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Category:Microtechnology - Wikipedia

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Available in 28 languages" > <label id="p-lang-btn-label" for="p-lang-btn-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--action-progressive mw-portlet-lang-heading-28" aria-hidden="true" ><span class="vector-icon mw-ui-icon-language-progressive mw-ui-icon-wikimedia-language-progressive"></span> <span class="vector-dropdown-label-text">28 languages</span> </label> <div class="vector-dropdown-content"> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li class="interlanguage-link interwiki-ar mw-list-item"><a href="https://ar.wikipedia.org/wiki/%D8%AA%D8%B5%D9%86%D9%8A%D9%81:%D8%AA%D9%82%D8%A7%D9%86%D8%A9_%D9%85%D8%A7%D9%8A%D9%83%D8%B1%D9%88%D9%8A%D8%A9" title="تصنيف:تقانة مايكروية – Arabic" lang="ar" hreflang="ar" data-title="تصنيف:تقانة مايكروية" data-language-autonym="العربية" data-language-local-name="Arabic" class="interlanguage-link-target"><span>العربية</span></a></li><li class="interlanguage-link interwiki-az mw-list-item"><a href="https://az.wikipedia.org/wiki/Kateqoriya:Mikrotexnologiya" title="Kateqoriya:Mikrotexnologiya – Azerbaijani" lang="az" hreflang="az" data-title="Kateqoriya:Mikrotexnologiya" data-language-autonym="Azərbaycanca" data-language-local-name="Azerbaijani" class="interlanguage-link-target"><span>Azərbaycanca</span></a></li><li class="interlanguage-link interwiki-bn mw-list-item"><a href="https://bn.wikipedia.org/wiki/%E0%A6%AC%E0%A6%BF%E0%A6%B7%E0%A6%AF%E0%A6%BC%E0%A6%B6%E0%A7%8D%E0%A6%B0%E0%A7%87%E0%A6%A3%E0%A7%80:%E0%A6%85%E0%A6%A3%E0%A7%81%E0%A6%AA%E0%A7%8D%E0%A6%B0%E0%A6%AF%E0%A7%81%E0%A6%95%E0%A7%8D%E0%A6%A4%E0%A6%BF" title="বিষয়শ্রেণী:অণুপ্রযুক্তি – Bangla" lang="bn" hreflang="bn" data-title="বিষয়শ্রেণী:অণুপ্রযুক্তি" data-language-autonym="বাংলা" data-language-local-name="Bangla" class="interlanguage-link-target"><span>বাংলা</span></a></li><li class="interlanguage-link interwiki-be-x-old mw-list-item"><a href="https://be-tarask.wikipedia.org/wiki/%D0%9A%D0%B0%D1%82%D1%8D%D0%B3%D0%BE%D1%80%D1%8B%D1%8F:%D0%9C%D1%96%D0%BA%D1%80%D0%B0%D1%82%D1%8D%D1%85%D0%BD%D0%B0%D0%BB%D1%91%D0%B3%D1%96%D1%96" title="Катэгорыя:Мікратэхналёгіі – Belarusian (Taraškievica orthography)" lang="be-tarask" hreflang="be-tarask" data-title="Катэгорыя:Мікратэхналёгіі" data-language-autonym="Беларуская (тарашкевіца)" data-language-local-name="Belarusian (Taraškievica orthography)" class="interlanguage-link-target"><span>Беларуская (тарашкевіца)</span></a></li><li class="interlanguage-link interwiki-bg mw-list-item"><a href="https://bg.wikipedia.org/wiki/%D0%9A%D0%B0%D1%82%D0%B5%D0%B3%D0%BE%D1%80%D0%B8%D1%8F:%D0%9C%D0%B8%D0%BA%D1%80%D0%BE%D1%82%D0%B5%D1%85%D0%BD%D0%BE%D0%BB%D0%BE%D0%B3%D0%B8%D1%8F" title="Категория:Микротехнология – Bulgarian" lang="bg" hreflang="bg" data-title="Категория:Микротехнология" data-language-autonym="Български" data-language-local-name="Bulgarian" class="interlanguage-link-target"><span>Български</span></a></li><li class="interlanguage-link interwiki-bs mw-list-item"><a href="https://bs.wikipedia.org/wiki/Kategorija:Mikrotehnologija" title="Kategorija:Mikrotehnologija – Bosnian" lang="bs" hreflang="bs" data-title="Kategorija:Mikrotehnologija" data-language-autonym="Bosanski" data-language-local-name="Bosnian" class="interlanguage-link-target"><span>Bosanski</span></a></li><li class="interlanguage-link interwiki-el mw-list-item"><a href="https://el.wikipedia.org/wiki/%CE%9A%CE%B1%CF%84%CE%B7%CE%B3%CE%BF%CF%81%CE%AF%CE%B1:%CE%9C%CE%B9%CE%BA%CF%81%CE%BF%CF%84%CE%B5%CF%87%CE%BD%CE%BF%CE%BB%CE%BF%CE%B3%CE%AF%CE%B1" title="Κατηγορία:Μικροτεχνολογία – Greek" lang="el" hreflang="el" data-title="Κατηγορία:Μικροτεχνολογία" data-language-autonym="Ελληνικά" data-language-local-name="Greek" class="interlanguage-link-target"><span>Ελληνικά</span></a></li><li class="interlanguage-link interwiki-es mw-list-item"><a href="https://es.wikipedia.org/wiki/Categor%C3%ADa:Microtecnolog%C3%ADa" title="Categoría:Microtecnología – Spanish" lang="es" hreflang="es" data-title="Categoría:Microtecnología" data-language-autonym="Español" data-language-local-name="Spanish" class="interlanguage-link-target"><span>Español</span></a></li><li class="interlanguage-link interwiki-eu mw-list-item"><a href="https://eu.wikipedia.org/wiki/Kategoria:Mikroteknologia" title="Kategoria:Mikroteknologia – Basque" lang="eu" hreflang="eu" data-title="Kategoria:Mikroteknologia" data-language-autonym="Euskara" data-language-local-name="Basque" class="interlanguage-link-target"><span>Euskara</span></a></li><li class="interlanguage-link interwiki-fa mw-list-item"><a href="https://fa.wikipedia.org/wiki/%D8%B1%D8%AF%D9%87:%D9%81%D9%86%D8%A7%D9%88%D8%B1%DB%8C_%D9%85%DB%8C%DA%A9%D8%B1%D9%88" title="رده:فناوری میکرو – Persian" lang="fa" hreflang="fa" data-title="رده:فناوری میکرو" data-language-autonym="فارسی" data-language-local-name="Persian" class="interlanguage-link-target"><span>فارسی</span></a></li><li class="interlanguage-link interwiki-id mw-list-item"><a href="https://id.wikipedia.org/wiki/Kategori:Mikroteknologi" title="Kategori:Mikroteknologi – Indonesian" lang="id" hreflang="id" data-title="Kategori:Mikroteknologi" data-language-autonym="Bahasa Indonesia" data-language-local-name="Indonesian" class="interlanguage-link-target"><span>Bahasa Indonesia</span></a></li><li class="interlanguage-link interwiki-he mw-list-item"><a href="https://he.wikipedia.org/wiki/%D7%A7%D7%98%D7%92%D7%95%D7%A8%D7%99%D7%94:%D7%9E%D7%99%D7%A7%D7%A8%D7%95%D7%98%D7%9B%D7%A0%D7%95%D7%9C%D7%95%D7%92%D7%99%D7%94" title="קטגוריה:מיקרוטכנולוגיה – Hebrew" lang="he" hreflang="he" data-title="קטגוריה:מיקרוטכנולוגיה" data-language-autonym="עברית" data-language-local-name="Hebrew" class="interlanguage-link-target"><span>עברית</span></a></li><li class="interlanguage-link interwiki-la mw-list-item"><a href="https://la.wikipedia.org/wiki/Categoria:Microtechnologia" title="Categoria:Microtechnologia – Latin" lang="la" hreflang="la" data-title="Categoria:Microtechnologia" data-language-autonym="Latina" data-language-local-name="Latin" class="interlanguage-link-target"><span>Latina</span></a></li><li class="interlanguage-link interwiki-ml mw-list-item"><a href="https://ml.wikipedia.org/wiki/%E0%B4%B5%E0%B5%BC%E0%B4%97%E0%B5%8D%E0%B4%97%E0%B4%82:%E0%B4%AE%E0%B5%88%E0%B4%95%E0%B5%8D%E0%B4%B0%E0%B5%8B%E0%B4%9F%E0%B5%86%E0%B4%95%E0%B5%8D%E0%B4%A8%E0%B5%8B%E0%B4%B3%E0%B4%9C%E0%B4%BF" title="വർഗ്ഗം:മൈക്രോടെക്നോളജി – Malayalam" lang="ml" hreflang="ml" data-title="വർഗ്ഗം:മൈക്രോടെക്നോളജി" data-language-autonym="മലയാളം" data-language-local-name="Malayalam" class="interlanguage-link-target"><span>മലയാളം</span></a></li><li class="interlanguage-link interwiki-ms mw-list-item"><a href="https://ms.wikipedia.org/wiki/Kategori:Mikroteknologi" title="Kategori:Mikroteknologi – Malay" lang="ms" hreflang="ms" data-title="Kategori:Mikroteknologi" data-language-autonym="Bahasa Melayu" data-language-local-name="Malay" class="interlanguage-link-target"><span>Bahasa Melayu</span></a></li><li class="interlanguage-link interwiki-no mw-list-item"><a href="https://no.wikipedia.org/wiki/Kategori:Mikroteknologi" title="Kategori:Mikroteknologi – Norwegian Bokmål" lang="nb" hreflang="nb" data-title="Kategori:Mikroteknologi" data-language-autonym="Norsk bokmål" data-language-local-name="Norwegian Bokmål" class="interlanguage-link-target"><span>Norsk bokmål</span></a></li><li class="interlanguage-link interwiki-pt mw-list-item"><a href="https://pt.wikipedia.org/wiki/Categoria:Microtecnologia" title="Categoria:Microtecnologia – Portuguese" lang="pt" hreflang="pt" data-title="Categoria:Microtecnologia" data-language-autonym="Português" data-language-local-name="Portuguese" class="interlanguage-link-target"><span>Português</span></a></li><li class="interlanguage-link interwiki-ro mw-list-item"><a href="https://ro.wikipedia.org/wiki/Categorie:Microtehnologie" title="Categorie:Microtehnologie – Romanian" lang="ro" hreflang="ro" data-title="Categorie:Microtehnologie" data-language-autonym="Română" data-language-local-name="Romanian" class="interlanguage-link-target"><span>Română</span></a></li><li class="interlanguage-link interwiki-sco mw-list-item"><a href="https://sco.wikipedia.org/wiki/Category:Microtechnology" title="Category:Microtechnology – Scots" lang="sco" hreflang="sco" data-title="Category:Microtechnology" data-language-autonym="Scots" data-language-local-name="Scots" class="interlanguage-link-target"><span>Scots</span></a></li><li class="interlanguage-link interwiki-sk mw-list-item"><a href="https://sk.wikipedia.org/wiki/Kateg%C3%B3ria:Mikrotechnol%C3%B3gia" title="Kategória:Mikrotechnológia – Slovak" lang="sk" hreflang="sk" data-title="Kategória:Mikrotechnológia" data-language-autonym="Slovenčina" data-language-local-name="Slovak" class="interlanguage-link-target"><span>Slovenčina</span></a></li><li class="interlanguage-link interwiki-sr mw-list-item"><a href="https://sr.wikipedia.org/wiki/%D0%9A%D0%B0%D1%82%D0%B5%D0%B3%D0%BE%D1%80%D0%B8%D1%98%D0%B0:%D0%9C%D0%B8%D0%BA%D1%80%D0%BE%D1%82%D0%B5%D1%85%D0%BD%D0%BE%D0%BB%D0%BE%D0%B3%D0%B8%D1%98%D0%B0" title="Категорија:Микротехнологија – Serbian" lang="sr" hreflang="sr" data-title="Категорија:Микротехнологија" data-language-autonym="Српски / srpski" data-language-local-name="Serbian" class="interlanguage-link-target"><span>Српски / srpski</span></a></li><li class="interlanguage-link interwiki-sh mw-list-item"><a href="https://sh.wikipedia.org/wiki/Kategorija:Mikrotehnologija" title="Kategorija:Mikrotehnologija – Serbo-Croatian" lang="sh" hreflang="sh" data-title="Kategorija:Mikrotehnologija" data-language-autonym="Srpskohrvatski / српскохрватски" data-language-local-name="Serbo-Croatian" class="interlanguage-link-target"><span>Srpskohrvatski / српскохрватски</span></a></li><li class="interlanguage-link interwiki-sv mw-list-item"><a href="https://sv.wikipedia.org/wiki/Kategori:Mikroteknik" title="Kategori:Mikroteknik – Swedish" lang="sv" hreflang="sv" data-title="Kategori:Mikroteknik" data-language-autonym="Svenska" data-language-local-name="Swedish" class="interlanguage-link-target"><span>Svenska</span></a></li><li class="interlanguage-link interwiki-tl mw-list-item"><a href="https://tl.wikipedia.org/wiki/Kategorya:Mikroteknolohiya" title="Kategorya:Mikroteknolohiya – Tagalog" lang="tl" hreflang="tl" data-title="Kategorya:Mikroteknolohiya" data-language-autonym="Tagalog" data-language-local-name="Tagalog" class="interlanguage-link-target"><span>Tagalog</span></a></li><li class="interlanguage-link interwiki-tr mw-list-item"><a href="https://tr.wikipedia.org/wiki/Kategori:Mikroteknoloji" title="Kategori:Mikroteknoloji – Turkish" lang="tr" hreflang="tr" data-title="Kategori:Mikroteknoloji" data-language-autonym="Türkçe" data-language-local-name="Turkish" class="interlanguage-link-target"><span>Türkçe</span></a></li><li class="interlanguage-link interwiki-ur mw-list-item"><a href="https://ur.wikipedia.org/wiki/%D8%B2%D9%85%D8%B1%DB%81:%D8%AE%D8%B1%D8%AF%D8%B7%D8%B1%D8%B2%DB%8C%D8%A7%D8%AA" title="زمرہ:خردطرزیات – Urdu" lang="ur" hreflang="ur" data-title="زمرہ:خردطرزیات" data-language-autonym="اردو" data-language-local-name="Urdu" class="interlanguage-link-target"><span>اردو</span></a></li><li class="interlanguage-link interwiki-vi mw-list-item"><a href="https://vi.wikipedia.org/wiki/Th%E1%BB%83_lo%E1%BA%A1i:Vi_c%C3%B4ng_ngh%E1%BB%87" title="Thể loại:Vi công nghệ – Vietnamese" lang="vi" hreflang="vi" data-title="Thể loại:Vi công nghệ" data-language-autonym="Tiếng Việt" data-language-local-name="Vietnamese" class="interlanguage-link-target"><span>Tiếng Việt</span></a></li><li class="interlanguage-link interwiki-zh mw-list-item"><a href="https://zh.wikipedia.org/wiki/Category:%E5%BE%AE%E6%8A%80%E6%9C%AF" 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<div class="vector-body-before-content"> <div class="mw-indicators"> <div id="mw-indicator-mw-helplink" class="mw-indicator"><a href="/wiki/Help:Category" target="_blank" class="mw-helplink"><span class="mw-helplink-icon"></span>Help</a></div> </div> <div id="siteSub" class="noprint">From Wikipedia, the free encyclopedia</div> </div> <div id="contentSub"><div id="mw-content-subtitle"></div></div> <div id="mw-content-text" class="mw-body-content"><div class="mw-content-ltr mw-parser-output" lang="en" dir="ltr"><p><b>Microtechnology</b> is a set of processes, techniques and tools used to create structures having at least one dimension of a functional feature in order of <a href="/wiki/Micrometre" title="Micrometre">micrometer</a> (one millionth of a metre, or 10-6 metre, or 1μm), typically within the range of 10<sup>−4</sup> to 10<sup>−7</sup> meters and application of those structures in more complex systems. </p> <style data-mw-deduplicate="TemplateStyles:r1236090951">.mw-parser-output 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.navbox-image img{max-width:none!important}@media print{body.ns-0 .mw-parser-output .navbox{display:none!important}}</style></div><div role="navigation" class="navbox" aria-labelledby="Microtechnology" style="padding:3px"><table class="nowraplinks hlist mw-collapsible autocollapse navbox-inner" style="border-spacing:0;background:transparent;color:inherit"><tbody><tr><th scope="col" class="navbox-title" colspan="2"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1129693374"><style data-mw-deduplicate="TemplateStyles:r1239400231">.mw-parser-output .navbar{display:inline;font-size:88%;font-weight:normal}.mw-parser-output .navbar-collapse{float:left;text-align:left}.mw-parser-output .navbar-boxtext{word-spacing:0}.mw-parser-output .navbar ul{display:inline-block;white-space:nowrap;line-height:inherit}.mw-parser-output .navbar-brackets::before{margin-right:-0.125em;content:"[ "}.mw-parser-output .navbar-brackets::after{margin-left:-0.125em;content:" ]"}.mw-parser-output .navbar li{word-spacing:-0.125em}.mw-parser-output .navbar a>span,.mw-parser-output .navbar a>abbr{text-decoration:inherit}.mw-parser-output .navbar-mini abbr{font-variant:small-caps;border-bottom:none;text-decoration:none;cursor:inherit}.mw-parser-output .navbar-ct-full{font-size:114%;margin:0 7em}.mw-parser-output .navbar-ct-mini{font-size:114%;margin:0 4em}html.skin-theme-clientpref-night .mw-parser-output .navbar li a abbr{color:var(--color-base)!important}@media(prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .navbar li a abbr{color:var(--color-base)!important}}@media print{.mw-parser-output .navbar{display:none!important}}</style><div class="navbar plainlinks hlist navbar-mini"><ul><li class="nv-view"><a href="/wiki/Template:Microtechnology" title="Template:Microtechnology"><abbr title="View this template">v</abbr></a></li><li class="nv-talk"><a href="/wiki/Template_talk:Microtechnology" title="Template talk:Microtechnology"><abbr title="Discuss this template">t</abbr></a></li><li class="nv-edit"><a href="/wiki/Special:EditPage/Template:Microtechnology" title="Special:EditPage/Template:Microtechnology"><abbr title="Edit this template">e</abbr></a></li></ul></div><div id="Microtechnology" style="font-size:114%;margin:0 4em"><a href="/wiki/Microtechnology" title="Microtechnology">Microtechnology</a></div></th></tr><tr><td class="navbox-abovebelow" colspan="2"><div> <ul><li><a href="/wiki/Microelectromechanical_systems" class="mw-redirect" title="Microelectromechanical systems">Microelectromechanical systems</a></li> <li><a href="/wiki/Microtechnology" title="Microtechnology">Microtechnology</a></li> <li><a href="/wiki/Micromachinery" title="Micromachinery">Micromachinery</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Basic structures</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Interdigital_transducer" title="Interdigital transducer">Interdigital transducer</a></li> <li><a href="/wiki/Cantilever#In_microelectromechanical_systems" title="Cantilever">Cantilever</a></li> <li><a href="/wiki/Microchannel_(microtechnology)" title="Microchannel (microtechnology)">Microchannel</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Applications</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"></div><table class="nowraplinks navbox-subgroup" style="border-spacing:0"><tbody><tr><th scope="row" class="navbox-group" style="width:7em"><a href="/wiki/Sensor" title="Sensor">Sensors</a></th><td class="navbox-list-with-group navbox-list navbox-even" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Microbolometer" title="Microbolometer">Microbolometer</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:7em"><a href="/wiki/Actuator" title="Actuator">Actuators</a></th><td class="navbox-list-with-group navbox-list navbox-odd" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Comb_drive" title="Comb drive">Comb drive</a></li> <li><a href="/wiki/Scratch_drive_actuator" title="Scratch drive actuator">Scratch drive actuator</a></li> <li><a href="/wiki/MEMS_thermal_actuator" class="mw-redirect" title="MEMS thermal actuator">Thermal actuator</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:7em"><a href="/wiki/Switch" title="Switch">Switches</a></th><td class="navbox-list-with-group navbox-list navbox-even" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Digital_micromirror_device" title="Digital micromirror device">Digital micromirror device</a></li> <li><a href="/wiki/Optical_switch" class="mw-redirect" title="Optical switch">Optical switch</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:7em">Other</th><td class="navbox-list-with-group navbox-list navbox-odd" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Millipede_memory" title="Millipede memory">Millipede memory</a></li> <li><a href="/wiki/Radio-frequency_microelectromechanical_system" title="Radio-frequency microelectromechanical system">Radio-frequency microelectromechanical systems</a></li> <li><a href="/wiki/Microoptoelectromechanical_systems" title="Microoptoelectromechanical systems">Microoptoelectromechanical systems</a></li> <li><a href="/wiki/Microphotonics" title="Microphotonics">Microphotonics</a></li> <li><a href="/wiki/Bio-MEMS" title="Bio-MEMS">Biological microelectromechanical systems</a></li> <li><a href="/wiki/Category:Microfluidics" title="Category:Microfluidics">Microfluidics</a></li> <li><a href="/wiki/Micropower" title="Micropower">Micropower</a></li></ul> </div></td></tr></tbody></table><div></div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Processes</th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"></div><table class="nowraplinks navbox-subgroup" style="border-spacing:0"><tbody><tr><th scope="row" class="navbox-group" style="width:7em">General</th><td class="navbox-list-with-group navbox-list navbox-even" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Surface_micromachining" title="Surface micromachining">Surface micromachining</a></li> <li><a href="/wiki/Bulk_micromachining" title="Bulk micromachining">Bulk micromachining</a></li> <li><a href="/wiki/Microelectromechanical_systems#High_aspect_ratio_(HAR)_micromachining" class="mw-redirect" title="Microelectromechanical systems">HAR micromachining</a></li> <li><a href="/wiki/Category:Thin_film_deposition" title="Category:Thin film deposition">Deposition</a></li> <li><a href="/wiki/Category:Lithography_(microfabrication)" title="Category:Lithography (microfabrication)">Lithography</a></li> <li><a href="/wiki/Category:Etching_(microfabrication)" title="Category:Etching (microfabrication)">Etching</a></li> <li><a href="/wiki/Wire_bonding" title="Wire bonding">Wire bonding</a></li> <li><a href="/wiki/3D_microfabrication" title="3D microfabrication">3D microfabrication</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:7em">Specific</th><td class="navbox-list-with-group navbox-list navbox-odd" style="padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/LOCOS" title="LOCOS">LOCOS</a></li> <li><a href="/wiki/Shallow_trench_isolation" title="Shallow trench isolation">Shallow trench isolation</a></li> <li><a href="/wiki/LIGA" title="LIGA">LIGA</a></li> <li><a href="/wiki/Lift-off_(microtechnology)" title="Lift-off (microtechnology)">Lift-off</a></li> <li><a href="/wiki/Photolithography" title="Photolithography">Photolithography</a></li> <li><a href="/wiki/Silicon_on_insulator" title="Silicon on insulator">Silicon on insulator</a></li> <li><a href="/wiki/Smart_cut" title="Smart cut">Smart cut</a></li></ul> </div></td></tr></tbody></table><div></div></td></tr></tbody></table></div> <style data-mw-deduplicate="TemplateStyles:r1235681985">.mw-parser-output .side-box{margin:4px 0;box-sizing:border-box;border:1px solid #aaa;font-size:88%;line-height:1.25em;background-color:var(--background-color-interactive-subtle,#f8f9fa);display:flow-root}.mw-parser-output .side-box-abovebelow,.mw-parser-output .side-box-text{padding:0.25em 0.9em}.mw-parser-output .side-box-image{padding:2px 0 2px 0.9em;text-align:center}.mw-parser-output .side-box-imageright{padding:2px 0.9em 2px 0;text-align:center}@media(min-width:500px){.mw-parser-output .side-box-flex{display:flex;align-items:center}.mw-parser-output .side-box-text{flex:1;min-width:0}}@media(min-width:720px){.mw-parser-output .side-box{width:238px}.mw-parser-output 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typeof="mw:File"><span><img alt="" src="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/30px-Commons-logo.svg.png" decoding="async" width="30" height="40" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/45px-Commons-logo.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/59px-Commons-logo.svg.png 2x" data-file-width="1024" data-file-height="1376" /></span></span></div> <div class="side-box-text plainlist">Wikimedia Commons has media related to <span style="font-weight: bold; font-style: italic;"><a href="https://commons.wikimedia.org/wiki/Category:Microtechnology" class="extiw" title="commons:Category:Microtechnology">Microtechnology</a></span>.</div></div> </div> <!-- NewPP limit report Parsed by mw‐web.codfw.main‐74dc4d995d‐8qxxk Cached time: 20241103041416 Cache expiry: 2592000 Reduced expiry: false Complications: [] CPU time usage: 0.186 seconds Real time usage: 0.234 seconds Preprocessor 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Rendering was triggered because: page-view --> </div><div class="mw-category-generated" lang="en" dir="ltr"><div id="mw-subcategories"> <h2>Subcategories</h2> <p>This category has the following 9 subcategories, out of 9 total. </p><div lang="en" dir="ltr" class="mw-content-ltr"><div class="mw-category mw-category-columns"><div class="mw-category-group"><h3>E</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeEmptyBullet"></span> <bdi dir="ltr"><a href="/wiki/Category:Etching_(microfabrication)" title="Category:Etching (microfabrication)">Etching (microfabrication)</a></bdi> <span title="Contains 0 subcategories, 10 pages, and 0 files" dir="ltr">(10 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div><div class="mw-category-group"><h3>L</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Lithography_(microfabrication)" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Lithography_(microfabrication)" title="Category:Lithography (microfabrication)">Lithography (microfabrication)</a></bdi> <span title="Contains 1 subcategory, 48 pages, and 0 files" dir="ltr">(1 C, 48 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div><div class="mw-category-group"><h3>M</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeEmptyBullet"></span> <bdi dir="ltr"><a href="/wiki/Category:Microarrays" title="Category:Microarrays">Microarrays</a></bdi> <span title="Contains 0 subcategories, 54 pages, and 0 files" dir="ltr">(54 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li> <li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeEmptyBullet"></span> <bdi dir="ltr"><a href="/wiki/Category:Microelectronic_and_microelectromechanical_systems" title="Category:Microelectronic and microelectromechanical systems">Microelectronic and microelectromechanical systems</a></bdi> <span title="Contains 0 subcategories, 24 pages, and 0 files" dir="ltr">(24 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li> <li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Microfluidics" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Microfluidics" title="Category:Microfluidics">Microfluidics</a></bdi> <span title="Contains 1 subcategory, 39 pages, and 0 files" dir="ltr">(1 C, 39 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div><div class="mw-category-group"><h3>P</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Packaging_(microfabrication)" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Packaging_(microfabrication)" title="Category:Packaging (microfabrication)">Packaging (microfabrication)</a></bdi> <span title="Contains 2 subcategories, 27 pages, and 0 files" dir="ltr">(2 C, 27 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div><div class="mw-category-group"><h3>R</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Micro_robots" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Micro_robots" title="Category:Micro robots">Micro robots</a></bdi> <span title="Contains 1 subcategory, 10 pages, and 0 files" dir="ltr">(1 C, 10 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div><div class="mw-category-group"><h3>S</h3> <ul><li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Semiconductor_device_fabrication" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Semiconductor_device_fabrication" title="Category:Semiconductor device fabrication">Semiconductor device fabrication</a></bdi> <span title="Contains 15 subcategories, 157 pages, and 0 files" dir="ltr">(15 C, 157 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li> <li><div class="CategoryTreeSection"><div class="CategoryTreeItem"><span class="CategoryTreeBullet"><a class="CategoryTreeToggle" data-ct-title="Semiconductor_technology" aria-expanded="false"></a> </span> <bdi dir="ltr"><a href="/wiki/Category:Semiconductor_technology" title="Category:Semiconductor technology">Semiconductor technology</a></bdi> <span title="Contains 1 subcategory, 39 pages, and 0 files" dir="ltr">(1 C, 39 P)</span></div><div class="CategoryTreeChildren" style="display:none"></div></div></li></ul></div></div></div> </div><div id="mw-pages"> <h2><span class="anchor" id="Pages_in_category"></span>Pages in category "Microtechnology"</h2> <p>The following 91 pages are in this category, out of 91 total. <a href="/wiki/Wikipedia:FAQ/Categorization#Why_might_a_category_list_not_be_up_to_date?" title="Wikipedia:FAQ/Categorization">This list may not reflect recent changes</a>. </p><div lang="en" dir="ltr" class="mw-content-ltr"><div class="mw-category mw-category-columns"><div class="mw-category-group"><h3> </h3> <ul><li><a href="/wiki/Microtechnology" title="Microtechnology">Microtechnology</a></li></ul></div><div class="mw-category-group"><h3>0–9</h3> <ul><li><a href="/wiki/3D_microfabrication" title="3D microfabrication">3D microfabrication</a></li></ul></div><div class="mw-category-group"><h3>A</h3> <ul><li><a href="/wiki/Acoustic_droplet_ejection" title="Acoustic droplet ejection">Acoustic droplet ejection</a></li> <li><a href="/wiki/Advanced_silicon_etching" title="Advanced silicon etching">Advanced silicon etching</a></li></ul></div><div class="mw-category-group"><h3>B</h3> <ul><li><a href="/wiki/Bio-MEMS" title="Bio-MEMS">Bio-MEMS</a></li> <li><a href="/wiki/Bulk_micromachining" title="Bulk micromachining">Bulk micromachining</a></li></ul></div><div class="mw-category-group"><h3>C</h3> <ul><li><a href="/wiki/Comb_drive" title="Comb drive">Comb drive</a></li> <li><a href="/wiki/Coordinatograph" title="Coordinatograph">Coordinatograph</a></li> <li><a href="/wiki/Crossover_switch" title="Crossover switch">Crossover switch</a></li></ul></div><div class="mw-category-group"><h3>D</h3> <ul><li><a href="/wiki/Deep_reactive-ion_etching" title="Deep reactive-ion etching">Deep reactive-ion etching</a></li> <li><a href="/wiki/Deformable_mirror" title="Deformable mirror">Deformable mirror</a></li> <li><a href="/wiki/Digital_micromirror_device" title="Digital micromirror device">Digital micromirror device</a></li> <li><a href="/wiki/Dip-pen_nanolithography" title="Dip-pen nanolithography">Dip-pen nanolithography</a></li> <li><a href="/wiki/Directed_assembly_of_micro-_and_nano-structures" title="Directed assembly of micro- and nano-structures">Directed assembly of micro- and nano-structures</a></li> <li><a href="/wiki/DNA_microarray" title="DNA microarray">DNA microarray</a></li> <li><a href="/wiki/Dry_etching" title="Dry etching">Dry etching</a></li></ul></div><div class="mw-category-group"><h3>E</h3> <ul><li><a href="/wiki/Electrostatic%E2%80%93pneumatic_activation" title="Electrostatic–pneumatic activation">Electrostatic–pneumatic activation</a></li> <li><a href="/wiki/Energy_harvesting" title="Energy harvesting">Energy harvesting</a></li> <li><a href="/wiki/Etching_(microfabrication)" title="Etching (microfabrication)">Etching (microfabrication)</a></li></ul></div><div class="mw-category-group"><h3>G</h3> <ul><li><a href="/wiki/GP5_chip" title="GP5 chip">GP5 chip</a></li></ul></div><div class="mw-category-group"><h3>H</h3> <ul><li><a href="/wiki/HARMST" title="HARMST">HARMST</a></li> <li><a href="/wiki/Hybrid_Insect_Micro-Electro-Mechanical_Systems" title="Hybrid Insect Micro-Electro-Mechanical Systems">Hybrid Insect Micro-Electro-Mechanical Systems</a></li> <li><a href="/wiki/Hydrogen_sensor" title="Hydrogen sensor">Hydrogen sensor</a></li></ul></div><div class="mw-category-group"><h3>I</h3> <ul><li><a href="/wiki/Industrial_computed_tomography" title="Industrial computed tomography">Industrial computed tomography</a></li> <li><a href="/wiki/Interdigital_transducer" title="Interdigital transducer">Interdigital transducer</a></li> <li><a href="/wiki/Ion_track" title="Ion track">Ion track</a></li></ul></div><div class="mw-category-group"><h3>L</h3> <ul><li><a href="/wiki/Lab_on_a_Chip_(journal)" title="Lab on a Chip (journal)">Lab on a Chip (journal)</a></li> <li><a href="/wiki/Lift-off_(microtechnology)" title="Lift-off (microtechnology)">Lift-off (microtechnology)</a></li> <li><a href="/wiki/LIGA" title="LIGA">LIGA</a></li> <li><a href="/wiki/LOCOS" title="LOCOS">LOCOS</a></li></ul></div><div class="mw-category-group"><h3>M</h3> <ul><li><a href="/wiki/Mask_inspection" title="Mask inspection">Mask inspection</a></li> <li><a href="/wiki/MEMS_electrothermal_actuator" title="MEMS electrothermal actuator">MEMS electrothermal actuator</a></li> <li><a href="/wiki/MEMS_sensor_generations" title="MEMS sensor generations">MEMS sensor generations</a></li> <li><a href="/wiki/MEMS_testing" title="MEMS testing">MEMS testing</a></li> <li><a href="/wiki/Micro_heat_exchanger" title="Micro heat exchanger">Micro heat exchanger</a></li> <li><a href="/wiki/Micro_power_source" title="Micro power source">Micro power source</a></li> <li><a href="/wiki/Micro_process_engineering" title="Micro process engineering">Micro process engineering</a></li> <li><a href="/wiki/Micro-loop_heat_pipe" title="Micro-loop heat pipe">Micro-loop heat pipe</a></li> <li><a href="/wiki/Microactuator" title="Microactuator">Microactuator</a></li> <li><a href="/wiki/Microbotics" title="Microbotics">Microbotics</a></li> <li><a href="/wiki/Microchannel_(microtechnology)" title="Microchannel (microtechnology)">Microchannel (microtechnology)</a></li> <li><a href="/wiki/MEMS" title="MEMS">MEMS</a></li> <li><a href="/wiki/Microfabrication" title="Microfabrication">Microfabrication</a></li> <li><a href="/wiki/Microlens" title="Microlens">Microlens</a></li> <li><a href="/wiki/Micromachinery" title="Micromachinery">Micromachinery</a></li> <li><a href="/wiki/Micromirror_device" title="Micromirror device">Micromirror device</a></li> <li><a href="/wiki/Micromixer" title="Micromixer">Micromixer</a></li> <li><a href="/wiki/Microoptomechanical_systems" title="Microoptomechanical systems">Microoptomechanical systems</a></li> <li><a href="/wiki/Micropatterning" title="Micropatterning">Micropatterning</a></li> <li><a href="/wiki/Microphotonics" title="Microphotonics">Microphotonics</a></li> <li><a href="/wiki/Micropower" title="Micropower">Micropower</a></li> <li><a href="/wiki/Microprobe" title="Microprobe">Microprobe</a></li> <li><a href="/wiki/Micropump" title="Micropump">Micropump</a></li> <li><a href="/wiki/Microreactor" title="Microreactor">Microreactor</a></li> <li><a href="/wiki/Microscanner" title="Microscanner">Microscanner</a></li> <li><a href="/wiki/Microthermoforming" title="Microthermoforming">Microthermoforming</a></li> <li><a href="/wiki/Minatec" title="Minatec">Minatec</a></li></ul></div><div class="mw-category-group"><h3>N</h3> <ul><li><a href="/wiki/Nanofountain_probe" title="Nanofountain probe">Nanofountain probe</a></li> <li><a href="/wiki/Nanogenerator" title="Nanogenerator">Nanogenerator</a></li> <li><a href="/wiki/Nanomorphic_cell" title="Nanomorphic cell">Nanomorphic cell</a></li> <li><a href="/wiki/NRF51_series" title="NRF51 series">NRF51 series</a></li> <li><span class="redirect-in-category"><a href="/wiki/Nuclear_micro-battery" class="mw-redirect" title="Nuclear micro-battery">Nuclear micro-battery</a></span></li></ul></div><div class="mw-category-group"><h3>O</h3> <ul><li><a href="/wiki/Optical_cross-connect" title="Optical cross-connect">Optical cross-connect</a></li> <li><a href="/wiki/Orion_(system-on-a-chip)" title="Orion (system-on-a-chip)">Orion (system-on-a-chip)</a></li></ul></div><div class="mw-category-group"><h3>P</h3> <ul><li><a href="/wiki/Photoacid" title="Photoacid">Photoacid</a></li> <li><a href="/wiki/Photolithography" title="Photolithography">Photolithography</a></li> <li><a href="/wiki/Piezoelectric_microelectromechanical_systems" title="Piezoelectric microelectromechanical systems">Piezoelectric microelectromechanical systems</a></li> <li><a href="/wiki/Piezotronics" title="Piezotronics">Piezotronics</a></li> <li><a href="/wiki/Proximity_communication" title="Proximity communication">Proximity communication</a></li></ul></div><div class="mw-category-group"><h3>S</h3> <ul><li><a href="/wiki/Scratch_drive_actuator" title="Scratch drive actuator">Scratch drive actuator</a></li> <li><a href="/wiki/Semi-Conductor_Laboratory" title="Semi-Conductor Laboratory">Semi-Conductor Laboratory</a></li> <li><a href="/wiki/Silicon_on_insulator" title="Silicon on insulator">Silicon on insulator</a></li> <li><a href="/wiki/Smart_cut" title="Smart cut">Smart cut</a></li> <li><a href="/wiki/Smartdust" title="Smartdust">Smartdust</a></li> <li><a href="/wiki/Spherical_surface_acoustic_wave_(SAW)_sensor" title="Spherical surface acoustic wave (SAW) sensor">Spherical surface acoustic wave (SAW) sensor</a></li> <li><a href="/wiki/Spinmechatronics" title="Spinmechatronics">Spinmechatronics</a></li> <li><a href="/wiki/Spoof_surface_plasmon" title="Spoof surface plasmon">Spoof surface plasmon</a></li> <li><a href="/wiki/Supercritical_drying" title="Supercritical drying">Supercritical drying</a></li> <li><a href="/wiki/Supercritical_fluid_extraction" title="Supercritical fluid extraction">Supercritical fluid extraction</a></li> <li><a href="/wiki/Surface_acoustic_wave" title="Surface acoustic wave">Surface acoustic wave</a></li> <li><a href="/wiki/Surface_micromachining" title="Surface micromachining">Surface micromachining</a></li> <li><a href="/wiki/Suspension_array_technology" title="Suspension array technology">Suspension array technology</a></li> <li><a href="/wiki/System_in_a_package" title="System in a package">System in a package</a></li> <li><a href="/wiki/System_on_a_chip" title="System on a chip">System on a chip</a></li></ul></div><div class="mw-category-group"><h3>T</h3> <ul><li><a href="/wiki/T-MOS_thermal_sensor" title="T-MOS thermal sensor">T-MOS thermal sensor</a></li> <li><a href="/wiki/Template-guided_self-assembly" title="Template-guided self-assembly">Template-guided self-assembly</a></li> <li><a href="/wiki/Thermal_oxidation" title="Thermal oxidation">Thermal oxidation</a></li> <li><a href="/wiki/Trojan_wave_packet" title="Trojan wave packet">Trojan wave packet</a></li></ul></div><div class="mw-category-group"><h3>W</h3> <ul><li><a href="/wiki/Wafer_bond_characterization" title="Wafer bond characterization">Wafer bond characterization</a></li></ul></div><div class="mw-category-group"><h3>X</h3> <ul><li><a href="/wiki/X-ray_microtomography" title="X-ray microtomography">X-ray microtomography</a></li> <li><a href="/wiki/Xenobot" title="Xenobot">Xenobot</a></li></ul></div></div></div> </div></div><!--esi <esi:include src="/esitest-fa8a495983347898/content" /> --><noscript><img src="https://login.wikimedia.org/wiki/Special:CentralAutoLogin/start?type=1x1" alt="" width="1" height="1" style="border: none; position: absolute;"></noscript> <div class="printfooter" data-nosnippet="">Retrieved from "<a dir="ltr" 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