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PerfectShapes | RAITH

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s-headertitlecard"> <div class="section-background-overlay"></div> <div class="section-container"><div class="bde-div-6571-120 bde-div header-titlecard"> <div class="bde-div-6571-121 bde-div header-titlecard__content"> <div class="bde-div-6571-132 bde-div"> <div class="bde-div-6571-122 bde-div"> <h1 class="bde-heading-6571-123 bde-heading"> Perfect </h1><div class="bde-icon-6571-124 bde-icon tile-technonogy__icon"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="22" height="22" viewBox="0 0 22 22"><polygon points="22 9.98 12.02 9.98 12.02 0 9.98 0 9.98 9.98 0 9.98 0 12.02 9.98 12.02 9.98 22 12.02 22 12.02 12.02 22 12.02 22 9.98" stroke-width="0"/></svg> </div> </div> </div><h2 class="bde-heading-6571-131 bde-heading"> Shapes </h2> </div><div class="bde-text-6571-125 bde-text excerpt"> <p>Introduction PerfectShapes technology is an innovative design fracturing method for challenging design elements such as cubes/rectangles under an angle, circles, ellipses, etc. It revolutionizes achievable pattern fidelity and line edge roughness (LER) [&hellip;]</p> </div> </div> </div></div> </section><div class="bde-globalblock-6571-130 bde-globalblock"> <div class='breakdance'><section class="bde-section-6743-100-6743-1 bde-section s-breadcrumb bde-section-6743-100"> <div class="section-container"><nav class="bde-div-6743-174-6743-1 bde-div breadcrumb bde-div-6743-174"> <a class="bde-text-link-6743-175-6743-1 bde-text-link bde-text-link-6743-175 breakdance-link" href="https://raith.com/" target="_self" data-type="url"> RAITH </a><div class="bde-icon-6743-205-6743-1 bde-icon bc-sep bde-icon-6743-205"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><!-- Font Awesome Free 5.15.1 by @fontawesome - https://fontawesome.com License - https://fontawesome.com/license/free (Icons: CC BY 4.0, Fonts: SIL OFL 1.1, Code: MIT License) --><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-177-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-177"> Technologies </div><div class="bde-icon-6743-206-6743-1 bde-icon bc-sep bde-icon-6743-206"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" viewBox="0 0 320 512"><!-- Font Awesome Free 5.15.1 by @fontawesome - https://fontawesome.com License - https://fontawesome.com/license/free (Icons: CC BY 4.0, Fonts: SIL OFL 1.1, Code: MIT License) --><path d="M285.476 272.971L91.132 467.314c-9.373 9.373-24.569 9.373-33.941 0l-22.667-22.667c-9.357-9.357-9.375-24.522-.04-33.901L188.505 256 34.484 101.255c-9.335-9.379-9.317-24.544.04-33.901l22.667-22.667c9.373-9.373 24.569-9.373 33.941 0L285.475 239.03c9.373 9.372 9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-179-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-179"> PerfectShapes </div> </nav></div> </section></div> </div><main class="bde-themeless-template-content-area-6571-107 bde-themeless-template-content-area"> <div class='breakdance'><section id="introduction" class="bde-section-9148-100 bde-section s-introduction"> <div class="section-container"><div class="bde-columns-9148-101 bde-columns columns-25-75"><div class="bde-column-9148-102 bde-column column-25"> <div class="bde-text-9148-103 bde-text TxColorGray"> Introduction </div> </div><div class="bde-column-9148-104 bde-column columns-75"> <div class="bde-text-9148-105 bde-text"> PerfectShapes technology is an innovative design fracturing method for challenging design elements such as cubes/rectangles under an angle, circles, ellipses, etc. It revolutionizes achievable pattern fidelity and line edge roughness (LER) to meet highest demands. </div> </div></div></div> </section><section class="bde-section-9148-112 bde-section s-accordioncolumnlocations"> <div class="section-container"><div class="bde-text-9148-113 bde-text"> A new approach to overcoming existing limitations of the conventional way of fracturing algorithms using trapezoids </div><div class="bde-columns-9148-114 bde-columns columns-25-75"><div class="bde-column-9148-115 bde-column column-25"> <h2 class="bde-heading-9148-205 bde-heading TxColorGray"> Key features </h2> </div><div class="bde-column-9148-117 bde-column column-75"> <div class="bde-accordion-9148-118 bde-accordion adv-accordion-large-title"><div class="bde-accordion__content-wrapper-9148-119 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-119" aria-controls="accordion-panel-119" aria-expanded="false"> <span class="bde-accordion__title" >Algorithmic/mathematical geometric shape description</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-119" aria-labelledby="accordion-button-119" hidden> <div class="bde-text-9148-120 bde-text"> A shape is defined by the smallest geometrical design element that is NOT fractured any further. This means that a shape is treated as one single exposure element. Various shape geometries are available, including rectangles, circles, ellipses, and more. They are described by a mathematical algorithm and are exposed in specific shape filling modes. </div> </div> </div><div class="bde-accordion__content-wrapper-9148-121 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-121" aria-controls="accordion-panel-121" aria-expanded="false"> <span class="bde-accordion__title" >Arbitrary/individual beam shot placement control for customized shapes</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-121" aria-labelledby="accordion-button-121" hidden> <div class="bde-text-9148-122 bde-text"> In addition to using the standard shape filling modes, users can individually define their own exposure strategy by defining a beam shot placement sequence pixel-by-pixel in a fully arbitrary way. Customized shapes can thus be created in accordance with individual design geometries or other specific requirements regarding exposure sequences/strategies. </div> </div> </div><div class="bde-accordion__content-wrapper-9148-206 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-206" aria-controls="accordion-panel-206" aria-expanded="false"> <span class="bde-accordion__title" >Compatibility with data prep software</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-206" aria-labelledby="accordion-button-206" hidden> <div class="bde-text-9148-207 bde-text"> The most common shapes can also be detected, handled, and processed in third-party data prep software. This means users can rely on the advantages of professional data preparation without sacrificing the advantages offered by PerfectShapes. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-9148-123 bde-section s-benfits3col"> <div class="section-container"><div class="bde-text-9148-124 bde-text txColorDarkGray smallTextIndentation"> Benefits for applications </div><h2 class="bde-heading-9148-125 bde-heading"> Meeting the toughest nanofabrication demands for challenging design geometries </h2><div class="bde-columns-9148-126 bde-columns"><div class="bde-column-9148-127 bde-column"> <div class="bde-grid-9148-128 bde-grid"> <div class="bde-div-9148-129 bde-div tile-minimal"> <div class="bde-div-9148-130 bde-div tile-minimal__inner"> <h3 class="bde-heading-9148-131 bde-heading"> Highest pattern fidelity </h3><div class="bde-text-9148-132 bde-text"> Using the available specific shape filling modes, the beam shots can be perfectly and smoothly aligned to the outline/envelope/sleeves of a specific geometric design element. This obviously results in perfect pattern fidelity.<br> </div> </div> </div><div class="bde-div-9148-133 bde-div tile-minimal"> <div class="bde-div-9148-134 bde-div tile-minimal__inner"> <h3 class="bde-heading-9148-135 bde-heading"> Reduced LER </h3><div class="bde-text-9148-136 bde-text"> As in the previous point, the use of shapes with sequential beam shot placement that is perfectly aligned along the geometric contour of the design element avoids kinks or regions of under- or overexposure due to missing or overlapping beam shots. Line edge roughness can hence be significantly optimized as compared to conventional fracturing. </div> </div> </div><div class="bde-div-9148-137 bde-div tile-minimal"> <div class="bde-div-9148-138 bde-div tile-minimal__inner"> <h3 class="bde-heading-9148-139 bde-heading"> Throughput enhancement </h3><div class="bde-text-9148-140 bde-text"> As a geometric design element such as an ellipse or a circle is NOT fractured any further using the conventional method of fracturing into trapezoids, the number of individual elements that need to be fractured, sequentially transmitted to the pattern generator, calculated regarding beam shot placement, etc. is significantly reduced. This results in a fraction of the total amount of data, as compared to the conventional method of data handling in preparation for the exposure process. </div> </div> </div> </div> </div></div></div> </section><section class="bde-section-9148-145 bde-section s-technologyexplanation"> <div class="section-container"><div class="bde-text-9148-146 bde-text TxColorGray"> How it works </div><h2 class="bde-heading-9148-147 bde-heading"> Shapes for lean exposure data handling and optimum results </h2><div class="bde-columns-9148-148 bde-columns"><div class="bde-column-9148-149 bde-column"> <h3 class="bde-heading-9148-150 bde-heading"> Fracturing </h3><div class="bde-rich-text-9148-151 bde-rich-text breakdance-rich-text-styles"> <p>As a long existing standard, the conventional fracturing of CAD design files for electron beam lithography exposures has been developed and optimized for perpendicularly arranged “Manhattan style” designs. However, given the increasing relevance of highest pattern fidelity with regard to optimum nanodevice performance, this standard method has significant limitations for other pattern design element geometries such as circles, ellipses, rectangles arranged under an angle, etc. RAITH’s revolutionary PerfectShapes technology is based on a design-specific fracturing algorithm and patterning strategy that best approximates the geometrical outline of the individual design element (“shape”).</p> <p>A shape, in the definition of the smallest geometrical design element that is NOT fractured any further, is mathematically defined by various parameters, e.g., origin, offset, center, radius, angle, long axis, short axis, or other, depending on the specific shape of the geometry of the related design element. For the exposure, a specific shape filling mode can be selected to enable the contour of the shape to be perfectly aligned to the geometry of the design element, regardless of its position or orientation in the overall design. Hence, fracturing and beam shot placement are significantly optimized with regard to pattern fidelity, line edge roughness, and amount of data to be processed.</p> </div> </div><div class="bde-column-9148-152 bde-column"> <div class="bde-grid-9148-154 bde-grid"> <div class="bde-div-9148-163 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-164 bde-image"> <figure class="breakdance-image breakdance-image--16370"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20441%20271'%3E%3C/svg%3E" width="441" height="271" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/conventional-fracturing.jpg 441w, https://raith.com/wp-content/uploads/2024/11/conventional-fracturing-300x184.jpg 300w" data-lazy-sizes="(max-width: 441px) 100vw, 441px" alt="Illustration showing traditional EBL fracturing" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/conventional-fracturing.jpg"><noscript><img fetchpriority="high" decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/conventional-fracturing.jpg" width="441" height="271" srcset="https://raith.com/wp-content/uploads/2024/11/conventional-fracturing.jpg 441w, https://raith.com/wp-content/uploads/2024/11/conventional-fracturing-300x184.jpg 300w" sizes="(max-width: 441px) 100vw, 441px" alt="Illustration showing traditional EBL fracturing"></noscript></div> </div></figure> </div><div class="bde-text-9148-166 bde-text"> conventional (trapezoidal) fracturing </div> </div><div class="bde-div-9148-167 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-168 bde-image"> <figure class="breakdance-image breakdance-image--16371"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20441%20271'%3E%3C/svg%3E" width="441" height="271" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes.jpg 441w, https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes-300x184.jpg 300w" data-lazy-sizes="(max-width: 441px) 100vw, 441px" alt="Beam shot placement with PerfectShapes" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes.jpg" width="441" height="271" srcset="https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes.jpg 441w, https://raith.com/wp-content/uploads/2024/11/beam-shot-placement_PerfectShapes-300x184.jpg 300w" sizes="(max-width: 441px) 100vw, 441px" alt="Beam shot placement with PerfectShapes"></noscript></div> </div></figure> </div><div class="bde-div-9148-169 bde-div tile-usecase__content"> <div class="bde-text-9148-170 bde-text"> beam shot placement with PerfectShapes </div> </div> </div> </div> </div></div><div class="bde-columns-9148-208 bde-columns"><div class="bde-column-9148-209 bde-column"> <h3 class="bde-heading-9148-210 bde-heading"> Data volume and data processing: </h3><div class="bde-rich-text-9148-211 bde-rich-text breakdance-rich-text-styles"> <p>The number of fractured elements can be significantly reduced due to the new shape-based fracturing algorithm. Depending on the design and number of elements, PerfectShapes helps to reduce data volume, resulting in far less process overhead time, but simultaneously increases pattern fidelity and line edge roughness.</p> </div> </div><div class="bde-column-9148-212 bde-column"> <div class="bde-div-9148-214 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-254 bde-image"> <figure class="breakdance-image breakdance-image--16358"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201009%20315'%3E%3C/svg%3E" width="1009" height="315" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods.png 1009w, https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods-300x94.png 300w, https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods-768x240.png 768w" data-lazy-sizes="(max-width: 1009px) 100vw, 1009px" alt="comparison of EBL fracturing methods" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods.png"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods.png" width="1009" height="315" srcset="https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods.png 1009w, https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods-300x94.png 300w, https://raith.com/wp-content/uploads/2024/11/comparison-fracturing-methods-768x240.png 768w" sizes="(max-width: 1009px) 100vw, 1009px" alt="comparison of EBL fracturing methods"></noscript></div> </div></figure> </div><div class="bde-text-9148-216 bde-text"> Comparison of conventional (left) and PerfectShapes (right) fracturing technology, resulting in 7 times more fractured elements in the traditional method. </div> </div><div class="bde-div-9148-269 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-270 bde-image"> <figure class="breakdance-image breakdance-image--16359"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20676%20302'%3E%3C/svg%3E" width="676" height="302" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing.jpg 676w, https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing-300x134.jpg 300w" data-lazy-sizes="(max-width: 676px) 100vw, 676px" alt="circle fracturing in EBL with different methods" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing.jpg" width="676" height="302" srcset="https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing.jpg 676w, https://raith.com/wp-content/uploads/2024/11/circle-EBL-fracturing-300x134.jpg 300w" sizes="(max-width: 676px) 100vw, 676px" alt="circle fracturing in EBL with different methods"></noscript></div> </div></figure> </div><div class="bde-text-9148-271 bde-text"> The effect is even more extreme when applied to circles </div> </div> </div></div><div class="bde-columns-9148-221 bde-columns"><div class="bde-column-9148-222 bde-column"> <h3 class="bde-heading-9148-223 bde-heading"> Shape types and derivatives </h3><div class="bde-rich-text-9148-224 bde-rich-text breakdance-rich-text-styles"> <p>Circles, ellipses, and cubes (rectangles) are among the most challenging design element types. With PerfectShape, there is no need to fracture these into many small trapezoids, which are the sole shape types available in the conventional process. Given that all these geometrical design elements representing a shape are based on mathematical definitions with various parameters such as offset, center coordinate, inner/outer radius, or start/end angle, many sub-shapes or shape derivatives can be designed.</p> </div> </div><div class="bde-column-9148-225 bde-column"> <div class="bde-div-9148-226 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-268 bde-image"> <figure class="breakdance-image breakdance-image--16357"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20539%20276'%3E%3C/svg%3E" width="539" height="276" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples.jpg 539w, https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples-300x154.jpg 300w" data-lazy-sizes="(max-width: 539px) 100vw, 539px" alt="Exampleas of possible shapes with PerfectShapes" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples.jpg" width="539" height="276" srcset="https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples.jpg 539w, https://raith.com/wp-content/uploads/2024/11/PerfectShapes_Shapes-examples-300x154.jpg 300w" sizes="(max-width: 539px) 100vw, 539px" alt="Exampleas of possible shapes with PerfectShapes"></noscript></div> </div></figure> </div> </div> </div></div><div class="bde-columns-9148-249 bde-columns"><div class="bde-column-9148-250 bde-column"> <h3 class="bde-heading-9148-251 bde-heading"> Use case </h3><div class="bde-rich-text-9148-252 bde-rich-text breakdance-rich-text-styles"> <p>PerfectShapes enables not only complex structures such as those shown above to be created simply by using a single shape derivative, but also an arc, a ring, or a combination of both as a derivative shape of the “circle” shape type. Both of the latter shape derivatives feature prominently in state-of-the-art photonic devicesand certainly have practical relevance.</p> <p>Circles in photonic crystals can be exposed as perfectly round forms using the circle shape with smooth circular shape filling mode. Using the “ring arc” circle shape derivative, a 180-degree waveguide bend exhibits far lower line edge roughness, as can clearly be seen in a comparison of classical fracturing and PerfectShapes technology.</p> <p> </p> </div> </div><div class="bde-column-9148-253 bde-column"> <div class="bde-grid-9148-256 bde-grid"> <div class="bde-div-9148-257 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-258 bde-image"> <figure class="breakdance-image breakdance-image--16360"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20284%20237'%3E%3C/svg%3E" width="284" height="237" data-lazy-sizes="(max-width: 284px) 100vw, 284px" alt="photonic crystal fracturing traditional" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing.jpg" width="284" height="237" sizes="(max-width: 284px) 100vw, 284px" alt="photonic crystal fracturing traditional"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-261 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-280 bde-image"> <figure class="breakdance-image breakdance-image--16361"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20331%20251'%3E%3C/svg%3E" width="331" height="251" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes.jpg 331w, https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes-300x227.jpg 300w" data-lazy-sizes="(max-width: 331px) 100vw, 331px" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes.jpg" width="331" height="251" srcset="https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes.jpg 331w, https://raith.com/wp-content/uploads/2024/11/arc-EBL-fracturing_PerfectShapes-300x227.jpg 300w" sizes="(max-width: 331px) 100vw, 331px"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-272 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-273 bde-image"> <figure class="breakdance-image breakdance-image--16362"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20964%201141'%3E%3C/svg%3E" width="964" height="1141" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing.jpg 964w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-253x300.jpg 253w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-865x1024.jpg 865w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-768x909.jpg 768w" data-lazy-sizes="(max-width: 964px) 100vw, 964px" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing.jpg" width="964" height="1141" srcset="https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing.jpg 964w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-253x300.jpg 253w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-865x1024.jpg 865w, https://raith.com/wp-content/uploads/2024/11/Waveguide-tradional-fracturing-768x909.jpg 768w" sizes="(max-width: 964px) 100vw, 964px"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-276 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-277 bde-image"> <figure class="breakdance-image breakdance-image--16363"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201066%201133'%3E%3C/svg%3E" width="1066" height="1133" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing.jpg 1066w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-282x300.jpg 282w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-963x1024.jpg 963w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-768x816.jpg 768w" data-lazy-sizes="(max-width: 1066px) 100vw, 1066px" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing.jpg" width="1066" height="1133" srcset="https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing.jpg 1066w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-282x300.jpg 282w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-963x1024.jpg 963w, https://raith.com/wp-content/uploads/2024/11/waveguide_PerfectShapes-fracturing-768x816.jpg 768w" sizes="(max-width: 1066px) 100vw, 1066px"></noscript></div> </div></figure> </div> </div> </div><div class="bde-grid-9148-281 bde-grid"> <div class="bde-text-9148-293 bde-text"> The exposure result on the right shows far smoother waveguide sidewalls. </div> </div> </div></div><div class="bde-columns-9148-294 bde-columns"><div class="bde-column-9148-295 bde-column"> <div class="bde-rich-text-9148-297 bde-rich-text breakdance-rich-text-styles"> <p>Metalenses, consisting of hundreds of millions of unique individually arranged “nanofins,” are extremely challenging with respect to pattern fidelity and process time overhead, mainly due to the data handling architecture and related computational power required. PerfectShapes technology allows for lean data preparation without the need to create corresponding flat GDSII design data files that may sometimes explode to several hundred GB or even TB. Efficient algorithms enable fast exposures to be performed with minimum overhead and optimum pattern fidelity, as can be seen in a zoom of a metalens shown below. Each nanofin is exposed in the same way, with beam shots aligned to the contour of the rectangle, regardless of its orientation (angle).</p> </div> </div><div class="bde-column-9148-298 bde-column"> <div class="bde-grid-9148-299 bde-grid"> <div class="bde-div-9148-300 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-301 bde-image"> <figure class="breakdance-image breakdance-image--16364"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20469%20257'%3E%3C/svg%3E" width="469" height="257" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/11/metalens-creation.jpg 469w, https://raith.com/wp-content/uploads/2024/11/metalens-creation-300x164.jpg 300w" data-lazy-sizes="(max-width: 469px) 100vw, 469px" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/metalens-creation.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/metalens-creation.jpg" width="469" height="257" srcset="https://raith.com/wp-content/uploads/2024/11/metalens-creation.jpg 469w, https://raith.com/wp-content/uploads/2024/11/metalens-creation-300x164.jpg 300w" sizes="(max-width: 469px) 100vw, 469px"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-302 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-303 bde-image"> <figure class="breakdance-image breakdance-image--16365"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20280%20194'%3E%3C/svg%3E" width="280" height="194" data-lazy-sizes="(max-width: 280px) 100vw, 280px" alt="creation of a metalens" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/metalens-creation-2.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/metalens-creation-2.jpg" width="280" height="194" sizes="(max-width: 280px) 100vw, 280px" alt="creation of a metalens"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-304 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-305 bde-image"> <figure class="breakdance-image breakdance-image--9510"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201024%20710'%3E%3C/svg%3E" width="1024" height="710" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure.png 1024w, https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure-300x208.png 300w, https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure-768x533.png 768w" data-lazy-sizes="(max-width: 1024px) 100vw, 1024px" alt="Metalens structure using efficient formula based patterning" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure.png"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure.png" width="1024" height="710" srcset="https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure.png 1024w, https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure-300x208.png 300w, https://raith.com/wp-content/uploads/2024/06/raith-voyager-application-metalens_structure-768x533.png 768w" sizes="(max-width: 1024px) 100vw, 1024px" alt="Metalens structure using efficient formula based patterning"></noscript></div> </div></figure> </div> </div><div class="bde-div-9148-306 bde-div tile-usecase tile-usecase--mbottom50"> <div class="bde-image-9148-307 bde-image"> <figure class="breakdance-image breakdance-image--16366"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img decoding="async" class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20292%20261'%3E%3C/svg%3E" width="292" height="261" data-lazy-sizes="(max-width: 292px) 100vw, 292px" alt="zoom in on a metalens" data-lazy-src="https://raith.com/wp-content/uploads/2024/11/metalens-zoom.jpg"><noscript><img decoding="async" class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/11/metalens-zoom.jpg" width="292" height="261" sizes="(max-width: 292px) 100vw, 292px" alt="zoom in on a metalens"></noscript></div> </div></figure> </div> </div> </div><div class="bde-grid-9148-308 bde-grid"> <div class="bde-text-9148-309 bde-text"> The exposure result on the right shows far smoother waveguide sidewalls. </div> </div> </div></div></div> </section></div> </main><div class="bde-globalblock-6571-117 bde-globalblock"> <div class='breakdance'><section class="bde-section-6647-116-6647-1 bde-section s-raithsystems bde-section-6647-116"> <div class="section-container"><div class="bde-post-loop-6647-121-6647-1 bde-post-loop bde-post-loop-6647-121"> <div class="ee-posts ee-posts-grid"> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-9039-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/ebpg/" target="_self" data-type="url"> <div class="bde-image-6596-101-9039-6596-1 bde-image bde-image-6596-101"> <figure class="breakdance-image breakdance-image--12834"> <div class="breakdance-image-container"> <div 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EBPG </div><div class="bde-text-6596-104-9039-6596-1 bde-text content-width-95 bde-text-6596-104"> Highest throughput, automation, and precision </div> </div> </a></div> </article> <article class="ee-post"> <div class='breakdance'><a class="bde-container-link-6596-100-9016-6596-1 bde-container-link s-raithsystems__item s-raithsystems__item--dark bde-container-link-6596-100 breakdance-link" href="https://raith.com/products/voyager/" target="_self" data-type="url"> <div class="bde-image-6596-101-9016-6596-1 bde-image bde-image-6596-101"> <figure class="breakdance-image breakdance-image--12211"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20768%20670'%3E%3C/svg%3E" width="768" height="670" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-voyager-scaled.jpg 2800w, 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