FX Large Sample AFM Series

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Supporting samples from small size up to 300 mm wafers, it is the ultimate solution for semiconductor manufacturing, materials research, quality assurance, and a range of other nanoscale applications including chemical analysis at nanoscale.</p> </div> <div class="button-box desktop-margin-top-40 mobile-margin-top-20" id="buttonBox_1" style="display: flex; flex-direction: row; justify-content: center; align-items: center;"> <div class="medium-btn-skyblue" style="margin: 10px;"> <a href="/en/contact/sales-inquiry" onclick="rfqClickFunc()">Request for Quote</a> </div> </div> </div> <script src="//pages.parksystems.com/js/forms2/js/forms2.min.js"></script> <div class="modal-container"> <div class="form-overlay" onclick="closeModal()"></div> <div class="form-modal"> <div class="close-btn" onclick="closeModal()">x</div> <div class="form-modal-content"> <form id="mktoForm_"></form> </div> </div> </div> </div> <script> var textColor = ""; var headerTitleSize = ""; var mainTitleSize = "44"; 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//스니펫.. if($("html").attr("lang") != "zh-CN"){ dataLayer.push({ 'event': 'download_brochure', 'item_name': toptitle, 'item_category': tArr2[0], 'item_category2': tArr2[1] }); } /////////////////////////////////////// closeModal(); }); form.onValidate(function () { // Get the values // var vals = form.vals(); // console.log(vals); }); MktoForms2.whenReady((form) => { $(".form-modal .spinner").hide(); }); }); $("#bmaketo").removeClass("mkto-btn-disabled"); openFlag = 1; } } function closeModal(){ $(".modal-container").removeClass("active"); $("#mktoForm_"+maketoID).empty(); openFlag = 0 } function brochureSlide() { document.querySelector(".avi_download").scrollIntoView({ block: 'center', inline: 'center', behavior: "smooth" }) } </script></div> <article class="articlecontainer responsivegrid product-custom1-area article-top40 article-bottom80 aem-GridColumn aem-GridColumn--default--12"> <div class="container-wrapper aem-grid-area"> <div class="content-wrapper"> <div class="productdetailaccordion"> <article class="article-content-padding"> <div class="container-wrapper"> <div class="product-content-box"> <article class="text-article-area AlignCenter width-max-1200px margin-0-auto"> <h1 class="element-h1">ㅤ</h1> <p class="sub-body2-text desktop-margin-top-40 mobile-margin-top-20"> </p> </article> <div class="accordion-wrapper aem-grid-area JustifyFlexBetween JustifyFlexStart desktop-margin-top-80 mobile-margin-top-40"> <ul class="accordion-menu desktop-col-5"> <li class="accordion-item active"> <a href="javascript:void(0)" class="label desktop-padding-left-20" data-event="accordion"> <h4 class="sub-h4-text">High-Precision & Versatile Performance</h4> </a> <div class="accordion-content"> <p class="element-p color-gray-900 element-padding20"> ‧ Advanced mechanical structure ensuring minimal thermal drift and great stability<br /> ‧ Wide sample capacity supporting from small sizes to 300 mm wafers<br /> ‧ Supports advanced nano-IR spectroscopy (PiFM) for precise chemical analysis </p> <img class="img-item desktop-margin-top-16 mobile-margin-top-16" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx-large-sample-afm-series/feature01.png" alt="High-Precision & Versatile Performance"/> </div> </li> <li class="accordion-item "> <a href="javascript:void(0)" class="label desktop-padding-left-20" data-event="accordion"> <h4 class="sub-h4-text">Simplified Workflow with Automated Features</h4> </a> <div class="accordion-content"> <p class="element-p color-gray-900 element-padding20"> ‧ Automatic Probe Exchange with 16 probe slots enhancing efficiency with multiple experiments in one setup<br /> ‧ Streamlines setup with automated tip mounting and laser beam alignment<br /> ‧ StepScanᵀᴹ feature for automated sequential measurements at multiple coordinates<br /> ‧ Macro optics for a large field of view (FOV), covering an entire 200 mm wafer sample<br /> </p> <img class="img-item desktop-margin-top-16 mobile-margin-top-16" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx-large-sample-afm-series/feature02.jpg" alt="Simplified Workflow with Automated Features"/> </div> </li> <li class="accordion-item "> <a href="javascript:void(0)" class="label desktop-padding-left-20" data-event="accordion"> <h4 class="sub-h4-text">Specialized Features for Industrial AFM Applications</h4> </a> <div class="accordion-content"> <p class="element-p color-gray-900 element-padding20"> ‧ Specialized industrial R&D applications with long-range surface roughness profiling, recipe-based routine measurements and a rotatable stage<br /> ‧ Improved sample visualization with optional advanced off-axis optical configurations<br /> ‧ Integrated industrial-grade facility featuring a signal tower with an emergency-off unit, a facility controller, and optional contamination control solutions using a fan filter unit<br /> </p> <img class="img-item desktop-margin-top-16 mobile-margin-top-16" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx-large-sample-afm-series/feature03.jpg" alt="Specialized Features for Industrial AFM Applications"/> </div> </li> </ul> <div class="accordion-img desktop-col-6"> <img class="img-item" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx-large-sample-afm-series/feature01.png" alt=""/> </div> </div> </div> </div> </article> </div> </div> </div> </article> <article class="articlecontainer responsivegrid bg-gray-100 article-top80 article-bottom80 aem-GridColumn aem-GridColumn--default--12"> <div class="container-wrapper aem-grid-area"> <div class="html"> <div class="container-wrapper aem-grid-area"> <div class="section productdetailsummary image article-top40 aem-GridColumn aem-GridColumn--default--12 cq-Editable-dom"> <article class="product-detail-area"> <div class="container-wrapper"> <div class="product-content-box"> <div class="product-img-box"> <img class="img-item" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx200/IR_tmb02.jpg" alt="FX40 with monitor"/> </div> <div class="text-box"> <h2 class="element-h2 element-weight400 color-black1">Park nano-IR Spectroscopy</h2> <h1 class="element-h1 element-weight700 color-black1 desktop-margin-top-20 mobile-margin-top-4">Advanced nano-IR Spectroscopy for Large Sample Chemical Analysis</h1> <p class="element-p color-gray-900 desktop-margin-top-32 mobile-margin-top-20">Park nano-IR is an integrated infrared (IR) spectroscopy and atomic force microscopy (AFM) system. The spectroscopy part provides chemical identification under 5 nm spatial resolution. It uses a non-contact technique offering the safest spectroscopy scanning and the best in industry spatial resolution. The microscopy part provides nanometer 3D topography with sub-angstrom height accuracy and mechanical property information to the user. <br /><br /> <button class="medium-btn-line-skyblue"><a href="/en/products/research-afm/nano-ir">Learn More ></a></button></p> <div class="button-box desktop-margin-top-40 mobile-margin-top-20"> </div> </div> </div> </div> </article> </div> </div> </div> </div> </article> <article class="articlecontainer responsivegrid article-top80 article-bottom80 aem-GridColumn aem-GridColumn--default--12"> <div class="container-wrapper aem-grid-area"> <div class="html"> <div class="section depthlist aem-GridColumn aem-GridColumn--default--12 cq-Editable-dom"> <article> <div class="container-wrapper"> <div class="aem-grid-area FlexWrap-wrap"> <a href="/en/products/research-afm/large-sample-afm/fx200" class="element-item desktop-col-8x2 bg-withe card-img-h280-wrap hover-image"> <div class="element-img"> <img class="img-item" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx200/park-fx200.png"/> </div> <div class="element-text element-border-box positionRelative FlexContainer JustifyFlexBetween AlignItemCenter gap-40 element-padding40 mobile-element-padding40_20 element-border1"> <div class="element-text-box"> <h4 class="sub-h4-text ellipsis-line-1">Park FX200</h4> <p class="sub-body3-text desktop-margin-top-12 mobile-margin-top-12">The Most Advanced AFM for Samples from Small Sizes Up to 200 mm</p> </div> <div class="icon-arrow-001"></div> </div> </a> <a href="/en/products/research-afm/large-sample-afm/fx300" class="element-item desktop-col-8x2 bg-withe card-img-h280-wrap hover-image"> <div class="element-img"> <img class="img-item" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx300/FX300_Shadow_LQ_v2.png"/> </div> <div class="element-text element-border-box positionRelative FlexContainer JustifyFlexBetween AlignItemCenter gap-40 element-padding40 mobile-element-padding40_20 element-border1"> <div class="element-text-box"> <h4 class="sub-h4-text ellipsis-line-1">Park FX300</h4> <p class="sub-body3-text desktop-margin-top-12 mobile-margin-top-12">Premier 300 mm AFM for Research, Quality Control, and Assurance</p> </div> <div class="icon-arrow-001"></div> </div> </a> </div> </div> </article></div> </div> </div> </article> <article class="articlecontainer responsivegrid bg-gray-100 article-top80 article-bottom80 aem-GridColumn aem-GridColumn--default--12"> <div class="container-wrapper aem-grid-area"> <div class="html"> <body> <div class="container-wrapper aem-grid-area"> <div class="section productdetailsummary image article-top40 aem-GridColumn aem-GridColumn--default--12 cq-Editable-dom"> <article class="product-detail-area"> <div class="container-wrapper"> <div class="product-content-box"> <div class="product-img-box"> <img class="img-item" src="/content/dam/parksystems/product/research-afm/large-sample-afm/fx-large-sample-afm-series/Appnote_tmb.jpg" alt="FX40 with monitor"/> </div> <div class="text-box"> <h2 class="element-h2 element-weight400 color-black1">Unlock the FX200 Advantage</h2> <h1 class="element-h1 element-weight700 color-black1 desktop-margin-top-20 mobile-margin-top-4">Discover how automated features are transforming AFM workflows</h1> <p class="element-p color-gray-900 desktop-margin-top-32 mobile-margin-top-20">The FX200 is the latest large-sample Atomic Force Microscope (AFM) designed to enhance nanoscale surface analysis with advanced automation. This technical note provides a detailed overview of its key features, automation capabilities, improved sample navigation, StepScan technology, and experimental management system.<br /><br /> <button class="medium-btn-line-skyblue"><a href="/en/learning-center/lc-detail.appnote_250218">Read More ></a></button> </p></div> </div> </div> </article></div> </div> </body> </div> </div> </article> <article class="articlecontainer responsivegrid bg-black article-top80 article-bottom80 aem-GridColumn aem-GridColumn--default--12"> <div class="container-wrapper aem-grid-area"> <div class="itemlist_Applications_custom"> <div> <div class="product-custom3-area bg-black applications-wrapper"> <div class="container-wrapper"> <div class="product-content-box"> <h2 class="element-h1 element-weight700 color-white1">Applications</h2> <h3 class="element-h2-light element-weight200 color-gray1 desktop-margin-top-20 mobile-margin-top-12">Perfect for Diverse Applications</h3> <div id="AppItem" class="list-box 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