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style="padding-right:1em">日期：2024-10-31</span> <span id="hits">阅读：322</span> </div> <div class="introduce">核心提示：引用本文：闫龙, 韩冰, 赵项杰, 等.MicroLED全彩色微显示技术研究进展[J].南通大学学报(自然科学版),2024,23(3):1-9.Doi:10.1219</div><div id="content"><div class="content" id="article"><p> </p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/31/163203471.png" width="668" height="165" alt="" /></p> <p><b>引用本文：</b>闫龙, 韩冰, 赵项杰, 等.MicroLED全彩色微显示技术研究进展[J].南通大学学报(自然科学版),2024,23(3):1-9.</p> <p>Doi: 10.12194/j.ntu.20240327001</p> <p><b>研究背景</b></p> <p>随着可穿戴器件、增强现实、混合现实等新型显示产品的广泛应用和普及，新型显示技术在微小器件尺寸、高分辨率、高稳定性等性能方面又提出了更高的性能需求。基于微型发光二极管(Micro-light-emiting-diode, MicroLED)的微型显示器件具有低功耗、高稳定、长寿命和响应时间短等突出特征，其相关技术和产品近年来已被广泛应用于VR/AR眼镜、微投影设备等。然而，目前MicroLED的全彩化问题是制约其进行商业化推广的关键技术难点之一。<b>本文综述了实现MicroLED全彩色微显示屏的主流色转化技术方案</b>，<b>并梳理了近年来国内外在AR/MR等终端应用中MicroLED全彩色微显示的代表性进展</b>。</p> <p>色转换技术是一种不通过器件转移过程,即通过原位单片集成技术实现MicroLED全彩色微显示的技术方法。其技术方案主要是使用紫外光或蓝光MicroLED晶圆作为显示阵列光源，将彩色荧光粉量子点或其他微纳米结构加工制备在MicroLED蓝/紫光光源上，利用光致荧光发光实现蓝光一红光、蓝光一绿光等发光颜色转换,从而实现RGB三色高密度集成的阵列发光器件。<b>按照实现色转换的方式可将色转换技术分为荧光粉、量子点、超表面三条技术路线</b>。</p> <p>荧光粉具有高热稳定性、高化学稳定性(耐湿性)和稳定的量子产率特点，通过在发光层上设计和制备可旋转的滤色器结构是早期实现全彩色显示的技术方案之一，该方法只需制备相应的RGB像元滤色器，制备简单、成本低。然而，随着MicroLED像元尺寸逐渐降低至10 μm以下，对色转换材料的颗粒尺寸、光量子效率提出了更高的要求。但纳米尺寸的荧光粉往往会存在荧光淬灭现象，无法解决MicroLED高密度集成、高亮度发光、高光效转化等问题。</p> <p>量子点是一类低维半导体材料，具有优异的光致荧光产率，通过调节量子点的尺寸就可以控制其发光颜色。此外，它还具有宽吸收、窄发射、发光可调谐等优势和特点。2023年，湖南大学李梓维课题组研制了量子点光刻胶，结合芯片界面硅烷耦合剂预处理工艺，利用光刻工艺成功制备了9.91 mm (0.39英寸)的MicroLED全彩色微显示器。这一方法充分发挥了传统光刻技术和共价键键合技术协同效应，该器件突破了5 mm以下微小像元的高密度集成难题，为高效制备MicroLED全彩色器件提供了可行途径。</p> <p>超表面是一种人造纳米结构经过周期规律排列后形成的光学结构层，通过纳米结构与远场光的自旋轨道耦合效应，实现入射波在亚波长尺度上的振幅、偏振和相位调制，将其设计和制备在MicroLED阵列表面可以实现颜色转化，并且可以同时对器件的发光角和偏振等特性实现可控调制。这种技术可以总结为微纳光学结构耦合实现了MicroLED光发射信息的空间光场调制。</p> <p>在器件应用上，MicroLED显示拥有更快的响应速度、更大的可视角、更宽的显示色域、超高的发光亮度和更长的器件使用寿命。进入21世纪以来，国内外企业不断加大对MicroLED的研发投入，近年来该技术已取得诸多创新成果。芯元基攻克了像素间距7.5 mm MicroLED芯片的阵列键合工艺，实现了9.91 mm (0.39英寸)单色MicroLED微显示屏。JBD开发AIGalnP红光MicroLED，突破了100万nit大关，刷新业界记录。诺视科技报道了先键合后刻蚀的垂直堆叠技术，实现3 mm (0.12英寸)MicroLED全彩色动态图像显示，最小像元为1.5 mm。但是如今受制于芯片良率、巨量转移等因素，MicroLED的制造成本仍然居高不下，未来仍需进一步的技术突破以实现“提效降本”。</p> <p>总的来说，本文对MicroLED全彩化显示技术所使用的色转换技术进行了分类总结，进一步对比分析了相关技术的优缺点，探讨了相关技术在推动新型显示产业发展的重要意义。可以预见，MicroLED技术将在未来显示行业中发挥关键作用,为用户带来更加卓越的视觉体验，并推动相关领域的持续发展，成为下一代显示技术的主流选择。</p> <p> <b>部分图表</b></p> <p> <img src="http://www.casmita.com/file/upload/202410/31/163422151.png" width="668" height="326" alt="" /><span><br /> </span></p> <p align="center">图1 荧光粉色转换MicroLED显示器的结构示意图（图片来自于文中参考文献[7]）</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202410/31/163434521.png" width="668" height="321" alt="" /></p> <p align="center">图2 基于光刻技术的全彩MicroLED示意图</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202410/31/163443851.png" width="668" height="189" alt="" /></p> <p align="center">图3 超表面控制LED发光示意图（图片来自于文中参考文献[20]）</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202410/31/163450641.png" width="668" height="350" alt="" /></p> <p align="center">图4 MicroLED微显示器件研发进展</p> <p align="center"><img src="http://www.casmita.com/file/upload/202410/31/163523571.jpg" width="300" height="370" alt="" /></p> <p> <b>李梓维 | Li Ziwei</b><b>教授，博士生导师</b></p> <p>李梓维，湖南大学材料科学与工程学院教授，博士，博士生导师，现担任信息功能材料系系主任、湖南光电集成创新研究院副院长，从事低维半导体、新型光电器件研究。曾荣获教育部高等学校科学研究优秀成果（科学技术）二等奖、科技部颠覆性技术大赛全国优胜奖、中国材料研究学会新材料创新创业型青年学者、湖南省湖湘青年科技人才、北京大学学生五四奖章、湖南大学优秀教师新人奖等奖励和荣誉。</p> <p>作为项目负责人或子任务负责人主持了科技部“纳米前沿”重点研发计划，国家自然科学基金重大研究计划、面上项目及青年基金，湖南省自然科学基金优秀青年基金，中国高校产学研创新基金等10余项科研项目。发展了钙钛矿量子点的高稳定、低成本制造技术，首次实现了基于量子点光刻工艺集成的MicroLED全彩色微显示屏，显示屏发光亮度超过百万nit，创造了行业记录，支撑军民两用可穿戴微显示装备的国产化发展，相关专利技术已完成成果转化，孵化了科技创新公司；提出了手性金属纳米结构增强低维半导体光与物质相互作用机制理念，较早地实现了偏振响应的被动发光显示器件和有源光电探测器，相关技术支撑了国家重点研发计划、基金委重大项目的论证。</p> <p>担任<i>Fro<em></em>ntiers of Physics</i>、《湖南大学学报（自然科学版）》青年编委，湖南省工信厅和科技厅新型显示产业链图谱专家，国家级人才项目会评专家，国家重点研发计划评审专家，国家级和省部级创新创业项目评审专家，在<i>Adv. Mater.</i>、<i>Adv. Sci.</i>、<i>ACS Nan</i>o、<i>Innovation</i>等SCI国际期刊发表学术论文50余篇，申请发明专利20项，授权10项。</p> <p> （来源： <a>南通大学学报自然科学版</a> ）</p></div> </div> <div class="award"><div onclick="Go('http://www.casmita.com/member/award.php?mid=21&itemid=17048');">打赏</div></div><div id="comment" style="display:;"> <div class="block-head"><a href="http://www.casmita.com/comment/index.php?mid=21&itemid=17048"><b id="comment_count" class="px16 f_red">0</b> 条评论</a></div> <div id="comment_main"><div></div></div> </div> <script type="text/javascript" src="http://www.casmita.com/file/script/comment.js"></script> <div class="related"> <a href="http://www.casmita.com/news/search.php?kw="></a><a href="http://www.casmita.com/news/index.php?catid=4"></a> <div class="bui-box single-mode"> <div class="single-mode-rbox"> <div class="single-mode-rbox-inner"> <div class="title-box"><a href="http://www.casmita.com/news/202411/22/17231.html" target="_blank" class="link">爱芯元智与紫光展锐达成战略合作，全面加速边端侧人工智能生态建设</a></div> <div class="bui-box 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