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id="main"> <section class="banner"> <div class="wrapper"> <div class="region region-banner"> <div id="block-sitewide-sitewide-page-title-block" class="block block-sitewide first last odd"> <h1 id="page-title" class="title">Evaporator (CHA Mark50)</h1> </div> </div> <nav class="breadcrumb" role="navigation"><h2 class="element-invisible">You are here</h2><ol><li><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities" class="active-trail">Facilities</a><span class="separator"> › </span></li><li><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation" class="active-trail">Instrumentation</a><span class="separator"> › </span></li></ol></nav> </div> </section> <div class="wrapper"> <section id="content" role="main"> <a id="main-content"></a> <article class="node-97 node node-page view-mode-full clearfix" about="/facilities/instrumentation/evaporator-cha-mark50" typeof="sioc:Item foaf:Document"> <div class="field field-name-body field-type-text-with-summary field-label-hidden"> <div class="field-items"> <div class="field-item even" property="content:encoded"><p>Tool Manager: Brian Bowman</p> <p>Location: Clean Room</p> <p><img height="220" width="188" class="media-element file-teaser" typeof="foaf:Image" src="https://web.archive.org/web/20170614110147im_/http://www.nbtc.cornell.edu/sites/default/files/styles/medium/public/media/CHA%20closed.jpg?itok=vzhkaRAX" alt="" title=""/></p> <h3>Features</h3> <ul><li>Thin film deposition system - up to six different layers can be deposited</li> <li>32" diameter water-cooled chamber</li> <li>Rotating or stationary conformal planetary substrate holders with 57 100mm wafer capacity on water-cooled track</li> <li>Rotating or stationary planetary substrate holder for lift-off with 7 100mm wafer capacity</li> <li>Heated substrate option with 4 banks of quartz heaters</li> <li>Metals include: Al, Au, Cr, Ti, Pt, Ni, Cu, Ta, SiO2</li> </ul><p> </p> <h3>Helpful Links</h3> <p>Instrument protocols in the "downloads" menu to the right.</p> <p> </p> </div> </div> </div><div class="structural-parent"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation">Instrumentation</a></div> </article> </section> <aside class="sidebar"> <section class="region region-sidebar"> <div id="block-views-gallery-gallery" class="block block-views first odd"> <h2 class="block__title block-title">Related Photos:</h2> <div class="view view-gallery view-id-gallery view-display-id-gallery view-dom-id-5a2b3741e5fb539c7ef6210fb9b26dc8"> <div class="view-header"> Play Slideshow <span>(3 images)</span> </div> <div class="view-content"> <div class="views-row views-row-1 views-row-odd views-row-first grid-2"> <div class="views-field views-field-field-focus-gallery-image"> <div class="field-content"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu/sites/default/files/styles/large/public/media/CHA%20closed.jpg?itok=eSgTBEM3" title="" class="colorbox" rel="gallery-node-97"><img typeof="foaf:Image" src="https://web.archive.org/web/20170614110147im_/https://www.nbtc.cornell.edu/sites/default/files/styles/sidebar/public/media/CHA%20closed.jpg?itok=EoQnZPc-" width="320" height="214"/></a></div> </div> </div> <div class="views-row views-row-2 views-row-even grid-2"> <div class="views-field views-field-field-focus-gallery-image"> <div class="field-content"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu/sites/default/files/styles/large/public/cha%20liftoff.JPG?itok=R8bj72zS" title="CHA in its liftoff arrangment" class="colorbox" rel="gallery-node-97"><img typeof="foaf:Image" src="https://web.archive.org/web/20170614110147im_/https://www.nbtc.cornell.edu/sites/default/files/styles/sidebar/public/cha%20liftoff.JPG?itok=Z0BLu5pw" width="320" height="214" alt="CHA in its liftoff arrangment" title="CHA in its liftoff arrangment"/></a></div> </div> </div> <div class="views-row views-row-3 views-row-odd views-row-last grid-2"> <div class="views-field views-field-field-focus-gallery-image"> <div class="field-content"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu/sites/default/files/styles/large/public/CHA%20conformal.JPG?itok=uLcrfb4D" title="CHA set up for conformal deposition" class="colorbox" rel="gallery-node-97"><img typeof="foaf:Image" src="https://web.archive.org/web/20170614110147im_/https://www.nbtc.cornell.edu/sites/default/files/styles/sidebar/public/CHA%20conformal.JPG?itok=qnaW2S3r" width="320" height="214" alt="CHA set up for conformal deposition" title="CHA set up for conformal deposition"/></a></div> </div> </div> </div> </div> </div> <div id="block-views-tabs-block" class="block block-views even"> <div class="view view-tabs view-id-tabs view-display-id-block view-dom-id-eb04ca59ed342195260827c158acb752"> <div class="view-content"> <div id="quicktabs-view__tabs__block" class="quicktabs-wrapper quicktabs-style-nostyle"><div class="item-list"><ul class="quicktabs-tabs quicktabs-style-nostyle"><li class="active first"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/evaporator-cha-mark50?qt-view__tabs__block=0#qt-view__tabs__block" id="quicktabs-tab-view__tabs__block-0" class="quicktab active">In This Section</a></li> <li><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/evaporator-cha-mark50?qt-view__tabs__block=1#qt-view__tabs__block" id="quicktabs-tab-view__tabs__block-1" class="quicktab active">New to NBTC?</a></li> <li><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/evaporator-cha-mark50?qt-view__tabs__block=2#qt-view__tabs__block" id="quicktabs-tab-view__tabs__block-2" class="quicktab active">How Do I...?</a></li> <li class="last"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/evaporator-cha-mark50?qt-view__tabs__block=3#qt-view__tabs__block" id="quicktabs-tab-view__tabs__block-3" class="quicktab active">Visitors</a></li> </ul></div><div id="quicktabs-container-view__tabs__block" class="quicktabs_main quicktabs-style-nostyle"><div id="quicktabs-tabpage-view__tabs__block-0" class="quicktabs-tabpage "><div class="quicktabs-views-group"> <div class="views-field views-field-body"> <div class="field-content"><div class="view view-in-this-section view-id-in_this_section view-display-id-its view-dom-id-1a9062f7a3b380657424e4755cbb6ee8"> <div class="view-content"> <div class="item-list"> <ul> <li class="views-row views-row-1 views-row-odd views-row-first"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/other-equipment">Other Equipment</a></span> </div></li> <li class="views-row views-row-2 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/content/facilities/nbtc-second-floor/picoplus">AFM (PicoPlus)</a></span> </div></li> <li class="views-row views-row-3 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/content/facilities/nbtc-second-floor/3100afm">AFM (Veeco 3100)</a></span> </div></li> <li class="views-row views-row-4 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/asher-branson-l3100">Asher (Branson L3100)</a></span> </div></li> <li class="views-row views-row-5 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/cell-counters">Cell Counters</a></span> </div></li> <li class="views-row views-row-6 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/contact-angle-goniometer-rame-hart-500">Contact Angle Goniometer (Rame-Hart 500)</a></span> </div></li> <li class="views-row views-row-7 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/critical-point-dryer-baltec-cpd408">Critical Point Dryer (Baltec CPD408)</a></span> </div></li> <li class="views-row views-row-8 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/electrophoresis-systems">Electrophoresis systems</a></span> </div></li> <li class="views-row views-row-9 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/evaporator-cha-mark50" class="active">Evaporator (CHA Mark50)</a></span> </div></li> <li class="views-row views-row-10 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/imaging-ellipsometer-accurion-ep3">Ellipsometer (Accurion EP3)</a></span> </div></li> <li class="views-row views-row-11 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/fluorescence-plate-reader-mtx-fluoroskan-ii">Fluorescence Plate Reader (MTX Fluoroskan II)</a></span> </div></li> <li class="views-row views-row-12 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/fluorometer-turner-quantech">Fluorometer (Turner Quantech)</a></span> </div></li> <li class="views-row views-row-13 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/freeze-dryer-labconco-freezone">Freeze Dryer (Labconco FreeZone)</a></span> </div></li> <li class="views-row views-row-14 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/ft-ir-bruker-vertex-80v">FT-IR (Bruker Vertex 80v)</a></span> </div></li> <li class="views-row views-row-15 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/gel-blotter-iblot">Gel Blotter (iBlot)</a></span> </div></li> <li class="views-row views-row-16 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/glove-box-mbraun">Glove Box (MBraun)</a></span> </div></li> <li class="views-row views-row-17 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/upright-fluorescence-microscope-olympus-bx51">Microscope (Olympus BX51)</a></span> </div></li> <li class="views-row views-row-18 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/inverted-fluorescence-microscope-olympus-ix-71">Microscope (Olympus IX-71)</a></span> </div></li> <li class="views-row views-row-19 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/microscope-nikon-tirf">Microscope (Nikon TIRF)</a></span> </div></li> <li class="views-row views-row-20 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/microscope-zeiss-discovery-stereoscope">Microscope (Zeiss Discovery Stereoscope)</a></span> </div></li> <li class="views-row views-row-21 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/multiplexer-bioplex-200">Multiplexer (Bioplex 200)</a></span> </div></li> <li class="views-row views-row-22 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/nanosight-malvern-ns300">Nanosight (Malvern NS300)</a></span> </div></li> <li class="views-row views-row-23 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/nanotweezers-optofluidics">Nanotweezers (Optofluidics)</a></span> </div></li> <li class="views-row views-row-24 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/parylene-coater-labcoter-2">Parylene Coater (Labcoter 2)</a></span> </div></li> <li class="views-row views-row-25 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/pcr-thermal-cycler-ptc-200">PCR Thermal Cycler (PTC 200)</a></span> </div></li> <li class="views-row views-row-26 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/plasma-cleaner-harrick">Plasma Cleaner (Harrick)</a></span> </div></li> <li class="views-row views-row-27 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/potentiostat-gamry-fas2">Potentiostat (Gamry FAS2)</a></span> </div></li> <li class="views-row views-row-28 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/profilometer-veeco-dektak-6m">Profilometer (Veeco Dektak 6M)</a></span> </div></li> <li class="views-row views-row-29 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/spectrophotometer-spectramax-384">Spectrophotometer (Spectramax 384)</a></span> </div></li> <li class="views-row views-row-30 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/sputter-coater-baltec-scd-500">Sputter Coater (Baltec SCD 500)</a></span> </div></li> <li class="views-row views-row-31 views-row-odd"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/uvozone-cleaner-samco-uv-1">UV/Ozone Cleaner (Samco UV-1)</a></span> </div></li> <li class="views-row views-row-32 views-row-even"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/viscometer-sv-10">Viscometer (SV-10)</a></span> </div></li> <li class="views-row views-row-33 views-row-odd views-row-last"> <div class="views-field views-field-link-title"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/facilities/instrumentation/zetasizer-malvern-nano-zs">Zetasizer (Malvern Nano ZS)</a></span> </div></li> </ul></div> </div> </div></div> </div></div></div><div id="quicktabs-tabpage-view__tabs__block-1" class="quicktabs-tabpage quicktabs-hide"><div class="quicktabs-views-group"> <div class="views-field views-field-body"> <div class="field-content"><p>Follow the links below to learn more about the NBTC and get access to the core facilities.</p> </div> </div> <div class="views-field views-field-field-focus-links"> <div class="field-content"><div class="item-list"><ul><li class="first"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//facilities/general-information/about-nbtc" target="_blank">About the NBTC</a></li> <li><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//education/tours" target="_blank">Get a Tour</a></li> <li><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//new-nbtc/researchers/becoming-nbtc-user-cornell">Become a User</a></li> <li><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//education/minicourses">Take a Class</a></li> <li class="last"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//facilities/general-information/safety-information" target="_blank">Safety Information</a></li> </ul></div></div> </div></div></div><div id="quicktabs-tabpage-view__tabs__block-2" class="quicktabs-tabpage quicktabs-hide"><div class="quicktabs-views-group"> <div class="views-field views-field-field-focus-links"> <div class="field-content"><div class="item-list"><ul><li class="first"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//new-nbtc/researchers/becoming-nbtc-user-cornell" target="_blank">Become a New User?</a></li> <li><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//contact" target="_blank">Contact NBTC Staff?</a></li> <li class="last"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu//facilities/nfi/" target="_blank">Reserve equipment ?</a></li> </ul></div></div> </div></div></div><div id="quicktabs-tabpage-view__tabs__block-3" class="quicktabs-tabpage quicktabs-hide"><div class="quicktabs-views-group"> <div class="views-field views-field-body"> <div class="field-content"><p>We offer tours of our facilities. Stop by and check us out! Our lab operates 24 hours per day, 7 days a week. Our office is open Monday through Friday, 8am - 5pm.</p> </div> </div> <div class="views-field views-field-field-focus-links"> <div class="field-content"><div class="item-list"><ul><li class="first"><a href="https://web.archive.org/web/20170614110147/http://www.cornell.edu/maps/" target="_blank">Cornell University Campus Map</a></li> <li><a href="https://web.archive.org/web/20170614110147/http://www.engineering.cornell.edu/duffield/about.cfm" target="_blank">Duffield Hall</a></li> <li class="last"><a href="https://web.archive.org/web/20170614110147/https://www.nbtc.cornell.edu/sites/default/files/Second%2520floor%2520map.pdf" target="_blank">NBTC Second Floor Map</a></li> </ul></div></div> </div></div></div></div></div> </div> </div> </div> <div id="block-views-downloads-downloads" class="block block-views last odd"> <h2 class="block__title block-title">Downloads</h2> <div class="view view-downloads view-id-downloads view-display-id-downloads view-dom-id-eb29cf9a7a1191d29a5ef12436e596cc"> <div class="view-content"> <div class="item-list"> <ul> <li class="views-row views-row-1 views-row-odd views-row-first"> <span class="views-field views-field-filename"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/file/cha50-operating-instructionspdf">CHA50 Operating Instructions.pdf</a></span> </span> <span class="views-field views-field-nothing"> <span class="field-content">(404.29 KB pdf)</span> </span></li> <li class="views-row views-row-2 views-row-even"> <span class="views-field views-field-filename"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/file/cha-instructions-6-inch-wafers">CHA instructions for 6 inch wafers</a></span> </span> <span class="views-field views-field-nothing"> <span class="field-content">(234.93 KB )</span> </span></li> <li class="views-row views-row-3 views-row-odd views-row-last"> <span class="views-field views-field-filename"> <span class="field-content"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/file/cha-materials-indexpdf">CHA Materials Index.pdf</a></span> </span> <span class="views-field views-field-nothing"> <span class="field-content">(38.44 KB pdf)</span> </span></li> </ul></div> </div> </div> </div> </section> </aside> </div> </div> <footer id="footer"> <div class="wrapper"> <div class="prefooter"> <div class="region region-prefooter"> <div id="block-sitewide-sitewide-address-block" class="block block-sitewide first odd"> <address><span class="sitewide-address-name">Nanobiotechnology Center</span> <span class="sitewide-address"><div class="street-block"><div class="thoroughfare">350 Duffield Hall</div><div class="premise">Cornell University</div></div><div class="addressfield-container-inline locality-block country-US"><span class="locality">Ithaca</span>, <span class="state">NY</span> <span class="postal-code">14853</span></div></span> </address> </div> <div 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class="menu__link">Staff</a></li> <li class="menu__item is-leaf leaf menu-mlid-552"><a href="/web/20170614110147/https://www.nbtc.cornell.edu/contact" class="menu__link">Contact</a></li> <li class="menu__item is-leaf last leaf menu-mlid-973"><a href="https://web.archive.org/web/20170614110147/https://mc2tcn.cornell.edu/" title="" class="menu__link">MSK-Cornell Center for Translation of Cancer Nanomedicine</a></li> </ul></div> </div> <div id="block-sitewide-sitewide-hours-block" class="block block-sitewide last even"> <h2 class="block__title block-title">Hours</h2> <span class="sitewide-hours">Lab:<br>24 hours per day<br>7 days per week<br><br>Office:<br>Mon - Fri 8am - 5pm </span> </div> </footer> </div> </footer> </div> <script src="https://web.archive.org/web/20170614110147js_/https://www.nbtc.cornell.edu/profiles/focus/themes/vanilla/js/colorbox.js?nehan3"></script> </body> </html>