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class="share-wechat"><i class="icon icon-wechat"></i><span>微信</span></a> </div> <div class="content-box"> <h1 class="title" id="title">国产半导体专用光刻胶领域实现重大突破，已通过量产验证！</h1> <div class="info"> <span style="padding-right:1em">日期：2024-10-15</span> <span id="hits">阅读：730</span> </div> <div class="introduce">核心提示：武汉太紫微光电科技有限公司推出的T150 A光刻胶产品，已通过半导体工艺量产验证</div><div id="content"><div class="content" id="article"><p> <span style="text-indent: 2em;">近日，光谷企业在半导体专用光刻胶领域实现重大突破：武汉太紫微光电科技有限公司（以下简称“太紫微公司”）推出的T150 A光刻胶产品，已通过半导体工艺量产验证，实现配方全自主设计，有望开创国内半导体光刻制造新局面。</span></p> <p style="text-align: center;"><span style="text-indent: 2em;"><img src="http://www.casmita.com/file/upload/202410/15/152143462.jpg" width="668" height="225" alt="" /></span></p> <p>该产品对标国际头部企业主流KrF光刻胶系列。相较于被业内称之为“妖胶”的国外同系列产品UV1610，T150 A在光刻工艺中表现出的极限分辨率达到120nm，且工艺宽容度更大，稳定性更高，坚膜后烘留膜率优秀，其对后道刻蚀工艺表现更为友好，通过验证发现T150 A中密集图形经过刻蚀，下层介质的侧壁垂直度表现优异。</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/15/152232712.jpg" width="668" height="269" style="text-align: center;" alt="" /></p> <p>太紫微公司成立于2024年5月，由华中科技大学武汉光电国家研究中心团队创立。团队立足于关键光刻胶底层技术研发，在电子化学品领域深耕二十余载。</p> <p>企业负责人、英国皇家化学会会员、华中科技大学教授朱明强表示：“以原材料的开发为起点，最终获得具有自主知识产权的配方技术，这只是个开始，我们团队还会发展一系列应用于不同场景下的KrF与ArF光刻胶，为国内相关产业带来更多惊喜。”</p> <p style="text-align: center;"><img src="http://www.casmita.com/file/upload/202410/15/152247402.jpg" width="668" height="602" alt="" /></p> <p style="text-align: center;">太紫微核心研发团队成员（前排左一为朱明强教授）</p> <p>太紫微公司致力于半导体专用高端电子化学品材料的开发，并以新技术路线为半导体制造开辟新型先进光刻制造技术，同时为材料的分析与验证提供最全面的手段。</p> <p>“无论是从国内半导体产业崛起的背景来看，还是从摩尔定律演变的规律展望未来，‘百家争鸣’的局面已形成，光刻领域还会有很多新技术、新企业破茧成蝶，但拥有科技创新的力量是存活下去的必要前提。”太紫微外聘专家顾问表示。</p></div> </div> <div class="award"><div onclick="Go('http://www.casmita.com/member/award.php?mid=21&itemid=16842');">打赏</div></div><div id="comment" style="display:;"> <div class="block-head"><a href="http://www.casmita.com/comment/index.php?mid=21&itemid=16842"><b id="comment_count" class="px16 f_red">0</b> 条评论</a></div> <div 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