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vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#White_Light_Interferometers"> <div class="vector-toc-text"> <span class="vector-toc-numb">7</span> <span>White Light Interferometers</span> </div> </a> <ul id="toc-White_Light_Interferometers-sublist" class="vector-toc-list"> </ul> </li> <li id="toc-References" class="vector-toc-list-item vector-toc-level-1 vector-toc-list-item-expanded"> <a class="vector-toc-link" href="#References"> <div class="vector-toc-text"> <span class="vector-toc-numb">8</span> <span>References</span> </div> </a> <ul id="toc-References-sublist" class="vector-toc-list"> </ul> </li> </ul> </div> </div> </nav> </div> </div> <div class="mw-content-container"> <main id="content" class="mw-body"> <header class="mw-body-header vector-page-titlebar"> <nav aria-label="Contents" class="vector-toc-landmark"> <div id="vector-page-titlebar-toc" class="vector-dropdown vector-page-titlebar-toc vector-button-flush-left" > <input type="checkbox" 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class="vector-pinnable-header vector-appearance-pinnable-header vector-pinnable-header-pinned" data-feature-name="appearance-pinned" data-pinnable-element-id="vector-appearance" data-pinned-container-id="vector-appearance-pinned-container" data-unpinned-container-id="vector-appearance-unpinned-container" > <div class="vector-pinnable-header-label">Appearance</div> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-pin-button" data-event-name="pinnable-header.vector-appearance.pin">move to sidebar</button> <button class="vector-pinnable-header-toggle-button vector-pinnable-header-unpin-button" data-event-name="pinnable-header.vector-appearance.unpin">hide</button> </div> </div> </div> </nav> </div> </div> <div id="bodyContent" class="vector-body" aria-labelledby="firstHeading" data-mw-ve-target-container> <div class="vector-body-before-content"> <div class="mw-indicators"> </div> <div id="siteSub" class="noprint">From Wikipedia, the free encyclopedia</div> </div> <div id="contentSub"><div id="mw-content-subtitle"></div></div> <div id="mw-content-text" class="mw-body-content"><div class="mw-content-ltr mw-parser-output" lang="en" dir="ltr"><p>The <b>wafer bond characterization</b> is based on different methods and tests. Considered a high importance of the wafer are the successful bonded wafers without flaws. Those flaws can be caused by <a href="/wiki/Void_(composites)" title="Void (composites)">void</a> formation in the interface due to unevenness or <a href="/wiki/Impurity" class="mw-redirect" title="Impurity">impurities</a>. The bond connection is characterized for wafer bond development or quality assessment of fabricated wafers and sensors. </p> <meta property="mw:PageProp/toc" /> <div class="mw-heading mw-heading2"><h2 id="Overview">Overview</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=1" title="Edit section: Overview"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Wafer bonds are commonly characterized by three important encapsulation parameters: bond strength, <a href="/wiki/Hermetic_seal" title="Hermetic seal">hermeticity</a> of encapsulation and bonding induced stress.<sup id="cite_ref-KGH+2010_1-0" class="reference"><a href="#cite_note-KGH+2010-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </p><p>The bond strength can be evaluated using double cantilever beam or chevron respectively micro-chevron tests. Other pull tests as well as burst, <a href="/w/index.php?title=Direct_shear_tests&action=edit&redlink=1" class="new" title="Direct shear tests (page does not exist)">direct shear tests</a> or bend tests enable the determination of the bond strength.<sup id="cite_ref-Cui2008_2-0" class="reference"><a href="#cite_note-Cui2008-2"><span class="cite-bracket">[</span>2<span class="cite-bracket">]</span></a></sup> The packaging <a href="/wiki/Hermeticity" class="mw-redirect" title="Hermeticity">hermeticity</a> is characterized using membrane, He-leak, resonator/pressure tests.<sup id="cite_ref-KGH+2010_1-1" class="reference"><a href="#cite_note-KGH+2010-1"><span class="cite-bracket">[</span>1<span class="cite-bracket">]</span></a></sup> </p><p>Three additional possibilities to evaluate the bond connection are optical, <a href="/wiki/Electron" title="Electron">electron</a> and <a href="/wiki/Acoustical_measurements_and_instrumentation" title="Acoustical measurements and instrumentation">Acoustical measurements and instrumentation</a>. At first, optical measurement techniques are using an <a href="/wiki/Optical_microscope" title="Optical microscope">optical microscope</a>, IR transmission microscopy and visual inspection. Secondly, the electron measurement is commonly applied using an <a href="/wiki/Electron_microscope" title="Electron microscope">electron microscope</a>, e.g. <a href="/wiki/Scanning_electron_microscope" title="Scanning electron microscope">scanning electron microscopy</a> (SEM), high voltage transmittance electron microscopy (HVTEM) and high resolution scanning electron microscopy (HRSEM). And finally, typical acoustic measurement approaches are <a href="/wiki/Scanning_acoustic_microscope" title="Scanning acoustic microscope">scanning acoustic microscope</a> (SAM), scanning laser acoustic microscope (SLAM) and C-mode scanning acoustic microscope (C-SAM). </p><p>The specimen preparation is sophisticated and the mechanical, electronic properties are important for the bonding technology characterization and comparison.<sup id="cite_ref-Mac1997_3-0" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Infrared_(IR)_transmission_microscopy"><span id="Infrared_.28IR.29_transmission_microscopy"></span>Infrared (IR) transmission microscopy</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=2" title="Edit section: Infrared (IR) transmission microscopy"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p><a href="/wiki/Infrared" title="Infrared">Infrared</a> (IR) void imaging is possible if the analyzed materials are IR transparent, i.e. <a href="/wiki/Silicon" title="Silicon">silicon</a>. This method gives a rapid qualitative examination<sup id="cite_ref-Far2008b_4-0" class="reference"><a href="#cite_note-Far2008b-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup> and is very suitable due to its sensitivity to the surface and to the buried interface. It obtains information on chemical nature of surface and interface. </p> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:A-ir.png" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/f/f6/A-ir.png/260px-A-ir.png" decoding="async" width="260" height="182" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/f/f6/A-ir.png/390px-A-ir.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/f/f6/A-ir.png/520px-A-ir.png 2x" data-file-width="523" data-file-height="366" /></a><figcaption>Schematic infrared transmission microscopy setup.</figcaption></figure> <p>Infrared transmitted light is based on the fact that silicon is translucent at wavelength ≥ 1.2 μm. The equipment consists of an infrared lamp as light source and an infrared video system (compare to figure "Schematic infrared transmission microscopy setup"). </p><p>The IR imaging system enables the analysis of the bond wave and additionally micro mechanical structures as well as deformities in the silicon. This procedure allows also to analyze multiple layer bonds.<sup id="cite_ref-Mac1997_3-1" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> The image contrast depends on the distance between the <a href="/wiki/Wafers" class="mw-redirect" title="Wafers">wafers</a>. Usually if using <a href="/wiki/Monochromatic_color" class="mw-redirect" title="Monochromatic color">monochromatic color</a> IR the center of the wafers is display brighter based on the vicinity. Particles in the bond interface generate highly visible spots with differing contrast because of the <a href="/wiki/Interference_(wave_propagation)" class="mw-redirect" title="Interference (wave propagation)">interference (wave propagation)</a> fringes.<sup id="cite_ref-WMC+1996_5-0" class="reference"><a href="#cite_note-WMC+1996-5"><span class="cite-bracket">[</span>5<span class="cite-bracket">]</span></a></sup> Unbonded areas can be shown if the void opening (height) is ≥ 1 nm.<sup id="cite_ref-Far2008b_4-1" class="reference"><a href="#cite_note-Far2008b-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="Fourier_transform_infrared_(FT-IR)_spectroscopy"><span id="Fourier_transform_infrared_.28FT-IR.29_spectroscopy"></span>Fourier transform infrared (FT-IR) spectroscopy</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=3" title="Edit section: Fourier transform infrared (FT-IR) spectroscopy"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The <a href="/wiki/Fourier_transform_infrared_spectroscopy" class="mw-redirect" title="Fourier transform infrared spectroscopy">Fourier transform infrared (FT-IR) spectroscopy</a> is a non-destructive hermeticity characterization method. The radiation absorption enables the analysis with a specific wavelength for gases. <sup id="cite_ref-LBH+2009_6-0" class="reference"><a href="#cite_note-LBH+2009-6"><span class="cite-bracket">[</span>6<span class="cite-bracket">]</span></a></sup> </p> <div style="clear:both;" class=""></div> <div class="mw-heading mw-heading2"><h2 id="Ultrasonic_microscopy">Ultrasonic microscopy</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=4" title="Edit section: Ultrasonic microscopy"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p><b>Ultrasonic microscopy</b> uses high frequency sound waves to image bonded interfaces. <a href="/wiki/Deionized_water" class="mw-redirect" title="Deionized water">Deionized water</a> is used as the acoustic interconnect medium between the <a href="/wiki/Electromagnetic_acoustic_transducer" title="Electromagnetic acoustic transducer">electromagnetic acoustic transducer</a> and the wafer.<sup id="cite_ref-Far2008b_4-2" class="reference"><a href="#cite_note-Far2008b-4"><span class="cite-bracket">[</span>4<span class="cite-bracket">]</span></a></sup><sup id="cite_ref-STA2008_7-0" class="reference"><a href="#cite_note-STA2008-7"><span class="cite-bracket">[</span>7<span class="cite-bracket">]</span></a></sup> </p><p>This method works with an ultrasonic transducer scanning the wafer bond. The reflected sound signal is used for the image creation. The lateral resolutions depends on the ultrasonic frequency, the acoustic beam diameter and the <a href="/wiki/Signal-to-noise_ratio" title="Signal-to-noise ratio">signal-to-noise ratio</a> (contrast). </p><p>Unbonded areas, i.e. impurities or voids, do not reflect the ultrasonic beam like bonded areas, therefore a quality assessment of the bond is possible.<sup id="cite_ref-Mac1997_3-2" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Double_cantilever_beam_(DCB)_test"><span id="Double_cantilever_beam_.28DCB.29_test"></span>Double cantilever beam (DCB) test</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=5" title="Edit section: Double cantilever beam (DCB) test"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p><b>Double cantilever beam test</b>, also referred to as crack opening or razor blade method, is a method to define the strength of the bond. This is achieved by determining the energy of the bonded surfaces. A blade of a specific thickness is inserted between the bonded wafer pair. This leads to a split-up of the bond connection.<sup id="cite_ref-Mac1997_3-3" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> The crack length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle L}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>L</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle L}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/103168b86f781fe6e9a4a87b8ea1cebe0ad4ede8" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.583ex; height:2.176ex;" alt="{\displaystyle L}"></span> equals the distance between the blade tip and the crack tip and is determined using IR transmitted light. The IR light is able to illuminate the crack, when using materials transparent to IR or visible light.<sup id="cite_ref-VJL2005_8-0" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> If the fracture surface toughness is very high, it is very difficult to insert the blade and the wafers are endangered to break at the slide in of the blade.<sup id="cite_ref-Mac1997_3-4" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup> </p> <figure class="mw-default-size mw-halign-right" typeof="mw:File/Thumb"><a href="/wiki/File:A-dcb1.png" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/thumb/3/38/A-dcb1.png/260px-A-dcb1.png" decoding="async" width="260" height="107" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/3/38/A-dcb1.png/390px-A-dcb1.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/3/38/A-dcb1.png/520px-A-dcb1.png 2x" data-file-width="612" data-file-height="251" /></a><figcaption>Blade insertion between the bonded wafers.<sup id="cite_ref-Mac1997_3-5" class="reference"><a href="#cite_note-Mac1997-3"><span class="cite-bracket">[</span>3<span class="cite-bracket">]</span></a></sup></figcaption></figure> <p>The DCB test characterizes the time dependent strength by mechanical fracture evaluation and is therefore well suited for lifetime predictions.<sup id="cite_ref-NGM2008_9-0" class="reference"><a href="#cite_note-NGM2008-9"><span class="cite-bracket">[</span>9<span class="cite-bracket">]</span></a></sup> A disadvantage of this method is, that between the entering of the blade and the time to take the IR image, the results can be influenced. In addition, the measurement inaccuracy increases with a high surface fracture toughness resulting in a smaller crack length or broken wafers at the blade insertion as well as the influence of the fourth power of the measured crack length. The measured crack length determines surface energy <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \gamma }"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>γ</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \gamma }</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/a223c880b0ce3da8f64ee33c4f0010beee400b1a" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.838ex; width:1.262ex; height:2.176ex;" alt="{\displaystyle \gamma }"></span> in relation to a rectangular, beam-shaped specimen. </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \gamma ={\frac {3t_{b}^{2}E_{1}t_{w1}^{3}E_{2}t_{w2}^{3}}{16L^{4}(E_{1}t_{w1}^{3}+E_{2}t_{w2}^{3})}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>γ</mi> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <mn>3</mn> <msubsup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>b</mi> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msubsup> <msub> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>1</mn> </mrow> </msub> <msubsup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>w</mi> <mn>1</mn> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msubsup> <msub> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msub> <msubsup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>w</mi> <mn>2</mn> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msubsup> </mrow> <mrow> <mn>16</mn> <msup> <mi>L</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>4</mn> </mrow> </msup> <mo stretchy="false">(</mo> <msub> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>1</mn> </mrow> </msub> <msubsup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>w</mi> <mn>1</mn> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msubsup> <mo>+</mo> <msub> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msub> <msubsup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>w</mi> <mn>2</mn> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msubsup> <mo stretchy="false">)</mo> </mrow> </mfrac> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \gamma ={\frac {3t_{b}^{2}E_{1}t_{w1}^{3}E_{2}t_{w2}^{3}}{16L^{4}(E_{1}t_{w1}^{3}+E_{2}t_{w2}^{3})}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fc975743c7203be45bdc6cb228e0117d99f31f4f" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -3.005ex; width:26.489ex; height:7.176ex;" alt="{\displaystyle \gamma ={\frac {3t_{b}^{2}E_{1}t_{w1}^{3}E_{2}t_{w2}^{3}}{16L^{4}(E_{1}t_{w1}^{3}+E_{2}t_{w2}^{3})}}}"></span> </p><p>Thereby is <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle E}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>E</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle E}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/4232c9de2ee3eec0a9c0a19b15ab92daa6223f9b" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.776ex; height:2.176ex;" alt="{\displaystyle E}"></span> the <a href="/wiki/Young%27s_modulus" title="Young's modulus">Young's modulus</a>, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle t_{w}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>w</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle t_{w}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/70ae3394d15f02d2faa797e22d5c75a101b2e8b7" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.249ex; height:2.343ex;" alt="{\displaystyle t_{w}}"></span> the wafer thickness, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle t_{b}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>b</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle t_{b}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/1ca101f3ac73e0d38184d4aec1bdbb5dcad7cbb8" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:1.777ex; height:2.343ex;" alt="{\displaystyle t_{b}}"></span> the blade thickness and <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle L}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>L</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle L}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/103168b86f781fe6e9a4a87b8ea1cebe0ad4ede8" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.583ex; height:2.176ex;" alt="{\displaystyle L}"></span> the measured crack length.<sup id="cite_ref-WMW+2010_10-0" class="reference"><a href="#cite_note-WMW+2010-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup> In literature different DCB models are mentioned, i.e. measurement approaches by Maszara, Gillis and Gilman, Srawley and Gross, Kanninen or Williams. The most commonly used approaches are by Maszara or Gillis and Gilman.<sup id="cite_ref-VJL2005_8-1" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="Maszara_model">Maszara model</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=6" title="Edit section: Maszara model"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The Maszara model neglects shear stress as well as stress in the un-cleaved part for the obtained crack lengths. The compliance of a symmetric DCB specimen is described as follows: </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>C</mi> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <mn>8</mn> <msup> <mi>L</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> <mrow> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> <mi>w</mi> <msup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> </mfrac> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/c5fc11a175eadf06dc217df6baf6d0f15730760c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.171ex; width:12.107ex; height:6.009ex;" alt="{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}}"></span> </p><p>The compliance is determined out of the crack length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle L}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>L</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle L}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/103168b86f781fe6e9a4a87b8ea1cebe0ad4ede8" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.583ex; height:2.176ex;" alt="{\displaystyle L}"></span>, the width <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle w}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>w</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle w}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/88b1e0c8e1be5ebe69d18a8010676fa42d7961e6" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.664ex; height:1.676ex;" alt="{\displaystyle w}"></span> and the beam thickness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle t}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>t</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle t}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/65658b7b223af9e1acc877d848888ecdb4466560" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:0.84ex; height:2.009ex;" alt="{\displaystyle t}"></span>. <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle E^{*}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle E^{*}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/a91d2119445b3b65384ba491c4b95f1557571ecc" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:2.848ex; height:2.343ex;" alt="{\displaystyle E^{*}}"></span> defines the Young's modulus. The surface fracture energy <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/f4083ed9fc7abdf16a2aae5f191f2604c1a58952" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.137ex; height:2.509ex;" alt="{\displaystyle G_{IC}}"></span> is: </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}={\frac {3E^{*}\delta ^{2}t^{3}}{16L^{4}}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <mn>3</mn> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> <msup> <mi>δ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msup> <msup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> <mrow> <mn>16</mn> <msup> <mi>L</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>4</mn> </mrow> </msup> </mrow> </mfrac> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}={\frac {3E^{*}\delta ^{2}t^{3}}{16L^{4}}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/7b03e8b13ecf02d605f0ae6704f9acd5b2ccf4bb" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.171ex; width:16.083ex; height:6.009ex;" alt="{\displaystyle G_{IC}={\frac {3E^{*}\delta ^{2}t^{3}}{16L^{4}}}}"></span> </p><p>with <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \delta }"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>δ</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \delta }</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/c5321cfa797202b3e1f8620663ff43c4660ea03a" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.049ex; height:2.343ex;" alt="{\displaystyle \delta }"></span> as load-point displacement. </p> <div class="mw-heading mw-heading3"><h3 id="Gillis_and_Gilman_model">Gillis and Gilman model</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=7" title="Edit section: Gillis and Gilman model"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The Gillis and Gilman approach considers bend and shear forces in the beam. The compliance equation is: </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}\left(1+3c\left({\frac {t}{L}}\right)^{2-n}+{\frac {\alpha _{s}E^{*}}{4\mu }}\left({\frac {t}{L}}\right)^{2}\right)}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>C</mi> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <mn>8</mn> <msup> <mi>L</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> <mrow> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> <mi>w</mi> <msup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> </mfrac> </mrow> <mrow> <mo>(</mo> <mrow> <mn>1</mn> <mo>+</mo> <mn>3</mn> <mi>c</mi> <msup> <mrow> <mo>(</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mi>t</mi> <mi>L</mi> </mfrac> </mrow> <mo>)</mo> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> <mo>−</mo> <mi>n</mi> </mrow> </msup> <mo>+</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <msub> <mi>α</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>s</mi> </mrow> </msub> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> </mrow> <mrow> <mn>4</mn> <mi>μ</mi> </mrow> </mfrac> </mrow> <msup> <mrow> <mo>(</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mi>t</mi> <mi>L</mi> </mfrac> </mrow> <mo>)</mo> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msup> </mrow> <mo>)</mo> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}\left(1+3c\left({\frac {t}{L}}\right)^{2-n}+{\frac {\alpha _{s}E^{*}}{4\mu }}\left({\frac {t}{L}}\right)^{2}\right)}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/6ffae1d9f58e5eb4aaa6ac4405f4919142269261" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -3.171ex; width:47.417ex; height:7.509ex;" alt="{\displaystyle C={\frac {8L^{3}}{E^{*}wt^{3}}}\left(1+3c\left({\frac {t}{L}}\right)^{2-n}+{\frac {\alpha _{s}E^{*}}{4\mu }}\left({\frac {t}{L}}\right)^{2}\right)}"></span> </p><p>The first term <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle {\frac {8L^{3}}{E^{*}wt^{3}}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <mn>8</mn> <msup> <mi>L</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> <mrow> <msup> <mi>E</mi> <mrow class="MJX-TeXAtom-ORD"> <mo>∗</mo> </mrow> </msup> <mi>w</mi> <msup> <mi>t</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>3</mn> </mrow> </msup> </mrow> </mfrac> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle {\frac {8L^{3}}{E^{*}wt^{3}}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/a9e7b60f11c906f1e90bace0acbe4a1f493a6d23" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.171ex; width:7.242ex; height:6.009ex;" alt="{\displaystyle {\frac {8L^{3}}{E^{*}wt^{3}}}}"></span> describes the strain energy in the cantilever due to bending. The second term is the contribution from elastic deformations in the un-cleaved specimen part and the third term considers the shear deformation. Therefore, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle n}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>n</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle n}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/a601995d55609f2d9f5e233e36fbe9ea26011b3b" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.395ex; height:1.676ex;" alt="{\displaystyle n}"></span> and <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle c}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>c</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle c}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/86a67b81c2de995bd608d5b2df50cd8cd7d92455" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.007ex; height:1.676ex;" alt="{\displaystyle c}"></span> are dependent on the conditions of the fixed end of the cantilever. The shear coefficient <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \alpha _{S}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>α</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>S</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \alpha _{S}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/279c4fd457433cc27909a1788591edd8fc0853d3" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.78ex; height:2.009ex;" alt="{\displaystyle \alpha _{S}}"></span> is dependent on the cross-section geometry of the beam. </p> <div class="mw-heading mw-heading2"><h2 id="Chevron_test">Chevron test</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=8" title="Edit section: Chevron test"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The <b>chevron test</b> is used to determine the fracture toughness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fbe013a706bc20c6ba9bca0ce3273867604cbb88" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.283ex; height:2.509ex;" alt="{\displaystyle K_{IC}}"></span> of brittle construction materials. The fracture toughness is a basic material parameter for analyzing the bond strength. </p><p>The chevron test uses a special notch geometry for the specimen that is loaded with an increasing tensile force. The chevron notch geometry is commonly in shape of a triangle with different bond patterns. At a specific tensile load the crack starts at the chevron tip and grows with continuous applied load until a critical length is reached.<sup id="cite_ref-WFJ+2008_11-0" class="reference"><a href="#cite_note-WFJ+2008-11"><span class="cite-bracket">[</span>11<span class="cite-bracket">]</span></a></sup> The crack growth becomes unstable and accelerates resulting in a fracture of the specimen.<sup id="cite_ref-VJL2005_8-2" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> The critical length depends only on the specimen geometry and the loading condition. The fracture toughness commonly <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fbe013a706bc20c6ba9bca0ce3273867604cbb88" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.283ex; height:2.509ex;" alt="{\displaystyle K_{IC}}"></span> is determined by measuring the recorded fracture load of the test. This improves the test quality and accuracy and decreases measurement scatter.<sup id="cite_ref-WFJ+2008_11-1" class="reference"><a href="#cite_note-WFJ+2008-11"><span class="cite-bracket">[</span>11<span class="cite-bracket">]</span></a></sup> </p><p>Two approaches, based on energy release rate <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{I}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{I}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/7c0885c4ec3b7ff3fe4c5821ad189bf12411f22c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.888ex; height:2.509ex;" alt="{\displaystyle G_{I}}"></span> or stress intensity factor <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{I}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{I}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/c52214955bed2bd43b066ffb7daebc3bddaaa33c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:3.034ex; height:2.509ex;" alt="{\displaystyle K_{I}}"></span>, can be used for explaining the chevron test method.<sup id="cite_ref-VJL2005_8-3" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> The fracture occurs when <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{I}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{I}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/c52214955bed2bd43b066ffb7daebc3bddaaa33c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:3.034ex; height:2.509ex;" alt="{\displaystyle K_{I}}"></span> or <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{I}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{I}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/7c0885c4ec3b7ff3fe4c5821ad189bf12411f22c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.888ex; height:2.509ex;" alt="{\displaystyle G_{I}}"></span> reach a critical value, describing the fracture toughness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fbe013a706bc20c6ba9bca0ce3273867604cbb88" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.283ex; height:2.509ex;" alt="{\displaystyle K_{IC}}"></span> or <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/f4083ed9fc7abdf16a2aae5f191f2604c1a58952" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.137ex; height:2.509ex;" alt="{\displaystyle G_{IC}}"></span>. The advantage using chevron notch specimen is due to the formation of a specified crack of well-defined length.<sup id="cite_ref-PKB2001_12-0" class="reference"><a href="#cite_note-PKB2001-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup> The disadvantage of the approach is that the gluing required for loading is time consuming and may induce data scatter due to misalignment.<sup id="cite_ref-VJL2005_8-4" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup> </p> <style data-mw-deduplicate="TemplateStyles:r1237032888/mw-parser-output/.tmulti">.mw-parser-output .tmulti .multiimageinner{display:flex;flex-direction:column}.mw-parser-output .tmulti .trow{display:flex;flex-direction:row;clear:left;flex-wrap:wrap;width:100%;box-sizing:border-box}.mw-parser-output .tmulti .tsingle{margin:1px;float:left}.mw-parser-output .tmulti .theader{clear:both;font-weight:bold;text-align:center;align-self:center;background-color:transparent;width:100%}.mw-parser-output .tmulti .thumbcaption{background-color:transparent}.mw-parser-output .tmulti .text-align-left{text-align:left}.mw-parser-output .tmulti .text-align-right{text-align:right}.mw-parser-output .tmulti .text-align-center{text-align:center}@media all and (max-width:720px){.mw-parser-output .tmulti .thumbinner{width:100%!important;box-sizing:border-box;max-width:none!important;align-items:center}.mw-parser-output .tmulti .trow{justify-content:center}.mw-parser-output .tmulti .tsingle{float:none!important;max-width:100%!important;box-sizing:border-box;text-align:center}.mw-parser-output .tmulti .tsingle .thumbcaption{text-align:left}.mw-parser-output .tmulti .trow>.thumbcaption{text-align:center}}@media screen{html.skin-theme-clientpref-night .mw-parser-output .tmulti .multiimageinner img{background-color:white}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .tmulti .multiimageinner img{background-color:white}}</style><div class="thumb tmulti tleft"><div class="thumbinner multiimageinner" style="width:792px;max-width:792px"><div class="trow"><div class="theader">Chevron test</div></div><div class="trow"><div class="tsingle" style="width:264px;max-width:264px"><div class="thumbimage" style="height:198px;overflow:hidden"><span typeof="mw:File"><a href="/wiki/File:A-chevron2.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/c/cd/A-chevron2.png/262px-A-chevron2.png" decoding="async" width="262" height="198" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/c/cd/A-chevron2.png/393px-A-chevron2.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/c/cd/A-chevron2.png/524px-A-chevron2.png 2x" data-file-width="531" data-file-height="401" /></a></span></div><div class="thumbcaption">Scheme of a chevron test setup.<sup id="cite_ref-VJL2005_8-5" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup></div></div><div class="tsingle" style="width:281px;max-width:281px"><div class="thumbimage" style="height:198px;overflow:hidden"><span typeof="mw:File"><a href="/wiki/File:A-chevron1.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/8/8b/A-chevron1.png/279px-A-chevron1.png" decoding="async" width="279" height="198" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/8/8b/A-chevron1.png/419px-A-chevron1.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/8/8b/A-chevron1.png/558px-A-chevron1.png 2x" data-file-width="607" data-file-height="431" /></a></span></div><div class="thumbcaption">Scheme of a chevron notched specimen.<sup id="cite_ref-VJL2005_8-6" class="reference"><a href="#cite_note-VJL2005-8"><span class="cite-bracket">[</span>8<span class="cite-bracket">]</span></a></sup></div></div><div class="tsingle" style="width:241px;max-width:241px"><div class="thumbimage" style="height:198px;overflow:hidden"><span typeof="mw:File"><a href="/wiki/File:A-chevron3.png" class="mw-file-description"><img alt="" src="//upload.wikimedia.org/wikipedia/commons/thumb/e/e4/A-chevron3.png/239px-A-chevron3.png" decoding="async" width="239" height="198" class="mw-file-element" srcset="//upload.wikimedia.org/wikipedia/commons/thumb/e/e4/A-chevron3.png/359px-A-chevron3.png 1.5x, //upload.wikimedia.org/wikipedia/commons/thumb/e/e4/A-chevron3.png/478px-A-chevron3.png 2x" data-file-width="683" data-file-height="567" /></a></span></div><div class="thumbcaption">Schematic chevron notched specimen with cracked area according to Bagdahn.<sup id="cite_ref-PKB2001_12-1" class="reference"><a href="#cite_note-PKB2001-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup></div></div></div></div></div> <div style="clear:both;" class=""></div> <div class="mw-heading mw-heading3"><h3 id="Micro_chevron_(MC)_test"><span id="Micro_chevron_.28MC.29_test"></span>Micro chevron (MC) test</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=9" title="Edit section: Micro chevron (MC) test"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>The <b>micro chevron (MC) test</b> is a modification of the chevron test using a specimen of defined and reproducible size and shape. The test allows the determination of the critical energy release rate <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/f4083ed9fc7abdf16a2aae5f191f2604c1a58952" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.137ex; height:2.509ex;" alt="{\displaystyle G_{IC}}"></span> and the critical fracture toughness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fbe013a706bc20c6ba9bca0ce3273867604cbb88" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.283ex; height:2.509ex;" alt="{\displaystyle K_{IC}}"></span>.<sup id="cite_ref-SRM+2009_13-0" class="reference"><a href="#cite_note-SRM+2009-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> It is commonly used to characterize the wafer bond strength as well as the reliability. The reliability characterization is determined based on the fracture mechanical evaluation of critical failure.<sup id="cite_ref-NGM2008_9-1" class="reference"><a href="#cite_note-NGM2008-9"><span class="cite-bracket">[</span>9<span class="cite-bracket">]</span></a></sup> The evaluation is determined by analyzing the fracture toughness as well as the resistance against crack propagation.<sup id="cite_ref-WMW+2010_10-1" class="reference"><a href="#cite_note-WMW+2010-10"><span class="cite-bracket">[</span>10<span class="cite-bracket">]</span></a></sup> </p><p>The fracture toughness allows comparison of the strength properties independent on the particular specimen geometry.<sup id="cite_ref-PKB2001_12-2" class="reference"><a href="#cite_note-PKB2001-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup> In addition, bond strength of the bonded interface can be determined.<sup id="cite_ref-WFJ+2008_11-2" class="reference"><a href="#cite_note-WFJ+2008-11"><span class="cite-bracket">[</span>11<span class="cite-bracket">]</span></a></sup> The chevron specimen is designed out of bonded stripes in shape of a triangle. The space of the tip of the chevron structure triangle is used as lever arm for the applied force. This reduces the force required to initiate the crack. The dimensions of the micro chevron structures are in the range of several millimeters and usually an angle of 70 ° chevron notch.<sup id="cite_ref-SRM+2009_13-1" class="reference"><a href="#cite_note-SRM+2009-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> This chevron pattern is fabricated using wet or reactive ion etching.<sup id="cite_ref-PKB2001_12-3" class="reference"><a href="#cite_note-PKB2001-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup> </p><p>The MC test is applied with special specimen stamp glued onto the non-bonded edge of the processed structures. The specimen is loaded in a tensile tester and the load is applied perpendicular to the bonded area. When the load equals the maximum bearable conditions, a crack is initiated at the tip of the chevron notch.´<sup id="cite_ref-SRM+2009_13-2" class="reference"><a href="#cite_note-SRM+2009-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> </p><p>By increasing the mechanical stress by means of a higher loading, two opposing effects can be observed. First, the resistance against the crack expansion increases based on the increasing bonding of the triangular shaped first half of the chevron pattern. Second, the lever arm is getting longer with increased crack length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle a}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>a</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle a}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/ffd2487510aa438433a2579450ab2b3d557e5edc" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.23ex; height:1.676ex;" alt="{\displaystyle a}"></span>. From the critical crack length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle a_{c}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>a</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>c</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle a_{c}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/81c3b8855d2273be442a8cdddc9943fd2af67bab" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.174ex; height:2.009ex;" alt="{\displaystyle a_{c}}"></span> an instable crack expansion and the destruction of the specimen is initiated.<sup id="cite_ref-SRM+2009_13-3" class="reference"><a href="#cite_note-SRM+2009-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> The critical crack length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle a_{c}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>a</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>c</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle a_{c}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/81c3b8855d2273be442a8cdddc9943fd2af67bab" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.174ex; height:2.009ex;" alt="{\displaystyle a_{c}}"></span> corresponds to the maximum force <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle F_{max}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>F</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>m</mi> <mi>a</mi> <mi>x</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle F_{max}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/5a8c477b11ba1e52845d53c6816b7bd97d79ce3c" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.979ex; height:2.509ex;" alt="{\displaystyle F_{max}}"></span> in a force-length-diagram and a minimum of the geometric function <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle Y_{MIN}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>Y</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>M</mi> <mi>I</mi> <mi>N</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle Y_{MIN}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/7b58ee69bf8a60a7a6e8fe28dc60db366183ad79" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:5.597ex; height:2.509ex;" alt="{\displaystyle Y_{MIN}}"></span>.<sup id="cite_ref-PDE+2006_14-0" class="reference"><a href="#cite_note-PDE+2006-14"><span class="cite-bracket">[</span>14<span class="cite-bracket">]</span></a></sup> </p><p>The fracture toughness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/fbe013a706bc20c6ba9bca0ce3273867604cbb88" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.283ex; height:2.509ex;" alt="{\displaystyle K_{IC}}"></span> can be calculated with maximum force, width <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle w}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>w</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle w}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/88b1e0c8e1be5ebe69d18a8010676fa42d7961e6" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.664ex; height:1.676ex;" alt="{\displaystyle w}"></span> and thickness <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle t}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>t</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle t}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/65658b7b223af9e1acc877d848888ecdb4466560" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:0.84ex; height:2.009ex;" alt="{\displaystyle t}"></span>: </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle K_{IC}={\frac {F_{MAX}}{t\cdot {\sqrt {w}}}}\cdot Y_{MIN}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <msub> <mi>F</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>M</mi> <mi>A</mi> <mi>X</mi> </mrow> </msub> <mrow> <mi>t</mi> <mo>⋅</mo> <mrow class="MJX-TeXAtom-ORD"> <msqrt> <mi>w</mi> </msqrt> </mrow> </mrow> </mfrac> </mrow> <mo>⋅</mo> <msub> <mi>Y</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>M</mi> <mi>I</mi> <mi>N</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle K_{IC}={\frac {F_{MAX}}{t\cdot {\sqrt {w}}}}\cdot Y_{MIN}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/d0791102b49a7e8f8b5a5cfe8334ad50a77f7b22" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.838ex; width:21.613ex; height:6.343ex;" alt="{\displaystyle K_{IC}={\frac {F_{MAX}}{t\cdot {\sqrt {w}}}}\cdot Y_{MIN}}"></span> </p><p>The maximum force <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle F_{MAX}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>F</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>M</mi> <mi>A</mi> <mi>X</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle F_{MAX}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/5be4f18b4a01b46d69e955dd28bc1fe32903d875" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:6.086ex; height:2.509ex;" alt="{\displaystyle F_{MAX}}"></span> is determined during the test and the minimal stress intensity coefficient <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle Y_{MIN}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>Y</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>M</mi> <mi>I</mi> <mi>N</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle Y_{MIN}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/7b58ee69bf8a60a7a6e8fe28dc60db366183ad79" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:5.597ex; height:2.509ex;" alt="{\displaystyle Y_{MIN}}"></span> is determined by FE Simulation.<sup id="cite_ref-VWS+2010_15-0" class="reference"><a href="#cite_note-VWS+2010-15"><span class="cite-bracket">[</span>15<span class="cite-bracket">]</span></a></sup> In addition, the energy release rate <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/f4083ed9fc7abdf16a2aae5f191f2604c1a58952" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:4.137ex; height:2.509ex;" alt="{\displaystyle G_{IC}}"></span> can be determined with <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle E}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>E</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle E}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/4232c9de2ee3eec0a9c0a19b15ab92daa6223f9b" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.776ex; height:2.176ex;" alt="{\displaystyle E}"></span> as modulus of elasticity and <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle v}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>v</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle v}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/e07b00e7fc0847fbd16391c778d65bc25c452597" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.128ex; height:1.676ex;" alt="{\displaystyle v}"></span> as Poisson's ratio in the following way.´<sup id="cite_ref-SRM+2009_13-4" class="reference"><a href="#cite_note-SRM+2009-13"><span class="cite-bracket">[</span>13<span class="cite-bracket">]</span></a></sup> </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle G_{IC}={\frac {K_{IC}^{2}}{E}}\cdot (1-v^{2})}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>G</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> </msub> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <msubsup> <mi>K</mi> <mrow class="MJX-TeXAtom-ORD"> <mi>I</mi> <mi>C</mi> </mrow> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msubsup> <mi>E</mi> </mfrac> </mrow> <mo>⋅</mo> <mo stretchy="false">(</mo> <mn>1</mn> <mo>−</mo> <msup> <mi>v</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msup> <mo stretchy="false">)</mo> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle G_{IC}={\frac {K_{IC}^{2}}{E}}\cdot (1-v^{2})}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/b0349c2ab9c872a9ad15f5d7387aec58de72c72d" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -1.838ex; width:22.027ex; height:6.009ex;" alt="{\displaystyle G_{IC}={\frac {K_{IC}^{2}}{E}}\cdot (1-v^{2})}"></span> </p><p>The advantage of this test is the high accuracy compared to other tensile or bend tests. It is an effective, reliable and precise approach for the development of wafer bonds as well as for the quality control of the micro mechanical device production.<sup id="cite_ref-PKB2001_12-4" class="reference"><a href="#cite_note-PKB2001-12"><span class="cite-bracket">[</span>12<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="Bond_testing">Bond testing</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=10" title="Edit section: Bond testing"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Bond strength measurement or bond testing is performed in two basic methods: pull testing and shear testing. Both can be done destructively, which is more common (also on wafer level), or non destructively. They are used to determine the integrity of materials and manufacturing procedures, and to evaluate the overall performance of the bonding frame, as well as to compare various bonding technologies with each other. The success or failure of the bond is based on measuring the applied force, the failure type due to the applied force and the visual appearance of the residual medium used. </p><p>A development in bond strength testing of adhesively bonded composite structures is <a href="/w/index.php?title=Laser_bond_inspection&action=edit&redlink=1" class="new" title="Laser bond inspection (page does not exist)">laser bond inspection</a> (LBI). LBI provides a relative strength quotient derived from the fluence level of the laser energy delivered onto the material for the strength test compared to the strength of bonds previously mechanically tested at the same laser fluence. LBI provides nondestructive testing of bonds that were adequately prepared and meet engineering intent.<sup id="cite_ref-16" class="reference"><a href="#cite_note-16"><span class="cite-bracket">[</span>16<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading3"><h3 id="Pull_testing">Pull testing</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=11" title="Edit section: Pull testing"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <figure class="mw-default-size" typeof="mw:File/Thumb"><a href="/wiki/File:USB_Tweezers_CBP.jpg" class="mw-file-description"><img src="//upload.wikimedia.org/wikipedia/commons/9/9c/USB_Tweezers_CBP.jpg" decoding="async" width="171" height="145" class="mw-file-element" data-file-width="171" data-file-height="145" /></a><figcaption>USB Tweezers performing cold bump pull (CPB) on a bond tester</figcaption></figure><p>Measuring bond strength by pull testing is often the best way to get the failure mode in which you are interested. Additionally, and unlike a shear test, as the bond separates, the fracture surfaces are pulled away from each other, cleanly enabling accurate failure mode analysis. To pull a bond requires the substrate and interconnect to be gripped; because of size, shape and material properties, this can be difficult, particularly for the interconnection. In these cases, a set of accurately formed and aligned tweezer tips with precision control of their opening and closing is likely to make the difference between success and failure.<sup id="cite_ref-sykes_17-0" class="reference"><a href="#cite_note-sykes-17"><span class="cite-bracket">[</span>17<span class="cite-bracket">]</span></a></sup> </p><p>The most common type of pull tests is a Wire Pull test. <a rel="nofollow" class="external text" href="http://www.wirepull.how/">Wire Pull testing</a> applies an upward force under the wire, effectively pulling it away from the substrate or die. </p> <div class="mw-heading mw-heading3"><h3 id="Shear_testing">Shear testing</h3><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=12" title="Edit section: Shear testing"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p>Shear testing is the alternative method to determine the strength a bond can withstand. Various variants of shear testing exist. Like with pull testing, the objective is to recreate the failure mode of interest in the test. If that is not possible, the operator should focus on putting the highest possible load on the bond.<sup id="cite_ref-sykes2_18-0" class="reference"><a href="#cite_note-sykes2-18"><span class="cite-bracket">[</span>18<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="White_Light_Interferometers">White Light Interferometers</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=13" title="Edit section: White Light Interferometers"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <p><b>White light interferometry</b> is commonly used for detecting deformations of the wafer surface based on optical measurements. Low-coherence light from a white light source passes through the optical top wafer, e.g. glass wafer, to the bond interface. Usually there are three different white light interferometers: </p> <ul><li>diffraction grating interferometers</li> <li>vertical scanning or coherence probe interferometers</li> <li>white light scatter plate interferometers</li></ul> <p>For the white light interferometer the position of zero order interference fringe and the spacing of the interference fringes needs to be independent of wavelength.<sup id="cite_ref-Wya2002_19-0" class="reference"><a href="#cite_note-Wya2002-19"><span class="cite-bracket">[</span>19<span class="cite-bracket">]</span></a></sup> White light interferometry is utilized to detect deformations of the wafer. Low coherence light from a white light source passes through the top wafer to the sensor. The white light is generated by a halogen lamp and modulated. The spectrum of the reflected light of the sensor cavity is detected by a spectrometer. The captured spectrum is used to obtain the cavity length of the sensor. The cavity length <span class="texhtml">d</span> corresponds to the applied pressure and is determined by the spectrum of the reflection of the light of the sensor. This pressure value is subsequently displayed on a screen. The cavity length <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle d}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>d</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle d}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/e85ff03cbe0c7341af6b982e47e9f90d235c66ab" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.216ex; height:2.176ex;" alt="{\displaystyle d}"></span> is determined using </p><p><span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle d={\frac {\lambda _{1}\lambda _{2}}{2n(\lambda _{2}-\lambda _{1})}}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>d</mi> <mo>=</mo> <mrow class="MJX-TeXAtom-ORD"> <mfrac> <mrow> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>1</mn> </mrow> </msub> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msub> </mrow> <mrow> <mn>2</mn> <mi>n</mi> <mo stretchy="false">(</mo> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msub> <mo>−</mo> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>1</mn> </mrow> </msub> <mo stretchy="false">)</mo> </mrow> </mfrac> </mrow> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle d={\frac {\lambda _{1}\lambda _{2}}{2n(\lambda _{2}-\lambda _{1})}}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/8f4c83ab53c8842b83cc73dd4bd3d46a4e46cd85" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -2.671ex; width:17.176ex; height:6.176ex;" alt="{\displaystyle d={\frac {\lambda _{1}\lambda _{2}}{2n(\lambda _{2}-\lambda _{1})}}}"></span> </p><p>with <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle n}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <mi>n</mi> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle n}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/a601995d55609f2d9f5e233e36fbe9ea26011b3b" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.338ex; width:1.395ex; height:1.676ex;" alt="{\displaystyle n}"></span> as refractive index of the sensor cavity material, <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \lambda _{1}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>1</mn> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \lambda _{1}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/571a423bece8f29bcd1b48572f18dd4f6213dce2" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.409ex; height:2.509ex;" alt="{\displaystyle \lambda _{1}}"></span> and <span class="mwe-math-element"><span class="mwe-math-mathml-inline mwe-math-mathml-a11y" style="display: none;"><math xmlns="http://www.w3.org/1998/Math/MathML" alttext="{\displaystyle \lambda _{2}}"> <semantics> <mrow class="MJX-TeXAtom-ORD"> <mstyle displaystyle="true" scriptlevel="0"> <msub> <mi>λ</mi> <mrow class="MJX-TeXAtom-ORD"> <mn>2</mn> </mrow> </msub> </mstyle> </mrow> <annotation encoding="application/x-tex">{\displaystyle \lambda _{2}}</annotation> </semantics> </math></span><img src="https://wikimedia.org/api/rest_v1/media/math/render/svg/6b668a1bd1e8ab9452ca975b7497546e7c1ba187" class="mwe-math-fallback-image-inline mw-invert skin-invert" aria-hidden="true" style="vertical-align: -0.671ex; width:2.409ex; height:2.509ex;" alt="{\displaystyle \lambda _{2}}"></span> as adjacent peaks in the reflection spectrum. </p><p>The advantage of using white light interferometry as characterization method is the influence reduction of the bending loss.<sup id="cite_ref-THE2005_20-0" class="reference"><a href="#cite_note-THE2005-20"><span class="cite-bracket">[</span>20<span class="cite-bracket">]</span></a></sup> </p> <div class="mw-heading mw-heading2"><h2 id="References">References</h2><span class="mw-editsection"><span class="mw-editsection-bracket">[</span><a href="/w/index.php?title=Wafer_bond_characterization&action=edit&section=14" title="Edit section: References"><span>edit</span></a><span class="mw-editsection-bracket">]</span></span></div> <div class="mw-references-wrap mw-references-columns"><ol class="references"> <li id="cite_note-KGH+2010-1"><span class="mw-cite-backlink">^ <a href="#cite_ref-KGH+2010_1-0"><sup><i><b>a</b></i></sup></a> <a href="#cite_ref-KGH+2010_1-1"><sup><i><b>b</b></i></sup></a></span> <span class="reference-text"><style data-mw-deduplicate="TemplateStyles:r1238218222">.mw-parser-output cite.citation{font-style:inherit;word-wrap:break-word}.mw-parser-output .citation q{quotes:"\"""\"""'""'"}.mw-parser-output .citation:target{background-color:rgba(0,127,255,0.133)}.mw-parser-output .id-lock-free.id-lock-free a{background:url("//upload.wikimedia.org/wikipedia/commons/6/65/Lock-green.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-limited.id-lock-limited a,.mw-parser-output .id-lock-registration.id-lock-registration a{background:url("//upload.wikimedia.org/wikipedia/commons/d/d6/Lock-gray-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .id-lock-subscription.id-lock-subscription a{background:url("//upload.wikimedia.org/wikipedia/commons/a/aa/Lock-red-alt-2.svg")right 0.1em center/9px no-repeat}.mw-parser-output .cs1-ws-icon a{background:url("//upload.wikimedia.org/wikipedia/commons/4/4c/Wikisource-logo.svg")right 0.1em center/12px no-repeat}body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-free a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-limited a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-registration a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .id-lock-subscription a,body:not(.skin-timeless):not(.skin-minerva) .mw-parser-output .cs1-ws-icon a{background-size:contain;padding:0 1em 0 0}.mw-parser-output .cs1-code{color:inherit;background:inherit;border:none;padding:inherit}.mw-parser-output .cs1-hidden-error{display:none;color:var(--color-error,#d33)}.mw-parser-output .cs1-visible-error{color:var(--color-error,#d33)}.mw-parser-output .cs1-maint{display:none;color:#085;margin-left:0.3em}.mw-parser-output .cs1-kern-left{padding-left:0.2em}.mw-parser-output .cs1-kern-right{padding-right:0.2em}.mw-parser-output .citation .mw-selflink{font-weight:inherit}@media screen{.mw-parser-output .cs1-format{font-size:95%}html.skin-theme-clientpref-night .mw-parser-output .cs1-maint{color:#18911f}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .cs1-maint{color:#18911f}}</style><cite id="CITEREFKhan,_M._F.Ghavanini,_F._A.Haasl,_S.Löfgren,_L.2010" class="citation journal cs1">Khan, M. 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navbar-mini"><ul><li class="nv-view"><a href="/wiki/Template:Wafer_bonding" title="Template:Wafer bonding"><abbr title="View this template">v</abbr></a></li><li class="nv-talk"><a href="/wiki/Template_talk:Wafer_bonding" title="Template talk:Wafer bonding"><abbr title="Discuss this template">t</abbr></a></li><li class="nv-edit"><a href="/wiki/Special:EditPage/Template:Wafer_bonding" title="Special:EditPage/Template:Wafer bonding"><abbr title="Edit this template">e</abbr></a></li></ul></div><div id="Wafer_bonding_techniques_used_in_ICs,_MEMS,_and_NEMS" style="font-size:114%;margin:0 4em"><a href="/wiki/Wafer_bonding" title="Wafer bonding">Wafer bonding</a> techniques used in <a href="/wiki/Integrated_circuit" title="Integrated circuit">ICs</a>, <a href="/wiki/Microelectromechanical_systems" class="mw-redirect" title="Microelectromechanical systems">MEMS</a>, and <a href="/wiki/Nanoelectromechanical_systems" title="Nanoelectromechanical systems">NEMS</a></div></th></tr><tr><th scope="row" class="navbox-group" style="width:1%">Substrate bonding</th><td class="navbox-list-with-group navbox-list navbox-odd hlist" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Direct_bonding" title="Direct bonding">Direct bonding</a></li> <li><a href="/wiki/Plasma-activated_bonding" title="Plasma-activated bonding">Plasma-activated bonding</a></li> <li><a href="/wiki/Anodic_bonding" title="Anodic bonding">Anodic bonding</a></li> <li><a href="/wiki/Eutectic_bonding" title="Eutectic bonding">Eutectic bonding</a></li> <li><a href="/wiki/Glass_frit_bonding" title="Glass frit bonding">Glass frit bonding</a></li> <li><a href="/wiki/Adhesive_bonding_of_semiconductor_wafers" title="Adhesive bonding of semiconductor wafers">Adhesive bonding</a></li> <li><a href="/wiki/Thermocompression_bonding" title="Thermocompression bonding">Thermocompression bonding</a></li> <li><a href="/wiki/Transient_liquid_phase_diffusion_bonding" title="Transient liquid phase diffusion bonding">Transient liquid phase diffusion bonding</a></li> <li><a href="/wiki/Surface_activated_bonding" title="Surface activated bonding">Surface activated bonding</a></li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">Connections</th><td class="navbox-list-with-group navbox-list navbox-even hlist" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a href="/wiki/Compliant_bonding" title="Compliant bonding">Compliant bonding</a></li> <li><a href="/wiki/Wire_bonding" title="Wire bonding">Wire bonding</a></li> <li><a href="/wiki/Ball_bonding" title="Ball bonding">Ball bonding</a></li> <li><a href="/wiki/Thermosonic_bonding" title="Thermosonic bonding">Thermosonic bonding</a></li> <li><a href="/wiki/Tape-automated_bonding" title="Tape-automated bonding">Tape-automated bonding</a> (TAB)</li></ul> </div></td></tr><tr><th scope="row" class="navbox-group" style="width:1%">See also</th><td class="navbox-list-with-group navbox-list navbox-odd hlist" style="width:100%;padding:0"><div style="padding:0 0.25em"> <ul><li><a class="mw-selflink selflink">Wafer bond characterization</a></li></ul> </div></td></tr></tbody></table></div>    </div><noscript><img src="https://login.wikimedia.org/wiki/Special:CentralAutoLogin/start?type=1x1" alt="" width="1" height="1" style="border: none; position: absolute;"></noscript> <div class="printfooter" data-nosnippet="">Retrieved from "<a dir="ltr" href="https://en.wikipedia.org/w/index.php?title=Wafer_bond_characterization&oldid=1224493579">https://en.wikipedia.org/w/index.php?title=Wafer_bond_characterization&oldid=1224493579</a>"</div></div> <div id="catlinks" class="catlinks" data-mw="interface"><div id="mw-normal-catlinks" class="mw-normal-catlinks"><a href="/wiki/Help:Category" title="Help:Category">Categories</a>: <ul><li><a href="/wiki/Category:Electronics_manufacturing" title="Category:Electronics manufacturing">Electronics manufacturing</a></li><li><a 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