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Advanced 3D metrology solutions help overcome them.","breadcrumb":{"@id":"https://www.thermofisher.com/blog/semiconductors/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https://www.thermofisher.com/blog/semiconductors/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https://www.thermofisher.com/blog/semiconductors/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing/#primaryimage","url":"https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3.jpg","contentUrl":"https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3.jpg","width":669,"height":350,"caption":"Targeted memory array on a commercial 3D NAND Device"},{"@type":"BreadcrumbList","@id":"https://www.thermofisher.com/blog/semiconductors/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https://www.thermofisher.com/blog/semiconductors/"},{"@type":"ListItem","position":2,"name":"How Advanced Metrology Workflows Solve Critical 3D NAND Structure Challenges"}]},{"@type":"WebSite","@id":"https://www.thermofisher.com/blog/semiconductors/#website","url":"https://www.thermofisher.com/blog/semiconductors/","name":"Illuminating Semiconductors","description":"Semiconductor manufacturing stories and solutions about a more connected, more autonomous, and smarter world","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https://www.thermofisher.com/blog/semiconductors/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"},{"@type":"Person","@id":"https://www.thermofisher.com/blog/semiconductors/#/schema/person/c458b7294b0a978d6cfc33e886ec90c6","name":"Xiaoting Gu","image":{"@type":"ImageObject","inLanguage":"en-US","@id":"https://www.thermofisher.com/blog/semiconductors/#/schema/person/image/","url":"https://secure.gravatar.com/avatar/d27d9c2174853ad3c07882f7662ab8af?s=96&d=mm&r=g","contentUrl":"https://secure.gravatar.com/avatar/d27d9c2174853ad3c07882f7662ab8af?s=96&d=mm&r=g","caption":"Xiaoting Gu"},"url":"https://www.thermofisher.com/blog/author/xiaotinggu/"}]}</script>  <link rel='dns-prefetch' href='//www.thermofisher.com' /> <link rel='dns-prefetch' href='//stats.wp.com' /> <link rel='dns-prefetch' href='//use.fontawesome.com' /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » Feed" href="https://www.thermofisher.com/blog/semiconductors/feed/" /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » Comments Feed" href="https://www.thermofisher.com/blog/semiconductors/comments/feed/" /> <link rel="alternate" type="application/rss+xml" title="Illuminating Semiconductors » How Advanced Metrology Workflows Solve Critical 3D NAND Structure Challenges Comments Feed" href="https://www.thermofisher.com/blog/semiconductors/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing/feed/" />  <script src="https://cdn.optimizely.com/js/8156647427.js"></script>  <script> (function(h,o,t,j,a,r){ h.hj=h.hj||function(){(h.hj.q=h.hj.q||[]).push(arguments)}; h._hjSettings={hjid:373708,hjsv:5}; a=o.getElementsByTagName('head')[0]; r=o.createElement('script');r.async=1; r.src=t+h._hjSettings.hjid+j+h._hjSettings.hjsv; a.appendChild(r); })(window,document,'//static.hotjar.com/c/hotjar-','.js?sv='); </script>  <script src="//www.googletagmanager.com/gtag/js?id=G-TJ18KZWFVE" data-cfasync="false" data-wpfc-render="false" type="text/javascript" async></script> <script data-cfasync="false" data-wpfc-render="false" type="text/javascript"> var mi_version = '9.2.0'; var mi_track_user = true; var mi_no_track_reason = ''; var MonsterInsightsDefaultLocations = {"page_location":"https:\/\/admin.acceleratingscience.com\/semiconductors\/3d-nand-structure-3d-metrology-workflows-semiconductor-manufacturing\/"}; if ( typeof MonsterInsightsPrivacyGuardFilter === 'function' ) { var MonsterInsightsLocations = (typeof MonsterInsightsExcludeQuery === 'object') ? 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#7bdcb5;--wp--preset--color--vivid-green-cyan: #00d084;--wp--preset--color--pale-cyan-blue: #8ed1fc;--wp--preset--color--vivid-cyan-blue: #0693e3;--wp--preset--color--vivid-purple: #9b51e0;--wp--preset--gradient--vivid-cyan-blue-to-vivid-purple: linear-gradient(135deg,rgba(6,147,227,1) 0%,rgb(155,81,224) 100%);--wp--preset--gradient--light-green-cyan-to-vivid-green-cyan: linear-gradient(135deg,rgb(122,220,180) 0%,rgb(0,208,130) 100%);--wp--preset--gradient--luminous-vivid-amber-to-luminous-vivid-orange: linear-gradient(135deg,rgba(252,185,0,1) 0%,rgba(255,105,0,1) 100%);--wp--preset--gradient--luminous-vivid-orange-to-vivid-red: linear-gradient(135deg,rgba(255,105,0,1) 0%,rgb(207,46,46) 100%);--wp--preset--gradient--very-light-gray-to-cyan-bluish-gray: linear-gradient(135deg,rgb(238,238,238) 0%,rgb(169,184,195) 100%);--wp--preset--gradient--cool-to-warm-spectrum: linear-gradient(135deg,rgb(74,234,220) 0%,rgb(151,120,209) 20%,rgb(207,42,186) 40%,rgb(238,44,130) 60%,rgb(251,105,98) 80%,rgb(254,248,76) 100%);--wp--preset--gradient--blush-light-purple: linear-gradient(135deg,rgb(255,206,236) 0%,rgb(152,150,240) 100%);--wp--preset--gradient--blush-bordeaux: linear-gradient(135deg,rgb(254,205,165) 0%,rgb(254,45,45) 50%,rgb(107,0,62) 100%);--wp--preset--gradient--luminous-dusk: linear-gradient(135deg,rgb(255,203,112) 0%,rgb(199,81,192) 50%,rgb(65,88,208) 100%);--wp--preset--gradient--pale-ocean: linear-gradient(135deg,rgb(255,245,203) 0%,rgb(182,227,212) 50%,rgb(51,167,181) 100%);--wp--preset--gradient--electric-grass: linear-gradient(135deg,rgb(202,248,128) 0%,rgb(113,206,126) 100%);--wp--preset--gradient--midnight: linear-gradient(135deg,rgb(2,3,129) 0%,rgb(40,116,252) 100%);--wp--preset--font-size--small: 13px;--wp--preset--font-size--medium: 20px;--wp--preset--font-size--large: 36px;--wp--preset--font-size--x-large: 42px;--wp--preset--spacing--20: 0.44rem;--wp--preset--spacing--30: 0.67rem;--wp--preset--spacing--40: 1rem;--wp--preset--spacing--50: 1.5rem;--wp--preset--spacing--60: 2.25rem;--wp--preset--spacing--70: 3.38rem;--wp--preset--spacing--80: 5.06rem;--wp--preset--shadow--natural: 6px 6px 9px rgba(0, 0, 0, 0.2);--wp--preset--shadow--deep: 12px 12px 50px rgba(0, 0, 0, 0.4);--wp--preset--shadow--sharp: 6px 6px 0px rgba(0, 0, 0, 0.2);--wp--preset--shadow--outlined: 6px 6px 0px -3px rgba(255, 255, 255, 1), 6px 6px rgba(0, 0, 0, 1);--wp--preset--shadow--crisp: 6px 6px 0px rgba(0, 0, 0, 1);}:where(.is-layout-flex){gap: 0.5em;}:where(.is-layout-grid){gap: 0.5em;}body .is-layout-flex{display: flex;}.is-layout-flex{flex-wrap: wrap;align-items: center;}.is-layout-flex > :is(*, div){margin: 0;}body .is-layout-grid{display: grid;}.is-layout-grid > :is(*, div){margin: 0;}:where(.wp-block-columns.is-layout-flex){gap: 2em;}:where(.wp-block-columns.is-layout-grid){gap: 2em;}:where(.wp-block-post-template.is-layout-flex){gap: 1.25em;}:where(.wp-block-post-template.is-layout-grid){gap: 1.25em;}.has-black-color{color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-color{color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-color{color: var(--wp--preset--color--white) !important;}.has-pale-pink-color{color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-color{color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-color{color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-color{color: var(--wp--preset--color--luminous-vivid-amber) !important;}.has-light-green-cyan-color{color: var(--wp--preset--color--light-green-cyan) !important;}.has-vivid-green-cyan-color{color: var(--wp--preset--color--vivid-green-cyan) !important;}.has-pale-cyan-blue-color{color: var(--wp--preset--color--pale-cyan-blue) !important;}.has-vivid-cyan-blue-color{color: var(--wp--preset--color--vivid-cyan-blue) !important;}.has-vivid-purple-color{color: var(--wp--preset--color--vivid-purple) !important;}.has-black-background-color{background-color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-background-color{background-color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-background-color{background-color: var(--wp--preset--color--white) !important;}.has-pale-pink-background-color{background-color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-background-color{background-color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-background-color{background-color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-background-color{background-color: var(--wp--preset--color--luminous-vivid-amber) !important;}.has-light-green-cyan-background-color{background-color: var(--wp--preset--color--light-green-cyan) !important;}.has-vivid-green-cyan-background-color{background-color: var(--wp--preset--color--vivid-green-cyan) !important;}.has-pale-cyan-blue-background-color{background-color: var(--wp--preset--color--pale-cyan-blue) !important;}.has-vivid-cyan-blue-background-color{background-color: var(--wp--preset--color--vivid-cyan-blue) !important;}.has-vivid-purple-background-color{background-color: var(--wp--preset--color--vivid-purple) !important;}.has-black-border-color{border-color: var(--wp--preset--color--black) !important;}.has-cyan-bluish-gray-border-color{border-color: var(--wp--preset--color--cyan-bluish-gray) !important;}.has-white-border-color{border-color: var(--wp--preset--color--white) !important;}.has-pale-pink-border-color{border-color: var(--wp--preset--color--pale-pink) !important;}.has-vivid-red-border-color{border-color: var(--wp--preset--color--vivid-red) !important;}.has-luminous-vivid-orange-border-color{border-color: var(--wp--preset--color--luminous-vivid-orange) !important;}.has-luminous-vivid-amber-border-color{border-color: var(--wp--preset--color--luminous-vivid-amber) 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3D NAND Structure Challenges"><header class="entry-header"><h1 class="entry-title">How Advanced Metrology Workflows Solve Critical 3D NAND Structure Challenges</h1> <span class="post-info-author"> By <a href="https://www.thermofisher.com/blog/author/xiaotinggu/" title="Posts by Xiaoting Gu" rel="author">Xiaoting Gu</a> </span> <span class="post-info-date"> 02.08.2023 </span> </header><div class="entry-content"><h2 style="font-size: 50%;height: 5px;color: white">Advanced metrology for 3D NAND structure manufacturing</h2> <p><em>In this blog post, learn how the design of a modern 3D NAND structure creates unique semiconductor manufacturing challenges, and the advanced 3D metrology solutions available to overcome them. </em></p> <p><em>Additional resources:</em></p> <ul> <li><a href="https://ter.li/ux5f09"><em>Semiconductor 3D NAND whitepaper</em></a></li> <li><a href="https://www.thermofisher.com/blog/semiconductors/3d-nand-flash-technology/"><em>3D NAND Flash Technology blog post</em></a></li> </ul> <p>Next-generation 3D NAND devices are getting taller with more layers of stacked memory cells in the vertical direction. Meanwhile, the pitch size between the memory cells continues to shrink in the horizontal direction. This three-dimensional scaling generates tall and high-aspect-ratio (HAR) 3D NAND structures that create unique manufacturing and metrology challenges.</p> <div id="attachment_272" style="width: 2410px" class="wp-caption aligncenter"><img decoding="async" aria-describedby="caption-attachment-272" class="wp-image-272 size-full" title="3D NAND structure manufacturing challenges" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200.jpg" alt="3D NAND structure manufacturing challenges" width="2400" height="1200" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200.jpg 2400w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200-300x150.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200-1024x512.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200-768x384.jpg 768w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200-1536x768.jpg 1536w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-1_2400x1200-2048x1024.jpg 2048w" sizes="(max-width: 2400px) 100vw, 2400px" /><p id="caption-attachment-272" class="wp-caption-text">Figure 1. 3D NAND structure manufacturing challenges at each step</p></div> <h2 style="font-size: 100%"><strong>Identifying 3D NAND structure manufacturing concerns</strong></h2> <p>On the manufacturing side, 3D NAND devices go through several critical steps, including channel hole etch, cell deposition, die stacking, slit and staircase formation, etc. At each step, manufacturing requires a high degree of precision and process control. For instance, channel hole etch is a very exacting process that can be plagued by well-known issues such as bowing, tilt, twist, and incomplete etch as illustrated in figure 1. When these issues occur, they can result in columns touching and a corresponding bit failure.</p> <h2 style="font-size: 100%"><strong>Addressing 3D metrology data concerns</strong></h2> <p>On the metrology side, fabs struggle with understanding the behavior and performance of these HAR structures due to difficulties with accessing 3D metrology data. Current solutions, such as Optical CD (OCD) and CD-SAXS, cannot provide direct measurements of small critical dimensions (CDs) hidden within the 3D structure. The main limitation is that they don’t have the ability to provide direct metrology data to accurately analyze local CD, such as channel-hole-to-channel-hole variations. This information is especially important for process development and fast yield ramp.</p> <h2 style="font-size: 100%"><strong>SEM and TEM metrology workflows for solving 3D NAND structure challenges</strong></h2> <p>Fortunately, data of 3D NAND structures can be obtained by utilizing scanning electron microscopy (SEM) and transmission electron microscopy (TEM). At each process step, SEM-and-TEM-based workflows can provide direct measurements of the hidden CDs from the top to the bottom of the memory stack with sub-nanometer or sub-angstrom resolution. The data can then be used to create high-accuracy reference data, which is critical for process optimization and control. By sampling from multiple areas across the wafer, thousands of CDs per location are captured, allowing for the complete statistical analysis of critical process performance metrics like ONO layer thickness, bow CD, twist, tilt, and taper for a specific site.</p> <div id="attachment_274" style="width: 2410px" class="wp-caption aligncenter"><img decoding="async" aria-describedby="caption-attachment-274" class="wp-image-274 size-full" title="SEM and TEM based metrology for each NAND process step" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200.jpg" alt="SEM and TEM based metrology for each NAND process step" width="2400" height="1200" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200.jpg 2400w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200-300x150.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200-1024x512.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200-768x384.jpg 768w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200-1536x768.jpg 1536w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-2_2400x1200-2048x1024.jpg 2048w" sizes="(max-width: 2400px) 100vw, 2400px" /><p id="caption-attachment-274" class="wp-caption-text">Figure 2. SEM and TEM based metrology for each process step listed in Figure 1</p></div> <p>Depending upon the process step and the required accuracy, fabs can choose either SEM-or-TEM-based metrology workflows, but often choose a combination of both to provide the most comprehensive results and solve critical challenges for all process steps as shown in Figure 2.</p> <p>Although TEM-based metrology has the highest accuracy, for a few key process steps, SEM-based metrology with assistance of in-line focused ion beam (FIB) capabilities may provide a faster turnaround for obtaining high volume 3D metrology data.</p> <h2 style="font-size: 100%"><strong>Channel hole etch challenges: a SEM metrology case study</strong></h2> <p>Understanding and controlling the HAR etch process relies on through-stack metrology data from the 3D NAND structures top to the bottom. A SEM metrology workflow based upon Xenon plasma FIB delayering technique solves this metrology challenge by removing material layer-by-layer while acquiring SEM images for metrology measurements. In this example, a 30 um by 30 um region of the memory array was targeted on a commercial double-deck 3D NAND device (Figure 3), and the HAR structure was delayered.</p> <p>A proprietary gas chemistry was injected at the region of interest to ensure planarity and smoothness at each layer until the targeted region was delayered to the bottom of the memory stack. At each layer, a high-resolution SEM image was automatically acquired to provide metrology source images for the entire volume.</p> <p>The SEM images were then analyzed with Thermo Fisher Metrology and <a href="https://ter.li/zizwb9">Avizo Software</a> to extract key parameters for 3D profiling and reconstruction.</p> <div id="attachment_280" style="width: 460px" class="wp-caption aligncenter"><img loading="lazy" decoding="async" aria-describedby="caption-attachment-280" class="wp-image-280" title="Targeted memory array on a 3D NAND device" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3_2400x1200.jpg" alt="Targeted memory array on a 3D NAND device" width="450" height="304" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3_2400x1200.jpg 669w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3_2400x1200-300x203.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-3_2400x1200-96x65.jpg 96w" sizes="(max-width: 450px) 100vw, 450px" /><p id="caption-attachment-280" class="wp-caption-text">Figure 3. Targeted memory array on a commercial 3D NAND Device</p></div> <p>The data is shown in Figure 3 and was obtained by analyzing the nearest neighbors and centers of approximately 170 memory holes in global coordinates on the SEM images through 144 layers in the targeted region.</p> <p>The data tells us the average tilt increases through the stack and the local tilt varies between the left and right containers in Figure 3. In addition, the etch process is more consistent among all the memory holes at the top of the stack by showing less standard deviation compared to the bottom of each deck, and a mismatch of junction overlay (about 17 nm) at the deck interface was also captured by this technique.</p> <div id="attachment_279" style="width: 369px" class="wp-caption aligncenter"><img loading="lazy" decoding="async" aria-describedby="caption-attachment-279" class="wp-image-279 size-full" title="Highly localized CD variations on a 3D NAND device" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-4_2400x1200.jpg" alt="Highly localized CD variations on a 3D NAND device" width="359" height="415" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-4_2400x1200.jpg 359w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-4_2400x1200-260x300.jpg 260w" sizes="(max-width: 359px) 100vw, 359px" /><p id="caption-attachment-279" class="wp-caption-text">Figure 4. Highly localized CD variations on commercial 3D NAND device</p></div> <p>With this approach, fabs can make direct measurements on the memory cells through each layer to provide high-accuracy reference data for other metrology solutions, while also obtaining highly localized CD variation measurements other metrology solutions fail to provide.</p> <p>This methodology provides a clear and complete understanding of in-stack parameters to inform process trend and distribution analyses. The fully automated tilting stage enables a seamless workflow of FIB delayering and SEM imaging to obtain the 3D volume data with the highest throughput. The SEM also allows the users to stop on any layers through the stack for targeted sampling and comparison, which provides more sampling as needed.</p> <p><strong><em>Learn more about this SEM delayering and metrology workflow conducted on the Thermo Scientific Helios 5 PXL in our </em></strong><a href="https://ter.li/uonsnj"><em>2022 FCMN Conference presentation</em></a>*<strong><em> and our </em></strong><a href="https://ter.li/ux5f09"><em>semiconductor 3D NAND whitepaper</em></a>.</p> <p>Thermo Fisher Scientific is the world-leading <a href="https://ter.li/ejystu">metrology solution provider</a> for 3D NAND development and manufacturing including SEM and TEM based workflow solutions.</p> <div id="attachment_276" style="width: 2410px" class="wp-caption aligncenter"><img loading="lazy" decoding="async" aria-describedby="caption-attachment-276" class="wp-image-276 size-full" title="Infographic: Thermo Fisher Metrology Solutions for 3D NAND structure analysis" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200.jpg" alt="Infographic: Thermo Fisher Metrology Solutions for 3D NAND structure analysis" width="2400" height="1200" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200.jpg 2400w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200-300x150.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200-1024x512.jpg 1024w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200-768x384.jpg 768w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200-1536x768.jpg 1536w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/02/3D-NAND-Figure-5_2400x1200-2048x1024.jpg 2048w" sizes="(max-width: 2400px) 100vw, 2400px" /><p id="caption-attachment-276" class="wp-caption-text">Infographic: Thermo Fisher Metrology Solutions for 3D NAND</p></div> <p>*Paper presented at FCMN 2022: 3D Profiling Memory Holes with Delayering by co-authors: <span data-scheme-color="@222222,1," data-usefontface="false" data-contrast="none">Zhenxin Zhong, Minkook Kim, Umesh Adiga, Arun Sundar, Melissa Mullen, </span><span data-scheme-color="@222222,1," data-usefontface="false" data-contrast="none">Binxing</span><span data-scheme-color="@222222,1," data-usefontface="false" data-contrast="none"> Wu, Ruixin Zhang,</span> <span data-scheme-color="@222222,1," data-usefontface="false" data-contrast="none">Sean Zumwalt, David Tien</span></p> <p><a href="https://ter.li/rke9vg" target="_blank" rel="noopener"><img loading="lazy" decoding="async" class="aligncenter wp-image-518 size-full" src="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/07/Opt-in-Banner_1000x172.jpg" alt="Subscribe to Thermo Fisher Scientific's semiconductor updates and resources" width="1000" height="172" srcset="https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/07/Opt-in-Banner_1000x172.jpg 1000w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/07/Opt-in-Banner_1000x172-300x52.jpg 300w, https://www.thermofisher.com/blog/semiconductors/wp-content/uploads/sites/23/2023/07/Opt-in-Banner_1000x172-768x132.jpg 768w" sizes="(max-width: 1000px) 100vw, 1000px" /></a></p> <p>//</p> <p><em>Xiaoting is a Sr. Market Development Manager at Thermo Fisher Scientific</em></p> <p> </p>  <div class="jp-relatedposts"> <div class="related-post related-1"> <a 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