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.bde-section-8880-323>.section-background-overlay{transition:all var(--bde-transition-duration) ease-in-out}}</style><section class="bde-section-8880-323 bde-section s-header-narrow test_bg"> <div class="section-background-overlay"></div> <div class="section-container"><div class="bde-div-8880-324 bde-div s-header-narrow__content"> <div class="bde-div-8880-325 bde-div"> <h1 class="bde-heading-8880-326 bde-heading" data-entrance="slideLeft"> Process Control </h1> </div> </div></div> </section><div class="bde-globalblock-8880-117 bde-globalblock"> <div class='breakdance'><section class="bde-section-6743-100-6743-1 bde-section s-breadcrumb bde-section-6743-100"> <div class="section-container"><nav class="bde-div-6743-168-6743-1 bde-div breadcrumb bde-div-6743-168"> <a class="bde-text-link-6743-169-6743-1 bde-text-link bde-text-link-6743-169 breakdance-link" href="https://raith.com/" target="_self" data-type="url"> RAITH </a><div class="bde-icon-6743-208-6743-1 bde-icon bc-sep 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9.373 24.568.001 33.941z"/></svg> </div> </div><div class="bde-text-6743-173-6743-1 bde-text breadcrums-tx-disabled bde-text-6743-173"> Process Control </div> </nav></div> </section></div> </div><section id="introduction" class="bde-section-8880-100 bde-section s-introduction"> <div class="section-container"><div class="bde-columns-8880-101 bde-columns columns-25-75"><div class="bde-column-8880-102 bde-column column-25"> <h2 class="bde-heading-8880-308 bde-heading TxColorGray"> Introduction </h2> </div><div class="bde-column-8880-104 bde-column columns-75"> <div class="bde-text-8880-105 bde-text"> Process Control entails monitoring and adjusting a lithography process to achieve the desired output. Quality management in nanofabrication necessitates extensive data acquisition at the nanoscale through automated SEM imaging and wafer-scale metrology with high precision. The key to efficient lithography process control is seamlessly integrated patterning preparation, setting of consecutive measurement routines, correlated CAD-based navigation on patterned wafers, and lithography systems ready for feedback loops. Prototyping requires flexible methods for metrology, handling various sample sizes, and compatibility with fab protocols to ensure efficient lab-to-fab transitions. </div><div class="bde-div-8880-108 bde-div"> <h3 class="bde-heading-8880-309 bde-heading"> Over 40 years of experience in nanofabrication ensures precision and reproducibility </h3> </div><div class="bde-div-8880-174 bde-div"> <h3 class="bde-heading-8880-310 bde-heading"> Seamlessly integrated solutions for automated imaging, wafer-scale metrology, and defect inspection </h3> </div><div class="bde-div-8880-110 bde-div"> <h1 class="bde-heading-8880-311 bde-heading"> Dedicated expertise supports efficient process control </h1> </div> </div></div></div> </section><section class="bde-section-8880-118 bde-section s-benefits2col"> <div class="section-container"><h2 class="bde-heading-8880-312 bde-heading TxColorGray"> Benefits </h2><div class="bde-grid-8880-121 bde-grid"> <div class="bde-div-8880-122 bde-div tile-minimal tile-minimal--spacing-large"> <div class="bde-div-8880-123 bde-div tile-minimal__inner tile-minimal__inner--spacing-large"> <h3 class="bde-heading-8880-124 bde-heading"> Faster and more precise than analytical SEM </h3><div class="bde-text-8880-125 bde-text"> Stage positioning and image scanning with nanometer accuracy and focus control on wafer scale enables automatic and reproducible acquisition of large, accurate datasets, which is the key for process control. </div> </div> </div><div class="bde-div-8880-126 bde-div tile-minimal tile-minimal--spacing-large"> <div class="bde-div-8880-127 bde-div tile-minimal__inner tile-minimal__inner--spacing-large"> <h3 class="bde-heading-8880-128 bde-heading"> More versatile <br>than CD-SEM </h3><div class="bde-text-8880-129 bde-text"> Flexible implementation of various process control tasks on different sample sizes supports research, rapid prototyping, and lab-to-fab transition in system solutions, all for a fraction of the cost of a CD-SEM. </div> </div> </div><div class="bde-div-8880-130 bde-div tile-minimal tile-minimal--spacing-large"> <div class="bde-div-8880-131 bde-div tile-minimal__inner tile-minimal__inner--spacing-large"> <h3 class="bde-heading-8880-132 bde-heading"> Large area imaging for 2D / 3D structural analysis </h3><div class="bde-text-8880-133 bde-text"> Generation of large-area images by stitching adjacent SEM images with excellent placement accuracy based on an interferometer-driven stage allows multilayer sample analysis, including image-to-CAD conversion as an option. </div> </div> </div> </div></div> </section><section class="bde-section-8880-296 bde-section s-imagedividersmall"> <div class="section-container"><div class="bde-text-8880-297 bde-text s-imagedividersmall__content" data-entrance="slideLeft"> When the sum becomes more than its parts </div></div> </section><section class="bde-section-8880-140 bde-section s-process"> <div class="section-container"><h2 class="bde-heading-8880-313 bde-heading TxColorGray"> Methods </h2><h3 class="bde-heading-8880-142 bde-heading"> Enabling process <br>control </h3><div class="bde-columns-8880-143 bde-columns"><div class="bde-column-8880-144 bde-column"> <div class="bde-grid-8880-145 bde-grid"> <div class="bde-div-8880-146 bde-div tile-sep-top"> <div class="bde-text-8880-147 bde-text"> 01 </div><h3 class="bde-heading-8880-148 bde-heading"> CAD-based navigation </h3><div class="bde-text-8880-149 bde-text"> With excellent placement based on an interferometer-driven stage. </div> </div><div class="bde-div-8880-150 bde-div tile-sep-top"> <div class="bde-text-8880-151 bde-text"> 02 </div><h3 class="bde-heading-8880-152 bde-heading"> User-defined position list </h3><div class="bde-text-8880-153 bde-text"> For imaging and metrology on just a few sites to thousands of locations. </div> </div><div class="bde-div-8880-154 bde-div tile-sep-top"> <div class="bde-text-8880-155 bde-text"> 03 </div><h3 class="bde-heading-8880-156 bde-heading"> Measuring large datasets </h3><div class="bde-text-8880-157 bde-text"> Recipe-based and automated operation. </div> </div><div class="bde-div-8880-158 bde-div tile-sep-top"> <div class="bde-text-8880-159 bde-text"> 04 </div><h3 class="bde-heading-8880-160 bde-heading"> Structural analysis </h3><div class="bde-text-8880-161 bde-text"> Large area imaging for 2D and 3D structural analysis. </div> </div><div class="bde-div-8880-302 bde-div tile-sep-top"> <div class="bde-text-8880-303 bde-text"> 05 </div><h3 class="bde-heading-8880-304 bde-heading"> Applications </h3><div class="bde-text-8880-305 bde-text"> Process window characterization, tool monitoring, run-to-run control, defect review, and more. </div> </div> </div> </div></div></div> </section><section class="bde-section-8880-162 bde-section s-accordioncolumn"> <div class="section-container"><div class="bde-div-8880-163 bde-div accordion-wrapper"> <div class="bde-text-8880-164 bde-text TxColorGray"> Features </div><h2 class="bde-heading-8880-314 bde-heading"> Unlocking productivity </h2><div class="bde-div-8880-166 bde-div content-indent-sidebar-left"> <div class="bde-accordion-8880-167 bde-accordion adv-accordion-large-title"><div class="bde-accordion__content-wrapper-8880-168 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-168" aria-controls="accordion-panel-168" aria-expanded="false"> <span class="bde-accordion__title" >Laser-interferometer stage and laser height sensing</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-168" aria-labelledby="accordion-button-168" hidden> <div class="bde-text-8880-169 bde-text content-width-95"> Precise, repeatable measurements across 6-inch wafers enabled by laser-interferometer driven stage and laser-assisted height sensor: < 10 nm local positioning accuracy, < 300 nm global accuracy, focus control. </div> </div> </div><div class="bde-accordion__content-wrapper-8880-170 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-170" aria-controls="accordion-panel-170" aria-expanded="false"> <span class="bde-accordion__title" >Distortion-free SEM</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-170" aria-labelledby="accordion-button-170" hidden> <div class="bde-text-8880-171 bde-text content-width-95"> Cutting-edge FE-SEM columns with fast state-of-the-art SE/BSE imaging, in combination with in-field distortion and focus corrections, enable calibrated large-area SEM imaging with high absolute accuracy and excellent image contrast. </div> </div> </div><div class="bde-accordion__content-wrapper-8880-306 bde-accordion__content-wrapper"> <h3 class="bde-accordion__title-tag"> <button type="button" class="bde-accordion__button" id="accordion-button-306" aria-controls="accordion-panel-306" aria-expanded="false"> <span class="bde-accordion__title" >Software and tool connectivity</span> <span class="bde-accordion__icon bde-accordion__icon--default"></span> <span class="bde-accordion__icon bde-accordion__icon--active"></span> </button> </h3> <div role="region" class="bde-accordion__panel" id="accordion-panel-306" aria-labelledby="accordion-button-306" hidden> <div class="bde-text-8880-307 bde-text content-width-95"> Matching nanofabrication and process control tools in both hardware and system software enables efficient feed-forward and feed-back loops for faster time to result. </div> </div> </div> </div> </div> </div></div> </section><section class="bde-section-8880-180 bde-section s-keyfactorsandusecases"> <div class="section-container"><h2 class="bde-heading-8880-181 bde-heading"> Applications of process control solutions </h2><div class="bde-columns-8880-228 bde-columns"><div class="bde-column-8880-229 bde-column"> <div class="bde-text-8880-230 bde-text teaser-left-col TxColorGray"> Key factors for SEM process control </div> </div><div class="bde-column-8880-231 bde-column"> <div class="bde-grid-8880-232 bde-grid"> <div class="bde-div-8880-233 bde-div tile-minimal"> <div class="bde-div-8880-234 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-8880-235 bde-text tile-minimal__text-bmargin-l"> Local placement accuracy </div><div class="bde-div-8880-236 bde-div"> <div class="bde-text-8880-237 bde-text"> < 10 nm </div> </div> </div> </div><div class="bde-div-8880-239 bde-div tile-minimal"> <div class="bde-div-8880-240 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-8880-241 bde-text tile-minimal__text-bmargin-l"> Global placement accuracy </div><div class="bde-div-8880-242 bde-div"> <div class="bde-text-8880-243 bde-text"> < 300 nm </div> </div> </div> </div><div class="bde-div-8880-245 bde-div tile-minimal"> <div class="bde-div-8880-246 bde-div tile-minimal__inner tile-minimal__inner--nogap inner-space-between"> <div class="bde-text-8880-247 bde-text tile-minimal__text-bmargin-l"> Data points per wafer </div><div class="bde-div-8880-248 bde-div"> <div class="bde-text-8880-249 bde-text"> 1 to ∞ </div> </div> </div> </div> </div> </div></div><div class="bde-columns-8880-251 bde-columns"><div class="bde-column-8880-252 bde-column"> <div class="bde-text-8880-253 bde-text teaser-left-col TxColorGray"> Process control applications </div> </div><div class="bde-column-8880-254 bde-column"> <div class="bde-grid-8880-255 bde-grid"> <div class="bde-div-8880-256 bde-div tile-usecase"> <div class="bde-image-8880-257 bde-image"> <figure class="breakdance-image breakdance-image--9106"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20917%20419'%3E%3C/svg%3E" width="917" height="419" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro.jpg 917w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro-300x137.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro-768x351.jpg 768w" data-lazy-sizes="(max-width: 917px) 100vw, 917px" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro.jpg"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro.jpg" width="917" height="419" srcset="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro.jpg 917w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro-300x137.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-critical-point-inspection-with-cjob-metro-768x351.jpg 768w" sizes="(max-width: 917px) 100vw, 917px"></noscript></div> </div></figure> </div><div class="bde-div-8880-258 bde-div tile-usecase__content"> <h1 class="bde-heading-8880-259 bde-heading"> Critical point inspection </h1> </div> </div><div class="bde-div-8880-261 bde-div tile-usecase"> <div class="bde-image-8880-262 bde-image"> <figure class="breakdance-image breakdance-image--14856"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20900%20600'%3E%3C/svg%3E" width="900" height="600" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/07/process-characterization.jpg 900w, https://raith.com/wp-content/uploads/2024/07/process-characterization-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/07/process-characterization-768x512.jpg 768w" data-lazy-sizes="(max-width: 900px) 100vw, 900px" alt="SEM image and graph showing process characterization with DOE" data-lazy-src="https://raith.com/wp-content/uploads/2024/07/process-characterization.jpg"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/process-characterization.jpg" width="900" height="600" srcset="https://raith.com/wp-content/uploads/2024/07/process-characterization.jpg 900w, https://raith.com/wp-content/uploads/2024/07/process-characterization-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/07/process-characterization-768x512.jpg 768w" sizes="(max-width: 900px) 100vw, 900px" alt="SEM image and graph showing process characterization with DOE"></noscript></div> </div></figure> </div><div class="bde-div-8880-263 bde-div tile-usecase__content"> <h1 class="bde-heading-8880-264 bde-heading"> Process characterization with DOE </h1> </div> </div><div class="bde-div-8880-266 bde-div tile-usecase"> <div class="bde-image-8880-267 bde-image"> <figure class="breakdance-image breakdance-image--9107"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%201600%201048'%3E%3C/svg%3E" width="1600" height="1048" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-300x197.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-1024x671.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-768x503.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-1536x1006.jpg 1536w" data-lazy-sizes="(max-width: 1600px) 100vw, 1600px" alt="Gauge capability and precision" data-lazy-src="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision.jpg"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision.jpg" width="1600" height="1048" srcset="https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision.jpg 1600w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-300x197.jpg 300w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-1024x671.jpg 1024w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-768x503.jpg 768w, https://raith.com/wp-content/uploads/2024/06/raith-process-control-solution-gauge-capability-and-precision-1536x1006.jpg 1536w" sizes="(max-width: 1600px) 100vw, 1600px" alt="Gauge capability and precision"></noscript></div> </div></figure> </div><div class="bde-div-8880-268 bde-div tile-usecase__content"> <h1 class="bde-heading-8880-269 bde-heading"> Gauge capability and precision </h1> </div> </div><div class="bde-div-8880-271 bde-div tile-usecase"> <div class="bde-image-8880-272 bde-image"> <figure class="breakdance-image breakdance-image--14857"> <div class="breakdance-image-container"> <div class="breakdance-image-clip"><img class="breakdance-image-object" src="data:image/svg+xml,%3Csvg%20xmlns='http://www.w3.org/2000/svg'%20viewBox='0%200%20900%20600'%3E%3C/svg%3E" width="900" height="600" data-lazy-srcset="https://raith.com/wp-content/uploads/2024/07/metasurface-characterization.jpg 900w, https://raith.com/wp-content/uploads/2024/07/metasurface-characterization-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/07/metasurface-characterization-768x512.jpg 768w" data-lazy-sizes="(max-width: 900px) 100vw, 900px" alt="Image showing the characterization of a complex metasurface structure" data-lazy-src="https://raith.com/wp-content/uploads/2024/07/metasurface-characterization.jpg"><noscript><img class="breakdance-image-object" src="https://raith.com/wp-content/uploads/2024/07/metasurface-characterization.jpg" width="900" height="600" srcset="https://raith.com/wp-content/uploads/2024/07/metasurface-characterization.jpg 900w, https://raith.com/wp-content/uploads/2024/07/metasurface-characterization-300x200.jpg 300w, https://raith.com/wp-content/uploads/2024/07/metasurface-characterization-768x512.jpg 768w" sizes="(max-width: 900px) 100vw, 900px" alt="Image showing the characterization of a complex metasurface structure"></noscript></div> </div></figure> </div><div class="bde-div-8880-273 bde-div tile-usecase__content"> <h1 class="bde-heading-8880-274 bde-heading"> Characterization of complex metasurfaces </h1> </div> </div> </div> </div></div></div> </section><section class="bde-section-8880-315 bde-section s-hauptcta"> <div class="section-container"><div class="bde-div-8880-316 bde-div s-hauptcta__wrapper"> <div class="bde-div-8880-317 bde-div s-hauptcta__content s-hauptcta-_contet--narrow"> <div class="bde-text-8880-318 bde-text"> If you want to know more about RAITH’s developments regarding Process Control solutions, please contact us directly </div> </div><a class="bde-container-link-8880-320 bde-container-link s-hauptcta__link-wrapper breakdance-link" href="https://raith.com/contact-process-control/" target="_self" data-type="url"> <div class="bde-text-8880-321 bde-text"> Get in touch for more Process Control details </div><div class="bde-icon-8880-322 bde-icon s-hauptcta__icon"> <div class="bde-icon-icon breakdance-icon-atom" > <svg xmlns="http://www.w3.org/2000/svg" id="a" width="38" height="38" viewBox="0 0 38 38"><polygon points="36.33 19 36.59 18.73 18.84 1.25 17.09 3.04 32.03 17.75 -.58 17.75 -.58 20.25 32.03 20.25 17.05 34.96 18.8 36.74 36.6 19.27 36.33 19" stroke-width="0"/></svg> </div> </div> </a> </div></div> </section></div><div class='breakdance'><section class="bde-section-5979-137 bde-section"> <div 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