Semiconductor Manufacturing Technology

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title="ZEISS Semiconductor Manufacturing Technology - Push the limits"/> </div> <div class="lazy-image__active-image-indicator"></div> </figure> </div> <div class="stage-focus-frame__container grid__container"> <div class="stage-focus-frame__grid-structure grid__structure grid__structure--50-50"> <div class="stage-focus-frame__column grid__column"> <div class="stage-focus-frame__content"> <div class="stage-focus-frame__ambition hl-xxxl"> <span class="stage-focus-frame__ambition-eyebrow text--eyebrow"></span> <h2 class="stage-focus-frame__ambition-main text--display-s">Push the limits </h2> </div> <div class="stage-focus-frame__headline"><div class="headline hl-l"> <span data-target-id="headline-809797720"> <h1> <span class="headline__main" data-js-select="Headline_main">ZEISS Semiconductor Manufacturing Technology</span> </h1> </span> </div> </div> <div class="stage-focus-frame__text"><div class="text text--body-l"> <p>Today for the technology of tomorrow. Even smaller, more powerful and more efficient. ZEISS Semiconductor Manufacturing Technology enables chip manufacturers around the world. </p> </div> </div> <div class="stage-focus-frame__button"><div class="button-link"> </div> </div> </div> </div> </div> </div> </div> </div> </div> </div> <div class="container responsivegrid aem-GridColumn aem-GridColumn--default--12"> <div id="container-5b73d01299" class="cmp-container"> <div class="cyan-teaser grid__container"> <div class="cyan-teaser__content" data-target-id="cyanTeaser-501912041" data-tracking-id="cyanTeaser-2057805119"> <div class="grid__structure"> <div class="grid__column grid__column--100 cyan-teaser__content-wrapper"> <div class="grid__content"> <div class="headline hl-l headline--inverted spacing--l"> <span data-target-id="headline-680524206"> <h2> <span class="headline__main" data-js-select="Headline_main">We like things precise. Very precise.</span> </h2> </span> </div> <div class="cyan-teaser__text"> <div class="text text--body-m"> <p>With our optics and innovations, we have been driving semiconductor technology forward for more than 50 years. With maximum precision. For ever shorter wavelengths – currently for 13.5 nanometers. With EUV technology, we have taken chip technology to a new level – pushing the boundaries of what is technologically possible. Our solutions for <a href="https://www.zeiss.com/semiconductor-manufacturing-technology/products/semiconductor-manufacturing-optics.html" target="_blank" data-track-event="{"moduleType":"Cyan Teaser","name":"CTA","action":"Click","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/products/semiconductor-manufacturing-optics.html","type":"Internal","moduleSection":"cyanTeaser-2057805119","value":"lithography optics"}" data-track-auto="true" rel="noopener noreferrer">lithography optics</a>, <a href="https://www.zeiss.com/semiconductor-manufacturing-technology/products/photomask-solutions.html" target="_blank" data-track-event="{"moduleType":"Cyan Teaser","name":"CTA","action":"Click","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/products/photomask-solutions.html","type":"Internal","moduleSection":"cyanTeaser-2057805119","value":"photomasks "}" data-track-auto="true" rel="noopener noreferrer">photomasks </a>and for <a href="https://www.zeiss.com/semiconductor-manufacturing-technology/products/process-control-solutions.html" target="_blank" data-track-event="{"moduleType":"Cyan Teaser","name":"CTA","action":"Click","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/products/process-control-solutions.html","type":"Internal","moduleSection":"cyanTeaser-2057805119","value":"process control"}" data-track-auto="true" rel="noopener noreferrer">process control</a> enable chip manufacturers around the world. They make it possible to produce memories and processors that are even more powerful, energy-efficient and cost-effective.<br /> For smartphones, smart homes and smart factories. For digitalized life and work. That sounds like the future. Thanks to ZEISS. Thanks to semiconductor technology from ZEISS.</p> </div> <div class="teaser-list--checkmarks text--body-m"> <ul class="teaser-list teaser-list--checkmarks text--body-m"> <li class="teaser-list__item"> <span class="teaser-list__icon"> <span class="icon icon-symbols-check icon--symbol"> <span class="svg-scale-wrapper" style="padding-bottom: 100%;"> <svg focusable="false" xmlns:xlink="http://www.w3.org/1999/xlink"> <use xlink:href="/etc.clientlibs/zeiss-aem-app/jupiter/clientlibs/jupiter-components.app/resources/assets/icons/symbols-sprite-generated/symbols-sprite.svg#svgsymbol-check"/> </svg> </span> </span> </span> <span class="teaser-list__label">Lithography Optics</span> </li> <li class="teaser-list__item"> <span class="teaser-list__icon"> <span class="icon icon-symbols-check icon--symbol"> <span class="svg-scale-wrapper" style="padding-bottom: 100%;"> <svg focusable="false" xmlns:xlink="http://www.w3.org/1999/xlink"> <use 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href="https://www.zeiss.com/semiconductor-manufacturing-technology/products.html" title="Link to ZEISS SMT Product page " data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"Learn more about the technologies of ZEISS SMT","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/products.html","moduleSection":"cyanTeaser-2057805119","moduleType":"Cyan Teaser"}"> <span class="button-link__content"> <span class="button__text"> Learn more about the technologies of ZEISS SMT </span> </span> </a> </div> </div> </div> </div> </div> </div> </div> <div class="grid-and-tiles-module grid__container"> <div class="grid-and-tiles-module__grid-wrapper grid__structure" data-target-id="gridAndTiles-1037611144" data-tracking-id="gridAndTiles-1602241054"> <div class="grid__column grid__column--100"> <div class="module-headline spacing--l"><div class="grid__structure"> <div class="grid__column module-headline--column"> <div class="headline hl-l headline--align-center hl--sub-xs"> <span> <h2> <span class="headline__main" data-js-select="Headline_main">High-NA-EUV technology</span> </h2> <h3 class="headline__sub hl--sub">Semiconductor manufacturing for tomorrow</h3> </span> </div> </div> </div></div> <div class="grid-and-tiles grid-and-tiles--count-2 " data-module="GridAndTiles"> <div data-js-select="grid-and-tiles-tile" data-module="GridAndTilesTile" class="grid-and-tiles-tile grid-and-tiles-tile--background-image-color-dark"> <div class="grid-and-tiles-tile__content" data-target-id="tile-68060586"> <div data-module="LazyBackgroundImage" role="img" aria-label="Two associates working in the clean room with the High-NA-EUV system" title="High-NA-EUV technology" data-src="{"xsmall":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.100.67.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","small":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.360.240.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","medium":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.768.512.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","large":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1024.683.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1280.853.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1440.960.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","max":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1920.1280.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg"}" class="lazy-background-image lazy-background-image--center lazy-background-image--middle"> </div> <a aria-label="Link to the website of High-NA-EUV lithography" class="plain-link grid-and-tiles-tile__link" href="https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/high-na-euv-lithography.html" title="Link to the website of High-NA-EUV lithography" data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"More light for more details","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/high-na-euv-lithography.html","moduleSection":"gridAndTiles-1602241054","moduleType":"Grid Tiles"}"> <div class="grid-and-tiles-tile__text-box"><div class="headline hl-s headline--inverted"> <span data-target-id="headlineInverted-174832561"> <span class="headline__eyebrow text--eyebrow">High-NA-EUV technology </span> <h3> <span class="headline__main" data-js-select="Headline_main">More light for more details</span> </h3> </span> </div> </div> </a> </div> </div> <div data-js-select="grid-and-tiles-tile" data-module="GridAndTilesTile" class="grid-and-tiles-tile grid-and-tiles-tile--background-image-color-bright grid-and-tiles-tile--text-box-width-s-full grid-and-tiles-tile--text-box-width-m-full grid-and-tiles-tile--text-box-width-l-3-4 grid-and-tiles-tile--text-box-width-xl-2-3"> <div class="grid-and-tiles-tile__content" data-target-id="tile-68060585"> <div data-module="LazyBackgroundImage" role="img" aria-label="The High-NA-EUV system in the cleanroom" title="High-NA-EUV technology" data-src="{"xsmall":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.100.56.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","small":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.360.202.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","medium":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.768.432.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","large":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.1024.575.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.1280.719.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original.image_file.1440.809.file/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg","max":"https://www.zeiss.com/content/dam/smt/home/projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg/_jcr_content/renditions/original./projektionsoptik-fuer-high-na-euv-lithographie-reinraum-smt-zeiss.jpg"}" class="lazy-background-image lazy-background-image--center lazy-background-image--middle"> </div> <a aria-label="Link to the magazine article of High-NA-EUV lithography" class="plain-link grid-and-tiles-tile__link" href="https://www.zeiss.com/semiconductor-manufacturing-technology/smt-magazine/high-na-euv-lithography.html" title="Link to the magazine article of High-NA-EUV lithography" data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"High-NA-EUV lithography: mirroring the future","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/smt-magazine/high-na-euv-lithography.html","moduleSection":"gridAndTiles-1602241054","moduleType":"Grid Tiles"}"> <div class="grid-and-tiles-tile__text-box"><div class="headline hl-s"> <span data-target-id="headline-371346066"> <span class="headline__eyebrow text--eyebrow">SMT Magazine</span> <h3> <span class="headline__main" data-js-select="Headline_main">High-NA-EUV lithography: mirroring the future</span> </h3> </span> </div> </div> </a> </div> </div> </div> </div> </div> </div> <div class="highlight-video highlight-video--scheme-secondary"> <div class="highlight-video__fullbleed-container " data-js-select="HighlightVideo_container" data-target-id="highlightVideo-50441643" data-tracking-id="highlightVideo-1393023531"> <div class="grid__container"> <div class="grid__structure"> <div class="highlight-video__grid-column grid__column grid__column--inner"> <div class="headline hl-l hl--sub-xs headline--align-center highlight-video__headline"> <span data-target-id="headline-1636826982"> <h2> <span class="headline__main" data-js-select="Headline_main">Heartbeat of digitalization</span> </h2> <h3 class="headline__sub hl--sub">Immerse yourself now in the fascination of the SMT world </h3> </span> </div> <div class="video-item-group"> <div class="slideshow slideshow--navigation-recenter slideshow--hide-interaction" data-module="Slideshow" data-module-type="Highlight Video" 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role="img" aria-label="An employee works on an EUV illumination system from ZEISS SMT " title="EUV illumination system from ZEISS SMT " data-src="{"xsmall":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original.image_file.100.67.file/euv-beleuchtungssystem-smt.jpg","small":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original.image_file.360.240.file/euv-beleuchtungssystem-smt.jpg","medium":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original.image_file.768.511.file/euv-beleuchtungssystem-smt.jpg","large":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original./euv-beleuchtungssystem-smt.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original./euv-beleuchtungssystem-smt.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original./euv-beleuchtungssystem-smt.jpg","max":"https://www.zeiss.com/content/dam/smt/home/euv-beleuchtungssystem-smt.jpg/_jcr_content/renditions/original./euv-beleuchtungssystem-smt.jpg"}" class="lazy-background-image lazy-background-image--right lazy-background-image--middle"> </div> <a aria-label="Link to ZEISS SMT's EUV website " class="plain-link grid-and-tiles-tile__link" href="https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/euv-lithography.html" title="Link to ZEISS SMT's EUV website " data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"Precision with 13.5 nm wavelength","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/euv-lithography.html","moduleSection":"gridAndTiles-1836959792","moduleType":"Grid Tiles"}"> <div class="grid-and-tiles-tile__text-box"><div class="headline hl-s"> <span data-target-id="headline-199690593"> <span class="headline__eyebrow text--eyebrow">EUV lithography</span> <h3> <span class="headline__main" data-js-select="Headline_main">Precision with 13.5 nm wavelength</span> </h3> </span> </div> </div> </a> </div> </div> <div data-js-select="grid-and-tiles-tile" data-module="GridAndTilesTile" class="grid-and-tiles-tile grid-and-tiles-tile--background-image-color-bright grid-and-tiles-tile--text-box-width-s-full grid-and-tiles-tile--text-box-width-m-full grid-and-tiles-tile--text-box-width-l-3-4 grid-and-tiles-tile--text-box-width-xl-2-3"> <div class="grid-and-tiles-tile__content" data-target-id="tile-1161602811"> <div data-module="LazyBackgroundImage" role="img" aria-label="Two employees working on a DUV product in a clean room at ZEISS SMT" title="DUV technology at ZEISS SMT " data-src="{"xsmall":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.100.56.file/duv-smt-1900er_final.jpg","small":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.360.203.file/duv-smt-1900er_final.jpg","medium":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.768.432.file/duv-smt-1900er_final.jpg","large":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.1024.576.file/duv-smt-1900er_final.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.1280.720.file/duv-smt-1900er_final.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.1440.810.file/duv-smt-1900er_final.jpg","max":"https://www.zeiss.com/content/dam/smt/home/duv-smt-1900er_final.jpg/_jcr_content/renditions/original.image_file.1920.1080.file/duv-smt-1900er_final.jpg"}" class="lazy-background-image lazy-background-image--right lazy-background-image--middle"> </div> <a aria-label="Link to the ZEISS SMT segment's DUV website " class="plain-link grid-and-tiles-tile__link" href="https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/duv-lithography.html" title="Link to the ZEISS SMT segment's DUV website " data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"Resolution and precision for innovation","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/duv-lithography.html","moduleSection":"gridAndTiles-1836959792","moduleType":"Grid Tiles"}"> <div class="grid-and-tiles-tile__text-box"><div class="headline hl-s"> <span data-target-id="headline-3177088"> <span class="headline__eyebrow text--eyebrow">DUV lithography</span> <h3> <span class="headline__main" data-js-select="Headline_main">Resolution and precision for innovation</span> </h3> </span> 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data-src="{"xsmall":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.100.67.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","small":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.360.240.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","medium":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.768.512.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","large":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1024.683.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","xlarge":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1280.853.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","xxlarge":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1440.960.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg","max":"https://www.zeiss.com/content/dam/smt/home/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg/_jcr_content/renditions/original.image_file.1920.1280.file/zeiss-projektionsoptik-fuer-high-na-euv-lithographie.jpg"}" class="lazy-background-image lazy-background-image--right lazy-background-image--middle"> </div> <a aria-label="Link to the website of High-NA-EUV lithography" class="plain-link grid-and-tiles-tile__link" href="https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/high-na-euv-lithography.html" title="Link to the website of High-NA-EUV lithography" data-track-auto="true" data-track-event="{"name":"CTA","type":"Internal","action":"Click","value":"More light for even more details","detail":"https://www.zeiss.com/semiconductor-manufacturing-technology/inspiring-technology/high-na-euv-lithography.html","moduleSection":"gridAndTiles-1836959792","moduleType":"Grid Tiles"}"> <div class="grid-and-tiles-tile__text-box"><div class="headline hl-s headline--inverted"> <span data-target-id="headlineInverted-1442745844"> <span class="headline__eyebrow text--eyebrow">High-NA-EUV Lithography </span> <h3> <span class="headline__main" data-js-select="Headline_main">More light 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title="ZEISS SMT Magazine "/> </div> <div class="lazy-image__active-image-indicator"></div> </figure> </div> </div> </div> <div class="product-item-large__content"> <div class="headline spacing--m hl-l"> <span data-target-id="headline-1193892081"> <span class="headline__eyebrow text--eyebrow">SMT Magazine </span> <h2> <span class="headline__main" data-js-select="Headline_main">Insights into the technology of tomorrow</span> </h2> </span> </div> <div class="product-item-large__text"><div class="text text--body-m"> <p>Our employees often work at the edge of what is physically possible in order to drive digitalization forward. 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