CINXE.COM

Cleanroom - Wikipedia

<!DOCTYPE html> <html class="client-nojs vector-feature-language-in-header-enabled vector-feature-language-in-main-page-header-disabled vector-feature-sticky-header-disabled vector-feature-page-tools-pinned-disabled vector-feature-toc-pinned-clientpref-1 vector-feature-main-menu-pinned-disabled vector-feature-limited-width-clientpref-1 vector-feature-limited-width-content-enabled vector-feature-custom-font-size-clientpref-1 vector-feature-appearance-pinned-clientpref-1 vector-feature-night-mode-enabled skin-theme-clientpref-day vector-toc-available" lang="en" dir="ltr"> <head> <meta charset="UTF-8"> <title>Cleanroom - Wikipedia</title> <script>(function(){var className="client-js vector-feature-language-in-header-enabled vector-feature-language-in-main-page-header-disabled vector-feature-sticky-header-disabled vector-feature-page-tools-pinned-disabled vector-feature-toc-pinned-clientpref-1 vector-feature-main-menu-pinned-disabled vector-feature-limited-width-clientpref-1 vector-feature-limited-width-content-enabled vector-feature-custom-font-size-clientpref-1 vector-feature-appearance-pinned-clientpref-1 vector-feature-night-mode-enabled skin-theme-clientpref-day vector-toc-available";var cookie=document.cookie.match(/(?:^|; )enwikimwclientpreferences=([^;]+)/);if(cookie){cookie[1].split('%2C').forEach(function(pref){className=className.replace(new RegExp('(^| )'+pref.replace(/-clientpref-\w+$|[^\w-]+/g,'')+'-clientpref-\\w+( |$)'),'$1'+pref+'$2');});}document.documentElement.className=className;}());RLCONF={"wgBreakFrames":false,"wgSeparatorTransformTable":["",""],"wgDigitTransformTable":["",""],"wgDefaultDateFormat":"dmy", "wgMonthNames":["","January","February","March","April","May","June","July","August","September","October","November","December"],"wgRequestId":"64a383a3-3050-4f89-9c30-286dcce92324","wgCanonicalNamespace":"","wgCanonicalSpecialPageName":false,"wgNamespaceNumber":0,"wgPageName":"Cleanroom","wgTitle":"Cleanroom","wgCurRevisionId":1250127846,"wgRevisionId":1250127846,"wgArticleId":275712,"wgIsArticle":true,"wgIsRedirect":false,"wgAction":"view","wgUserName":null,"wgUserGroups":["*"],"wgCategories":["All articles with dead external links","Articles with dead external links from December 2023","Articles with permanently dead external links","CS1 maint: archived copy as title","Articles with short description","Short description is different from Wikidata","All articles with unsourced statements","Articles with unsourced statements from April 2024","Articles with unsourced statements from November 2023","All Wikipedia articles needing clarification", "Wikipedia articles needing clarification from November 2023","Articles with unsourced statements from August 2023","Commons category link is on Wikidata","Cleanroom technology","Rooms","Semiconductor device fabrication","Filters","Telecommunications engineering"],"wgPageViewLanguage":"en","wgPageContentLanguage":"en","wgPageContentModel":"wikitext","wgRelevantPageName":"Cleanroom","wgRelevantArticleId":275712,"wgIsProbablyEditable":true,"wgRelevantPageIsProbablyEditable":true,"wgRestrictionEdit":[],"wgRestrictionMove":[],"wgRedirectedFrom":"Clean_room","wgNoticeProject":"wikipedia","wgCiteReferencePreviewsActive":false,"wgFlaggedRevsParams":{"tags":{"status":{"levels":1}}},"wgMediaViewerOnClick":true,"wgMediaViewerEnabledByDefault":true,"wgPopupsFlags":0,"wgVisualEditor":{"pageLanguageCode":"en","pageLanguageDir":"ltr","pageVariantFallbacks":"en"},"wgMFDisplayWikibaseDescriptions":{"search":true,"watchlist":true,"tagline":false,"nearby":true},"wgWMESchemaEditAttemptStepOversample": false,"wgWMEPageLength":40000,"wgInternalRedirectTargetUrl":"/wiki/Cleanroom","wgRelatedArticlesCompat":[],"wgCentralAuthMobileDomain":false,"wgEditSubmitButtonLabelPublish":true,"wgULSPosition":"interlanguage","wgULSisCompactLinksEnabled":false,"wgVector2022LanguageInHeader":true,"wgULSisLanguageSelectorEmpty":false,"wgWikibaseItemId":"Q794827","wgCheckUserClientHintsHeadersJsApi":["brands","architecture","bitness","fullVersionList","mobile","model","platform","platformVersion"],"GEHomepageSuggestedEditsEnableTopics":true,"wgGETopicsMatchModeEnabled":false,"wgGEStructuredTaskRejectionReasonTextInputEnabled":false,"wgGELevelingUpEnabledForUser":false};RLSTATE={"ext.globalCssJs.user.styles":"ready","site.styles":"ready","user.styles":"ready","ext.globalCssJs.user":"ready","user":"ready","user.options":"loading","ext.cite.styles":"ready","ext.math.styles":"ready","skins.vector.search.codex.styles":"ready","skins.vector.styles":"ready","skins.vector.icons":"ready", "ext.wikimediamessages.styles":"ready","ext.visualEditor.desktopArticleTarget.noscript":"ready","ext.uls.interlanguage":"ready","wikibase.client.init":"ready","ext.wikimediaBadges":"ready"};RLPAGEMODULES=["mediawiki.action.view.redirect","ext.cite.ux-enhancements","mediawiki.page.media","site","mediawiki.page.ready","mediawiki.toc","skins.vector.js","ext.centralNotice.geoIP","ext.centralNotice.startUp","ext.gadget.ReferenceTooltips","ext.gadget.switcher","ext.urlShortener.toolbar","ext.centralauth.centralautologin","mmv.bootstrap","ext.popups","ext.visualEditor.desktopArticleTarget.init","ext.visualEditor.targetLoader","ext.echo.centralauth","ext.eventLogging","ext.wikimediaEvents","ext.navigationTiming","ext.uls.interface","ext.cx.eventlogging.campaigns","ext.cx.uls.quick.actions","wikibase.client.vector-2022","ext.checkUser.clientHints","ext.quicksurveys.init","ext.growthExperiments.SuggestedEditSession","wikibase.sidebar.tracking"];</script> <script>(RLQ=window.RLQ||[]).push(function(){mw.loader.impl(function(){return["user.options@12s5i",function($,jQuery,require,module){mw.user.tokens.set({"patrolToken":"+\\","watchToken":"+\\","csrfToken":"+\\"}); }];});});</script> <link rel="stylesheet" href="/w/load.php?lang=en&amp;modules=ext.cite.styles%7Cext.math.styles%7Cext.uls.interlanguage%7Cext.visualEditor.desktopArticleTarget.noscript%7Cext.wikimediaBadges%7Cext.wikimediamessages.styles%7Cskins.vector.icons%2Cstyles%7Cskins.vector.search.codex.styles%7Cwikibase.client.init&amp;only=styles&amp;skin=vector-2022"> <script async="" src="/w/load.php?lang=en&amp;modules=startup&amp;only=scripts&amp;raw=1&amp;skin=vector-2022"></script> <meta name="ResourceLoaderDynamicStyles" content=""> <link rel="stylesheet" href="/w/load.php?lang=en&amp;modules=site.styles&amp;only=styles&amp;skin=vector-2022"> <meta name="generator" content="MediaWiki 1.44.0-wmf.4"> <meta name="referrer" content="origin"> <meta name="referrer" content="origin-when-cross-origin"> <meta name="robots" content="max-image-preview:standard"> <meta name="format-detection" content="telephone=no"> <meta property="og:image" content="https://upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/1200px-Clean_room.jpg"> <meta property="og:image:width" content="1200"> <meta property="og:image:height" content="930"> <meta property="og:image" content="https://upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/800px-Clean_room.jpg"> <meta property="og:image:width" content="800"> <meta property="og:image:height" content="620"> <meta property="og:image" content="https://upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/640px-Clean_room.jpg"> <meta property="og:image:width" content="640"> <meta property="og:image:height" content="496"> <meta name="viewport" content="width=1120"> <meta property="og:title" content="Cleanroom - Wikipedia"> <meta property="og:type" content="website"> <link rel="preconnect" href="//upload.wikimedia.org"> <link rel="alternate" media="only screen and (max-width: 640px)" href="//en.m.wikipedia.org/wiki/Cleanroom"> <link rel="alternate" type="application/x-wiki" title="Edit this page" href="/w/index.php?title=Cleanroom&amp;action=edit"> <link rel="apple-touch-icon" href="/static/apple-touch/wikipedia.png"> <link rel="icon" href="/static/favicon/wikipedia.ico"> <link rel="search" type="application/opensearchdescription+xml" href="/w/rest.php/v1/search" title="Wikipedia (en)"> <link rel="EditURI" type="application/rsd+xml" href="//en.wikipedia.org/w/api.php?action=rsd"> <link rel="canonical" href="https://en.wikipedia.org/wiki/Cleanroom"> <link rel="license" href="https://creativecommons.org/licenses/by-sa/4.0/deed.en"> <link rel="alternate" type="application/atom+xml" title="Wikipedia Atom feed" href="/w/index.php?title=Special:RecentChanges&amp;feed=atom"> <link rel="dns-prefetch" href="//meta.wikimedia.org" /> <link rel="dns-prefetch" href="//login.wikimedia.org"> </head> <body class="skin--responsive skin-vector skin-vector-search-vue mediawiki ltr sitedir-ltr mw-hide-empty-elt ns-0 ns-subject mw-editable page-Cleanroom rootpage-Cleanroom skin-vector-2022 action-view"><a class="mw-jump-link" href="#bodyContent">Jump to content</a> <div class="vector-header-container"> <header class="vector-header mw-header"> <div class="vector-header-start"> <nav class="vector-main-menu-landmark" aria-label="Site"> <div id="vector-main-menu-dropdown" class="vector-dropdown vector-main-menu-dropdown vector-button-flush-left vector-button-flush-right" > <input type="checkbox" id="vector-main-menu-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-main-menu-dropdown" class="vector-dropdown-checkbox " aria-label="Main menu" > <label id="vector-main-menu-dropdown-label" for="vector-main-menu-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-menu mw-ui-icon-wikimedia-menu"></span> <span class="vector-dropdown-label-text">Main menu</span> </label> <div class="vector-dropdown-content"> <div id="vector-main-menu-unpinned-container" class="vector-unpinned-container"> <div id="vector-main-menu" class="vector-main-menu vector-pinnable-element"> <div class="vector-pinnable-header vector-main-menu-pinnable-header vector-pinnable-header-unpinned" data-feature-name="main-menu-pinned" data-pinnable-element-id="vector-main-menu" data-pinned-container-id="vector-main-menu-pinned-container" data-unpinned-container-id="vector-main-menu-unpinned-container" > <div class="vector-pinnable-header-label">Main menu</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-main-menu.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-main-menu.unpin">hide</button> </div> <div id="p-navigation" class="vector-menu mw-portlet mw-portlet-navigation" > <div class="vector-menu-heading"> Navigation </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="n-mainpage-description" class="mw-list-item"><a href="/wiki/Main_Page" title="Visit the main page [z]" accesskey="z"><span>Main page</span></a></li><li id="n-contents" class="mw-list-item"><a href="/wiki/Wikipedia:Contents" title="Guides to browsing Wikipedia"><span>Contents</span></a></li><li id="n-currentevents" class="mw-list-item"><a href="/wiki/Portal:Current_events" title="Articles related to current events"><span>Current events</span></a></li><li id="n-randompage" class="mw-list-item"><a href="/wiki/Special:Random" title="Visit a randomly selected article [x]" accesskey="x"><span>Random article</span></a></li><li id="n-aboutsite" class="mw-list-item"><a href="/wiki/Wikipedia:About" title="Learn about Wikipedia and how it works"><span>About Wikipedia</span></a></li><li id="n-contactpage" class="mw-list-item"><a href="//en.wikipedia.org/wiki/Wikipedia:Contact_us" title="How to contact Wikipedia"><span>Contact us</span></a></li> </ul> </div> </div> <div id="p-interaction" class="vector-menu mw-portlet mw-portlet-interaction" > <div class="vector-menu-heading"> Contribute </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="n-help" class="mw-list-item"><a href="/wiki/Help:Contents" title="Guidance on how to use and edit Wikipedia"><span>Help</span></a></li><li id="n-introduction" class="mw-list-item"><a href="/wiki/Help:Introduction" title="Learn how to edit Wikipedia"><span>Learn to edit</span></a></li><li id="n-portal" class="mw-list-item"><a href="/wiki/Wikipedia:Community_portal" title="The hub for editors"><span>Community portal</span></a></li><li id="n-recentchanges" class="mw-list-item"><a href="/wiki/Special:RecentChanges" title="A list of recent changes to Wikipedia [r]" accesskey="r"><span>Recent changes</span></a></li><li id="n-upload" class="mw-list-item"><a href="/wiki/Wikipedia:File_upload_wizard" title="Add images or other media for use on Wikipedia"><span>Upload file</span></a></li> </ul> </div> </div> </div> </div> </div> </div> </nav> <a href="/wiki/Main_Page" class="mw-logo"> <img class="mw-logo-icon" src="/static/images/icons/wikipedia.png" alt="" aria-hidden="true" height="50" width="50"> <span class="mw-logo-container skin-invert"> <img class="mw-logo-wordmark" alt="Wikipedia" src="/static/images/mobile/copyright/wikipedia-wordmark-en.svg" style="width: 7.5em; height: 1.125em;"> <img class="mw-logo-tagline" alt="The Free Encyclopedia" src="/static/images/mobile/copyright/wikipedia-tagline-en.svg" width="117" height="13" style="width: 7.3125em; height: 0.8125em;"> </span> </a> </div> <div class="vector-header-end"> <div id="p-search" role="search" class="vector-search-box-vue vector-search-box-collapses vector-search-box-show-thumbnail vector-search-box-auto-expand-width vector-search-box"> <a href="/wiki/Special:Search" class="cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only search-toggle" title="Search Wikipedia [f]" accesskey="f"><span class="vector-icon mw-ui-icon-search mw-ui-icon-wikimedia-search"></span> <span>Search</span> </a> <div class="vector-typeahead-search-container"> <div class="cdx-typeahead-search cdx-typeahead-search--show-thumbnail cdx-typeahead-search--auto-expand-width"> <form action="/w/index.php" id="searchform" class="cdx-search-input cdx-search-input--has-end-button"> <div id="simpleSearch" class="cdx-search-input__input-wrapper" data-search-loc="header-moved"> <div class="cdx-text-input cdx-text-input--has-start-icon"> <input class="cdx-text-input__input" type="search" name="search" placeholder="Search Wikipedia" aria-label="Search Wikipedia" autocapitalize="sentences" title="Search Wikipedia [f]" accesskey="f" id="searchInput" > <span class="cdx-text-input__icon cdx-text-input__start-icon"></span> </div> <input type="hidden" name="title" value="Special:Search"> </div> <button class="cdx-button cdx-search-input__end-button">Search</button> </form> </div> </div> </div> <nav class="vector-user-links vector-user-links-wide" aria-label="Personal tools"> <div class="vector-user-links-main"> <div id="p-vector-user-menu-preferences" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <div id="p-vector-user-menu-userpage" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <nav class="vector-appearance-landmark" aria-label="Appearance"> <div id="vector-appearance-dropdown" class="vector-dropdown " title="Change the appearance of the page&#039;s font size, width, and color" > <input type="checkbox" id="vector-appearance-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-appearance-dropdown" class="vector-dropdown-checkbox " aria-label="Appearance" > <label id="vector-appearance-dropdown-label" for="vector-appearance-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-appearance mw-ui-icon-wikimedia-appearance"></span> <span class="vector-dropdown-label-text">Appearance</span> </label> <div class="vector-dropdown-content"> <div id="vector-appearance-unpinned-container" class="vector-unpinned-container"> </div> </div> </div> </nav> <div id="p-vector-user-menu-notifications" class="vector-menu mw-portlet emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> <div id="p-vector-user-menu-overflow" class="vector-menu mw-portlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-sitesupport-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="https://donate.wikimedia.org/wiki/Special:FundraiserRedirector?utm_source=donate&amp;utm_medium=sidebar&amp;utm_campaign=C13_en.wikipedia.org&amp;uselang=en" class=""><span>Donate</span></a> </li> <li id="pt-createaccount-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="/w/index.php?title=Special:CreateAccount&amp;returnto=Cleanroom" title="You are encouraged to create an account and log in; however, it is not mandatory" class=""><span>Create account</span></a> </li> <li id="pt-login-2" class="user-links-collapsible-item mw-list-item user-links-collapsible-item"><a data-mw="interface" href="/w/index.php?title=Special:UserLogin&amp;returnto=Cleanroom" title="You&#039;re encouraged to log in; however, it&#039;s not mandatory. [o]" accesskey="o" class=""><span>Log in</span></a> </li> </ul> </div> </div> </div> <div id="vector-user-links-dropdown" class="vector-dropdown vector-user-menu vector-button-flush-right vector-user-menu-logged-out" title="Log in and more options" > <input type="checkbox" id="vector-user-links-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-user-links-dropdown" class="vector-dropdown-checkbox " aria-label="Personal tools" > <label id="vector-user-links-dropdown-label" for="vector-user-links-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-ellipsis mw-ui-icon-wikimedia-ellipsis"></span> <span class="vector-dropdown-label-text">Personal tools</span> </label> <div class="vector-dropdown-content"> <div id="p-personal" class="vector-menu mw-portlet mw-portlet-personal user-links-collapsible-item" title="User menu" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-sitesupport" class="user-links-collapsible-item mw-list-item"><a href="https://donate.wikimedia.org/wiki/Special:FundraiserRedirector?utm_source=donate&amp;utm_medium=sidebar&amp;utm_campaign=C13_en.wikipedia.org&amp;uselang=en"><span>Donate</span></a></li><li id="pt-createaccount" class="user-links-collapsible-item mw-list-item"><a href="/w/index.php?title=Special:CreateAccount&amp;returnto=Cleanroom" title="You are encouraged to create an account and log in; however, it is not mandatory"><span class="vector-icon mw-ui-icon-userAdd mw-ui-icon-wikimedia-userAdd"></span> <span>Create account</span></a></li><li id="pt-login" class="user-links-collapsible-item mw-list-item"><a href="/w/index.php?title=Special:UserLogin&amp;returnto=Cleanroom" title="You&#039;re encouraged to log in; however, it&#039;s not mandatory. [o]" accesskey="o"><span class="vector-icon mw-ui-icon-logIn mw-ui-icon-wikimedia-logIn"></span> <span>Log in</span></a></li> </ul> </div> </div> <div id="p-user-menu-anon-editor" class="vector-menu mw-portlet mw-portlet-user-menu-anon-editor" > <div class="vector-menu-heading"> Pages for logged out editors <a href="/wiki/Help:Introduction" aria-label="Learn more about editing"><span>learn more</span></a> </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="pt-anoncontribs" class="mw-list-item"><a href="/wiki/Special:MyContributions" title="A list of edits made from this IP address [y]" accesskey="y"><span>Contributions</span></a></li><li id="pt-anontalk" class="mw-list-item"><a href="/wiki/Special:MyTalk" title="Discussion about edits from this IP address [n]" accesskey="n"><span>Talk</span></a></li> </ul> </div> </div> </div> </div> </nav> </div> </header> </div> <div class="mw-page-container"> <div class="mw-page-container-inner"> <div class="vector-sitenotice-container"> <div id="siteNotice"><!-- CentralNotice --></div> </div> <div class="vector-column-start"> <div class="vector-main-menu-container"> <div id="mw-navigation"> <nav id="mw-panel" class="vector-main-menu-landmark" aria-label="Site"> <div id="vector-main-menu-pinned-container" class="vector-pinned-container"> </div> </nav> </div> </div> <div class="vector-sticky-pinned-container"> <nav id="mw-panel-toc" aria-label="Contents" data-event-name="ui.sidebar-toc" class="mw-table-of-contents-container vector-toc-landmark"> <div id="vector-toc-pinned-container" class="vector-pinned-container"> <div id="vector-toc" class="vector-toc vector-pinnable-element"> <div class="vector-pinnable-header vector-toc-pinnable-header vector-pinnable-header-pinned" data-feature-name="toc-pinned" data-pinnable-element-id="vector-toc" > <h2 class="vector-pinnable-header-label">Contents</h2> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-toc.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-toc.unpin">hide</button> </div> <ul class="vector-toc-contents" id="mw-panel-toc-list"> <li id="toc-mw-content-text" class="vector-toc-list-item vector-toc-level-1"> <a href="#" class="vector-toc-link"> <div class="vector-toc-text">(Top)</div> </a> </li> <li id="toc-History" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#History"> <div class="vector-toc-text"> <span class="vector-toc-numb">1</span> <span>History</span> </div> </a> <ul id="toc-History-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Overview" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Overview"> <div class="vector-toc-text"> <span class="vector-toc-numb">2</span> <span>Overview</span> </div> </a> <ul id="toc-Overview-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Basic_construction" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Basic_construction"> <div class="vector-toc-text"> <span class="vector-toc-numb">3</span> <span>Basic construction</span> </div> </a> <button aria-controls="toc-Basic_construction-sublist" class="cdx-button cdx-button--weight-quiet cdx-button--icon-only vector-toc-toggle"> <span class="vector-icon mw-ui-icon-wikimedia-expand"></span> <span>Toggle Basic construction subsection</span> </button> <ul id="toc-Basic_construction-sublist" class="vector-toc-list"> <li id="toc-Airflow_principles" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#Airflow_principles"> <div class="vector-toc-text"> <span class="vector-toc-numb">3.1</span> <span>Airflow principles</span> </div> </a> <ul id="toc-Airflow_principles-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-Cleanrooms_of_different_kinds" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#Cleanrooms_of_different_kinds"> <div class="vector-toc-text"> <span class="vector-toc-numb">3.2</span> <span>Cleanrooms of different kinds</span> </div> </a> <ul id="toc-Cleanrooms_of_different_kinds-sublist" class="vector-toc-list"> </ul> </li> </ul> </li> <li id="toc-Operating_procedure" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Operating_procedure"> <div class="vector-toc-text"> <span class="vector-toc-numb">4</span> <span>Operating procedure</span> </div> </a> <button aria-controls="toc-Operating_procedure-sublist" class="cdx-button cdx-button--weight-quiet cdx-button--icon-only vector-toc-toggle"> <span class="vector-icon mw-ui-icon-wikimedia-expand"></span> <span>Toggle Operating procedure subsection</span> </button> <ul id="toc-Operating_procedure-sublist" class="vector-toc-list"> <li id="toc-Personnel_contamination_of_cleanrooms" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#Personnel_contamination_of_cleanrooms"> <div class="vector-toc-text"> <span class="vector-toc-numb">4.1</span> <span>Personnel contamination of cleanrooms</span> </div> </a> <ul id="toc-Personnel_contamination_of_cleanrooms-sublist" class="vector-toc-list"> </ul> </li> </ul> </li> <li id="toc-Cleanroom_classification_and_standardization" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Cleanroom_classification_and_standardization"> <div class="vector-toc-text"> <span class="vector-toc-numb">5</span> <span>Cleanroom classification and standardization</span> </div> </a> <button aria-controls="toc-Cleanroom_classification_and_standardization-sublist" class="cdx-button cdx-button--weight-quiet cdx-button--icon-only vector-toc-toggle"> <span class="vector-icon mw-ui-icon-wikimedia-expand"></span> <span>Toggle Cleanroom classification and standardization subsection</span> </button> <ul id="toc-Cleanroom_classification_and_standardization-sublist" class="vector-toc-list"> <li id="toc-ISO_14644-1_and_ISO_14698" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#ISO_14644-1_and_ISO_14698"> <div class="vector-toc-text"> <span class="vector-toc-numb">5.1</span> <span>ISO 14644-1 and ISO 14698</span> </div> </a> <ul id="toc-ISO_14644-1_and_ISO_14698-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-US_FED_STD_209E" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#US_FED_STD_209E"> <div class="vector-toc-text"> <span class="vector-toc-numb">5.2</span> <span>US FED STD 209E</span> </div> </a> <ul id="toc-US_FED_STD_209E-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-EU_GMP_classification" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#EU_GMP_classification"> <div class="vector-toc-text"> <span class="vector-toc-numb">5.3</span> <span>EU GMP classification</span> </div> </a> <ul id="toc-EU_GMP_classification-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-BS_5295" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#BS_5295"> <div class="vector-toc-text"> <span class="vector-toc-numb">5.4</span> <span>BS 5295</span> </div> </a> <ul id="toc-BS_5295-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-USP_&lt;800&gt;_standards" class="vector-toc-list-item vector-toc-level-2"> <a class="vector-toc-link" href="#USP_&lt;800&gt;_standards"> <div class="vector-toc-text"> <span class="vector-toc-numb">5.5</span> <span>USP &lt;800> standards</span> </div> </a> <ul id="toc-USP_&lt;800&gt;_standards-sublist" class="vector-toc-list"> </ul> </li> </ul> </li> <li id="toc-Ramifications_and_further_applications" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#Ramifications_and_further_applications"> <div class="vector-toc-text"> <span class="vector-toc-numb">6</span> <span>Ramifications and further applications</span> </div> </a> <ul id="toc-Ramifications_and_further_applications-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-See_also" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#See_also"> <div class="vector-toc-text"> <span class="vector-toc-numb">7</span> <span>See also</span> </div> </a> <ul id="toc-See_also-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-References" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#References"> <div class="vector-toc-text"> <span class="vector-toc-numb">8</span> <span>References</span> </div> </a> <ul id="toc-References-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-External_links" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#External_links"> <div class="vector-toc-text"> <span class="vector-toc-numb">9</span> <span>External links</span> </div> </a> <ul id="toc-External_links-sublist" class="vector-toc-list"> </ul> </li> </ul> </div> </div> </nav> </div> </div> <div class="mw-content-container"> <main id="content" class="mw-body"> <header class="mw-body-header vector-page-titlebar"> <nav aria-label="Contents" class="vector-toc-landmark"> <div id="vector-page-titlebar-toc" class="vector-dropdown vector-page-titlebar-toc vector-button-flush-left" > <input type="checkbox" id="vector-page-titlebar-toc-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-page-titlebar-toc" class="vector-dropdown-checkbox " aria-label="Toggle the table of contents" > <label id="vector-page-titlebar-toc-label" for="vector-page-titlebar-toc-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--icon-only " aria-hidden="true" ><span class="vector-icon mw-ui-icon-listBullet mw-ui-icon-wikimedia-listBullet"></span> <span class="vector-dropdown-label-text">Toggle the table of contents</span> </label> <div class="vector-dropdown-content"> <div id="vector-page-titlebar-toc-unpinned-container" class="vector-unpinned-container"> </div> </div> </div> </nav> <h1 id="firstHeading" class="firstHeading mw-first-heading"><span class="mw-page-title-main">Cleanroom</span></h1> <div id="p-lang-btn" class="vector-dropdown mw-portlet mw-portlet-lang" > <input type="checkbox" id="p-lang-btn-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-p-lang-btn" class="vector-dropdown-checkbox mw-interlanguage-selector" aria-label="Go to an article in another language. Available in 28 languages" > <label id="p-lang-btn-label" for="p-lang-btn-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet cdx-button--action-progressive mw-portlet-lang-heading-28" aria-hidden="true" ><span class="vector-icon mw-ui-icon-language-progressive mw-ui-icon-wikimedia-language-progressive"></span> <span class="vector-dropdown-label-text">28 languages</span> </label> <div class="vector-dropdown-content"> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li class="interlanguage-link interwiki-ar mw-list-item"><a href="https://ar.wikipedia.org/wiki/%D8%BA%D8%B1%D9%81%D8%A9_%D9%86%D8%B8%D9%8A%D9%81%D8%A9" title="غرفة نظيفة – Arabic" lang="ar" hreflang="ar" data-title="غرفة نظيفة" data-language-autonym="العربية" data-language-local-name="Arabic" class="interlanguage-link-target"><span>العربية</span></a></li><li class="interlanguage-link interwiki-bn mw-list-item"><a href="https://bn.wikipedia.org/wiki/%E0%A6%A8%E0%A6%BF%E0%A6%B0%E0%A7%8D%E0%A6%AE%E0%A6%B2_%E0%A6%95%E0%A6%95%E0%A7%8D%E0%A6%B7" title="নির্মল কক্ষ – Bangla" lang="bn" hreflang="bn" data-title="নির্মল কক্ষ" data-language-autonym="বাংলা" data-language-local-name="Bangla" class="interlanguage-link-target"><span>বাংলা</span></a></li><li class="interlanguage-link interwiki-bg mw-list-item"><a href="https://bg.wikipedia.org/wiki/%D0%A7%D0%B8%D1%81%D1%82%D0%B0_%D1%81%D1%82%D0%B0%D1%8F" title="Чиста стая – Bulgarian" lang="bg" hreflang="bg" data-title="Чиста стая" data-language-autonym="Български" data-language-local-name="Bulgarian" class="interlanguage-link-target"><span>Български</span></a></li><li class="interlanguage-link interwiki-ca mw-list-item"><a href="https://ca.wikipedia.org/wiki/Sala_blanca" title="Sala blanca – Catalan" lang="ca" hreflang="ca" data-title="Sala blanca" data-language-autonym="Català" data-language-local-name="Catalan" class="interlanguage-link-target"><span>Català</span></a></li><li class="interlanguage-link interwiki-de mw-list-item"><a href="https://de.wikipedia.org/wiki/Reinraum" title="Reinraum – German" lang="de" hreflang="de" data-title="Reinraum" data-language-autonym="Deutsch" data-language-local-name="German" class="interlanguage-link-target"><span>Deutsch</span></a></li><li class="interlanguage-link interwiki-et mw-list-item"><a href="https://et.wikipedia.org/wiki/Puhasruum" title="Puhasruum – Estonian" lang="et" hreflang="et" data-title="Puhasruum" data-language-autonym="Eesti" data-language-local-name="Estonian" class="interlanguage-link-target"><span>Eesti</span></a></li><li class="interlanguage-link interwiki-es mw-list-item"><a href="https://es.wikipedia.org/wiki/Sala_blanca" title="Sala blanca – Spanish" lang="es" hreflang="es" data-title="Sala blanca" data-language-autonym="Español" data-language-local-name="Spanish" class="interlanguage-link-target"><span>Español</span></a></li><li class="interlanguage-link interwiki-eo mw-list-item"><a href="https://eo.wikipedia.org/wiki/Pur%C4%89ambro" title="Purĉambro – Esperanto" lang="eo" hreflang="eo" data-title="Purĉambro" data-language-autonym="Esperanto" data-language-local-name="Esperanto" class="interlanguage-link-target"><span>Esperanto</span></a></li><li class="interlanguage-link interwiki-fa mw-list-item"><a href="https://fa.wikipedia.org/wiki/%D8%A7%D8%AA%D8%A7%D9%82_%D8%AA%D9%85%DB%8C%D8%B2" title="اتاق تمیز – Persian" lang="fa" hreflang="fa" data-title="اتاق تمیز" data-language-autonym="فارسی" data-language-local-name="Persian" class="interlanguage-link-target"><span>فارسی</span></a></li><li class="interlanguage-link interwiki-fr mw-list-item"><a href="https://fr.wikipedia.org/wiki/Salle_blanche" title="Salle blanche – French" lang="fr" hreflang="fr" data-title="Salle blanche" data-language-autonym="Français" data-language-local-name="French" class="interlanguage-link-target"><span>Français</span></a></li><li class="interlanguage-link interwiki-ko mw-list-item"><a href="https://ko.wikipedia.org/wiki/%EC%B2%AD%EC%A0%95%EC%8B%A4" title="청정실 – Korean" lang="ko" hreflang="ko" data-title="청정실" data-language-autonym="한국어" data-language-local-name="Korean" class="interlanguage-link-target"><span>한국어</span></a></li><li class="interlanguage-link interwiki-id mw-list-item"><a href="https://id.wikipedia.org/wiki/Kamar_bersih" title="Kamar bersih – Indonesian" lang="id" hreflang="id" data-title="Kamar bersih" data-language-autonym="Bahasa Indonesia" data-language-local-name="Indonesian" class="interlanguage-link-target"><span>Bahasa Indonesia</span></a></li><li class="interlanguage-link interwiki-it mw-list-item"><a href="https://it.wikipedia.org/wiki/Camera_bianca" title="Camera bianca – Italian" lang="it" hreflang="it" data-title="Camera bianca" data-language-autonym="Italiano" data-language-local-name="Italian" class="interlanguage-link-target"><span>Italiano</span></a></li><li class="interlanguage-link interwiki-he mw-list-item"><a href="https://he.wikipedia.org/wiki/%D7%97%D7%93%D7%A8_%D7%A0%D7%A7%D7%99" title="חדר נקי – Hebrew" lang="he" hreflang="he" data-title="חדר נקי" data-language-autonym="עברית" data-language-local-name="Hebrew" class="interlanguage-link-target"><span>עברית</span></a></li><li class="interlanguage-link interwiki-lv mw-list-item"><a href="https://lv.wikipedia.org/wiki/T%C4%ABr%C4%81_telpa" title="Tīrā telpa – Latvian" lang="lv" hreflang="lv" data-title="Tīrā telpa" data-language-autonym="Latviešu" data-language-local-name="Latvian" class="interlanguage-link-target"><span>Latviešu</span></a></li><li class="interlanguage-link interwiki-hu mw-list-item"><a href="https://hu.wikipedia.org/wiki/Tisztat%C3%A9r" title="Tisztatér – Hungarian" lang="hu" hreflang="hu" data-title="Tisztatér" data-language-autonym="Magyar" data-language-local-name="Hungarian" class="interlanguage-link-target"><span>Magyar</span></a></li><li class="interlanguage-link interwiki-nl mw-list-item"><a href="https://nl.wikipedia.org/wiki/Cleanroom" title="Cleanroom – Dutch" lang="nl" hreflang="nl" data-title="Cleanroom" data-language-autonym="Nederlands" data-language-local-name="Dutch" class="interlanguage-link-target"><span>Nederlands</span></a></li><li class="interlanguage-link interwiki-ja mw-list-item"><a href="https://ja.wikipedia.org/wiki/%E3%82%AF%E3%83%AA%E3%83%BC%E3%83%B3%E3%83%AB%E3%83%BC%E3%83%A0" title="クリーンルーム – Japanese" lang="ja" hreflang="ja" data-title="クリーンルーム" data-language-autonym="日本語" data-language-local-name="Japanese" class="interlanguage-link-target"><span>日本語</span></a></li><li class="interlanguage-link interwiki-pl mw-list-item"><a href="https://pl.wikipedia.org/wiki/Clean_room" title="Clean room – Polish" lang="pl" hreflang="pl" data-title="Clean room" data-language-autonym="Polski" data-language-local-name="Polish" class="interlanguage-link-target"><span>Polski</span></a></li><li class="interlanguage-link interwiki-pt mw-list-item"><a href="https://pt.wikipedia.org/wiki/Sala_limpa" title="Sala limpa – Portuguese" lang="pt" hreflang="pt" data-title="Sala limpa" data-language-autonym="Português" data-language-local-name="Portuguese" class="interlanguage-link-target"><span>Português</span></a></li><li class="interlanguage-link interwiki-ru mw-list-item"><a href="https://ru.wikipedia.org/wiki/%D0%A7%D0%B8%D1%81%D1%82%D0%BE%D0%B5_%D0%BF%D0%BE%D0%BC%D0%B5%D1%89%D0%B5%D0%BD%D0%B8%D0%B5" title="Чистое помещение – Russian" lang="ru" hreflang="ru" data-title="Чистое помещение" data-language-autonym="Русский" data-language-local-name="Russian" class="interlanguage-link-target"><span>Русский</span></a></li><li class="interlanguage-link interwiki-sr mw-list-item"><a href="https://sr.wikipedia.org/wiki/%D0%A7%D0%B8%D1%81%D1%82%D0%B0_%D1%81%D0%BE%D0%B1%D0%B0" title="Чиста соба – Serbian" lang="sr" hreflang="sr" data-title="Чиста соба" data-language-autonym="Српски / srpski" data-language-local-name="Serbian" class="interlanguage-link-target"><span>Српски / srpski</span></a></li><li class="interlanguage-link interwiki-fi mw-list-item"><a href="https://fi.wikipedia.org/wiki/Puhdastila" title="Puhdastila – Finnish" lang="fi" hreflang="fi" data-title="Puhdastila" data-language-autonym="Suomi" data-language-local-name="Finnish" class="interlanguage-link-target"><span>Suomi</span></a></li><li class="interlanguage-link interwiki-sv mw-list-item"><a href="https://sv.wikipedia.org/wiki/Renrum" title="Renrum – Swedish" lang="sv" hreflang="sv" data-title="Renrum" data-language-autonym="Svenska" data-language-local-name="Swedish" class="interlanguage-link-target"><span>Svenska</span></a></li><li class="interlanguage-link interwiki-ta mw-list-item"><a href="https://ta.wikipedia.org/wiki/%E0%AE%A4%E0%AF%82%E0%AE%AF%E0%AF%8D%E0%AE%AE%E0%AF%88%E0%AE%AF%E0%AE%BE%E0%AE%A9_%E0%AE%85%E0%AE%B1%E0%AF%88" title="தூய்மையான அறை – Tamil" lang="ta" hreflang="ta" data-title="தூய்மையான அறை" data-language-autonym="தமிழ்" data-language-local-name="Tamil" class="interlanguage-link-target"><span>தமிழ்</span></a></li><li class="interlanguage-link interwiki-uk mw-list-item"><a href="https://uk.wikipedia.org/wiki/%D0%A7%D0%B8%D1%81%D1%82%D1%96_%D0%BF%D1%80%D0%B8%D0%BC%D1%96%D1%89%D0%B5%D0%BD%D0%BD%D1%8F" title="Чисті приміщення – Ukrainian" lang="uk" hreflang="uk" data-title="Чисті приміщення" data-language-autonym="Українська" data-language-local-name="Ukrainian" class="interlanguage-link-target"><span>Українська</span></a></li><li class="interlanguage-link interwiki-ur mw-list-item"><a href="https://ur.wikipedia.org/wiki/%D8%B5%D8%A7%D9%81_%DA%A9%D9%85%D8%B1%DB%81" title="صاف کمرہ – Urdu" lang="ur" hreflang="ur" data-title="صاف کمرہ" data-language-autonym="اردو" data-language-local-name="Urdu" class="interlanguage-link-target"><span>اردو</span></a></li><li class="interlanguage-link interwiki-zh mw-list-item"><a href="https://zh.wikipedia.org/wiki/%E5%87%80%E5%AE%A4" title="净室 – Chinese" lang="zh" hreflang="zh" data-title="净室" data-language-autonym="中文" data-language-local-name="Chinese" class="interlanguage-link-target"><span>中文</span></a></li> </ul> <div class="after-portlet after-portlet-lang"><span class="wb-langlinks-edit wb-langlinks-link"><a href="https://www.wikidata.org/wiki/Special:EntityPage/Q794827#sitelinks-wikipedia" title="Edit interlanguage links" class="wbc-editpage">Edit links</a></span></div> </div> </div> </div> </header> <div class="vector-page-toolbar"> <div class="vector-page-toolbar-container"> <div id="left-navigation"> <nav aria-label="Namespaces"> <div id="p-associated-pages" class="vector-menu vector-menu-tabs mw-portlet mw-portlet-associated-pages" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-nstab-main" class="selected vector-tab-noicon mw-list-item"><a href="/wiki/Cleanroom" title="View the content page [c]" accesskey="c"><span>Article</span></a></li><li id="ca-talk" class="vector-tab-noicon mw-list-item"><a href="/wiki/Talk:Cleanroom" rel="discussion" title="Discuss improvements to the content page [t]" accesskey="t"><span>Talk</span></a></li> </ul> </div> </div> <div id="vector-variants-dropdown" class="vector-dropdown emptyPortlet" > <input type="checkbox" id="vector-variants-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-variants-dropdown" class="vector-dropdown-checkbox " aria-label="Change language variant" > <label id="vector-variants-dropdown-label" for="vector-variants-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet" aria-hidden="true" ><span class="vector-dropdown-label-text">English</span> </label> <div class="vector-dropdown-content"> <div id="p-variants" class="vector-menu mw-portlet mw-portlet-variants emptyPortlet" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> </ul> </div> </div> </div> </div> </nav> </div> <div id="right-navigation" class="vector-collapsible"> <nav aria-label="Views"> <div id="p-views" class="vector-menu vector-menu-tabs mw-portlet mw-portlet-views" > <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-view" class="selected vector-tab-noicon mw-list-item"><a href="/wiki/Cleanroom"><span>Read</span></a></li><li id="ca-edit" class="vector-tab-noicon mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;action=edit" title="Edit this page [e]" accesskey="e"><span>Edit</span></a></li><li id="ca-history" class="vector-tab-noicon mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;action=history" title="Past revisions of this page [h]" accesskey="h"><span>View history</span></a></li> </ul> </div> </div> </nav> <nav class="vector-page-tools-landmark" aria-label="Page tools"> <div id="vector-page-tools-dropdown" class="vector-dropdown vector-page-tools-dropdown" > <input type="checkbox" id="vector-page-tools-dropdown-checkbox" role="button" aria-haspopup="true" data-event-name="ui.dropdown-vector-page-tools-dropdown" class="vector-dropdown-checkbox " aria-label="Tools" > <label id="vector-page-tools-dropdown-label" for="vector-page-tools-dropdown-checkbox" class="vector-dropdown-label cdx-button cdx-button--fake-button cdx-button--fake-button--enabled cdx-button--weight-quiet" aria-hidden="true" ><span class="vector-dropdown-label-text">Tools</span> </label> <div class="vector-dropdown-content"> <div id="vector-page-tools-unpinned-container" class="vector-unpinned-container"> <div id="vector-page-tools" class="vector-page-tools vector-pinnable-element"> <div class="vector-pinnable-header vector-page-tools-pinnable-header vector-pinnable-header-unpinned" data-feature-name="page-tools-pinned" data-pinnable-element-id="vector-page-tools" data-pinned-container-id="vector-page-tools-pinned-container" data-unpinned-container-id="vector-page-tools-unpinned-container" > <div class="vector-pinnable-header-label">Tools</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-page-tools.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-page-tools.unpin">hide</button> </div> <div id="p-cactions" class="vector-menu mw-portlet mw-portlet-cactions emptyPortlet vector-has-collapsible-items" title="More options" > <div class="vector-menu-heading"> Actions </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="ca-more-view" class="selected vector-more-collapsible-item mw-list-item"><a href="/wiki/Cleanroom"><span>Read</span></a></li><li id="ca-more-edit" class="vector-more-collapsible-item mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;action=edit" title="Edit this page [e]" accesskey="e"><span>Edit</span></a></li><li id="ca-more-history" class="vector-more-collapsible-item mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;action=history"><span>View history</span></a></li> </ul> </div> </div> <div id="p-tb" class="vector-menu mw-portlet mw-portlet-tb" > <div class="vector-menu-heading"> General </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="t-whatlinkshere" class="mw-list-item"><a href="/wiki/Special:WhatLinksHere/Cleanroom" title="List of all English Wikipedia pages containing links to this page [j]" accesskey="j"><span>What links here</span></a></li><li id="t-recentchangeslinked" class="mw-list-item"><a href="/wiki/Special:RecentChangesLinked/Cleanroom" rel="nofollow" title="Recent changes in pages linked from this page [k]" accesskey="k"><span>Related changes</span></a></li><li id="t-upload" class="mw-list-item"><a href="/wiki/Wikipedia:File_Upload_Wizard" title="Upload files [u]" accesskey="u"><span>Upload file</span></a></li><li id="t-specialpages" class="mw-list-item"><a href="/wiki/Special:SpecialPages" title="A list of all special pages [q]" accesskey="q"><span>Special pages</span></a></li><li id="t-permalink" class="mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;oldid=1250127846" title="Permanent link to this revision of this page"><span>Permanent link</span></a></li><li id="t-info" class="mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;action=info" title="More information about this page"><span>Page information</span></a></li><li id="t-cite" class="mw-list-item"><a href="/w/index.php?title=Special:CiteThisPage&amp;page=Cleanroom&amp;id=1250127846&amp;wpFormIdentifier=titleform" title="Information on how to cite this page"><span>Cite this page</span></a></li><li id="t-urlshortener" class="mw-list-item"><a href="/w/index.php?title=Special:UrlShortener&amp;url=https%3A%2F%2Fen.wikipedia.org%2Fwiki%2FCleanroom"><span>Get shortened URL</span></a></li><li id="t-urlshortener-qrcode" class="mw-list-item"><a href="/w/index.php?title=Special:QrCode&amp;url=https%3A%2F%2Fen.wikipedia.org%2Fwiki%2FCleanroom"><span>Download QR code</span></a></li> </ul> </div> </div> <div id="p-coll-print_export" class="vector-menu mw-portlet mw-portlet-coll-print_export" > <div class="vector-menu-heading"> Print/export </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li id="coll-download-as-rl" class="mw-list-item"><a href="/w/index.php?title=Special:DownloadAsPdf&amp;page=Cleanroom&amp;action=show-download-screen" title="Download this page as a PDF file"><span>Download as PDF</span></a></li><li id="t-print" class="mw-list-item"><a href="/w/index.php?title=Cleanroom&amp;printable=yes" title="Printable version of this page [p]" accesskey="p"><span>Printable version</span></a></li> </ul> </div> </div> <div id="p-wikibase-otherprojects" class="vector-menu mw-portlet mw-portlet-wikibase-otherprojects" > <div class="vector-menu-heading"> In other projects </div> <div class="vector-menu-content"> <ul class="vector-menu-content-list"> <li class="wb-otherproject-link wb-otherproject-commons mw-list-item"><a href="https://commons.wikimedia.org/wiki/Category:Cleanrooms" hreflang="en"><span>Wikimedia Commons</span></a></li><li id="t-wikibase" class="wb-otherproject-link wb-otherproject-wikibase-dataitem mw-list-item"><a href="https://www.wikidata.org/wiki/Special:EntityPage/Q794827" title="Structured data on this page hosted by Wikidata [g]" accesskey="g"><span>Wikidata item</span></a></li> </ul> </div> </div> </div> </div> </div> </div> </nav> </div> </div> </div> <div class="vector-column-end"> <div class="vector-sticky-pinned-container"> <nav class="vector-page-tools-landmark" aria-label="Page tools"> <div id="vector-page-tools-pinned-container" class="vector-pinned-container"> </div> </nav> <nav class="vector-appearance-landmark" aria-label="Appearance"> <div id="vector-appearance-pinned-container" class="vector-pinned-container"> <div id="vector-appearance" class="vector-appearance vector-pinnable-element"> <div class="vector-pinnable-header vector-appearance-pinnable-header vector-pinnable-header-pinned" data-feature-name="appearance-pinned" data-pinnable-element-id="vector-appearance" data-pinned-container-id="vector-appearance-pinned-container" data-unpinned-container-id="vector-appearance-unpinned-container" > <div class="vector-pinnable-header-label">Appearance</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-appearance.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-appearance.unpin">hide</button> </div> </div> </div> </nav> </div> </div> <div id="bodyContent" class="vector-body" aria-labelledby="firstHeading" data-mw-ve-target-container> <div class="vector-body-before-content"> <div class="mw-indicators"> </div> <div id="siteSub" class="noprint">From Wikipedia, the free encyclopedia</div> </div> <div id="contentSub"><div id="mw-content-subtitle"><span class="mw-redirectedfrom">(Redirected from <a href="/w/index.php?title=Clean_room&amp;redirect=no" class="mw-redirect" title="Clean room">Clean room</a>)</span></div></div> <div id="mw-content-text" class="mw-body-content"><div class="mw-content-ltr mw-parser-output" lang="en" dir="ltr"><div class="shortdescription nomobile noexcerpt noprint searchaux" style="display:none">Dust-free room for research or production</div> <style data-mw-deduplicate="TemplateStyles:r1236090951">.mw-parser-output .hatnote{font-style:italic}.mw-parser-output div.hatnote{padding-left:1.6em;margin-bottom:0.5em}.mw-parser-output .hatnote i{font-style:normal}.mw-parser-output .hatnote+link+.hatnote{margin-top:-0.5em}@media print{body.ns-0 .mw-parser-output .hatnote{display:none!important}}</style><div role="note" class="hatnote navigation-not-searchable">This article is about the manufacturing or research environment. For the method used to avoid copyright infringement, see <a href="/wiki/Clean_room_design" class="mw-redirect" title="Clean room design">Clean room design</a>. For the software project methodology, see <a href="/wiki/Cleanroom_software_engineering" title="Cleanroom software engineering">Cleanroom software engineering</a>. For the TV episode, see <a href="/wiki/The_Clean_Room" title="The Clean Room">The Clean Room</a>.</div> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:Clean_room.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/220px-Clean_room.jpg" decoding="async" width="220" height="171" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/330px-Clean_room.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/5/50/Clean_room.jpg/440px-Clean_room.jpg 2x" data-file-width="2247" data-file-height="1742" /></a><figcaption>Cleanroom used for the production of microsystems. The <a href="/wiki/Yellow" title="Yellow">yellow</a> (red-green) lighting is necessary for <a href="/wiki/Photolithography" title="Photolithography">photolithography</a>, to prevent unwanted exposure of <a href="/wiki/Photoresist" title="Photoresist">photoresist</a> to light of shorter wavelengths.</figcaption></figure> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:Cleanroom_outside.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/c/c5/Cleanroom_outside.jpg/220px-Cleanroom_outside.jpg" decoding="async" width="220" height="165" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/c/c5/Cleanroom_outside.jpg/330px-Cleanroom_outside.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/c/c5/Cleanroom_outside.jpg/440px-Cleanroom_outside.jpg 2x" data-file-width="2048" data-file-height="1536" /></a><figcaption>Cleanroom from outside</figcaption></figure> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:Cleanroom_entrance.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/c/c3/Cleanroom_entrance.jpg/220px-Cleanroom_entrance.jpg" decoding="async" width="220" height="268" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/c/c3/Cleanroom_entrance.jpg/330px-Cleanroom_entrance.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/c/c3/Cleanroom_entrance.jpg/440px-Cleanroom_entrance.jpg 2x" data-file-width="1536" data-file-height="1870" /></a><figcaption>Entrance to a cleanroom with no air shower</figcaption></figure> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:Cleanroom1.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/1/16/Cleanroom1.jpg/220px-Cleanroom1.jpg" decoding="async" width="220" height="132" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/1/16/Cleanroom1.jpg/330px-Cleanroom1.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/1/16/Cleanroom1.jpg/440px-Cleanroom1.jpg 2x" data-file-width="945" data-file-height="566" /></a><figcaption>Cleanroom for <a href="/wiki/Microelectronics" title="Microelectronics">microelectronics</a> manufacturing with <a href="/wiki/Fan_filter_unit" title="Fan filter unit">fan filter units</a> installed in the ceiling grid</figcaption></figure> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:Cleanroom-Cabin.JPG" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/2/25/Cleanroom-Cabin.JPG/220px-Cleanroom-Cabin.JPG" decoding="async" width="220" height="190" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/2/25/Cleanroom-Cabin.JPG/330px-Cleanroom-Cabin.JPG 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/2/25/Cleanroom-Cabin.JPG/440px-Cleanroom-Cabin.JPG 2x" data-file-width="1220" data-file-height="1056" /></a><figcaption>Cleanroom cabin for precision measuring tools</figcaption></figure> <figure class="mw-default-size" typeof="mw:File/Thumb"><a href="/wiki/File:Cleanroom_Garment2.JPG" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/b/b6/Cleanroom_Garment2.JPG/220px-Cleanroom_Garment2.JPG" decoding="async" width="220" height="250" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/b/b6/Cleanroom_Garment2.JPG/330px-Cleanroom_Garment2.JPG 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/b/b6/Cleanroom_Garment2.JPG/440px-Cleanroom_Garment2.JPG 2x" data-file-width="2709" data-file-height="3074" /></a><figcaption>Typical cleanroom head garment</figcaption></figure> <p>A <b>cleanroom</b> or <b>clean room</b> is an engineered space that maintains a very low concentration of airborne <a href="/wiki/Particulates" title="Particulates">particulates</a>. It is well isolated, well controlled from <a href="/wiki/Contamination" title="Contamination">contamination</a>, and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as <a href="/wiki/Semiconductor" title="Semiconductor">semiconductor</a> manufacturing. A cleanroom is designed to keep everything from dust to airborne organisms or vaporised particles away from it, and so from whatever material is being handled inside it. </p><p>A cleanroom can also prevent the escape of materials. This is often the primary aim in hazardous <a href="/wiki/Biological_engineering" title="Biological engineering">biology</a>, <a href="/wiki/Nuclear_engineering" title="Nuclear engineering">nuclear work</a>, <a href="/wiki/Pharmaceutical_industry" title="Pharmaceutical industry">pharmaceutics</a> and <a href="/wiki/Virology" title="Virology">virology</a>. </p><p>Cleanrooms typically come with a cleanliness level quantified by the number of particles per cubic meter at a predetermined molecule measure. The ambient outdoor air in a typical urban area contains 35,000,000 particles for each cubic meter in the size range 0.5 μm and bigger, equivalent to an ISO 9 certified cleanroom. By comparison, an <a href="/wiki/ISO_14644" title="ISO 14644">ISO 14644</a>-1 level 1 certified cleanroom permits no particles in that size range, and just 12 particles for each cubic meter of 0.3 μm and smaller. Semiconductor facilities often get by with level 7 or 5, while level 1 facilities are exceedingly rare. </p> <meta property="mw:PageProp/toc" /> <div class="mw-heading mw-heading2"><h2 id="History">History</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=1" title="Edit section: History"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The modern cleanroom was invented by American <a href="/wiki/Physicist" title="Physicist">physicist</a> <a href="/wiki/Willis_Whitfield" title="Willis Whitfield">Willis Whitfield</a>.<sup id="cite_ref-nkwes_1-0" class="reference"><a href="#cite_note-nkwes-1"><span class="cite-bracket">&#91;</span>1<span class="cite-bracket">&#93;</span></a></sup> As an employee of the <a href="/wiki/Sandia_National_Laboratories" title="Sandia National Laboratories">Sandia National Laboratories</a>, Whitfield created the initial plans for the cleanroom in 1960.<sup id="cite_ref-nkwes_1-1" class="reference"><a href="#cite_note-nkwes-1"><span class="cite-bracket">&#91;</span>1<span class="cite-bracket">&#93;</span></a></sup> Prior to Whitfield's invention, earlier cleanrooms often had problems with particles and unpredictable <a href="/wiki/Airflow" title="Airflow">airflows</a>. Whitfield designed his cleanroom with a constant, highly filtered airflow to flush out impurities.<sup id="cite_ref-nkwes_1-2" class="reference"><a href="#cite_note-nkwes-1"><span class="cite-bracket">&#91;</span>1<span class="cite-bracket">&#93;</span></a></sup> Within a few years of its invention in the 1960s, Whitfield's modern cleanroom had generated more than US$50 billion in sales worldwide (approximately $483 billion today).<sup id="cite_ref-kwes_2-0" class="reference"><a href="#cite_note-kwes-2"><span class="cite-bracket">&#91;</span>2<span class="cite-bracket">&#93;</span></a></sup><sup id="cite_ref-3" class="reference"><a href="#cite_note-3"><span class="cite-bracket">&#91;</span>3<span class="cite-bracket">&#93;</span></a></sup> </p><p>By mid-1963, more than 200 U.S. industrial plants had such specially constructed facilities—then using the terminology “White Rooms,” “Clean Rooms,” or “Dust-Free Rooms”—including the Radio Corporation of America, McDonnell Aircraft, Hughes Aircraft, Sperry Rand, Sylvania Electric, Western Electric, Boeing, and North American Aviation.<sup id="cite_ref-4" class="reference"><a href="#cite_note-4"><span class="cite-bracket">&#91;</span>4<span class="cite-bracket">&#93;</span></a></sup> RCA began such a conversion of part of its Cambridge, Ohio facilities in February 1961. Totalling 70,000 square feet, it was used to prepare control equipment for the Minuteman ICBM missiles.<sup id="cite_ref-5" class="reference"><a href="#cite_note-5"><span class="cite-bracket">&#91;</span>5<span class="cite-bracket">&#93;</span></a></sup> </p><p>The majority of the integrated circuit manufacturing facilities in <a href="/wiki/Silicon_Valley" title="Silicon Valley">Silicon Valley</a> were made by three companies: MicroAire, PureAire, and Key Plastics. These competitors made laminar flow units, glove boxes, cleanrooms and <a href="/wiki/Air_shower_(room)" title="Air shower (room)">air showers</a>, along with the chemical tanks and benches used in the "wet process" building of integrated circuits. These three companies were the pioneers of the use of <a href="/wiki/Polytetrafluoroethylene" title="Polytetrafluoroethylene">Teflon</a> for airguns, chemical pumps, scrubbers, water guns, and other devices needed for the <a href="/wiki/Semiconductor_device_fabrication" title="Semiconductor device fabrication">production of integrated circuits</a>. William (Bill) C. McElroy Jr. worked as an engineering manager, drafting room supervisor, QA/QC, and designer for all three companies, and his designs added 45 original patents to the technology of the time. McElroy also wrote a four-page article for MicroContamination Journal, wet processing training manuals, and equipment manuals for wet processing and cleanrooms.<sup id="cite_ref-6" class="reference"><a href="#cite_note-6"><span class="cite-bracket">&#91;</span>6<span class="cite-bracket">&#93;</span></a></sup><sup class="noprint Inline-Template Template-Fact" style="white-space:nowrap;">&#91;<i><a href="/wiki/Wikipedia:Citation_needed" title="Wikipedia:Citation needed"><span title="This claim needs references to reliable sources. (April 2024)">citation needed</span></a></i>&#93;</sup> </p> <div class="mw-heading mw-heading2"><h2 id="Overview">Overview</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=2" title="Edit section: Overview"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>A cleanroom is a necessity in the manufacturing of <a href="/wiki/Fabrication_(semiconductor)" class="mw-redirect" title="Fabrication (semiconductor)">semiconductors</a> and <a href="/wiki/Rechargeable_battery" title="Rechargeable battery">rechargeable batteries</a>, the <a href="/wiki/Life_sciences" class="mw-redirect" title="Life sciences">life sciences</a>, and any other field that is highly sensitive to environmental contamination. </p><p>Cleanrooms can range from the very small to the very large. On the one hand, a single-user laboratory can be built to cleanroom standards within several square meters, and on the other, entire manufacturing facilities can be contained within a cleanroom with factory floors covering thousands of square meters. Between the large and the small, there are also modular cleanrooms.<sup id="cite_ref-7" class="reference"><a href="#cite_note-7"><span class="cite-bracket">&#91;</span>7<span class="cite-bracket">&#93;</span></a></sup> They have been argued to lower costs of scaling the technology, and to be less susceptible to catastrophic failure. </p><p>With such a wide area of application, not every cleanroom is the same. For example, the rooms utilized in semiconductor manufacturing need not be <a href="/wiki/Sterilization_(microbiology)" title="Sterilization (microbiology)">sterile</a> (i.e., free of uncontrolled microbes),<sup id="cite_ref-8" class="reference"><a href="#cite_note-8"><span class="cite-bracket">&#91;</span>8<span class="cite-bracket">&#93;</span></a></sup> while the ones used in biotechnology usually must be. Vice versa, <a href="/wiki/Operating_room" class="mw-redirect" title="Operating room">operating rooms</a> need not be absolutely pure of nanoscale inorganic salts, such as <a href="/wiki/Rust" title="Rust">rust</a>, while nanotechnology absolutely requires it. What then is common to all cleanrooms is strict control of airborne <a href="/wiki/Particulates" title="Particulates">particulates</a>, possibly with <a href="/w/index.php?title=Secondary_decontamination&amp;action=edit&amp;redlink=1" class="new" title="Secondary decontamination (page does not exist)">secondary decontamination</a> of air, surfaces, workers entering the room, implements, chemicals, and machinery. </p><p>Sometimes particulates exiting the compartment are also of concern, such as in <a href="/wiki/Virology" title="Virology">research</a> into dangerous <a href="/wiki/Virus" title="Virus">viruses</a>, or where <a href="/wiki/Ionizing_radiation" title="Ionizing radiation">radioactive materials</a> are being handled. </p> <div class="mw-heading mw-heading2"><h2 id="Basic_construction">Basic construction</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=3" title="Edit section: Basic construction"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>First, outside air entering a cleanroom is <a href="/wiki/Filter_(air)" class="mw-redirect" title="Filter (air)">filtered</a> and cooled by several outdoor <a href="/wiki/Air_handler" title="Air handler">air handlers</a> using progressively finer filters to exclude dust. </p><p>Within, air is constantly recirculated through fan units containing high-efficiency particulate absorbing filters (<a href="/wiki/HEPA" title="HEPA">HEPA</a>), and/or ultra-low particulate air (<a href="/wiki/ULPA" class="mw-redirect" title="ULPA">ULPA</a>) filters to remove internally generated contaminants. Special lighting fixtures, walls, equipment and other materials are used to minimize the generation of airborne particles. Plastic sheets can be used to restrict air turbulence if the cleanroom design is of the laminar airflow type.<sup id="cite_ref-9" class="reference"><a href="#cite_note-9"><span class="cite-bracket">&#91;</span>9<span class="cite-bracket">&#93;</span></a></sup><sup id="cite_ref-10" class="reference"><a href="#cite_note-10"><span class="cite-bracket">&#91;</span>10<span class="cite-bracket">&#93;</span></a></sup><sup id="cite_ref-11" class="reference"><a href="#cite_note-11"><span class="cite-bracket">&#91;</span>11<span class="cite-bracket">&#93;</span></a></sup> </p><p>Air temperature and <a href="/wiki/Humidity" title="Humidity">humidity</a> levels inside a cleanroom are tightly controlled, because they affect the efficiency and means of air filtration. If a particular room requires low enough humidity to make <a href="/wiki/Static_electricity" title="Static electricity">static electricity</a> a concern, it too will be controlled by, e.g., introducing controlled amounts of charged ions into the air using a <a href="/wiki/Corona_discharge" title="Corona discharge">corona discharge</a>. Static discharge is of particular concern in the electronics industry, where it can instantly destroy components and circuitry. </p><p>Equipment inside any cleanroom is designed to generate minimal air contamination. The selection of material for the construction of a cleanroom should not generate any particulates; hence, <a href="/w/index.php?title=Monolithic_epoxy&amp;action=edit&amp;redlink=1" class="new" title="Monolithic epoxy (page does not exist)">monolithic epoxy</a> or <a href="/wiki/Polyurethane" title="Polyurethane">polyurethane</a> floor coating is preferred. Buffed stainless steel or <a href="/w/index.php?title=Powder-coated_mild_steel_sandwich_partition_panels&amp;action=edit&amp;redlink=1" class="new" title="Powder-coated mild steel sandwich partition panels (page does not exist)">powder-coated mild steel sandwich partition panels</a> and ceiling panel are used instead of iron alloys prone to rusting and then <a href="/w/index.php?title=Flaking&amp;action=edit&amp;redlink=1" class="new" title="Flaking (page does not exist)">flaking</a>. Corners like the wall to wall, wall to floor, wall to ceiling are avoided by providing <a href="/w/index.php?title=Coved_surface&amp;action=edit&amp;redlink=1" class="new" title="Coved surface (page does not exist)">coved surface</a>, and all joints need to be sealed with <a href="/w/index.php?title=Epoxy_sealant&amp;action=edit&amp;redlink=1" class="new" title="Epoxy sealant (page does not exist)">epoxy sealant</a> to avoid any deposition or generation of particles at the joints, by vibration and <a href="/wiki/Friction" title="Friction">friction</a>. Many cleanrooms have a "tunnel" design in which there are spaces called "service chases" that serve as air plenums carrying the air from the bottom of the room to the top so that it can be recirculated and filtered at the top of the cleanroom.<sup id="cite_ref-12" class="reference"><a href="#cite_note-12"><span class="cite-bracket">&#91;</span>12<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="Airflow_principles">Airflow principles</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=4" title="Edit section: Airflow principles"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1237032888/mw-parser-output/.tmulti">.mw-parser-output .tmulti .multiimageinner{display:flex;flex-direction:column}.mw-parser-output .tmulti .trow{display:flex;flex-direction:row;clear:left;flex-wrap:wrap;width:100%;box-sizing:border-box}.mw-parser-output .tmulti .tsingle{margin:1px;float:left}.mw-parser-output .tmulti .theader{clear:both;font-weight:bold;text-align:center;align-self:center;background-color:transparent;width:100%}.mw-parser-output .tmulti .thumbcaption{background-color:transparent}.mw-parser-output .tmulti .text-align-left{text-align:left}.mw-parser-output .tmulti .text-align-right{text-align:right}.mw-parser-output .tmulti .text-align-center{text-align:center}@media all and (max-width:720px){.mw-parser-output .tmulti .thumbinner{width:100%!important;box-sizing:border-box;max-width:none!important;align-items:center}.mw-parser-output .tmulti .trow{justify-content:center}.mw-parser-output .tmulti .tsingle{float:none!important;max-width:100%!important;box-sizing:border-box;text-align:center}.mw-parser-output .tmulti .tsingle .thumbcaption{text-align:left}.mw-parser-output .tmulti .trow>.thumbcaption{text-align:center}}@media screen{html.skin-theme-clientpref-night .mw-parser-output .tmulti .multiimageinner img{background-color:white}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .tmulti .multiimageinner img{background-color:white}}</style><div class="thumb tmulti tnone center"><div class="thumbinner multiimageinner" style="width:408px;max-width:408px"><div class="trow"><div class="tsingle" style="width:202px;max-width:202px"><div class="thumbimage"><span typeof="mw:File"><a href="/wiki/File:Turbulenter_Reinraum.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/a/a6/Turbulenter_Reinraum.png/200px-Turbulenter_Reinraum.png" decoding="async" width="200" height="214" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/a/a6/Turbulenter_Reinraum.png/300px-Turbulenter_Reinraum.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/a/a6/Turbulenter_Reinraum.png/400px-Turbulenter_Reinraum.png 2x" data-file-width="487" data-file-height="520" /></a></span></div><div class="thumbcaption">Airflow pattern for "Turbulent Cleanroom"</div></div><div class="tsingle" style="width:202px;max-width:202px"><div class="thumbimage"><span typeof="mw:File"><a href="/wiki/File:Laminar_Flow_Reinraum.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/b/b2/Laminar_Flow_Reinraum.png/200px-Laminar_Flow_Reinraum.png" decoding="async" width="200" height="213" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/b/b2/Laminar_Flow_Reinraum.png/300px-Laminar_Flow_Reinraum.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/b/b2/Laminar_Flow_Reinraum.png/400px-Laminar_Flow_Reinraum.png 2x" data-file-width="478" data-file-height="510" /></a></span></div><div class="thumbcaption">Airflow pattern for "<a href="/wiki/Laminar_Flow" class="mw-redirect" title="Laminar Flow">Laminar Flow</a> Cleanroom"</div></div></div></div></div> <p>Cleanrooms maintain particulate-free air through the use of either <a href="/wiki/HEPA" title="HEPA">HEPA</a> or <a href="/wiki/ULPA" class="mw-redirect" title="ULPA">ULPA</a> filters employing laminar or turbulent airflow principles. Laminar, or unidirectional, airflow systems direct filtered air downward or in horizontal direction in a constant stream towards filters located on walls near the cleanroom floor or through raised perforated floor panels to be recirculated. Laminar airflow systems are typically employed across 80% of a cleanroom ceiling to maintain constant air processing. Stainless steel or other <a href="/w/index.php?title=Non_shedding_materials&amp;action=edit&amp;redlink=1" class="new" title="Non shedding materials (page does not exist)">non shedding materials</a> are used to construct laminar airflow filters and hoods to prevent excess particles entering the air. Turbulent, or non-unidirectional, airflow uses both laminar airflow hoods and nonspecific velocity filters to keep air in a cleanroom in constant motion, although not all in the same direction. The rough air seeks to trap particles that may be in the air and drive them towards the floor, where they enter filters and leave the cleanroom environment. US FDA and EU have laid down stringent guidelines and limits to ensure freedom from microbial contamination in pharmaceutical products.<sup id="cite_ref-13" class="reference"><a href="#cite_note-13"><span class="cite-bracket">&#91;</span>13<span class="cite-bracket">&#93;</span></a></sup> <a href="/wiki/Plenum_chamber" title="Plenum chamber">Plenums</a> between <a href="/wiki/Air_handler" title="Air handler">air handlers</a> and <a href="/wiki/Fan_filter_unit" title="Fan filter unit">fan filter units</a>, along with <a href="/wiki/Sticky_mat" title="Sticky mat">sticky mats</a>, may also be used. </p><p>In addition to air filters, cleanrooms can also use <a href="/wiki/Ultraviolet" title="Ultraviolet">ultraviolet light</a> to <a href="/wiki/Disinfect" class="mw-redirect" title="Disinfect">disinfect</a> the air.<sup id="cite_ref-14" class="reference"><a href="#cite_note-14"><span class="cite-bracket">&#91;</span>14<span class="cite-bracket">&#93;</span></a></sup> UV devices can be fitted into ceiling light fixtures and irradiate air, killing potentially <a href="/w/index.php?title=Infectious_particulates&amp;action=edit&amp;redlink=1" class="new" title="Infectious particulates (page does not exist)">infectious particulates</a>, including 99.99 percent of airborne microbial and fungal contaminants.<sup id="cite_ref-15" class="reference"><a href="#cite_note-15"><span class="cite-bracket">&#91;</span>15<span class="cite-bracket">&#93;</span></a></sup> UV light has previously been used to clean surface contaminants in sterile environments such as hospital operating rooms. Their use in other cleanrooms may increase as equipment becomes more affordable. Potential advantages of <a href="/w/index.php?title=UV-based_decontamination&amp;action=edit&amp;redlink=1" class="new" title="UV-based decontamination (page does not exist)">UV-based decontamination</a> includes a reduced reliance on <a href="/w/index.php?title=Chemical_disinfectants&amp;action=edit&amp;redlink=1" class="new" title="Chemical disinfectants (page does not exist)">chemical disinfectants</a> and the extension of HVAC filter life. </p> <div class="mw-heading mw-heading3"><h3 id="Cleanrooms_of_different_kinds">Cleanrooms of different kinds</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=5" title="Edit section: Cleanrooms of different kinds"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Some cleanrooms are kept at a <a href="/wiki/Positive_pressure" title="Positive pressure">positive pressure</a> so if any leaks occur, air leaks out of the chamber instead of unfiltered air coming in. This is most typically the case in semiconductor manufacturing, where even minute amounts of particulates leaking in could contaminate the whole process, while anything leaking out <span class="citation-needed-content" style="padding-left:0.1em; padding-right:0.1em; color:var(--color-subtle, #54595d); border:1px solid var(--border-color-subtle, #c8ccd1);">would not be harmful to the surrounding community</span><sup class="noprint Inline-Template Template-Fact" style="margin-left:0.1em; white-space:nowrap;">&#91;<i><a href="/wiki/Wikipedia:Citation_needed" title="Wikipedia:Citation needed"><span title="This claim needs references to reliable sources. (November 2023)">citation needed</span></a></i>&#93;</sup>. The opposite is done, e.g., in the case of high-level bio-laboratories that handle dangerous bacteria or viruses; those are always held at <a href="/wiki/Negative_room_pressure" title="Negative room pressure">negative pressure</a>, with the exhaust being passed through high-efficiency filters, and further sterilizing procedures. Both are still cleanrooms because the particulate level inside is maintained within very low limits. </p><p>Some cleanroom <a href="/wiki/HVAC" class="mw-redirect" title="HVAC">HVAC</a> systems control the <a href="/wiki/Humidity" title="Humidity">humidity</a> to such low levels that extra equipment like <a href="/wiki/Air_ioniser" title="Air ioniser">air ionizers</a> are required to prevent <a href="/wiki/Electrostatic_discharge" title="Electrostatic discharge">electrostatic discharge</a> problems. This is a particular concern within the semiconductor business, because static discharge can easily damage modern circuit designs. On the other hand, active ions in the air can harm exposed components as well. Because of this, most workers in high electronics and semiconductor facilities have to wear <a href="/w/index.php?title=Conductive_boots&amp;action=edit&amp;redlink=1" class="new" title="Conductive boots (page does not exist)">conductive boots</a> while working. Low-level cleanrooms may only require special shoes, with completely smooth soles that do not track in dust or dirt. However, for safety reasons, shoe soles must not create slipping hazards. Access to a cleanroom is usually restricted to those wearing a <a href="/wiki/Cleanroom_suit" title="Cleanroom suit">cleanroom suit</a>, including the necessary machinery. </p><p>In cleanrooms in which the standards of air contamination are less rigorous, the entrance to the cleanroom may not have an air shower. An <a href="/wiki/Anteroom" class="mw-redirect" title="Anteroom">anteroom</a> (known as a "gray room") is used to put on cleanroom clothing. This practice is common in many nuclear power plants, which operate as low-grade inverse pressure cleanrooms, as a whole. </p><p><b>Recirculating vs. one pass cleanrooms</b> </p><p><a href="/w/index.php?title=Recirculating_cleanroom&amp;action=edit&amp;redlink=1" class="new" title="Recirculating cleanroom (page does not exist)">Recirculating cleanrooms</a> return air to the negative pressure plenum via low wall air returns. The air then is pulled by HEPA fan filter units back into the cleanroom. The air is constantly recirculating and by continuously passing through HEPA filtration removing particles from the air each time. Another advantage of this design is that air conditioning can be incorporated. </p><p><a href="/w/index.php?title=One_pass_cleanroom&amp;action=edit&amp;redlink=1" class="new" title="One pass cleanroom (page does not exist)">One pass cleanrooms</a> draw air from outside and pass it through HEPA fan filter units into the cleanroom. The air then leaves through exhaust grills. The advantage of this approach is the lower cost. The disadvantages are comparatively shorter HEPA fan filter life, worse particle counts than a recirculating cleanroom, and that it cannot accommodate air conditioning. </p> <div class="mw-heading mw-heading2"><h2 id="Operating_procedure">Operating procedure</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=6" title="Edit section: Operating procedure"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>In order to minimize the carrying of particulate by a person moving into the cleanroom, staff enter and leave through <a href="/wiki/Airlock" title="Airlock">airlocks</a> (sometimes including an <a href="/wiki/Air_shower_(room)" title="Air shower (room)">air shower</a> stage) and wear protective clothing such as <a href="/wiki/Hood_(headgear)" title="Hood (headgear)">hoods</a>, face masks, gloves, boots, and <a href="/wiki/Coveralls" class="mw-redirect" title="Coveralls">coveralls</a>. </p><p>Common materials such as <a href="/wiki/Paper" title="Paper">paper</a>, <a href="/wiki/Pencil" title="Pencil">pencils</a>, and <a href="/wiki/Textile" title="Textile">fabrics</a> made from <a href="/wiki/Natural_fibers" class="mw-redirect" title="Natural fibers">natural fibers</a> are often excluded because they shed particulates in use. </p><p>Particle levels are usually tested using a <a href="/wiki/Particle_counter" title="Particle counter">particle counter</a> and microorganisms detected and counted through <span class="clarify-content" style="padding-left:0.1em; padding-right:0.1em; color:var(--color-subtle, #54595d); border:1px solid var(--border-color-subtle, #c8ccd1);">environmental monitoring methods</span><sup class="noprint Inline-Template Template-Clarify" style="margin-left:0.1em; white-space:nowrap;">&#91;<i><a href="/wiki/Wikipedia:Please_clarify" title="Wikipedia:Please clarify"><span title="This passage needs to be better explained. (November 2023)">clarify</span></a></i>&#93;</sup>.<sup id="cite_ref-16" class="reference"><a href="#cite_note-16"><span class="cite-bracket">&#91;</span>16<span class="cite-bracket">&#93;</span></a></sup><sup id="cite_ref-Sandle,_T_392–403_17-0" class="reference"><a href="#cite_note-Sandle,_T_392–403-17"><span class="cite-bracket">&#91;</span>17<span class="cite-bracket">&#93;</span></a></sup> <a href="/wiki/Polymer" title="Polymer">Polymer</a> tools used in cleanrooms must be carefully determined to be <a href="/wiki/Chemical_compatibility" class="mw-redirect" title="Chemical compatibility">chemically compatible</a> with cleanroom processing fluids <sup id="cite_ref-18" class="reference"><a href="#cite_note-18"><span class="cite-bracket">&#91;</span>18<span class="cite-bracket">&#93;</span></a></sup> as well as ensured to generate a low level of particle generation.<sup id="cite_ref-19" class="reference"><a href="#cite_note-19"><span class="cite-bracket">&#91;</span>19<span class="cite-bracket">&#93;</span></a></sup> </p><p>When cleaning, only special <a href="/wiki/Mop" title="Mop">mops</a> and <a href="/wiki/Bucket" title="Bucket">buckets</a> are used. Cleaning chemicals used tend to involve sticky elements to trap dust, and may need a second step with <a href="/w/index.php?title=Light_molecular_weight_solvents&amp;action=edit&amp;redlink=1" class="new" title="Light molecular weight solvents (page does not exist)">light molecular weight solvents</a> to clear. Cleanroom furniture is designed to produce a minimum of particles and is easy to clean. </p><p>A cleanroom is as much a process and a meticulous culture to maintain, as it is a space as such. </p> <div class="mw-heading mw-heading3"><h3 id="Personnel_contamination_of_cleanrooms">Personnel contamination of cleanrooms</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=7" title="Edit section: Personnel contamination of cleanrooms"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <table class="centered"> </table> <p>The greatest threat to cleanroom contamination comes from the users themselves.<sup id="cite_ref-20" class="reference"><a href="#cite_note-20"><span class="cite-bracket">&#91;</span>20<span class="cite-bracket">&#93;</span></a></sup> In the healthcare and pharmaceutical sectors, control of microorganisms is important, especially microorganisms likely to be deposited into the air stream from <a href="/w/index.php?title=Skin_shedding&amp;action=edit&amp;redlink=1" class="new" title="Skin shedding (page does not exist)">skin shedding</a>. Studying cleanroom <a href="/wiki/Microflora" class="mw-redirect" title="Microflora">microflora</a> is of importance for microbiologists and quality control personnel to assess changes in trends. Shifts in the types of microflora may indicate deviations from the "norm" such as <a href="/w/index.php?title=Resistant_strains&amp;action=edit&amp;redlink=1" class="new" title="Resistant strains (page does not exist)">resistant strains</a> or problems with cleaning practices. </p><p>In assessing cleanroom microorganisms, the typical flora are primarily those associated with human skin (<a href="/wiki/Gram-positive_cocci" class="mw-redirect" title="Gram-positive cocci">Gram-positive cocci</a>), although microorganisms from other sources such as the environment (<a href="/wiki/Gram-positive_rods" class="mw-redirect" title="Gram-positive rods">Gram-positive rods</a>) and water (<a href="/w/index.php?title=Gram-negative_rods&amp;action=edit&amp;redlink=1" class="new" title="Gram-negative rods (page does not exist)">Gram-negative rods</a>) are also detected, although in lower number. Common bacterial genera include <i><a href="/wiki/Micrococcus" title="Micrococcus">Micrococcus</a></i>, <i><a href="/wiki/Staphylococcus" title="Staphylococcus">Staphylococcus</a></i>, <i><a href="/wiki/Corynebacterium" title="Corynebacterium">Corynebacterium</a></i>, and <i><a href="/wiki/Bacillus" title="Bacillus">Bacillus</a></i>, and fungal genera include <i><a href="/wiki/Aspergillus" title="Aspergillus">Aspergillus</a></i> and <i><a href="/wiki/Penicillium" title="Penicillium">Penicillium</a></i>.<sup id="cite_ref-Sandle,_T_392–403_17-1" class="reference"><a href="#cite_note-Sandle,_T_392–403-17"><span class="cite-bracket">&#91;</span>17<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Cleanroom_classification_and_standardization">Cleanroom classification and standardization</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=8" title="Edit section: Cleanroom classification and standardization"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <figure typeof="mw:File/Thumb"><a href="/wiki/File:ISS_space_station_modules_in_the_SSPF.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/9/92/ISS_space_station_modules_in_the_SSPF.jpg/300px-ISS_space_station_modules_in_the_SSPF.jpg" decoding="async" width="300" height="200" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/9/92/ISS_space_station_modules_in_the_SSPF.jpg/450px-ISS_space_station_modules_in_the_SSPF.jpg 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/9/92/ISS_space_station_modules_in_the_SSPF.jpg/600px-ISS_space_station_modules_in_the_SSPF.jpg 2x" data-file-width="3000" data-file-height="1995" /></a><figcaption>The cleanroom processing bay of the <a href="/wiki/Kennedy_Space_Center" title="Kennedy Space Center">KSC</a> <a href="/wiki/Space_Station_Processing_Facility" class="mw-redirect" title="Space Station Processing Facility">Space Station Processing Facility</a>. NASA maintains a standard of 100,000 class in the SSPF.<sup id="cite_ref-21" class="reference"><a href="#cite_note-21"><span class="cite-bracket">&#91;</span>21<span class="cite-bracket">&#93;</span></a></sup></figcaption></figure> <p>Cleanrooms are classified according to the number and size of particles permitted per volume of air. Large numbers like "class 100" or "class 1000" refer to <a href="/wiki/FED-STD-209E" title="FED-STD-209E">FED-STD-209E</a>, and denote the number of particles of size 0.5&#160;μm or larger permitted per cubic foot of air. The standard also allows interpolation; for example <a href="/wiki/SNOLAB" title="SNOLAB">SNOLAB</a> is maintained as a class 2000 cleanroom. </p><p>A discrete, light-scattering airborne particle counter is used to determine the concentration of airborne particles, equal to and larger than the specified sizes, at designated sampling locations. </p><p>Small numbers refer to <a href="/wiki/ISO_14644" title="ISO 14644">ISO 14644-1</a> standards, which specify the decimal <a href="/wiki/Logarithm" title="Logarithm">logarithm</a> of the number of particles 0.1&#160;μm or larger permitted per m<sup>3</sup> of air. So, for example, an ISO class 5 cleanroom has at most 10<sup>5</sup> particles/m<sup>3</sup>. </p><p>Both FS 209E and ISO 14644-1 assume log-log relationships between particle size and particle concentration. For that reason, zero particle concentration does not exist. Some classes do not require testing some particle sizes, because the concentration is too low or too high to be practical to test for, but such blanks should not be read as zero. </p><p>Because 1&#160;m<sup>3</sup> is about 35&#160;ft<sup>3</sup>, the two standards are mostly equivalent when measuring 0.5&#160;μm particles, although the testing standards differ. Ordinary room air is around class 1,000,000 or ISO 9.<sup id="cite_ref-22" class="reference"><a href="#cite_note-22"><span class="cite-bracket">&#91;</span>22<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="ISO_14644-1_and_ISO_14698">ISO 14644-1 and ISO 14698</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=9" title="Edit section: ISO 14644-1 and ISO 14698"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p><a href="/wiki/ISO_14644" title="ISO 14644">ISO 14644-1</a> and <a href="/wiki/ISO_14698" title="ISO 14698">ISO 14698</a> are <a href="/wiki/Non-governmental_organization" title="Non-governmental organization">non-governmental</a> standards developed by the <a href="/wiki/International_Organization_for_Standardization" title="International Organization for Standardization">International Organization for Standardization</a> (ISO).<sup id="cite_ref-23" class="reference"><a href="#cite_note-23"><span class="cite-bracket">&#91;</span>23<span class="cite-bracket">&#93;</span></a></sup> The former applies to cleanrooms in general (see table below), the latter to cleanrooms where <a href="/wiki/Contamination" title="Contamination">biocontamination</a> may be an issue. Since the strictest standards have been achieved only for space applications, it is sometimes difficult to know whether they were achieved in vacuum or standard conditions. </p><p><a href="/wiki/ISO_14644" title="ISO 14644">ISO 14644-1</a> defines the maximum concentration of particles per class and per particle size with the following formula<sup id="cite_ref-Whyte2001_24-0" class="reference"><a href="#cite_note-Whyte2001-24"><span class="cite-bracket">&#91;</span>24<span class="cite-bracket">&#93;</span></a></sup> </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle {\text{C}}_{\text{N}}=10^{\text{N}}\left({\frac {0.1}{\text{D}}}\right)^{2.08}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mrow class="MJX-TeXAtom-ORD"> <mtext>C</mtext> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mtext>N</mtext> </mrow> </msub> <mo>=</mo> <msup> <mn>10</mn> <mrow class="MJX-TeXAtom-ORD"> <mtext>N</mtext> </mrow> </msup> <msup> <mrow> <mo>(</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mn>0.1</mn> <mtext>D</mtext> </mfrac> </mrow> <mo>)</mo> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>2.08</mn> </mrow> </msup> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle {\text{C}}_{\text{N}}=10^{\text{N}}\left({\frac {0.1}{\text{D}}}\right)^{2.08}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/86ee70101171b7a24ca1d1db5cc85b85fa105784" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.505ex; width:20.416ex; height:6.509ex;" alt="{\displaystyle {\text{C}}_{\text{N}}=10^{\text{N}}\left({\frac {0.1}{\text{D}}}\right)^{2.08}}"></span> </p><p>Where <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle {\text{C}}_{\text{N}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mrow class="MJX-TeXAtom-ORD"> <mtext>C</mtext> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mtext>N</mtext> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle {\text{C}}_{\text{N}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fa9b80782d230d1870ca8ddcc16ffb29f29a3690" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:3.143ex; height:2.509ex;" alt="{\displaystyle {\text{C}}_{\text{N}}}"></span> is the maximum concentration of particles in a volume of 1m<span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle ^{3}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msup> <mi></mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle ^{3}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/73c05e3410279c99fc3d8b9fcdaa15b71a98772a" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.171ex; width:1.054ex; height:2.509ex;" alt="{\displaystyle ^{3}}"></span> of airborne particles that are equal to, or larger, than the considered particle size which is rounded to the nearest whole number, using no more than three significant figures, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle {\text{N}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mrow class="MJX-TeXAtom-ORD"> <mtext>N</mtext> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle {\text{N}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/ecb64aa46d7a3fd6c0a087e157506d8ec218d202" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.743ex; height:2.176ex;" alt="{\displaystyle {\text{N}}}"></span> is the ISO class number, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle {\text{D}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mrow class="MJX-TeXAtom-ORD"> <mtext>D</mtext> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle {\text{D}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/4aed11739b57eeb07a4dd1a7e1925369dcd9df99" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.776ex; height:2.176ex;" alt="{\displaystyle {\text{D}}}"></span> is the size of the particle in <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \mu }"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>&#x03BC;<!-- μ --></mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \mu }</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/9fd47b2a39f7a7856952afec1f1db72c67af6161" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.838ex; width:1.402ex; height:2.176ex;" alt="{\displaystyle \mu }"></span>m and 0.1 is a constant expressed in <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \mu }"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>&#x03BC;<!-- μ --></mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \mu }</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/9fd47b2a39f7a7856952afec1f1db72c67af6161" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.838ex; width:1.402ex; height:2.176ex;" alt="{\displaystyle \mu }"></span>m. The result for standard particle sizes is expressed in the following table. </p> <table class="wikitable"> <tbody><tr> <th rowspan="2">Class </th> <th colspan="6" align="center">Maximum particles/m<sup>3 a</sup> </th> <th rowspan="2">FED STD 209E equivalent </th></tr> <tr> <th>≥0.1&#160;μm </th> <th>≥0.2&#160;μm </th> <th>≥0.3&#160;μm </th> <th>≥0.5&#160;μm </th> <th>≥1&#160;μm </th> <th>≥5&#160;μm </th></tr> <tr> <th>ISO 1 </th> <td align="right">10<sup>b</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>e</sup> </td> <td> </td></tr> <tr> <th>ISO 2 </th> <td align="right">100 </td> <td align="right">24<sup>b</sup> </td> <td align="right">10<sup>b</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>e</sup> </td> <td> </td></tr> <tr> <th>ISO 3 </th> <td align="right">1,000 </td> <td align="right">237 </td> <td align="right">102 </td> <td align="right">35<sup>b</sup> </td> <td align="right"><sup>d</sup> </td> <td align="right"><sup>e</sup> </td> <td align="center">Class 1 </td></tr> <tr> <th>ISO 4 </th> <td align="right">10,000 </td> <td align="right">2,370 </td> <td align="right">1,020 </td> <td align="right">352 </td> <td align="right">83<sup>b</sup> </td> <td align="right"><sup>e</sup> </td> <td align="center">Class 10 </td></tr> <tr> <th>ISO 5 </th> <td align="right">100,000 </td> <td align="right">23,700 </td> <td align="right">10,200 </td> <td align="right">3,520 </td> <td align="right">832 </td> <td align="right"><sup>d,e,f</sup> </td> <td align="center">Class 100 </td></tr> <tr> <th>ISO 6 </th> <td align="right">1,000,000 </td> <td align="right">237,000 </td> <td align="right">102,000 </td> <td align="right">35,200 </td> <td align="right">8,320 </td> <td align="right">293 </td> <td align="center">Class 1,000 </td></tr> <tr> <th>ISO 7 </th> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right">352,000 </td> <td align="right">83,200 </td> <td align="right">2,930 </td> <td align="center">Class 10,000 </td></tr> <tr> <th>ISO 8 </th> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right">3,520,000 </td> <td align="right">832,000 </td> <td align="right">29,300 </td> <td align="center">Class 100,000 </td></tr> <tr> <th>ISO 9 </th> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right"><sup>c</sup> </td> <td align="right">35,200,000 </td> <td align="right">8,320,000 </td> <td align="right">293,000 </td> <td align="center">Room air </td></tr> <tr> <td colspan="8"><div style="font-size:85%;"><sup>a</sup> All concentrations in the table are cumulative, e.g. for ISO Class 5, the 10 200 particles shown at 0,3 μm include all particles equal to and greater than this size.<br /> <p><sup>b</sup> These concentrations will lead to large air sample volumes for classification. Sequential sampling procedure may be applied; see Annex D.<br /> <sup>c</sup> Concentration limits are not applicable in this region of the table due to very high particle concentration.<br /> <sup>d</sup> Sampling and statistical limitations for particles in low concentrations make classification inappropriate.<br /> <sup>e</sup> Sample collection limitations for both particles in low concentrations and sizes greater than 1 μm make classification at this particle size inappropriate due to potential particle losses in the sampling system.<br /> </p> <sup>f</sup> In order to specify this particle size in association with ISO Class 5, the macroparticle descriptor M may be adapted and used in conjunction with at least one other particle size. (See C.7.)</div> </td></tr></tbody></table> <div class="mw-heading mw-heading3"><h3 id="US_FED_STD_209E">US FED STD 209E</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=10" title="Edit section: US FED STD 209E"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>US <a href="/wiki/FED-STD-209E" title="FED-STD-209E">FED-STD-209E</a> was a <a href="/wiki/United_States" title="United States">United States</a> <a href="/wiki/Federal_government_of_the_United_States" title="Federal government of the United States">federal</a> standard. It was officially cancelled by the <a href="/wiki/General_Services_Administration" title="General Services Administration">General Services Administration</a> on November 29, 2001,<sup id="cite_ref-25" class="reference"><a href="#cite_note-25"><span class="cite-bracket">&#91;</span>25<span class="cite-bracket">&#93;</span></a></sup><sup id="cite_ref-26" class="reference"><a href="#cite_note-26"><span class="cite-bracket">&#91;</span>26<span class="cite-bracket">&#93;</span></a></sup> but is still widely used.<sup id="cite_ref-27" class="reference"><a href="#cite_note-27"><span class="cite-bracket">&#91;</span>27<span class="cite-bracket">&#93;</span></a></sup> </p> <table class="wikitable"> <tbody><tr> <th rowspan="2">Class </th> <th colspan="5" align="center">Maximum particles/ft<sup>3</sup> </th> <th rowspan="2">ISO<br />equivalent </th></tr> <tr> <th>≥0.1&#160;μm </th> <th>≥0.2&#160;μm </th> <th>≥0.3&#160;μm </th> <th>≥0.5&#160;μm </th> <th>≥5&#160;μm </th></tr> <tr> <th>1 </th> <td align="right">35 </td> <td align="right">7.5 </td> <td align="right">3 </td> <td align="right">1 </td> <td align="right">0.007 </td> <td align="center">ISO 3 </td></tr> <tr> <th>10 </th> <td align="right">350 </td> <td align="right">75 </td> <td align="right">30 </td> <td align="right">10 </td> <td align="right">0.07 </td> <td align="center">ISO 4 </td></tr> <tr> <th>100 </th> <td align="right">3,500 </td> <td align="right">750 </td> <td align="right">300 </td> <td align="right">100 </td> <td align="right">0.7 </td> <td align="center">ISO 5 </td></tr> <tr> <th>1,000 </th> <td align="right">35,000 </td> <td align="right">7,500 </td> <td align="right">3000 </td> <td align="right">1,000 </td> <td align="right">7 </td> <td align="center">ISO 6 </td></tr> <tr> <th>10,000 </th> <td align="right">350,000 </td> <td align="right">75,000 </td> <td align="right">30,000 </td> <td align="right">10,000 </td> <td align="right">70 </td> <td align="center">ISO 7 </td></tr> <tr> <th>100,000 </th> <td align="right"><span class="nowrap"><span data-sort-value="7006350000000000000♠"></span>3.5<span style="margin-left:0.25em;margin-right:0.15em;">×</span>10<sup>6</sup></span> </td> <td align="right">750,000 </td> <td align="right">300,000 </td> <td align="right">100,000 </td> <td align="right">830 </td> <td align="center">ISO 8 </td></tr></tbody></table> <p>Current regulating bodies include ISO, USP 800, US FED STD 209E (previous standard, still used). </p> <ul><li>Drug Quality and Security Act (DQSA) created in Nov. 2013 in response to drug compounding deaths and serious adverse events.</li> <li>The Federal Food, Drug, and Cosmetic Act (FD&amp;C Act) created specific guidelines and policies for human compounding. <ul><li>503A addresses compounding by state or federally licensed facility by licensed personnel (pharmacist/ physicians)</li> <li>503B pertaining to outsourcing facilities need direct supervision from a licensed pharmacist and do not need to be a licensed pharmacy. Facility is licensed through the Food and Drug Administration (FDA) <sup id="cite_ref-28" class="reference"><a href="#cite_note-28"><span class="cite-bracket">&#91;</span>28<span class="cite-bracket">&#93;</span></a></sup></li></ul></li></ul> <div class="mw-heading mw-heading3"><h3 id="EU_GMP_classification">EU GMP classification</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=11" title="Edit section: EU GMP classification"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>EU GMP guidelines are more stringent than others, requiring cleanrooms to meet particle counts at operation (during manufacturing process) and at rest (when manufacturing process is not carried out, but room <a href="/wiki/Air_handler" title="Air handler">AHU</a> is on). </p> <table class="wikitable"> <tbody><tr> <th rowspan="3">Class </th> <th colspan="4" align="center">Maximum particles/m<sup>3</sup><sup id="cite_ref-29" class="reference"><a href="#cite_note-29"><span class="cite-bracket">&#91;</span>29<span class="cite-bracket">&#93;</span></a></sup> </th></tr> <tr> <th colspan="2">At Rest </th> <th colspan="2">In Operation </th></tr> <tr> <th>0.5&#160;μm </th> <th>5.0&#160;μm </th> <th>0.5&#160;μm </th> <th>5.0&#160;μm </th></tr> <tr> <th>Grade A </th> <td>3,520 </td> <td>20 </td> <td>3,520 </td> <td>20 </td></tr> <tr> <th>Grade B </th> <td>3,520 </td> <td>29 </td> <td>352,000 </td> <td>2,900 </td></tr> <tr> <th>Grade C </th> <td>352,000 </td> <td>2,900 </td> <td>3,520,000 </td> <td>29,000 </td></tr> <tr> <th>Grade D </th> <td>3,520,000 </td> <td>29,000 </td> <td>Not defined </td> <td>Not defined </td></tr></tbody></table> <div class="mw-heading mw-heading3"><h3 id="BS_5295">BS 5295</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=12" title="Edit section: BS 5295"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>BS 5295 is a <a href="/wiki/British_Standard" class="mw-redirect" title="British Standard">British Standard</a>. </p> <table class="wikitable"> <tbody><tr> <th rowspan="2">Class </th> <th colspan="6" align="center">Maximum particles/m<sup>3</sup> </th></tr> <tr> <th>≥0.5&#160;μm </th> <th>≥1&#160;μm </th> <th>≥5&#160;μm </th> <th>≥10&#160;μm </th> <th>≥25&#160;μm </th></tr> <tr> <th>Class 1 </th> <td align="right">3,000 </td> <td align="right">&#160; </td> <td align="right">0 </td> <td align="right">0 </td> <td align="right">0 </td></tr> <tr> <th>Class 2 </th> <td align="right">300,000 </td> <td align="right">&#160; </td> <td align="right">2,000 </td> <td align="right">30 </td> <td align="right">&#160; </td></tr> <tr> <th>Class 3 </th> <td align="right">&#160; </td> <td align="right">1,000,000 </td> <td align="right">20,000 </td> <td align="right">4,000 </td> <td align="right">300 </td></tr> <tr> <th>Class 4 </th> <td align="right">&#160; </td> <td align="right">&#160; </td> <td align="right">200,000 </td> <td align="right">40,000 </td> <td align="right">4,000 </td></tr> </tbody></table> <p>BS 5295 Class 1 also requires that the greatest particle present in any sample can not exceed 5 μm.<sup id="cite_ref-30" class="reference"><a href="#cite_note-30"><span class="cite-bracket">&#91;</span>30<span class="cite-bracket">&#93;</span></a></sup> BS 5295 has been superseded, withdrawn since the year 2007 and replaced with "BS EN ISO 14644-6:2007".<sup id="cite_ref-31" class="reference"><a href="#cite_note-31"><span class="cite-bracket">&#91;</span>31<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="USP_&lt;800&gt;_standards"><span id="USP_.3C800.3E_standards"></span>USP &lt;800&gt; standards</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=13" title="Edit section: USP &lt;800&gt; standards"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>USP 800 is a United States standard developed by the United States Pharmacopeial Convention (USP) with an effective date of December 1, 2019.<sup id="cite_ref-32" class="reference"><a href="#cite_note-32"><span class="cite-bracket">&#91;</span>32<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Ramifications_and_further_applications">Ramifications and further applications</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=14" title="Edit section: Ramifications and further applications"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>In <a href="/wiki/Hospital" title="Hospital">hospitals</a>, <a href="/wiki/Operating_theater" title="Operating theater">theatres</a> are similar to cleanrooms for surgical patients' operations with <a href="/wiki/Surgical_incision" title="Surgical incision">incisions</a> to prevent any infections for the patient. </p><p>In another case, severely <a href="/wiki/Immunocompromised" class="mw-redirect" title="Immunocompromised">immunocompromised</a> patients sometimes have to be held in prolonged isolation from their surroundings, for fear of infection. At the extreme, this necessitates a cleanroom environment. The same is the case for patients carrying airborne infectious diseases, only they are handled at negative, not positive pressure. </p><p>In <a href="/wiki/Exobiology" class="mw-redirect" title="Exobiology">exobiology</a> when we seek out contact with other planets, there is a biological hazard both ways: we must not contaminate any sample return missions from other stellar bodies with terrestrial microbes, and we must not contaminate possible other ecosystems existing in other planets. Thus, even by international law, any probes we send to <a href="/wiki/Outer_space" title="Outer space">outer space</a> must be sterile, and so to be handled in cleanroom conditions.<sup class="noprint Inline-Template Template-Fact" style="white-space:nowrap;">&#91;<i><a href="/wiki/Wikipedia:Citation_needed" title="Wikipedia:Citation needed"><span title="This claim needs references to reliable sources. (August 2023)">citation needed</span></a></i>&#93;</sup> </p><p>Since larger cleanrooms are very sensitive controlled environments upon which multibillion-dollar industries depend, sometimes they are even fitted with numerous <a href="/wiki/Seismic_base_isolation" title="Seismic base isolation">seismic base isolation</a> systems to prevent costly equipment malfunction.<sup id="cite_ref-33" class="reference"><a href="#cite_note-33"><span class="cite-bracket">&#91;</span>33<span class="cite-bracket">&#93;</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="See_also">See also</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=15" title="Edit section: See also"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1259569809">.mw-parser-output .portalbox{padding:0;margin:0.5em 0;display:table;box-sizing:border-box;max-width:175px;list-style:none}.mw-parser-output .portalborder{border:1px solid var(--border-color-base,#a2a9b1);padding:0.1em;background:var(--background-color-neutral-subtle,#f8f9fa)}.mw-parser-output .portalbox-entry{display:table-row;font-size:85%;line-height:110%;height:1.9em;font-style:italic;font-weight:bold}.mw-parser-output .portalbox-image{display:table-cell;padding:0.2em;vertical-align:middle;text-align:center}.mw-parser-output .portalbox-link{display:table-cell;padding:0.2em 0.2em 0.2em 0.3em;vertical-align:middle}@media(min-width:720px){.mw-parser-output .portalleft{clear:left;float:left;margin:0.5em 1em 0.5em 0}.mw-parser-output .portalright{clear:right;float:right;margin:0.5em 0 0.5em 1em}}</style><ul role="navigation" aria-label="Portals" class="noprint portalbox portalborder portalright"> <li class="portalbox-entry"><span class="portalbox-image"><span class="noviewer" typeof="mw:File"><a href="/wiki/File:Noun-technology.svg" class="mw-file-description"><img alt="icon" src="//upload.wikimedia.org/wikipedia/commons/thumb/a/a9/Noun-technology.svg/29px-Noun-technology.svg.png" decoding="async" width="29" height="28" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/a/a9/Noun-technology.svg/43px-Noun-technology.svg.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/a/a9/Noun-technology.svg/57px-Noun-technology.svg.png 2x" data-file-width="90" data-file-height="88" /></a></span></span><span class="portalbox-link"><a href="/wiki/Portal:Technology" title="Portal:Technology">Technology portal</a></span></li></ul> <ul><li><a href="/wiki/Air_ionizer" class="mw-redirect" title="Air ionizer">Air ionizer</a></li> <li><a href="/wiki/Air_conditioning" title="Air conditioning">Air conditioning</a></li> <li><a href="/wiki/Air_quality_index" title="Air quality index">Air quality index</a></li> <li><a href="/wiki/Contamination_control" title="Contamination control">Contamination control</a></li> <li><a href="/wiki/Data_recovery_lab" class="mw-redirect" title="Data recovery lab">Data recovery lab</a></li> <li><a href="/wiki/Indoor_air_quality" title="Indoor air quality">Indoor air quality</a></li> <li><a href="/wiki/Microfiltration" title="Microfiltration">Microfiltration</a></li> <li><a href="/wiki/Pressure_room_(disambiguation)" class="mw-redirect mw-disambig" title="Pressure room (disambiguation)">Pressure room (disambiguation)</a></li> <li><a href="/wiki/Particle_counter" title="Particle counter">Particle counter</a></li> <li><a href="/wiki/Pneumatic_filter" title="Pneumatic filter">Pneumatic filter</a></li> <li><a href="/wiki/Secure_environment" title="Secure environment">Secure environment</a></li> <li><a href="/wiki/Semiconductor_device_fabrication" title="Semiconductor device fabrication">Semiconductor device fabrication</a></li></ul> <div class="mw-heading mw-heading2"><h2 id="References">References</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=16" title="Edit section: References"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1239543626">.mw-parser-output .reflist{margin-bottom:0.5em;list-style-type:decimal}@media screen{.mw-parser-output .reflist{font-size:90%}}.mw-parser-output .reflist .references{font-size:100%;margin-bottom:0;list-style-type:inherit}.mw-parser-output .reflist-columns-2{column-width:30em}.mw-parser-output .reflist-columns-3{column-width:25em}.mw-parser-output .reflist-columns{margin-top:0.3em}.mw-parser-output .reflist-columns ol{margin-top:0}.mw-parser-output .reflist-columns li{page-break-inside:avoid;break-inside:avoid-column}.mw-parser-output .reflist-upper-alpha{list-style-type:upper-alpha}.mw-parser-output .reflist-upper-roman{list-style-type:upper-roman}.mw-parser-output .reflist-lower-alpha{list-style-type:lower-alpha}.mw-parser-output .reflist-lower-greek{list-style-type:lower-greek}.mw-parser-output .reflist-lower-roman{list-style-type:lower-roman}</style><div class="reflist"> <div class="mw-references-wrap mw-references-columns"><ol class="references"> <li id="cite_note-nkwes-1"><span class="mw-cite-backlink">^ <a href="#cite_ref-nkwes_1-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-nkwes_1-1"><sup><i><b>b</b></i></sup></a> <a href="#cite_ref-nkwes_1-2"><sup><i><b>c</b></i></sup></a></span> <span class="reference-text"><style data-mw-deduplicate="TemplateStyles:r1238218222">.mw-parser-output cite.citation{font-style:inherit;word-wrap:break-word}.mw-parser-output .citation q{quotes:"\"""\"""'""'"}.mw-parser-output .citation:target{background-color:rgba(0,127,255,0.133)}.mw-parser-output .id-lock-free.id-lock-free a{background:url("//upload.wikimedia.org/wikipedia/commons/6/65/Lock-green.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-limited.id-lock-limited a,.mw-parser-output .id-lock-registration.id-lock-registration a{background:url("//upload.wikimedia.org/wikipedia/commons/d/d6/Lock-gray-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-subscription.id-lock-subscription a{background:url("//upload.wikimedia.org/wikipedia/commons/a/aa/Lock-red-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .cs1-ws-icon a{background:url("//upload.wikimedia.org/wikipedia/commons/4/4c/Wikisource-logo.svg")right 0.1em center/12px no-repeat}body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-free a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-limited a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-registration a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-subscription a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .cs1-ws-icon a{background-size:contain;padding:0 1em 0 0}.mw-parser-output .cs1-code{color:inherit;background:inherit;border:none;padding:inherit}.mw-parser-output .cs1-hidden-error{display:none;color:var(--color-error,#d33)}.mw-parser-output .cs1-visible-error{color:var(--color-error,#d33)}.mw-parser-output .cs1-maint{display:none;color:#085;margin-left:0.3em}.mw-parser-output .cs1-kern-left{padding-left:0.2em}.mw-parser-output .cs1-kern-right{padding-right:0.2em}.mw-parser-output .citation .mw-selflink{font-weight:inherit}@media screen{.mw-parser-output .cs1-format{font-size:95%}html.skin-theme-clientpref-night .mw-parser-output .cs1-maint{color:#18911f}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .cs1-maint{color:#18911f}}</style><cite id="CITEREFYardley2012" class="citation news cs1">Yardley, William (2012-12-04). <a rel="nofollow" class="external text" href="https://www.nytimes.com/2012/12/05/business/willis-whitfield-clean-room-inventor-dies-at-92.html">"Willis Whitfield, Clean Room Inventor, Dies at 92"</a>. <i><a href="/wiki/The_New_York_Times" title="The New York Times">The New York Times</a></i><span class="reference-accessdate">. Retrieved <span class="nowrap">2013-06-22</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=The+New+York+Times&amp;rft.atitle=Willis+Whitfield%2C+Clean+Room+Inventor%2C+Dies+at+92&amp;rft.date=2012-12-04&amp;rft.aulast=Yardley&amp;rft.aufirst=William&amp;rft_id=https%3A%2F%2Fwww.nytimes.com%2F2012%2F12%2F05%2Fbusiness%2Fwillis-whitfield-clean-room-inventor-dies-at-92.html&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span><sup class="noprint Inline-Template"><span style="white-space: nowrap;">&#91;<i><a href="/wiki/Wikipedia:Link_rot" title="Wikipedia:Link rot"><span title="&#160;Dead link tagged December 2023">permanent dead link</span></a></i><span style="visibility:hidden; color:transparent; padding-left:2px">&#8205;</span>&#93;</span></sup></span> </li> <li id="cite_note-kwes-2"><span class="mw-cite-backlink"><b><a href="#cite_ref-kwes_2-0">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation news cs1"><a rel="nofollow" class="external text" href="https://www.washingtonexaminer.com/sandia-physicist-cleanroom-inventor-dies-at-92">"Sandia physicist, cleanroom inventor dies at 92"</a>. <i><a href="/wiki/KWES-TV" title="KWES-TV">KWES</a></i>. <a href="/wiki/Associated_Press" title="Associated Press">Associated Press</a>. 2012-11-26<span class="reference-accessdate">. Retrieved <span class="nowrap">2012-12-03</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=KWES&amp;rft.atitle=Sandia+physicist%2C+cleanroom+inventor+dies+at+92&amp;rft.date=2012-11-26&amp;rft_id=https%3A%2F%2Fwww.washingtonexaminer.com%2Fsandia-physicist-cleanroom-inventor-dies-at-92&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-3"><span class="mw-cite-backlink"><b><a href="#cite_ref-3">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20210127140505/https://www.exyte.net/News%20-%20Events/Specialist%20articles/reinraum_printline_02_2015_Whitfield_110416.pdf">"Willis Whitfield - Father of the Cleanroom"</a> <span class="cs1-format">(PDF)</span>. Cleanroom online. September 2015. Archived from <a rel="nofollow" class="external text" href="https://www.exyte.net/News%20-%20Events/Specialist%20articles/reinraum_printline_02_2015_Whitfield_110416.pdf">the original</a> <span class="cs1-format">(PDF)</span> on 2021-01-27<span class="reference-accessdate">. Retrieved <span class="nowrap">2016-05-18</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=Willis+Whitfield+-+Father+of+the+Cleanroom&amp;rft.pub=Cleanroom+online&amp;rft.date=2015-09&amp;rft_id=https%3A%2F%2Fwww.exyte.net%2FNews%2520-%2520Events%2FSpecialist%2520articles%2Freinraum_printline_02_2015_Whitfield_110416.pdf&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-4"><span class="mw-cite-backlink"><b><a href="#cite_ref-4">^</a></b></span> <span class="reference-text">Koslow, Jules. “Industry’s Pursuit of Cleanliness.” Electronic Age 22:3 (Summer 1963), 22-25.</span> </li> <li id="cite_note-5"><span class="mw-cite-backlink"><b><a href="#cite_ref-5">^</a></b></span> <span class="reference-text">Koslow, Jules. “Industry’s Pursuit of Cleanliness.” Electronic Age 22:3 (Summer 1963), 22-25.</span> </li> <li id="cite_note-6"><span class="mw-cite-backlink"><b><a href="#cite_ref-6">^</a></b></span> <span class="reference-text">William (Bill) C. McElroy Jr., MicroAire Engineering Manager and acting VP; Kay Plastics Engineering Manager; PureAire Drafting Room Manager</span> </li> <li id="cite_note-7"><span class="mw-cite-backlink"><b><a href="#cite_ref-7">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.mecart-cleanrooms.com/what-is-a-cleanroom/">"What is a Cleanroom? &#124; Mecart"</a>. <i>MECART Cleanrooms</i>. August 16, 2016.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=MECART+Cleanrooms&amp;rft.atitle=What+is+a+Cleanroom%3F+%26%23124%3B+Mecart&amp;rft.date=2016-08-16&amp;rft_id=https%3A%2F%2Fwww.mecart-cleanrooms.com%2Fwhat-is-a-cleanroom%2F&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-8"><span class="mw-cite-backlink"><b><a href="#cite_ref-8">^</a></b></span> <span class="reference-text"><a rel="nofollow" class="external text" href="https://www.nytimes.com/2007/10/09/science/09clea.html?ref=science">In NASA's Sterile Areas, Plenty of Robust Bacteria</a> New York Times, 9. October 2007</span> </li> <li id="cite_note-9"><span class="mw-cite-backlink"><b><a href="#cite_ref-9">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://kenall.com/Home/Applications/Cleanroom-and-Containment">"Kenall Cleanroom and Containment Lighting"</a>. <i>kenall.com</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=kenall.com&amp;rft.atitle=Kenall+Cleanroom+and+Containment+Lighting&amp;rft_id=https%3A%2F%2Fkenall.com%2FHome%2FApplications%2FCleanroom-and-Containment&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-10"><span class="mw-cite-backlink"><b><a href="#cite_ref-10">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.cleanroomtechnology.com/news/article_page/Fitting_lights_in_cleanrooms/145726">"Fitting lights in cleanrooms"</a>. <i>www.cleanroomtechnology.com</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=www.cleanroomtechnology.com&amp;rft.atitle=Fitting+lights+in+cleanrooms&amp;rft_id=https%3A%2F%2Fwww.cleanroomtechnology.com%2Fnews%2Farticle_page%2FFitting_lights_in_cleanrooms%2F145726&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-11"><span class="mw-cite-backlink"><b><a href="#cite_ref-11">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.lighting.philips.com/main/prof/indoor-luminaires/waterproof-and-cleanroom/cleanroom/cleanroom-led">"Cleanroom LED"</a>. <i>Philips</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=Philips&amp;rft.atitle=Cleanroom+LED&amp;rft_id=https%3A%2F%2Fwww.lighting.philips.com%2Fmain%2Fprof%2Findoor-luminaires%2Fwaterproof-and-cleanroom%2Fcleanroom%2Fcleanroom-led&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-12"><span class="mw-cite-backlink"><b><a href="#cite_ref-12">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://staff-old.najah.edu/sites/default/files/Lec30.pdf">"Lecture 30: Cleanroom design and contamination control"</a> <span class="cs1-format">(PDF)</span>. <i>najah.edu</i><span class="reference-accessdate">. Retrieved <span class="nowrap">1 March</span> 2024</span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=najah.edu&amp;rft.atitle=Lecture+30%3A+Cleanroom+design+and+contamination+control&amp;rft_id=https%3A%2F%2Fstaff-old.najah.edu%2Fsites%2Fdefault%2Ffiles%2FLec30.pdf&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-13"><span class="mw-cite-backlink"><b><a href="#cite_ref-13">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.thomasnet.com/articles/automation-electronics/Cleanroom-Air-Flow-Principles">"Cleanroom Air Flow Principles"</a>. <i>www.thomasnet.com</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=www.thomasnet.com&amp;rft.atitle=Cleanroom+Air+Flow+Principles&amp;rft_id=https%3A%2F%2Fwww.thomasnet.com%2Farticles%2Fautomation-electronics%2FCleanroom-Air-Flow-Principles&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-14"><span class="mw-cite-backlink"><b><a href="#cite_ref-14">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFGuimeraTrzilJoynerHysmith2018" class="citation journal cs1">Guimera, Don; Trzil, Jean; Joyner, Joy; Hysmith, Nicholas D. (2018-02-01). <a rel="nofollow" class="external text" href="https://doi.org/10.1016%2Fj.ajic.2017.07.026">"Effectiveness of a shielded ultraviolet C air disinfection system in an inpatient pharmacy of a tertiary care children's hospital"</a>. <i>American Journal of Infection Control</i>. <b>46</b> (2): 223–225. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<span class="id-lock-free" title="Freely accessible"><a rel="nofollow" class="external text" href="https://doi.org/10.1016%2Fj.ajic.2017.07.026">10.1016/j.ajic.2017.07.026</a></span>. <a href="/wiki/ISSN_(identifier)" class="mw-redirect" title="ISSN (identifier)">ISSN</a>&#160;<a rel="nofollow" class="external text" href="https://search.worldcat.org/issn/0196-6553">0196-6553</a>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a>&#160;<a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/28865936">28865936</a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=American+Journal+of+Infection+Control&amp;rft.atitle=Effectiveness+of+a+shielded+ultraviolet+C+air+disinfection+system+in+an+inpatient+pharmacy+of+a+tertiary+care+children%27s+hospital&amp;rft.volume=46&amp;rft.issue=2&amp;rft.pages=223-225&amp;rft.date=2018-02-01&amp;rft.issn=0196-6553&amp;rft_id=info%3Apmid%2F28865936&amp;rft_id=info%3Adoi%2F10.1016%2Fj.ajic.2017.07.026&amp;rft.aulast=Guimera&amp;rft.aufirst=Don&amp;rft.au=Trzil%2C+Jean&amp;rft.au=Joyner%2C+Joy&amp;rft.au=Hysmith%2C+Nicholas+D.&amp;rft_id=https%3A%2F%2Fdoi.org%2F10.1016%252Fj.ajic.2017.07.026&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-15"><span class="mw-cite-backlink"><b><a href="#cite_ref-15">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFoutsourcing-pharma.com" class="citation web cs1">outsourcing-pharma.com. <a rel="nofollow" class="external text" href="https://www.outsourcing-pharma.com/Article/2004/02/18/UV-helps-maintain-cleanroom-air-quality">"UV helps maintain cleanroom air quality"</a>. <i>outsourcing-pharma.com</i><span class="reference-accessdate">. Retrieved <span class="nowrap">2020-04-15</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=outsourcing-pharma.com&amp;rft.atitle=UV+helps+maintain+cleanroom+air+quality&amp;rft.au=outsourcing-pharma.com&amp;rft_id=https%3A%2F%2Fwww.outsourcing-pharma.com%2FArticle%2F2004%2F02%2F18%2FUV-helps-maintain-cleanroom-air-quality&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-16"><span class="mw-cite-backlink"><b><a href="#cite_ref-16">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFSandle,_T2012" class="citation journal cs1">Sandle, T (November 2012). "Application of quality risk management to set viable environmental monitoring frequencies in biotechnology processing and support areas". <i><a href="/w/index.php?title=PDA_(journal)&amp;action=edit&amp;redlink=1" class="new" title="PDA (journal) (page does not exist)">PDA J Pharm Sci Technol</a></i>. <b>66</b> (6): 560–79. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.5731%2Fpdajpst.2012.00891">10.5731/pdajpst.2012.00891</a>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a>&#160;<a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/23183652">23183652</a>. <a href="/wiki/S2CID_(identifier)" class="mw-redirect" title="S2CID (identifier)">S2CID</a>&#160;<a rel="nofollow" class="external text" href="https://api.semanticscholar.org/CorpusID:7970">7970</a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=PDA+J+Pharm+Sci+Technol&amp;rft.atitle=Application+of+quality+risk+management+to+set+viable+environmental+monitoring+frequencies+in+biotechnology+processing+and+support+areas&amp;rft.volume=66&amp;rft.issue=6&amp;rft.pages=560-79&amp;rft.date=2012-11&amp;rft_id=https%3A%2F%2Fapi.semanticscholar.org%2FCorpusID%3A7970%23id-name%3DS2CID&amp;rft_id=info%3Apmid%2F23183652&amp;rft_id=info%3Adoi%2F10.5731%2Fpdajpst.2012.00891&amp;rft.au=Sandle%2C+T&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-Sandle,_T_392–403-17"><span class="mw-cite-backlink">^ <a href="#cite_ref-Sandle,_T_392–403_17-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-Sandle,_T_392–403_17-1"><sup><i><b>b</b></i></sup></a></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFSandle,_T2011" class="citation journal cs1">Sandle, T (November 2011). "A review of cleanroom microflora: types, trends, and patterns". <i><a href="/w/index.php?title=PDA_(journal)&amp;action=edit&amp;redlink=1" class="new" title="PDA (journal) (page does not exist)">PDA J Pharm Sci Technol</a></i>. <b>65</b> (4): 392–403. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.5731%2Fpdajpst.2011.00765">10.5731/pdajpst.2011.00765</a>. <a href="/wiki/PMID_(identifier)" class="mw-redirect" title="PMID (identifier)">PMID</a>&#160;<a rel="nofollow" class="external text" href="https://pubmed.ncbi.nlm.nih.gov/22293526">22293526</a>. <a href="/wiki/S2CID_(identifier)" class="mw-redirect" title="S2CID (identifier)">S2CID</a>&#160;<a rel="nofollow" class="external text" href="https://api.semanticscholar.org/CorpusID:25970142">25970142</a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=PDA+J+Pharm+Sci+Technol&amp;rft.atitle=A+review+of+cleanroom+microflora%3A+types%2C+trends%2C+and+patterns&amp;rft.volume=65&amp;rft.issue=4&amp;rft.pages=392-403&amp;rft.date=2011-11&amp;rft_id=https%3A%2F%2Fapi.semanticscholar.org%2FCorpusID%3A25970142%23id-name%3DS2CID&amp;rft_id=info%3Apmid%2F22293526&amp;rft_id=info%3Adoi%2F10.5731%2Fpdajpst.2011.00765&amp;rft.au=Sandle%2C+T&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-18"><span class="mw-cite-backlink"><b><a href="#cite_ref-18">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFHeikkinenKauppinenLiuAsikainen2018" class="citation journal cs1">Heikkinen, Ismo T.S.; Kauppinen, Christoffer; Liu, Zhengjun; Asikainen, Sanja M.; Spoljaric, Steven; Seppälä, Jukka V.; <a href="/wiki/Hele_Savin" title="Hele Savin">Savin, Hele</a> (October 2018). <a rel="nofollow" class="external text" href="https://hal.archives-ouvertes.fr/hal-02111366/file/Chemical_Compatibility_of_Fused_Filament.pdf">"Chemical compatibility of fused filament fabrication-based 3-D printed components with solutions commonly used in semiconductor wet processing"</a> <span class="cs1-format">(PDF)</span>. <i>Additive Manufacturing</i>. <b>23</b>: 99–107. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1016%2Fj.addma.2018.07.015">10.1016/j.addma.2018.07.015</a>. <a href="/wiki/ISSN_(identifier)" class="mw-redirect" title="ISSN (identifier)">ISSN</a>&#160;<a rel="nofollow" class="external text" href="https://search.worldcat.org/issn/2214-8604">2214-8604</a>. <a href="/wiki/S2CID_(identifier)" class="mw-redirect" title="S2CID (identifier)">S2CID</a>&#160;<a rel="nofollow" class="external text" href="https://api.semanticscholar.org/CorpusID:139867946">139867946</a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=Additive+Manufacturing&amp;rft.atitle=Chemical+compatibility+of+fused+filament+fabrication-based+3-D+printed+components+with+solutions+commonly+used+in+semiconductor+wet+processing&amp;rft.volume=23&amp;rft.pages=99-107&amp;rft.date=2018-10&amp;rft_id=https%3A%2F%2Fapi.semanticscholar.org%2FCorpusID%3A139867946%23id-name%3DS2CID&amp;rft.issn=2214-8604&amp;rft_id=info%3Adoi%2F10.1016%2Fj.addma.2018.07.015&amp;rft.aulast=Heikkinen&amp;rft.aufirst=Ismo+T.S.&amp;rft.au=Kauppinen%2C+Christoffer&amp;rft.au=Liu%2C+Zhengjun&amp;rft.au=Asikainen%2C+Sanja+M.&amp;rft.au=Spoljaric%2C+Steven&amp;rft.au=Sepp%C3%A4l%C3%A4%2C+Jukka+V.&amp;rft.au=Savin%2C+Hele&amp;rft_id=https%3A%2F%2Fhal.archives-ouvertes.fr%2Fhal-02111366%2Ffile%2FChemical_Compatibility_of_Fused_Filament.pdf&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-19"><span class="mw-cite-backlink"><b><a href="#cite_ref-19">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFPasanenvon_GastrowHeikkinenVähänissi2019" class="citation journal cs1">Pasanen, T.P.; von Gastrow, G.; Heikkinen, I.T.S.; Vähänissi, V.; Savin, H.; Pearce, J.M. (January 2019). <a rel="nofollow" class="external text" href="https://aaltodoc.aalto.fi/handle/123456789/34055">"Compatibility of 3-D printed devices in cleanroom environments for semiconductor processing"</a>. <i>Materials Science in Semiconductor Processing</i>. <b>89</b>: 59–67. <a href="/wiki/Doi_(identifier)" class="mw-redirect" title="Doi (identifier)">doi</a>:<a rel="nofollow" class="external text" href="https://doi.org/10.1016%2Fj.mssp.2018.08.027">10.1016/j.mssp.2018.08.027</a>. <a href="/wiki/ISSN_(identifier)" class="mw-redirect" title="ISSN (identifier)">ISSN</a>&#160;<a rel="nofollow" class="external text" href="https://search.worldcat.org/issn/1369-8001">1369-8001</a>. <a href="/wiki/S2CID_(identifier)" class="mw-redirect" title="S2CID (identifier)">S2CID</a>&#160;<a rel="nofollow" class="external text" href="https://api.semanticscholar.org/CorpusID:105579272">105579272</a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=Materials+Science+in+Semiconductor+Processing&amp;rft.atitle=Compatibility+of+3-D+printed+devices+in+cleanroom+environments+for+semiconductor+processing&amp;rft.volume=89&amp;rft.pages=59-67&amp;rft.date=2019-01&amp;rft_id=https%3A%2F%2Fapi.semanticscholar.org%2FCorpusID%3A105579272%23id-name%3DS2CID&amp;rft.issn=1369-8001&amp;rft_id=info%3Adoi%2F10.1016%2Fj.mssp.2018.08.027&amp;rft.aulast=Pasanen&amp;rft.aufirst=T.P.&amp;rft.au=von+Gastrow%2C+G.&amp;rft.au=Heikkinen%2C+I.T.S.&amp;rft.au=V%C3%A4h%C3%A4nissi%2C+V.&amp;rft.au=Savin%2C+H.&amp;rft.au=Pearce%2C+J.M.&amp;rft_id=https%3A%2F%2Faaltodoc.aalto.fi%2Fhandle%2F123456789%2F34055&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-20"><span class="mw-cite-backlink"><b><a href="#cite_ref-20">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation news cs1"><a rel="nofollow" class="external text" href="https://blog.ansi.org/2015/07/cleanroom-and-controlled-environment/">"Cleanroom and Controlled Environment Attire - ANSI Blog"</a>. <i>The ANSI Blog</i>. 2015-07-15<span class="reference-accessdate">. Retrieved <span class="nowrap">2018-11-24</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=The+ANSI+Blog&amp;rft.atitle=Cleanroom+and+Controlled+Environment+Attire+-+ANSI+Blog&amp;rft.date=2015-07-15&amp;rft_id=https%3A%2F%2Fblog.ansi.org%2F2015%2F07%2Fcleanroom-and-controlled-environment%2F&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-21"><span class="mw-cite-backlink"><b><a href="#cite_ref-21">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://science.ksc.nasa.gov/facilities/sspf.html">"Space Station Processing Facility (SSPF)"</a>. <i>science.ksc.nasa.gov</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=science.ksc.nasa.gov&amp;rft.atitle=Space+Station+Processing+Facility+%28SSPF%29&amp;rft_id=https%3A%2F%2Fscience.ksc.nasa.gov%2Ffacilities%2Fsspf.html&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-22"><span class="mw-cite-backlink"><b><a href="#cite_ref-22">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20080214104020/http://www.ee.byu.edu/cleanroom/particlecount.phtml">"Cleanroom Classification / Particle Count / FS209E / ISO TC209 /"</a>. Archived from <a rel="nofollow" class="external text" href="http://www.ee.byu.edu/cleanroom/particlecount.phtml">the original</a> on 2008-02-14<span class="reference-accessdate">. Retrieved <span class="nowrap">2008-03-05</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=Cleanroom+Classification+%2F+Particle+Count+%2F+FS209E+%2F+ISO+TC209+%2F&amp;rft_id=http%3A%2F%2Fwww.ee.byu.edu%2Fcleanroom%2Fparticlecount.phtml&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-23"><span class="mw-cite-backlink"><b><a href="#cite_ref-23">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="http://www.iso.org/iso/catalogue_detail?csnumber=53394">"ISO 14644-1:2015 - Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness by particle concentration"</a>. <i>ISO</i>. 21 January 2016<span class="reference-accessdate">. Retrieved <span class="nowrap">2016-09-12</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=ISO&amp;rft.atitle=ISO+14644-1%3A2015+-+Cleanrooms+and+associated+controlled+environments+--+Part+1%3A+Classification+of+air+cleanliness+by+particle+concentration&amp;rft.date=2016-01-21&amp;rft_id=http%3A%2F%2Fwww.iso.org%2Fiso%2Fcatalogue_detail%3Fcsnumber%3D53394&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-Whyte2001-24"><span class="mw-cite-backlink"><b><a href="#cite_ref-Whyte2001_24-0">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFW._Whyte2001" class="citation book cs1">W. Whyte (17 October 2001). <a rel="nofollow" class="external text" href="https://books.google.com/books?id=-ufEtmr1sBgC"><i>Cleanroom Technology: Fundamentals of Design, Testing and Operation</i></a>. John Wiley &amp; Sons. <a href="/wiki/ISBN_(identifier)" class="mw-redirect" title="ISBN (identifier)">ISBN</a>&#160;<a href="/wiki/Special:BookSources/978-0-471-86842-2" title="Special:BookSources/978-0-471-86842-2"><bdi>978-0-471-86842-2</bdi></a>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=book&amp;rft.btitle=Cleanroom+Technology%3A+Fundamentals+of+Design%2C+Testing+and+Operation&amp;rft.pub=John+Wiley+%26+Sons&amp;rft.date=2001-10-17&amp;rft.isbn=978-0-471-86842-2&amp;rft.au=W.+Whyte&amp;rft_id=https%3A%2F%2Fbooks.google.com%2Fbooks%3Fid%3D-ufEtmr1sBgC&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-25"><span class="mw-cite-backlink"><b><a href="#cite_ref-25">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.iest.org/Standards-RPs/ISO-Standards/FED-STD-209E">"Federal Standard 209E Cancellation"</a>. <i>www.iest.org</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=www.iest.org&amp;rft.atitle=Federal+Standard+209E+Cancellation&amp;rft_id=https%3A%2F%2Fwww.iest.org%2FStandards-RPs%2FISO-Standards%2FFED-STD-209E&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-26"><span class="mw-cite-backlink"><b><a href="#cite_ref-26">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20080528111035/http://www.wbdg.org/ccb/FEDMIL/notices.pdf">"Archived copy"</a> <span class="cs1-format">(PDF)</span>. Archived from <a rel="nofollow" class="external text" href="http://www.wbdg.org/ccb/FEDMIL/notices.pdf">the original</a> <span class="cs1-format">(PDF)</span> on 2008-05-28<span class="reference-accessdate">. Retrieved <span class="nowrap">2008-04-17</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=Archived+copy&amp;rft_id=http%3A%2F%2Fwww.wbdg.org%2Fccb%2FFEDMIL%2Fnotices.pdf&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span><span class="cs1-maint citation-comment"><code class="cs1-code">{{<a href="/wiki/Template:Cite_web" title="Template:Cite web">cite web</a>}}</code>: CS1 maint: archived copy as title (<a href="/wiki/Category:CS1_maint:_archived_copy_as_title" title="Category:CS1 maint: archived copy as title">link</a>)</span>, page 148</span> </li> <li id="cite_note-27"><span class="mw-cite-backlink"><b><a href="#cite_ref-27">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="http://www.nufab.northwestern.edu/files/2015/10/NUFAB-Safety-Protocol-Policy-10gsrfd.pdf">"NUFAB SAFETY &amp; PROTOCOL"</a> <span class="cs1-format">(PDF)</span><span class="reference-accessdate">. Retrieved <span class="nowrap">24 February</span> 2016</span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=NUFAB+SAFETY+%26+PROTOCOL&amp;rft_id=http%3A%2F%2Fwww.nufab.northwestern.edu%2Ffiles%2F2015%2F10%2FNUFAB-Safety-Protocol-Policy-10gsrfd.pdf&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-28"><span class="mw-cite-backlink"><b><a href="#cite_ref-28">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFResearch2019" class="citation journal cs1">Research, Center for Drug Evaluation and (2019-02-09). <a rel="nofollow" class="external text" href="https://www.fda.gov/drugs/human-drug-compounding/fdc-act-provisions-apply-human-drug-compounding">"FD&amp;C Act Provisions that Apply to Human Drug Compounding"</a>. <i>FDA</i>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=article&amp;rft.jtitle=FDA&amp;rft.atitle=FD%26C+Act+Provisions+that+Apply+to+Human+Drug+Compounding&amp;rft.date=2019-02-09&amp;rft.aulast=Research&amp;rft.aufirst=Center+for+Drug+Evaluation+and&amp;rft_id=https%3A%2F%2Fwww.fda.gov%2Fdrugs%2Fhuman-drug-compounding%2Ffdc-act-provisions-apply-human-drug-compounding&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-29"><span class="mw-cite-backlink"><b><a href="#cite_ref-29">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://web.archive.org/web/20160601220509/http://www.cemag.us/articles/2014/03/understanding-cleanroom-classifications">"Understanding Cleanroom Classifications"</a>. Archived from <a rel="nofollow" class="external text" href="http://www.cemag.us/articles/2014/03/understanding-cleanroom-classifications">the original</a> on 2016-06-01<span class="reference-accessdate">. Retrieved <span class="nowrap">2015-08-21</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=Understanding+Cleanroom+Classifications&amp;rft_id=http%3A%2F%2Fwww.cemag.us%2Farticles%2F2014%2F03%2Funderstanding-cleanroom-classifications&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-30"><span class="mw-cite-backlink"><b><a href="#cite_ref-30">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite id="CITEREFMarket_Venture_Philippines_Inc._web_site2006" class="citation web cs1">Market Venture Philippines Inc. web site (2006-04-19). <a rel="nofollow" class="external text" href="https://web.archive.org/web/20120828005933/http://www.mvent.com.ph/references/cleanroom.htm">"What is a Clean Room?"</a>. Archived from <a rel="nofollow" class="external text" href="http://www.mvent.com.ph/references/cleanroom.htm">the original</a> on 2012-08-28<span class="reference-accessdate">. Retrieved <span class="nowrap">2007-06-02</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=What+is+a+Clean+Room%3F&amp;rft.date=2006-04-19&amp;rft.au=Market+Venture+Philippines+Inc.+web+site&amp;rft_id=http%3A%2F%2Fwww.mvent.com.ph%2Freferences%2Fcleanroom.htm&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-31"><span class="mw-cite-backlink"><b><a href="#cite_ref-31">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="http://shop.bsigroup.com/ProductDetail/?pid=000000000030002856">"BS 5295-0:1989 - Environmental cleanliness in enclosed spaces. General introduction, terms and definitions for clean rooms and clean air devices"</a>. 2016<span class="reference-accessdate">. Retrieved <span class="nowrap">2016-04-18</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=BS+5295-0%3A1989+-+Environmental+cleanliness+in+enclosed+spaces.+General+introduction%2C+terms+and+definitions+for+clean+rooms+and+clean+air+devices&amp;rft.date=2016&amp;rft_id=http%3A%2F%2Fshop.bsigroup.com%2FProductDetail%2F%3Fpid%3D000000000030002856&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-32"><span class="mw-cite-backlink"><b><a href="#cite_ref-32">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.usp.org/compounding/general-chapter-hazardous-drugs-handling-healthcare">"USP 800 | USP"</a>. <i>www.usp.org</i><span class="reference-accessdate">. Retrieved <span class="nowrap">2020-04-13</span></span>.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&amp;rft.genre=unknown&amp;rft.jtitle=www.usp.org&amp;rft.atitle=USP+800+%7C+USP&amp;rft_id=https%3A%2F%2Fwww.usp.org%2Fcompounding%2Fgeneral-chapter-hazardous-drugs-handling-healthcare&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> <li id="cite_note-33"><span class="mw-cite-backlink"><b><a href="#cite_ref-33">^</a></b></span> <span class="reference-text"><link rel="mw-deduplicated-inline-style" href="mw-data:TemplateStyles:r1238218222"><cite class="citation web cs1"><a rel="nofollow" class="external text" href="https://www.youtube.com/watch?v=4Q_n4vdyZzc">"Semiconductor Technology at TSMC, 2011"</a>. 26 March 2011. <a rel="nofollow" class="external text" href="https://ghostarchive.org/varchive/youtube/20211212/4Q_n4vdyZzc">Archived</a> from the original on 2021-12-12 &#8211; via YouTube.</cite><span title="ctx_ver=Z39.88-2004&amp;rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&amp;rft.genre=unknown&amp;rft.btitle=Semiconductor+Technology+at+TSMC%2C+2011&amp;rft.date=2011-03-26&amp;rft_id=https%3A%2F%2Fwww.youtube.com%2Fwatch%3Fv%3D4Q_n4vdyZzc&amp;rfr_id=info%3Asid%2Fen.wikipedia.org%3ACleanroom" class="Z3988"></span></span> </li> </ol></div></div> <div class="mw-heading mw-heading2"><h2 id="External_links">External links</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Cleanroom&amp;action=edit&amp;section=17" title="Edit section: External links"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <style data-mw-deduplicate="TemplateStyles:r1235681985">.mw-parser-output .side-box{margin:4px 0;box-sizing:border-box;border:1px solid #aaa;font-size:88%;line-height:1.25em;background-color:var(--background-color-interactive-subtle,#f8f9fa);display:flow-root}.mw-parser-output .side-box-abovebelow,.mw-parser-output .side-box-text{padding:0.25em 0.9em}.mw-parser-output .side-box-image{padding:2px 0 2px 0.9em;text-align:center}.mw-parser-output .side-box-imageright{padding:2px 0.9em 2px 0;text-align:center}@media(min-width:500px){.mw-parser-output .side-box-flex{display:flex;align-items:center}.mw-parser-output .side-box-text{flex:1;min-width:0}}@media(min-width:720px){.mw-parser-output .side-box{width:238px}.mw-parser-output .side-box-right{clear:right;float:right;margin-left:1em}.mw-parser-output .side-box-left{margin-right:1em}}</style><style data-mw-deduplicate="TemplateStyles:r1237033735">@media print{body.ns-0 .mw-parser-output .sistersitebox{display:none!important}}@media screen{html.skin-theme-clientpref-night .mw-parser-output .sistersitebox img[src*="Wiktionary-logo-en-v2.svg"]{background-color:white}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .sistersitebox img[src*="Wiktionary-logo-en-v2.svg"]{background-color:white}}</style><div class="side-box side-box-right plainlinks sistersitebox"><style data-mw-deduplicate="TemplateStyles:r1126788409">.mw-parser-output .plainlist ol,.mw-parser-output .plainlist ul{line-height:inherit;list-style:none;margin:0;padding:0}.mw-parser-output .plainlist ol li,.mw-parser-output .plainlist ul li{margin-bottom:0}</style> <div class="side-box-flex"> <div class="side-box-image"><span class="noviewer" typeof="mw:File"><span><img alt="" src="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/30px-Commons-logo.svg.png" decoding="async" width="30" height="40" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/45px-Commons-logo.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/4/4a/Commons-logo.svg/59px-Commons-logo.svg.png 2x" data-file-width="1024" data-file-height="1376" /></span></span></div> <div class="side-box-text plainlist">Wikimedia Commons has media related to <span style="font-weight: bold; font-style: italic;"><a href="https://commons.wikimedia.org/wiki/Category:Cleanrooms" class="extiw" title="commons:Category:Cleanrooms">Cleanrooms</a></span>.</div></div> </div> <ul><li><a rel="nofollow" class="external text" href="https://web.archive.org/web/20200601113337/https://www.gsfcc.org/">Cleanroom Wiki--The Global Society For Contamination Control (GSFCC)</a></li></ul> <div class="navbox-styles"><style data-mw-deduplicate="TemplateStyles:r1129693374">.mw-parser-output .hlist dl,.mw-parser-output .hlist ol,.mw-parser-output .hlist ul{margin:0;padding:0}.mw-parser-output .hlist dd,.mw-parser-output .hlist dt,.mw-parser-output .hlist li{margin:0;display:inline}.mw-parser-output .hlist.inline,.mw-parser-output .hlist.inline dl,.mw-parser-output .hlist.inline ol,.mw-parser-output .hlist.inline ul,.mw-parser-output .hlist dl dl,.mw-parser-output .hlist dl ol,.mw-parser-output .hlist dl ul,.mw-parser-output .hlist ol dl,.mw-parser-output .hlist ol ol,.mw-parser-output .hlist ol ul,.mw-parser-output .hlist ul dl,.mw-parser-output .hlist ul ol,.mw-parser-output .hlist ul ul{display:inline}.mw-parser-output .hlist .mw-empty-li{display:none}.mw-parser-output .hlist dt::after{content:": "}.mw-parser-output .hlist dd::after,.mw-parser-output .hlist li::after{content:" · ";font-weight:bold}.mw-parser-output .hlist dd:last-child::after,.mw-parser-output .hlist dt:last-child::after,.mw-parser-output .hlist li:last-child::after{content:none}.mw-parser-output .hlist dd dd:first-child::before,.mw-parser-output .hlist dd dt:first-child::before,.mw-parser-output .hlist dd li:first-child::before,.mw-parser-output .hlist dt dd:first-child::before,.mw-parser-output .hlist dt dt:first-child::before,.mw-parser-output .hlist dt li:first-child::before,.mw-parser-output .hlist li dd:first-child::before,.mw-parser-output .hlist li dt:first-child::before,.mw-parser-output .hlist li li:first-child::before{content:" (";font-weight:normal}.mw-parser-output .hlist dd dd:last-child::after,.mw-parser-output .hlist dd dt:last-child::after,.mw-parser-output .hlist dd li:last-child::after,.mw-parser-output .hlist dt dd:last-child::after,.mw-parser-output .hlist dt dt:last-child::after,.mw-parser-output .hlist dt li:last-child::after,.mw-parser-output .hlist li dd:last-child::after,.mw-parser-output .hlist li dt:last-child::after,.mw-parser-output .hlist li li:last-child::after{content:")";font-weight:normal}.mw-parser-output .hlist ol{counter-reset:listitem}.mw-parser-output .hlist ol>li{counter-increment:listitem}.mw-parser-output .hlist ol>li::before{content:" "counter(listitem)"\a0 "}.mw-parser-output .hlist dd ol>li:first-child::before,.mw-parser-output .hlist dt ol>li:first-child::before,.mw-parser-output .hlist li ol>li:first-child::before{content:" ("counter(listitem)"\a0 "}</style><style data-mw-deduplicate="TemplateStyles:r1236075235">.mw-parser-output .navbox{box-sizing:border-box;border:1px solid #a2a9b1;width:100%;clear:both;font-size:88%;text-align:center;padding:1px;margin:1em auto 0}.mw-parser-output .navbox .navbox{margin-top:0}.mw-parser-output .navbox+.navbox,.mw-parser-output .navbox+.navbox-styles+.navbox{margin-top:-1px}.mw-parser-output .navbox-inner,.mw-parser-output .navbox-subgroup{width:100%}.mw-parser-output .navbox-group,.mw-parser-output .navbox-title,.mw-parser-output .navbox-abovebelow{padding:0.25em 1em;line-height:1.5em;text-align:center}.mw-parser-output .navbox-group{white-space:nowrap;text-align:right}.mw-parser-output .navbox,.mw-parser-output .navbox-subgroup{background-color:#fdfdfd}.mw-parser-output .navbox-list{line-height:1.5em;border-color:#fdfdfd}.mw-parser-output .navbox-list-with-group{text-align:left;border-left-width:2px;border-left-style:solid}.mw-parser-output tr+tr>.navbox-abovebelow,.mw-parser-output tr+tr>.navbox-group,.mw-parser-output tr+tr>.navbox-image,.mw-parser-output tr+tr>.navbox-list{border-top:2px solid #fdfdfd}.mw-parser-output .navbox-title{background-color:#ccf}.mw-parser-output .navbox-abovebelow,.mw-parser-output .navbox-group,.mw-parser-output .navbox-subgroup .navbox-title{background-color:#ddf}.mw-parser-output .navbox-subgroup .navbox-group,.mw-parser-output .navbox-subgroup .navbox-abovebelow{background-color:#e6e6ff}.mw-parser-output .navbox-even{background-color:#f7f7f7}.mw-parser-output .navbox-odd{background-color:transparent}.mw-parser-output .navbox .hlist td dl,.mw-parser-output .navbox .hlist td ol,.mw-parser-output .navbox .hlist td ul,.mw-parser-output .navbox td.hlist dl,.mw-parser-output .navbox td.hlist ol,.mw-parser-output .navbox td.hlist ul{padding:0.125em 0}.mw-parser-output .navbox .navbar{display:block;font-size:100%}.mw-parser-output .navbox-title .navbar{float:left;text-align:left;margin-right:0.5em}body.skin--responsive .mw-parser-output .navbox-image img{max-width:none!important}@media print{body.ns-0 .mw-parser-output .navbox{display:none!important}}</style></div><div role="navigation" class="navbox authority-control" aria-label="Navbox" style="padding:3px"><table class="nowraplinks hlist navbox-inner" style="border-spacing:0;background:transparent;color:inherit"><tbody><tr><th scope="row" class="navbox-group" style="width:1%"><a href="/wiki/Help:Authority_control" title="Help:Authority control">Authority control databases</a>: National <span class="mw-valign-text-top noprint" typeof="mw:File/Frameless"><a href="https://www.wikidata.org/wiki/Q794827#identifiers" title="Edit this at Wikidata"><img alt="Edit this at Wikidata" src="//upload.wikimedia.org/wikipedia/en/thumb/8/8a/OOjs_UI_icon_edit-ltr-progressive.svg/10px-OOjs_UI_icon_edit-ltr-progressive.svg.png" decoding="async" width="10" height="10" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/en/thumb/8/8a/OOjs_UI_icon_edit-ltr-progressive.svg/15px-OOjs_UI_icon_edit-ltr-progressive.svg.png 1.5x, //upload.wikimedia.org/wikipedia/en/thumb/8/8a/OOjs_UI_icon_edit-ltr-progressive.svg/20px-OOjs_UI_icon_edit-ltr-progressive.svg.png 2x" data-file-width="20" data-file-height="20" /></a></span></th><td class="navbox-list-with-group navbox-list navbox-odd" style="width:100%;padding:0"><div style="padding:0 0.25em"><ul><li><span class="uid"><a rel="nofollow" class="external text" href="https://id.loc.gov/authorities/sh85026887">United States</a></span></li><li><span class="uid"><a rel="nofollow" class="external text" href="https://id.ndl.go.jp/auth/ndlna/01062001">Japan</a></span></li><li><span class="uid"><a rel="nofollow" class="external text" href="http://olduli.nli.org.il/F/?func=find-b&amp;local_base=NLX10&amp;find_code=UID&amp;request=987007284082505171">Israel</a></span></li></ul></div></td></tr></tbody></table></div> <!-- NewPP limit report Parsed by mw‐web.codfw.main‐cc877b49b‐st7w7 Cached time: 20241127115010 Cache expiry: 2592000 Reduced expiry: false Complications: [vary‐revision‐sha1, show‐toc] CPU time usage: 0.624 seconds Real time usage: 0.861 seconds Preprocessor visited node count: 3968/1000000 Post‐expand include size: 72937/2097152 bytes Template argument size: 6433/2097152 bytes Highest expansion depth: 21/100 Expensive parser function count: 11/500 Unstrip recursion depth: 1/20 Unstrip post‐expand size: 112904/5000000 bytes Lua time usage: 0.373/10.000 seconds Lua memory usage: 8366830/52428800 bytes Number of Wikibase entities loaded: 1/400 --> <!-- Transclusion expansion time report (%,ms,calls,template) 100.00% 679.474 1 -total 38.10% 258.887 1 Template:Reflist 14.42% 98.009 3 Template:Cite_news 12.33% 83.790 1 Template:Authority_control 10.61% 72.122 19 Template:Cite_web 9.39% 63.797 1 Template:Short_description 8.53% 57.985 1 Template:Commons_category 8.27% 56.209 1 Template:Sister_project 8.06% 54.758 1 Template:Side_box 7.14% 48.547 3 Template:Fix --> <!-- Saved in parser cache with key enwiki:pcache:275712:|#|:idhash:canonical and timestamp 20241127115010 and revision id 1250127846. Rendering was triggered because: page-view --> </div><!--esi <esi:include src="/esitest-fa8a495983347898/content" /> --><noscript><img src="https://login.wikimedia.org/wiki/Special:CentralAutoLogin/start?type=1x1" alt="" width="1" height="1" style="border: none; position: absolute;"></noscript> <div class="printfooter" data-nosnippet="">Retrieved from "<a dir="ltr" href="https://en.wikipedia.org/w/index.php?title=Cleanroom&amp;oldid=1250127846">https://en.wikipedia.org/w/index.php?title=Cleanroom&amp;oldid=1250127846</a>"</div></div> <div id="catlinks" class="catlinks" data-mw="interface"><div id="mw-normal-catlinks" class="mw-normal-catlinks"><a href="/wiki/Help:Category" title="Help:Category">Categories</a>: <ul><li><a href="/wiki/Category:Cleanroom_technology" title="Category:Cleanroom technology">Cleanroom technology</a></li><li><a href="/wiki/Category:Rooms" title="Category:Rooms">Rooms</a></li><li><a href="/wiki/Category:Semiconductor_device_fabrication" title="Category:Semiconductor device fabrication">Semiconductor device fabrication</a></li><li><a href="/wiki/Category:Filters" title="Category:Filters">Filters</a></li><li><a href="/wiki/Category:Telecommunications_engineering" title="Category:Telecommunications engineering">Telecommunications engineering</a></li></ul></div><div id="mw-hidden-catlinks" class="mw-hidden-catlinks mw-hidden-cats-hidden">Hidden categories: <ul><li><a href="/wiki/Category:All_articles_with_dead_external_links" title="Category:All articles with dead external links">All articles with dead external links</a></li><li><a href="/wiki/Category:Articles_with_dead_external_links_from_December_2023" title="Category:Articles with dead external links from December 2023">Articles with dead external links from December 2023</a></li><li><a href="/wiki/Category:Articles_with_permanently_dead_external_links" title="Category:Articles with permanently dead external links">Articles with permanently dead external links</a></li><li><a href="/wiki/Category:CS1_maint:_archived_copy_as_title" title="Category:CS1 maint: archived copy as title">CS1 maint: archived copy as title</a></li><li><a href="/wiki/Category:Articles_with_short_description" title="Category:Articles with short description">Articles with short description</a></li><li><a href="/wiki/Category:Short_description_is_different_from_Wikidata" title="Category:Short description is different from Wikidata">Short description is different from Wikidata</a></li><li><a href="/wiki/Category:All_articles_with_unsourced_statements" title="Category:All articles with unsourced statements">All articles with unsourced statements</a></li><li><a href="/wiki/Category:Articles_with_unsourced_statements_from_April_2024" title="Category:Articles with unsourced statements from April 2024">Articles with unsourced statements from April 2024</a></li><li><a href="/wiki/Category:Articles_with_unsourced_statements_from_November_2023" title="Category:Articles with unsourced statements from November 2023">Articles with unsourced statements from November 2023</a></li><li><a href="/wiki/Category:All_Wikipedia_articles_needing_clarification" title="Category:All Wikipedia articles needing clarification">All Wikipedia articles needing clarification</a></li><li><a href="/wiki/Category:Wikipedia_articles_needing_clarification_from_November_2023" title="Category:Wikipedia articles needing clarification from November 2023">Wikipedia articles needing clarification from November 2023</a></li><li><a href="/wiki/Category:Articles_with_unsourced_statements_from_August_2023" title="Category:Articles with unsourced statements from August 2023">Articles with unsourced statements from August 2023</a></li><li><a href="/wiki/Category:Commons_category_link_is_on_Wikidata" title="Category:Commons category link is on Wikidata">Commons category link is on Wikidata</a></li></ul></div></div> </div> </main> </div> <div class="mw-footer-container"> <footer id="footer" class="mw-footer" > <ul id="footer-info"> <li id="footer-info-lastmod"> This page was last edited on 8 October 2024, at 16:30<span class="anonymous-show">&#160;(UTC)</span>.</li> <li id="footer-info-copyright">Text is available under the <a href="/wiki/Wikipedia:Text_of_the_Creative_Commons_Attribution-ShareAlike_4.0_International_License" title="Wikipedia:Text of the Creative Commons Attribution-ShareAlike 4.0 International License">Creative Commons Attribution-ShareAlike 4.0 License</a>; additional terms may apply. By using this site, you agree to the <a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Terms_of_Use" class="extiw" title="foundation:Special:MyLanguage/Policy:Terms of Use">Terms of Use</a> and <a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Privacy_policy" class="extiw" title="foundation:Special:MyLanguage/Policy:Privacy policy">Privacy Policy</a>. Wikipedia® is a registered trademark of the <a rel="nofollow" class="external text" href="https://wikimediafoundation.org/">Wikimedia Foundation, Inc.</a>, a non-profit organization.</li> </ul> <ul id="footer-places"> <li id="footer-places-privacy"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Privacy_policy">Privacy policy</a></li> <li id="footer-places-about"><a href="/wiki/Wikipedia:About">About Wikipedia</a></li> <li id="footer-places-disclaimers"><a href="/wiki/Wikipedia:General_disclaimer">Disclaimers</a></li> <li id="footer-places-contact"><a href="//en.wikipedia.org/wiki/Wikipedia:Contact_us">Contact Wikipedia</a></li> <li id="footer-places-wm-codeofconduct"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Universal_Code_of_Conduct">Code of Conduct</a></li> <li id="footer-places-developers"><a href="https://developer.wikimedia.org">Developers</a></li> <li id="footer-places-statslink"><a href="https://stats.wikimedia.org/#/en.wikipedia.org">Statistics</a></li> <li id="footer-places-cookiestatement"><a href="https://foundation.wikimedia.org/wiki/Special:MyLanguage/Policy:Cookie_statement">Cookie statement</a></li> <li id="footer-places-mobileview"><a href="//en.m.wikipedia.org/w/index.php?title=Cleanroom&amp;mobileaction=toggle_view_mobile" class="noprint stopMobileRedirectToggle">Mobile view</a></li> </ul> <ul id="footer-icons" class="noprint"> <li id="footer-copyrightico"><a href="https://wikimediafoundation.org/" class="cdx-button cdx-button--fake-button cdx-button--size-large cdx-button--fake-button--enabled"><img src="/static/images/footer/wikimedia-button.svg" width="84" height="29" alt="Wikimedia Foundation" loading="lazy"></a></li> <li id="footer-poweredbyico"><a href="https://www.mediawiki.org/" class="cdx-button cdx-button--fake-button cdx-button--size-large cdx-button--fake-button--enabled"><img src="/w/resources/assets/poweredby_mediawiki.svg" alt="Powered by MediaWiki" width="88" height="31" loading="lazy"></a></li> </ul> </footer> </div> </div> </div> <div class="vector-settings" id="p-dock-bottom"> <ul></ul> </div><script>(RLQ=window.RLQ||[]).push(function(){mw.config.set({"wgHostname":"mw-web.codfw.main-6bb4bcc5b5-csk8b","wgBackendResponseTime":185,"wgPageParseReport":{"limitreport":{"cputime":"0.624","walltime":"0.861","ppvisitednodes":{"value":3968,"limit":1000000},"postexpandincludesize":{"value":72937,"limit":2097152},"templateargumentsize":{"value":6433,"limit":2097152},"expansiondepth":{"value":21,"limit":100},"expensivefunctioncount":{"value":11,"limit":500},"unstrip-depth":{"value":1,"limit":20},"unstrip-size":{"value":112904,"limit":5000000},"entityaccesscount":{"value":1,"limit":400},"timingprofile":["100.00% 679.474 1 -total"," 38.10% 258.887 1 Template:Reflist"," 14.42% 98.009 3 Template:Cite_news"," 12.33% 83.790 1 Template:Authority_control"," 10.61% 72.122 19 Template:Cite_web"," 9.39% 63.797 1 Template:Short_description"," 8.53% 57.985 1 Template:Commons_category"," 8.27% 56.209 1 Template:Sister_project"," 8.06% 54.758 1 Template:Side_box"," 7.14% 48.547 3 Template:Fix"]},"scribunto":{"limitreport-timeusage":{"value":"0.373","limit":"10.000"},"limitreport-memusage":{"value":8366830,"limit":52428800}},"cachereport":{"origin":"mw-web.codfw.main-cc877b49b-st7w7","timestamp":"20241127115010","ttl":2592000,"transientcontent":false}}});});</script> <script type="application/ld+json">{"@context":"https:\/\/schema.org","@type":"Article","name":"Cleanroom","url":"https:\/\/en.wikipedia.org\/wiki\/Cleanroom","sameAs":"http:\/\/www.wikidata.org\/entity\/Q794827","mainEntity":"http:\/\/www.wikidata.org\/entity\/Q794827","author":{"@type":"Organization","name":"Contributors to Wikimedia projects"},"publisher":{"@type":"Organization","name":"Wikimedia Foundation, Inc.","logo":{"@type":"ImageObject","url":"https:\/\/www.wikimedia.org\/static\/images\/wmf-hor-googpub.png"}},"datePublished":"2003-07-23T10:19:55Z","dateModified":"2024-10-08T16:30:59Z","image":"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/5\/50\/Clean_room.jpg","headline":"facility designed to maintain extremely low levels of particulates, such as dust, airborne organisms, or vaporized particles"}</script> </body> </html>

Pages: 1 2 3 4 5 6 7 8 9 10