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target="_blank"><i class="icon icon-qzone"></i><span>Qzone</span></a> <a class="share-wechat"><i class="icon icon-wechat"></i><span>微信</span></a> </div> <div class="content-box"> <h1 class="title" id="title">三安半导体“氮化镓功率器件的制备方法、氮化镓功率器件”专利公布</h1> <div class="info"> <span style="padding-right:1em">日期：2024-07-03</span> <span id="hits">阅读：261</span> </div> <div class="introduce">核心提示：天眼查显示，湖南三安半导体有限责任公司氮化镓功率器件的制备方法、氮化镓功率器件专利公布，申请公布日为2024年7月2日，申请公</div><div id="content"><div class="content" id="article"><p>天眼查显示，湖南三安半导体有限责任公司“氮化镓功率器件的制备方法、氮化镓功率器件”专利公布，申请公布日为2024年7月2日，申请公布号为CN118280836A。</p> <p>本申请提供了一种氮化镓功率器件的制备方法、氮化镓功率器件；该制备方法包括：提供半导体衬底，在半导体衬底中的第二半导体层的上表面形成间隔设置的盖帽层、源极和漏极；在第二半导体层的上表面形成第一介质层；在第一介质层的上表面形成第二介质层，其中，第二介质层的材料包括水氧基氧化铝；在第二介质层对应盖帽层的区域形成贯穿第二介质层的第一开口；在第一开口内形成第三介质层，其中，第三介质层的材料包括臭氧基氧化铝。具体的，通过在第一开口内形成第三介质层，利用第三介质层的强氧化作用，能够使后续刻蚀将盖帽层表面的第一介质层刻蚀干净，以此在后续工艺形成栅极时，能够增加栅极漏电，减小阈值电压，提高器件性能。</p></div> </div> <div class="award"><div 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