x_ray_sources_title_","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/26084149/_title_Multilayers_for_next_generation_x_ray_sources_title_"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="3" data-entity-id="20209425" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/20209425/Advanced_X_ray_diffractive_optics">Advanced X-ray diffractive optics</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="54011089" href="https://independent.academia.edu/GTzvetkov">G. Tzvetkov</a><span>, </span><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="41390463" href="https://uni-erlangen.academia.edu/RainerFink">Rainer Fink</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of Physics: Conference Series, 2009</p><p class="ds-related-work--abstract ds2-5-body-sm">X-ray microscopy greatly benefits from the advances in x-ray optics. At the Paul Scherrer Institut, developments in x-ray diffractive optics include the manufacture and optimization of Fresnel zone plates (FZPs) and diffractive optical elements for both soft and hard x-ray regimes. In particular, we demonstrate here a novel method for the production of ultra-high resolution FZPs. This technique is based on the deposition of a zone plate material (iridium) onto the sidewalls of a prepatterned template structure (silicon) by atomic layer deposition. This approach overcomes the limitations due to electron-beam writing of dense patterns in FZP fabrication and provides a clear route to push the resolution into sub-10 nm regime. A FZP fabricated by this method was used to resolve test structures with 12 nm lines and spaces at the scanning transmission x-ray microscope of the PolLux beamline of the Swiss Light Source at 1.2 keV photon energy.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Advanced X-ray diffractive optics","attachmentId":41232783,"attachmentType":"pdf","work_url":"https://www.academia.edu/20209425/Advanced_X_ray_diffractive_optics","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/20209425/Advanced_X_ray_diffractive_optics"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="4" data-entity-id="51859035" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/51859035/High_efficiency_x_ray_gratings_with_asymmetric_cut_multilayers">High-efficiency x-ray gratings with asymmetric-cut multilayers</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="30253304" href="https://desy.academia.edu/SasaBajt">Sasa Bajt</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of the Optical Society of America A, 2012</p><p class="ds-related-work--abstract ds2-5-body-sm">We present the fabrication and analysis of efficient and highly dispersive gratings for the x-ray and extreme ultraviolet (EUV) regime. We show that an asymmetric-cut multilayer structure can act as a near-perfect blazed grating. The precision and high line density are achieved by layer deposition of materials, which can be controlled to the angstrom level. We demonstrate this in the EUV regime with two structures made by cutting and polishing magnetron-sputtered multilayer mirrors of over 2000 bilayers thick, each with a period of 6.88 nm. These were cut at angles of 2.9°and 7.8°to the surface. Within the 3% bandwidth rocking curve of the multilayer, the angular dispersion of the diffracted wave was in agreement with the grating equation for elements with 7250 and 19,700 line pairs/mm, respectively. The dependence of the measured efficiency was in excellent agreement with a formulation of dynamical diffraction theory for multilayered structures. At a wavelength of 13.2 nm, the efficiency of the first-order diffraction was over 95% of the reflectivity of the uncut multilayer. We predict that such structures should also be effective at shorter x-ray wavelengths. Both the Laue (transmitting) and Bragg (reflecting) geometries are incorporated in our formalism, which is applied to the analysis of multilayer Laue lenses and focusing and dispersing Bragg optics.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"High-efficiency x-ray gratings with asymmetric-cut multilayers","attachmentId":69393217,"attachmentType":"pdf","work_url":"https://www.academia.edu/51859035/High_efficiency_x_ray_gratings_with_asymmetric_cut_multilayers","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/51859035/High_efficiency_x_ray_gratings_with_asymmetric_cut_multilayers"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="5" data-entity-id="104656377" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/104656377/Applications_of_non_periodic_multilayer_optics_for_high_resolution_x_ray_microscopes_below_30_keV">Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="39064889" href="https://independent.academia.edu/PHoghoj">P. Hoghoj</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Review of Scientific Instruments, 2012</p><p class="ds-related-work--abstract ds2-5-body-sm">Multilayer mirrors with enhanced bandwidth were developed with special performances for dense plasma diagnostics and mainly for high spatial resolution x-ray imaging. The multilayer coatings are designed to provide broadband x-ray reflectance at low grazing incidence angles. They are deposited onto toroidal mirror substrates. Our research is directed at the development of non-periodic (depth graded) W/Si multilayer specifically designed for use in the 1 to 30 keV photon energy band. First, we present a study for a 5 to 22 keV x-ray spectral window at 0.45° grazing angle. The goal is to obtain a high and constant reflectivity. Second, we have modeled a broadband mirror coating for harder x-rays in the range from 10 to 30 keV, with a non-periodic structure containing 300 W/SiC layers with periods in the range from 0.8 to 4 nm, designed for 0.35° grazing incidence angle.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Applications of non-periodic multilayer optics for high-resolution x-ray microscopes below 30 keV","attachmentId":104326722,"attachmentType":"pdf","work_url":"https://www.academia.edu/104656377/Applications_of_non_periodic_multilayer_optics_for_high_resolution_x_ray_microscopes_below_30_keV","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/104656377/Applications_of_non_periodic_multilayer_optics_for_high_resolution_x_ray_microscopes_below_30_keV"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="6" data-entity-id="104656380" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/104656380/Multilayer_optics_for_monochromatic_high_resolution_X_ray_imaging_diagnostic_in_a_broad_photon_energy_range_from_2_keV_to_22_keV">Multilayer optics for monochromatic high-resolution X-ray imaging diagnostic in a broad photon energy range from 2 keV to 22 keV</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="39064889" href="https://independent.academia.edu/PHoghoj">P. Hoghoj</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2014</p><p class="ds-related-work--abstract ds2-5-body-sm">The "Commissariat à l'énergie atomique et aux énergies alternatives" (CEA) studies and designs advanced X-ray diagnostics to probe dense plasmas produced at the future Laser MegaJoule (LMJ) facility. Mainly for X-ray imaging with high spatial resolution, different types of multilayer mirrors were developed to provide broadband X-ray reflectance at grazing incidence. These coatings are deposited on two toroidal mirror substrates that are then mounted into a Wolter-type geometry (working at a grazing angle of 0.451) to realize an X-ray microscope. Non-periodic (depth graded) W/Si multilayer can be used in the broad photon energy range from 2 keV to 22 keV. A third flat mirror can be added for the spectral selection of the microscope. This mirror is coated with a Mo/Si multilayer for which the d-spacing varies in the longitudinal direction to satisfy the Bragg condition within the angular acceptance of the microscope and also to compensate the angular dispersion due to the field of the microscope. We present a study of such a so-called Göbel mirror which was optimized for photon energy of 10.35 keV. The three mirrors were coated using magnetron sputtering technology by Xenocs SA. The reflectance in the entire photon energy range was determined in the laboratory of the Physikalisch-Technische Bundesanstalt (PTB) at the synchrotron radiation facility BESSY II in Berlin.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Multilayer optics for monochromatic high-resolution X-ray imaging diagnostic in a broad photon energy range from 2 keV to 22 keV","attachmentId":104326719,"attachmentType":"pdf","work_url":"https://www.academia.edu/104656380/Multilayer_optics_for_monochromatic_high_resolution_X_ray_imaging_diagnostic_in_a_broad_photon_energy_range_from_2_keV_to_22_keV","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/104656380/Multilayer_optics_for_monochromatic_high_resolution_X_ray_imaging_diagnostic_in_a_broad_photon_energy_range_from_2_keV_to_22_keV"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="7" data-entity-id="100020247" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/100020247/Diffraction_limited_X_ray_optics_technology_metrology_applications">Diffraction limited X-ray optics: technology, metrology, applications</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="229502176" href="https://independent.academia.edu/NChkhalo">Nikolai Chkhalo</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Physics-Uspekhi, 2019</p><p class="ds-related-work--abstract ds2-5-body-sm">Progress in the fabrication technology of normal incidence multilayer interference mirrors permits the traditional optical methods of microscopy, astronomy, and lithography to be transferred to the vacuum ultraviolet (VUV, wavelength: 10–200 nm) and the long-wavelength part of the soft X-ray (SXR, wavelength: 2–10 nm) ranges. Due to the short wavelength and properties of interaction with the substance, the radiation of these ranges provides unique opportunities in nanophysics, nanotechnology, and nanodiagnostics of matter. To use the potential of a short wavelength in full, diffraction-limited optical elements are required. Compared to traditional optical elements, their accuracy must be at least two orders of magnitude higher. The article provides an analysis of the real capabilities of traditional methods of making and studying precision optical elements and reports on the methods of fabrication and characterization of diffraction-limited optics for the VUV and SXR ranges develope...</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Diffraction limited X-ray optics: technology, metrology, applications","attachmentId":100956221,"attachmentType":"pdf","work_url":"https://www.academia.edu/100020247/Diffraction_limited_X_ray_optics_technology_metrology_applications","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/100020247/Diffraction_limited_X_ray_optics_technology_metrology_applications"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="8" data-entity-id="29205221" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/29205221/Efficient_focusing_of_8_keV_X_rays_with_multilayer_Fresnel_zone_plates_fabricated_by_atomic_layer_deposition_and_focused_ion_beam_milling">Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="55131560" href="https://independent.academia.edu/AdrianaSzeghalmi">Adriana Szeghalmi</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of Synchrotron Radiation, 2013</p><p class="ds-related-work--abstract ds2-5-body-sm">Fresnel zone plates (FZPs) recently showed significant improvement by focusing soft X-rays down to $ 10 nm. In contrast to soft X-rays, generally a very high aspect ratio FZP is needed for efficient focusing of hard X-rays. Therefore, FZPs had limited success in the hard X-ray range owing to difficulties of manufacturing high-aspect-ratio zone plates using conventional techniques. Here, employing a method of fabrication based on atomic layer deposition (ALD) and focused ion beam (FIB) milling, FZPs with very high aspect ratios were prepared. Such multilayer FZPs with outermost zone widths of 10 and 35 nm and aspect ratios of up to 243 were tested for their focusing properties at 8 keV and shown to focus hard X-rays efficiently. This success was enabled by the outstanding layer quality thanks to ALD. Via the use of FIB for slicing the multilayer structures, desired aspect ratios could be obtained by precisely controlling the thickness. Experimental diffraction efficiencies of multilayer FZPs fabricated via this combination reached up to 15.58% at 8 keV. In addition, scanning transmission X-ray microscopy experiments at 1.5 keV were carried out using one of the multilayer FZPs and resolved a 60 nm feature size. Finally, the prospective of different material combinations with various outermost zone widths at 8 and 17 keV is discussed in the light of the coupled wave theory and the thin-grating approximation. Al 2 O 3 /Ir is outlined as a promising future material candidate for extremely high resolution with a theoretical efficiency of more than 20% for as small an outermost zone width as 10 nm at 17 keV.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling","attachmentId":49656272,"attachmentType":"pdf","work_url":"https://www.academia.edu/29205221/Efficient_focusing_of_8_keV_X_rays_with_multilayer_Fresnel_zone_plates_fabricated_by_atomic_layer_deposition_and_focused_ion_beam_milling","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/29205221/Efficient_focusing_of_8_keV_X_rays_with_multilayer_Fresnel_zone_plates_fabricated_by_atomic_layer_deposition_and_focused_ion_beam_milling"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-wsj-grid-card" data-collection-position="9" data-entity-id="7260354" data-sort-order="default"><a class="ds-related-work--title js-wsj-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/7260354/Phase_and_intensity_control_through_diffractive_optical_elements_in_X_ray_microscopy">Phase and intensity control through diffractive optical elements in X-ray microscopy</a><div class="ds-related-work--metadata"><a class="js-wsj-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="12658850" href="https://independent.academia.edu/OlivierDhez">Olivier Dhez</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of Electron Spectroscopy and Related Phenomena, 2005</p><p class="ds-related-work--abstract ds2-5-body-sm">Diffractive optics now plays a major role in optical systems for the extreme ultraviolet and X-ray region. For example, zone plates in their different appearances are widely used for focusing X-rays, as monochromatizing condenser optics, and for high resolution imaging, particularly in X-ray microscopy. The idea in this paper is based upon a more general approach to solve optical problems by transforming a given light distribution or wave as input into the desired waveform on the output of a single X-ray optical component.</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Phase and intensity control through diffractive optical elements in X-ray microscopy","attachmentId":48546618,"attachmentType":"pdf","work_url":"https://www.academia.edu/7260354/Phase_and_intensity_control_through_diffractive_optical_elements_in_X_ray_microscopy","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-wsj-grid-card-view-pdf" href="https://www.academia.edu/7260354/Phase_and_intensity_control_through_diffractive_optical_elements_in_X_ray_microscopy"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div></div></div><div class="ds-sticky-ctas--wrapper js-loswp-sticky-ctas hidden"><div class="ds-sticky-ctas--grid-container"><div class="ds-sticky-ctas--container"><button class="ds2-5-button js-swp-download-button" data-signup-modal="{"location":"continue-reading-button--sticky-ctas","attachmentId":66426247,"attachmentType":"pdf","workUrl":null}">See full PDF</button><button class="ds2-5-button ds2-5-button--secondary js-swp-download-button" data-signup-modal="{"location":"download-pdf-button--sticky-ctas","attachmentId":66426247,"attachmentType":"pdf","workUrl":null}"><span class="material-symbols-outlined" style="font-size: 20px" translate="no">download</span>Download PDF</button></div></div></div><div class="ds-below-fold--grid-container"><div class="ds-work--container js-loswp-embedded-document"><div class="attachment_preview" data-attachment="Attachment_66426247" style="display: none"><div class="js-scribd-document-container"><div class="scribd--document-loading js-scribd-document-loader" style="display: block;"><img alt="Loading..." src="//a.academia-assets.com/images/loaders/paper-load.gif" /><p>Loading Preview</p></div></div><div style="text-align: center;"><div class="scribd--no-preview-alert js-preview-unavailable"><p>Sorry, preview is currently unavailable. You can download the paper by clicking the button above.</p></div></div></div></div><div class="ds-sidebar--container js-work-sidebar"><div class="ds-related-content--container"><h2 class="ds-related-content--heading">Related papers</h2><div class="ds-related-work--container js-related-work-sidebar-card" data-collection-position="0" data-entity-id="34122409" data-sort-order="default"><a class="ds-related-work--title js-related-work-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/34122409/Grazing_incidence_mirror_e_er_J2s_n_I_AD_Sample_n_1_%C3%A1_1_Multila_er_mirror_Beam_conditioning_multilayer_optics_for_laboratory_X_ray_sources">Grazing incidence mirror e<er=J2s n I AD Sample n = 1-á - 1 Multila er mirror Beam conditioning multilayer optics for laboratory X-ray sources</a><div class="ds-related-work--metadata"><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="66965913" href="https://independent.academia.edu/YuriyPlatonov">Yuriy Platonov</a></div><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Grazing incidence mirror e\u003cer=J2s n I AD Sample n = 1-á - 1 Multila er mirror Beam conditioning multilayer optics for laboratory X-ray sources","attachmentId":54051628,"attachmentType":"pdf","work_url":"https://www.academia.edu/34122409/Grazing_incidence_mirror_e_er_J2s_n_I_AD_Sample_n_1_%C3%A1_1_Multila_er_mirror_Beam_conditioning_multilayer_optics_for_laboratory_X_ray_sources","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-related-work-grid-card-view-pdf" href="https://www.academia.edu/34122409/Grazing_incidence_mirror_e_er_J2s_n_I_AD_Sample_n_1_%C3%A1_1_Multila_er_mirror_Beam_conditioning_multilayer_optics_for_laboratory_X_ray_sources"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-related-work-sidebar-card" data-collection-position="1" data-entity-id="22310550" data-sort-order="default"><a class="ds-related-work--title js-related-work-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/22310550/_title_X_ray_multilayer_coatings_for_use_at_energies_above_100_keV_title_"><title>X-ray multilayer coatings for use at energies above 100 keV</title></a><div class="ds-related-work--metadata"><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="43632912" href="https://utk.academia.edu/RamkiKalyanaraman">Ramki Kalyanaraman</a></div><p class="ds-related-work--metadata ds2-5-body-xs">X-Ray Optics, Instruments, and Missions III, 2000</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"\u003ctitle\u003eX-ray multilayer coatings for use at energies above 100 keV\u003c/title\u003e","attachmentId":42950295,"attachmentType":"pdf","work_url":"https://www.academia.edu/22310550/_title_X_ray_multilayer_coatings_for_use_at_energies_above_100_keV_title_","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-related-work-grid-card-view-pdf" href="https://www.academia.edu/22310550/_title_X_ray_multilayer_coatings_for_use_at_energies_above_100_keV_title_"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-related-work-sidebar-card" data-collection-position="2" data-entity-id="98977458" data-sort-order="default"><a class="ds-related-work--title js-related-work-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/98977458/Nanofabrication_and_diffractive_optics_for_high_resolution_x_ray_applications">Nanofabrication and diffractive optics for high-resolution x-ray applications</a><div class="ds-related-work--metadata"><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="258615545" href="https://independent.academia.edu/LewisJohnson43">Lewis Johnson</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Nanofabrication and diffractive optics for high-resolution x-ray applications","attachmentId":100184976,"attachmentType":"pdf","work_url":"https://www.academia.edu/98977458/Nanofabrication_and_diffractive_optics_for_high_resolution_x_ray_applications","alternativeTracking":true}"><span class="material-symbols-outlined" style="font-size: 18px" translate="no">download</span><span class="ds2-5-text-link__content">Download free PDF</span></button><a class="ds2-5-text-link ds2-5-text-link--inline js-related-work-grid-card-view-pdf" href="https://www.academia.edu/98977458/Nanofabrication_and_diffractive_optics_for_high_resolution_x_ray_applications"><span class="ds2-5-text-link__content">View PDF</span><span class="material-symbols-outlined" style="font-size: 18px" translate="no">chevron_right</span></a></div></div><div class="ds-related-work--container js-related-work-sidebar-card" data-collection-position="3" data-entity-id="75525195" data-sort-order="default"><a class="ds-related-work--title js-related-work-grid-card-title ds2-5-body-md ds2-5-body-link" href="https://www.academia.edu/75525195/X_ray_multilayer_optics_for_Indus_synchrotrons_application">X-ray multilayer optics for Indus synchrotrons application</a><div class="ds-related-work--metadata"><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="34459677" href="https://independent.academia.edu/MaheswarNayak">Maheswar Nayak</a></div><p class="ds-related-work--metadata ds2-5-body-xs">AIP Conference Proceedings, 2015</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"X-ray multilayer optics for Indus 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href="https://www.academia.edu/13884423/Multilayer_X_ray_optics_at_CHESS">Multilayer X-ray optics at CHESS</a><div class="ds-related-work--metadata"><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="33091877" href="https://independent.academia.edu/HaoQuan">Quan Hao</a><span>, </span><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="32960979" href="https://cornell.academia.edu/DetlefSmilgies">Detlef M Smilgies</a><span>, </span><a class="js-related-work-grid-card-author ds2-5-body-sm ds2-5-body-link" data-author-id="42172919" href="https://cornell.academia.edu/DonaldBilderback">Donald Bilderback</a></div><p class="ds-related-work--metadata ds2-5-body-xs">Journal of Synchrotron Radiation, 2006</p><div class="ds-related-work--ctas"><button class="ds2-5-text-link ds2-5-text-link--inline js-swp-download-button" data-signup-modal="{"location":"wsj-grid-card-download-pdf-modal","work_title":"Multilayer X-ray 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