CINXE.COM

<!DOCTYPE html><html lang="en-US"><head><title>Just a moment...</title><meta http-equiv="Content-Type" content="text/html; charset=UTF-8"><meta http-equiv="X-UA-Compatible" content="IE=Edge"><meta name="robots" content="noindex,nofollow"><meta name="viewport" content="width=device-width,initial-scale=1"><style>*{box-sizing:border-box;margin:0;padding:0}html{line-height:1.15;-webkit-text-size-adjust:100%;color:#313131;font-family:system-ui,-apple-system,BlinkMacSystemFont,Segoe UI,Roboto,Helvetica Neue,Arial,Noto Sans,sans-serif,Apple Color Emoji,Segoe UI Emoji,Segoe UI Symbol,Noto Color Emoji}body{display:flex;flex-direction:column;height:100vh;min-height:100vh}.main-content{margin:8rem auto;max-width:60rem;padding-left:1.5rem}@media (width <= 720px){.main-content{margin-top:4rem}}.h2{font-size:1.5rem;font-weight:500;line-height:2.25rem}@media (width <= 720px){.h2{font-size:1.25rem;line-height:1.5rem}}#challenge-error-text{background-image:url(data:image/svg+xml;base64,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);background-repeat:no-repeat;background-size:contain;padding-left:34px}@media (prefers-color-scheme:dark){body{background-color:#222;color:#d9d9d9}}</style><meta http-equiv="refresh" content="120"></head><body class="no-js"><div class="main-wrapper" role="main"><div class="main-content"><noscript><div class="h2"><span id="challenge-error-text">Enable JavaScript and cookies to continue</span></div></noscript></div></div><script>(function(){window._cf_chl_opt={cvId: '3',cZone: "publications.waset.org",cType: 'non-interactive',cRay: '91351d8e98fdf938',cH: 'SA.Mf9hRdwYeAsbP8_kyWbrxIg_1_WFyvJlNxyQ4TuU-1739788367-1.2.1.1-cSGIWuTCh9Uht0uPPLy3SBB9HsUoQuxwv1Y0_shxsS06GXYnw21rsC0uTwoMxGHT',cUPMDTk: "\/abstracts\/search?q=Cobalt%20MOCVD&__cf_chl_tk=wWoiKAzSS0Mvngf0QZ7FkoJRofXyQd6Xj_Qw6Df5WpY-1739788367-1.0.1.1-DIyqH.6JYFs5i5WT09iTrcnu0hmsW9QpfAktxNNtt.8",cFPWv: 'b',cITimeS: '1739788367',cTTimeMs: '1000',cMTimeMs: '120000',cTplC: 0,cTplV: 5,cTplB: 'cf',cK: "",fa: "\/abstracts\/search?q=Cobalt%20MOCVD&__cf_chl_f_tk=wWoiKAzSS0Mvngf0QZ7FkoJRofXyQd6Xj_Qw6Df5WpY-1739788367-1.0.1.1-DIyqH.6JYFs5i5WT09iTrcnu0hmsW9QpfAktxNNtt.8",md: "IJJVJZufStDY7kVg6c3MJZ4wdycsxUWjQ7RvXYyHJ_4-1739788367-1.2.1.1-..qRnb5QjXsG1niegN_B3LqkALHlqs1O8hesCGqUuvNxDYYGid4mPaeoZoc8.7ViQfzJgXTAndcyf3Jge4i1PaoXxWeYy3lIlhv3DHYQuVlmluuMeyY1RiISNomorHLDmXwViteZXHc4QVGga.1ZE7Z5ajGghEPeFEjGMZd3PHRssucOhP4ZgxKbll8.hQv4pLmyaOWxYXzbE16bz8khGhuZwPpACKlt.jIQJToUlYZXjgs_2P2upgIeaHsBb8AvxK.KkfTX1vQvlK4ht98unr4itaOR6npORe9paPsD2E9U4_MDTixcjoUMcbJNoNqA4UT9jD9TNsU4sEKoNv5A9sd_Sv.7VUGFL5P5ePl28Dc00MLZ4zHH1LHp33.FNl8VscQI2P0dZ5T5uxMyxFo.F9ePaAyuVWXWrtVQoZx2wNASwhin.E1slgORO5YfVZ_QRhxzuf3iidf6CtEkCZgidxKyCDauoTChSiR6xQqEgsvs.3dr21YIc6VONHbmjA3NCldw.ucIw8w3CCgdRGDH9uewfMfr6vDmceC3g98GGJqJim3ryC0L.jZaNpaXd5FmTm.w2DL9TYbfgdEbQ9hn5nlSQNTZFzlaLi_toU_.OqgJUVVYmaKeVRH1ZnfzTGXZoyy4ODCtDpVXIyf6HHtzHKFga1drgCbG9OI1JPcPOpG0vCzWokL6muckpeALOTGBg.G1NPj9X7wus1KL5jIVXScA_gVTMpX0891vl6wwIejj48O8LtnIw6FvVbSRc2WHjckL.e3huE7W8e8ZOqBxTaTj87qcJh3aX.F8F4yNc5xMoe1zNBVvtS6U4LD1Fgq9LJ_L72el60rbqjUyxEK5BmsyqRrL4spmmjJtXN5iLhXw7pMeMLQtsy_4E8fpBsxv4sOedROejHv9Af10vvQ56aRW5L7nW5DBpQk2kj.sTrkNXw07SkHuf2J_DHamteNaNbyMaohUY2BkUeiUut6DgC_jxsNVY2p3yTA.EsdB8zKAbiOYGVbZwA7cbF6aeUnF0jFaIpipwlL2bOibbFcQupCYNWxWCm5v5soB5wVnWZSO5STGwuqwObA6HuCeoa3IRBv5bTo_hf_1WzY9YTlsj5zvFoDmNQSimiEME5UWCLo0gFoKnndR6qEAf8pdBEpVLWFynthQNKP0XGbj85yqQU6eyAHlVfOrafydu1b3y.3qGHbxf3jbo2yePtxS4agD4IHchDhraELnH35R6GJ2.YWGR9OScO1PYMbsS8yweupaCCL06nbvBRhk2D9CmrdHoRgFO8fVl._vFplDBItHwZnoiY4ugK2Z97_mT0rrinEXrIfBdqgjva7YoIaH.mDOSO.BYL7Vn4mXGHcywVSjIsqAHiPizDnrvOLaiLfvt4DQJ7cGTSRylPIlq5JT.NSXk8CZfz3JfkBQcOAZBqpXSPz9E81P36kCRgyQqAyrmKnuKZPa.frgsqoFs9chvk1kAAjQX03Mphg482yy_RsoD3XbhUW4fNM3b6TwvfFjxxmArcRvulJ0F5.ZwbRGv2iYXJGEU_H2zc5hwjVdHktn9rGiIq6RFMjaRQ7Rrge6NpLaYQID6oq0qq9sHZUJfp5lIn1U.fk3xBFmusLA4APQ_7lDkQ7YiFSz1Zb3X700axhGUCEr84lOZc7EU0JM3W8n0vO9Xphe3_dP.cmAVQwb5w_TIDOqxfjnU.5RTBNMrkhU1P9h2bcJ0WAGx14X04t4E1R63ZsLtPte5xv58j36U3yZdYYNqAVSP3BqaNcfzrpvp0KZ5BmYh7RSj5MojkrwTKRV4tgJW0eV4k04wA6v1a9su0.g_ND_Ogb.Q7xvqicHAiYRCDXTk5_rKq8PIjjvZceAwh2vWLLI5MI1Rl04YggVS6QAEXUnQ1IDLz7m7LUkFgJQBC8zpIjibQvkUnvyHylkLkCa8PeRuRbtyVTWdYCZ0gZGaAS9hwIDbp7dU5Y",mdrd: "UST4RyjD_P_xw4mh0aQ_4y23U41I5_PpT2a41Mt9plY-1739788367-1.2.1.1-A9Naqp8dy.12z_SgomRrlN9U9KwHyNYbd_qSGDuzNl8RUAfwZVkIZe7Jk2FJM1bRX07_oOqfeGocabYzggwNxqYHkqEcI6WT915tcNS784jJ5Edi88cAF7Y0BE2evguArFwPt9ZQWI6NlF6aevihHlrgCIQBFeUIQMPoGzWkr2N0SgT82bixrrKYbB.SGGzkf0SnJpAX7GErKEYRiBoEMGJ_hvQqsr_SFh6NMI_G9MRniw3GU2zh5M.WWs_UyuTnWiBg3yD4gDVoTS6Z1gYNU.SQw7qtLIbVRMHh0K7jvdncAxU94kyv.ERNbJhaHNa6GT1mqCUkqAx2MxlndBjOqg5iEC4K0hdThhsLqISucWDncLUlGZ.j_XugzcmxrO5uw0yiGy6IK6X7SNJzMmYUAIGm_yKyUkvPIuwB_D.uvDrLbGewIG8hqKP7JtIYq40Ay33dXdXSL4cGwcWNWwfrLGb7Yb1nv77A.gDOinuE9FTGKTVcTTMcoZBMp_exelLtgB8wtnIW8i9DnQ6wSDQumELDKlQXtBFbYepdgeRSCNh_Vgb2abNDM3yjr.SFT3dpSTOTnycD3qyw3UCJb.MDvqGTrIwJrbETwDKHmkJHHHTbI359Ccdq7MhTzLi9ox7aJVYFrTOJYiIsMOTmPghGuXN706zFcbFSYaiXpsvFpFgVufGkW.Tvd9lAj2g0L1fKB8gdbcrp70VyDrWIxEqv9oJL2i_tNwNkrysgeyBzSFMijYrtUcNkiJlil5P4O.XNBNnitA.dtVucjaR8RimJ6ANGllhIaKuz.LSiotJUas0h8LoW3NYbtIU8XX7mlhC2qY6ZhqUsRYHVvUDj1Aq6En6al3tRQyYvarDoq1WPd5uwHWGN9_PIi.F6Ve0di3kPrVXM999f3waeKp0iIH0yKunlvMF7hIYoPIPaQMgPoQAQzLIt7n_3LIRiJllkKZH0C7BmP9f_jbKywXxUjRoQ9liMf97a09HkuaEudQJPpx6WKuELD3CnXrURnRWIU.SUqvnAK2nQmyhBhtE_s5AJEKp8RrVjMtXyTqzIU2kHPx7liu_nHd5DZlzbGDjDvu9czU7MtisdiB4sluuvj8Yijp6ne8oNKibusiqqEbXU960Gt4JV3Bc2.x5Vc4V1DEhnqjqRvQ26zNjXAY0HiSkq1DtDAWrZid2Mtx0XlNpLXM3KxLWUzGzWkVHUVm0YUna7ge6ki_BviqTWKMh7_LYAXaDxluXuUjyfE4MZfti2lUhs47JXDRWB6LK8.1oe.lbnmSMooeS7Fa4MhDXI76JABihMLp4p1QVawBmIKCuzXcHHcj593LrwdNID2VAEnHcHEtt339IaGKlxqSZWP4h6Mbn64lZ8Rdy1vqUx0X2w2yd9X6qypW8mw97HLS2n4i6n_ew.xx_18Ds3Iw9XXdHXRxHUR6Jjgj5gUhrPGruwXNfA_ZiC4HsWGoniqJ_GQGyJtFCwh8nu_EH8yL78Aavv8vyn.ysrXEFi4ZiIu1bzct4KdlY1eledT2UAZyR3q7_XxrzIVNtH4ZC9rFJhqBbVkBpme3yr7fPXFDhsE9oumXVzngfiU1fDGAPO6ATs_4mlbjMsZaheRmxGWb6HjQ5SbgXLJRDdh6KwT_4TLOLQ.HkFswKNg4lKewGgeW29deffgjMN00o.pShUjplstY3wohcBPkOKddRwASS54SaqN3T1e8PsTsUSAcFwTerprlNnOP6F8rRfGTbuQ9h8jGeDNGvCRJBZooyyhNbSnf.q9dKs0NQEjA6WSdyx4cMOnHyf2IABD.V9iBXu8zRHReQG8iauzaOXjXTGg82vOsswljHO8lNEa7yWU5K2MsDJgIexKPoSgHZAB99g9tB1jCEJOo.lkIOytD4LYFn.aoO7v4uqKh_IeJ7FFTrZSwUL9NkUZBrGvIyior9q0XJOYVjIkLndQjO_v2VErGrlNhxk3Nu8K4VolRCkQ3_olzjHz2U0"};var cpo = document.createElement('script');cpo.src = '/cdn-cgi/challenge-platform/h/b/orchestrate/chl_page/v1?ray=91351d8e98fdf938';window._cf_chl_opt.cOgUHash = location.hash === '' && location.href.indexOf('#') !== -1 ? '#' : location.hash;window._cf_chl_opt.cOgUQuery = location.search === '' && location.href.slice(0, location.href.length - window._cf_chl_opt.cOgUHash.length).indexOf('?') !== -1 ? '?' : location.search;if (window.history && window.history.replaceState) {var ogU = location.pathname + window._cf_chl_opt.cOgUQuery + window._cf_chl_opt.cOgUHash;history.replaceState(null, null, "\/abstracts\/search?q=Cobalt%20MOCVD&__cf_chl_rt_tk=wWoiKAzSS0Mvngf0QZ7FkoJRofXyQd6Xj_Qw6Df5WpY-1739788367-1.0.1.1-DIyqH.6JYFs5i5WT09iTrcnu0hmsW9QpfAktxNNtt.8" + window._cf_chl_opt.cOgUHash);cpo.onload = function() {history.replaceState(null, null, ogU);}}document.getElementsByTagName('head')[0].appendChild(cpo);}());</script></body></html>