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s-headertitlecard"> <div class="section-background-overlay"></div> <div class="section-container"><div class="bde-div-6571-120 bde-div header-titlecard"> <div class="bde-div-6571-121 bde-div header-titlecard__content"> <div class="bde-div-6571-132 bde-div"> <div class="bde-div-6571-122 bde-div"> <h1 class="bde-heading-6571-123 bde-heading"> Ultra </h1><div class="bde-icon-6571-124 bde-icon tile-technonogy__icon"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h2 class="bde-heading-6571-131 bde-heading"> Positioning </h2> </div><div class="bde-text-6571-125 bde-text excerpt"> <p>Today, the diverse applications of nanotechnology research and the ongoing trend of shrinking feature sizes in the semiconductor industry demand precise positioning at the nanometer level more than ever before.</p> </div> </div> </div></div> </section><div class="bde-globalblock-6571-130 bde-globalblock"> <div class='breakdance'><section class="bde-section-6743-100-6743-1 bde-section s-breadcrumb bde-section-6743-100"> <div class="section-container"><nav class="bde-div-6743-174-6743-1 bde-div breadcrumb bde-div-6743-174"> <a class="bde-text-link-6743-175-6743-1 bde-text-link bde-text-link-6743-175 breakdance-link" href="https://raith.com/" target="_self" data-type="url"> RAITH </a><div class="bde-icon-6743-205-6743-1 bde-icon bc-sep bde-icon-6743-205"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-177-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-177"> Technologies </div><div class="bde-icon-6743-206-6743-1 bde-icon bc-sep bde-icon-6743-206"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-179-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-179"> UltraPositioning </div> </nav></div> </section></div> </div><main class="bde-themeless-template-content-area-6571-107 bde-themeless-template-content-area"> <div class='breakdance'><section id="introduction" class="bde-section-6367-100 bde-section s-introduction"> <div class="section-container"><div class="bde-columns-6367-101 bde-columns columns-25-75"><div class="bde-column-6367-102 bde-column column-25"> <div class="bde-text-6367-103 bde-text TxColorGray"> Introduction </div> </div><div class="bde-column-6367-104 bde-column columns-75"> <div class="bde-text-6367-105 bde-text"> Most nanofabrication or nanoanalytic applications need to be able to blindly center the points of interest within one write field / field of view. And due to the typically high zoom values it is necessary to address nanopositioning with a few nm accuracy even over large distances. Different measures, always based on the RAITH laser interferometer stage technology, ensure this on our systems. </div> </div></div></div> </section><section class="bde-section-6367-112 bde-section s-accordioncolumnlocations"> <div class="section-container"><div class="bde-text-6367-113 bde-text"> Meeting nanofabrication’s <br>toughest demands </div><div class="bde-columns-6367-114 bde-columns columns-25-75"><div class="bde-column-6367-115 bde-column column-25"> <h2 class="bde-heading-6367-207 bde-heading TxColorGray"> Key features </h2> </div><div class="bde-column-6367-117 bde-column column-75"> <div class="bde-accordion-6367-118 bde-accordion adv-accordion-large-title"><div class="bde-accordion__content-wrapper-6367-119 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-119" aria-controls="accordion-panel-119" aria-expanded="false"> <span class="bde-accordion__title" >Highest precision</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-119" aria-labelledby="accordion-button-119" hidden> <div class="bde-text-6367-120 bde-text content-width-95"> The sample stage position is determined using displacement interferometers utilizing a highly stabilized helium-neon laser with ≤1 nm resolution. The system incorporates various methods to enhance accuracy and reduce error sources. Additionally, design and materials are optimized to minimize magnetic field influence. </div> </div> </div><div class="bde-accordion__content-wrapper-6367-121 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-121" aria-controls="accordion-panel-121" aria-expanded="false"> <span class="bde-accordion__title" >Motion control system</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-121" aria-labelledby="accordion-button-121" hidden> <div class="bde-text-6367-122 bde-text content-width-95"> A specialized motion control system with direct laser interferometer feedback processing within the motion control loop allows for immediate correction of position deviations during movement to the target position and ensures position stability throughout the application process. </div> </div> </div><div class="bde-accordion__content-wrapper-6367-123 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-123" aria-controls="accordion-panel-123" aria-expanded="false"> <span class="bde-accordion__title" >Hybrid positioning solution</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-123" aria-labelledby="accordion-button-123" hidden> <div class="bde-text-6367-124 bde-text content-width-95"> <br>The positioning is performed by a combination of different displacement technologies for long strokes and ultra-fine positioning. Together, they are able to fully correct the position deviation and achieve sample-to-particle beam offset errors in the nanometer range. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-6367-125 bde-section s-benfits3col"> <div class="section-container"><div class="bde-text-6367-126 bde-text TxColorGray"> Benefits for applications </div><h2 class="bde-heading-6367-127 bde-heading content-width75-desktop"> Mastering nanopositioning with accuracy and flexibility </h2><div class="bde-columns-6367-128 bde-columns"><div class="bde-column-6367-129 bde-column"> <div class="bde-grid-6367-130 bde-grid"> <div class="bde-div-6367-131 bde-div tile-minimal"> <div class="bde-div-6367-132 bde-div tile-minimal__inner"> <h3 class="bde-heading-6367-133 bde-heading"> Exact placement to the point of interest </h3><div class="bde-text-6367-134 bde-text"> The precision and resolution of the interferometric measurement, coupled with the hybrid positioning system’s capabilities, guarantee precise positioning from increments as small as a few nanometers to the scale of wafers. </div> </div> </div><div class="bde-div-6367-135 bde-div tile-minimal"> <div class="bde-div-6367-136 bde-div tile-minimal__inner"> <h3 class="bde-heading-6367-137 bde-heading"> Precise stitching and overlay for large-area applications </h3><div class="bde-text-6367-138 bde-text"> Accurate high-resolution displacement correction capabilities and exact alignments ensure seamless stitching of individual write or scan fields and overlay precision in the nanometer range. </div> </div> </div><div class="bde-div-6367-139 bde-div tile-minimal"> <div class="bde-div-6367-140 bde-div tile-minimal__inner"> <h3 class="bde-heading-6367-141 bde-heading"> Stacked 3D SEM <br>imaging </h3><div class="bde-text-6367-142 bde-text"> The recombining of chip layers through the stacking of several high-resolution large-area image mosaics in Reverse Engineering applications is enabled, even for state-of-the-art technology nodes, due to the high absolute accuracy over the entire travel range. </div> </div> </div><div class="bde-div-6367-143 bde-div tile-minimal"> <div class="bde-div-6367-144 bde-div tile-minimal__inner"> <h3 class="bde-heading-6367-145 bde-heading"> High position stability </h3><div class="bde-text-6367-146 bde-text"> As position deviations are permanently tracked and corrected, mechanical drift and other disturbances are significantly reduced for higher stability during the application. </div> </div> </div><div class="bde-div-6367-147 bde-div tile-minimal"> <div class="bde-div-6367-148 bde-div tile-minimal__inner"> <h3 class="bde-heading-6367-149 bde-heading"> Quick and easy <br>calibration </h3><div class="bde-text-6367-150 bde-text"> The highly precise laser interferometer stage can be used as an intrinsic alignment and calibration reference, enabling quick and easy calibration with (semi)automatic routines. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-6367-151 bde-section s-technologyexplanation"> <div class="section-container"><div class="bde-text-6367-152 bde-text TxColorGray"> Technical details </div><h2 class="bde-heading-6367-153 bde-heading"> UltraPositioning is based on our laser interferometer stages </h2><div class="bde-columns-6367-154 bde-columns"><div class="bde-column-6367-155 bde-column"> <h3 class="bde-heading-6367-156 bde-heading"> Measurement system and setup </h3><div class="bde-rich-text-6367-157 bde-rich-text breakdance-rich-text-styles"> <p>We utilize a double-pass displacement measuring interferometer for each horizontal stage axis, employing a high-precision L-shaped plan mirror setup positioned atop the stage at sample level. This setup serves as a reliable reference for straightness and squareness.</p> <p>Laser interferometry capitalizes on the interference of laser light. A monochromatic laser beam is split by a semi-transparent mirror into a measurement arm and a reference arm. While the reference beam reflects off a fixed mirror, the measurement beam reflects twice off a moving mirror on the stage. Interference occurs when the beams recombine, detected by optical sensors. Signal analysis determines the measurement mirror’s displacement.</p> <p>This measurement is traceable to the laser wavelength, offering an optical resolution of lambda fourths (approximately 158 nm) before further interpolation. This intrinsic resolution is 12-120 times finer than the typical grating pitch of optical linear encoder scales.</p> <p>Frequency stabilization of the laser ensures long-term stability and measurement accuracy. Conducting measurements within the vacuum chamber eliminates typical errors introduced by air refractive index changes in interferometric measurements.</p> <p>Unlike setups with linear encoder scales, our interferometer-based configuration is designed to measure both lateral displacement axes in the sample plane, minimizing or eliminating Abbe offsets. This setup detects and corrects runout on one axis and position cross-talk between both axes, while reducing typical Abbe errors.</p> </div> </div><div class="bde-column-6367-158 bde-column"> <div class="bde-image-6367-189 bde-image"> <figure class="breakdance-image breakdance-image--10866"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201031%20756'%3E%3C/svg%3E" width="1031" height="756" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details.jpg 1031w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-300x220.jpg 300w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-1024x751.jpg 1024w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-768x563.jpg 768w" data-lazy-sizes="(max-width: 1031px) 100vw, 1031px" data-lazy-src="https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details.jpg"><noscript><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details.jpg" width="1031" height="756" srcset="https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details.jpg 1031w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-300x220.jpg 300w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-1024x751.jpg 1024w, https://raith.com/wp-content/uploads/2024/05/raith-ultra-positioning-technical-details-768x563.jpg 768w" sizes="(max-width: 1031px) 100vw, 1031px"></noscript></div> </div></figure> </div> </div></div></div> </section><section class="bde-section-6367-180 bde-section s-technologyexplanation"> <div class="section-container"><div class="bde-columns-6367-183 bde-columns"><div class="bde-column-6367-184 bde-column"> <h3 class="bde-heading-6367-185 bde-heading"> Positioning unit </h3><div class="bde-rich-text-6367-186 bde-rich-text breakdance-rich-text-styles"> <div class="flex-shrink-0 flex flex-col relative items-end"> <div> <div class="pt-0.5 juice:pt-0"> <div class="gizmo-bot-avatar flex h-6 w-6 items-center justify-center overflow-hidden rounded-full juice:h-8 juice:w-8"> <div class="relative p-1 rounded-sm flex items-center justify-center bg-token-main-surface-primary text-token-text-primary h-8 w-8">The interferometer signals are directly processed and interpolated in the motion controller, providing high update rates and serving as feedback for the position control loop.</div> </div> </div> </div> </div> <div class="group/conversation-turn relative flex w-full min-w-0 flex-col agent-turn"> <div class="flex-col gap-1 md:gap-3"> <div class="flex flex-grow flex-col max-w-full"> <div class="min-h-[20px] text-message flex flex-col items-start whitespace-pre-wrap break-words [.text-message+&]:mt-5 juice:w-full juice:items-end overflow-x-auto gap-2" dir="auto" data-message-author-role="assistant" data-message-id="d2c0b08d-108e-4121-b893-ee80d6d28b65"> <div class="flex w-full flex-col gap-1 juice:empty:hidden juice:first:pt-[3px]"> <div class="markdown prose w-full break-words dark:prose-invert light"> <p>The majority of RAITH laser interferometer stages, integrated into our nanofabrication systems, feature a unique drive chain capable of completely correcting position errors through ultra-precise mechanical displacements. This capability is achieved through a combination of DC motors for long-stroke positioning and piezo actuators for ultra-fine positioning.</p> <p>In some RAITH systems, fine positioning is achieved via beam deflection through a direct interface between the motion controller and scan generator. While this method offers faster settling, the purely mechanical correction is more versatile and does not require adjustment, particularly when significant changes are made to column operation parameters. Some RAITH systems offer a combination of both methods for enhanced flexibility.</p> </div> </div> </div> </div> </div> </div> </div> </div><div class="bde-column-6367-187 bde-column"> </div></div></div> </section><section class="bde-section-6367-205 bde-section"> <div class="section-container"><h2 class="bde-heading-6367-206 bde-heading"> Experience UltraPositioning </h2></div> </section></div> </main><div class="bde-globalblock-6571-117 bde-globalblock"> <div class='breakdance'><section class="bde-section-6647-116-6647-1 bde-section s-raithsystems bde-section-6647-116"> <div class="section-container"><div class="bde-post-loop-6647-121-6647-1 bde-post-loop bde-post-loop-6647-121"> <div class="ee-posts ee-posts-grid"> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-9039-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/ebpg/" target="_self" 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</div></figure> </div><div class="bde-div-6596-102-9039-6596-1 bde-div s-raithsystems__item-content bde-div-6596-102"> <div class="bde-text-6596-103-9039-6596-1 bde-text bde-text-6596-103"> EBPG </div><div class="bde-text-6596-104-9039-6596-1 bde-text content-width-95 bde-text-6596-104"> Highest throughput, automation, and precision </div> </div> </a></div> </article> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-9016-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/voyager/" target="_self" data-type="url"> <div class="bde-image-6596-101-9016-6596-1 bde-image bde-image-6596-101"> <figure class="breakdance-image breakdance-image--12211"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" 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https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-2048x1787.jpg 2048w" data-lazy-sizes="(max-width: 2800px) 100vw, 2800px" alt="Raith's Multi Ion Species FIB-SEM product Velion tailored for nanoscale science and engineering applications." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-768x670.jpg?ver=1728048687"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-768x670.jpg?ver=1728048687" width="768" height="670" srcset="https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled.jpg 2800w, https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-300x262.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-1024x893.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-768x670.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-velion-scaled-1536x1340.jpg 1536w, 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class="breakdance-image breakdance-image--12203"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20768%20670'%3E%3C/svg%3E" width="768" height="670" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled.jpg 2800w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-300x262.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1024x893.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1536x1340.jpg 1536w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-2048x1787.jpg 2048w" data-lazy-sizes="(max-width: 2800px) 100vw, 2800px" alt="Raith's SIMS Nanoanalytics and Ion Imaging product Ionmaster is perfect for the highest resolution SIMS analysis." data-lazy-src="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg?ver=1728048914"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg?ver=1728048914" width="768" height="670" srcset="https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled.jpg 2800w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-300x262.jpg 300w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1024x893.jpg 1024w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-768x670.jpg 768w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-1536x1340.jpg 1536w, https://raith.com/wp-content/uploads/2024/07/raith-ionmaster-scaled-2048x1787.jpg 2048w" sizes="(max-width: 2800px) 100vw, 2800px" alt="Raith's SIMS Nanoanalytics and Ion Imaging product Ionmaster is perfect for the highest resolution SIMS analysis."></noscript></div> </div></figure> </div><div class="bde-div-6596-102-9036-6596-1 bde-div s-raithsystems__item-content bde-div-6596-102"> <div class="bde-text-6596-103-9036-6596-1 bde-text bde-text-6596-103"> IONMASTER </div><div class="bde-text-6596-104-9036-6596-1 bde-text content-width-95 bde-text-6596-104"> SIMS nanoanalytics and ion imaging </div> </div> </a></div> </article> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-6673-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/chipscanner/" target="_self" data-type="url"> <div class="bde-image-6596-101-6673-6596-1 bde-image bde-image-6596-101"> <figure class="breakdance-image breakdance-image--12213"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" 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