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The HL-LHC (High-Luminosity LHC) is foreseen to start operation approximately in the year 2024. The peak instantaneous luminosity will be increased by a factor of five compared to the design specification of the LHC. The increased track density requires a finer segmentation of the detectors employed to investigate the particle collisions. Over the projected lifetime of the HL-LHC, the tracking detectors will have to withstand a five to ten times higher radiation dose than that at the LHC. In silicon detectors, radiation damage increases the leakage current, the effective doping concentration and the charge carrier trapping probability. These effects lead to a decrease of the signal-to-noise ratio after high radiation fluences. As the silicon detectors currently installed in the LHC experiments are not expected to be sufficiently radiation tolerant for the HL-LHC, novel detector technologies are under study. In the current ATLAS detector at the LHC, planar n-in-n silicon pixel detectors and planar p-in-n silicon strip detectors are used. For the ATLAS upgrade, planar silicon n-in-p detectors are foreseen for the region to be equipped with strip detectors. In the inner pixel layer, which is closest to the interaction point, the detectors will have to withstand an unprecedentedly high radiation fluence of 2x10^16 n_eq/cm^2 (1 MeV neutron equivalent particles per square centimetre). An option for extremely radiation hard detectors are 3D detectors with columnar electrodes etched into the substrate perpendicular to the surface. In contrast to traditional planar detectors, where the electrodes are limited to the detector surface, the electrodes of 3D detectors extend into the third dimension, i.e. into the detector depth. In 3D detectors, the distance for drift of generated charge carriers and for depletion is given by the spacing between columnar electrodes of opposite doping types rather than by the detector thickness as in planar detectors. Therefore, enhanced radiation hardness is expected due to reduced trapping and a reduced depletion voltage, while the total ionised charge is determined by the substrate thickness. As a simplification of the original 3D detector design, double-sided 3D detectors have been developed. The electrodes pass through the substrate only partially, which increases the mechanical stability and simplifies the fabrication technology. In this thesis, the performance of double-sided 3D detectors is investigated in detail for the first time. The measurements were performed with strip detectors: on one side of the sensors, the columnar electrodes are connected to 4-8 mm long strips. The response of the detectors to high-energy pions, electrons emitted by a beta source and an infrared laser is studied. Special emphasis is put on signal measurements as a function of the particle's point of incidence. Also, detailed noise measurements were conducted. In order to investigate the radiation hardness of the detectors, they were irradiated with protons up to fluences that are expected for the HL-LHC inner pixel layers. The measurements were performed before any radiation-induced modification of the detector properties and after irradiation to different fluences. The dependence of the detector performance on the radiation fluence was measured separately with 3D detectors in n-in-p and in p-in-n layout. A comparison of the radiation hardness of the two designs is presented. Furthermore, the radiation hardness of planar n-in-p detectors is studied and compared to double-sided 3D detectors. A focus of this thesis is the investigation of charge multiplication effects, which can occur in the presence of high electric fields and which enhances the measured signal. While multiplication of the liberated charge carriers does not occur in conventional silicon tracking detectors before any radiation-induced modification of the detectors, it was recently observed in highly irradiated detectors. The high electric fields present in 3D detectors lead to an enhanced charge multiplication probability. Implications of charge multiplication on the detectors' signal and noise are studied. Köhler, Michael" /> <meta name="keywords" content="CERN Document Server, WebSearch, RD50 Papers" /> <script type="text/javascript" src="https://cds.cern.ch/js/jquery.min.js"></script>  <link rel="stylesheet" href="https://cds.cern.ch/img/webnews.css" type="text/css" />  <script type="text/javascript" src="https://cds.cern.ch/js/webnews.js?v=20131009"></script> <meta property="fb:app_id" content="137353533001720"/>  <meta content="submitter : Double-sided 3D silicon detectors for the high-luminosity LHC" name="citation_title" /> <meta content="Köhler, Michael" name="citation_author" /> <meta content="urn:nbn:de:bsz:25-opus-82734" name="citation_doi" /> <meta name="citation_online_date" content="2018/08/25"> <meta content="urn:nbn:de:bsz:25-opus-82734" name="citation_doi" /> <meta content="Freiburg U." name="citation_dissertation_institution" /> <meta name="citation_pdf_url" content="https://cds.cern.ch/record/2636106/files/fulltext.pdf" />  <meta content="submitter" property="og:title" /> <meta content="Double-sided 3D silicon detectors for the high-luminosity LHC" property="og:title" /> <meta content="website" property="og:type" /> <meta content="https://cds.cern.ch/record/2636106" property="og:url" /> <meta content="CERN Document Server" property="og:site_name" /> <meta content="submitter" property="og:description" /> <meta content="To extend the physics potential of the Large Hadron Collider (LHC) at CERN, the European Organization for Nuclear Research, a luminosity upgrade is planned. The HL-LHC (High-Luminosity LHC) is foreseen to start operation approximately in the year 2024. The peak instantaneous luminosity will be increased by a factor of five compared to the design specification of the LHC. The increased track density requires a finer segmentation of the detectors employed to investigate the particle collisions. Over the projected lifetime of the HL-LHC, the tracking detectors will have to withstand a five to ten times higher radiation dose than that at the LHC. In silicon detectors, radiation damage increases the leakage current, the effective doping concentration and the charge carrier trapping probability. These effects lead to a decrease of the signal-to-noise ratio after high radiation fluences. As the silicon detectors currently installed in the LHC experiments are not expected to be sufficiently radiation tolerant for the HL-LHC, novel detector technologies are under study. In the current ATLAS detector at the LHC, planar n-in-n silicon pixel detectors and planar p-in-n silicon strip detectors are used. For the ATLAS upgrade, planar silicon n-in-p detectors are foreseen for the region to be equipped with strip detectors. In the inner pixel layer, which is closest to the interaction point, the detectors will have to withstand an unprecedentedly high radiation fluence of 2x10^16 n_eq/cm^2 (1 MeV neutron equivalent particles per square centimetre). An option for extremely radiation hard detectors are 3D detectors with columnar electrodes etched into the substrate perpendicular to the surface. In contrast to traditional planar detectors, where the electrodes are limited to the detector surface, the electrodes of 3D detectors extend into the third dimension, i.e. into the detector depth. In 3D detectors, the distance for drift of generated charge carriers and for depletion is given by the spacing between columnar electrodes of opposite doping types rather than by the detector thickness as in planar detectors. Therefore, enhanced radiation hardness is expected due to reduced trapping and a reduced depletion voltage, while the total ionised charge is determined by the substrate thickness. As a simplification of the original 3D detector design, double-sided 3D detectors have been developed. The electrodes pass through the substrate only partially, which increases the mechanical stability and simplifies the fabrication technology. In this thesis, the performance of double-sided 3D detectors is investigated in detail for the first time. The measurements were performed with strip detectors: on one side of the sensors, the columnar electrodes are connected to 4-8 mm long strips. The response of the detectors to high-energy pions, electrons emitted by a beta source and an infrared laser is studied. Special emphasis is put on signal measurements as a function of the particle's point of incidence. Also, detailed noise measurements were conducted. In order to investigate the radiation hardness of the detectors, they were irradiated with protons up to fluences that are expected for the HL-LHC inner pixel layers. The measurements were performed before any radiation-induced modification of the detector properties and after irradiation to different fluences. The dependence of the detector performance on the radiation fluence was measured separately with 3D detectors in n-in-p and in p-in-n layout. A comparison of the radiation hardness of the two designs is presented. Furthermore, the radiation hardness of planar n-in-p detectors is studied and compared to double-sided 3D detectors. A focus of this thesis is the investigation of charge multiplication effects, which can occur in the presence of high electric fields and which enhances the measured signal. While multiplication of the liberated charge carriers does not occur in conventional silicon tracking detectors before any radiation-induced modification of the detectors, it was recently observed in highly irradiated detectors. The high electric fields present in 3D detectors lead to an enhanced charge multiplication probability. Implications of charge multiplication on the detectors' signal and noise are studied." property="og:description" />  <meta content="summary" name="twitter:card" /> <style></style> </head> <body class="RD5032Papers search" lang="zh">  <div id="cern-toolbar"> <h1><a href="http://cern.ch" title="CERN">CERN <span>Accelerating science</span></a></h1> <ul> <li class="cern-accountlinks"><a class="cern-account" href="https://cds.cern.ch/youraccount/login?ln=zh_TW&referer=https%3A//cds.cern.ch/record/2636106/export/hm%3Fln%3Dzh_TW" title="Sign in to your CERN account">Sign in</a></li> <li><a class="cern-directory" href="http://cern.ch/directory" title="Search CERN resources and browse the directory">Directory</a></li> </ul> </div>   <div role="banner" class="clearfix" id="header"> <div class="header-inner inner"> <hgroup class="clearfix"> <h2 id="site-name"> <a rel="home" title="Home" href="/"><span>CERN Document Server</span></a> </h2> <h3 id="site-slogan">Access articles, reports and multimedia content in HEP</h3> </hgroup> <div role="navigation" id="main-navigation" class="cdsmenu"> <h2 class="element-invisible">Main menu</h2><ul class="links inline clearfix"> <li class="menu-386 first active-trail"><a class="active-trail" href="https://cds.cern.ch/?ln=zh_TW">搜尋</a></li> <li class="menu-444 "><a class="" title="" href="https://cds.cern.ch/submit?ln=zh_TW">提交</a></li> <li class="menu-426 "><a class="" href="https://cds.cern.ch/help/?ln=zh_TW">幫助</a></li> <li class="leaf hassubcdsmenu"> <a hreflang="en" class="header" href="https://cds.cern.ch/youraccount/display?ln=zh_TW">個人化</a> <ul class="subsubcdsmenu"><li><a href="https://cds.cern.ch/youralerts/list?ln=zh_TW">Your alerts</a></li><li><a href="https://cds.cern.ch/yourbaskets/display?ln=zh_TW">Your baskets</a></li><li><a href="https://cds.cern.ch/yourcomments?ln=zh_TW">Your comments</a></li><li><a href="https://cds.cern.ch/youralerts/display?ln=zh_TW">Your searches</a></li></ul></li> </ul> </div> </div> </div>  <table class="navtrailbox"> <tr> <td class="navtrailboxbody"> <a href="/?ln=zh_TW" class="navtrail">主頁</a> > <a href="/collection/CERN%20R%26D%20Projects?ln=zh_TW" class="navtrail">CERN R&D Projects</a> > <a href="/collection/CERN%20Detector%20R%26D%20Projects?ln=zh_TW" class="navtrail">CERN Detector R&D Projects</a> > <a href="/collection/RD50?ln=zh_TW" class="navtrail">RD50</a> > <a href="/collection/RD50%20Papers?ln=zh_TW" class="navtrail">RD50 Papers</a> > <a class="navtrail" href="/record/2636106">Double-sided 3D silicon detectors for the high-luminosity LHC</a> > HTML MARC </td> </tr> </table> </div> <div class="pagebody"><div class="pagebodystripemiddle"> <pre style="margin: 1em 0px;">002636106 001__ 2636106 002636106 003__ SzGeCERN 002636106 005__ 20220817145943.0 002636106 0247_ $$2URN$$aurn:nbn:de:bsz:25-opus-82734 002636106 0248_ $$aoai:inspirehep.net:1657012$$pcerncds:THESES$$pcerncds:FULLTEXT$$pcerncds:CERN:FULLTEXT$$pINIS$$pcerncds:CERN$$qINSPIRE:HEP$$qForCDS 002636106 035__ $$9http://inspirehep.net/oai2d$$aoai:inspirehep.net:1657012$$d2018-08-24T13:12:24Z$$h2018-08-25T04:00:06Z$$mmarcxml 002636106 035__ $$9Inspire$$a1657012 002636106 041__ $$aeng 002636106 100__ $$aKöhler, Michael$$uFreiburg U. 002636106 245__ $$9submitter$$aDouble-sided 3D silicon detectors for the high-luminosity LHC 002636106 300__ $$a207 p 002636106 500__ $$aPresented 12 Sep 2011 002636106 502__ $$aPhD$$bFreiburg U.$$c2011 002636106 520__ $$9submitter$$aTo extend the physics potential of the Large Hadron Collider (LHC) at CERN, the European Organization for Nuclear Research, a luminosity upgrade is planned. The HL-LHC (High-Luminosity LHC) is foreseen to start operation approximately in the year 2024. The peak instantaneous luminosity will be increased by a factor of five compared to the design specification of the LHC. The increased track density requires a finer segmentation of the detectors employed to investigate the particle collisions. Over the projected lifetime of the HL-LHC, the tracking detectors will have to withstand a five to ten times higher radiation dose than that at the LHC. In silicon detectors, radiation damage increases the leakage current, the effective doping concentration and the charge carrier trapping probability. These effects lead to a decrease of the signal-to-noise ratio after high radiation fluences. As the silicon detectors currently installed in the LHC experiments are not expected to be sufficiently radiation tolerant for the HL-LHC, novel detector technologies are under study. In the current ATLAS detector at the LHC, planar n-in-n silicon pixel detectors and planar p-in-n silicon strip detectors are used. For the ATLAS upgrade, planar silicon n-in-p detectors are foreseen for the region to be equipped with strip detectors. In the inner pixel layer, which is closest to the interaction point, the detectors will have to withstand an unprecedentedly high radiation fluence of 2x10^16 n_eq/cm^2 (1 MeV neutron equivalent particles per square centimetre). An option for extremely radiation hard detectors are 3D detectors with columnar electrodes etched into the substrate perpendicular to the surface. In contrast to traditional planar detectors, where the electrodes are limited to the detector surface, the electrodes of 3D detectors extend into the third dimension, i.e. into the detector depth. In 3D detectors, the distance for drift of generated charge carriers and for depletion is given by the spacing between columnar electrodes of opposite doping types rather than by the detector thickness as in planar detectors. Therefore, enhanced radiation hardness is expected due to reduced trapping and a reduced depletion voltage, while the total ionised charge is determined by the substrate thickness. As a simplification of the original 3D detector design, double-sided 3D detectors have been developed. The electrodes pass through the substrate only partially, which increases the mechanical stability and simplifies the fabrication technology. In this thesis, the performance of double-sided 3D detectors is investigated in detail for the first time. The measurements were performed with strip detectors: on one side of the sensors, the columnar electrodes are connected to 4-8 mm long strips. The response of the detectors to high-energy pions, electrons emitted by a beta source and an infrared laser is studied. Special emphasis is put on signal measurements as a function of the particle's point of incidence. Also, detailed noise measurements were conducted. In order to investigate the radiation hardness of the detectors, they were irradiated with protons up to fluences that are expected for the HL-LHC inner pixel layers. The measurements were performed before any radiation-induced modification of the detector properties and after irradiation to different fluences. The dependence of the detector performance on the radiation fluence was measured separately with 3D detectors in n-in-p and in p-in-n layout. A comparison of the radiation hardness of the two designs is presented. Furthermore, the radiation hardness of planar n-in-p detectors is studied and compared to double-sided 3D detectors. A focus of this thesis is the investigation of charge multiplication effects, which can occur in the presence of high electric fields and which enhances the measured signal. While multiplication of the liberated charge carriers does not occur in conventional silicon tracking detectors before any radiation-induced modification of the detectors, it was recently observed in highly irradiated detectors. The high electric fields present in 3D detectors lead to an enhanced charge multiplication probability. Implications of charge multiplication on the detectors' signal and noise are studied. 002636106 65017 $$2SzGeCERN$$aDetectors and Experimental Techniques 002636106 65017 $$2SzGeCERN$$aDetectors and Experimental Techniques 002636106 690C_ $$aCERN 002636106 693__ $$pCERN HL-LHC 002636106 693__ $$aNot applicable$$eRD50 002636106 693__ $$aCERN SPS$$bH2 002636106 701__ $$aJakobs, Karl$$edir.$$uFreiburg U. 002636106 8564_ $$uhttps://freidok.uni-freiburg.de/data/8273$$yFreiburg server 002636106 8564_ $$81427612$$s15795802$$uhttps://cds.cern.ch/record/2636106/files/fulltext.pdf$$yFulltext 002636106 960__ $$a14 002636106 980__ $$aTHESIS 002636106 999C6 $$a0-0-0-1-0-0-1$$t2018-02-23 15:21:15$$vInvenio/1.1.2.1260-aa76f refextract/1.5.44$$vcontent.pdf;1 002636106 999C5 $$0809652$$hG. Aad et al.$$mATLAS pixel detector electronics and sensors$$oAad08a$$sJINST,3,P07007$$y2008 002636106 999C5 $$0810300$$hG. Aad et al.$$mExpected performance of the ATLAS experiment: detector, trigger and physics CERN, Geneva$$oAad08b$$rCERN-OPEN-2008-020$$y2008 002636106 999C5 $$0796888$$hG. Aad et al.$$mThe ATLAS experiment at the CERN Large Hadron Collider$$oAad08c$$sJINST,3,S08003$$y2008 002636106 999C5 $$0379632$$hS. Abachi et al.$$mSearch for high mass top quark production in p¯p collisions at √ s = 1.8 TeV$$oAba95$$sPhys.Rev.Lett.,74,2422-2426$$y1995 002636106 999C5 $$0780935$$hE. Abat et al.$$mThe ATLAS Transition Radiation Tracker (TRT) proportional drift tube: design and performance$$oAba08$$sJINST,3,P02013$$y2008 002636106 999C5 $$0393084$$hF. Abe et al.$$mObservation of top quark production in ¯pp collisions$$oAbe95$$sPhys.Rev.Lett.,74,2626-2631$$y1995 002636106 999C5 $$0727495$$hW. Adam et al.$$mRadiation hard diamond sensors for future tracking applications$$oAda06$$sNucl.Instrum.Meth.,A565,278-283$$y2006 002636106 999C5 $$0876962$$hT. Affolder, P. Allport, and G. Casse$$m[Aff10] Collected charge of planar silicon detectors after pion and proton irradiations up to 2.2×1016 neqcm-2$$oAda06$$sNucl.Instrum.Meth.,A623,177-179$$y2010 002636106 999C5 $$hA. Ahmad et al.$$mThe silicon microstrip sensors of the ATLAS Semiconductor Tracker$$oAhm07$$sNucl.Instrum.Meth.,578,98-118$$y2007 002636106 999C5 $$hP. P. Allport$$mLong term planning proposal, Presentation given at the ATLAS Upgrade Week March/April, Oxford (UK)$$oAll11a$$y2011 002636106 999C5 $$0918153$$hP. P. Allport et al.$$mProgress with the single-sided module prototypes for the ATLAS tracker upgrade stave$$oAll11b$$sNucl.Instrum.Meth.,A636,S90-S96$$y2011 002636106 999C5 $$0796248$$hA. Augusto Alves et al.$$mThe LHCb Detector at the LHC$$oAlv08$$sJINST,3,S08005$$y2008 002636106 999C5 $$0477139$$hL. Andricek et al.$$mSingle-sided p+n and double-sided silicon strip detectors exposed to fluences up to 2 × 1014 /cm2 24 GeV protons$$oAnd98$$sNucl.Instrum.Meth.,A409,184-193$$y1998 002636106 999C5 $$cATLAS Collaboration$$hM.-M. Bé et al.$$mATLAS Pixel Petector: technical design report CERN, Geneva, 1998. 197 198 BIBLIOGRAPHY [B´06] Table of radionuclides (vol. 3 - A = 3 to 244), Monographie BIPM-5$$oATL98$$rCERN-LHCC-98-013$$y2006 002636106 999C5 $$0358003$$hE. Barberis et al.$$mCapacitances in silicon microstrip detectors$$oBar94$$sNucl.Instrum.Meth.,A342,90-95$$y1994 002636106 999C5 $$0760682$$hG. Battistoni et al.$$mThe FLUKA code: description and benchmarking$$oBat07$$sAIP Conf.Proc.,896,31-49$$y2007 002636106 999C5 $$hR. Bates et al.$$mCharge collection studies and electrical measurements of heavily irradiated 3D double-sided sensors and comparison to planar strip detectors, IEEE Trans. Nucl. Sci , accepted for publication$$oBat11$$y2011 002636106 999C5 $$0765060$$hG. L. Bayatian et al.$$mCMS physics technical design deport, volume II : physics performance CERN, Geneva$$oBay06$$rCERN-LHCC-2006-021$$y2006 002636106 999C5 $$hM. Benedikt et al.$$mLHC design report, vol. 3: the LHC injector chain -V-3, CERN, Geneva$$oBen04$$rCERN-2004-003$$y2004 002636106 999C5 $$hM. Benoit, A. Lounis, and Dinu N.$$mSimulation of charge multiplication and trapassisted tunneling in irradiated planar pixel sensors Nuclear Science Symposium and Medical Imaging Conference (NSS - MIC’10), Conference Record, paper N21-6, Knoxville (USA, TN)$$oBen10$$pIEEE$$y2010 002636106 999C5 $$hM. J. Berger et al.$$mStopping-power and range tables for electrons, protons, and helium ions, NISTIR 4999,, Computer program ESTAR available at$$oBer10$$uhttp://physics.nist.gov/PhysRefData/Star/Text/ESTAR.html$$y2010 002636106 999C5 $$0269501$$hH. Bichsel$$mStraggling in thin silicon detectors$$oBic88$$sRev.Mod.Phys.,60,663-699$$y1988 002636106 999C5 $$0335023$$hN. Bingefors et al.$$mA novel technique for fast pulse-shaping using a slow amplifier at LHC$$oBin93$$sNucl.Instrum.Meth.,A326,112-119$$y1993 002636106 999C5 $$hM. Breindl$$mErweiterung eines Lasermessstandes und Untersuchung von 3DSilizium-Detektoren [in German], Diploma thesis, University of Freiburg$$oBre10$$y2010 002636106 999C5 $$0458148$$hR. Brun and F. Rademakers$$mROOT — An object oriented data analysis framework$$oBru97$$sNucl.Instrum.Meth.,A389,81-86$$y1997 002636106 999C5 $$hO. S. Bruening et al.$$mLHC design report, vol. 1: the LHC main ring -V-1, CERN, Geneva$$oBru04$$rCERN-2004-003$$y2004 002636106 999C5 $$01609508$$hM. Capeans et al.$$mATLAS Insertable B-Layer technical design report CERN, Geneva$$oCap11$$rCERN-LHCC-2010-013$$y2011 002636106 999C5 $$hG. Casse, P. P. Allport, and M. 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