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<div id="siteNotice"></div> </div> <div class="pre-content heading-holder"> <div class="page-heading"> <h1 id="firstHeading" class="firstHeading mw-first-heading"><span class="mw-page-title-main">三氟化氯</span></h1> <div class="tagline">化合物</div> </div> <nav class="page-actions-menu"> <ul id="p-views" class="page-actions-menu__list"> <li id="language-selector" class="page-actions-menu__list-item"> <a role="button" href="#p-lang" data-mw="interface" data-event-name="menu.languages" title="语言" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet language-selector"> <span class="minerva-icon minerva-icon--language"></span> <span>语言</span> </a> </li> <li id="page-actions-watch" class="page-actions-menu__list-item"> <a role="button" id="ca-watch" href="/w/index.php?title=Special:%E7%94%A8%E6%88%B7%E7%99%BB%E5%BD%95&returnto=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF" data-event-name="menu.watch" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet menu__item--page-actions-watch"> <span class="minerva-icon minerva-icon--star"></span> <span>监视</span> </a> </li> <li id="page-actions-edit" class="page-actions-menu__list-item"> <a role="button" id="ca-edit" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit" data-event-name="menu.edit" data-mw="interface" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet edit-page menu__item--page-actions-edit"> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </li> </ul> </nav>  <div id="mw-content-subtitle"></div> </div> <div id="bodyContent" class="content"> <div id="mw-content-text" class="mw-body-content"><script>function mfTempOpenSection(id){var block=document.getElementById("mf-section-"+id);block.className+=" open-block";block.previousSibling.className+=" open-block";}</script><div class="mw-content-ltr mw-parser-output" lang="zh" dir="ltr"><section class="mf-section-0" id="mf-section-0"><style data-mw-deduplicate="TemplateStyles:r84001320">.mw-parser-output .ib-chembox{border-collapse:collapse;text-align:left}.mw-parser-output .ib-chembox td,.mw-parser-output .ib-chembox th{border:1px solid #a2a9b1;width:40%}.mw-parser-output .ib-chembox td+td{width:60%}</style> <p><b>三氟化氯</b>是<a href="/wiki/%E6%97%A0%E6%9C%BA%E5%8C%96%E5%90%88%E7%89%A9" title="无机化合物">无机化合物</a> ，分子式为ClF<sub>3</sub>。这种物质气态时为淡黄色，有毒，有强腐蚀性，液态时为黄绿色，一般将其压缩成液体销售。该物质主要的用途是<a href="/wiki/%E7%81%AB%E7%AE%AD" title="火箭">火箭</a><a href="/wiki/%E7%87%83%E6%96%99" title="燃料">燃料</a>，<a href="/wiki/%E5%8D%8A%E5%AF%BC%E4%BD%93" title="半导体">半导体</a>行业中清洗和蚀刻，<sup id="cite_ref-2" class="reference"><a href="#cite_note-2"><span class="cite-bracket">[</span>2<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-3" class="reference"><a href="#cite_note-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> <a href="/wiki/%E6%A0%B8%E5%8F%8D%E5%BA%94%E5%A0%86" title="核反应堆">核反应堆</a>加工燃料，<sup id="cite_ref-4" class="reference"><a href="#cite_note-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup> 以及一些其他用途。<sup id="cite_ref-5" class="reference"><a href="#cite_note-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> </p><table class="infobox ib-chembox nounderlines" cellspacing="0" cellpadding="3" rules="all" style="background-color:#f0f0f0; float:right; margin: 0 0 1em 1em; border-color: #aaaaaa; border-style:solid; border:1px; border-collapse:collapse; empty-cells:show; width:305px; font-size:90%;"> <tbody><tr> <th colspan="2" style="font-size:120%; text-align:center; background:#d6e0dc;">三氟化氯 </th></tr> <tr> <td colspan="2" style="background:#ffffff; text-align:center;"><span typeof="mw:File"><a href="/wiki/File:Chlorine-trifluoride.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/7/7e/Chlorine-trifluoride.png/200px-Chlorine-trifluoride.png" decoding="async" width="200" height="135" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/7/7e/Chlorine-trifluoride.png/300px-Chlorine-trifluoride.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/7/7e/Chlorine-trifluoride.png/400px-Chlorine-trifluoride.png 2x" data-file-width="2200" data-file-height="1484"></a></span> </td></tr> <tr> <td colspan="2" style="background:#ffffff; text-align:center;"><span typeof="mw:File"><a href="/wiki/File:Chlorine-trifluoride-3D-vdW.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/c/c7/Chlorine-trifluoride-3D-vdW.png/200px-Chlorine-trifluoride-3D-vdW.png" decoding="async" width="200" height="164" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/c/c7/Chlorine-trifluoride-3D-vdW.png/300px-Chlorine-trifluoride-3D-vdW.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/c/c7/Chlorine-trifluoride-3D-vdW.png/400px-Chlorine-trifluoride-3D-vdW.png 2x" data-file-width="1100" data-file-height="901"></a></span> </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">识别 </th></tr> <tr> <td><a href="/wiki/CAS%E5%8F%B7" title="CAS号">CAS号</a> </td> <td><span class="reflink plainlinks nourlexpansion"><a rel="nofollow" class="external text" href="https://commonchemistry.cas.org/detail?cas_rn=7790-91-2">7790-91-2</a></span> <sup> <span typeof="mw:File"><span><img alt="check" src="//upload.wikimedia.org/wikipedia/commons/thumb/f/fb/Yes_check.svg/7px-Yes_check.svg.png" decoding="async" width="7" height="7" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/f/fb/Yes_check.svg/11px-Yes_check.svg.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/f/fb/Yes_check.svg/14px-Yes_check.svg.png 2x" data-file-width="600" data-file-height="600"></span></span><span style="display:none">Y</span></sup> </td></tr> <tr> <td><a href="/wiki/PubChem" title="PubChem">PubChem</a> </td> <td><span class="reflink plainlinks nourlexpansion"><a rel="nofollow" class="external text" href="https://pubchem.ncbi.nlm.nih.gov/compound/24637">24637</a></span> </td></tr> <tr> <td><a href="/wiki/SMILES" class="mw-redirect" title="SMILES">SMILES</a> </td> <td><div style="word-break:break-all;"><div class="collapsible-list mw-collapsible mw-collapsed" style="text-align: left;"> <div style="line-height: 1.6em; font-weight: bold;"><div> </div></div> <ul class="mw-collapsible-content" style="margin-top: 0; margin-bottom: 0; line-height: inherit; list-style: none; margin-left: 0;"><li style="line-height: inherit; margin: 0"><span lang="en">FCl(F)F</span></li></ul> </div></div> </td></tr> <tr> <td><a href="/wiki/%E5%9B%BD%E9%99%85%E5%8C%96%E5%90%88%E7%89%A9%E6%A0%87%E8%AF%86" title="国际化合物标识">InChI</a> </td> <td><div style="word-break:break-all;"><div class="collapsible-list mw-collapsible mw-collapsed" style="text-align: left;"> <div style="line-height: 1.6em; font-weight: bold;"><div> </div></div> <ul class="mw-collapsible-content" style="margin-top: 0; margin-bottom: 0; line-height: inherit; list-style: none; margin-left: 0;"><li style="line-height: inherit; margin: 0">InChI=1S/ClF3/c2-1(3)4</li></ul> </div></div> </td></tr> <tr> <td><a href="/wiki/%E8%81%94%E5%90%88%E5%9B%BD%E5%8D%B1%E9%99%A9%E8%B4%A7%E7%89%A9%E7%BC%96%E5%8F%B7" title="联合国危险货物编号">UN编号</a> </td> <td>1749 </td></tr> <tr> <td><a href="/wiki/%E5%8C%96%E5%AD%A6%E7%89%A9%E8%B4%A8%E6%AF%92%E6%80%A7%E6%95%B0%E6%8D%AE%E5%BA%93" title="化学物质毒性数据库">RTECS</a> </td> <td>FO2800000 </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">性质 </th></tr> <tr> <td><a href="/wiki/%E5%8C%96%E5%AD%A6%E5%BC%8F" title="化学式">化学式</a> </td> <td><span lang="en">ClF<sub>3</sub></span> </td></tr> <tr> <td><a href="/wiki/%E6%91%A9%E5%B0%94%E8%B4%A8%E9%87%8F" title="摩尔质量">摩尔质量</a> </td> <td>92.448 g·mol⁻¹ </td></tr> <tr> <td>外观 </td> <td>淡黄色气体或液体 </td></tr> <tr> <td><a href="/wiki/%E5%AF%86%E5%BA%A6" title="密度">密度</a> </td> <td>1.77 g/cm<sup>3</sup> (13 °C, 液态) <br> 0.004 g/cm<sup>3</sup> (气态) </td></tr> <tr> <td><a href="/wiki/%E7%86%94%E7%82%B9" title="熔点">熔点</a> </td> <td>−76.34 °C </td></tr> <tr> <td><a href="/wiki/%E6%B2%B8%E7%82%B9" title="沸点">沸点</a> </td> <td>11.75 °C </td></tr> <tr> <td><a href="/wiki/%E6%BA%B6%E8%A7%A3%E6%80%A7" class="mw-redirect" title="溶解性">溶解性</a>（<a href="/wiki/%E6%B0%B4" title="水">水</a>） </td> <td>水解 </td></tr> <tr> <td><a href="/wiki/%E9%BB%8F%E5%BA%A6" title="黏度">黏度</a> </td> <td>9.182 x 10<sup>−5</sup> Pa s </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">结构 </th></tr> <tr> <td><a href="/wiki/%E5%88%86%E5%AD%90%E7%BB%93%E6%9E%84" title="分子结构">分子构型</a> </td> <td><a href="/w/index.php?title=T%E5%BD%A2&action=edit&redlink=1" class="new" title="T形（页面不存在）">T形</a> </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">热力学 </th></tr> <tr> <td class="nounderlines"><a href="/wiki/%E6%A0%87%E5%87%86%E6%91%A9%E5%B0%94%E7%94%9F%E6%88%90%E7%84%93" title="标准摩尔生成焓">Δ<sub>f</sub><i>H</i><sub>m</sub><sup>⦵</sup><sub>298K</sub></a> </td> <td>−158.87 kJ/mol <sup id="cite_ref-NIST_1-0" class="reference"><a href="#cite_note-NIST-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </td></tr> <tr> <td class="nounderlines"><a href="/wiki/%E6%A0%87%E5%87%86%E6%91%A9%E5%B0%94%E7%86%B5" title="标准摩尔熵"><i>S</i><sup>⦵</sup><sub>298K</sub></a> </td> <td>281.59 J K<sup>−1</sup> mol<sup>−1</sup> <sup id="cite_ref-NIST_1-1" class="reference"><a href="#cite_note-NIST-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">危险性 </th></tr> <tr> <td><a href="/wiki/%E5%8C%96%E5%AD%A6%E5%93%81%E5%AE%89%E5%85%A8%E8%AF%B4%E6%98%8E%E4%B9%A6" class="mw-redirect" title="化学品安全说明书">MSDS</a> </td> <td><a rel="nofollow" class="external text" href="http://www.ilo.org/public/english/protection/safework/cis/products/icsc/dtasht/_icsc06/icsc0656.htm">ICSC 0656</a> </td></tr> <tr> <td>欧盟编号 </td> <td>没有记录 </td></tr> <tr> <td>主要危害 </td> <td>毒性, 腐蚀性, 氧化性. </td></tr> <tr> <td><a href="/wiki/NFPA_704" title="NFPA 704">NFPA 704</a> </td> <td> <div style="position: relative; height: 85px; width: 75px;"> <div style="position: absolute; height: 75px; width: 75px;"><span typeof="mw:File"><a href="/wiki/File:NFPA_704.svg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/6/6f/NFPA_704.svg/75px-NFPA_704.svg.png" decoding="async" width="75" height="75" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/6/6f/NFPA_704.svg/113px-NFPA_704.svg.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/6/6f/NFPA_704.svg/150px-NFPA_704.svg.png 2x" data-file-width="512" data-file-height="512"></a></span></div> <div title="可燃性" style="background: transparent; width: 75px; height: 2em; text-align: center; vertical-align: middle; position: absolute; top: 3px; font-size: large;"><span class="abbr" style="color: black;" title="可燃性0級。不會燃燒（如水）。"><b>0</b></span></div> <div title="健康" style="background: transparent; width: 37.5px; height: 2em; text-align: center; vertical-align: middle; position: absolute; top: 21px; font-size: large;"><span class="abbr" style="color: black;" title="健康危險4級。短時間的暴露可能會導致死亡或重大持續性傷害（如VX毒氣）"><b>4</b></span></div> <div title="反應性" style="background: transparent; width: 37.5px; height: 2em; text-align: center; vertical-align: middle; position: absolute; top: 21px; left: 37.5px; font-size: large;"><span class="abbr" style="color: black;" title="反應性3級。可能爆炸分解，但需要一個強的引發源，必須在密閉性容器内加熱方可引發，與水爆炸性反應，或重擊下爆炸（如氟氣）。"><b>3</b></span></div> <div title="其它危險" style="background: transparent; width: 75px; height: 2em; text-align: center; vertical-align: middle; position: absolute; top: 44px; font-size: small;"><span class="abbr" style="color: black;" title="氧化劑（如高氯酸鉀）"><b>OX</b></span></div> </div> </td></tr> <tr> <th style="background:#D6E0DC; text-align:center;" colspan="2">相关物质 </th></tr> <tr> <td>相关化学品 </td> <td><a href="/wiki/%E4%BA%94%E6%B0%9F%E5%8C%96%E6%B0%AF" title="五氟化氯">五氟化氯</a><br><a href="/wiki/%E4%B8%80%E6%B0%9F%E5%8C%96%E6%B0%AF" title="一氟化氯">一氟化氯</a><br><a href="/wiki/%E4%B8%89%E6%B0%9F%E5%8C%96%E6%BA%B4" title="三氟化溴">三氟化溴</a> </td></tr> <tr> <td style="background:#D6E0DC; text-align:center;" colspan="2">若非注明，所有数据均出自<a href="/wiki/%E6%A0%87%E5%87%86%E7%8A%B6%E6%80%81" title="标准状态">标准状态（25 ℃，100 kPa）</a>下。 </td></tr></tbody></table> <div id="toc" class="toc" role="navigation" aria-labelledby="mw-toc-heading"><input type="checkbox" role="button" id="toctogglecheckbox" class="toctogglecheckbox" style="display:none"><div class="toctitle" lang="zh" dir="ltr"><h2 id="mw-toc-heading">目录</h2><span class="toctogglespan"><label class="toctogglelabel" for="toctogglecheckbox"></label></span></div> <ul> <li class="toclevel-1 tocsection-1"><a href="#%E5%88%B6%E5%A4%87%E3%80%81%E7%BB%93%E6%9E%84%E5%92%8C%E6%80%A7%E8%B4%A8"><span class="tocnumber">1</span> <span class="toctext">制备、结构和性质</span></a></li> <li class="toclevel-1 tocsection-2"><a href="#%E5%8D%B1%E5%AE%B3"><span class="tocnumber">2</span> <span class="toctext">危害</span></a></li> <li class="toclevel-1 tocsection-3"><a href="#%E5%BA%94%E7%94%A8"><span class="tocnumber">3</span> <span class="toctext">应用</span></a> <ul> <li class="toclevel-2 tocsection-4"><a href="#%E5%86%9B%E4%BA%8B%E5%BA%94%E7%94%A8"><span class="tocnumber">3.1</span> <span class="toctext">军事应用</span></a></li> <li class="toclevel-2 tocsection-5"><a href="#%E7%81%AB%E7%AE%AD%E6%8E%A8%E8%BF%9B%E5%89%82"><span class="tocnumber">3.2</span> <span class="toctext">火箭推进剂</span></a></li> <li class="toclevel-2 tocsection-6"><a href="#%E5%8D%8A%E5%AF%BC%E4%BD%93%E5%B7%A5%E4%B8%9A"><span class="tocnumber">3.3</span> <span class="toctext">半导体工业</span></a></li> </ul> </li> <li class="toclevel-1 tocsection-7"><a href="#%E5%8F%82%E8%80%83%E8%B5%84%E6%96%99"><span class="tocnumber">4</span> <span class="toctext">参考资料</span></a></li> </ul> </div> </section><div class="mw-heading mw-heading2 section-heading" onclick="mfTempOpenSection(1)"><span class="indicator mf-icon mf-icon-expand mf-icon--small"></span><h2 id="制备、结构和性质"><span id=".E5.88.B6.E5.A4.87.E3.80.81.E7.BB.93.E6.9E.84.E5.92.8C.E6.80.A7.E8.B4.A8"></span>制备、结构和性质</h2><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=1" title="编辑章节：制备、结构和性质" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div><section class="mf-section-1 collapsible-block" id="mf-section-1"> <p><a href="/wiki/%E6%8B%89%E5%A4%AB" class="mw-disambig" title="拉夫">拉夫</a>（Ruff）和<a href="/wiki/%E5%85%8B%E9%B2%81%E6%A0%BC" title="克鲁格">克鲁格</a>（Krug）在1930年氟化<a href="/wiki/%E6%B0%AF%E6%B0%94" title="氯气">氯气</a>并报告发现了这种物质。这个反应也生成<a href="/wiki/%E4%B8%80%E6%B0%9F%E5%8C%96%E6%B0%AF" title="一氟化氯">一氟化氯</a>，可以通过<a href="/wiki/%E8%92%B8%E9%A6%8F" title="蒸馏">蒸馏</a>使其分离。<sup id="cite_ref-6" class="reference"><a href="#cite_note-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup> </p> <dl><dd>3 F<sub>2</sub> + Cl<sub>2</sub> → 2 ClF<sub>3</sub></dd></dl> <p>ClF<sub>3</sub> 形状大致是<a href="/wiki/T%E5%BD%A2%E5%88%86%E5%AD%90%E6%A7%8B%E5%9E%8B" class="mw-redirect" title="T形分子構型">T形</a>, 有一个短键 (1.598 <a href="/wiki/%E5%9F%83" class="mw-redirect" title="埃">Å</a>) 和两个长键 (1.698 Å).<sup id="cite_ref-Smith_1953_pp._609–614_7-0" class="reference"><a href="#cite_note-Smith_1953_pp._609%E2%80%93614-7"><span class="cite-bracket">[</span>7<span class="cite-bracket">]</span></a></sup> ，孤对电子占据两个赤道位置，与共价键一起形成一个三角双锥。这种结构与<a href="/wiki/%E4%BB%B7%E5%B1%82%E7%94%B5%E5%AD%90%E5%AF%B9%E4%BA%92%E6%96%A5%E7%90%86%E8%AE%BA" title="价层电子对互斥理论">价层电子对互斥理论</a>的预测一致。较长的Cl-F键与<a href="/wiki/%E8%B6%85%E4%BB%B7%E5%88%86%E5%AD%90" title="超价分子">超价键</a>一致. </p><p>ClF<sub>3</sub>主要用来生产<a href="/wiki/%E5%85%AD%E6%B0%9F%E5%8C%96%E9%88%BE" title="六氟化鈾">六氟化铀</a>（UF<sub>6</sub>），以及核燃料加工和后期处理，主要反应方程式: </p> <dl><dd>U + 3 ClF<sub>3</sub> → UF<sub>6</sub> + 3 ClF</dd></dl> </section><div class="mw-heading mw-heading2 section-heading" onclick="mfTempOpenSection(2)"><span class="indicator mf-icon mf-icon-expand mf-icon--small"></span><h2 id="危害"><span id=".E5.8D.B1.E5.AE.B3"></span>危害</h2><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=2" title="编辑章节：危害" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div><section class="mf-section-2 collapsible-block" id="mf-section-2"> <p>ClF<sub>3</sub>是一种很强的<a href="/wiki/%E6%B0%A7%E5%8C%96%E5%89%82" title="氧化剂">氧化剂</a>、<a href="/wiki/%E6%B0%9F%E5%8C%96" class="mw-redirect" title="氟化">氟化</a>剂。它能与大多数<a href="/wiki/%E6%97%A0%E6%9C%BA%E7%89%A9" class="mw-redirect" title="无机物">无机物</a>、<a href="/wiki/%E6%9C%89%E6%9C%BA%E7%89%A9" class="mw-redirect" title="有机物">有机物</a>甚至<a href="/wiki/%E5%A1%91%E6%96%99" title="塑料">塑料</a>反应，可以使许多材料不接触明火就燃烧。这些反应通常很剧烈，在某些情况下甚至会<a href="/wiki/%E7%88%86%E7%82%B8" title="爆炸">爆炸</a>。它与一些金属反应生成<a href="/wiki/%E6%B0%AF%E5%8C%96%E7%89%A9" title="氯化物">氯化物</a>和<a href="/wiki/%E6%B0%9F%E5%8C%96%E7%89%A9" title="氟化物">氟化物</a>，与<a href="/wiki/%E7%A3%B7" title="磷">磷</a>反应生成<a href="/wiki/%E4%B8%89%E6%B0%AF%E5%8C%96%E7%A3%B7" title="三氯化磷">三氯化磷</a>和<a href="/wiki/%E4%BA%94%E6%B0%9F%E5%8C%96%E7%A3%B7" title="五氟化磷">五氟化磷</a>，而与<a href="/wiki/%E7%A1%AB" title="硫">硫</a>反应生成<a href="/wiki/%E4%BA%8C%E6%B0%AF%E5%8C%96%E7%A1%AB" title="二氯化硫">二氯化硫</a>和<a href="/wiki/%E5%9B%9B%E6%B0%9F%E5%8C%96%E7%A1%AB" title="四氟化硫">四氟化硫</a>。 ClF<sub>3</sub>也与水剧烈反应，<a href="/wiki/%E6%B0%B4%E8%A7%A3" title="水解">水解</a>产生有毒物质，例如<a href="/wiki/%E6%B0%9F%E5%8C%96%E6%B0%A2" title="氟化氢">氟化氢</a>。<a href="/wiki/%E7%A1%AB%E5%8C%96%E6%B0%A2" class="mw-redirect" title="硫化氢">H<sub>2</sub>S</a>在室温下与ClF<sub>3</sub>混合就会爆炸。 </p><p>超过氧氣的<a href="/wiki/%E6%B0%A7%E5%8C%96%E6%80%A7" class="mw-redirect" title="氧化性">氧化性</a>使ClF<sub>3</sub>能腐蚀通常视为不可燃的含氧材料。它能点燃沙子、<a href="/wiki/%E7%9F%B3%E6%A3%89" title="石棉">石棉</a>、玻璃，甚至是在氧气中烧过的灰烬。在一起工業意外中，900千克ClF<sub>3</sub>泄漏，烧穿了下面30厘米厚的混凝土和90厘米厚的礫石。<sup id="cite_ref-8" class="reference"><a href="#cite_note-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup>任何和三氟化氯接觸的設備必須经过仔細挑選和清潔, 因為任何污染都可以烧穿<a href="/wiki/%E9%92%9D%E5%8C%96" title="钝化">钝化</a>膜，使它来不及重新生成。ClF<sub>3</sub>引起的火势只能用氮气或<a href="/wiki/%E6%B0%A9%E6%B0%94" class="mw-redirect" title="氩气">氩气</a>等<a href="/wiki/%E7%A8%80%E6%9C%89%E6%B0%94%E4%BD%93" title="稀有气体">稀有气体</a>灭掉，且使该区域保持凉爽，直至反应结束。<sup id="cite_ref-9" class="reference"><a href="#cite_note-9"><span class="cite-bracket">[</span>9<span class="cite-bracket">]</span></a></sup>ClF<sub>3</sub>会与水或<a href="/wiki/%E4%BA%8C%E6%B0%A7%E5%8C%96%E7%A2%B3" title="二氧化碳">二氧化碳</a>反应，因此用它们灭火只会适得其反。<sup id="cite_ref-10" class="reference"><a href="#cite_note-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup> </p> </section><div class="mw-heading mw-heading2 section-heading" onclick="mfTempOpenSection(3)"><span class="indicator mf-icon mf-icon-expand mf-icon--small"></span><h2 id="应用"><span id=".E5.BA.94.E7.94.A8"></span>应用</h2><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=3" title="编辑章节：应用" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div><section class="mf-section-3 collapsible-block" id="mf-section-3"> <div class="mw-heading mw-heading3"><h3 id="军事应用"><span id=".E5.86.9B.E4.BA.8B.E5.BA.94.E7.94.A8"></span>军事应用</h3><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=4" title="编辑章节：军事应用" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div> <style data-mw-deduplicate="TemplateStyles:r83732972">.mw-parser-output .ambox{border:1px solid #a2a9b1;border-left:10px solid #36c;background-color:#fbfbfb;box-sizing:border-box}.mw-parser-output .ambox+link+.ambox,.mw-parser-output .ambox+link+style+.ambox,.mw-parser-output .ambox+link+link+.ambox,.mw-parser-output .ambox+.mw-empty-elt+link+.ambox,.mw-parser-output .ambox+.mw-empty-elt+link+style+.ambox,.mw-parser-output .ambox+.mw-empty-elt+link+link+.ambox{margin-top:-1px}html body.mediawiki .mw-parser-output .ambox.mbox-small-left{margin:4px 1em 4px 0;overflow:hidden;width:238px;border-collapse:collapse;font-size:88%;line-height:1.25em}.mw-parser-output .ambox-speedy{border-left:10px solid #b32424;background-color:#fee7e6}.mw-parser-output .ambox-delete{border-left:10px solid #b32424}.mw-parser-output .ambox-content{border-left:10px solid #f28500}.mw-parser-output .ambox-style{border-left:10px solid #fc3}.mw-parser-output .ambox-move{border-left:10px solid #9932cc}.mw-parser-output .ambox-protection{border-left:10px solid #a2a9b1}.mw-parser-output .ambox .mbox-text{border:none;padding:0.25em 0.5em;width:100%}.mw-parser-output .ambox .mbox-image{border:none;padding:2px 0 2px 0.5em;text-align:center}.mw-parser-output .ambox .mbox-imageright{border:none;padding:2px 0.5em 2px 0;text-align:center}.mw-parser-output .ambox .mbox-empty-cell{border:none;padding:0;width:1px}.mw-parser-output .ambox .mbox-image-div{width:52px}html.client-js body.skin-minerva .mw-parser-output .mbox-text-span{margin-left:23px!important}@media(min-width:720px){.mw-parser-output .ambox{margin:0 10%}}@media screen{html.skin-theme-clientpref-night .mw-parser-output .ambox{border-left-color:#36c!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-speedy,html.skin-theme-clientpref-night .mw-parser-output .ambox-delete{border-left-color:#b32424!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-speedy{background-color:#300!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-content{border-left-color:#f28500!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-style{border-left-color:#fc3!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-move{border-left-color:#9932cc!important}html.skin-theme-clientpref-night .mw-parser-output .ambox-protection{border-left-color:#a2a9b1!important}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .ambox{border-left-color:#36c!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-speedy,html.skin-theme-clientpref-os .mw-parser-output .ambox-delete{border-left-color:#b32424!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-speedy{background-color:#300!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-content{border-left-color:#f28500!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-style{border-left-color:#fc3!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-move{border-left-color:#9932cc!important}html.skin-theme-clientpref-os .mw-parser-output .ambox-protection{border-left-color:#a2a9b1!important}}</style><table class="box-Empty_section plainlinks metadata ambox mbox-small-left ambox-content" role="presentation"><tbody><tr><td class="mbox-text"><div class="mbox-text-span">此章节<b>尚無任何内容，需要<a class="external text" href="https://zh.wikipedia.org/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=">扩充</a></b>。 <small class="date-container"><i>(<span class="date">2022年11月28日</span>)</i></small></div></td></tr></tbody></table> <div class="mw-heading mw-heading3"><h3 id="火箭推进剂"><span id=".E7.81.AB.E7.AE.AD.E6.8E.A8.E8.BF.9B.E5.89.82"></span>火箭推进剂</h3><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=5" title="编辑章节：火箭推进剂" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div> <p>三氟化氯已經發展成<a href="/wiki/%E7%81%AB%E7%AE%AD%E6%8E%A8%E8%BF%9B%E5%89%82" title="火箭推进剂">火箭推進劑</a>的高性能可儲存氧化劑。然而一些處理上的問題使它受限，<span class="ilh-all" data-orig-title="約翰·D·克拉克" data-lang-code="en" data-lang-name="英语" data-foreign-title="John Drury Clark"><span class="ilh-page"><a href="/w/index.php?title=%E7%B4%84%E7%BF%B0%C2%B7D%C2%B7%E5%85%8B%E6%8B%89%E5%85%8B&action=edit&redlink=1" class="new" title="約翰·D·克拉克（页面不存在）">約翰·D·克拉克</a></span><span class="noprint ilh-comment">（<span class="ilh-lang">英语</span><span class="ilh-colon">：</span><span class="ilh-link"><a href="https://en.wikipedia.org/wiki/John_Drury_Clark" class="extiw" title="en:John Drury Clark"><span lang="en" dir="auto">John Drury Clark</span></a></span>）</span></span>在其著作《Ignition!: An informal history of liquid rocket propellants》<sup id="cite_ref-Clark_11-0" class="reference"><a href="#cite_note-Clark-11"><span class="cite-bracket">[</span>11<span class="cite-bracket">]</span></a></sup>中阐述了以下困難： </p> <table class="cquote pullquote" role="presentation" style="margin:auto; display:table; border-collapse: collapse; border: none; background-color: transparent; color: inherit;width: auto;"> <tbody><tr> <td class="skin-invert" style="width: 20px; vertical-align: top; border: none; color: #B2B7F2; font-size: 40px; font-family: 'Times New Roman', Times, serif; font-weight: bold; line-height: .6em; text-align: left; padding: 10px; text-orientation: upright">“ </td> <td style="vertical-align: top; border: none; padding: 4px 10px;">这种物质毒性自然极强，但這并不是最重要的問題，其与任何燃料相遇都會燃烧，而且這一过程发生速度是如此之快以致於測量不到點火延遲。它和衣服、木頭、測試工程師们接觸都會燃烧，一些常识中的不燃物质如石棉、砂子和水与三氟化氯接触也无一幸免，尤其和水反应會产生爆炸。它可以被存放在某些工程金屬裡——鋼、銅、鋁等，因為在界面处形成稳定氟化物薄膜隔离了金屬和三氟化氯，就像鋁表面那层不易被发觉的致密氧化鋁，保护鋁不至在空氣中变成粉末。值得注意，当這層氟化物融化或被刮伤，且无法及时再次形成时，消防员就要面對一场金屬——三氟化氯反应引发的火灾。對於应对这种事故，我一直以來都建议实验人员为自己准备一雙好跑鞋。<sup id="cite_ref-Clark_11-1" class="reference"><a href="#cite_note-Clark-11"><span class="cite-bracket">[</span>11<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-12" class="reference"><a href="#cite_note-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-13" class="reference"><a href="#cite_note-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> </td> <td class="skin-invert" style="width: 20px; vertical-align: bottom; border: none; color: #B2B7F2; font-size: 40px; font-family: 'Times New Roman', Times, serif; font-weight: bold; line-height: .6em; text-align: right; padding: 10px; text-orientation: upright">” </td></tr> </tbody></table> <div class="mw-heading mw-heading3"><h3 id="半导体工业"><span id=".E5.8D.8A.E5.AF.BC.E4.BD.93.E5.B7.A5.E4.B8.9A"></span>半导体工业</h3><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=6" title="编辑章节：半导体工业" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div> <p>在半导体工业中，三氟化氯被用于清洁<a href="/wiki/%E5%8C%96%E5%AD%A6%E6%B0%94%E7%9B%B8%E6%B2%89%E7%A7%AF" title="化学气相沉积">化学气相沉积</a>的反应舱。<sup id="cite_ref-SIcvd_14-0" class="reference"><a href="#cite_note-SIcvd-14"><span class="cite-bracket">[</span>14<span class="cite-bracket">]</span></a></sup> 它具有不需拆卸反应舱就可以清除舱壁附着的半导体物质这一优点。<sup id="cite_ref-SIcvd_14-1" class="reference"><a href="#cite_note-SIcvd-14"><span class="cite-bracket">[</span>14<span class="cite-bracket">]</span></a></sup> 与其它代替的清洁剂不同，三氟化氯在使用前不需经过等离子体激化，因为反应舱残存的热量就足以使它分解并与半导体材料反应。<sup id="cite_ref-SIcvd_14-2" class="reference"><a href="#cite_note-SIcvd-14"><span class="cite-bracket">[</span>14<span class="cite-bracket">]</span></a></sup> </p> </section><div class="mw-heading mw-heading2 section-heading" onclick="mfTempOpenSection(4)"><span class="indicator mf-icon mf-icon-expand mf-icon--small"></span><h2 id="参考资料"><span id=".E5.8F.82.E8.80.83.E8.B5.84.E6.96.99"></span>参考资料</h2><span class="mw-editsection"> <a role="button" href="/w/index.php?title=%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&action=edit&section=7" title="编辑章节：参考资料" class="cdx-button cdx-button--size-large cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--icon-only cdx-button--weight-quiet "> <span class="minerva-icon minerva-icon--edit"></span> <span>编辑</span> </a> </span> </div><section class="mf-section-4 collapsible-block" id="mf-section-4"> <div 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Über ein neues Chlorfluorid-CIF<sub>3</sub>. <a href="/w/index.php?title=Zeitschrift_f%C3%BCr_anorganische_und_allgemeine_Chemie&action=edit&redlink=1" class="new" title="Zeitschrift für anorganische und allgemeine Chemie（页面不存在）">Zeitschrift für anorganische und allgemeine Chemie</a>. 1931, <b>190</b> (1): 602–608. <a rel="nofollow" class="external text" href="https://doi.org/10.1002%2Fzaac.19301900127"><span title="數位物件識別號">doi:10.1002/zaac.19301900127</span></a>.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.atitle=%C3%9Cber+ein+neues+Chlorfluorid-CIF%3Csub%3E3%3C%2Fsub%3E&rft.au=Otto+Ruff%2C+H.+Krug&rft.date=1931&rft.genre=article&rft.issue=1&rft.jtitle=Zeitschrift+f%C3%BCr+anorganische+und+allgemeine+Chemie&rft.pages=602-608&rft.volume=190&rft_id=info%3Adoi%2F10.1002%2Fzaac.19301900127&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-Smith_1953_pp._609–614-7"><span class="mw-cite-backlink"><b><a href="#cite_ref-Smith_1953_pp._609%E2%80%93614_7-0">^</a></b></span> <span class="reference-text"><cite class="citation journal">Smith, D. F. <a rel="nofollow" class="external text" href="https://archive.org/details/sim_journal-of-chemical-physics_1953-04_21_4/page/609">The Microwave Spectrum and Structure of Chlorine Trifluoride</a>. The Journal of Chemical Physics (AIP Publishing). 1953, <b>21</b> (4): 609–614. <a rel="nofollow" class="external text" href="//www.worldcat.org/issn/0021-9606"><span title="国际标准连续出版物号">ISSN 0021-9606</span></a>. <a rel="nofollow" class="external text" href="https://doi.org/10.1063%2F1.1698976"><span title="數位物件識別號">doi:10.1063/1.1698976</span></a>.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.atitle=The+Microwave+Spectrum+and+Structure+of+Chlorine+Trifluoride&rft.aufirst=D.+F.&rft.aulast=Smith&rft.date=1953&rft.genre=article&rft.issn=0021-9606&rft.issue=4&rft.jtitle=The+Journal+of+Chemical+Physics&rft.pages=609-614&rft.volume=21&rft_id=https%3A%2F%2Farchive.org%2Fdetails%2Fsim_journal-of-chemical-physics_1953-04_21_4%2Fpage%2F609&rft_id=info%3Adoi%2F10.1063%2F1.1698976&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-8"><span class="mw-cite-backlink"><b><a href="#cite_ref-8">^</a></b></span> <span class="reference-text">Air Products Safetygram. <cite class="citation web"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20060318221608/http://www.airproducts.com/nr/rdonlyres/8479ed55-2170-4651-a3d4-223b2957a9f3/0/safetygram39.pdf">存档副本</a> <span style="font-size:85%;">(PDF)</span>. <span class="reference-accessdate"> [<span class="nowrap">2014-02-16</span>]</span>. （<a rel="nofollow" class="external text" href="http://www.airproducts.com/nr/rdonlyres/8479ed55-2170-4651-a3d4-223b2957a9f3/0/safetygram39.pdf">原始内容</a> <span style="font-size:85%;">(PDF)</span>存档于2006-03-18）.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.btitle=%E5%AD%98%E6%A1%A3%E5%89%AF%E6%9C%AC&rft.genre=unknown&rft_id=http%3A%2F%2Fwww.airproducts.com%2Fnr%2Frdonlyres%2F8479ed55-2170-4651-a3d4-223b2957a9f3%2F0%2Fsafetygram39.pdf&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-9"><span class="mw-cite-backlink"><b><a href="#cite_ref-9">^</a></b></span> <span class="reference-text"><cite class="citation web"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20130408133311/http://www.dtic.mil/cgi-bin/GetTRDoc?AD=AD0266121">Chlorine Trifluoride Handling Manual</a>. Canoga Park, CA: Rocketdyne: 24. September 1961 <span class="reference-accessdate"> [<span class="nowrap">2012-09-19</span>]</span>. （<a rel="nofollow" class="external text" href="http://www.dtic.mil/cgi-bin/GetTRDoc?AD=AD0266121">原始内容</a>存档于2013-04-08）.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.btitle=Chlorine+Trifluoride+Handling+Manual&rft.date=1961-09&rft.genre=unknown&rft.pages=24&rft.place=Canoga+Park%2C+CA&rft.pub=Rocketdyne&rft_id=http%3A%2F%2Fwww.dtic.mil%2Fcgi-bin%2FGetTRDoc%3FAD%3DAD0266121&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-10"><span class="mw-cite-backlink"><b><a href="#cite_ref-10">^</a></b></span> <span class="reference-text"><cite class="citation book">Patnaik, Pradyot. A comprehensive guide to the hazardous properties of chemical substances 3rd. Wiley-Interscience. 2007: 478. <a href="/wiki/Special:%E7%BD%91%E7%BB%9C%E4%B9%A6%E6%BA%90/978-0-471-71458-3" title="Special:网络书源/978-0-471-71458-3"><span title="国际标准书号">ISBN</span> 978-0-471-71458-3</a>.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.au=Patnaik%2C+Pradyot&rft.btitle=A+comprehensive+guide+to+the+hazardous+properties+of+chemical+substances&rft.date=2007&rft.edition=3rd&rft.genre=book&rft.isbn=978-0-471-71458-3&rft.pages=478&rft.pub=Wiley-Interscience&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-Clark-11"><span class="mw-cite-backlink">^ <a href="#cite_ref-Clark_11-0"><sup><b>11.0</b></sup></a> <a href="#cite_ref-Clark_11-1"><sup><b>11.1</b></sup></a></span> <span class="reference-text"><cite class="citation book">Clark, John D. Ignition!. UMI Books on Demand. 2001. <a href="/wiki/Special:%E7%BD%91%E7%BB%9C%E4%B9%A6%E6%BA%90/0-8135-0725-1" title="Special:网络书源/0-8135-0725-1"><span title="国际标准书号">ISBN</span> 0-8135-0725-1</a>.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.au=Clark%2C+John+D.&rft.btitle=Ignition%21&rft.date=2001&rft.genre=book&rft.isbn=0-8135-0725-1&rft.pub=UMI+Books+on+Demand&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-12"><span class="mw-cite-backlink"><b><a href="#cite_ref-12">^</a></b></span> <span class="reference-text"><a rel="nofollow" class="external text" href="http://www.astronautix.com/props/clfazine.htm">ClF3/Hydrazine</a> <a href="/wiki/Wayback_Machine" class="mw-redirect" title="Wayback Machine">互联网档案馆</a>的<a rel="nofollow" class="external text" href="https://web.archive.org/web/20070202072122/http://astronautix.com/props/clfazine.htm">存檔</a>，存档日期2007-02-02. at the Encyclopedia Astronautica.</span> </li> <li id="cite_note-13"><span class="mw-cite-backlink"><b><a href="#cite_ref-13">^</a></b></span> <span class="reference-text"><cite class="citation book"><a href="/w/index.php?title=John_D._Clark&action=edit&redlink=1" class="new" title="John D. Clark（页面不存在）">Clark, John D.</a> <a rel="nofollow" class="external text" href="https://archive.org/details/ignitioninformal00clar">Ignition! An Informal History of Liquid Rocket Propellants</a>. Rutgers University Press. 1972: <a rel="nofollow" class="external text" href="https://archive.org/details/ignitioninformal00clar/page/n115">214</a>. <a href="/wiki/Special:%E7%BD%91%E7%BB%9C%E4%B9%A6%E6%BA%90/0813507251" title="Special:网络书源/0813507251"><span title="国际标准书号">ISBN</span> 0813507251</a>.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.aufirst=John+D.&rft.aulast=Clark&rft.btitle=Ignition%21+An+Informal+History+of+Liquid+Rocket+Propellants&rft.date=1972&rft.genre=book&rft.isbn=0813507251&rft.pages=214&rft.pub=Rutgers+University+Press&rft_id=https%3A%2F%2Farchive.org%2Fdetails%2Fignitioninformal00clar&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook" class="Z3988"><span style="display:none;"> </span></span></span> </li> <li id="cite_note-SIcvd-14"><span class="mw-cite-backlink">^ <a href="#cite_ref-SIcvd_14-0"><sup><b>14.0</b></sup></a> <a href="#cite_ref-SIcvd_14-1"><sup><b>14.1</b></sup></a> <a href="#cite_ref-SIcvd_14-2"><sup><b>14.2</b></sup></a></span> <span class="reference-text"><cite class="citation news"><a rel="nofollow" class="external text" href="http://www.semiconductor.net/article/209105-In_Situ_Cleaning_of_CVD_Chambers.php">In Situ Cleaning of CVD Chambers</a>. Semiconductor International. 1999-01-06.</cite><span title="ctx_ver=Z39.88-2004&rfr_id=info%3Asid%2Fzh.wikipedia.org%3A%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF&rft.atitle=In+Situ+Cleaning+of+CVD+Chambers&rft.date=1999-01-06&rft.genre=article&rft.jtitle=Semiconductor+International&rft_id=http%3A%2F%2Fwww.semiconductor.net%2Farticle%2F209105-In_Situ_Cleaning_of_CVD_Chambers.php&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal" class="Z3988"><span style="display:none;"> </span></span><sup class="noprint Inline-Template"><span style="white-space: nowrap;">[<a href="/wiki/Wikipedia:%E5%A4%B1%E6%95%88%E9%93%BE%E6%8E%A5" title="Wikipedia:失效链接"><span title="自2017年11月失效">永久失效連結</span></a>]</span></sup></span> </li> </ol></div> <div class="navbox-styles"><style data-mw-deduplicate="TemplateStyles:r84265675">.mw-parser-output .hlist dl,.mw-parser-output .hlist ol,.mw-parser-output .hlist ul{margin:0;padding:0}.mw-parser-output .hlist dd,.mw-parser-output .hlist dt,.mw-parser-output .hlist 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hreflang="zh-Hans-MY"><span>大马简体</span></a></li><li id="ca-varlang-7" class="ca-variants-zh-Hans-SG mw-list-item"><a href="/zh-sg/%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF" lang="zh-Hans-SG" hreflang="zh-Hans-SG"><span>新加坡简体</span></a></li><li id="ca-varlang-8" class="ca-variants-zh-Hant-TW mw-list-item"><a href="/zh-tw/%E4%B8%89%E6%B0%9F%E5%8C%96%E6%B0%AF" lang="zh-Hant-TW" hreflang="zh-Hant-TW"><span>臺灣正體</span></a></li></ul> <ul class="minerva-languages"><li class="interlanguage-link interwiki-ar mw-list-item"><a href="https://ar.wikipedia.org/wiki/%D8%AB%D9%84%D8%A7%D8%AB%D9%8A_%D9%81%D9%84%D9%88%D8%B1%D9%8A%D8%AF_%D8%A7%D9%84%D9%83%D9%84%D9%88%D8%B1" title="ثلاثي فلوريد الكلور – 阿拉伯语" lang="ar" hreflang="ar" data-title="ثلاثي فلوريد الكلور" data-language-autonym="العربية" data-language-local-name="阿拉伯语" class="interlanguage-link-target"><span>العربية</span></a></li><li class="interlanguage-link interwiki-azb mw-list-item"><a href="https://azb.wikipedia.org/wiki/%D8%AA%D8%B1%DB%8C%E2%80%8C%D9%81%D9%84%D9%88%D8%B1%DB%8C%D8%AF_%DA%A9%D9%88%D9%84%D9%88%D8%B1" title="تری‌فلورید کولور – South Azerbaijani" lang="azb" hreflang="azb" data-title="تری‌فلورید کولور" data-language-autonym="تۆرکجه" data-language-local-name="South Azerbaijani" class="interlanguage-link-target"><span>تۆرکجه</span></a></li><li class="interlanguage-link interwiki-ca mw-list-item"><a href="https://ca.wikipedia.org/wiki/Trifluorur_de_clor" title="Trifluorur de clor – 加泰罗尼亚语" lang="ca" hreflang="ca" data-title="Trifluorur de clor" data-language-autonym="Català" data-language-local-name="加泰罗尼亚语" class="interlanguage-link-target"><span>Català</span></a></li><li class="interlanguage-link interwiki-cs mw-list-item"><a href="https://cs.wikipedia.org/wiki/Fluorid_chlorit%C3%BD" title="Fluorid chloritý – 捷克语" lang="cs" hreflang="cs" data-title="Fluorid chloritý" data-language-autonym="Čeština" data-language-local-name="捷克语" class="interlanguage-link-target"><span>Čeština</span></a></li><li class="interlanguage-link interwiki-da mw-list-item"><a href="https://da.wikipedia.org/wiki/Klortrifluorid" title="Klortrifluorid – 丹麦语" lang="da" hreflang="da" data-title="Klortrifluorid" data-language-autonym="Dansk" data-language-local-name="丹麦语" class="interlanguage-link-target"><span>Dansk</span></a></li><li class="interlanguage-link interwiki-de mw-list-item"><a href="https://de.wikipedia.org/wiki/Chlortrifluorid" title="Chlortrifluorid – 德语" lang="de" hreflang="de" data-title="Chlortrifluorid" data-language-autonym="Deutsch" data-language-local-name="德语" class="interlanguage-link-target"><span>Deutsch</span></a></li><li class="interlanguage-link interwiki-el mw-list-item"><a href="https://el.wikipedia.org/wiki/%CE%A4%CF%81%CE%B9%CF%86%CE%B8%CE%BF%CF%81%CE%B9%CE%BF%CF%8D%CF%87%CE%BF_%CF%87%CE%BB%CF%8E%CF%81%CE%B9%CE%BF" title="Τριφθοριούχο χλώριο – 希腊语" lang="el" hreflang="el" data-title="Τριφθοριούχο χλώριο" data-language-autonym="Ελληνικά" data-language-local-name="希腊语" class="interlanguage-link-target"><span>Ελληνικά</span></a></li><li class="interlanguage-link interwiki-en mw-list-item"><a href="https://en.wikipedia.org/wiki/Chlorine_trifluoride" title="Chlorine trifluoride – 英语" lang="en" hreflang="en" data-title="Chlorine trifluoride" data-language-autonym="English" data-language-local-name="英语" class="interlanguage-link-target"><span>English</span></a></li><li class="interlanguage-link interwiki-es mw-list-item"><a href="https://es.wikipedia.org/wiki/Trifluoruro_de_cloro" title="Trifluoruro de cloro – 西班牙语" lang="es" hreflang="es" data-title="Trifluoruro de cloro" data-language-autonym="Español" data-language-local-name="西班牙语" class="interlanguage-link-target"><span>Español</span></a></li><li class="interlanguage-link interwiki-fa mw-list-item"><a href="https://fa.wikipedia.org/wiki/%D8%AA%D8%B1%DB%8C%E2%80%8C%D9%81%D9%84%D9%88%D8%B1%DB%8C%D8%AF_%DA%A9%D9%84%D8%B1" title="تری‌فلورید کلر – 波斯语" lang="fa" hreflang="fa" data-title="تری‌فلورید کلر" data-language-autonym="فارسی" data-language-local-name="波斯语" class="interlanguage-link-target"><span>فارسی</span></a></li><li class="interlanguage-link interwiki-fi mw-list-item"><a href="https://fi.wikipedia.org/wiki/Klooritrifluoridi" title="Klooritrifluoridi – 芬兰语" lang="fi" hreflang="fi" data-title="Klooritrifluoridi" data-language-autonym="Suomi" data-language-local-name="芬兰语" class="interlanguage-link-target"><span>Suomi</span></a></li><li class="interlanguage-link interwiki-fr mw-list-item"><a href="https://fr.wikipedia.org/wiki/Trifluorure_de_chlore" title="Trifluorure de chlore – 法语" lang="fr" hreflang="fr" data-title="Trifluorure de chlore" data-language-autonym="Français" data-language-local-name="法语" class="interlanguage-link-target"><span>Français</span></a></li><li class="interlanguage-link interwiki-ga mw-list-item"><a href="https://ga.wikipedia.org/wiki/Tr%C3%ADfhluair%C3%ADd_chl%C3%B3ir%C3%ADn" title="Trífhluairíd chlóirín – 爱尔兰语" lang="ga" hreflang="ga" data-title="Trífhluairíd chlóirín" data-language-autonym="Gaeilge" data-language-local-name="爱尔兰语" class="interlanguage-link-target"><span>Gaeilge</span></a></li><li class="interlanguage-link interwiki-hu mw-list-item"><a href="https://hu.wikipedia.org/wiki/Kl%C3%B3r-trifluorid" title="Klór-trifluorid – 匈牙利语" lang="hu" hreflang="hu" data-title="Klór-trifluorid" data-language-autonym="Magyar" data-language-local-name="匈牙利语" class="interlanguage-link-target"><span>Magyar</span></a></li><li class="interlanguage-link interwiki-id mw-list-item"><a href="https://id.wikipedia.org/wiki/Klorin_trifluorida" title="Klorin trifluorida – 印度尼西亚语" lang="id" hreflang="id" data-title="Klorin trifluorida" data-language-autonym="Bahasa Indonesia" data-language-local-name="印度尼西亚语" class="interlanguage-link-target"><span>Bahasa Indonesia</span></a></li><li class="interlanguage-link interwiki-it mw-list-item"><a href="https://it.wikipedia.org/wiki/Trifluoruro_di_cloro" title="Trifluoruro di cloro – 意大利语" lang="it" hreflang="it" data-title="Trifluoruro di cloro" data-language-autonym="Italiano" data-language-local-name="意大利语" class="interlanguage-link-target"><span>Italiano</span></a></li><li class="interlanguage-link interwiki-ja mw-list-item"><a href="https://ja.wikipedia.org/wiki/%E4%B8%89%E3%83%95%E3%83%83%E5%8C%96%E5%A1%A9%E7%B4%A0" title="三フッ化塩素 – 日语" lang="ja" hreflang="ja" data-title="三フッ化塩素" data-language-autonym="日本語" data-language-local-name="日语" class="interlanguage-link-target"><span>日本語</span></a></li><li class="interlanguage-link interwiki-ko mw-list-item"><a href="https://ko.wikipedia.org/wiki/%EC%82%BC%ED%94%8C%EB%A3%A8%EC%98%A4%EB%A6%B0%ED%99%94_%EC%97%BC%EC%86%8C" title="삼플루오린화 염소 – 韩语" lang="ko" hreflang="ko" data-title="삼플루오린화 염소" data-language-autonym="한국어" data-language-local-name="韩语" class="interlanguage-link-target"><span>한국어</span></a></li><li class="interlanguage-link interwiki-nl mw-list-item"><a href="https://nl.wikipedia.org/wiki/Chloortrifluoride" title="Chloortrifluoride – 荷兰语" lang="nl" hreflang="nl" data-title="Chloortrifluoride" data-language-autonym="Nederlands" data-language-local-name="荷兰语" class="interlanguage-link-target"><span>Nederlands</span></a></li><li class="interlanguage-link interwiki-pl mw-list-item"><a href="https://pl.wikipedia.org/wiki/Trifluorek_chloru" title="Trifluorek chloru – 波兰语" lang="pl" hreflang="pl" data-title="Trifluorek chloru" data-language-autonym="Polski" data-language-local-name="波兰语" class="interlanguage-link-target"><span>Polski</span></a></li><li class="interlanguage-link interwiki-pt mw-list-item"><a href="https://pt.wikipedia.org/wiki/Trifluoreto_de_cloro" title="Trifluoreto de cloro – 葡萄牙语" lang="pt" hreflang="pt" data-title="Trifluoreto de cloro" data-language-autonym="Português" data-language-local-name="葡萄牙语" class="interlanguage-link-target"><span>Português</span></a></li><li class="interlanguage-link interwiki-ro mw-list-item"><a href="https://ro.wikipedia.org/wiki/Trifluorur%C4%83_de_clor" title="Trifluorură de clor – 罗马尼亚语" lang="ro" hreflang="ro" data-title="Trifluorură de clor" data-language-autonym="Română" data-language-local-name="罗马尼亚语" class="interlanguage-link-target"><span>Română</span></a></li><li class="interlanguage-link interwiki-ru mw-list-item"><a href="https://ru.wikipedia.org/wiki/%D0%A4%D1%82%D0%BE%D1%80%D0%B8%D0%B4_%D1%85%D0%BB%D0%BE%D1%80%D0%B0(III)" title="Фторид хлора(III) – 俄语" lang="ru" hreflang="ru" data-title="Фторид хлора(III)" data-language-autonym="Русский" data-language-local-name="俄语" class="interlanguage-link-target"><span>Русский</span></a></li><li class="interlanguage-link interwiki-sh mw-list-item"><a href="https://sh.wikipedia.org/wiki/Hlor_trifluorid" title="Hlor trifluorid – 塞尔维亚-克罗地亚语" lang="sh" hreflang="sh" data-title="Hlor trifluorid" data-language-autonym="Srpskohrvatski / српскохрватски" data-language-local-name="塞尔维亚-克罗地亚语" class="interlanguage-link-target"><span>Srpskohrvatski / српскохрватски</span></a></li><li class="interlanguage-link interwiki-simple mw-list-item"><a href="https://simple.wikipedia.org/wiki/Chlorine_trifluoride" title="Chlorine trifluoride – Simple English" lang="en-simple" hreflang="en-simple" data-title="Chlorine trifluoride" data-language-autonym="Simple English" data-language-local-name="Simple English" class="interlanguage-link-target"><span>Simple English</span></a></li><li class="interlanguage-link interwiki-sr mw-list-item"><a href="https://sr.wikipedia.org/wiki/Hlor_trifluorid" title="Hlor trifluorid – 塞尔维亚语" lang="sr" hreflang="sr" data-title="Hlor trifluorid" data-language-autonym="Српски / srpski" data-language-local-name="塞尔维亚语" class="interlanguage-link-target"><span>Српски / srpski</span></a></li><li class="interlanguage-link interwiki-sv mw-list-item"><a href="https://sv.wikipedia.org/wiki/Klortrifluorid" title="Klortrifluorid – 瑞典语" lang="sv" hreflang="sv" data-title="Klortrifluorid" data-language-autonym="Svenska" data-language-local-name="瑞典语" class="interlanguage-link-target"><span>Svenska</span></a></li><li class="interlanguage-link interwiki-tr mw-list-item"><a href="https://tr.wikipedia.org/wiki/Klor_triflor%C3%BCr" title="Klor triflorür – 土耳其语" lang="tr" hreflang="tr" data-title="Klor triflorür" data-language-autonym="Türkçe" data-language-local-name="土耳其语" class="interlanguage-link-target"><span>Türkçe</span></a></li><li class="interlanguage-link interwiki-vi mw-list-item"><a href="https://vi.wikipedia.org/wiki/Chlor_trifluoride" title="Chlor trifluoride – 越南语" lang="vi" hreflang="vi" data-title="Chlor trifluoride" data-language-autonym="Tiếng Việt" data-language-local-name="越南语" class="interlanguage-link-target"><span>Tiếng Việt</span></a></li></ul> </section> </div> <div class="minerva-footer-logo"><img 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