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Farzan</title> <meta name="description" content="Search results for: Ali Farzan"> <meta name="keywords" content="Ali Farzan"> <meta name="viewport" content="width=device-width, initial-scale=1, minimum-scale=1, maximum-scale=1, user-scalable=no"> <meta charset="utf-8"> <link href="https://cdn.waset.org/favicon.ico" type="image/x-icon" rel="shortcut icon"> <link href="https://cdn.waset.org/static/plugins/bootstrap-4.2.1/css/bootstrap.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/plugins/fontawesome/css/all.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/css/site.css?v=150220211555" rel="stylesheet"> </head> <body> <header> <div class="container"> <nav class="navbar navbar-expand-lg navbar-light"> <a class="navbar-brand" href="https://waset.org"> <img src="https://cdn.waset.org/static/images/wasetc.png" alt="Open Science Research Excellence" title="Open Science Research Excellence" /> </a> <button class="d-block d-lg-none navbar-toggler ml-auto" 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id="custom-search-input"> <div class="input-group"> <i class="fas fa-search"></i> <input type="text" class="search-query" name="q" placeholder="Author, Title, Abstract, Keywords" value="Ali Farzan"> <input type="submit" class="btn_search" value="Search"> </div> </div> </form> </div> </div> <div class="row mt-3"> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Commenced</strong> in January 2007</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Frequency:</strong> Monthly</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Edition:</strong> International</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Paper Count:</strong> 9</div> </div> </div> </div> <h1 class="mt-3 mb-3 text-center" style="font-size:1.6rem;">Search results for: Ali Farzan</h1> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">9</span> A Novel PSO Based Decision Tree Classification</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Ali%20Farzan">Ali Farzan</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Classification of data objects or patterns is a major part in most of Decision making systems. One of the popular and commonly used classification methods is Decision Tree (DT). It is a hierarchical decision making system by which a binary tree is constructed and starting from root, at each node some of the classes is rejected until reaching the leaf nods. Each leaf node is a representative of one specific class. Finding the splitting criteria in each node for constructing or training the tree is a major problem. Particle Swarm Optimization (PSO) has been adopted as a metaheuristic searching method for finding the best splitting criteria. Result of evaluating the proposed method over benchmark datasets indicates the higher accuracy of the new PSO based decision tree. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=decision%20tree" title="decision tree">decision tree</a>, <a href="https://publications.waset.org/abstracts/search?q=particle%20swarm%20optimization" title=" particle swarm optimization"> particle swarm optimization</a>, <a href="https://publications.waset.org/abstracts/search?q=splitting%20criteria" title=" splitting criteria"> splitting criteria</a>, <a href="https://publications.waset.org/abstracts/search?q=metaheuristic" title=" metaheuristic"> metaheuristic</a> </p> <a href="https://publications.waset.org/abstracts/32425/a-novel-pso-based-decision-tree-classification" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/32425.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">406</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">8</span> The Effects of Globalization on the Foreign Policy of the Islamic Republic of Iran in the 21st Century</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Pouriya%20Angosht%20Baft">Pouriya Angosht Baft</a>, <a href="https://publications.waset.org/abstracts/search?q=Farzan%20Safari%20Sabet"> Farzan Safari Sabet</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Globalization should be considered as a process that has affected all areas of human activity, including the foreign policy of countries. The phenomenon of globalization has created tremendous changes in the economic, political and cultural fields. Obviously, no country can keep itself away from the new global consequences and globalization process. Dealing with the world requires formulating a realistic and intelligent foreign policy. By examining the phenomenon of globalization and its impact on foreign policy, this article aims to provide solutions for formulating a more active and effective foreign policy. The conclusion of this research is that Iran's foreign policy has gradually moved towards more realism and maintaining and strengthening national interests in the changing world has been the focus of foreign policy makers and decision makers. Strengthening the course of more realism in the future should be at the center of formulating Iran's foreign policy. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=globalization" title="globalization">globalization</a>, <a href="https://publications.waset.org/abstracts/search?q=foreign%20policy" title=" foreign policy"> foreign policy</a>, <a href="https://publications.waset.org/abstracts/search?q=international%20relations" title=" international relations"> international relations</a>, <a href="https://publications.waset.org/abstracts/search?q=realism" title=" realism"> realism</a>, <a href="https://publications.waset.org/abstracts/search?q=iran" title=" iran"> iran</a> </p> <a href="https://publications.waset.org/abstracts/185285/the-effects-of-globalization-on-the-foreign-policy-of-the-islamic-republic-of-iran-in-the-21st-century" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/185285.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">54</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">7</span> Impact of Risk Management Practices on Company Performance</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Syed%20Atif%20Ali">Syed Atif Ali</a>, <a href="https://publications.waset.org/abstracts/search?q=Farzan%20Yahya"> Farzan Yahya</a> </p> <p class="card-text"><strong>Abstract:</strong></p> This research paper covers the issue of risk management impact on the company performance. Degree of financial leverage (DFL), degree of operating leverage (DOL) and the working capital ratio (WCR) are taken as independent variables which are the representative of risk and the earning price per share (EPS), return on assets (ROA), return on equity (ROE), Sales and Net profits which are the representative of performance. Last 10 years (2004-2013) of Cement sector of Pakistan data is chosen as sample for analyze their relations by multiple regression technique. Through analyses, it is found that WCR impact adequately on the company performance because if company has enough liquidity than it perform its operations smoothly and enhance its performance very well. DFL should be control moderately because enough DFL leads performance of company downward. On the other hand, the DOL should be less because it causes the less profitability for a company from its operations. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=degree%20of%20financial%20leverage%20%28DFL%29" title="degree of financial leverage (DFL)">degree of financial leverage (DFL)</a>, <a href="https://publications.waset.org/abstracts/search?q=degree%20of%20operating%20leverage%20%28DOL%29" title=" degree of operating leverage (DOL)"> degree of operating leverage (DOL)</a>, <a href="https://publications.waset.org/abstracts/search?q=working%20capital%20ratio%20%28WCR%29" title=" working capital ratio (WCR)"> working capital ratio (WCR)</a>, <a href="https://publications.waset.org/abstracts/search?q=earning%20per%20share%20%28EPS%29" title=" earning per share (EPS)"> earning per share (EPS)</a>, <a href="https://publications.waset.org/abstracts/search?q=return%20on%20equity%20%28ROE%29" title=" return on equity (ROE)"> return on equity (ROE)</a>, <a href="https://publications.waset.org/abstracts/search?q=return%20on%20assets%20%28ROA%29" title=" return on assets (ROA)"> return on assets (ROA)</a> </p> <a href="https://publications.waset.org/abstracts/33906/impact-of-risk-management-practices-on-company-performance" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/33906.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">453</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">6</span> Disaggregating and Forecasting the Total Energy Consumption of a Building: A Case Study of a High Cooling Demand Facility</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Juliana%20Barcelos%20Cordeiro">Juliana Barcelos Cordeiro</a>, <a href="https://publications.waset.org/abstracts/search?q=Khashayar%20Mahani"> Khashayar Mahani</a>, <a href="https://publications.waset.org/abstracts/search?q=Farbod%20Farzan"> Farbod Farzan</a>, <a href="https://publications.waset.org/abstracts/search?q=Mohsen%20A.%20Jafari"> Mohsen A. Jafari </a> </p> <p class="card-text"><strong>Abstract:</strong></p> Energy disaggregation has been focused by many energy companies since energy efficiency can be achieved when the breakdown of energy consumption is known. Companies have been investing in technologies to come up with software and/or hardware solutions that can provide this type of information to the consumer. On the other hand, not all people can afford to have these technologies. Therefore, in this paper, we present a methodology for breaking down the aggregate consumption and identifying the highdemanding end-uses profiles. These energy profiles will be used to build the forecast model for optimal control purpose. A facility with high cooling load is used as an illustrative case study to demonstrate the results of proposed methodology. We apply a high level energy disaggregation through a pattern recognition approach in order to extract the consumption profile of its rooftop packaged units (RTUs) and present a forecast model for the energy consumption.   <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=energy%20consumption%20forecasting" title="energy consumption forecasting">energy consumption forecasting</a>, <a href="https://publications.waset.org/abstracts/search?q=energy%20efficiency" title=" energy efficiency"> energy efficiency</a>, <a href="https://publications.waset.org/abstracts/search?q=load%20disaggregation" title=" load disaggregation"> load disaggregation</a>, <a href="https://publications.waset.org/abstracts/search?q=pattern%20recognition%20approach" title=" pattern recognition approach"> pattern recognition approach</a> </p> <a href="https://publications.waset.org/abstracts/44047/disaggregating-and-forecasting-the-total-energy-consumption-of-a-building-a-case-study-of-a-high-cooling-demand-facility" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/44047.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">278</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">5</span> Clinical Outcomes and Surgical Complications in Patients with Cervical Disk Degeneration</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Mirzashahi%20Babak">Mirzashahi Babak</a>, <a href="https://publications.waset.org/abstracts/search?q=Mansouri%20Pejman"> Mansouri Pejman</a>, <a href="https://publications.waset.org/abstracts/search?q=Najafi%20Arvin"> Najafi Arvin</a>, <a href="https://publications.waset.org/abstracts/search?q=Farzan%20Mahmoud"> Farzan Mahmoud</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Introduction: There are several surgical treatment choices for cervical spondylotic myelopathy (CSM). The aim of this study is to evaluate clinical outcomes and surgical complications in patients with cervical disk degeneration (CDD) undergoing either anterior cervical discectomy with or without fusion or cervical laminectomy and fusion. Methods: This prospective case series study included 45 consecutive patients with cervical spondylotic myelopathy between January 2010 and November 2014. There were 28 males and 17 females, with a mean age of 47 (range 37-68) years. The mean clinical follow-up was 14 months (range 3-24 months). The Neck Disability Index (NDI), visual analog scale (VAS) neck and arm pain, Short Form-36 (SF-36) were used as the functional outcome measurements. All of the complications in our patients were recorded. Results: In our study group, 26 patients underwent only one or two level anterior cervical discectomy. Ten patients underwent anterior cervical discectomy and fusion (ACDF) and nine cases underwent posterior laminectomy and fusion. We have found a statistically significant improvement between mean preoperative (29, range 19-43) and postoperative (7, range 0-12) NDI scores following surgery (P < 0.05). Also, there was a statistically significant difference between pre and post-operative VAS and SF-36 score (p < 0.05). There was a 7% overall complication rate (n = 3). The only complication in our patients was surgical site cellulitis which has been managed with oral antibiotic therapy. Conclusion: Both anterior cervical discectomy with or without fusion or posterior laminectomy and fusion are safe and efficacious treatment options for the management of CSM. The clinical outcomes seem to be fairly reproducible. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=cervical" title="cervical">cervical</a>, <a href="https://publications.waset.org/abstracts/search?q=myelopathy" title=" myelopathy"> myelopathy</a>, <a href="https://publications.waset.org/abstracts/search?q=discectomy" title=" discectomy"> discectomy</a>, <a href="https://publications.waset.org/abstracts/search?q=fusion" title=" fusion"> fusion</a>, <a href="https://publications.waset.org/abstracts/search?q=laminectomy" title=" laminectomy"> laminectomy</a> </p> <a href="https://publications.waset.org/abstracts/37427/clinical-outcomes-and-surgical-complications-in-patients-with-cervical-disk-degeneration" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/37427.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">350</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">4</span> Software-Defined Architecture and Front-End Optimization for DO-178B Compliant Distance Measuring Equipment</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Farzan%20Farhangian">Farzan Farhangian</a>, <a href="https://publications.waset.org/abstracts/search?q=Behnam%20Shakibafar"> Behnam Shakibafar</a>, <a href="https://publications.waset.org/abstracts/search?q=Bobda%20Cedric"> Bobda Cedric</a>, <a href="https://publications.waset.org/abstracts/search?q=Rene%20Jr.%20Landry"> Rene Jr. Landry</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Among the air navigation technologies, many of them are capable of increasing aviation sustainability as well as accuracy improvement in Alternative Positioning, Navigation, and Timing (APNT), especially avionics Distance Measuring Equipment (DME), Very high-frequency Omni-directional Range (VOR), etc. The integration of these air navigation solutions could make a robust and efficient accuracy in air mobility, air traffic management and autonomous operations. Designing a proper RF front-end, power amplifier and software-defined transponder could pave the way for reaching an optimized avionics navigation solution. In this article, the possibility of reaching an optimum front-end to be used with single low-cost Software-Defined Radio (SDR) has been investigated in order to reach a software-defined DME architecture. Our software-defined approach uses the firmware possibilities to design a real-time software architecture compatible with a Multi Input Multi Output (MIMO) BladeRF to estimate an accurate time delay between a Transmission (Tx) and the reception (Rx) channels using the synchronous scheduled communication. We could design a novel power amplifier for the transmission channel of the DME to pass the minimum transmission power. This article also investigates designing proper pair pulses based on the DO-178B avionics standard. Various guidelines have been tested, and the possibility of passing the certification process for each standard term has been analyzed. Finally, the performance of the DME was tested in the laboratory environment using an IFR6000, which showed that the proposed architecture reached an accuracy of less than 0.23 Nautical mile (Nmi) with 98% probability. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=avionics" title="avionics">avionics</a>, <a href="https://publications.waset.org/abstracts/search?q=DME" title=" DME"> DME</a>, <a href="https://publications.waset.org/abstracts/search?q=software%20defined%20radio" title=" software defined radio"> software defined radio</a>, <a href="https://publications.waset.org/abstracts/search?q=navigation" title=" navigation"> navigation</a> </p> <a href="https://publications.waset.org/abstracts/163144/software-defined-architecture-and-front-end-optimization-for-do-178b-compliant-distance-measuring-equipment" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/163144.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">79</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">3</span> A Coupled Stiffened Skin-Rib Fully Gradient Based Optimization Approach for a Wing Box Made of Blended Composite Materials</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=F.%20Farzan%20Nasab">F. Farzan Nasab</a>, <a href="https://publications.waset.org/abstracts/search?q=H.%20J.%20M.%20%20Geijselaers"> H. J. M. Geijselaers</a>, <a href="https://publications.waset.org/abstracts/search?q=I.%20Baran"> I. Baran</a>, <a href="https://publications.waset.org/abstracts/search?q=A.%20De%20Boer"> A. De Boer</a> </p> <p class="card-text"><strong>Abstract:</strong></p> A method is introduced for the coupled skin-rib optimization of a wing box where mass minimization is the objective and local buckling is the constraint. The structure is made of composite materials where continuity of plies in multiple adjacent panels (blending) has to be satisfied. Blending guarantees the manufacturability of the structure; however, it is a highly challenging constraint to treat and has been under debate in recent research in the same area. To fulfill design guidelines with respect to symmetry, balance, contiguity, disorientation and percentage rule of the layup, a reference for the stacking sequences (stacking sequence table or SST) is generated first. Then, an innovative fully gradient-based optimization approach in relation to a specific SST is introduced to obtain the optimum thickness distribution all over the structure while blending is fulfilled. The proposed optimization approach aims to turn the discrete optimization problem associated with the integer number of plies into a continuous one. As a result of a wing box deflection, a rib is subjected to load values which vary nonlinearly with the amount of deflection. The bending stiffness of a skin affects the wing box deflection and thus affects the load applied to a rib. This indicates the necessity of a coupled skin-rib optimization approach for a more realistic optimized design. The proposed method is examined with the optimization of the layup of a composite stiffened skin and rib of a wing torsion box subjected to in-plane normal and shear loads. Results show that the method can successfully prescribe a valid design with a significantly cheap computation cost. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=blending" title="blending">blending</a>, <a href="https://publications.waset.org/abstracts/search?q=buckling%20optimization" title=" buckling optimization"> buckling optimization</a>, <a href="https://publications.waset.org/abstracts/search?q=composite%20panels" title=" composite panels"> composite panels</a>, <a href="https://publications.waset.org/abstracts/search?q=wing%20torsion%20box" title=" wing torsion box"> wing torsion box</a> </p> <a href="https://publications.waset.org/abstracts/68057/a-coupled-stiffened-skin-rib-fully-gradient-based-optimization-approach-for-a-wing-box-made-of-blended-composite-materials" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/68057.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">409</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">2</span> A Modified Open Posterior Approach for the Fixation of Posterior Cruciate Ligament Tibial Avulsion Fractures</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Babak%20Mirzashahi">Babak Mirzashahi</a>, <a href="https://publications.waset.org/abstracts/search?q=Arvin%20Najafi"> Arvin Najafi</a>, <a href="https://publications.waset.org/abstracts/search?q=Pejman%20Mansouri"> Pejman Mansouri</a>, <a href="https://publications.waset.org/abstracts/search?q=Mahmoud%20Farzan"> Mahmoud Farzan</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Background: The most effective treatment of posterior cruciate ligament (PCL) tears and the consequence of untreated PCL injuries remain controversial. Objectives: The aim of this study is to assess outcomes of fixation of tibial posterior cruciate ligament (PCL) avulsion fractures via a modified technique. Patients and Methods: From January, 2009 to March, 2012, there were 45 cases of PCL tibial avulsion fractures that were referred to our hospital and were managed through a modified open posterior approach. Fixation of Tibial PCL avulsion fractures were fixed by means of a lag screw and washer placed through our modified open posterior approach. Range of motion was begun on the first postoperative day. Clinical stability, range of motion, gastrocnemius muscle strength, radiographic investigation, and patient’s overall quality of life was analyzed at final follow up visit. Results: The average of overall musculoskeletal functional evaluation scores was 15 (range 3–35). All patients achieved union of their fracture and had clinically stable knees at the latest follow-up. The mean preoperative Lysholm score for 15 knees was 62 ± 8 (range, 50-75); the mean postoperative Lysholm score was 92± 7 (range, 75-101). A significant difference in Lysholm scores between preoperative and final follow-up evaluations was found (P < .05). At first-year follow-up, 42 (93%) patients revealed a difference of less than 10 mm in thigh circumference between their injured and healthy knees. Conclusions: The management of displaced large PCL avulsion fractures with placement of a cancellous lag screw with washer by means of the modified open posterior approach leads to satisfactory clinical, radiographic, and functional results and reduces the operation time and less blood loss. Level of evidence: IV. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=posterior%20cruciate%20ligament" title="posterior cruciate ligament">posterior cruciate ligament</a>, <a href="https://publications.waset.org/abstracts/search?q=tibial%20fracture" title=" tibial fracture"> tibial fracture</a>, <a href="https://publications.waset.org/abstracts/search?q=lysholm%20knee%20score" title=" lysholm knee score"> lysholm knee score</a>, <a href="https://publications.waset.org/abstracts/search?q=patient%20outcome%20assessment" title=" patient outcome assessment"> patient outcome assessment</a> </p> <a href="https://publications.waset.org/abstracts/41559/a-modified-open-posterior-approach-for-the-fixation-of-posterior-cruciate-ligament-tibial-avulsion-fractures" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/41559.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">301</span> </span> </div> </div> <div class="card paper-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">1</span> Metal-Semiconductor Transition in Ultra-Thin Titanium Oxynitride Films Deposited by ALD</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Farzan%20Gity">Farzan Gity</a>, <a href="https://publications.waset.org/abstracts/search?q=Lida%20Ansari"> Lida Ansari</a>, <a href="https://publications.waset.org/abstracts/search?q=Ian%20M.%20Povey"> Ian M. Povey</a>, <a href="https://publications.waset.org/abstracts/search?q=Roger%20E.%20Nagle"> Roger E. Nagle</a>, <a href="https://publications.waset.org/abstracts/search?q=James%20C.%20Greer"> James C. Greer</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Titanium nitride (TiN) films have been widely used in variety of fields, due to its unique electrical, chemical, physical and mechanical properties, including low electrical resistivity, chemical stability, and high thermal conductivity. In microelectronic devices, thin continuous TiN films are commonly used as diffusion barrier and metal gate material. However, as the film thickness decreases below a few nanometers, electrical properties of the film alter considerably. In this study, the physical and electrical characteristics of 1.5nm to 22nm thin films deposited by Plasma-Enhanced Atomic Layer Deposition (PE-ALD) using Tetrakis(dimethylamino)titanium(IV), (TDMAT) chemistry and Ar/N2 plasma on 80nm SiO2 capped in-situ by 2nm Al2O3 are investigated. ALD technique allows uniformly-thick films at monolayer level in a highly controlled manner. The chemistry incorporates low level of oxygen into the TiN films forming titanium oxynitride (TiON). Thickness of the films is characterized by Transmission Electron Microscopy (TEM) which confirms the uniformity of the films. Surface morphology of the films is investigated by Atomic Force Microscopy (AFM) indicating sub-nanometer surface roughness. Hall measurements are performed to determine the parameters such as carrier mobility, type and concentration, as well as resistivity. The >5nm-thick films exhibit metallic behavior; however, we have observed that thin film resistivity is modulated significantly by film thickness such that there are more than 5 orders of magnitude increment in the sheet resistance at room temperature when comparing 5nm and 1.5nm films. Scattering effects at interfaces and grain boundaries could play a role in thickness-dependent resistivity in addition to quantum confinement effect that could occur at ultra-thin films: based on our measurements the carrier concentration is decreased from 1.5E22 1/cm3 to 5.5E17 1/cm3, while the mobility is increased from < 0.1 cm2/V.s to ~4 cm2/V.s for the 5nm and 1.5nm films, respectively. Also, measurements at different temperatures indicate that the resistivity is relatively constant for the 5nm film, while for the 1.5nm film more than 2 orders of magnitude reduction has been observed over the range of 220K to 400K. The activation energy of the 2.5nm and 1.5nm films is 30meV and 125meV, respectively, indicating that the TiON ultra-thin films are exhibiting semiconducting behaviour attributing this effect to a metal-semiconductor transition. By the same token, the contact is no longer Ohmic for the thinnest film (i.e., 1.5nm-thick film); hence, a modified lift-off process was developed to selectively deposit thicker films allowing us to perform electrical measurements with low contact resistance on the raised contact regions. Our atomic scale simulations based on molecular dynamic-generated amorphous TiON structures with low oxygen content confirm our experimental observations indicating highly n-type thin films. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=activation%20energy" title="activation energy">activation energy</a>, <a href="https://publications.waset.org/abstracts/search?q=ALD" title=" ALD"> ALD</a>, <a href="https://publications.waset.org/abstracts/search?q=metal-semiconductor%20transition" title=" metal-semiconductor transition"> metal-semiconductor transition</a>, <a href="https://publications.waset.org/abstracts/search?q=resistivity" title=" resistivity"> resistivity</a>, <a href="https://publications.waset.org/abstracts/search?q=titanium%20oxynitride" title=" titanium oxynitride"> titanium oxynitride</a>, <a href="https://publications.waset.org/abstracts/search?q=ultra-thin%20film" title=" ultra-thin film"> ultra-thin film</a> </p> <a href="https://publications.waset.org/abstracts/51049/metal-semiconductor-transition-in-ultra-thin-titanium-oxynitride-films-deposited-by-ald" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/51049.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">294</span> </span> </div> </div> </div> </main> <footer> <div id="infolinks" class="pt-3 pb-2"> <div class="container"> <div style="background-color:#f5f5f5;" class="p-3"> <div class="row"> <div class="col-md-2"> <ul class="list-unstyled"> About <li><a href="https://waset.org/page/support">About Us</a></li> <li><a href="https://waset.org/page/support#legal-information">Legal</a></li> <li><a target="_blank" rel="nofollow" href="https://publications.waset.org/static/files/WASET-16th-foundational-anniversary.pdf">WASET celebrates its 16th foundational anniversary</a></li> </ul> 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