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Logic/Foundry - Onto Innovation
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transform="translate(-191.68 -244.84)" /> </g> </svg> </a> </div> <ul class="primary-nav"> <li class="has-secondary" data-slug="markets"> <a href="https://ontoinnovation.com/markets">Markets</a> <div class="secondary markets-secondary"> <div class="nav-items"> <div class="item return"><a href="#">Back</a></div> <div class="item overview"> <a href="https://ontoinnovation.com/markets">Markets Overview</a> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/unpatterned-bare-wafer">Bare Wafer/Panel</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/unpatterned-bare-wafer" class="overview"> <h3>Challenges for Bare Wafer Manufacturers</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Haze Detection</li> <li>Elemental Contamination & EPI Thickness</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Bare-Wafer/_resizeSmall/Bare-wafers.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for Wafer and Panel Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element System</h3> <p> Transmission and reflection based FTIR measurement </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/logic-foundry">Logic/Foundry</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/logic-foundry" class="overview"> <h3>Challenges for Logic/Foundry Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Etch Profile</li> <li>Patterning</li> <li>Pre/Post CMP</li> <li>Thin Film Metrology</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Logic/_resizeSmall/Logic-cpu-chip-processor.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Logic/Foundry Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD and film analysis </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/memory">Memory</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/memory" class="overview"> <h3>Challenges for Memory Manufacturing</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>3D NAND Process Control</li> <li>DRAM High Bandwidth Memory TSV</li> <li>DRAM Front-end Process Control</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Memory/_resizeSmall/Memory-RAM-storage.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for Memory Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/rf-mems">RF/MEMS</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/rf-mems" class="overview"> <h3>Challenges for RF/MEMS</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Mass Load Metrology</li> <li>RF Filter Metrology</li> <li>SAW/BAW Filter Inspection</li> <li>Cavity Integrity</li> <li>Substrate Handling</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/RF/_resizeSmall/RF-5G.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for RF Module and MEMS Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris S System</h3> <p> Advanced film and OCD metrology system </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/industrial-scientific">Industrial/Scientific</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/industrial-scientific" class="overview"> <h3>Challenges for Industrial and Scientific</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Aerospace and Defense</li> <li>Aviation and Automotive</li> <li>Biomedical</li> <li>Optics and Telescope Manufacturing</li> <li>Semiconductors</li> <li>Vision Systems</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Industrial-Scientific/_resizeSmall/HiRISE-in-Space-Rendering.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Visit the 4D Technology website to learn more</h4> <div class="grid"> <a href="https://www.4dtechnology.com/"> <h3>4D Technology website</h3> <p> A business of Onto Innovation </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/imaging">Image Sensors</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/imaging" class="overview"> <h3>Challenges for Image Sensors</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>CMOS Sensor</li> <li>VCSELs</li> <li>Residue</li> <li>Cover Glass</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Imaging/_resizeSmall/Image-sensor-light-sensor-of-digital-camera.jpeg)"> </div> </div> </a> <div class="applications"> <h4>Products for Image Sensor Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD Metrology </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced film & OCD metrology system </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/advanced-packaging">Advanced Packaging</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/advanced-packaging" class="overview"> <h3>Challenges for Advanced Packaging</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Die Shift</li> <li>Fine Pitch RDL</li> <li>Bump metrology and analytics</li> <li>Non-Visual Defects</li> <li>Die crack detection</li> <li>Warped Substrates</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Fan-Out/_resizeSmall/fanout-top-view.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Advanced Packaging</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Panel lithography system optimized for volume manufacturing of high-end AICS and advanced packaging panels </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly System</h3> <p> Sub-micron automatic defect inspection for panels </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan P System</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/led-power">LED/Power</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/led-power" class="overview"> <h3>Challenges for LED/Power</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Critical Dimensions</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/LED-Power/_resizeSmall/LED-panel.JPEG)"> </div> </div> </a> <div class="applications"> <h4>Products for LED/Power</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/probe-test">Probe Test</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/probe-test" class="overview"> <h3>Challenges for Probe Test</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>Probe Card Test</li> <li>Probe Mark Inspection</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Probe-Test/_resizeSmall/TP1-Technoprobe.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Probe Test</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer probe card test and analysis system </p> </a> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated 2D/3D inspection and metrology for defects and bumps </p> </a> </div> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/markets/flat-panel-display">Flat Panel Display</a> <div class="tertiary"> <a href="https://ontoinnovation.com/markets/flat-panel-display" class="overview"> <h3>Challenges for Flat Panel Display</h3> <div class="columns markets-image"> <div class="markets"> <ul> <li>TFT Backplane Imaging</li> </ul> </div> <hr /> <div class="image" style="background-image: url(/writable/images/Solutions/Flat-Oanel-Display/_resizeSmall/Flexible-display-glass.jpg)"> </div> </div> </a> <div class="applications"> <h4>Products for Flat Panel Display Manufacturing</h4> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> </div> </div> </div> </div> </div> </div> </li> <li class="has-secondary" 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</a> <a href="https://ontoinnovation.com/products/discover-defect-software"> <h3>Discover Defect Software</h3> <p> Greater visibility to drive your smart factory to a cleaner operation </p> </a> <a href="https://ontoinnovation.com/products/discover-fdc-software"> <h3>Discover FDC Software</h3> <p> Your tool鈥檚 stepping stone to Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/discover-patterns-software"> <h3>Discover Patterns Software</h3> <p> Revealing signals hidden in everyday noise </p> </a> <a href="https://ontoinnovation.com/products/discover-review-software"> <h3>Discover Review Software</h3> <p> Your smart factory鈥檚 human classification interface </p> </a> <a href="https://ontoinnovation.com/products/discover-rms-software"> <h3>Discover RMS Software</h3> <p> The cornerstone to factory control through recipe management </p> </a> <a href="https://ontoinnovation.com/products/discover-run-to-run-software"> <h3>Discover Run-to-Run Software</h3> <p> Targeting the sweet spot for your smart factory </p> </a> <a href="https://ontoinnovation.com/products/discover-yield-software"> <h3>Discover Yield Software</h3> <p> Analytic bridge to a more profitable Industry 4.0 </p> </a> <a href="https://ontoinnovation.com/products/partners-in-progress"> <h3>Partners in Progress</h3> <p> Our customers and Onto Innovation solutions: 1+1=3. Good ideas, better implementation, visionary solutions </p> </a> <a href="https://ontoinnovation.com/products/trueadc-software"> <h3>TrueADC Software</h3> <p> The one and only automated defect classification system for smart factories </p> </a> <a href="https://ontoinnovation.com/products/yield-optimizer-machine-learning"> <h3>Yield Optimizer Software</h3> <p> Machine learning that looks beyond known relationships </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/defect-inspection">Defect Inspection</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/defect-inspection" class="overview"> <h3>Products for Defect Inspection</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/dragonfly-system"> <h3>Dragonfly G3 System</h3> <p> Automated high speed sub-micron 2D inspection and combo 3D inspection/metrology for inline process control of pattern defects and next generation technologies for advanced packaging, specialty and OQA </p> </a> <a href="https://ontoinnovation.com/products/eb40-edge-backside-inspection"> <h3>EB40 Module</h3> <p> Edge and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/f30-system"> <h3>F30 System</h3> <p> Advanced macro inspection for front-end manufacturers </p> </a> <a href="https://ontoinnovation.com/products/firefly-inspection"> <h3>Firefly G3 System</h3> <p> Sub-micron automatic defect inspection for advanced IC substrates and panel level packaging </p> </a> <a href="https://ontoinnovation.com/products/inspection-tool-productivity-software"> <h3>Inspection Tool Productivity Software</h3> <p> Software solutions to increase the value of data available from your inspection tool </p> </a> <a href="https://ontoinnovation.com/products/novusedge-system"> <h3>NovusEdge G2 System</h3> <p> Unpatterned edge, notch and backside inspection </p> </a> <a href="https://ontoinnovation.com/products/nsx-330-system"> <h3>NSX 330 System</h3> <p> 2D automated defect inspection and sample 3D inspection for advanced packaging </p> </a> <a href="https://ontoinnovation.com/products/primascan-series"> <h3>PrimaScan Series</h3> <p> All-surface contamination and defectivity inspection and imaging capability for both opaque, transparent and semi-transparent wafers, reticles and glass panel level substrates </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/metrology">Metrology</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/metrology" class="overview"> <h3>Products for Metrology</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/aspect-system"> <h3>Aspect System</h3> <p> Advanced OCD metrology system for 3D NAND and high aspect ratio structures </p> </a> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced standalone OCD & thin film metrology </p> </a> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Opto-acoustic film metrology for in-line metal film thickness measurements and material characterization. </p> </a> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated thin film and OCD metrology solution </p> </a> <a href="https://ontoinnovation.com/products/iris-thin-film-metrology"> <h3>Iris Series</h3> <p> Metrology system for thin film and common OCD measurement </p> </a> <a href="https://ontoinnovation.com/products/ivs-series"> <h3>IVS Series</h3> <p> Overlay and CD metrology for the compound semiconductor, power devices, RF, MEMS, LED and advanced packaging markets </p> </a> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/photoluminescence">Photoluminescence</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/photoluminescence" class="overview"> <h3>Products for Photoluminescence</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/celero-pl-system"> <h3>Celero PL System</h3> <p> Subsurface defect inspection and classification for silicon carbide (SiC) and gallium nitride (GaN) based wafers and compound semiconductor materials </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition">Epi Thickness & Composition</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/epi-thickness-composition" class="overview"> <h3>Products for Epi Thickness & Composition</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/element"> <h3>Element Series</h3> <p> Transmission and reflection based FTIR Measurement for wafer suppliers and device makers </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/lithography">Lithography</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/lithography" class="overview"> <h3>Products for Lithography</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/jetstep-g35-system"> <h3>JetStep G35 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 3.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-g45-system"> <h3>JetStep G45 System</h3> <p> High-resolution imaging for flat panel display applications up to Gen 4.5 size </p> </a> <a href="https://ontoinnovation.com/products/jetstep-s3500-system"> <h3>JetStep S3500 System</h3> <p> Advanced packaging lithography system for rectangular or square panel substrates up to Gen 3.5 size (720mm x 600mm) </p> </a> <a href="https://ontoinnovation.com/products/jetstep-w2300-system"> <h3>JetStep W2300 System</h3> <p> Advanced packaging lithography system for round substrates up to 330mm </p> </a> <a href="https://ontoinnovation.com/products/jetstep-x500-system"> <h3>JetStep X500 System</h3> <p> Designed for advanced integrated circuit substrates (AICS) or advanced packaging manufacturing applications, incorporating a 250mm x 250mm large field exposure area achieving 3渭m L/S resolution over a large DOF and with a throughput of >110pph </p> </a> </div> </div> </div> <div class="item"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis">Probe Card Test & Analysis</a> <div class="tertiary"> <a href="https://ontoinnovation.com/product-categories/probe-card-test-analysis" class="overview"> <h3>Products for Probe Card Test & Analysis</h3> </a> <div class="grid"> <a href="https://ontoinnovation.com/products/precisionworx-vx4-system"> <h3>PrecisionWoRx VX4 System</h3> <p> Wafer 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</header> <div class="jump-hero"> <div class="jump-nav"> <div class="container"> <ul> <li><a href="#etch-profile">Etch Profile</a></li> <li><a href="#patterning">Patterning</a></li> <li><a href="#pre-post-cmp">Pre/Post CMP</a></li> <li><a href="#thin-film-metrology">Thin Film Metrology</a></li> <li><a href="#consulting">Consulting</a></li> <li><a href="#contact-us">Contact Us</a></li> </ul> </div> </div> <div class="hero"> <div class="container"> <div class="position"> <h1><strong>Logic聽and Foundry</strong></h1> <p class="intro"> Logic devices are the transistor-driven brains that control the digital world. Moore's Law continues to drive the scaling of these devices and, likewise, the challenges to process and process control. </p> </div> </div> <div class="graphics"> <div class="abstract"> <img src="/writable/images/Solutions/Logic/_resizeMedium/Logic-logic-board.jpg" alt="" /> </div> <div class="inset"> <img src="/writable/images/Solutions/Logic/_resizeMedium/Businessman-using-laptop.jpg" alt="" /> </div> </div> <div class="jump-nav-inner"> <div class="jump-nav"> <div class="container"> <ul> <li><a href="#etch-profile">Etch Profile</a></li> <li><a href="#patterning">Patterning</a></li> <li><a href="#pre-post-cmp">Pre/Post CMP</a></li> <li><a href="#thin-film-metrology">Thin Film Metrology</a></li> <li><a href="#consulting">Consulting</a></li> <li><a href="#contact-us">Contact Us</a></li> </ul> </div> </div> </div> </div> </div> <div class="torso"> <div class="market-list"> <div class="market-row" id="etch-profile"> <div class="market-information"> <div class="headline"> <div class="container"> <h2>Etch Profile</h2> </div> </div> <div class="container"> <div class="columns"> <div class="content"> <p class="intro"> Full profiles for complex 3D structures </p> <div> <p>With continuous scaling of logic devices toward 5nm and beyond, the process control for Fin profile, poly gate profile, source and drain profile, and metal function gate profile become more challenging than ever. Multiple measurement parameters are required to monitor the full profile of each structure. </p> <p>A broadband multi-channel and multi-technology metrology with a state of art modeling and machine learning engine is a must-have for advanced logic fab yield control. </p> </div> </div> <div class="lead-ins"> <p class="intro"> Products for Etch Profile </p> <div class="products"> <div class="product"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> </div> <div class="product"> <a href="https://ontoinnovation.com/products/ocd-solutions"> <h3>OCD Solutions</h3> <p> Comprehensive OCD solutions for inline metrology, offline computing and fleet management </p> </a> </div> </div> </div> </div> </div> </div> <div class="container"> <div class="return-to-top"> <a href="#return-top"> <span></span> Return to Top </a> </div> </div> </div> <div class="market-row" id="patterning"> <div class="market-information"> <div class="headline"> <div class="container"> <h2>Patterning</h2> </div> </div> <div class="container"> <div class="columns"> <div class="content"> <p class="intro"> Broader process control for time to yield </p> <div> <p>With quadruple patterning and EUV implementation in logic fabs, process control for patterning is becoming more critical than ever. Localized process variations within devices is also becoming more important due to the loading effect. </p> <p>A broader process coverage and high sample in-die metrology is vital for a logic fab to achieve better time to yield and time to production. </p> </div> </div> <div class="lead-ins"> <p class="intro"> Products for Patterning </p> <div class="products"> <div class="product"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> </div> <div class="product"> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD metrology solution </p> </a> </div> </div> </div> </div> </div> </div> <div class="container"> <div class="return-to-top"> <a href="#return-top"> <span></span> Return to Top </a> </div> </div> </div> <div class="market-row" id="pre-post-cmp"> <div class="market-information"> <div class="headline"> <div class="container"> <h2>Pre/Post CMP</h2> </div> </div> <div class="container"> <div class="columns"> <div class="content"> <p class="intro"> Control of metal deposition and planarization </p> <div> <p>Chemical mechanical planarization (CMP) is a critical process with applications in the front-end of line (FEOL), middle of line (MOL) and back-end of line (BEOL).聽Oxide, nitride, & poly silicon CMP steps can be found in FEOL and MOL for shallow trench isolation (STI), inter layer dielectric (ILD), self-aligned contact (SAC) and other process modules. Integrated metrology plays a key role in CMP process control for these FEOL and MOL steps where both under-polishing and over-polishing can lead to yield loss.<br /></p> <p>CMP is also critical in the BEOL聽dual damascene process for creating high performance interconnect structures. If line structures are under polished, residual copper or barrier will short out the circuitry resulting in defective dies. However, over polishing increases the line resistance, negatively impacting both the speed and performance of devices. To maintain high yield, it is critical to maintain the copper lines at the desired thickness. Pre-CMP measurements offer insight into pattern dependent plating effects - Cu overburden as well as trench measurements and can be used to fine tune the process.</p> <p>Accurate in-line technique for detecting process variations and flagging mis-process of as-plated and post-CMP is critical to understanding yield issues especially at wafer edges.</p> </div> </div> <div class="lead-ins"> <p class="intro"> Products for Pre/Post CMP </p> <div class="products"> <div class="product"> <a href="https://ontoinnovation.com/products/impulse-integrated-metrology-series"> <h3>IMPULSE Series</h3> <p> Integrated OCD metrology solution for CMP process control </p> </a> </div> <div class="product"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced OCD and film metrology </p> </a> </div> <div class="product"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> </div> </div> </div> </div> </div> </div> <div class="container"> <div class="return-to-top"> <a href="#return-top"> <span></span> Return to Top </a> </div> </div> </div> <div class="market-row" id="thin-film-metrology"> <div class="market-information"> <div class="headline"> <div class="container"> <h2>Thin Film Metrology</h2> </div> </div> <div class="container"> <div class="columns"> <div class="content"> <p class="intro"> Angstrom-level Film Metrology </p> <div> <p>Moore's Law has led device designers and manufacturers to pursue scaling and ever thinner films to reduce die size and thickness. Accurate metrology for transparent and metal thin films is crucial to process control and high yields.</p> </div> </div> <div class="lead-ins"> <p class="intro"> Products for Thin Film Metrology </p> <div class="products"> <div class="product"> <a href="https://ontoinnovation.com/products/echo-film-metrology"> <h3>Echo System</h3> <p> Acoustic film metrology system that provides accurate, in-line thickness measurements of semi-transparent and metal films on product wafers </p> </a> </div> <div class="product"> <a href="https://ontoinnovation.com/products/atlas-series"> <h3>Atlas Series</h3> <p> Advanced film and OCD metrology system </p> </a> </div> </div> </div> </div> </div> </div> <div class="container"> <div class="return-to-top"> <a href="#return-top"> <span></span> Return to Top </a> </div> </div> </div> <div class="market-row" id="consulting"> <div class="market-information no-papers"> <div class="headline"> <div class="container"> <h2>Consulting and Applications Services</h2> </div> </div> <div class="container"> <div class="columns"> <div class="content"> <div class="intro"> <p>Onto Innovation's process control consulting services allow busy manufacturers to focus on production while we examine how to improve the process.</p> </div> <div> <p>The Onto Innovation applications teams have over twenty years of experience with hundreds of successful projects worldwide across multiple industries. 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