Entegris Introduces Innovative Solution for Chemical Delivery Systems Critical to Semiconductor Industry

<!DOCTYPE html> <html lang="en" xmlns:wb="//open.weibo.com/wb"> <head> <meta charset="utf-8"> <title>Entegris Introduces Innovative Solution for Chemical Delivery Systems Critical to Semiconductor Industry - Business Wire China</title> <meta name="viewport" content="width=device-width, initial-scale=1.0"> <meta name="description" content="BILLERICA, Mass.--(BUSINESS WIRE)--Entegris, Inc., a world-class supplier of advanced materials and process solutions for the semiconductor and"> <meta name="keywrods" content=""> <meta name="author" content="Business Wire China"> <link href="/css/bootstrap.css" rel="stylesheet"> <link href="/css/main.css?ver=20220804" rel="stylesheet"> <link href="/css/bootstrap-responsive.css" rel="stylesheet"> <script type="text/javascript" src="/js/jquery.min.js"></script> <script type="text/javascript" src="/js/bootstrap.js"></script> <script type="text/javascript" src="/js/main.js"></script>  <script src="//tjs.sjs.sinajs.cn/open/api/js/wb.js" type="text/javascript" charset="utf-8"></script> </head> <body>  <div class="header"> <div class="wrap"> <div class="container"> <div class="full_980 relative">  <div class="top_panel visible-desktop"> <a href="/zh">简体中文</a> | <a href="/hk">繁體中文</a> | <a href="/en">English</a> <div class="globalsite"><select id="globalsite" class="languages"><option value="0">Business Wire Global sites</option> <option value="1">Business Wire Global</option><option value="3">UK/Ireland</option><option value="4">Deutschland</option><option value="5">France</option><option value="6">Italy</option><option value="7">Japan</option> </select> </div> </div> <div class="logo"><a href="/en"><img src="/images/bwlogo_webmain_china.png" alt="Business Wire China" width="360" height="80"/></a></div> <div class="clear"></div> <div class="navigation"> <ul class="sf-menu"> <li class="current"><a href="/en">Home</a> </li> <li><a href="/en/news/index.html">News</a> </li> <li><a href="/en/events/index.html">Events</a> </li> <li><a href="/en/medias/index.html">Media Services</a> </li> <li><a href="/en/about/index.html">About Us</a> <ul> <li><a href="/en/about/contact.html">Contact Us</a></li> </ul> </li> </ul> <div class="clear"></div>  <div class="search_form visible-desktop"> <form action="/en/news/search" method="get"> <input class="inp_search" name="s" type="text" value="Search..." title="Search..." /> <input type="submit" class="search_btn" value=" " /> </form> </div>  </div>  </div> </div> </div> </div>   <div class="page_wrapper"> <div class="wrap"> <div class="container"> <div id="content"> <script src="http://tjs.sjs.sinajs.cn/open/api/js/wb.js?appkey=3616646312" type="text/javascript" charset="utf-8"></script> <script type="text/javascript" src="/js/swfobject.js"></script> <div class="full_980 main_wrap"> <div class="row"> <div class="span9 main_block story"> <p><img src="/files/logos/E/ENTG-logo-Businesswire.jpg" alt="Entegris 2020"></p> <h2 class="storytitle">Entegris Introduces Innovative Solution for Chemical Delivery Systems Critical to Semiconductor Industry</h2> <h3 class='storysubtitle'>The new Electrostatic Dissipative (ESD) system increases safety while reducing defects and yield loss.</h3> <div class="storytimelang"> <span class="time">2020-09-23 16:51</span> <span class="lang"> <ul> <li><a href="/zh/news/44509.html"><img src="/images/zh_cn.png" alt="zh_cn"></a></li> <li><a href="/hk/news/44509.html"><img src="/images/zh_hant.png" alt="zh_hant"></a></li> <li><a href="/en/news/44509.html"><img src="/images/en.png" alt="en"></a></li> </ul> </span> <div class="clear"></div> </div> <ul class="industry-list"> <li><a href="/en/industry/technology.html" class="btn">Technology</a></li> <li><a href="/en/industry/manufacturing.html" class="btn">Manufacturing</a></li> <li><a href="/en/industry/chemical.html" class="btn">Chemical</a></li> </ul> <div class="storycontent"> <div itemprop="articleBody"> <p> BILLERICA, Mass.--(<span itemid="https://www.businesswire.com" itemprop="provider publisher copyrightHolder" itemscope="itemscope" itemtype="https://schema.org/Organization"><span itemprop="name"><a href="https://www.businesswire.com/" itemprop="url" referrerpolicy="unsafe-url" rel="nofollow">BUSINESS WIRE</a></span></span>)--Entegris, Inc., a world-class supplier of advanced materials and process solutions for the semiconductor and other high-technology industries, announced today the introduction of a unique fluid management system that removes electrostatic charge in the chemical delivery systems that are integral to the manufacture of today’s advanced technology chips.</p> <p> Stainless steel fluid management systems traditionally used to transport solvents and other flammable chemicals utilized in semiconductor manufacturing cannot meet today’s increased requirements for ultra low metal impurities. As a result, manufacturers of advanced technology chips are moving away from stainless steel systems to fluoropolymer (PFA) systems. While PFA systems reduce metal contamination introduced by the stainless steel systems, they create a new challenge associated with electrostatic discharge, since PFA is a non-conductive electrical insulator.</p> <p> According to Brett Reichow, vice president of fluid management in Entegris’ Advanced Materials Handling (AMH) division, “The presence of electrostatic charge accumulation in the fluids that flow through the chemical delivery system can not only compromise the fluid handling components in the system from electrostatic discharge events, it can lead to defects on the silicon wafer. Electrostatic discharge can also create unsafe conditions in the semiconductor fabrication process,” he said.</p> <p> Entegris has developed a solution using new materials that has proven successful in reducing the accumulated electrostatic charge in both the fluid flowing through the tubing as well as any charge that might build up outside the tubing. “The PFA tubing of Entegris’ innovative system,” Reichow said, “has conductive stripes on the inside, and the fittings are manufactured from a conductive PFA to create a path to ground when the sealing area contacts the conductive stripes.”</p> <p> According to Bill Shaner, senior vice president of the AMH division, Entegris benefitted from more than three decades of supplying innovative connection technology for high-purity handling markets to develop its solution to ESD, which simultaneously improves safety and reduces the potential for defects. “We have used our proprietary manufacturing equipment and processes to co-extrude ultrapure PFA and conductive PFA to create one single layer. This unique PFA construction results in low metallic contamination, eliminates delamination risk and potential entrapment areas, therefore maintaining high chemical purity. This new solution decreases safety risks and also minimizes the risk of property damage. In addition, because the tubing is translucent, it allows visual inspection of the fluid flowing through the system,” Shaner said.</p> <p> Results from metal extraction testing that Entegris has performed on the new system indicate that it maintains a level of purity similar to the standard PFA tube. Also, a third party testing firm confirmed the satisfactory grounding performance of the new system.</p> <p> “Entegris’ new patent pending ESD system,” Shaner said, “is another key innovation designed to help the microelectronics industry continue progressing toward cleaner chemical delivery systems to meet the needs of advanced process nodes.”</p> <p> <strong>About Entegris</strong></p> <p> Entegris is a world-class supplier of advanced materials and process solutions for the semiconductor and other high-technology industries. Entegris has approximately 5,300 employees throughout its global operations and is ISO 9001 certified. It has manufacturing, customer service, and/or research facilities in the United States, Canada, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea, and Taiwan. Additional information may be found at <a href="https://cts.businesswire.com/ct/CT?id=smartlink&url=http%3A%2F%2Fwww.entegris.com&esheet=52291957&newsitemid=20200922005759&lan=en-US&anchor=www.entegris.com&index=1&md5=bf03e3c738795a89673cc29ed5b1648e" referrerpolicy="unsafe-url" rel="nofollow" shape="rect" target="_blank">www.entegris.com</a>.</p> <p> <img alt="" referrerpolicy="unsafe-url" src="https://cts.businesswire.com/ct/CT?id=bwnews&sty=20200922005759r1&sid=web01&distro=nx&lang=en" style="border:0px;width:0px;height:0px;" /></p> </div> <div> <h2> Contacts</h2> <p> Connie Chandler<br /> +1 978-436-6546<br /> <a href="mailto:connie.chandler@entegris.com" referrerpolicy="unsafe-url" rel="nofollow" shape="rect" target="_blank">connie.chandler@entegris.com</a></p> </div> <div class="story-image"> <img src="/files/news/52291957-1600851254-1.jpg" alt="Entegris' New Innovative ESD Solution (Photo: Business Wire)"/> <p class="caption">Entegris' New Innovative ESD Solution (Photo: Business Wire)</p> </div> </div> <div class="subjects"> <ul class="subject-list"> <li><a href="/en/subject/products-services.html">Products & Services News</a></li> </ul> </div> <div class="clear"></div> <div class="commentbox"> <wb:comments url="auto" border="y" width="auto" skin="blue" appkey="3616646312" ></wb:comments> </div> </div> <div class="span3 sidebar"> <div class="widget"> <h3>Business Wire Weibo</h3> <wb:follow-button uid="2676312451" type="red_2" width="136" height="24" ></wb:follow-button> </div> <div class="widget"> <h3>Industries</h3> <ul class="industry"> <li><a href="/en/industry/corporate-social-responsibility">Corporate Social Responsibility</a></li> <li><a href="/en/industry/manufacturing">Manufacturing</a></li> <li><a href="/en/industry/chemical">Chemical</a></li> <li><a href="/en/industry/health-pharmaceutical">Health and Pharmaceutical</a></li> <li><a href="/en/industry/property">Property</a></li> <li><a href="/en/industry/travel">Travel</a></li> <li><a href="/en/industry/automotive">Automotive</a></li> <li><a href="/en/industry/life-entertainment">Life and Entertainment</a></li> <li><a href="/en/industry/energy-environmental">Energy and Environmental</a></li> <li><a href="/en/industry/retail">Retail</a></li> <li><a href="/en/industry/transportation">Transportation</a></li> <li><a href="/en/industry/business-ecommerce">Business and E-commerce</a></li> <li><a href="/en/industry/communications-media">Communications and Media</a></li> <li><a href="/en/industry/metals-mining">Metals and Mining</a></li> <li><a href="/en/industry/finance">Finance</a></li> <li><a href="/en/industry/technology">Technology</a></li> <li><a href="/en/industry/sports">Sports</a></li> <li><a href="/en/industry/education">Education</a></li> <li><a href="/en/industry/art-culture">Art and Culture</a></li> <li><a href="/en/industry/legal">Legal</a></li> </ul> </div> <div class="widget"> <h3>Latest Releases</h3> <ul class="story"> <li><span class="time">2024-11-22 16:15</span><br/><a href="/en/news/58380.html">SIAL Paris 2024: an Exceptional Edition Celebrating Its 60th Anniversary</a></li> <li><span class="time">2024-11-22 15:36</span><br/><a href="/en/news/58379.html">Seequent and the International Geothermal Association Partner to Unlock Geothermal Energy's Potential for a Sustainable Future</a></li> <li><span class="time">2024-11-22 15:12</span><br/><a href="/en/news/58378.html">Rigaku BioScience Lab Opens in USA</a></li> <li><span class="time">2024-11-22 14:59</span><br/><a href="/en/news/58377.html">PUMA Releases Green Flags: A New Podcast Engaging Gen-Z in Sustainability</a></li> <li><span class="time">2024-11-22 14:50</span><br/><a href="/en/news/58376.html">Moody’s Acquires Numerated Growth Technologies, Expanding Lending Technology Solutions</a></li> </ul> </div> </div> </div> </div> </div> </div> </div> </div>   <div id="footer" class="hidden-phone"> <div class="wrap"> <div class="container"> <div class="full_980 relative">  <a href="#" id="totop_btn" class="visible-desktop visible-tablet"></a>   <div class="footer_top"> <div class="col940"> <div class="row"> <div class="span6"> <h4>Shanghai Office</h4> <p class="foot_home">Rm 1502 Xincheng Mansion, No. 167 Jiangning Rd, Shanghai, China</p> <p class="foot_phone">+86 21 5239 8905</p> <p class="foot_email"><a href="mailto:sh@businesswirechina.com">sh@businesswirechina.com</a></p> </div> <div class="span6"> <h4>Business Wire Hong Kong</h4> <p class="foot_home">51/F Hopewell Centre, 183 Queen's Road East<br/>Wan Chai, Hong Kong</p> <p class="foot_phone">+852 3602 3091</p> <p class="foot_email"><a href="mailto:hk@businesswire.com">hk@businesswire.com</a></p> </div> </div> </div> </div>   <div class="footer_bottom"> <div class="fleft"> <div class="copyright">© 2008-2016 Interfax Business Wire Service, all rights reserved.</div> </div> <div class="clear"></div> </div>  </div> </div> </div> </div> <script type="text/javascript"> var _gaq = _gaq || []; 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Entegris Introduces Innovative Solution for Chemical Delivery Systems Critical to Semiconductor Industry - Business Wire China