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SSLCHINA2024</h1> <div class="info"> <span style="padding-right:1em">日期:2024-10-10</span> <span style="padding-right:1em">来源:半导体产业网</span><span id="hits">阅读:789</span> </div> <div class="introduce">核心提示:中科重仪半导体科技有限公司(简称“中科重仪”)作为第三代半导体氮化镓(GaN)材料生产与技术应用的国家级高新技术企业,将携多款MOCVD设备及氮化镓外延片产品亮相此次展会。</div><div id="content"><div class="content" id="article"><p> 2024年11月18-21日,第十届国际第三代半导体论坛(IFWS2024)&第二十一届中国国际半导体照明论坛(SSLCHINA2024)、先进半导体技术应用创新展(CASTAS)将在苏州国际博览中心举办。</p> <p>中科重仪半导体科技有限公司(简称“中科重仪”)作为第三代半导体氮化镓(GaN)材料生产与技术应用的国家级高新技术企业,将携多款科研型MOCVD设备及氮化镓外延片产品亮相此次展会。值此,诚挚邀请第三代半导体产业同仁共聚论坛,莅临B16号展位参观交流、洽谈合作。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/10/093417532.png" width="668" height="1317" alt="" /></p> <p>同时,中国科学院半导体研究所副研究员姚威振博士将出席论坛,并将在“氮化物衬底、外延生长及其相关设备技术”分论坛上,分享《GaN基光电材料外延与MOCVD反应腔结构关联性研究》主题报告。</p> <p><strong>报告嘉宾:</strong></p> <p style="text-align: center;"><strong><img src="http://www.casmita.com/file/upload/202410/10/093311862.png" width="300" height="420" alt="" /></strong></p> <p style="text-align: center;"><strong>姚威振</strong></p> <p style="text-align: center;"><strong>中国科学院半导体研究所副研究员、中科重仪半导体联合创始人</strong></p> <p>姚威振,博士,中国科学院半导体研究所副研究员,中科重仪半导体联合创始人。九三学社第十五届中央委员会科普工作委员会委员,北京市特聘专家。主要从事氮化物半导体材料、器件与MOCVD装备设计建造技术研究。2018年获法国图尔大学工学博士学位,曾担任国际著名功率半导体公司STMicroelectronics骨干研发工程师。2021年获得中国科学院半导体研究所青年人才推进计划资助,2022年入选中国科学院特聘骨干岗位,2023年凭借其宽禁带半导体材料及国产化MOCVD核心装备领域的深耕细作和参与多项跨学科项目及研究经历,荣获“中国产学研合作创新奖”。</p> <p><strong>演讲报告:</strong>《GaN基光电材料外延与MOCVD反应腔结构关联性研究》</p> <p><strong>演讲会场:</strong>F2-氮化物衬底、外延生长及其相关设备技术</p> <p>报告简介:GaN基半导体材料具有宽禁带,电子迁移饱和速率高,介电常数小,导热性能好等特点,MOCVD反应腔的温场和流场设计对其外延生长至关重要。现有的制备工艺易非故意引入高密度缺陷、杂质及表面起伏,严重影响了材料质量和器件性能,从而阻碍了GaN基光电器件的产业化进程。</p> <p>报告研究了MOCVD反应腔结构与GaN基半导体材料生长质量关联性,通过有效调整腔室高度、气源预处理和天棚温度控温装置,探究了MOCVD腔室结构对GaN基材料外延工艺中晶体质量、杂质缺陷含量和均匀性等影响机制。通过反应腔温场有效调控预翘曲来补偿应力,只需要单层AlGaN缓冲层,就能够实现大尺寸Si基GaN外延厚膜材料的无裂纹均匀生长,减少了现有生长流程和工艺复杂性,形成了一套新颖有效的缓冲层生长技术路线。</p> <p><strong>关于中科重仪:</strong></p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/14/174157731.jpg" alt="中科重仪" width="668" height="500" /></p> <p>中科重仪半导体科技有限公司(简称“中科重仪”)是一家专注于第三代半导体氮化镓(GaN)材料生产与技术应用的国家级高新技术企业。公司成立于2021年,研发中心设在北京,生产基地设于苏州。公司主要从事科研型MOCVD(金属有机化学气相沉积法)国产高端设备,以及高品质、大尺寸GaN外延片材料的生产与销售,并可提供多种半导体测试、分析及定制化解决方案等服务。相关产品可广泛应用于消费电子、可再生能源、数据中心和新能源汽车等领域。</p> <p>您可以通过浏览官网:www.casinstrument.com,了解中科重仪的更多信息。</p> <p>CASInstruments Semico<em></em>nductor Technology Co., Ltd. ("CASI") is a Natio<em></em>nal High-tech Enterprise committed to advancing innovation in Gallium Nitride (GaN) production and application, a third-generation semico<em></em>nductor material. Founded in 2021, the company operates R&D centers in Beijing and production facilities in Suzhou. CASI specializes in developing high-end, domestically produced MOCVD (me<em></em>tal-Organic Chemical Vapor Deposition) systems and manufacturing high-quality, large-size GaN epitaxial wafers. In addition, CASI offers comprehensive semico<em></em>nductor testing, analysis, and customized solutions. Its products are widely used in a broad ranges of industries, such as co<em></em>nsumer electronics, renewable energy, data centers, and new energy vehicles.</p> <p>For further information on CASI, please visit our website at:www.casinstrument.com.</p> <p><strong>产品介绍/a<em></em>bout Products:</strong></p> <p><strong>一、ZY-314/316/318 科研型MOCVD设备/ZY-314/316/318 Research-Oriented MOCVD System</strong></p> <p>自动化控制与数据分析系统:可运行数据处理,原料流量控制,监控辅助设备运行状况等功能,并可进行生长过程预演和回放,同时进一步增强了系统功能和可靠性。</p> <p>Automatic Co<em></em>ntrol and Data Analysis System: This system includes data processing management, raw material flow control, auxiliary equipment monitoring, and simulations and playback of the growth process. These features further enhance both the functio<em></em>nality and reliability of the system.</p> <p>集成VR深度辅助教学系统:用于MOCVD及配套设备模拟与实验室运营维护,以虚拟现实再现材料生长过程,将微观事物具象化,可缩短相关专业技能培训的周期,减少成本支出。</p> <p>VR-Assisted Teaching System: This system is designed to simulate the operation of MOCVD equipment,? supporting systems, and laboratory maintenance. By using virtual reality, the system recreates the material growth process and visualizes microscopic phenomena. This approach significantly shortens the training period for acquiring relevant professio<em></em>nal skills while reduceing costs.</p> <p>用户可定制化:可根据客户需求定制气体管路数量、外延片尺寸(2~8英寸),满足不同材料高质量外延生长。</p> <p>Customizable Option: This system can be customized to adjust the number of gas lines and the size of the epitaxial wafers (ranging from 2 to 8 inches) to meet customer requirements, ensuring high-quality epitaxy growth across various materials.</p> <p><strong>二、氮化镓外延片/GaN Epi-Wafer</strong></p> <p>中科重仪依托自主研发生产型MOCVD设备,有效缓解外延片龟裂状况,并保持产品具有极低的翘曲度。公司所生产的GaN外延片产品拥有独有的高压厚膜缓冲层和钝化层设计,生产力及产品性能均达到国际先进水平。</p> <p>With its independently developed and manufactured MOCVD system, CASI effectively reduces cracking and maintains extremely low warpage in epitaxial films. Its GaN epitaxial wafers feature a unique high-voltage thick film buffer layer and passivation layer design, meeting internatio<em></em>nally advanced standards while ensuring a stable and ample supply.</p> <p><img src="http://www.casmita.com/file/upload/202410/10/093351842.png" width="668" height="278" alt="" /></p> <p><strong>参会联系:</strong></p> <p><strong>第十届国际第三代半导体论坛(IFWS)</strong></p> <p><strong>第二十一届中国国际半导体照明论坛(SSLCHINA)<br /> </strong></p> <p><strong>时间:2024年11月18-21日</strong></p> <p><strong>地点:江苏·苏州国际博览中心·G馆</strong></p> <p>国际第三代半导体论坛(IFWS)是第三代半导体产业在中国地区的年度盛会,是前瞻性、全球性、高层次的综合性论坛。会议以促进第三代半导体与电力电子技术、移动通信技术、紫外探测技术和应用的国际交流与合作,引领第三代半导体新兴产业的发展方向为活动宗旨,全面覆盖行业基础研究、衬底外延工艺、电力电子器件、电路与模块、下游应用的创新发展,联结产、学、研、用,提供全球范围的全产业链合作平台。在过去的九年时间里,IFWS延请宽禁带半导体领域国际顶级学术权威分享最前沿技术动态,已发展成具有业界影响力的综合性专业论坛。</p> <p>中国国际半导体照明论坛(SSLCHINA)是SSL国际系列论坛在中国地区的年度盛会,SSLCHINA是半导体照明领域最具规模、参与度最高、口碑最好的全球性专业论坛。SSL国际系列论坛以促进半导体照明技术和应用的国际交流与合作,引领半导体照明产业的发展方向为活动宗旨,全面覆盖行业工艺装备、原材料,技术、产品与应用的创新发展,提供全球范围的全产业链合作平台,致力于拓展业界所关注的目标市场,以专业精神恒久缔造企业的商业价值。</p> <p>今年,国际第三代半导体论坛与中国国际半导体照明论坛于11月18-21日在苏州国际博览中心举办,同台汇力,相映生辉,放眼LED+和先进电子材料更广阔的未来。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/18/092808772.jpg" alt="张在前" width="668" height="890" /></p></div> </div> <div class="award"><div onclick="Go('http://www.casmita.com/member/award.php?mid=21&itemid=16765');">打赏</div></div><div id="comment" style="display:;"> <div class="block-head"><a href="http://www.casmita.com/comment/index.php?mid=21&itemid=16765"><b id="comment_count" class="px16 f_red">0</b> 条评论</a></div> <div id="comment_main"><div></div></div> </div> <script type="text/javascript" src="http://www.casmita.com/file/script/comment.js"></script> <div class="related"> <a href="http://www.casmita.com/news/search.php?kw="></a><a 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