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with-navigation"> <div id="content" class="column"><div class="section"> <!-- <div class="breadcrumb"><a href="/en/">Home</a> › </div> --> <div id="content-area"> <div class="panel-display zen-two-sidebars clearfix"> <div class="panel-content"><div class="panel-content-inner inside panel-panel"> <div id="rightcorner"></div> <div class="panel-pane pane-node-content"> <h2 class="title">SEMI - Standards Publications</h2> <div id="node-30466" class="node node-type-page build-mode-full clearfix"> <div class="content"> <div id="rightColRegNoBorders" class="article"><!--start of right col --><!--start of right col --><!--SS_BEGIN_OPENREGIONMARKER(region1)--><!--SS_END_OPENREGIONMARKER(region1)--><!--SS_BEGIN_SNIPPET(region1_element1,code)--><!--SS_END_SNIPPET(region1_element1,code)--><!--SS_BEGIN_CLOSEREGIONMARKER(region1)--><!--SS_END_CLOSEREGIONMARKER(region1)--><!--SS_BEGIN_OPENREGIONMARKER(region7)--><!--SS_END_OPENREGIONMARKER(region7)--><!--SS_BEGIN_ELEMENT(region7_element1)--><!--SS_END_ELEMENT(region7_element1)--> <!--SS_BEGIN_CLOSEREGIONMARKER(region7)--><!--SS_END_CLOSEREGIONMARKER(region7)--><div class="contentRow"><!--start row --><!--left table --><div class="tableContentArea"><!--div class="tableBodyMarginsLarge" --><!--SS_BEGIN_OPENREGIONMARKER(region3)--><!-- TRANSIT - INFOBEFORE --><table border="0" cellpadding="5" cellspacing="0"><tbody><tr><td style="width: 288px;" rowspan="4" valign="top"><div class="heading2"><p><font face="Arial" size="3"><strong>General Publication Information</strong></font> </p></div><p><font face="Arial" size="2"><strong>Supplemental Materials</strong></font> </p><ul compact="compact" type="disc"><li><font face="Arial" size="2"><u><!-- TRANSIT - HYPERLINK --><!-- .http://dom.semi.org/web/wstandards.nsf/schema. --><a href="https://web.archive.org/web/20140630035224/http://dom.semi.org/web/wstandards.nsf/schema" target="_top">XML Schema files</a></u></font> </li><li><font face="Arial" size="2"><u><!-- TRANSIT - HYPERLINK --><!-- .http://dom.semi.org/web/wstandards.nsf/supother. --><a href="https://web.archive.org/web/20140630035224/http://dom.semi.org/web/wstandards.nsf/supother" target="_top">Supplementary Materials: Various Materials</a></u></font> </li></ul><p><font face="Arial" size="2"><u></u></font></p><p><font face="Arial" size="2"><u></u></font></p><p><font face="Arial" size="2"><u></u></font></p><p><font face="Arial" size="2"><u><a href="https://web.archive.org/web/20140630035224/http://ams.semi.org/ebusiness/standards/StandardsPublicationsList.aspx" target="_top">New and Revised Standards</a></u> <br/>Contains the current publication cycle list of New and Revised Standards.</font> </p><p><font size="2"></font></p><font size="2"><p><font face="Arial" size="2"></font></p><p><font face="Arial" size="2"></font></p><p><font face="Arial" size="2"></font></p><p><font face="Arial" size="2"><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/GeneralPublicationInformation/P_000776" target="_top"><u>SEMI Standards Update Notification</u></a>:<br/></font><span style="font-family: Arial;">Sign up to receive notifications of newly published Standards.</span></p><p><a href="https://web.archive.org/web/20140630035224/http://www.semi.org/en/Standards/P042413">SEMI Standards Copyright Policy and License Agreement</a></p></font><p><font face="Arial" size="2"><strong>SEMI Standards Table of Contents </strong></font></p><ul compact="compact" type="disc"><li><font face="Arial" size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/ContentsbyTopic0514.pdf"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/GeneralPublicationInformation/P039899. --><u>By Topic</u></a></font> </li><li><font face="Arial" size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/ContentsbyVolume0514.pdf"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/GeneralPublicationInformation/P039898. --><u>By Volume</u></a></font> </li></ul></td><td style="width: 288px;" valign="top"><div class="heading2"><p><font face="Arial" size="3"><strong>Document Authoring Tools</strong></font> </p></div></td></tr><tr><td style="width: 288px;" valign="top"><ul compact="compact" type="disc"><li><u style="font-family: Arial; font-size: small;"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/CompilationTerms0514.pdf">SEMI International Standards: Compilation of Terms</a></u><span style="font-family: Arial; font-size: small;"> </span><br style="font-family: Arial; font-size: small;"/><span style="font-family: Arial; font-size: small;">The SEMI International Standards Compilation of Terms contains all abbreviations, acronyms, definitions, and symbols published within SEMI Standards and Safety Guidelines.</span><font face="Arial" size="2"></font></li></ul></td></tr><tr><td style="width: 288px;" valign="top"><ul compact="compact" type="disc"><li><u style="font-family: Arial; font-size: small;"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/Style%20Manual_Version%205.1_May%202013_0.pdf">SEMI Standards Style Manual Version 5.1 </a></u><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/Style%20Manual_Version%205_August%202011.pdf" style="font-family: Arial; font-size: small;"><br/></a><span style="font-family: Arial; font-size: small;">The Style Manual establishes the preferred format and style for all SEMI Standards and Safety Guidelines.</span><font face="Arial" size="2"></font></li></ul></td></tr><tr><td style="width: 288px;" valign="top"><ul compact="compact" type="disc"><li><a href="https://web.archive.org/web/20140630035224/http://downloads.semi.org/web/wstandards.nsf/templates" style="font-family: Arial; font-size: small;"><u>SEMI Standards Document Templates</u></a><br style="font-family: Arial; font-size: small;"/><span style="font-family: Arial; font-size: small;">Templates are available to help write Documents in accordance with the SEMI Standards Style Manual.</span><font face="Arial" size="2"></font></li></ul></td></tr><tr><td style="width: 288px;" colspan="2" valign="top"> </td></tr><tr><td style="width: 288px;" colspan="2" valign="top"><div class="heading2"><p><font face="Arial" size="3"><strong>SEMI International Standards Products<br/></strong></font><span style="font-family: Arial; font-size: small;">Effective July 1, 2009, SEMIViews has replaced the CD subscription as the delivery system for SEMI International Standards. Individual PDF downloads are still available.</span></p></div><ul compact="compact" type="disc"><li><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .http://www.semi.org/en/Store/Standards/CTR_028404. --><a href="/web/20140630035224/http://semi.org/en/Store/Standards/CTR_028404" target="_top"><u>SEMIViews Online Access</u></a></font> </li><li><font face="Arial" size="2"><u><!-- TRANSIT - HYPERLINK --><!-- .http://www.semi.org/en/P001204. --><a href="/web/20140630035224/http://semi.org/en/store/P001204" target="_top">Download Individual Standards</a></u></font> </li></ul></td></tr></tbody></table><table border="0" cellpadding="5" cellspacing="0"><tbody><tr><td style="width: 288px;" colspan="2" valign="top"><font face="Arial" size="3"><strong>Auxiliary Information</strong></font></td><td style="width: 288px;" valign="top"> </td></tr><tr><td style="width: 288px;" valign="top"><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- ./cms/groups/public/documents/web_content/p035287.pdf. --><span style="text-decoration: underline;"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/AUX001-00-0614.pdf">AUX001-0614</a></span><br/>Title: List of Wafer Supplier Identification Codes <br/>Committee: SEMI Standards Staff <br/>Cost: No Charge</font> </p><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/StandardAuxiliary/P036484. --><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P036484" target="_top"><u>AUX002-0600</u></a> <br/>Title: An Overview of Factory Automation Requirements and Design <br/>Committee: Information & Control <br/>Cost: No Charge</font> </p><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/StandardAuxiliary/P036485. --><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P036485" target="_top"><u>AUX004-1100</u></a> <br/>Title: SEMI S2-0200 Fire Safety Evaluation Checklist for Semiconductor Equipment Using Hazardous Production Materials <br/>Committee: EH&S <br/>Cost: No Charge</font> </p><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .http://dom.semi.org/downloads.nsf/standard?openform&did=933E79386B0C467E8825737C00476C01&sid=0. --><a href="https://web.archive.org/web/20140630035224/http://ams.semi.org/ebusiness/standards/SEMIStandardDetail.aspx?ProductID=211&DownloadID=1" target="_top"><u>AUX005-1101</u></a> <br/>Title: Comparison Matrix Between SEMI S2-93A and S2-0200 <br/>Committee: EH&S <br/>Cost: As per Individual Standard</font> </p><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/StandardAuxiliary/P036487. --><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P036487" target="_top"><u>AUX007-0401</u></a> <br/>Title: Comparison between SEMI S2-93A and KOSHA S Mark <br/>Committee: EH&S <br/>Cost: No Charge</font> </p><p><font face="Arial" size="2"><!-- TRANSIT - HYPERLINK --><!-- .../../../../../en/Standards/StandardsPublications/StandardAuxiliary/P036488. --><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P036488" target="_top"><u>AUX010-0304</u></a> <br/>Title: User Interface Configurations For 300 mm Equipment Load Ports <br/>Committee: Physical Interfaces & Carriers <br/>Cost: No Charge</font></p><p><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P036490" target="_top"><u><font size="2">AUX013-0705</font></u></a><font size="2"> <br/>Title: 300 mm Equipment Supplier's Basic Operational Scenarios for Automation <br/>Committee: Information & Control <br/>Cost: No Charge</font> </p><p><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P037091" target="_top"><u><font size="2">AUX014-0306</font></u></a><font size="2"> <br/>Title: List of Jig Supplier Identification Codes <br/>Committee: SEMI Standards Staff <br/>Cost: No Charge</font></p><p><a href="/web/20140630035224/http://semi.org/en/Standards/StandardsPublications/StandardAuxiliary/P038937" target="_top"><u><font size="2">AUX015-1106</font></u></a><font size="2"> <br/>Title: SEMI OCR Character Outlines <br/>Committee: Silicon Wafer <br/>Cost: No Charge</font></p><p><font face="Arial" size="2"><a href="/web/20140630035224/http://semi.org/cms/groups/public/documents/web_content/p044001.pdf" target="_top"><u>AUX016-0710E </u></a><br/>Title: List of Carrier Maker Identification Codes <br/>Committee: SEMI Standards Staff <br/>Cost: No Charge</font></p><p><font face="Arial" size="2"><a href="/web/20140630035224/http://semi.org/cms/groups/public/documents/web_content/ctr_034497.pdf" target="_top"><u>AUX017-0310E </u></a><br/>Title: Contactless Carrier-Lifetime Measurement in Silicon Wafers, Ingots, and Blocks <br/>Committee: Photovoltaic <br/>Cost: No Charge</font></p><p><a href="/web/20140630035224/http://semi.org/cms/groups/public/documents/web_content/ctr_037514.pdf" target="_top" style="font-family: Arial; font-size: small;"><u>AUX018-0710</u></a><span style="font-family: Arial; font-size: small;"> <br/></span><span style="font-family: Arial; font-size: small;">Title: FOUP/Load Port Interoperability Report <br/></span><span style="font-family: Arial; font-size: small;">Committee: Physical Interfaces & Carriers <br/></span><span style="font-family: Arial; font-size: small;">Cost: No Charge</span></p><p><span style="font-family: Arial; font-size: small;"><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/AUX019-00-0211.pdf">AUX019-0211<br/></a></font></u><span>Title: Research Report on Interlaboratory Study to Establish Precision Statements for SEMI PV1, Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry <br/></span><span>Committee: Photovoltaic<br/></span><span>Cost: No Charge</span><br/></span></p></td><td style="width: 288px;" colspan="2" valign="top"><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/AUX020-00-0211.pdf">AUX020-0211<br/></a></font></u><span style="font-size: small;">Title: List of Authentication Service Body (ASB) Identification Code for SEMI T20, Specification for Authentication of Semiconductors and Related Products<br/></span><span style="font-size: small;">Committee: Traceability <br/></span><span style="font-size: small;">Cost: No Charge</span></p><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/AUX021-00-0611.pdf">AUX021-0611</a></font></u><font size="2"><br/>Title: Electrostatics Guide <br/>Committee: Metrics <br/>Cost: No Charge</font><font size="1"> </font></p><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/AUX022-00-0611.pdf">AUX022-0611</a></font></u><font size="2"><br/>Title: Conversion of Units for Impurity Concentrations in Silicon <br/>Committee: Photovoltaic <br/>Cost: No Charge</font> </p><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/AUX023-00-0614.pdf">AUX023-0614</a></font></u><font size="2"><br/>Title: Overview Guide to SEMI Standard for 450 mm Wafers <br/>Committee: Physical Interfaces & Carriers <br/>Cost: No Charge</font> </p><p><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/AUX024-00-0712.pdf"><u><font size="2">AUX024-0712</font></u></a><font size="2"><br/>Title: List of Photovoltaic and Semiconductor Shared Gases and Liquid Chemical Standards <br/>Committee: Photovoltaic - Materials <br/>Cost: No Charge</font> </p><!--end row --><!--end row --><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/AUX025-00-1113.pdf">AUX025-1113</a></font></u><font size="2"><br/>Title: List of Identification Codes of Suppliers of SI Bricks, SI Wafers and Photovoltaic C-SI Solar Cells for Use in the PV Industry <br/>Committee: Photovoltaic - Automation <br/>Cost: No Charge</font> </p><p><u><font size="2"><a href="/web/20140630035224/http://semi.org/en/sites/semi.org/files/docs/AUX026-00-1012.pdf">AUX026-1012</a></font></u><font size="2"><br/>Title: Research Report on Interlaboratory Study to Establish Precision Statements for SEMI PV13, Test Method for Contactless Excess-Charge-Carrier Recombination Lifetime Measurement in Silicon Wafers, Ingots, and Bricks Using an Eddy-Current Sensor <br/>Committee: Photovoltaic - 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