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class="content-box"> <h1 class="title" id="title">西安电子科技大学许晟瑞：衬底工程对氮化物LED的影响研究</h1> <div class="info"> <span style="padding-right:1em">日期：2023-08-02</span> <span id="hits">阅读：387</span> </div> <div class="introduce">核心提示：近日，2023功率与光电半导体器件设计及集成应用论坛于西安召开。论坛由第三代半导体产业技术创新战略联盟（CASA）指导，西安交通</div><div id="content"><div class="content" id="article"><p> <span style="text-indent: 2em;">近日，“2023功率与光电半导体器件设计及集成应用论坛”于西安召开。论坛由第三代半导体产业技术创新战略联盟（CASA）指导，西安交通大学、极智半导体产业网（www.casmita.com）、第三代半导体产业主办，西安电子科技大学、中国科学院半导体研究所、第三代半导体产业技术创新战略联盟人才发展委员会、全国半导体应用产教融合（东莞）职业教育集团联合组织、西安和其光电股份有限公司等单位协办。</span></p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202308/02/133052711.jpg" alt="许晟瑞" width="668" height="444" /></p> <p>期间，“平行论坛2：光电子器件及应用”上，西安电子科技大学微电子学院教授许晟瑞带来了“衬底工程对氮化物LED的影响研究”的主题报告，分享了最新研究成果。第三代半导体又称宽禁带半导体，禁带宽度在 2.2 eV 以上，具有高击穿电场、高饱和电子速度、高热导率、高电子密度、高迁移率等特点。第三代半导体材料的兴起，则是以氮化镓（GaN）材料p型掺杂的突破为起点，成功研制了高亮度蓝光发光二极管和蓝光激光器。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202308/02/133108481.png" width="668" height="377" alt="" /></p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202308/02/133117851.png" width="668" height="380" alt="" /></p> <p>GaN是新一代光电器件、高频、高功率器件的理想材料。目前在快速充电以及5G基站中已经被广泛应用。即便已经具有目前最高的发光效率，氮化物短波长和长波长LED的发光效率依然很低！主要原因之一是缺陷。和无位错单晶的硅和砷化镓相比，氮化镓材料体系深受位错的困扰。氮化物的发展历程是一部和缺陷斗争的历史过程。最终实现了和缺陷的“共存”。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202308/02/133123991.png" width="668" height="379" alt="" /></p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202308/02/133132871.png" width="668" height="376" alt="" /></p> <p>图形衬底技术以及空气腔技术可以极大的改变光路，提高光提取效率。但是电子器件并没有光提取的需求。同时图形衬底制备增加了衬底成本和周期。外延过程中需要外延层的厚度很大，至少需要高于图形高度并修复平整。适用范围有限，对于横向外延速度较慢的AlN等材料，需要非常厚的外延层才能合并。迫切需要一种光电和电子器件通用的、工艺简单的能提高GaN晶体质量的方法。研究采用离子注入诱导GaN成核的方式，使GaN的晶体质量显著提升，进而提升了LED的性能。</p> <p><strong>CASICON 系列活动简介</strong></p> <p> “先进半导体产业大会（CASICON）”由【极智半导体产业网】主办，每年在全国巡回举办的行业综合活动。活动聚焦先进半导体产业发展热点，聚合产业相关各方诉求，通过“主题会议+项目路演+展览”的形式，促进参与各方交流合作，积极推动产业发展。CASICON 系列活动将以助力第三代半导体产业为己任，联合实力资源，持续输出高质量的活动内容，搭建更好的交流平台，为产业发展贡献应尽的力量。</p> <p>（备注：以上信息仅根据现场整理未经嘉宾本人确认，仅供参考！）</p></div> </div> <div class="award"><div onclick="Go('http://www.casmita.com/member/award.php?mid=21&itemid=12770');">打赏</div></div><div id="comment" style="display:;"> <div class="block-head"><a href="http://www.casmita.com/comment/index.php?mid=21&itemid=12770"><b id="comment_count" class="px16 f_red">0</b> 条评论</a></div> <div id="comment_main"><div></div></div> </div> <script type="text/javascript" src="http://www.casmita.com/file/script/comment.js"></script> <div class="related"> <a href="http://www.casmita.com/news/search.php?kw="></a><a href="http://www.casmita.com/news/index.php?catid=6"></a> <div class="bui-box single-mode"> <div class="single-mode-rbox"> <div class="single-mode-rbox-inner"> <div class="title-box"><a 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