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id="title">IFWS&SSLCHINA2024| 氮化物半导体固态紫外技术及应用新动向</h1> <div class="info"> <span style="padding-right:1em">日期：2024-11-26</span> <span id="hits">阅读：482</span> </div> <div class="introduce">核心提示：论坛期间的“氮化物半导体固态紫外技术及应用”上，等专家们带来精彩报告，共同探讨氮化物半导体固态紫外技术及应用的最新进展。厦门大学特聘教授康俊勇，中国科学院半导体所宽禁带半导体研发中心主任、研究员王军喜共同主持了本届峰会。</div><div id="content"><div class="content" id="article"><p> &zwnj;<a href="https://www.baidu.com/s?rsv_dl=re_dqa_generate&sa=re_dqa_generate&wd=%E6%B0%AE%E5%8C%96%E7%89%A9%E5%8D%8A%E5%AF%BC%E4%BD%93%E5%9B%BA%E6%80%81%E7%B4%AB%E5%A4%96%E6%8A%80%E6%9C%AF&rsv_pq=ec2ff60b005220f0&oq=%E6%B0%AE%E5%8C%96%E7%89%A9%E5%8D%8A%E5%AF%BC%E4%BD%93%E5%9B%BA%E6%80%81%E7%B4%AB%E5%A4%96%E6%8A%80%E6%9C%AF%E5%8F%8A%E5%BA%94%E7%94%A8%E7%8E%B0%E5%86%B5%E6%8F%8F%E8%BF%B0&rsv_t=4f3cMHOhnI70y/Q+DATDnReGsQTq/iGC1s4z0IAP94bBhWmCCvhOKPi/+ek&tn=baidu&ie=utf-8">氮化物半导体固态紫外技术</a>&zwnj;，特别是基于<a href="https://www.baidu.com/s?rsv_dl=re_dqa_generate&sa=re_dqa_generate&wd=AlGaN&rsv_pq=ec2ff60b005220f0&oq=%E6%B0%AE%E5%8C%96%E7%89%A9%E5%8D%8A%E5%AF%BC%E4%BD%93%E5%9B%BA%E6%80%81%E7%B4%AB%E5%A4%96%E6%8A%80%E6%9C%AF%E5%8F%8A%E5%BA%94%E7%94%A8%E7%8E%B0%E5%86%B5%E6%8F%8F%E8%BF%B0&rsv_t=4f3cMHOhnI70y/Q+DATDnReGsQTq/iGC1s4z0IAP94bBhWmCCvhOKPi/+ek&tn=baidu&ie=utf-8">AlGaN</a>材料的固态紫外光源，是氮化物光电子发展的重要方向和热点领域。在材料科学、光电子器件研究和应用领域都取得了显著进展，但仍需进一步解决一些技术瓶颈问题，以实现更广泛的应用。 </p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202411/26/164323381.jpg" alt="场景" width="668" height="445" /></p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202411/26/164850341.jpg" alt="" /></p> <p>近日，第十届国际第三代半导体论坛&第二十一届中国国际半导体照明论坛（IFWS&SSLCHINA2024）在苏州召开。 论坛期间，国家第三代半导体技术创新中心（苏州）、北京北方华创微电子装备有限公司、苏州思体尔软件科技有限公司协办的“氮化物半导体固态紫外技术及应用”上，日本三重大学教授三宅秀人，南京大学电子科学与工程学院教授陆海，中国科学院半导体研究所研究员闫建昌，厦门大学副教授尹君，北京大学物理学院特聘副研究员王嘉铭，中<span style="text-indent: 2em;">国科学技术大学教授孙海定，南京大学助理教授蔡青，郑州大学Muhammad Nawaz SHARIF，中国科学院半导体研究所吴涵，华中科技大学、武汉优炜芯科技有限公司、武汉纺织大学单茂诚等专家们带来精彩报告，共同探讨氮化物半导体固态紫外技术及应用的最新进展。厦门大学特聘教授康俊勇，中国科学院半导体所宽禁带半导体研发中心主任、研究员王军喜共同主持了本届峰会。</span></p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164358241.jpg" alt="康俊勇-主持" width="668" height="445" /></p> <p align="center">康俊勇</p> <p align="center">厦门大学特聘教授</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164415331.jpg" alt="王军喜-主持人" /></p> <p align="center">王军喜</p> <p align="center">中国科学院半导体所宽禁带半导体研发中心主任、研究员</p> <p style="text-align: center;"><b> <img src="http://www.casmita.com/file/upload/202411/26/164427541.jpg" alt="三宅秀人" /></b></p> <p align="center">三宅秀人</p> <p align="center">日本三重大学教授</p> <p>日本三重大学教授三宅秀人做了“在面对面退火溅射沉积AlN模板上制备深紫外LED”的主题报告，分享了相关研究进展。涉及面对面退火溅射沉积氮化铝模板（FFA Sp AlN，薄膜位错密度低/表面平整度优越/制造工艺成本降低。研究显示，FFA Sp AlN模板中TDDs的减少，研究发现AlN模板中的边缘位错密度和螺旋位错密度分别为10<sup>7</sup>和103 cm<sup>-2</sup>。报告演示了在FFA Sp AlN上制造的深UVC和远UVC LED，在FFA Sp AlN上展示了高效UV-C LED。在FFA-Sp AlN模板上制备m极性AlN和230nm MQW，PL效率显著提高。</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164440501.jpg" alt="陆海" /></p> <p align="center">陆海</p> <p align="center">南京大学电子科学与工程学院教授</p> <p>南京大学电子科学与工程学院教授陆海做了“宽禁带半导体紫外光电探测器研究进展与产业应用”的主题报告，分享了第三代半导体紫外探测器技术、紫外单光子探测技术、宽禁带半导体软X射线探测器等内容。报告指出，近年来半导体照明产业的高速发展，为GaN基紫外探测器的产业化打下了良好的产业链基础。基于SiC和GaN的常规结构紫外探测器已经实现产业化，被批量应用于环境监控、火焰探测、污染物检测、紫外固化和紫外消毒设备的辐照剂量监控等领域。半导体软X射线探测器方面，现有商用Si基软X射线探测器几乎全部由国外2-3家公司所生产，已经完成了多年的技术迭代；我国在这一领域开展的研究工作稀少，依靠国外产品；Si基软X射线探测器应用上受到自身性能限制：二级以上制冷、封装成本高。</p> <p style="text-align: center;"><b><img src="http://www.casmita.com/file/upload/202411/26/164639321.jpg" alt="闫建昌" width="668" height="445" /></b></p> <p align="center">闫建昌</p> <p align="center">中国科学院半导体研究所研究员</p> <p align="center">《非极性面AlN与紫外LED》</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164502991.jpg" alt="尹君" width="668" height="445" /></p> <p style="text-align: center;"> 尹君</p> <p align="center">厦门大学副教授</p> <p>厦门大学副教授尹君做了“微结构光操控应用于波长短于250nm深紫外LED光提取增强”“的主题报告，分享了用于DUV LED的等离子体耦合增强型LEE、用于高效亚250nm LED的等离子ODR焊盘等内容。报告显示，等离子体耦合是提高DUV LED EQE的有效方法，SP Exciton耦合与当前工艺的兼容性较差，外耦合以低成本显示出巨大的应用前景。光子的波矢量由n接触棒和等离子体垫操纵等。</p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164522701.jpg" alt="许福军" /></p> <p align="center"><span style="font-family: 微软雅黑;">王嘉铭</span></p> <p align="center">北京大学物理学院特聘<span style="font-family: 微软雅黑; font-size: 10.5pt; text-indent: 2em;">副研究员</span></p> <p class="MsoNormal"><span style="font-family: 微软雅黑; font-size: 10.5pt;"><o:p></o:p></span></p> <p>北京大学物理学院特聘副研究员王嘉铭做了”高效AlGaN基DUV发光二极管研究“的主题报告，分享了倒装芯片DUV LED的研究进展、垂直注入DUV LED的研究进展等内容。研究显示，开发了一种由多级p-AlGaN层组成的集成p区，这有助于提高有源区中的空穴浓度，同时抑制DUV LED中的电子泄漏；提出了一种由图案化ITO和Al反射器组成的复合p电极，确保了欧姆接触的形成和DUV光的高反射率，提高了DUV LED的光提取效率；280nm倒装芯片DUV LED实现了12.98%的最大WPE，这是迄今为止报告的最高值之一；提出了一种突破性的DUV LED路线图，实现了2至4英寸垂直注入配置器件的晶圆级制造。</p> <p style="text-align: center;"><b><img src="http://www.casmita.com/file/upload/202411/26/164653371.jpg" alt="孙海定" width="668" height="445" /></b></p> <p align="center">孙海定</p> <p align="center">中国科学技术大学教授</p> <p style="text-align: center;"> 《GaN基紫外光电集成器件》 </p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202411/26/164933591.jpg" alt="蔡青" width="668" height="445" /></p> <p align="center">蔡青</p> <p align="center">南京大学助理教授</p> <p style="text-align: center;">《高灵敏度宽禁带半导体紫外探测器新结构设计与器件物理研究》<b> </b></p> <p style="text-align: center;"> <img src="http://www.casmita.com/file/upload/202411/26/164542791.jpg" width="668" height="445" alt="" /></p> <p align="center">Muhammad Nawaz SHARIF</p> <p align="center">郑州大学</p> <p>郑州大学Muhammad Nawaz SHARIF做了”基于高效n极AlGaN隧道结的254 nm DUV LED实现零效率下降“的主题报告，分享了AlGaN基紫外LED的挑战和低空穴注入的挑战，基于AlGaN的隧道结紫外LED和下划线物理，基于AlGaN-TJ的DUV LED模型等研究u成果。报告指出，需要超过10%EQE的DUV 254nm LED的实际使用改进降低了工作电压（Vth）和注入电流密度（Jth）。结合高度透明的AlGaN隧道结（TJ）->更高的空穴注入和更高的载流子注入效率（CIE），->光提取效率（LEE），并最大限度地减少电子溢出->IQE。可忽略的电子泄漏和高空穴输运到MQW中。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202411/26/165823851.jpg" alt="吴涵" width="668" height="445" /></p> <p align="center"><a name="OLE_l<em></em>ink5"></a>吴涵</p> <p align="center">中国科学院半导体研究所</p> <p>中国科学院半导体研究所吴涵做了”基于高温退火AlN模板的低阈值AlGaN多量子阱激光器“的主题报告，分享了AlN模板的制备、AlN/AlGaN多量子阱的光泵浦等内容。研究显示，较厚的HTA-AlN基板在一定范围内具有较低的位错密度。足够的热清洗时间有效去除AlON岛。与MO AlN模板相比，Reg-HTA-AlN模板上的激光条具有较低的阈值和较窄的线宽。这是由于较低的位错密度和更光滑的表面形态。随着腔长的增加，激光阈值和线宽整体减小。（腔长=2mm，阈值=86 kW/cm2，线宽=0.22 nm，峰值波长=262 nm）。</p> <p style="text-align: center;"><b style="text-indent: 2em;"><img src="http://www.casmita.com/file/upload/202411/26/165957401.jpg" alt="单茂诚" /></b></p> <p align="center">单茂诚</p> <p align="center">华中科技大学、武汉优炜芯科技有限公司、武汉纺织大学</p> <p align="center">《AlGaN基深紫外micro -LED和光泵浦激光器研究》</p> <p>（根据现场资料整理，仅供参考） </p></div> </div> <div class="award"><div 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