CINXE.COM

<!DOCTYPE html> <html lang="en-US"> <head > <meta charset="UTF-8" /> <meta name="viewport" content="width=device-width, initial-scale=1" /> <meta name='robots' content='index, follow, max-image-preview:large, max-snippet:-1, max-video-preview:-1' />  <title>Semiconductor Fabrication - FIB-SEM - Dualbeam - Illuminating Semiconductors</title> <meta name="description" content="Accelerating semiconductor device analysis for semiconductor fabrication using the Thermo Scientific Helios 5 EXL Wafer Dualbeam FIB-SEM." /> <link rel="canonical" href="https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/" /> <meta property="og:locale" content="en_US" /> <meta property="og:type" content="article" /> <meta property="og:title" content="Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam" /> <meta property="og:description" content="Accelerating semiconductor device analysis for semiconductor fabrication using the Thermo Scientific Helios 5 EXL Wafer Dualbeam FIB-SEM." /> <meta property="og:url" content="https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/" /> <meta property="og:site_name" content="Illuminating Semiconductors" /> <meta property="article:publisher" content="https://www.facebook.com/thermofisher" /> <meta property="article:published_time" content="2024-06-26T11:20:24+00:00" /> <meta property="article:modified_time" content="2024-06-26T21:06:18+00:00" /> <meta property="og:image" content="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/EXL-Social-Header_1200x630.jpg" /> <meta property="og:image:width" content="1200" /> <meta property="og:image:height" content="630" /> <meta property="og:image:type" content="image/jpeg" /> <meta name="author" content="Xiaoting Gu" /> <meta name="twitter:card" content="summary_large_image" /> <meta name="twitter:creator" content="@thermofisher" /> <meta name="twitter:site" content="@thermofisher" /> <meta name="twitter:label1" content="Written by" /> <meta name="twitter:data1" content="Xiaoting Gu" /> <meta name="twitter:label2" content="Est. reading time" /> <meta name="twitter:data2" content="5 minutes" /> <script type="application/ld+json" class="yoast-schema-graph">{"@context":"https://schema.org","@graph":[{"@type":"WebPage","@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/","url":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/","name":"Semiconductor Fabrication - FIB-SEM - Dualbeam - Illuminating Semiconductors","isPartOf":{"@id":"https://www.thermofisher.com/blog/semiconductors/#website"},"primaryImageOfPage":{"@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#primaryimage"},"image":{"@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#primaryimage"},"thumbnailUrl":"https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/EXL-Social-Header_1200x630.jpg","datePublished":"2024-06-26T11:20:24+00:00","dateModified":"2024-06-26T21:06:18+00:00","author":{"@id":"https://www.thermofisher.com/blog/semiconductors/#/schema/person/c458b7294b0a978d6cfc33e886ec90c6"},"description":"Accelerating semiconductor device analysis for semiconductor fabrication using the Thermo Scientific Helios 5 EXL Wafer Dualbeam FIB-SEM.","breadcrumb":{"@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#primaryimage","url":"https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/EXL-Social-Header_1200x630.jpg","contentUrl":"https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/EXL-Social-Header_1200x630.jpg","width":1200,"height":630,"caption":"Semiconductor Device Fabrication Analysis"},{"@type":"BreadcrumbList","@id":"https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https://www.thermofisher.com/blog/semiconductors/"},{"@type":"ListItem","position":2,"name":"Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam"}]},{"@type":"WebSite","@id":"https://www.thermofisher.com/blog/semiconductors/#website","url":"https://www.thermofisher.com/blog/semiconductors/","name":"Illuminating Semiconductors","description":"Semiconductor manufacturing stories and solutions about a more connected, more autonomous, and smarter world","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https://www.thermofisher.com/blog/semiconductors/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Person","@id":"https://www.thermofisher.com/blog/semiconductors/#/schema/person/c458b7294b0a978d6cfc33e886ec90c6","name":"Xiaoting Gu","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https://www.thermofisher.com/blog/semiconductors/#/schema/person/image/","url":"https://secure.gravatar.com/avatar/d27d9c2174853ad3c07882f7662ab8af?s=96&d=mm&r=g","contentUrl":"https://secure.gravatar.com/avatar/d27d9c2174853ad3c07882f7662ab8af?s=96&d=mm&r=g","caption":"Xiaoting Gu"},"url":"https://www.thermofisher.com/blog/author/xiaotinggu/"}]}</script>  <link rel='dns-prefetch' href='//www.thermofisher.com' /> <link rel='dns-prefetch' href='//stats.wp.com' /> <link rel='dns-prefetch' href='//use.fontawesome.com' /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » Feed" href="https://www.thermofisher.com/blog/semiconductors/feed/" /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » Comments Feed" href="https://www.thermofisher.com/blog/semiconductors/comments/feed/" /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam Comments Feed" href="https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/feed/" />  <script src="https://cdn.optimizely.com/js/8156647427.js"></script>  <script> (function(h,o,t,j,a,r){ h.hj=h.hj||function(){(h.hj.q=h.hj.q||[]).push(arguments)}; h._hjSettings={hjid:373708,hjsv:5}; a=o.getElementsByTagName('head')[0]; r=o.createElement('script');r.async=1; r.src=t+h._hjSettings.hjid+j+h._hjSettings.hjsv; a.appendChild(r); })(window,document,'//static.hotjar.com/c/hotjar-','.js?sv='); </script>  <script src="//www.googletagmanager.com/gtag/js?id=G-TJ18KZWFVE" data-cfasync="false" data-wpfc-render="false" type="text/javascript" async></script> <script data-cfasync="false" data-wpfc-render="false" type="text/javascript"> var mi_version = '9.2.0'; var mi_track_user = true; var mi_no_track_reason = ''; var MonsterInsightsDefaultLocations = {"page_location":"https:\/\/admin.acceleratingscience.com\/semiconductors\/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam\/"}; if ( typeof MonsterInsightsPrivacyGuardFilter === 'function' ) { var MonsterInsightsLocations = (typeof MonsterInsightsExcludeQuery === 'object') ? MonsterInsightsPrivacyGuardFilter( MonsterInsightsExcludeQuery ) : MonsterInsightsPrivacyGuardFilter( MonsterInsightsDefaultLocations ); } else { var MonsterInsightsLocations = (typeof MonsterInsightsExcludeQuery === 'object') ? MonsterInsightsExcludeQuery : MonsterInsightsDefaultLocations; } var disableStrs = [ 'ga-disable-G-TJ18KZWFVE', ]; /* Function to detect opted out users */ function __gtagTrackerIsOptedOut() { for (var index = 0; index < disableStrs.length; index++) { if (document.cookie.indexOf(disableStrs[index] + '=true') > -1) { return true; } } return false; } /* Disable tracking if the opt-out cookie exists. */ if (__gtagTrackerIsOptedOut()) { for (var index = 0; index < disableStrs.length; index++) { window[disableStrs[index]] = true; } } /* Opt-out function */ function __gtagTrackerOptout() { for (var index = 0; index < disableStrs.length; index++) { document.cookie = disableStrs[index] + '=true; expires=Thu, 31 Dec 2099 23:59:59 UTC; path=/'; window[disableStrs[index]] = true; } } if ('undefined' === typeof gaOptout) { function gaOptout() { __gtagTrackerOptout(); } } window.dataLayer = window.dataLayer || []; window.MonsterInsightsDualTracker = { helpers: {}, trackers: {}, }; if (mi_track_user) { function __gtagDataLayer() { dataLayer.push(arguments); } function __gtagTracker(type, name, parameters) { if (!parameters) { parameters = {}; } if (parameters.send_to) { __gtagDataLayer.apply(null, arguments); return; } if (type === 'event') { parameters.send_to = monsterinsights_frontend.v4_id; var hookName = name; if (typeof parameters['event_category'] !== 'undefined') { hookName = parameters['event_category'] + ':' + name; } if (typeof MonsterInsightsDualTracker.trackers[hookName] !== 'undefined') { MonsterInsightsDualTracker.trackers[hookName](parameters); } else { __gtagDataLayer('event', name, parameters); } } else { __gtagDataLayer.apply(null, arguments); } } __gtagTracker('js', new Date()); __gtagTracker('set', { 'developer_id.dZGIzZG': true, }); if ( MonsterInsightsLocations.page_location ) { __gtagTracker('set', MonsterInsightsLocations); } __gtagTracker('config', 'G-TJ18KZWFVE', {"use_amp_client_id":"true","forceSSL":"true","link_attribution":"true"} ); window.gtag = __gtagTracker; (function () { /* https://developers.google.com/analytics/devguides/collection/analyticsjs/ */ /* ga and __gaTracker compatibility shim. */ var noopfn = function () { return null; }; var newtracker = function () { return new Tracker(); }; var Tracker = function () { return null; }; var p = Tracker.prototype; p.get = noopfn; p.set = noopfn; p.send = function () { var args = Array.prototype.slice.call(arguments); args.unshift('send'); __gaTracker.apply(null, args); }; var __gaTracker = function () { var len = arguments.length; if (len === 0) { return; } var f = arguments[len - 1]; if (typeof f !== 'object' || f === null || typeof f.hitCallback !== 'function') { if ('send' === arguments[0]) { var hitConverted, hitObject = false, action; if ('event' === arguments[1]) { if ('undefined' !== typeof arguments[3]) { hitObject = { 'eventAction': arguments[3], 'eventCategory': arguments[2], 'eventLabel': arguments[4], 'value': arguments[5] ? arguments[5] : 1, } } } if ('pageview' === arguments[1]) { if ('undefined' !== typeof arguments[2]) { hitObject = { 'eventAction': 'page_view', 'page_path': arguments[2], } } } if (typeof arguments[2] === 'object') { hitObject = arguments[2]; } if (typeof arguments[5] === 'object') { Object.assign(hitObject, arguments[5]); } if ('undefined' !== typeof arguments[1].hitType) { hitObject = arguments[1]; if ('pageview' === hitObject.hitType) { hitObject.eventAction = 'page_view'; } } if (hitObject) { action = 'timing' === arguments[1].hitType ? 'timing_complete' : hitObject.eventAction; hitConverted = mapArgs(hitObject); __gtagTracker('event', action, hitConverted); } } return; } function mapArgs(args) { var arg, hit = {}; var gaMap = { 'eventCategory': 'event_category', 'eventAction': 'event_action', 'eventLabel': 'event_label', 'eventValue': 'event_value', 'nonInteraction': 'non_interaction', 'timingCategory': 'event_category', 'timingVar': 'name', 'timingValue': 'value', 'timingLabel': 'event_label', 'page': 'page_path', 'location': 'page_location', 'title': 'page_title', 'referrer' : 'page_referrer', }; for (arg in args) { if (!(!args.hasOwnProperty(arg) || !gaMap.hasOwnProperty(arg))) { hit[gaMap[arg]] = args[arg]; } else { hit[arg] = args[arg]; } } return hit; } try { f.hitCallback(); } catch (ex) { } }; __gaTracker.create = newtracker; __gaTracker.getByName = newtracker; __gaTracker.getAll = function () { return []; }; __gaTracker.remove = noopfn; __gaTracker.loaded = true; window['__gaTracker'] = __gaTracker; })(); } else { console.log(""); (function () { function __gtagTracker() { return null; } window['__gtagTracker'] = __gtagTracker; window['gtag'] = __gtagTracker; })(); } </script>  <link rel='stylesheet' id='jetpack_related-posts-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/jetpack/modules/related-posts/related-posts.css?ver=20240116' type='text/css' media='all' /> <link rel='stylesheet' id='accelerating-science-blogs-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/themes/accelerating-science-blogs/style.css?ver=1.2.9.3' type='text/css' media='all' /> <link rel='stylesheet' id='wp-block-library-css' href='https://www.thermofisher.com/blog//wp-includes/css/dist/block-library/style.min.css?ver=6.6.1' type='text/css' media='all' /> <link rel='stylesheet' id='mediaelement-css' href='https://www.thermofisher.com/blog//wp-includes/js/mediaelement/mediaelementplayer-legacy.min.css?ver=4.2.17' type='text/css' media='all' /> <link rel='stylesheet' id='wp-mediaelement-css' href='https://www.thermofisher.com/blog//wp-includes/js/mediaelement/wp-mediaelement.min.css?ver=6.6.1' type='text/css' media='all' /> <style id='jetpack-sharing-buttons-style-inline-css' type='text/css'> .jetpack-sharing-buttons__services-list{display:flex;flex-direction:row;flex-wrap:wrap;gap:0;list-style-type:none;margin:5px;padding:0}.jetpack-sharing-buttons__services-list.has-small-icon-size{font-size:12px}.jetpack-sharing-buttons__services-list.has-normal-icon-size{font-size:16px}.jetpack-sharing-buttons__services-list.has-large-icon-size{font-size:24px}.jetpack-sharing-buttons__services-list.has-huge-icon-size{font-size:36px}@media print{.jetpack-sharing-buttons__services-list{display:none!important}}.editor-styles-wrapper .wp-block-jetpack-sharing-buttons{gap:0;padding-inline-start:0}ul.jetpack-sharing-buttons__services-list.has-background{padding:1.25em 2.375em} </style> <style id='classic-theme-styles-inline-css' type='text/css'> /*! This file is auto-generated */ .wp-block-button__link{color:#fff;background-color:#32373c;border-radius:9999px;box-shadow:none;text-decoration:none;padding:calc(.667em + 2px) calc(1.333em + 2px);font-size:1.125em}.wp-block-file__button{background:#32373c;color:#fff;text-decoration:none} </style> <style id='global-styles-inline-css' type='text/css'> :root{--wp--preset--aspect-ratio--square: 1;--wp--preset--aspect-ratio--4-3: 4/3;--wp--preset--aspect-ratio--3-4: 3/4;--wp--preset--aspect-ratio--3-2: 3/2;--wp--preset--aspect-ratio--2-3: 2/3;--wp--preset--aspect-ratio--16-9: 16/9;--wp--preset--aspect-ratio--9-16: 9/16;--wp--preset--color--black: #000000;--wp--preset--color--cyan-bluish-gray: #abb8c3;--wp--preset--color--white: #ffffff;--wp--preset--color--pale-pink: #f78da7;--wp--preset--color--vivid-red: #cf2e2e;--wp--preset--color--luminous-vivid-orange: #ff6900;--wp--preset--color--luminous-vivid-amber: #fcb900;--wp--preset--color--light-green-cyan: #7bdcb5;--wp--preset--color--vivid-green-cyan: #00d084;--wp--preset--color--pale-cyan-blue: #8ed1fc;--wp--preset--color--vivid-cyan-blue: #0693e3;--wp--preset--color--vivid-purple: #9b51e0;--wp--preset--gradient--vivid-cyan-blue-to-vivid-purple: linear-gradient(135deg,rgba(6,147,227,1) 0%,rgb(155,81,224) 100%);--wp--preset--gradient--light-green-cyan-to-vivid-green-cyan: linear-gradient(135deg,rgb(122,220,180) 0%,rgb(0,208,130) 100%);--wp--preset--gradient--luminous-vivid-amber-to-luminous-vivid-orange: linear-gradient(135deg,rgba(252,185,0,1) 0%,rgba(255,105,0,1) 100%);--wp--preset--gradient--luminous-vivid-orange-to-vivid-red: linear-gradient(135deg,rgba(255,105,0,1) 0%,rgb(207,46,46) 100%);--wp--preset--gradient--very-light-gray-to-cyan-bluish-gray: linear-gradient(135deg,rgb(238,238,238) 0%,rgb(169,184,195) 100%);--wp--preset--gradient--cool-to-warm-spectrum: linear-gradient(135deg,rgb(74,234,220) 0%,rgb(151,120,209) 20%,rgb(207,42,186) 40%,rgb(238,44,130) 60%,rgb(251,105,98) 80%,rgb(254,248,76) 100%);--wp--preset--gradient--blush-light-purple: linear-gradient(135deg,rgb(255,206,236) 0%,rgb(152,150,240) 100%);--wp--preset--gradient--blush-bordeaux: linear-gradient(135deg,rgb(254,205,165) 0%,rgb(254,45,45) 50%,rgb(107,0,62) 100%);--wp--preset--gradient--luminous-dusk: linear-gradient(135deg,rgb(255,203,112) 0%,rgb(199,81,192) 50%,rgb(65,88,208) 100%);--wp--preset--gradient--pale-ocean: linear-gradient(135deg,rgb(255,245,203) 0%,rgb(182,227,212) 50%,rgb(51,167,181) 100%);--wp--preset--gradient--electric-grass: linear-gradient(135deg,rgb(202,248,128) 0%,rgb(113,206,126) 100%);--wp--preset--gradient--midnight: linear-gradient(135deg,rgb(2,3,129) 0%,rgb(40,116,252) 100%);--wp--preset--font-size--small: 13px;--wp--preset--font-size--medium: 20px;--wp--preset--font-size--large: 36px;--wp--preset--font-size--x-large: 42px;--wp--preset--spacing--20: 0.44rem;--wp--preset--spacing--30: 0.67rem;--wp--preset--spacing--40: 1rem;--wp--preset--spacing--50: 1.5rem;--wp--preset--spacing--60: 2.25rem;--wp--preset--spacing--70: 3.38rem;--wp--preset--spacing--80: 5.06rem;--wp--preset--shadow--natural: 6px 6px 9px rgba(0, 0, 0, 0.2);--wp--preset--shadow--deep: 12px 12px 50px rgba(0, 0, 0, 0.4);--wp--preset--shadow--sharp: 6px 6px 0px rgba(0, 0, 0, 0.2);--wp--preset--shadow--outlined: 6px 6px 0px -3px rgba(255, 255, 255, 1), 6px 6px rgba(0, 0, 0, 1);--wp--preset--shadow--crisp: 6px 6px 0px rgba(0, 0, 0, 1);}:where(.is-layout-flex){gap: 0.5em;}:where(.is-layout-grid){gap: 0.5em;}body .is-layout-flex{display: flex;}.is-layout-flex{flex-wrap: wrap;align-items: center;}.is-layout-flex > :is(*, div){margin: 0;}body .is-layout-grid{display: grid;}.is-layout-grid > :is(*, div){margin: 0;}:where(.wp-block-columns.is-layout-flex){gap: 2em;}:where(.wp-block-columns.is-layout-grid){gap: 2em;}:where(.wp-block-post-template.is-layout-flex){gap: 1.25em;}:where(.wp-block-post-template.is-layout-grid){gap: 1.25em;}.has-black-color{color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-color{color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-color{color: var(--wp--preset--color--white) !important;}.has-pale-pink-color{color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-color{color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-color{color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-color{color: var(--wp--preset--color--luminous-vivid-amber) !important;}.has-light-green-cyan-color{color: var(--wp--preset--color--light-green-cyan) !important;}.has-vivid-green-cyan-color{color: var(--wp--preset--color--vivid-green-cyan) !important;}.has-pale-cyan-blue-color{color: var(--wp--preset--color--pale-cyan-blue) !important;}.has-vivid-cyan-blue-color{color: var(--wp--preset--color--vivid-cyan-blue) !important;}.has-vivid-purple-color{color: var(--wp--preset--color--vivid-purple) !important;}.has-black-background-color{background-color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-background-color{background-color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-background-color{background-color: var(--wp--preset--color--white) !important;}.has-pale-pink-background-color{background-color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-background-color{background-color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-background-color{background-color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-background-color{background-color: var(--wp--preset--color--luminous-vivid-amber) !important;}.has-light-green-cyan-background-color{background-color: var(--wp--preset--color--light-green-cyan) !important;}.has-vivid-green-cyan-background-color{background-color: var(--wp--preset--color--vivid-green-cyan) !important;}.has-pale-cyan-blue-background-color{background-color: var(--wp--preset--color--pale-cyan-blue) !important;}.has-vivid-cyan-blue-background-color{background-color: var(--wp--preset--color--vivid-cyan-blue) !important;}.has-vivid-purple-background-color{background-color: var(--wp--preset--color--vivid-purple) !important;}.has-black-border-color{border-color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-border-color{border-color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-border-color{border-color: var(--wp--preset--color--white) !important;}.has-pale-pink-border-color{border-color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-border-color{border-color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-border-color{border-color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-border-color{border-color: var(--wp--preset--color--luminous-vivid-amber) !important;}.has-light-green-cyan-border-color{border-color: var(--wp--preset--color--light-green-cyan) !important;}.has-vivid-green-cyan-border-color{border-color: var(--wp--preset--color--vivid-green-cyan) !important;}.has-pale-cyan-blue-border-color{border-color: var(--wp--preset--color--pale-cyan-blue) !important;}.has-vivid-cyan-blue-border-color{border-color: var(--wp--preset--color--vivid-cyan-blue) !important;}.has-vivid-purple-border-color{border-color: var(--wp--preset--color--vivid-purple) !important;}.has-vivid-cyan-blue-to-vivid-purple-gradient-background{background: var(--wp--preset--gradient--vivid-cyan-blue-to-vivid-purple) !important;}.has-light-green-cyan-to-vivid-green-cyan-gradient-background{background: var(--wp--preset--gradient--light-green-cyan-to-vivid-green-cyan) !important;}.has-luminous-vivid-amber-to-luminous-vivid-orange-gradient-background{background: var(--wp--preset--gradient--luminous-vivid-amber-to-luminous-vivid-orange) !important;}.has-luminous-vivid-orange-to-vivid-red-gradient-background{background: var(--wp--preset--gradient--luminous-vivid-orange-to-vivid-red) !important;}.has-very-light-gray-to-cyan-bluish-gray-gradient-background{background: var(--wp--preset--gradient--very-light-gray-to-cyan-bluish-gray) !important;}.has-cool-to-warm-spectrum-gradient-background{background: var(--wp--preset--gradient--cool-to-warm-spectrum) !important;}.has-blush-light-purple-gradient-background{background: var(--wp--preset--gradient--blush-light-purple) !important;}.has-blush-bordeaux-gradient-background{background: var(--wp--preset--gradient--blush-bordeaux) !important;}.has-luminous-dusk-gradient-background{background: var(--wp--preset--gradient--luminous-dusk) !important;}.has-pale-ocean-gradient-background{background: var(--wp--preset--gradient--pale-ocean) !important;}.has-electric-grass-gradient-background{background: var(--wp--preset--gradient--electric-grass) !important;}.has-midnight-gradient-background{background: var(--wp--preset--gradient--midnight) !important;}.has-small-font-size{font-size: var(--wp--preset--font-size--small) !important;}.has-medium-font-size{font-size: var(--wp--preset--font-size--medium) !important;}.has-large-font-size{font-size: var(--wp--preset--font-size--large) !important;}.has-x-large-font-size{font-size: var(--wp--preset--font-size--x-large) !important;} :where(.wp-block-post-template.is-layout-flex){gap: 1.25em;}:where(.wp-block-post-template.is-layout-grid){gap: 1.25em;} :where(.wp-block-columns.is-layout-flex){gap: 2em;}:where(.wp-block-columns.is-layout-grid){gap: 2em;} :root :where(.wp-block-pullquote){font-size: 1.5em;line-height: 1.6;} </style> <link rel='stylesheet' id='gforms_reset_css-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/legacy/css/formreset.min.css?ver=2.8.17' type='text/css' media='all' /> <link rel='stylesheet' id='gforms_formsmain_css-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/legacy/css/formsmain.min.css?ver=2.8.17' type='text/css' media='all' /> <link rel='stylesheet' id='gforms_ready_class_css-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/legacy/css/readyclass.min.css?ver=2.8.17' type='text/css' media='all' /> <link rel='stylesheet' id='gforms_browsers_css-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/legacy/css/browsers.min.css?ver=2.8.17' type='text/css' media='all' /> <link rel='stylesheet' id='globals-css' href='https://www.thermofisher.com/blog/semiconductors/wp-content/themes/accelerating-science-blogs/global-style.css?ver=1.2.9.3' type='text/css' media='all' /> <link rel='stylesheet' id='bfa-font-awesome-css' href='https://use.fontawesome.com/releases/v5.15.4/css/all.css?ver=2.0.3' type='text/css' media='all' /> <script type="text/javascript" id="jetpack_related-posts-js-extra"> /* <![CDATA[ */ var related_posts_js_options = {"post_heading":"h4"}; /* ]]> */ </script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/jetpack/_inc/build/related-posts/related-posts.min.js?ver=20240116" id="jetpack_related-posts-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/google-analytics-premium/assets/js/frontend-gtag.min.js?ver=9.2.0" id="monsterinsights-frontend-script-js" async="async" data-wp-strategy="async"></script> <script data-cfasync="false" data-wpfc-render="false" type="text/javascript" id='monsterinsights-frontend-script-js-extra'>/* <![CDATA[ */ var monsterinsights_frontend = {"js_events_tracking":"true","download_extensions":"doc,pdf,ppt,zip,xls,docx,pptx,xlsx","inbound_paths":"[{\"path\":\"\\\/go\\\/\",\"label\":\"affiliate\"},{\"path\":\"\\\/recommend\\\/\",\"label\":\"affiliate\"}]","home_url":"https:\/\/admin.acceleratingscience.com\/semiconductors","hash_tracking":"false","v4_id":"G-TJ18KZWFVE"};/* ]]> */ </script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/jquery/jquery.min.js?ver=3.7.1" id="jquery-core-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/jquery/jquery-migrate.min.js?ver=3.4.1" id="jquery-migrate-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/mashshare-google-analytics/assets/js/mashga.min.js?ver=1.0.9" id="mashga-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/underscore.min.js?ver=1.13.4" id="underscore-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/backbone.min.js?ver=1.5.0" id="backbone-js"></script> <script type="text/javascript" id="wp-api-js-js-extra"> /* <![CDATA[ */ var WP_API_Settings = {"root":"https:\/\/admin.acceleratingscience.com\/semiconductors","nonce":"29e0fbf17e"}; /* ]]> */ </script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/wp-search-live/public/assets/js/util--wp-api.js?ver=0.9" id="wp-api-js-js"></script> <script type="text/javascript" defer='defer' src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/js/jquery.json.min.js?ver=2.8.17" id="gform_json-js"></script> <script type="text/javascript" id="gform_gravityforms-js-extra"> /* <![CDATA[ */ var gf_global = {"gf_currency_config":{"name":"U.S. Dollar","symbol_left":"$","symbol_right":"","symbol_padding":"","thousand_separator":",","decimal_separator":".","decimals":2,"code":"USD"},"base_url":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms","number_formats":[],"spinnerUrl":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms\/images\/spinner.svg","version_hash":"4a792b070322e711c2521ee9802c04ea","strings":{"newRowAdded":"New row added.","rowRemoved":"Row removed","formSaved":"The form has been saved. The content contains the link to return and complete the form."}}; var gf_global = {"gf_currency_config":{"name":"U.S. Dollar","symbol_left":"$","symbol_right":"","symbol_padding":"","thousand_separator":",","decimal_separator":".","decimals":2,"code":"USD"},"base_url":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms","number_formats":[],"spinnerUrl":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms\/images\/spinner.svg","version_hash":"4a792b070322e711c2521ee9802c04ea","strings":{"newRowAdded":"New row added.","rowRemoved":"Row removed","formSaved":"The form has been saved. The content contains the link to return and complete the form."}}; var gform_i18n = {"datepicker":{"days":{"monday":"Mo","tuesday":"Tu","wednesday":"We","thursday":"Th","friday":"Fr","saturday":"Sa","sunday":"Su"},"months":{"january":"January","february":"February","march":"March","april":"April","may":"May","june":"June","july":"July","august":"August","september":"September","october":"October","november":"November","december":"December"},"firstDay":1,"iconText":"Select date"}}; var gf_legacy_multi = {"":"1"}; var gform_gravityforms = {"strings":{"invalid_file_extension":"This type of file is not allowed. Must be one of the following:","delete_file":"Delete this file","in_progress":"in progress","file_exceeds_limit":"File exceeds size limit","illegal_extension":"This type of file is not allowed.","max_reached":"Maximum number of files reached","unknown_error":"There was a problem while saving the file on the server","currently_uploading":"Please wait for the uploading to complete","cancel":"Cancel","cancel_upload":"Cancel this upload","cancelled":"Cancelled"},"vars":{"images_url":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms\/images"}}; /* ]]> */ </script> <script type="text/javascript" id="gform_gravityforms-js-before"> /* <![CDATA[ */ var gform;gform||(document.addEventListener("gform_main_scripts_loaded",function(){gform.scriptsLoaded=!0}),window.addEventListener("DOMContentLoaded",function(){gform.domLoaded=!0}),gform={domLoaded:!1,scriptsLoaded:!1,initializeOnLoaded:function(o){gform.domLoaded&&gform.scriptsLoaded?o():!gform.domLoaded&&gform.scriptsLoaded?window.addEventListener("DOMContentLoaded",o):document.addEventListener("gform_main_scripts_loaded",o)},hooks:{action:{},filter:{}},addAction:function(o,n,r,t){gform.addHook("action",o,n,r,t)},addFilter:function(o,n,r,t){gform.addHook("filter",o,n,r,t)},doAction:function(o){gform.doHook("action",o,arguments)},applyFilters:function(o){return gform.doHook("filter",o,arguments)},removeAction:function(o,n){gform.removeHook("action",o,n)},removeFilter:function(o,n,r){gform.removeHook("filter",o,n,r)},addHook:function(o,n,r,t,i){null==gform.hooks[o][n]&&(gform.hooks[o][n]=[]);var e=gform.hooks[o][n];null==i&&(i=n+"_"+e.length),gform.hooks[o][n].push({tag:i,callable:r,priority:t=null==t?10:t})},doHook:function(n,o,r){var t;if(r=Array.prototype.slice.call(r,1),null!=gform.hooks[n][o]&&((o=gform.hooks[n][o]).sort(function(o,n){return o.priority-n.priority}),o.forEach(function(o){"function"!=typeof(t=o.callable)&&(t=window[t]),"action"==n?t.apply(null,r):r[0]=t.apply(null,r)})),"filter"==n)return r[0]},removeHook:function(o,n,t,i){var r;null!=gform.hooks[o][n]&&(r=(r=gform.hooks[o][n]).filter(function(o,n,r){return!!(null!=i&&i!=o.tag||null!=t&&t!=o.priority)}),gform.hooks[o][n]=r)}}); /* ]]> */ </script> <script type="text/javascript" defer='defer' src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/js/gravityforms.min.js?ver=2.8.17" id="gform_gravityforms-js"></script> <script type="text/javascript" defer='defer' src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/assets/js/dist/utils.min.js?ver=50c7bea9c2320e16728e44ae9fde5f26" id="gform_gravityforms_utils-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/themes/accelerating-science-blogs/js/single-scripts.js?ver=1.2.9.3" id="single-scripts-js"></script> <link rel="https://api.w.org/" href="https://www.thermofisher.com/blog/semiconductors/wp-json/" /><link rel="alternate" title="JSON" type="application/json" href="https://www.thermofisher.com/blog/semiconductors/wp-json/wp/v2/posts/697" /><link rel="EditURI" type="application/rsd+xml" title="RSD" href="https://www.thermofisher.com/blog/xmlrpc.php?rsd" /> <link rel='shortlink' href='https://www.thermofisher.com/blog/semiconductors/?p=697' /> <link rel="alternate" title="oEmbed (JSON)" type="application/json+oembed" href="https://www.thermofisher.com/blog/semiconductors/wp-json/oembed/1.0/embed?url=https%3A%2F%2Fwww.thermofisher.com%2Fblog%2Fsemiconductors%2Fsemiconductor-fabrication-analysis-using-helios5-exl-dualbeam%2F" /> <link rel="alternate" title="oEmbed (XML)" type="text/xml+oembed" href="https://www.thermofisher.com/blog/semiconductors/wp-json/oembed/1.0/embed?url=https%3A%2F%2Fwww.thermofisher.com%2Fblog%2Fsemiconductors%2Fsemiconductor-fabrication-analysis-using-helios5-exl-dualbeam%2F&format=xml" /> <meta property="ia:markup_url" content="https://www.thermofisher.com/blog/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/?ia_markup=1" />  <style>img#wpstats{display:none}</style> <link rel="icon" href="https://www.thermofisher.com/blog/semiconductors/wp-content/themes/accelerating-science-blogs/images/favicon.ico" /> <link rel="pingback" href="https://www.thermofisher.com/blog/xmlrpc.php" /> <script type="application/ld+json"> {"@context":"http:\/\/schema.org","@type":"BlogPosting","mainEntityofPage":{"@type":"WebPage","@id":"https:\/\/www.thermofisher.com\/blog\/semiconductors\/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam\/"},"headline":"Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam","datePublished":"06\/26\/2024","dateModified":"06\/26\/2024","publisher":{"@type":"Organization","name":"Thermo Fisher Scientific","URL":"https:\/\/www.thermofisher.com\/us\/en\/home.html","logo":{"@type":"ImageObject","url":"https:\/\/www.thermofisher.com\/content\/dam\/LifeTech\/Images\/Header\/logo-color.png"}},"image":{"@type":"ImageObject","url":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/uploads\/sites\/23\/2024\/06\/EXL-Social-Header_1200x630.jpg","width":1200,"height":630},"keywords":"Electronics\/Semiconductors, transmission electron microscope, ","author":{"@type":"Person","name":"Xiaoting Gu"}} </script> <script type="text/javascript" src="https://www.thermofisher.com/etc/designs/lifetech/clientlibs/digitaldata.js" defer="defer"></script> <script id="tagmanager" type="text/javascript" src='https://assets.adobedtm.com/launch-ENeecb77f1160a4928a492ff040f7110c7.min.js' defer="defer"></script> <script> (function($) { $(document).ready(function() { digitalData.setPageType('blog'); }) })(jQuery); </script> </head> <body class="post-template-default single single-post postid-697 single-format-standard header-image full-width-content genesis-breadcrumbs-visible"><div class="site-container"><header class="site-header"><div class="wrap"><div class="title-area"><p class="site-title"><a href="https://www.thermofisher.com/" title="Thermo Fisher Scientific">Thermo Fisher Scientific</a></p><p class="site-description">Semiconductor manufacturing stories and solutions about a more connected, more autonomous, and smarter world</p></div><div class="widget-area header-widget-area"><section id="nav_menu-2" class="widget widget_nav_menu"><div class="widget-wrap"><nav class="nav-header"><ul id="menu-primary-menu" class="menu genesis-nav-menu"><li id="menu-item-123" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-has-children menu-item-123"><a><span >Categories</span></a> <ul class="sub-menu"> <li id="menu-item-125" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-125"><a href="https://www.thermofisher.com/blog/materials/"><span >Advancing Materials</span></a></li> <li id="menu-item-126" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-126"><a href="https://www.thermofisher.com/blog/mining/"><span >Advancing Mining</span></a></li> <li id="menu-item-496" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-496"><a href="https://www.thermofisher.com/blog/analyteguru/"><span >AnalyteGuru</span></a></li> <li id="menu-item-127" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-127"><a href="https://www.thermofisher.com/blog/metals/"><span >Analyzing Metals</span></a></li> <li id="menu-item-128" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-128"><a href="https://www.thermofisher.com/blog/ask-a-scientist/"><span >Ask a Scientist</span></a></li> <li id="menu-item-129" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-129"><a href="https://www.thermofisher.com/blog/behindthebench/"><span >Behind the Bench</span></a></li> <li id="menu-item-354" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-354"><a href="https://www.thermofisher.com/blog/biotechnology/"><span >Biotech at Scale</span></a></li> <li id="menu-item-130" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-130"><a href="https://www.thermofisher.com/blog/clinical-conversations/"><span >Clinical Conversations</span></a></li> <li id="menu-item-131" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-131"><a href="https://www.thermofisher.com/blog/food/"><span >Examining Food</span></a></li> <li id="menu-item-132" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-132"><a href="https://www.thermofisher.com/blog/identifying-threats/"><span >Identifying Threats</span></a></li> <li id="menu-item-156" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-156"><a href="https://www.thermofisher.com/blog/semiconductors/"><span >Illuminating Semiconductors</span></a></li> <li id="menu-item-158" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-158"><a href="https://www.thermofisher.com/blog/atomic-resolution/"><span >Life in Atomic Resolution</span></a></li> <li id="menu-item-133" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-133"><a href="https://www.thermofisher.com/blog/life-in-the-lab/"><span >Life in the Lab</span></a></li> <li id="menu-item-134" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-134"><a href="https://www.thermofisher.com/blog/oempowered/"><span >OEMpowered</span></a></li> <li id="menu-item-135" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-135"><a href="https://www.thermofisher.com/blog/connectedlab/"><span >The Connected Lab</span></a></li> </ul> </li> <li id="menu-item-136" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-136"><a href="https://www.thermofisher.com/blog/about-us/"><span >About Us</span></a></li> <li id="menu-item-137" class="menu-item menu-item-type-custom menu-item-object-custom menu-item-137"><a href="https://www.thermofisher.com/blog/contact-us/?site=semiconductors"><span >Contact</span></a></li> </ul></nav></div></section> </div><div class="breadcrumb"><span class="breadcrumb-link-wrap"><a href="https://www.thermofisher.com/blog/?">Accelerating Science</a></span><span class="breadcrumb-link-wrap"><a class="breadcrumb-link" href="https://www.thermofisher.com/blog/semiconductors/"><span class="breadcrumb-link-text-wrap">Illuminating Semiconductors</span></a><meta ></span> <span aria-label="breadcrumb separator">/</span> <span class="breadcrumb-link-wrap"><a class="breadcrumb-link" href="https://www.thermofisher.com/blog/semiconductors/general/"><span class="breadcrumb-link-text-wrap">General</span></a><meta ></span> <span aria-label="breadcrumb separator">/</span> <span class="breadcrumb-current-title">Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam</span></div></div></header> <section class="hero-banner" style="background-image:url(https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/EXL-Blog-Header-Banner_1900x820-1.jpg)"> </section> <div class="site-inner"><div class="content-sidebar-wrap"><main class="content"><article class="post-697 post type-post status-publish format-standard has-post-thumbnail category-dualbeam-fib-sem category-failure-analysis category-general category-transmission-electron-microscopy tag-electronics-semiconductors tag-transmission-electron-microscope entry" aria-label="Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam"><header class="entry-header"><h1 class="entry-title">Accelerating Semiconductor Device Analysis with the Power of the Helios 5 EXL Wafer DualBeam</h1> <span class="post-info-author"> By <a href="https://www.thermofisher.com/blog/author/xiaotinggu/" title="Posts by Xiaoting Gu" rel="author">Xiaoting Gu</a> </span> <span class="post-info-date"> 06.26.2024 </span> </header><div class="entry-content"><h2 style="font-size: 50%;color:white;height:5px">Semiconductor fabrication challenges</h2> <p>Semiconductor fabrication is a rapidly evolving field in which the demand for timely data analysis is of the utmost importance. The Thermo Scientific Helios 5 EXL Wafer DualBeam is designed to meet this demand by providing accelerated time to actionable data, flexible TEM sample preparation, and cross-sectional SEM imaging directly from 300 mm wafers within the semiconductor fab. This instrument is specifically tailored for metrology and defect analysis.</p> <h2 style="font-size: 100%"><strong>Semiconductor technology inflections</strong></h2> <p>The semiconductor industry is experiencing significant technological advancements to meet the needs of a world generating and consuming more data (Figure 1). This is driving the development of higher-performance semiconductor devices and new fabrication challenges.<br /> For logic, devices are transitioning from FinFET to nanosheet architectures with process nodes scaling below 5 nanometers.. Additionally, dynamic random-access memory (DRAM) devices are scaling down to sub-10 nanometers, while 3D NAND devices are incorporating more stacked layers to increase capacity. Alongside scaling, advanced packaging semiconductor technologies are moving towards three-dimensional structures, with the increasing complexity of 3D IC and high-bandwidth memory (HBM) solutions.<br /> These technology advancements present new challenges in both fabricating and analyzing advanced semiconductor devices. Consequently, there is a growing need for high-resolution, precise, and efficient analysis techniques.</p> <div id="attachment_707" style="width: 1034px" class="wp-caption alignnone"><img decoding="async" aria-describedby="caption-attachment-707" class="wp-image-707 size-full" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Growth-of-Data_1024x530.jpg" alt="Trend of high-performance semiconductor fabrication driven by data needs" title="Trend of high-performance semiconductor fabrication driven by data needs" width="1024" height="530" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Growth-of-Data_1024x530.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Growth-of-Data_1024x530-300x155.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Growth-of-Data_1024x530-768x398.jpg 768w" sizes="(max-width: 1024px) 100vw, 1024px" /><p id="caption-attachment-707" class="wp-caption-text">Figure 1. The exponential increase in data generation has fueled the fabrication of high-performance semiconductors.</p></div> <h2 style="font-size: 100%"><strong>The importance of TEM data in semiconductor fabrication</strong></h2> <p>As semiconductor devices become more complex, the need for fast access to transmission electron microscopy (TEM) data has significantly increased. TEM data plays a critical role in measuring shrinking metrology targets and characterizing buried defects, which are challenging to assess with existing solutions in the fab. In fact, the demand for TEM samples has risen by approximately 7.6 times compared to a decade ago (Figure 2). Going forward, the reliance on TEM data is expected to grow further as devices continue to evolve and become more intricate.</p> <div id="attachment_709" style="width: 1034px" class="wp-caption alignnone"><img decoding="async" aria-describedby="caption-attachment-709" class="size-full wp-image-709" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Tem-Data-Demand_1024x530.jpg" alt="Importance of TEM metrology data in semiconductor fabrication" title="Importance of TEM metrology data in semiconductor fabrication" width="1024" height="530" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Tem-Data-Demand_1024x530.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Tem-Data-Demand_1024x530-300x155.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Tem-Data-Demand_1024x530-768x398.jpg 768w" sizes="(max-width: 1024px) 100vw, 1024px" /><p id="caption-attachment-709" class="wp-caption-text">Figure 2. Technology inflections drive the increase of TEM data demand.</p></div> <h2 style="font-size: 100%"><strong>Accelerating Time to actionable TEM data</strong></h2> <p>Traditionally, semiconductor TEM analysis required sending wafers to external labs, resulting in time-consuming processes, complicated data tracing, and delayed feedback. The Helios 5 EXL Wafer DualBeam offers a transformative solution by enabling in-fab analysis, eliminating the need for wafer transportation, and streamlining the workflow. With the Helios 5 EXL Wafer DualBeam placed directly in the fab, analysis can be performed on the intact wafer, significantly reducing the time to obtain critical data. This in-fab workflow also simplifies wafer tracking and data tracing, empowers fab engineers with more control over job queues and results, and facilitates faster turnaround times.</p> <h2 style="font-size: 100%"><strong>Benefits of the Helios 5 EXL Wafer DualBeam</strong></h2> <p>The Helios 5 EXL Wafer DualBeam provides three key benefits that enhance semiconductor analysis:<br /> 1) User-Friendly Operation鈥擳he instrument鈥檚 intuitive interface and automation capabilities allow operators to easily navigate and execute analysis tasks. Automated cross-sectioning and TEM sample preparation free up operators to focus on other crucial tasks, boosting overall productivity.<br /> 2) Superior Sample and Data Quality鈥擳he Helios 5 EXL Wafer DualBeam ensures high-resolution scanning electron microscopy (SEM) imaging and precise focused ion beam (FIB) milling, enabling accurate endpointing on specific targets. This capability proves valuable for various processes, including top-down, planar, and inverted TEM preparations (Figure 3). The instrument also facilitates consistent SEM and FIB alignments, ensuring reliable and repeatable results.<br /> 3) Wide Variety of Device Analysis鈥擶ith its versatile capabilities, the Helios 5 EXL Wafer DualBeam caters to diverse semiconductor device analysis needs. From full-wafer automated cross-sectioning analysis to automated multi-site TEM sample preparation, the instrument offers a comprehensive solution for advanced semiconductor fabrication.</p> <div id="attachment_711" style="width: 1034px" class="wp-caption aligncenter"><img loading="lazy" decoding="async" aria-describedby="caption-attachment-711" class="size-full wp-image-711" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024.jpg" alt="Ultra-thin TEM metrology sample of a gate-all-around device" title="Ultra-thin TEM metrology sample of a gate-all-around device" width="1024" height="1024" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024-300x300.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024-150x150.jpg 150w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024-768x768.jpg 768w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Ultra-Thin-TEM_1024x1024-80x80.jpg 80w" sizes="(max-width: 1024px) 100vw, 1024px" /><p id="caption-attachment-711" class="wp-caption-text">Figure 3. Ultra-thin TEM sample of a gate-all-around device prepared by the Helios 5 EXL Wafer DualBeam for TEM metrology analysis.</p></div> <h2 style="font-size: 100%"><strong>Summary</strong></h2> <p>The Thermo Scientific line of Helios Wafer DualBeams has a long-standing history of success, with over 200 instruments installed globally. The latest generation, the Helios 5 EXL Wafer DualBeam, continues this legacy by addressing the evolving challenges faced by semiconductor engineers. By leveraging in-fab analysis and the instrument鈥檚 user-friendly operation, superior sample quality, and diverse device analysis capabilities, engineers can have faster access to data to meet the challenges posed by advancing semiconductor technologies. With Thermo Fisher’s expertise and commitment to excellence, the Helios 5 EXL Wafer DualBeam stands as a reliable and efficient tool for semiconductor analysis.<br /> Interested in learning more? Please visit the <a href="https://www.thermofisher.com/us/en/home/electron-microscopy/products/dualbeam-fib-sem-microscopes/helios-5-exl-dualbeam.html?cid=msd_semi_reg_xmkt_ldb_1276001_gl_oso_blg_ms7cgd&utm_source=comms-blog&utm_medium=semi%20blog&utm_campaign=msd_semi_reg_xmkt_ldb_1276001_gl_oso_blg_ms7cgd">Helios 5 EXL Wafer DualBeam</a> webpage and watch the on-demand webinar recording聽<a href="https://www.thermofisher.com/us/en/home/about-us/events/industrial/wafer-dualbeam-workflow-webinar.html?cid=msd_semi_reg_xmkt_ldb_1276001_gl_oso_blg_ms7cgd&utm_source=comms-blog&utm_medium=semi%20blog&utm_campaign=msd_semi_reg_xmkt_ldb_1276001_gl_oso_blg_ms7cgd">Helios5 EXL Wafer DualBeam Webinar</a> to explore the unique capabilities of this instrument.</p>  <div class="jp-relatedposts"> <div class="related-post related-1"> <a href="https://www.thermofisher.com/blog/semiconductors/semiconductor-nanoprobing-boosts-tem-analysis-success-rates-on-advanced-logic-devices/"><img width="310" height="274" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/np-iv-social-graphic-no-logo-1200x630-1-310x274.jpg" class="attachment-grid size-grid wp-post-image" alt="NProber Success Rate" decoding="async" loading="lazy" /></a> <span class="grid-content"> <h4 class="entry-title"><a href="https://www.thermofisher.com/blog/semiconductors/semiconductor-nanoprobing-boosts-tem-analysis-success-rates-on-advanced-logic-devices/">Semiconductor Nanoprobing Boosts TEM Analysis Success Rates on Advanced Logic Devices</a></h4> <p>Growing need for semiconductor nanoprobing As the semiconduc... </p> <a href="https://www.thermofisher.com/blog/semiconductors/semiconductor-nanoprobing-boosts-tem-analysis-success-rates-on-advanced-logic-devices/" class="read-more">Read More <i class="fa fa-icon fa-chevron-right"></i></a> </span> </div> <div class="related-post related-2"> <a href="https://www.thermofisher.com/blog/semiconductors/failure-analysis-of-wide-bandgap-semiconductor-devices/"><img width="310" height="274" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/06/Power-Blog-Social__no-logo__1200x630-310x274.jpg" class="attachment-grid size-grid wp-post-image" alt="Wide Bandgap Failure Analysis" decoding="async" loading="lazy" /></a> <span class="grid-content"> <h4 class="entry-title"><a href="https://www.thermofisher.com/blog/semiconductors/failure-analysis-of-wide-bandgap-semiconductor-devices/">Failure analysis of wide bandgap semiconductor devices</a></h4> <p>Compound semiconductors create analytical challenges Our eve... </p> <a href="https://www.thermofisher.com/blog/semiconductors/failure-analysis-of-wide-bandgap-semiconductor-devices/" class="read-more">Read More <i class="fa fa-icon fa-chevron-right"></i></a> </span> </div> <div class="related-post related-3"> <a href="https://www.thermofisher.com/blog/semiconductors/dram-device-dram-fabrication-tem-metrology/"><img width="310" height="274" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2024/04/DRAM-TEM-Metrology-Blog-Social_1200x630-310x274.jpg" class="attachment-grid size-grid wp-post-image" alt="DRAM memory" decoding="async" loading="lazy" /></a> <span class="grid-content"> <h4 class="entry-title"><a href="https://www.thermofisher.com/blog/semiconductors/dram-device-dram-fabrication-tem-metrology/">Enhancing High-Volume DRAM Device Manufacturing with TEM Metrology and Characterization</a></h4> <p>Dynamic random access memory (DRAM) plays a crucial role in ... </p> <a href="https://www.thermofisher.com/blog/semiconductors/dram-device-dram-fabrication-tem-metrology/" class="read-more">Read More <i class="fa fa-icon fa-chevron-right"></i></a> </span> </div> </div></div></article> <div id="respond" class="comment-respond"> <h3 id="reply-title" class="comment-reply-title">Leave a Reply <small><a rel="nofollow" id="cancel-comment-reply-link" href="/semiconductors/semiconductor-fabrication-analysis-using-helios5-exl-dualbeam/#respond" style="display:none;">Cancel reply</a></small></h3><form action="https://www.thermofisher.com/blog/semiconductors/wp-comments-post.php" method="post" id="commentform" class="comment-form" novalidate><p class="comment-notes"><span id="email-notes">Your email address will not be published.</span> <span class="required-field-message">Required fields are marked <span class="required">*</span></span></p><p class="comment-form-comment"><label for="comment">Comment <span class="required">*</span></label> <textarea id="comment" name="comment" cols="45" rows="8" maxlength="65525" required></textarea></p><p class="comment-form-author"><label for="author">Name <span class="required">*</span></label> <input id="author" name="author" type="text" value="" size="30" maxlength="245" autocomplete="name" required /></p> <p class="comment-form-email"><label for="email">Email <span class="required">*</span></label> <input id="email" name="email" type="email" value="" size="30" maxlength="100" aria-describedby="email-notes" autocomplete="email" required /></p> <p class="comment-form-url"><label for="url">Website</label> <input id="url" name="url" type="url" value="" size="30" maxlength="200" autocomplete="url" /></p> <p class="comment-form-cookies-consent"><input id="wp-comment-cookies-consent" name="wp-comment-cookies-consent" type="checkbox" value="yes" /> <label for="wp-comment-cookies-consent">Save my name, email, and website in this browser for the next time I comment.</label></p> <p class="form-submit"><input name="submit" type="submit" id="submit" class="submit" value="Post Comment" /> <input type='hidden' name='comment_post_ID' value='697' id='comment_post_ID' /> <input type='hidden' name='comment_parent' id='comment_parent' value='0' /> </p><p style="display: none;"><input type="hidden" id="akismet_comment_nonce" name="akismet_comment_nonce" value="ebbd466935" /></p><p style="display: none !important;" class="akismet-fields-container" data-prefix="ak_"><label>Δ<textarea name="ak_hp_textarea" cols="45" rows="8" maxlength="100"></textarea></label><input type="hidden" id="ak_js_1" name="ak_js" value="162"/><script>document.getElementById( "ak_js_1" ).setAttribute( "value", ( new Date() ).getTime() );</script></p></form> </div> <div class="adjacent-entry-pagination pagination"><div class="pagination-previous alignleft"><i class="fa fa-icon fa-chevron-left"></i> <a href="https://www.thermofisher.com/blog/semiconductors/failure-analysis-of-wide-bandgap-semiconductor-devices/" rel="prev">Failure analysis of wide bandgap semiconductor devices</a></div><div class="pagination-next alignright"><a href="https://www.thermofisher.com/blog/semiconductors/semiconductor-nanoprobing-boosts-tem-analysis-success-rates-on-advanced-logic-devices/" rel="next">Semiconductor Nanoprobing Boosts TEM Analysis Success Rates on Advanced Logic Devices</a> <i class="fa fa-icon fa-chevron-right"></i></div></div></main></div></div><footer class="site-footer"><div class="wrap"><div class="creds"><p class="footer-links"><a href="https://corporate.thermofisher.com/en/footer/privacy-statement.html" target="_blank" rel="noopener noreferrer">Privacy Statement</a><a href="https://corporate.thermofisher.com/en/footer/terms-and-conditions.html" target="_blank" rel="noopener noreferrer">Terms & Conditions</a><a href="/blog/locations/">Locations</a><a href="/blog/sitemap/">Sitemap</a></p><p>© 2024 <a href="https://www.thermofisher.com">Thermo Fisher Scientific</a>. All Rights Reserved.</p></div><span class="social-links"><p>Talk to us</p><a href="https://www.facebook.com/thermofisher" class="facebook" target="_blank" rel="noopener noreferrer"><i class="fa fa-icon fa-facebook"></i></a><a href="https://www.linkedin.com/company/thermo-fisher-scientific" class="linkedin" target="_blank" rel="noopener noreferrer"><i class="fa fa-icon fa-linkedin"></i></a><a href="https://twitter.com/thermofisher" class="twitter" target="_blank" rel="noopener noreferrer"><i class="fa fa-icon fa-twitter"></i></a><a href="https://www.youtube.com/c/thermofisher" class="youtube" target="_blank" rel="noopener noreferrer"><i class="fa fa-icon fa-youtube"></i></a></span></div></footer></div>  <script type="text/html" id="wpls--tmpl"> <li class="search-result"> <a href="<%= post.link %>"> <div class="wpls--item-title-wrap"> <h4 class="wpls--item-title"><%= post.title %></h4> </div> </a> </li> </script> <script type="text/javascript"> /* MonsterInsights Scroll Tracking */ if ( typeof(jQuery) !== 'undefined' ) { jQuery( document ).ready(function(){ function monsterinsights_scroll_tracking_load() { if ( ( typeof(__gaTracker) !== 'undefined' && __gaTracker && __gaTracker.hasOwnProperty( "loaded" ) && __gaTracker.loaded == true ) || ( typeof(__gtagTracker) !== 'undefined' && __gtagTracker ) ) { (function(factory) { factory(jQuery); }(function($) { /* Scroll Depth */ "use strict"; var defaults = { percentage: true }; var $window = $(window), cache = [], scrollEventBound = false, lastPixelDepth = 0; /* * Plugin */ $.scrollDepth = function(options) { var startTime = +new Date(); options = $.extend({}, defaults, options); /* * Functions */ function sendEvent(action, label, scrollDistance, timing) { if ( 'undefined' === typeof MonsterInsightsObject || 'undefined' === typeof MonsterInsightsObject.sendEvent ) { return; } var paramName = action.toLowerCase(); var fieldsArray = { send_to: 'G-TJ18KZWFVE', non_interaction: true }; fieldsArray[paramName] = label; if (arguments.length > 3) { fieldsArray.scroll_timing = timing MonsterInsightsObject.sendEvent('event', 'scroll_depth', fieldsArray); } else { MonsterInsightsObject.sendEvent('event', 'scroll_depth', fieldsArray); } } function calculateMarks(docHeight) { return { '25%' : parseInt(docHeight * 0.25, 10), '50%' : parseInt(docHeight * 0.50, 10), '75%' : parseInt(docHeight * 0.75, 10), /* Cushion to trigger 100% event in iOS */ '100%': docHeight - 5 }; } function checkMarks(marks, scrollDistance, timing) { /* Check each active mark */ $.each(marks, function(key, val) { if ( $.inArray(key, cache) === -1 && scrollDistance >= val ) { sendEvent('Percentage', key, scrollDistance, timing); cache.push(key); } }); } function rounded(scrollDistance) { /* Returns String */ return (Math.floor(scrollDistance/250) * 250).toString(); } function init() { bindScrollDepth(); } /* * Public Methods */ /* Reset Scroll Depth with the originally initialized options */ $.scrollDepth.reset = function() { cache = []; lastPixelDepth = 0; $window.off('scroll.scrollDepth'); bindScrollDepth(); }; /* Add DOM elements to be tracked */ $.scrollDepth.addElements = function(elems) { if (typeof elems == "undefined" || !$.isArray(elems)) { return; } $.merge(options.elements, elems); /* If scroll event has been unbound from window, rebind */ if (!scrollEventBound) { bindScrollDepth(); } }; /* Remove DOM elements currently tracked */ $.scrollDepth.removeElements = function(elems) { if (typeof elems == "undefined" || !$.isArray(elems)) { return; } $.each(elems, function(index, elem) { var inElementsArray = $.inArray(elem, options.elements); var inCacheArray = $.inArray(elem, cache); if (inElementsArray != -1) { options.elements.splice(inElementsArray, 1); } if (inCacheArray != -1) { cache.splice(inCacheArray, 1); } }); }; /* * Throttle function borrowed from: * Underscore.js 1.5.2 * http://underscorejs.org * (c) 2009-2013 Jeremy Ashkenas, DocumentCloud and Investigative Reporters & Editors * Underscore may be freely distributed under the MIT license. */ function throttle(func, wait) { var context, args, result; var timeout = null; var previous = 0; var later = function() { previous = new Date; timeout = null; result = func.apply(context, args); }; return function() { var now = new Date; if (!previous) previous = now; var remaining = wait - (now - previous); context = this; args = arguments; if (remaining <= 0) { clearTimeout(timeout); timeout = null; previous = now; result = func.apply(context, args); } else if (!timeout) { timeout = setTimeout(later, remaining); } return result; }; } /* * Scroll Event */ function bindScrollDepth() { scrollEventBound = true; $window.on('scroll.scrollDepth', throttle(function() { /* * We calculate document and window height on each scroll event to * account for dynamic DOM changes. */ var docHeight = $(document).height(), winHeight = window.innerHeight ? window.innerHeight : $window.height(), scrollDistance = $window.scrollTop() + winHeight, /* Recalculate percentage marks */ marks = calculateMarks(docHeight), /* Timing */ timing = +new Date - startTime; checkMarks(marks, scrollDistance, timing); }, 500)); } init(); }; /* UMD export */ return $.scrollDepth; })); jQuery.scrollDepth(); } else { setTimeout(monsterinsights_scroll_tracking_load, 200); } } monsterinsights_scroll_tracking_load(); }); } /* End MonsterInsights Scroll Tracking */ </script><script type="text/javascript" id="wpls-script-js-extra"> /* <![CDATA[ */ var wp_search_vars = {"helperText":"one more character","api":"https:\/\/admin.acceleratingscience.com\/wp-json\/as\/v1\/all-posts\/23"}; /* ]]> */ </script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/wp-search-live/public/assets/js/wp-live-search.js?ver=0.9" id="wpls-script-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/comment-reply.min.js?ver=6.6.1" id="comment-reply-js" async="async" data-wp-strategy="async"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/dist/dom-ready.min.js?ver=f77871ff7694fffea381" id="wp-dom-ready-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/dist/hooks.min.js?ver=2810c76e705dd1a53b18" id="wp-hooks-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/dist/i18n.min.js?ver=5e580eb46a90c2b997e6" id="wp-i18n-js"></script> <script type="text/javascript" id="wp-i18n-js-after"> /* <![CDATA[ */ wp.i18n.setLocaleData( { 'text direction\u0004ltr': [ 'ltr' ] } ); /* ]]> */ </script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/dist/a11y.min.js?ver=d90eebea464f6c09bfd5" id="wp-a11y-js"></script> <script type="text/javascript" defer='defer' src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/assets/js/dist/vendor-theme.min.js?ver=54e7080aa7a02c83aa61fae430b9d869" id="gform_gravityforms_theme_vendors-js"></script> <script type="text/javascript" id="gform_gravityforms_theme-js-extra"> /* <![CDATA[ */ var gform_theme_config = {"common":{"form":{"honeypot":{"version_hash":"4a792b070322e711c2521ee9802c04ea"}}},"hmr_dev":"","public_path":"https:\/\/admin.acceleratingscience.com\/semiconductors\/wp-content\/plugins\/gravityforms\/assets\/js\/dist\/"}; /* ]]> */ </script> <script type="text/javascript" defer='defer' src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/gravityforms/assets/js/dist/scripts-theme.min.js?ver=bab19fd84843dabc070e73326d787910" id="gform_gravityforms_theme-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/jquery/ui/core.min.js?ver=1.13.3" id="jquery-ui-core-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog//wp-includes/js/jquery/ui/tabs.min.js?ver=1.13.3" id="jquery-ui-tabs-js"></script> <script type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/themes/accelerating-science-blogs/js/scripts.js?ver=1.2.9.3" id="scripts-js"></script> <script type="text/javascript" src="https://stats.wp.com/e-202448.js" id="jetpack-stats-js" data-wp-strategy="defer"></script> <script type="text/javascript" id="jetpack-stats-js-after"> /* <![CDATA[ */ _stq = window._stq || []; _stq.push([ "view", JSON.parse("{\"v\":\"ext\",\"blog\":\"207529564\",\"post\":\"697\",\"tz\":\"0\",\"srv\":\"www.thermofisher.com\",\"j\":\"1:13.9.1\"}") ]); _stq.push([ "clickTrackerInit", "207529564", "697" ]); /* ]]> */ </script> <script defer type="text/javascript" src="https://www.thermofisher.com/blog/semiconductors/wp-content/plugins/akismet/_inc/akismet-frontend.js?ver=1722950842" id="akismet-frontend-js"></script> <script type="text/javascript" src="/K1tG87Y8lf3h/SMnlrP/_GYOkD/LOVucQL4wVLzt1/YxxmKQ/CQB/oTCJAXxg"></script></body></html>