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Search results for: U. Ikhlaq
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Ikhlaq</title> <meta name="description" content="Search results for: U. Ikhlaq"> <meta name="keywords" content="U. Ikhlaq"> <meta name="viewport" content="width=device-width, initial-scale=1, minimum-scale=1, maximum-scale=1, user-scalable=no"> <meta charset="utf-8"> <link href="https://cdn.waset.org/favicon.ico" type="image/x-icon" rel="shortcut icon"> <link href="https://cdn.waset.org/static/plugins/bootstrap-4.2.1/css/bootstrap.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/plugins/fontawesome/css/all.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/css/site.css?v=150220211555" rel="stylesheet"> </head> <body> <header> <div class="container"> <nav class="navbar navbar-expand-lg navbar-light"> <a class="navbar-brand" href="https://waset.org"> <img src="https://cdn.waset.org/static/images/wasetc.png" alt="Open Science Research Excellence" title="Open Science Research Excellence" /> </a> <button class="d-block d-lg-none navbar-toggler ml-auto" type="button" data-toggle="collapse" data-target="#navbarMenu" aria-controls="navbarMenu" aria-expanded="false" aria-label="Toggle navigation"> <span class="navbar-toggler-icon"></span> </button> <div class="w-100"> <div class="d-none d-lg-flex flex-row-reverse"> <form method="get" action="https://waset.org/search" class="form-inline my-2 my-lg-0"> <input class="form-control mr-sm-2" type="search" placeholder="Search Conferences" value="U. 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Ikhlaq"> <input type="submit" class="btn_search" value="Search"> </div> </div> </form> </div> </div> <div class="row mt-3"> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Commenced</strong> in January 2007</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Frequency:</strong> Monthly</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Edition:</strong> International</div> </div> </div> <div class="col-sm-3"> <div class="card"> <div class="card-body"><strong>Paper Count:</strong> 1</div> </div> </div> </div> <h1 class="mt-3 mb-3 text-center" style="font-size:1.6rem;">Search results for: U. Ikhlaq</h1> <div class="card publication-listing mb-3 mt-3"> <h5 class="card-header" style="font-size:.9rem"><span class="badge badge-info">1</span> Influence of Argon Gas Concentration in N2-Ar Plasma for the Nitridation of Si in Abnormal Glow Discharge</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/search?q=K.%20Abbas">K. Abbas</a>, <a href="https://publications.waset.org/search?q=R.%20Ahmad"> R. Ahmad</a>, <a href="https://publications.waset.org/search?q=I.%20A.%20Khan"> I. A. Khan</a>, <a href="https://publications.waset.org/search?q=S.%20Saleem"> S. Saleem</a>, <a href="https://publications.waset.org/search?q=U.%20Ikhlaq"> U. Ikhlaq</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Nitriding of p-type Si samples by pulsed DC glow discharge is carried out for different Ar concentrations (30% to 90%) in nitrogen-argon plasma whereas the other parameters like pressure (2 mbar), treatment time (4 hr) and power (175 W) are kept constant. The phase identification, crystal structure, crystallinity, chemical composition, surface morphology and topography of the nitrided layer are studied using X-ray diffraction (XRD), Fourier transform infra-red spectroscopy (FTIR), optical microscopy (OM), scanning electron microscopy (SEM) and atomic force microscopy (AFM) respectively. The XRD patterns reveal the development of different diffraction planes of Si<sub>3</sub>N<sub>4</sub> confirming the formation of polycrystalline layer. FTIR spectrum confirms the formation of bond between Si and N. Results reveal that addition of Ar into N<sub>2</sub> plasma plays an important role to enhance the production of active species which facilitate the nitrogen diffusion. <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/search?q=Crystallinity" title="Crystallinity">Crystallinity</a>, <a href="https://publications.waset.org/search?q=glow%20discharge" title=" glow discharge"> glow discharge</a>, <a href="https://publications.waset.org/search?q=nitriding" title=" nitriding"> nitriding</a>, <a href="https://publications.waset.org/search?q=sputtering." title=" sputtering."> sputtering.</a> </p> <a href="https://publications.waset.org/10004869/influence-of-argon-gas-concentration-in-n2-ar-plasma-for-the-nitridation-of-si-in-abnormal-glow-discharge" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/10004869/apa" target="_blank" rel="nofollow" class="btn btn-primary btn-sm">APA</a> <a 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