SiCパワー半導体用コンタクトアニール装置の生産性向上｜技術情報

<!DOCTYPE html><html lang="ja"> <head prefix="og:http://ogp.me/ns#"> <meta charset="utf-8"> <title>SiCパワー半導体用コンタクトアニール装置の生産性向上｜技術情報｜株式会社ジェイテクトサーモシステム</title> <meta name="description" content="【概要】　　SiCパワー半導体用コンタクトアニール装置において、搬送機能を見直す..."> <meta property="og:site_name" content="株式会社ジェイテクトサーモシステム"> <meta property="og:title" content="SiCパワー半導体用コンタクトアニール装置の生産性向上｜技術情報｜株式会社ジェイテクトサーモシステム"> <meta property="og:description" content="【概要】　　SiCパワー半導体用コンタクトアニール装置において、搬送機能を見直す..."> <meta property="og:type" content="article"> <meta property="og:locale" content="ja_JP"> <meta property="og:url" content="https://thermos.jtekt.co.jp/tech/sic.html"> <meta property="og:image" content="https://thermos.jtekt.co.jp/assets/images/ogpimg.png"> <meta property="og:image:width" content="1200"> <meta property="og:image:height" content="630">  <link rel="icon" href="/assets/images/favicon.svg" sizes="any" type="image/svg+xml"> <link rel="apple-touch-icon" sizes="180x180" href="/assets/images/touch180.png">  <meta name="viewport" content="width=device-width,viewport-fit=cover"> <meta name="format-detection" content="telephone=no">  <link rel="preload" as="style" href="/assets/css/style.css?rev=20240930"> <link rel="preload" as="script" href="/assets/js/bundle.js?rev=20240930">  <link rel="preconnect" href="https://fonts.googleapis.com"> <link rel="preconnect" href="https://fonts.gstatic.com" crossorigin=""> <link rel="stylesheet" href="https://fonts.googleapis.com/css2?family=Manrope:wght@400;500;700&display=swap"> <link rel="stylesheet" href="/assets/css/style.css?rev=20240930">  <script> (function(w, d, s, l, i) { w[l] = w[l] || []; w[l].push({ 'gtm.start': new Date().getTime(), event: 'gtm.js' }); var f = d.getElementsByTagName(s)[0], j = d.createElement(s), dl = l != 'dataLayer' ? 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width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>AllFit 過熱水蒸気対応熱処理装置</span></p> </div> </a> <a class="topics__item" href="/products/mlcc/"> <picture> <source srcset="/assets/images/common/topics_icatch5.webp" type="image/webp"><img src="/assets/images/common/topics_icatch5.jpg" alt="MLCC" height="310" width="682" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>MLCC向け熱処理装置</span></p> </div> </a> <a class="topics__item" href="/products/sic/"> <picture> <source srcset="/assets/images/common/topics_icatch6.webp" type="image/webp"><img src="/assets/images/common/topics_icatch6.jpg" alt="SiCパワー半導体" height="310" width="682" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>SiCパワー半導体向け熱処理装置</span></p> </div> </a> </div> </div> </div> </div> </div> </div> </div> </li> <li class="nav-item"><a href="/tech/">技術情報</a></li> <li class="nav-item subMenu-link"><a class="no-link" href="#subMenu-about">会社案内</a> <div class="l-subMenu l-lg" id="subMenu-about"> <div class="l-subMenu__inner"> <div class="l-inner"> <div class="l-subMenu__scroll"> <div class="l-subMenu__container"> <div class="l-subMenu__head"> <div class="c-title__topSectionWrap--title"> <p class="c-title__topSection--en">About us</p> <h2 class="c-title__topSection--jp">会社案内</h2> </div> </div> <div class="l-subMenu__main"> <div class="about__wrap--top"><a class="about__item" href="/company/message/"> <picture> <source srcset="/assets/images/common/about_icatch1.webp" type="image/webp"><img src="/assets/images/common/about_icatch1.jpg" alt="社長挨拶" height="192" width="480" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>社長挨拶</span></p> </div> </a> <a class="about__item" href="/company/philosophy/"> <picture> <source srcset="/assets/images/common/about_icatch2.webp" type="image/webp"><img src="/assets/images/common/about_icatch2.jpg" alt="基本理念" height="192" width="480" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>基本理念</span></p> </div> </a> <a class="about__item" href="/company/profile/"> <picture> <source srcset="/assets/images/common/about_icatch3.webp" type="image/webp"><img src="/assets/images/common/about_icatch3.jpg" alt="会社概要" height="192" width="480" decoding="async" loading="lazy"> </picture> <div 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<picture> <source srcset="/assets/images/common/sustainability_icatch3.webp" type="image/webp"><img src="/assets/images/common/sustainability_icatch3.jpg" alt="" height="192" width="480" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>安全衛生情報／健康経営</span></p> </div> </a> <a class="sustainability__item" href="/sustainability/eco/"> <picture> <source srcset="/assets/images/common/sustainability_icatch4.webp" type="image/webp"><img src="/assets/images/common/sustainability_icatch4.jpg" alt="" height="192" width="480" decoding="async" loading="lazy"> </picture> <div class="textWrap"> <picture class="btn-icon"><img src="/assets/images/common/arrowBtn-sub.svg" alt="" height="16" width="16" decoding="async" loading="lazy"></picture> <p class="title"><span>環境方針</span></p> </div> </a> <a 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</li> <li property="itemListElement" typeof="ListItem"><a property="item" typeof="WebPage" title="技術情報" href="/tech/"><span property="name">技術情報</span></a> <meta property="position" content="2"> </li> <li property="itemListElement" typeof="ListItem"><span property="name">SiCパワー半導体用コンタクトアニール装置の生産性向上</span> <meta property="position" content="3"> </li> </ol> </nav> </div> <div class="l-page-contents"> <div class="l-inner"> <section class="p-tech__articleList js-fixed-area"> <article class="p-tech__articleContent"> <div class="post-detail__head"> <div class="post-detail__head--info"> <div class="category">半導体製造装置</div> <p class="time">2024.07.11</p> </div> <h2 class="title">SiCパワー半導体用コンタクトアニール装置の生産性向上</h2> </div> <div class="post-detail__share"> <dl> <dt>SHARE</dt> <dd> <ul class="sns-list"> <li> <a href="https://b.hatena.ne.jp/entry/panel/?url=https://thermos.jtekt.co.jp/tech/sic.html"><img src="/assets/images/common/hatenabookmark-icon.svg" alt="" height="24" width="24" decoding="async" loading="lazy"></a> <script type="text/javascript" src="https://b.st-hatena.com/js/bookmark_button.js" charset="utf-8" async="async"></script> </li> <li><a href="https://www.facebook.com/share.php?u=https://thermos.jtekt.co.jp/tech/sic.html" target="_blank" rel="noopener noreferrer"><img src="/assets/images/common/facebook-icon.svg" alt="" height="24" width="24" decoding="async" loading="lazy"></a></li> <li><a href="https://twitter.com/share?url=https://thermos.jtekt.co.jp/tech/sic.html&text=SiCパワー半導体用コンタクトアニール装置の生産性向上" target="_blank" rel="noopener noreferrer"><img src="/assets/images/common/twitter-icon.svg" alt="" height="24" width="24" decoding="async" loading="lazy"></a></li> </ul> </dd> </dl> </div> <div class="post-detail__content"> <div class="l-post-editor"> <p><img src="https://thermos.jtekt.co.jp/tech/upload/%E6%8A%80%E8%A1%93%E6%83%85%E5%A0%B1_%E5%8D%8A%E5%B0%8E%E4%BD%93%E3%82%B5%E3%83%A0%E3%83%8D%E3%82%A4%E3%83%AB.jpg" alt="" height="549" width="776" decoding="async" loading="lazy"></p> <p>【概要】<br />　　SiCパワー半導体用コンタクトアニール装置において、搬送機能を見直すことで<br />　　生産性の向上を実現いたしました。</p> <p>【課題】<br />　　世界的な自動車のEV化に伴い、SiCパワー半導体の生産が本格化しています。<br />　　半導体メーカによる積極的な設備投資が行われていますが、枚葉搬送である<br />　　コンタクトアニール装置は、いかに生産性を上げるかが喫緊の課題となってます。</p> <p><img alt="" src="https://thermos.jtekt.co.jp/products/upload/RLA-4100.jpg" style="float: right; height: 330px; width: 273px;" /></p> <p>【対策】<br />　　搬送機能の見直しを行い、プロセスチャンバの<br />　　待ち時間を減らすことで処理能力を向上させました。</p> <p>【効果】<br />　　生産性が10％向上しました（当社従来装置比）。</p> <p>【対象機種】<br />　　・装　　置：SiCパワー半導体用コンタクトアニールシステム<br />　　・対象機種：<a href="https://thermos.jtekt.co.jp/products/rla-4100-v.html" target="_blank" rel="noopener"><span style="color: #0000ff;">RLA-3100-V</span></a>、 <a href="https://thermos.jtekt.co.jp/products/rla-4100-v.html" target="_blank" rel="noopener"><span style="color: #0000ff;">RLA-4100-V</span></a></p> <div style="text-align: right;">RLA-4100-V </div> <p>　商品や技術に関するお問い合わせ、購入検討につきましては<a href="https://thermos.jtekt.co.jp/contact/" target="_blank" rel="noopener"><span style="color: #0000ff;">こちら</span></a>までご連絡下さい。</p> </div> </div> </article> <aside class="p-tech__articleNavi js-fixed-nav js-fixed-elm"> <div class="p-tech__articleSearch"> <p class="p-topTechnology__categoryHead">Keyword:</p> <div class="search-bar"> <form method="get" id="search" action="https://thermos.jtekt.co.jp/mt-cms/mt-search.cgi"> <div class="search-wrap"> <button class="search-btn" type="submit"></button> <input class="search-input" type="text" name="search" value="" placeholder="フリーワード検索"> <input type="hidden" name="IncludeBlogs" value="4"> <input type="hidden" name="limit" value="20"> </div> </form> </div> </div> <div class="p-topTechnology__wrap--category u-mt-5"> <p class="p-topTechnology__categoryHead">Category:</p> <ul class="p-topTechnology__categoryList"> <li class="l-sm head head-catALL"><a href="https://thermos.jtekt.co.jp/tech/">すべて</a></li> <li class="l-sm head head-cat1"><a href="https://thermos.jtekt.co.jp/tech/cat1/">金属・工業加熱装置</a></li> 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