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OASIS Repository@POSTECHLIBRARY: Room-temperature ohmic contact on AlGaN/GaN heterostructure with surface treatment using N-2 inductively coupled plasma
<!DOCTYPE html> <html lang="ko"> <head> <title>OASIS Repository@POSTECHLIBRARY: Room-temperature ohmic contact on AlGaN/GaN heterostructure with surface treatment using N-2 inductively coupled plasma</title> <meta http-equiv="Content-Type" content="text/html; charset=UTF-8" /> <meta name="Generator" content="DSpace 5.5" /> <meta name="viewport" content="width=device-width, initial-scale=1.0"> <meta http-equiv="X-UA-Compatible" content="IE=edge"> <meta name="description" content="Postech OASIS Repository" /> <meta name="keywords" content="오아시스,레포지토리,리포지터리,저장소,포스텍,박태준학술정보관,포항공과대학교,포항공대,POSTECH,Pohang University of Science and Technology,도서관,IR,연구업적,학술실적,연구성과,dspace" /> <link rel="shortcut icon" href="/favicon.ico" type="image/x-icon"/> <link rel="search" type="application/opensearchdescription+xml" href="/open-search/description.xml" title="DSpace" /> <link rel="schema.DCTERMS" href="http://purl.org/dc/terms/" /> <link rel="schema.DC" href="http://purl.org/dc/elements/1.1/" /> <link rel="schema.OAK" href="http://www.oak.go.kr/terms/" /> <meta name="OAK.author" content="Jeon, CM" scheme="OAK.AUTHOR" /> <meta name="OAK.author" content="Jang, HW" scheme="OAK.AUTHOR" /> <meta name="OAK.author" content="Choi, KJ" scheme="OAK.AUTHOR" /> <meta name="OAK.author" content="Bae, SB" scheme="OAK.AUTHOR" /> <meta name="OAK.author" content="Lee, JH" scheme="OAK.AUTHOR" /> <meta name="OAK.author" content="Lee, JL" scheme="OAK.AUTHOR" /> <meta name="DCTERMS.dateAccepted" content="2015-06-25T01:50:09Z" scheme="DCTERMS.W3CDTF" /> <meta name="DCTERMS.available" content="2015-06-25T01:50:09Z" scheme="DCTERMS.W3CDTF" /> <meta name="DCTERMS.created" content="2009-02-28" scheme="DCTERMS.W3CDTF" /> <meta name="DCTERMS.issued" content="2002-07" scheme="DCTERMS.W3CDTF" /> <meta name="OAK.identifier.issn" content="1099-0062" scheme="OAK.ISSN" /> <meta name="DC.identifier" content="2015-OAK-0000002672" xml:lang="en_US" /> <meta name="DC.identifier" content="https://oasis.postech.ac.kr/handle/2014.oak/10104" scheme="DCTERMS.URI" /> <meta name="DCTERMS.abstract" content="Room-temperature Ti/Al ohmic contact on undoped AlGaN/GaN heterostructure was demonstrated through surface treatment using N-2 inductively coupled plasma. The specific contact resistivity was reduced from Schottky behavior to 1.02 x 10(-4) Omega cm(2) by the treatment. Increases in Ga-N binding energy and production of metallic Ga and Al conducting layers were found at the treated surface. This indicates that N vacancies, acting as donors for electrons, were produced at the treated surface, resulting in a shift of the Fermi level to near the conduction band, via the formation of ohmic contact. (C) 2002 The Electrochemical Society." /> <meta name="DC.description" content="open" xml:lang="en_US" /> <meta name="DC.language" content="English" /> <meta name="DC.publisher" content="ELECTROCHEMICAL SOC INC" /> <meta name="DC.relation" content="ELECTROCHEMICAL AND SOLID STATE LETTERS" /> <meta name="DC.rights" content="BY_NC_ND" xml:lang="en_US" /> <meta name="DC.rights" content="http://creativecommons.org/licenses/by-nc-nd/2.0/kr" xml:lang="en_US" scheme="DCTERMS.URI" /> <meta name="DC.title" content="Room-temperature ohmic contact on AlGaN/GaN heterostructure with surface treatment using N-2 inductively coupled plasma" /> <meta name="DC.type" content="Article" /> <meta name="DC.contributor" content="신소재공학과" xml:lang="en_US" /> <meta name="DC.identifier" content="10.1149/1.1479296" /> <meta name="DC.relation" content="5" xml:lang="en_US" /> <meta name="DC.relation" content="7" xml:lang="en_US" /> <meta name="DC.contributor" content="10105416" xml:lang="en_US" /> <meta name="DC.relation" content="ELECTROCHEMICAL AND SOLID STATE LETTERS" xml:lang="en_US" /> <meta name="DC.relation" content="SCI급, SCOPUS 등재논문" xml:lang="en_US" /> <meta name="DC.relation" content="SCI" xml:lang="en_US" /> <meta name="DC.identifier" content="2739" /> <meta name="DC.type" content="ART" /> <meta name="DC.identifier" content="ELECTROCHEMICAL AND SOLID STATE LETTERS, v.5, no.7, pp.G45 - G47" /> <meta name="DC.identifier" content="000175932300013" /> <meta name="DC.date" content="2019-01-01" scheme="DCTERMS.W3CDTF" /> <meta name="OAK.relation.page" content="G47" scheme="OAK.PAGE" /> <meta name="OAK.relation.issue" content="7" scheme="OAK.ISSUE" /> <meta name="OAK.relation.page" content="G45" scheme="OAK.PAGE" /> <meta name="OAK.relation.journal" content="ELECTROCHEMICAL AND SOLID STATE LETTERS" scheme="OAK.JOURNAL" /> <meta name="OAK.relation.volume" content="5" scheme="OAK.VOLUME" /> <meta name="DC.contributor" content="Lee, JL" /> <meta name="DC.identifier" content="2-s2.0-0036644172" /> <meta name="DC.description" content="1" /> <meta name="DC.description" content="1" /> <meta name="DC.description" content="1" /> <meta name="DC.description" content="1" xml:lang="*" /> <meta name="DC.date" content="2018-10-274" xml:lang="*" scheme="DCTERMS.W3CDTF" /> <meta name="DC.type" content="Article" /> <meta name="DC.subject" content="RESISTANCE" /> <meta name="DC.subject" content="NITRIDES" /> <meta name="DC.subject" content="GALLIUM" /> <meta name="DC.subject" content="HFETS" /> <meta name="DC.subject" content="GAN" /> <meta name="DC.relation" content="Electrochemistry" /> <meta name="DC.relation" content="Materials Science, Multidisciplinary" /> <meta name="DC.description" content="scie" /> <meta name="DC.description" content="scopus" /> <meta name="DC.relation" content="Electrochemistry" /> <meta name="DC.relation" content="Materials Science" /> <meta name="citation_keywords" content="Article" /> <meta name="citation_title" content="Room-temperature ohmic contact on AlGaN/GaN heterostructure with surface treatment using N-2 inductively coupled plasma" /> <meta name="citation_issn" content="1099-0062" /> <meta name="citation_publisher" content="ELECTROCHEMICAL SOC INC" /> <meta name="citation_author" content="Jeon, CM" /> <meta name="citation_author" content="Jang, HW" /> <meta name="citation_author" content="Choi, KJ" /> <meta name="citation_author" content="Bae, SB" /> <meta name="citation_author" content="Lee, JH" /> <meta name="citation_author" content="Lee, JL" /> <meta name="citation_pdf_url" content="https://oasis.postech.ac.kr/bitstream/2014.oak/10104/1/OAIR000833.pdf" /> <meta name="citation_date" content="2002-07" /> <meta name="citation_abstract_html_url" content="https://oasis.postech.ac.kr/handle/2014.oak/10104" /> <link rel="stylesheet" href="/css/bootstrap.min.css" defer /> <link rel="stylesheet" href="/css/layout.css" async /> <link rel="stylesheet" href="/css/mquery.css" defer /> <link rel="stylesheet" href="/css/slidebars.css" defer /> <!-- Slidebars CSS --> <link rel="stylesheet" href="/css/owl.carousel.css" defer /> <!-- Owl Carousel Assets --> <link rel="stylesheet" href="/css/owl.theme.css" defer /> <link rel="stylesheet" href="/css/bootstrap-partof.css" defer /> <script src="/js/jquery-1.9.1.min.js"></script> <script src="/js/jquery-ui.js"></script> <script src="/js/bootstrap.min.js"></script> <script src="/js/owl.carousel.min.js"></script> <script src="/js/common.js" defer></script> <script src="/utils.js" defer></script> <script src="/static/js/holder.js" defer></script> <script src="/static/js/choice-support.js" defer></script> <script src="/js/ms-clarity.js"></script> <script async src="https://www.googletagmanager.com/gtag/js?id=G-B9EHYYGM78"></script> <script> window.dataLayer = window.dataLayer || []; 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The specific contact resistivity was reduced from Schottky behavior to 1.02 x 10(-4) Omega cm(2) by the treatment. Increases in Ga-N binding energy and production of metallic Ga and Al conducting layers were found at the treated surface. This indicates that N vacancies, acting as donors for electrons, were produced at the treated surface, resulting in a shift of the Fermi level to near the conduction band, via the formation of ohmic contact. (C) 2002 The Electrochemical Society.</dd></dl> <dl><dt>URI</dt><dd><a href="https://oasis.postech.ac.kr/handle/2014.oak/10104" class="link_type">https://oasis.postech.ac.kr/handle/2014.oak/10104</a></dd></dl> <dl><dt>DOI</dt><dd><a href="http://dx.doi.org/10.1149/1.1479296">10.1149/1.1479296</a></dd></dl> <dl><dt>ISSN</dt><dd>1099-0062</dd></dl> <dl><dt>Article Type</dt><dd>Article</dd></dl> <dl><dt>Citation</dt><dd>ELECTROCHEMICAL AND SOLID STATE LETTERS, vol. 5, no. 7, page. G45 - G47, 2002-07</dd></dl> <dl class="file_item_dl"><dt>Files in This Item:</dt> <dd class="file_download"> <ul> <li><a target="_blank" href="/bitstream/2014.oak/10104/1/OAIR000833.pdf" class="file_text">OAIR000833.pdf</a><a target="_blank" href="/bitstream/2014.oak/10104/1/OAIR000833.pdf" class="download_right">1.17 kB</a></li></ul> </dd> </dl> </div> <div class="record_bt_box"> <a href="/handle/2014.oak/10104?mode=full">Show full item record</a> </div> <div class="al_right"> </div> <div class="sns_wrap"> <div class="sns_box"> <p class="qr_box"><img src="https://api.qrserver.com/v1/create-qr-code/?size=66x66&data=https://oasis.postech.ac.kr/handle/2014.oak/10104" alt="qr_code"></p> <div class="sns_inner"> <ul> <li> <p><a href="http://www.mendeley.com/import/?url=https://oasis.postech.ac.kr/handle/2014.oak/10104" target="_blank"><img src="/image/common/mendeley_icon.gif" alt="mendeley" /></a></p> <p class="twitter_box"> <a href="https://twitter.com/share" class="tweet_bt twitter-share-button" data-lang="en" data-size="large" data-dnt="true">트윗하기</a> <script> !function(d, s, id) { var js, fjs = d.getElementsByTagName(s)[0]; if (!d.getElementById(id)) { js = d.createElement(s); js.id = id; js.src = "//platform.twitter.com/widgets.js"; fjs.parentNode.insertBefore(js, fjs); } }(document, "script", "twitter-wjs"); </script> </p> </li> <li class="facebook_li"> <span id="fb-root"></span> <script> (function(d, s, id) { var js, fjs = d.getElementsByTagName(s)[0]; if (d.getElementById(id)) return; js = d.createElement(s); js.id = id; js.src = "//connect.facebook.net/ko_KR/all.js#xfbml=1"; fjs.parentNode.insertBefore(js, fjs); }(document, 'script', 'facebook-jssdk')); </script> <span class="fb-like" data-send="true" data-layout="standard" data-width="450" data-show-faces="false" data-font="verdana"></span> </li> </ul> </div> </div><!-- sns_box : e--> <p class="sns_text"> <span> Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.</span> </p> </div> </div> </div> <!-- sub_contents : e --><!-- Footer 에서 처리 --> <div class="sub_right_box"> <div class="w_cc"> <h4 class="widget_title">Communities & Collection</h4> <ul> <li><a href="/handle/2014.oak/403" class="cc_item">Department of Materials Science & Engineering (신소재공학과)</a> <ul> <li><a href="/handle/2014.oak/404">1. 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