The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9DOF Platform

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Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9DOF Platform</title> <meta name="description" content="The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9DOF Platform"> <meta name="keywords" content="capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS"> <meta name="viewport" content="width=device-width, initial-scale=1, minimum-scale=1, maximum-scale=1, user-scalable=no"> <meta charset="utf-8"> <link href="https://cdn.waset.org/favicon.ico" type="image/x-icon" rel="shortcut icon"> <link href="https://cdn.waset.org/static/plugins/bootstrap-4.2.1/css/bootstrap.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/plugins/fontawesome/css/all.min.css" rel="stylesheet"> <link href="https://cdn.waset.org/static/css/site.css?v=150220211555" rel="stylesheet"> </head> <body> <header> <div class="container"> <nav class="navbar navbar-expand-lg 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class="card-body"><strong>Paper Count:</strong> 87408</div> </div> </div> </div> <div class="card publication-listing mt-3 mb-3"> <h5 class="card-header" style="font-size:.9rem">The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9DOF Platform</h5> <div class="card-body"> <p class="card-text"><strong>Authors:</strong> <a href="https://publications.waset.org/abstracts/search?q=Andrew%20Randles">Andrew Randles</a>, <a href="https://publications.waset.org/abstracts/search?q=Ilker%20Ocak"> Ilker Ocak</a>, <a href="https://publications.waset.org/abstracts/search?q=Cheam%20Daw%20Don"> Cheam Daw Don</a>, <a href="https://publications.waset.org/abstracts/search?q=Navab%20Singh"> Navab Singh</a>, <a href="https://publications.waset.org/abstracts/search?q=Alex%20Gu"> Alex Gu</a> </p> <p class="card-text"><strong>Abstract:</strong></p> Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation. <iframe src="https://publications.waset.org/abstracts/32117.pdf" style="width:100%; height:400px;" frameborder="0"></iframe> <p class="card-text"><strong>Keywords:</strong> <a href="https://publications.waset.org/abstracts/search?q=capacitive%20pressure%20sensor" title="capacitive pressure sensor">capacitive pressure sensor</a>, <a href="https://publications.waset.org/abstracts/search?q=9%20DOF" title=" 9 DOF"> 9 DOF</a>, <a href="https://publications.waset.org/abstracts/search?q=10%20DOF" title=" 10 DOF"> 10 DOF</a>, <a href="https://publications.waset.org/abstracts/search?q=sensor" title=" sensor"> sensor</a>, <a href="https://publications.waset.org/abstracts/search?q=capacitive" title=" capacitive"> capacitive</a>, <a href="https://publications.waset.org/abstracts/search?q=inertial%20measurement%20unit" title=" inertial measurement unit"> inertial measurement unit</a>, <a href="https://publications.waset.org/abstracts/search?q=IMU" title=" IMU"> IMU</a>, <a href="https://publications.waset.org/abstracts/search?q=inertial%20navigation%20system" title=" inertial navigation system"> inertial navigation system</a>, <a href="https://publications.waset.org/abstracts/search?q=INS" title=" INS"> INS</a> </p> <a href="https://publications.waset.org/abstracts/32117/the-design-development-and-optimization-of-a-capacitive-pressure-sensor-utilizing-an-existing-9dof-platform" class="btn btn-primary btn-sm">Procedia</a> <a href="https://publications.waset.org/abstracts/32117.pdf" target="_blank" class="btn btn-primary btn-sm">PDF</a> <span class="bg-info text-light px-1 py-1 float-right rounded"> Downloads <span class="badge badge-light">547</span> </span> </div> </div> </div> </main> <footer> <div id="infolinks" class="pt-3 pb-2"> <div class="container"> <div style="background-color:#f5f5f5;" class="p-3"> <div class="row"> <div class="col-md-2"> <ul 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The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9DOF Platform