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科学网—上海交大郭益平课题组:用于结构健康监测和机器人感知的超高灵敏度各向异性压电传感器 - 纳微快报的博文

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"/static/js/grey.gif", effect : "fadeIn", threshold : 200 }); }); </script> <div id="ct" class="ct2 wp cl"> <div class="mn"> <div class="bm"> <div class="bm_h cl"> <h1 class="mt"><span class="z">博文</span> </h1> </div> <div class="bm_c"> <div class="vw mbm"> <div class="h pbm"> <h1 class="ph"> 上海交大郭益平课题组:用于结构健康监测和机器人感知的超高灵敏度各向异性压电传感器 <a href="https://blog.sciencenet.cn/blog.php?mod=recommend"><img src="./static/image/blog/recommendico.gif" width="22px" height="22px" /><font style="font-size:14px; color:#930;" face="宋体">精选</font></a> </h1> <p class="xg2"> <span class="xg1">已有 5919 次阅读</span> <span class="xg1">2024-11-27 12:19</span> <span class="pipe">|</span><span class="xg1">系统分类:<a href="https://blog.sciencenet.cn/home.php?mod=space&amp;do=blog&amp;view=all&amp;uid=3411509&amp;catid=11">论文交流</a></span> </p> </div> <div id="blog_article" class="d cl" ><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 24px; font-family: 微软雅黑, "><strong style="box-sizing: border-box;">研究背景</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;">在众多应用场景中,对于可实时全面感知微小机械刺激的柔性传感器需求极为迫切。对各类机械结构进行实时变形监测能够有效预防故障产生,而机器人的精细触觉感知也依赖此类传感器。现有的柔性压电传感器因自身压电系数矩阵的局限性,仅能检测应变大小,无法同时解耦应变方向与大小,因此难以感知各向异性变形。此外,实现微米级变形监测目前仍是柔性压电传感器的一大挑战。鉴于此,上海交通大学材料学院郭益平教授课题组提出了一种利用高灵敏度压电纤维构建矢量传感器的方法。</span></p><p style="text-align: center; margin-top: 5px; margin-bottom: 5px;"><img src="http://image.sciencenet.cn/home/202411/26/134249ya7mayiqmrmrxl99.jpg" title="" alt="1.jpg"/></p><p style="text-align: left; margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 14px;color: #595959;"><span style="font-size: 16px;color: #AB1942;"><strong><span style="font-family: Microsoft YaHei UI;">Ultra-High Sensitivity Anisotropic Piezoelectric Sensors for Structural Health Monitoring and Robotic Perception&nbsp;</span></strong></span></span><span style="font-size: 14px;color: #595959;"></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 15px;color: #595959;"><span style="font-size: 14px; letter-spacing: 0.578px;"></span></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 15px;color: #595959;"><span style="font-size: 14px; letter-spacing: 0.578px;">Hao Yin, Yanting Li, Zhiying Tian, Qichao Li,* Chenhui Jiang, Enfu Liang &amp; Yiping Guo*</span></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><strong><em><span style="font-size: 15px;color: #595959;">Nano-Micro Letters (2025)17: 42</span></em></strong></p><p style="margin-top: 5px; margin-bottom: 5px;"><em><span style="font-size: 15px;color: #595959;"><em><span style="letter-spacing: 0.578px; text-decoration-style: solid; text-decoration-color: #595959;"><a href="https://doi.org/10.1007/s40820-024-01539-6" target="_blank">https://doi.org/10.1007/s40820-024-01539-6</a></span></em></span></em></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 24px; font-family: 微软雅黑, "><strong style="text-align: justify; box-sizing: border-box;">本文亮点</strong></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="text-align: justify; text-indent: 0em; color: #2C4BB0;"><em><strong><span style="letter-spacing: 0.5px;">1. </span></strong></em></span><span style="text-align: justify; text-indent: 0em; font-size: 15px; color: #595959; letter-spacing: 0.5px;">通过在聚合物基体中定向排列压电纤维,设计了一种</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>各向异性</strong></span><span style="text-align: justify; text-indent: 0em; font-size: 15px; color: #595959; letter-spacing: 0.5px;">的压电薄膜传感器,可以精确解耦变形的</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>幅度</strong></span><span style="text-align: justify; text-indent: 0em; font-size: 15px; color: #595959; letter-spacing: 0.5px;">和</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>方向</strong></span><span style="text-align: justify; text-indent: 0em; font-size: 15px; color: #595959; letter-spacing: 0.5px;">。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="text-align: justify; text-indent: 0em; color: #2C4BB0;"><em><strong><span style="letter-spacing: 0.5px;">2.&nbsp;</span></strong></em></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">由于连续纤维的</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>高效载荷传递能力</strong></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">和</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>多孔压电驻极体结构</strong></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">的形成,这种传感器实现了</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>0.06%</strong></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">的超低应变检测限。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="text-align: justify; text-indent: 0em; color: #2C4BB0;"><em><strong><span style="letter-spacing: 0.5px;">3.</span></strong></em></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">&nbsp;鉴于该传感器的双参数变形感知能力和超低检测限,可应用于微米级薄膜结构的</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>变形监测</strong></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">以及机器人的</span><span style="text-align: justify; text-indent: 0em; font-size: 15px; letter-spacing: 0.5px; color: #AB1942;"><strong>纹理识别</strong></span><span style="text-align: justify; text-indent: 0em; color: #595959; font-size: 15px; letter-spacing: 0.5px;">。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 24px; font-family: 微软雅黑, "><strong style="text-align: justify; box-sizing: border-box;">内容简介</strong></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="text-align: justify; font-size: 15px; letter-spacing: 0.5px; text-indent: 0em; color: #AB1942;">上海交通大学郭益平课题组</span><span style="text-align: justify; color: #595959; font-size: 15px; letter-spacing: 0.5px; text-indent: 0em;">设计了一种各向异性的压电薄膜,该薄膜基于定向排列的锆钛酸铅-玻璃纤维复合细丝(PZT-EGF)构建,能够同时识别微米级变形的幅度和方向。研究搭建了一套浸渍装置,采用溶胶-凝胶法连续制备PZT-EGF复合长丝,并实现长丝在指定方向上的取向排列。烧结后,通过聚偏二氟乙烯(<span class="">PVDF</span>)固定细丝的位置,从而在薄膜中实现了沿纤维纵向到径向的各向异性压电系数。该压电薄膜的低检测限主要归因于复合细丝中形成的孔洞,这些孔洞形成了铁电驻极体,与PZT的压电效应相互促进,能够检测到低至0.06%的应变。PZT的连续相提高了载荷传递效率,进一步降低了检测限。相应的传感器可用于脉搏波监测、薄膜变形反演和微纹理识别,具有高分辨率,能够检测到低至5微米高的薄膜皱纹和识别约20微米高的粗糙表面。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 24px; font-family: 微软雅黑, "><strong style="text-align: justify; box-sizing: border-box;">图文导读</strong></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="text-align: justify; color: #595959; font-size: 15px; letter-spacing: 0.5px; text-indent: 0em; line-height: 150%;"><span style="text-indent: 0em; line-height: 150%; font-size: 16px; color: #2C4BB0;"><strong>I</strong></span>&nbsp;</span><span style="text-align: justify; color: #595959; font-size: 15px; letter-spacing: 0.5px; text-indent: 0em; line-height: 150%;"><strong>各向异性压电纤维薄膜的制备与表征</strong></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="color: #595959; font-size: 15px; letter-spacing: 0.5px; text-indent: 0em; text-align: justify;">图1a展示了压电薄膜的制备流程,图1b展示了浸渍PZT前驱体溶液的连续玻璃纤维,总长度超过10米,说明PZT- EGF复合长丝具有工业生产潜力。图1c为PZT纤维的XRD测试结果,表明所制备的PZT为钙钛矿相,无其他杂质。图1d展示了压电薄膜沿着纤维方向拉伸与垂直于纤维方向拉伸的力学性能,可以看到沿着纤维方向拉伸的时模量更高(265 MPa),这是因为当薄膜沿长丝纵向(0°)拉伸时,长丝与基体共同承受外加应力,电输出主要是通过直接压电效应将沿压电长丝分布的机械应力转换而产生的。因此,可以理解压电输出随应变方向的不同而变化。图1e-g显示了各向异性压电薄膜截面与表面的SEM图像,长丝之间存在多个孔径约为5 μm的空隙,极化后形成了压电驻极体,与PZT的压电效应相互促进,提升了压电输出(图1h)。</span></p><p style="text-align: center; margin-top: 5px; margin-bottom: 5px;"><img src="http://image.sciencenet.cn/home/202411/26/134342qvxbeel63ftiqvbe.jpg" title="" alt="2.jpg"/></p><p style="margin: 5px 8px; text-align: center; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;">图1 a 各向异性压电传感器的制备工艺。b 连续浸渍的GFF细丝照片(长度超过10米)。c PZT-GFF复合细丝的XRD图谱。d PZT-GFF复合薄膜在0°和90°方向上的应力-应变曲线。e 各向异性压电薄膜的截面SEM图像。f PZT-GFF复合细丝中存在的孔洞的SEM图像。g 在EGF细丝表面生长的连续PZT相的SEM图像。h 示意图表示孔洞和PZT对压电输出的贡献。</span></p><p style="margin: 5px 8px; text-align: justify; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;"><strong style="color: rgb(44, 75, 176); font-size: 16px;">I<strong>I</strong></strong><span style="color: #595959; font-size: 15px;">&nbsp;</span></span><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;"><strong style="color: rgb(89, 89, 89); font-size: 15px;">单层压电薄膜的电输出性能</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;text-indent: 0em;"></span><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;text-indent: 0em;">图2a展示了对矢量传感器施加不同大小与不同大小应变的测试方法。图3b-c为矢量传感器在不同弯曲角度(0°、30°、60°、90°)和应变(0.06% ~ 1.11%)下的电压输出结果,表明电输出随着弯曲角度增大而减小,随着应变增大而增大。如图2d所示,我们将器件贴在薄膜上用于监测微小的变形(5 μm~20 μm)。图2e-j表明压电传感器可以精确感知不同大小与不同频率的薄膜变形。</span></p><p style="text-align: center; margin-top: 5px; margin-bottom: 5px;"><img src="http://image.sciencenet.cn/home/202411/26/134357yxpmngxdnaaaalax.jpg" title="" alt="3.jpg"/></p><p style="margin: 5px 8px; text-align: center; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;">图2 单层矢量传感器的表征。a 矢量设备微变形测试的示意图。b 在不同弯曲角度下,0.34%应变条件下矢量传感器输出电压的实验结果。c 在不同应变和弯曲角度下,矢量传感器输出电压的实验结果。d 线性电机驱动薄膜微突起的示意图。e 不同幅度的薄膜微突起和g 不同频率通过扫描激光振动计检测的结果。f 不同微突起幅度和i 不同频率的实时输出电压。h 从g中通过FFT生成的频谱。j 从i中通过FFT生成的频谱。</span></p><p style="margin: 5px 8px; text-align: justify; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;"><strong style="color: rgb(44, 75, 176); font-size: 16px;">I<strong>I<strong>I</strong></strong></strong><span style="color: #595959; font-size: 15px;">&nbsp;</span><strong style="color: rgb(89, 89, 89); font-size: 15px;">双层压电薄膜用于应变大小与方向的精确解耦</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;text-indent: 0em;">我们将两层传感器正交堆叠用于精确解耦形变的大小与方向。图3a展示了双层器件的结构,图3b-c展示了底层和顶层传感器的电压输出信号,两者随着弯曲角度变化呈现相反的趋势。图3d-g展示了传感器的解耦方式与该方法的通用性,根据上下层压电器件的输出在图3b-c中找到对应的弯曲角度与应变,两条线的交点就是对器件施加的精确的弯曲角度与应变大小,解耦结果与实际情况一致。图3h-i展示了将器件贴在薄膜上感知各向异性长条形变形的输出结果,表明其可以同时感知应变的大小和弯曲角度。&nbsp;</span></p><p style="text-align: center; margin-top: 5px; margin-bottom: 5px;"><img src="http://image.sciencenet.cn/home/202411/26/134410vkznjjm9jlpg00sx.jpg" title="" alt="4.jpg"/></p><p style="margin: 5px 8px; text-align: center; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;">图3 双层矢量传感器的表征。a 双层矢量传感器的示意图。b 底层传感器的输出电压拟合结果,c 顶层传感器的输出电压拟合结果,基于实验结果。d 双层矢量传感器在应变0.17%应变,弯曲角度45°时的输出电压。e 从d中输出电压解耦得到的弯曲角度和应变。f 双层矢量传感器在应变0.21%,弯曲角度70°时的输出电压。g 从f中输出电压解耦得到的弯曲角度和应变。h 0度长条形、i 45度长条形皱纹的示意图,以及双层矢量传感器的相应输出响应。</span></p><p style="margin: 5px 8px; text-align: justify; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;"><strong style="text-wrap-style: initial;color: rgb(44, 75, 176);font-size: 16px;">I<strong>V</strong></strong><span style="color: #595959;font-size: 15px;text-wrap-style: initial;">&nbsp;</span><strong style="color: rgb(89, 89, 89);font-size: 15px;text-wrap-style: initial;">矢量传感器用于纹理识别</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;text-indent: 0em;">本文研究的矢量传感器具有高灵敏度和方向感知能力,可以识别纹理信息的多个维度,包括粗糙度和方向。图4a展示了识别机理。矢量传感器被固定在可移动的框架上,PET尖端被固定在器件上模拟人体指纹,以捕捉接触过程中的振动刺激。不同取向与不同凹凸程度的纹理会通过尖端对传感器施加不同大小与方向的力,因而产生不同大小的输出。图4b展示了对不同粗糙度的砂纸产生的电输出响应。图4c-d是是器件对不同取向的纹理产生的电输出响应。图4e-f是对以不同的速度滑过织物产生的电输出证明了电输出的可重复性和一致性。我们已经成功地将机器学习与矢量传感器结合使用,以区分十种不同的纹理,包括具有微米级粗糙度的砂纸,纤维织物和具有不同延伸方向的纹理。使用不同的模型实现了对10种表面纹理100%的识别率。</span></p><p style="text-align: center; margin-top: 5px; margin-bottom: 5px;"><img src="http://image.sciencenet.cn/home/202411/26/134425orte9ec1fhe1s1fw.jpg" title="" alt="5.jpg"/></p><p style="margin: 5px 8px; text-align: center; line-height: normal;"><span style="text-wrap: wrap; color: #888888; font-size: 14px; letter-spacing: 0.5px;">图4 a 基于矢量传感器的感知系统示意图。b 矢量传感器在不同粗糙度纹理上产生的信号。c 矢量传感器在十字纹上滑动时的输出信号,d 在对角线纹上滑动时的输出信号。e 光学显微镜下(×20)放大后的织物图像。c 和 d 中插图分别说明了竖纹和斜纹的感知机制。f 在不同滑动速度(3、5、7 mm/s)下传感器在织物上滑动时的输出信号。g 用于感知的纹理光学图像及相应编号。h 这些纹理的输出信号。i 神经网络模型示意图。j 通过感知系统识别10种不同纹理的混淆矩阵。k 不同算法的准确性和计算时间对比。</span><span style="font-size: var(--articleFontsize);letter-spacing: 0.034em;"></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="letter-spacing: 0.5px;text-indent: 0em;line-height: 150%;"><span style="color:#2c4bb0;"><strong>V</strong></span><span style="color: #595959; font-size: 15px;">&nbsp;</span><strong style="color: rgb(89, 89, 89); font-size: 15px;">总结</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><span style="color: #595959;font-size: 15px;letter-spacing: 0.5px;text-indent: 0em;">通过创新性结构设计,在压电薄膜中实现了各向异性的压电系数,能够同时感知细微变形的大小和方向。通过在压电纤维中构建孔洞并形成压电驻极体,提高了输出,实现了对0.06%微小应变的感知。此外,本研究开发了一套设备,实现了压电纤维的连续制备,展现了工业化生产的潜力。这种高灵敏度、低检测阈值的传感器,能够巧妙识别方向性应力,有望在结构健康监测和智能机器人领域带来革命性变化,推动工业技术进步。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 24px; font-family: 微软雅黑, "><strong style="letter-spacing: 0.578px; box-sizing: border-box;">作者简介</strong></span></p><p style="text-wrap: wrap; margin: 5px 8px; padding: 0px; box-sizing: border-box; line-height: 1.5em; text-align: justify;"><img src="http://image.sciencenet.cn/home/202411/26/134456csj7z7zy6zijv338.jpg" title="" alt="640.jpg"/></p><p style="margin-top: 5px; margin-bottom: 5px;"><strong style="text-decoration-line: initial;"><span style="font-family: ">郭益平</span></strong></p><p style="line-height: 1.5em; margin-top: 5px; margin-bottom: 5px;"><span style="font-size: 15px;color: #595959;">本文通讯作者</span><span style="font-size: 15px;"><strong style="color: rgb(89, 89, 89);font-family: "></strong></span></p><p style="margin-top: 5px; margin-bottom: 5px;"><strong style="color: rgb(89, 89, 89);font-family: ">上海交通大学&nbsp;教授</strong></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="letter-spacing: 1px;color: #021EAA;">▍</span><strong style="color: rgb(89, 89, 89);font-family: "><strong>主要研究</strong>领域</strong></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="color: #595959;font-family: "><span style="color: #3E3E3E; font-family: ">电子功</span><span style="color: #3E3E3E; font-family: ">能陶瓷材料和能源及催化材料</span><span style="color: #3E3E3E; font-family: ">的研究</span>。</span></p><p style="margin-top: 5px; margin-bottom: 5px;"><span style="color: #595959;font-family: "></span></p><p style="margin-top: 5px; margin-bottom: 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